CN201833188U - Air-floating type positioning platform - Google Patents
Air-floating type positioning platform Download PDFInfo
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- CN201833188U CN201833188U CN201020181255XU CN201020181255U CN201833188U CN 201833188 U CN201833188 U CN 201833188U CN 201020181255X U CN201020181255X U CN 201020181255XU CN 201020181255 U CN201020181255 U CN 201020181255U CN 201833188 U CN201833188 U CN 201833188U
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- float guide
- workbench
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Abstract
The utility model provides an air-floating type positioning platform, belongs to the technical field of machinery, and solves the problems of the prior art, such as poor positioning accuracy and difficulty in manufacture. The air-floating type positioning platform comprises a base, a workbench and two supporting plates, wherein the two supporting plates are arranged in parallel on the base and fixedly connected with the base; a first air-floating track and a second air-floating track are arranged between the workbench and the base, which both have T-shaped structures; the first air-floating track is arranged between the two supporting plates and fixedly connected with the supporting plates; a vacuum load air bearing is arranged on the base; and the second air-floating track is positioned on the vacuum load air bearing. The air-floating type positioning platform is supported by the two air-floating tracks with the T-shaped structure, adopts the planar vacuum load air bearing as a planar support for the workbench, and adopts the base made of marble. The air-floating type positioning platform not only has a simple structure but also reduces the difficulty in installation of the platform, increases the damping of the platform, ensures the vertical jumping operation of the whole workbench, and improves the accuracy and the load-carrying capacity of the workbench.
Description
Technical field
The utility model belongs to field of mechanical technique, relates to a kind of locating platform, particularly a kind of air-flotation type locating platform.
Background technology
Along with developing rapidly of precision processing technology and digital control technology, very high requirement has been proposed all for positioning accuracy, the speed of service, stroke and the automaticity etc. of micro-displacement work table.High accuracy and high-resolution precision micro-displacement system occupy extremely important status in sophisticated industry production in modern age and scientific research field, it is the key link that directly influences precision, ultra precision cutting level of processing, accurate measurement level and the super large-scale integration level of production, and its every technical indicator is the important symbol of various countries' high-tech development level simultaneously.As the key component in the microfabrication equipment, the development trend of workbench is high-speed, high accuracy, big stroke, but big stroke and high accuracy also are contradiction, stroke is big more, requirement kinematic error to workbench under identical precision is responsive more, and this is to the corresponding raising that requires of the processing of parts and installation accuracy and control accuracy.
For realizing precision machined specification requirement, the precision that the gas-static support pattern improves workbench has appearred on the market using on process equipment.The gas-static supporting is to be a kind of hydrostatic support of lubricant with gas.Gas-static supporting has friction, wearing and tearing, it is minimum to generate heat, operating accuracy height, advantage such as working range is wide.But because all there are defectives such as requirement on machining accuracy height, processing difficulties, manufacturing cost height in the hydrostatic support structure, so fail extensive use on various precisely locating platforms.
Summary of the invention
The purpose of this utility model is the problems referred to above at existing locating platform, and a kind of positioning accuracy height is provided, and makes, air-flotation type locating platform easy to assembly.
The purpose of this utility model can realize by following technical proposal: a kind of air-flotation type locating platform, comprise base, workbench and two gripper shoes, described two gripper shoes are set in parallel on the base and with base and are connected, described workbench is arranged on the base, it is characterized in that, be provided with between described workbench and the base and can make workbench along the air-float guide rail one that moves on the Y direction with can make workbench along the air-float guide rail two that moves on the directions X, air-float guide rail one is arranged to T type structure with air-float guide rail two, described air-float guide rail one is arranged between two gripper shoes, and two ends are connected with gripper shoe respectively, be provided with vacuum load air bearing on base, air-float guide rail two is positioned on the vacuum load air bearing.
The workbench of this air-flotation type locating platform is arranged on two air-flotation type guide rails, workbench can move around on the Y direction along air-float guide rail one, can move at directions X along air-float guide rail two again simultaneously, by of the supporting of vacuum load air bearing as workbench, make workbench on directions X or Y direction, have vertical jitter preferably when mobile, improve the precision and the bearing capacity of workbench.
In above-mentioned air-flotation type locating platform, be socketed with two air supporting covers outside the described air-float guide rail one, described air supporting cover is that the center is symmetrical arranged with air-float guide rail two, an end of described air-float guide rail two is connected two air supportings and puts.Two air supporting covers are set on the air-float guide rail one support air-float guide rail one, on the one hand in order to improve bearing capacity; On the other hand, make air-float guide rail one can have better positioning accuracy.
In above-mentioned air-flotation type locating platform, be socketed with an air supporting cover outside the described air-float guide rail two, above-mentioned workbench is arranged on air supporting and puts.The air supporting cover is set supports air-float guide rail two,, guarantee that air-float guide rail two has positional precision preferably in order to improve bearing capacity.
In above-mentioned air-flotation type locating platform, described base is provided with the piece that is located by connecting, and the other end of above-mentioned air-float guide rail two is connected with the piece that is located by connecting.
In above-mentioned air-flotation type locating platform, be provided with two one slide rails between the air supporting cover of described be located by connecting piece and air-float guide rail one, described slide rail and air-float guide rail two be arranged in parallel and the symmetrical both sides that are distributed in air-float guide rail two, one end is connected air supporting and puts, and the other end is connected with the piece that is located by connecting.
In above-mentioned air-flotation type locating platform, be provided with connecting plate between the air supporting of described air-float guide rail two and air-float guide rail one cover, the air supporting cover on described connecting plate and the air-float guide rail one is connected, and above-mentioned air-float guide rail two, an end of slide rail are connected on the connecting plate.Connecting plate is set, makes things convenient for air-float guide rail two and slide rail to install.
In above-mentioned air-flotation type locating platform, described air supporting puts and is connected with drive unit and feedback device, and described drive unit and feedback device form closed-loop system.Drive unit is realized moving of workbench, and feedback device assurance workbench can accurately be located.
In above-mentioned air-flotation type locating platform, described drive unit is a piezoelectric ceramic motor.Piezoelectric ceramic motor step resolution height has very high kinematic accuracy, thereby satisfies the high-accuracy requirement of locating platform.Can select other motor according to actual needs.
In above-mentioned air-flotation type locating platform, described feedback device comprises gratings strips and grating detection head.
Compared with prior art, air-flotation type locating platform of the present utility model has the following advantages:
1, two air-float guide rails adopt T type structure, compare with H type structure in the past, and it has reduced by a longitudinal rail, simplifies the structure, and has reduced the installation difficulty and the processing cost of platform;
2, select of the support of air supporting cover for use, adopt the flat bearing of plane air supporting vacuum load air bearing, guaranteed the vertical jitter of whole workbench, improved the precision and the bearing capacity of workbench as workbench as two guide rails;
3, base is selected the marble material for use, has improved the damping of platform, also reduced thermal coefficient of expansion, has reduced vibration, the variations in temperature influence to the platform precision.
Description of drawings
Fig. 1 is the perspective view of air-flotation type locating platform of the present utility model.
Fig. 2 is the front view of air-flotation type locating platform of the present utility model.
Fig. 3 is the A-A cutaway view of air-flotation type locating platform of the present utility model.
Fig. 4 is the left view of air-flotation type locating platform of the present utility model.
Among the figure, 1, base; 2, motor cushion block; 3, gripper shoe; 4, workbench; 5, connecting plate; 6, vacuum load air bearing; 7, air-float guide rail one; 8, air-float guide rail two; 9, air supporting cover; 10, the piece that is located by connecting; 11, slide rail; 12, pressing plate; 13, grating detection head gripper shoe; 14, motor pottery bar; 15, piezoelectric ceramic motor; 16, gratings strips; 17, grating detection head.
The specific embodiment
As depicted in figs. 1 and 2, air-flotation type locating platform of the present utility model comprises base 1, workbench 4, gripper shoe 3, air-float guide rail 1, air-float guide rail 28, air supporting cover 9, vacuum load air bearing 6, drive unit and feedback device.
As shown in Figure 4, air-float guide rail 1 is located between two gripper shoes 3, two ends lay respectively on the gripper shoe 3, by pressing plate 12 air-float guide rail 1 is connected on the gripper shoe 3, two air supporting covers 9 separately are socketed on the air-float guide rail 1, and overlap 9 both sides in air supporting and be provided with connecting plate 5, by connecting plate 5 two air supportings cover 9 is connected as a single entity.A connecting plate 5 therein is provided with gratings strips 16 and motor pottery bar 14.
Air-float guide rail 28 is arranged to T type structure with air-float guide rail 1, outside air-float guide rail 28, be socketed with an air supporting cover 9, air supporting cover 9 is arranged on the vacuum load air bearing 6, and an end of air-float guide rail 28 is connected on the connecting plate 5, and the other end is connected with the piece 10 that is located by connecting.
As shown in Figure 3, be located by connecting and be provided with two one slide rails 11 between piece 10 and the connecting plate 5, slide rail 11 be arranged in parallel with air-float guide rail 28 and the symmetrical both sides that are distributed in air-float guide rail 28, one end of slide rail 11 is connected on the connecting plate 5, the other end is connected with the piece 10 that is located by connecting, and an one slide rail 11 is provided with motor pottery bar 14 therein, and another one slide rail 11 is provided with gratings strips 16.
Be connected with drive unit and feedback device on air supporting cover 9, drive unit and feedback device form closed-loop system.Drive unit comprises a piezoelectric ceramic motor 15, and the motor at air-float guide rail one 7 places is arranged on the motor cushion block 2, and the motor at air-float guide rail 28 places is arranged on the slide rail 11.Feedback device comprises grating detection head 17, the grating detection head 17 at air-float guide rail one 7 places is located on two grating detection head 17 gripper shoes 13 between the gripper shoe 3, grating detection head 17 gripper shoes 13 two ends are connected with gripper shoe 3 respectively, and grating detection head 17 is located at same level height with gratings strips 16; The grating detection head 17 at air-float guide rail 28 places is arranged on slide rail 11 places of the side with gratings strips 16, and is arranged on the sustained height with gratings strips 16.
Claims (9)
1. air-flotation type locating platform, comprise base (1), workbench (4) and two gripper shoes (3), described two gripper shoes (3) are set in parallel in base (1) and upward and with base (1) are connected, described workbench (4) is arranged on the base (1), it is characterized in that, be provided with between described workbench (4) and the base (1) and can make workbench (4) along the air-float guide rail one (7) that moves on the Y direction with can make workbench (4) along air-float guide rail two (8) mobile on the directions X, air-float guide rail one (7) is arranged to T type structure with air-float guide rail two (8), described air-float guide rail one (7) is arranged between two gripper shoes (3), and two ends are connected with gripper shoe (3) respectively, be provided with vacuum load air bearing (6) on base (1), air-float guide rail two (8) is positioned on the vacuum load air bearing (6).
2. air-flotation type locating platform as claimed in claim 1, it is characterized in that, described air-float guide rail one (7) outer two the air supporting covers (9) that are socketed with, described air supporting cover (9) is that the center is symmetrical arranged with air-float guide rail two (8), and an end of described air-float guide rail two (8) is connected on two air supporting covers (9).
3. air-flotation type locating platform as claimed in claim 1 is characterized in that, is socketed with an air supporting cover (9) outside the described air-float guide rail two (8), and above-mentioned workbench (4) is arranged on the air supporting cover (9).
4. as claim 1 or 2 or 3 described air-flotation type locating platforms, it is characterized in that described base (1) is provided with the piece that is located by connecting (10), the other end of above-mentioned air-float guide rail two (8) is connected with the piece (10) that is located by connecting.
5. air-flotation type locating platform as claimed in claim 4, it is characterized in that, be provided with two one slide rails (11) between the air supporting cover (9) of described piece that is located by connecting (10) and air-float guide rail one (7), described slide rail (11) be arranged in parallel with air-float guide rail two (8) and the symmetrical both sides that are distributed in air-float guide rail two (8), one end is connected on the air supporting cover (9), and the other end is connected with the piece (10) that is located by connecting.
6. air-flotation type locating platform as claimed in claim 5, it is characterized in that, be provided with connecting plate (5) between the air supporting cover (9) of described air-float guide rail two (8) and air-float guide rail one (7), air supporting cover (9) on described connecting plate (5) and the air-float guide rail one (7) is connected, and above-mentioned air-float guide rail two (8), an end of slide rail (11) are connected on the connecting plate (5).
7. as claim 2 or 3 described air-flotation type locating platforms, it is characterized in that, be connected with drive unit and feedback device on the described air supporting cover (9), described drive unit and feedback device form closed-loop system.
8. air-flotation type locating platform as claimed in claim 7 is characterized in that, described drive unit is piezoelectric ceramic motor (15).
9. air-flotation type locating platform as claimed in claim 7 is characterized in that, described feedback device comprises gratings strips (16) and grating detection head (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201020181255XU CN201833188U (en) | 2010-04-16 | 2010-04-16 | Air-floating type positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201020181255XU CN201833188U (en) | 2010-04-16 | 2010-04-16 | Air-floating type positioning platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201833188U true CN201833188U (en) | 2011-05-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201020181255XU Expired - Fee Related CN201833188U (en) | 2010-04-16 | 2010-04-16 | Air-floating type positioning platform |
Country Status (1)
| Country | Link |
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| CN (1) | CN201833188U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI476065B (en) * | 2012-11-01 | 2015-03-11 | Univ Southern Taiwan Sci & Tec | Co-planar platform mechanism |
| CN105252505A (en) * | 2015-11-30 | 2016-01-20 | 中国计量科学研究院 | Precise air-floatation displacement platform |
| CN108020184A (en) * | 2016-10-28 | 2018-05-11 | 卡尔蔡司工业测量技术有限公司 | The Linear guide and coordinate measuring machine of coordinate measuring machine |
| CN109014457A (en) * | 2018-08-13 | 2018-12-18 | 中国纺织科学研究院有限公司 | A kind of air bearing for processing spinneret is guide locating device provided |
| CN110076734A (en) * | 2019-05-20 | 2019-08-02 | 青岛理工大学 | Pneumatic bellows drive ultraprecise two-dimensional localization platform |
| CN110375642A (en) * | 2019-07-31 | 2019-10-25 | 北京航空航天大学 | A kind of interferometer piezoelectric ceramic control device and its control method |
| CN117074739A (en) * | 2023-10-18 | 2023-11-17 | 盛吉盛(宁波)半导体科技有限公司 | Air floatation movement device for wafer detection |
-
2010
- 2010-04-16 CN CN201020181255XU patent/CN201833188U/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI476065B (en) * | 2012-11-01 | 2015-03-11 | Univ Southern Taiwan Sci & Tec | Co-planar platform mechanism |
| CN105252505A (en) * | 2015-11-30 | 2016-01-20 | 中国计量科学研究院 | Precise air-floatation displacement platform |
| CN108020184A (en) * | 2016-10-28 | 2018-05-11 | 卡尔蔡司工业测量技术有限公司 | The Linear guide and coordinate measuring machine of coordinate measuring machine |
| US10451397B2 (en) | 2016-10-28 | 2019-10-22 | Carl Zeiss Industrielle Messtechnik Gmbh | Linear guide for a coordinate measuring machine, and a coordinate measuring machine |
| CN109014457A (en) * | 2018-08-13 | 2018-12-18 | 中国纺织科学研究院有限公司 | A kind of air bearing for processing spinneret is guide locating device provided |
| CN109014457B (en) * | 2018-08-13 | 2024-03-26 | 中国纺织科学研究院有限公司 | Air floatation guiding and positioning device for processing spinneret plate |
| CN110076734A (en) * | 2019-05-20 | 2019-08-02 | 青岛理工大学 | Pneumatic bellows drive ultraprecise two-dimensional localization platform |
| CN110375642A (en) * | 2019-07-31 | 2019-10-25 | 北京航空航天大学 | A kind of interferometer piezoelectric ceramic control device and its control method |
| CN110375642B (en) * | 2019-07-31 | 2020-12-08 | 北京航空航天大学 | Piezoelectric ceramic control device for interferometer and control method thereof |
| CN117074739A (en) * | 2023-10-18 | 2023-11-17 | 盛吉盛(宁波)半导体科技有限公司 | Air floatation movement device for wafer detection |
| CN117074739B (en) * | 2023-10-18 | 2024-01-30 | 盛吉盛(宁波)半导体科技有限公司 | Air floatation movement device for wafer detection |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110518 Termination date: 20120416 |