CN202562500U - Single-track absolute grating ruler - Google Patents
Single-track absolute grating ruler Download PDFInfo
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- CN202562500U CN202562500U CN2012202387814U CN201220238781U CN202562500U CN 202562500 U CN202562500 U CN 202562500U CN 2012202387814 U CN2012202387814 U CN 2012202387814U CN 201220238781 U CN201220238781 U CN 201220238781U CN 202562500 U CN202562500 U CN 202562500U
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Abstract
The utility model discloses a single-track absolute grating ruler, comprising a light source, a reflector, incremental scaleplate grid lines, a glass substrate, a movable diaphragm, a photoelectric receiver and an indicating grating, wherein the light source and the reflector are assembled to form an illuminating light path, the glass substrate is engraved with the incremental scaleplate grid lines with equal width and equal distance, parallel and equidistant milestone marking positions are engraved below the incremental scaleplate grid lines on the glass substrate, the indicating grating is embedded in an opening on the left upper part of the movable diaphragm, an upper side CMOS sensor and a lower side CMOS sensor are respectively embedded in upper-lower symmetrical openings which are arranged on the right side of the movable diaphragm, the indicating grating is mounted by closely adhering to the glass substrate, the mounting position of the upper side CMOS sensor is aligned with the incremental scaleplate grid lines, the mounting position of the lower side CMOS sensor is aligned with the milestone marking positions, and moire fringes are formed by the light rays of the incremental scaleplate grid lines and the indicating grating and are projected to the photoelectric receiver. According to the single-track absolute grating ruler, the image information acquisition speed is improved, the measurement accuracy of coding is increased, the coding is reliable, the decoding is convenient, and the result can be given out quickly.
Description
Technical field
The utility model is the absolute grating chi of a kind of single track, belongs to the renovation technique of absolute grating chi.
Background technology
The basis of metrological grating technology is a Moire fringe, at first proposes the construction value of this pattern by Britain physicist L.Rayleigh in 1874, and people just begin to utilize the Moire fringe of grating to carry out precision measurement up to the 1950's.Nineteen fifty Germany Heidenhain initiative DIADUR duplication process, the photoetching duplication process of evaporation chromium plating on glass substrate just, this could make high precision, inexpensive grating rule, and the grating measurement instrument could be accepted by the user, the entering commodity market.Nineteen fifty-three Britain Ferranti company has proposed one 4 phase signals system; Can realize the segmentation of 4 frequencys multiplication a Moire fringe cycle, and can differentiate moving direction, 4 frequency multiplication phase demodulations technology that Here it is; Be the basis of optical grating measuring system, and widespread use always [1] so far.
Grating chi commonly used at present can be divided into increment type grating chi, half absolute type grating chi and absolute type grating chi, and the numerically-controlled machine manufacturing is used more.
Increment type grating chi is the most frequently used high-accuracy measurement mechanism; It has an actual zero point sign, and the scale grating is equally spaced thereafter, the relative scale grating motion of read head; The formed Moire fringe of the grid of process can pass through electric signal and handle, and obtains the distance of relative actual zero point.This measurement pattern is simple, but in use, owing to calibrate again near must getting back to actual zero point, so work efficiency is difficult to significantly improve [2]. at every turn
For adapting to the needs of numerically-controlled machine upgrading, half absolute type grating chi is generally used gradually.Half absolute type grating is that absolute rail is set on the increment grating; On absolute rail, designed a series of zero locatino gratings, confirmed the absolute position through the distance of surveying adjacent zero locatino grating during use, significantly reduced time zero time with the different distance coding; Improved work efficiency; In addition, this type grating chi can also send alerting signal to numerically-controlled machine when breaking down immediately, to guarantee the security of processing.
Recently; The appearance of absolute grating chi has caused the equipment manufacture revolutionary advancement, compares half absolute type grating chi, and specific coding grating chi has more advantages; Owing to corresponding absolute unique code value is all arranged at any point; So do not have cumulative errors, have characteristics such as measuring accuracy height, antijamming capability are strong, stable height, and can carry out non-linear correction.Specific coding scope in addition is big, so can measure the linear displacement [3] than wide range.
The structure of absolute grating chi is simple relatively; Its key point is the realization of specific coding; And each specific coding corresponding an absolute position on the grating scale; Starting point just subtracted each other to the absolute position of terminating point can obtain relative displacement, avoided cumulative errors, also eliminated the operation at retaking of a year or grade zero point.At present, some occur and planted specific coding method, the more multiple grating fringe coding field that concentrates on; The advantage of this coding is direct-reading file binary coding; Make things convenient for the photovalve reading of data, can improve the precision [4] of segmentation simultaneously, but shortcoming mainly is the portrayal difficulty that has improved the grating scale; Coding range is limited, is difficult to enlarge measurement range.
Single track specific coding technology has solved this difficult problem.Single track specific coding technology has been represented the developing direction of grating measuring in the world, and it has met quick measurement and these two kinds of trend of miniaturization.But because present single track specific coding relative complex, coding/decoding method is loaded down with trivial details, and error code rate is high, still not a large amount of popularizing.
The utility model content
The purpose of the utility model is to consider the problems referred to above and a kind of low yield rate of having avoided the multiple grating to make is provided, and has reduced manufacturing cost simultaneously, has improved the speed that image information is gathered, and improves the absolute grating chi of single track of the measuring accuracy of coding.The utility model is reasonable in design, and is convenient and practical.The utility model can reliably be encoded, convenient decoding reaches and provides the result fast.
The technical scheme of the utility model is: the absolute grating chi of the single track of the utility model; Include light source, catoptron, milestone zone bit, incremental scale grid line, glass substrate, upside cmos sensor, downside cmos sensor, move diaphragm, photelectric receiver, indication grating; Wherein light source and arrangement of mirrors constitute illumination path, and directional light is provided, and portrayal has incremental scale grid line wide, equidistance on the glass substrate; Glass substrate is portrayed the milestone zone bit that parallel equidistant is arranged below the incremental scale grid line; Move the upper left side opening of diaphragm, the embedded indication grating of this opening, the right of mobile diaphragm is symmetrical openings up and down; This symmetrical openings embeds upside cmos sensor and the downside cmos sensor that is used for images acquired information respectively; And indication grating is close to glass substrate the installation site aligning incremental scale grid line of upside cmos sensor, the installation site aligning milestone zone bit of downside cmos sensor is installed; Light source, mobile diaphragm and photelectric receiver relative position are installed on the moving chi; The moving relative glass substrate of chi can move forward and backward, light source, mobile diaphragm and photelectric receiver parallel motion simultaneously, and the light of incremental scale grid line and indication grating forms Moire fringe and is incident upon photelectric receiver.
Above-mentioned light source is a blue light source.
Above-mentioned milestone zone bit be expert at is made up of some equally spaced grid lines; It is down from null position; It is exactly the milestone zone bit that an absolute position mark is set at a certain distance, and the milestone zone bit is divided into the appearance that is used to indicate milestone and the milestone coding boundary marker grid line of end, is used to encode; Enlarge its figure place, can enlarge the interior efficient coding position of milestone striped group of the scope of coding; Be used to determine whether portray the efficient coding grid line position of the particular location of grid line, portrayal grid line place is expressed as 0, does not portray grid line and stays whitely, is expressed as 1 here, and the spacing of adjacent milestone zone bit is d.
Above-mentioned milestone zone bit waits width grid line position to form by 14, and it presents binary coding, and 14 grid lines can be formed from the numeral of 0-16383 scope.
The utility model compared with prior art has following advantage:
1) the utility model carries out specific coding through the single track grating, and the low yield rate of having avoided the multiple grating to make has reduced manufacturing cost simultaneously.
2) the utility model has utilized the CMOS sensing technology, has improved the speed that image information is gathered, and by the machining precision of semiconductor devices, improves the measuring accuracy of coding indirectly.
3) the utility model has been introduced micrurgy, and last is amplified surplus between grid line, utilizes pixel to insert pattern, further improves position encoded precision.
4) the utility model has reduced the conventional delta formula and has been coded in the importance in the measurement; But keep its partial function; For error code correction provides reference, thereby improved the reliability of absolute grating chi coding, decoding, when be absolute grating chi inefficacy simultaneously; As the backup survey instrument, nonserviceabling guarantees the certain measurement function of grating chi down.
The utility model is that a kind of design is ingenious, function admirable, the absolute grating chi of convenient and practical single track.
Description of drawings
Fig. 1 is the structural representation of the absolute grating chi of the single track of the utility model.
The absolute grating chi grating chi grid line of Fig. 2 the utility model constitutes synoptic diagram.
Segment instrumentation plan between the absolute grating footage number chi grating grid line of Fig. 3 the utility model.
Embodiment
Embodiment:
The structural representation of the structural representation of the absolute grating chi of the utility model single track is as shown in Figure 1, and in Fig. 1, light source 1, catoptron 2 constitute illumination path; The directional light of certain light intensity can be provided; In the present embodiment, light source 1 is a blue light source, is a kind of special source.When the ray cast of directional light arrives milestone zone bit 3 with incremental scale grid line 4; The projection meeting of grid line is scanned reception respectively by upside cmos sensor 6 and downside cmos sensor 7; Two cmos sensors are embedded in and move on the diaphragm 8, and light source 1, catoptron 2, mobile diaphragm 8, photelectric receiver 9 relative positions move the chi measuring system fixing the composition, all are parallel to glass substrate and move; The outside is connected with measuring junction mechanism; Move and embed an indication grating 10 on the diaphragm 8, light is received by photelectric receiver 9 through scale grid line 4 and the Moire fringe that indication grating 10 backs produce, and forms the simulation increment signal.Among Fig. 1, downside cmos sensor 7 can directly be gathered the coded message of milestone zone bit 3 images, and its coding numerical value is N
x, be the first absolute position encoder section, the absolute position that promptly milestone zone bit (3) is corresponding does
M′
x＝N
x×d
And upside cmos sensor 6 can directly be gathered incremental scale grating figure picture, but will rely on following technology to encode.
Increment grid line image coding technique is following:
In Fig. 2; When the sign grid line of milestone zone bit 3 striped groups appears at downside CMOS supervision array fully; Corresponding incremental scale grid line striped; Also instantaneous appearing on the upside CMOS sensor array, this striped will be by the image electronic system locks, and the grid line striped that surpasses milestone zone bit 3 striped groups will be preserved and encodes with the form of image.From image, the quantity that can tell concealed wire rapidly is K, and bidding chi grating spacing is δ, and the accurate increment distance L that surpasses the absolute position zone bit so then can be through obtaining the grid line quantity K in the increment grating figure, as follows
L＝K×δ
This is that second coding section and first coding section combine, and surveys the degree of accuracy of the position measurement of end with further improving moving chi.Milestone zone bit 3 is divided into several sections; Be efficient coding position 11, efficient coding grid line position 13 in milestone coding boundary marker grid line 12, the milestone striped group, the spacing of adjacent milestone zone bit 3 is d, and the scanning location is convenient on the border; Grid line can be portrayed in efficient coding grid line position 13; Be expressed as 0, also can stay whitely to be expressed as 1, the spacing of adjacent milestone zone bit 3 is the rough step-length that d has confirmed the coding location.
Like Fig. 3; Indication diaphragm lightproof area 19 left side end lines are between the scale grating two adjacent grid lines; During grating spacing of surplus displacement less than; If this scale grid line measurements surplus 16 is 1L, the measuring accuracy that this section moves will directly have influence on the measuring accuracy of the overall situation and the objectivity of specific coding.Make full use of the new technology of CMOS development at this, because the CMOS pixel 14 of left and right sides CMOS pixel spacing 18 occurs, CMOS pixel dimension 17 is also more and more littler, and subdivide technology is further upgraded.Utilize the projection micrurgy; Can be with 10 times of the 15 average amplifications of spacing between last scale grid line; Suppose and to be evenly distributed 100 pixel cells in this segment distance; With two grating spacing from being divided into 100 parts; Be that measuring accuracy can reach 0.1 σ, moving chi survey the travel distance of end between pixel can also through electronic fine-grained be 128 parts, make resolution can reach in
.I.e. the 3rd section specific coding of the coding of this part, this section coding can be divided into two parts, and promptly the numeric coding of scale grid line measurements surplus 1 an insertion integer pixel is B, is first's coding; The micro-segmentation value coding C that advances of CMOS pixel measurements surplus (20) so then can expand coding to resolution levels, and as follows, scale grid line measurements surplus 4 can be passed through following equation expression
Final absolute position encoder is made up of three parts: encode in milestone absolute reference dot mark position, relative position is encoded, segmentation is position encoded, because the position encoded middle C of segmentation partly is merely resolution levels, so only preserve the B part.
Through three sections codings, decoding, just can obtain the absolute position
The Moire fringe that above-mentioned indication grating 10 produces, the absolute position that obtains as low precision encoding and CMOS compares analysis, if error is in the reasonable scope, assert that then coding is normal; If exceed error range, then think code error, the reading images information coding contrast of being correlated with again, new code value is some like surface analysis data before equaling, thinks that then the code value of recompile is correct, otherwise then exports grating chi fault alarm information.
The principle of work of the utility model is following: be arranged in parallel under the incremental scale grating and equidistance has been portrayed milestone absolute reference point tick lables, this is masked as some grid lines compositions.The mode that can encode is a lot, and the scale-of-two and the decimal system etc. are arranged.With the scale-of-two is example, 16 grid line positions, and grid line position, end, the left and right sides is portrayed light tight grating all the time; As the coding boundary marker; In middle 14 grid line positions, every grid line position corresponding unique numeral 0 or 1, can form the different numerical coding of group surplus in the of 10,000 altogether; Like adjacent two milestone spacings is 1mm, and the codified scope will be above 10m.Indication has three perforates on the diaphragm, upper left one can printing opacity, lay indication grating, itself and the formed moire frange signal of scale grating can be received by photelectric receiver.The right such as has at width diaphragm opening; Embed a CMOS photo-sensitive cell up and down respectively; Upside CMOS is used for collecting incremental scale grid line image information, and downside CMOS is used for discerning milestone absolute position sign, is the first encoded segment N by the detected milestone absolute position encoder of downside CMOS
x, the grating projectin's dark space striped number that is obtained by upside CMOS is encoded to the second encoded segment K.The micro-amplification of deflection yoke is 10 times between two adjacent grid lines, and the number of pixels that segmentation is inserted is encoded to B, is encoded to C after deflection yoke segments 128 parts once more between last two pixels, and this part can be called the 3rd coding section.If adjacent two milestone spacings are d=2mm, scale grating spacing is δ=10 μ m, and the cmos pixel spacing is σ=1 μ m, absolute position M so
xCan obtain by following formula:
Because the C code value is represented this resolution levels in the 3rd coding section, also can't rise to precision grade, so final absolute position encoder will be by N
x, three coding sections such as K, B form.The indication diaphragm whenever moves to a position, and the CMOS of upper and lower sides will obtain N in the diaphragm
x, K, B coded message, through computes decoded, promptly can obtain current absolute location information.Owing to kept traditional increment type coded system, can coded message and the conventional delta formula coded message that image obtains have been compared, if error is in allowed band; Then output smoothly; Otherwise sampling contrast once more as still not being inconsistent, is then exported failure message.
Claims (4)
1. absolute grating chi of single track; It is characterized in that including light source (1), catoptron (2), milestone zone bit (3), incremental scale grid line (4), glass substrate (5), upside cmos sensor (6), downside cmos sensor (7), move diaphragm (8), photelectric receiver (9), indication grating (10); Wherein light source (1) constitutes illumination path with catoptron (2); The directional light of certain light intensity is provided; Glass substrate (5) is gone up portrayal has incremental scale grid line (4) wide, equidistance; Glass substrate (5) has the milestone zone bit (3) of parallel equidistant in the portrayal of the below of incremental scale grid line (4); Move the upper left side opening of diaphragm (8), the embedded indication grating of this opening (10), the right of mobile diaphragm (8) is symmetrical openings up and down; This symmetrical openings embeds upside cmos sensor (6) and the downside cmos sensor (7) that is used for images acquired information respectively; And indication grating (10) is close to glass substrate (5) the installation site aligning incremental scale grid line (4) of upside cmos sensor (6), the installation site aligning milestone zone bit (3) of downside cmos sensor (7) is installed; Light source (1), mobile diaphragm (8) and photelectric receiver (9) relative position are installed on the moving chi (21); Moving chi (21) glass substrate (5) relatively can move forward and backward, light source (1), mobile diaphragm (8) and photelectric receiver (9) parallel motion simultaneously, and the light of incremental scale grid line (4) and indication grating (10) forms Moire fringe and is incident upon photelectric receiver (9).
2. the absolute grating chi of single track according to claim 1 is characterized in that above-mentioned light source (1) is a blue light source.
3. the absolute grating chi of single track according to claim 1; It is characterized in that above-mentioned milestone zone bit (3) be expert at is made up of some equally spaced grid lines; It is down from null position; It is exactly milestone zone bit (3) that an absolute position mark is set at a certain distance, and milestone zone bit (3) is divided into the appearance that is used to indicate milestone and the milestone coding boundary marker grid line (12) of end, is used to encode; Enlarge its figure place, can enlarge the interior efficient coding position (11) of milestone striped group of the scope of coding; Be used to determine whether portray the efficient coding grid line position (13) of the particular location of grid line, portrayal grid line place is expressed as 0, does not portray grid line and stays whitely, is expressed as 1 here, and the spacing of adjacent milestone zone bit (3) is d.
4. the absolute grating chi of single track according to claim 3 is characterized in that above-mentioned milestone zone bit (3) waits width grid line position to form by 14, and it presents binary coding, and 14 grid lines can be formed from the numeral of 0-16383 scope.
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| CN2012202387814U CN202562500U (en) | 2012-05-24 | 2012-05-24 | Single-track absolute grating ruler |
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| CN2012202387814U CN202562500U (en) | 2012-05-24 | 2012-05-24 | Single-track absolute grating ruler |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102706373A (en) * | 2012-05-24 | 2012-10-03 | 广东工业大学 | Single-track absolute grating scale and image coding method thereof |
| CN103063239A (en) * | 2012-12-28 | 2013-04-24 | 广东工业大学 | Test platform and test method for absolute grating ruler |
| CN103411635A (en) * | 2013-07-26 | 2013-11-27 | 广东工业大学 | Code micro-macro combined collection method of absolute grating ruler |
| CN103557878A (en) * | 2013-07-26 | 2014-02-05 | 广东工业大学 | Absolute grating ruler multi-track encoding method |
| CN105973287A (en) * | 2016-05-04 | 2016-09-28 | 广东工业大学 | Multi-track absolute grating scale image coding and decoding method |
| CN111336928A (en) * | 2020-03-13 | 2020-06-26 | 中国科学院长春光学精密机械与物理研究所 | Metal reflective absolute grating ruler based on image detector |
-
2012
- 2012-05-24 CN CN2012202387814U patent/CN202562500U/en not_active Withdrawn - After Issue
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102706373A (en) * | 2012-05-24 | 2012-10-03 | 广东工业大学 | Single-track absolute grating scale and image coding method thereof |
| WO2013174216A1 (en) * | 2012-05-24 | 2013-11-28 | 广东工业大学 | Single-track absolute grating scale and image encoding method thereof |
| CN102706373B (en) * | 2012-05-24 | 2015-01-21 | 广东工业大学 | Single-track absolute grating scale and image coding method thereof |
| CN103063239A (en) * | 2012-12-28 | 2013-04-24 | 广东工业大学 | Test platform and test method for absolute grating ruler |
| CN103063239B (en) * | 2012-12-28 | 2016-03-23 | 广东工业大学 | A kind of absolute grating ruler test platform and method of testing thereof |
| CN103411635A (en) * | 2013-07-26 | 2013-11-27 | 广东工业大学 | Code micro-macro combined collection method of absolute grating ruler |
| CN103557878A (en) * | 2013-07-26 | 2014-02-05 | 广东工业大学 | Absolute grating ruler multi-track encoding method |
| CN103557878B (en) * | 2013-07-26 | 2015-12-02 | 广东工业大学 | A kind of multi-track coding method of absolute grating ruler |
| CN103411635B (en) * | 2013-07-26 | 2016-06-22 | 广东工业大学 | A kind of absolute grating ruler encodes grand micro-Combined Mining diversity method |
| CN105973287A (en) * | 2016-05-04 | 2016-09-28 | 广东工业大学 | Multi-track absolute grating scale image coding and decoding method |
| CN105973287B (en) * | 2016-05-04 | 2018-07-06 | 广东工业大学 | A kind of more rail absolute grating ruler image encoding/decoding methods |
| CN111336928A (en) * | 2020-03-13 | 2020-06-26 | 中国科学院长春光学精密机械与物理研究所 | Metal reflective absolute grating ruler based on image detector |
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| C14 | Grant of patent or utility model | ||
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Granted publication date: 20121128 Effective date of abandoning: 20150121 |
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| RGAV | Abandon patent right to avoid regrant |