CN201264218Y - External mechanical lapping device of glass substrate for planar display - Google Patents
External mechanical lapping device of glass substrate for planar display Download PDFInfo
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- CN201264218Y CN201264218Y CNU2008201312886U CN200820131288U CN201264218Y CN 201264218 Y CN201264218 Y CN 201264218Y CN U2008201312886 U CNU2008201312886 U CN U2008201312886U CN 200820131288 U CN200820131288 U CN 200820131288U CN 201264218 Y CN201264218 Y CN 201264218Y
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Abstract
The utility model relates to a device for mechanically grinding the outer side of a glass substrate used for a flat panel display. The device comprises a chamber used for grinding the glass substrate, a glass substrate retaining tool used for retaining the glass substrate at a specific position in the grinding treatment chamber, a plurality of spray nozzles used for spraying the liquid dissolved on the outer surface of the glass substrate towards the outer surface of the glass substrate, and a dissolved liquid feeding system. Under the additional weight acceleration of the dissolved liquid, the dissolved liquid is sprayed out of the spray nozzles onto the outer surface of the glass substrate to impact the glass substrate and to further grind the glass substrate with the physical grinding action resulted from the impact. The utility model can efficiently grind the glass substrate with excellent average performance through spraying the continuously dissolved liquid and can sufficiently grind the glass substrate with uneven glass composition or crystallized state on the surface by spraying the newly fed dissolved liquid so as to guarantee evener glass substrate surface.
Description
Technical field
The utility model relates to a kind of lapping device of glass substrate, particularly relates to a kind of relevant LCD or flat-panel screens such as plasma display panel, the organic electro-luminescent display exterior mechanical lapping device with glass substrate.
Background technology
Flat-panel screens such as LCD or plasma display panel (FPD) various e-machines such as uses for being widely used in computer display unit or TV imagescope with, mobile phone display part.Also have recently, and do not need the reactive good OLED display exploitation of high speed backlight, and expected future for self-luminous.
One of desired problem of this kind FPD is exactly slimming.Slimming follows the slimming of its e-machine that loads or miniaturization, lightweight to require.For example in notebook computer or the mobile phone, for requiring slimming more or lightweight, FPD also requires thinner more light weight thereupon.
Slimming or light-weighted important elements as FPD are exactly glass substrate.No matter LCD, plasma display panel or OLED display all adopt and paste a pair of substrate, face disposes the structure of element and electrode within it.Specific gravity of glass is heavier, and the necessity of guaranteeing mechanicalness intensity is arranged again, so thickness to a certain degree must be arranged.Therefore, the existence of glass substrate causes obstruction for slimming or the lightweight meeting of FPD.
In many FPD manufacturing engineerings, for adopting worker's method of from bigger a pair of glass substrate, producing most FPD, a pair of glass substrate is to comply with each FPD purposes of being produced, form element electrode respectively in each zone, and pasting etc. after engineering finishes, a pair of glass substrate can be cut into each zone, and then enters the modification engineering.
This kind produces worker's method of most FPD from a pair of glass substrate, simplifies because carry out the utmost point of engineering, and the advantage that can reduce manufacturing cost is arranged, but have glass substrate to become big tendency.For example in the manufacturing processing procedure of LCD, for using the glass substrate of size about 2000mm * 1800mm.When handling so big glass substrate, if glass substrate is too thin, then fracture easily, or because weight own and bending, thus to a certain degree thickness must be arranged.
On the other hand, be cut to each regional latter (semi-finished product) or become the finished product person, can make glass substrate be thinned to a degree, also because size is less and no problem.Japanese kokai publication hei 5-249422 communique wherein, disclose the relevant etching that thins glass substrate, this specification does not almost disclose particular content, though that is the explanation etching be to carry out with infusion method, but be to use which kind of etching solution, soak and how long wait, do not specify fully.Thereby in the disclosure of above-mentioned communique,, also be difficult to carry out this utility model even the dealer possesses implementing ability; Even can implement again,, also be judged as and be difficult to guarantee abundant quality with regard to the very important key element of FPD that is the viewpoint of flatness.
This shows that the lapping device of above-mentioned existing glass substrate obviously still has inconvenience and defective, and demands urgently further being improved in structure and use.The problem that exists for the lapping device that solves glass substrate, relevant manufacturer there's no one who doesn't or isn't seeks solution painstakingly, but do not see always that for a long time suitable design finished by development, and common product does not have appropriate structure to address the above problem, and this obviously is the problem that the anxious desire of relevant dealer solves.
Because the defective that the lapping device of above-mentioned existing glass substrate exists, the design people is based on being engaged in this type of product design manufacturing abundant practical experience and professional knowledge for many years, and the utilization of cooperation scientific principle, actively studied innovation, use the exterior mechanical lapping device of glass substrate in the hope of the flat-panel screens of founding a kind of new structure, can improve the lapping device of general existing glass substrate, make it have more practicality.Through constantly research, design, and after studying sample and improvement repeatedly, create the utility model that has practical value finally.
Summary of the invention
Main purpose of the present utility model is, overcome the defective of the lapping device existence of existing glass substrate, and the exterior mechanical lapping device of a kind of new flat-panel screens with glass substrate be provided, technical problem to be solved is it to be had the practical technique that can reach the FPD slimming is provided, thereby be suitable for practicality more, and have the value on the industry.
The purpose of this utility model and to solve its technical problem be to adopt following technical scheme to realize.According to the exterior mechanical lapping device of a kind of flat-panel screens that the utility model proposes with glass substrate, it comprises: a process chamber; One substrate keeps tool, and this substrate keeps the above-mentioned glass substrate of tool clamping to be arranged in the process chamber; A plurality of nozzles, this nozzle has spray-hole, and this spray-hole is towards the outer surface that is kept the above-mentioned glass substrate of tool clamping by aforesaid substrate, the dissolution fluid of the above-mentioned glass substrate outer surface material of ejection stripping; One dissolution fluid feed system has the dissolution fluid of the acceleration that weight own causes to above-mentioned those nozzle feeding additionals; And a travel mechanism, carry above-mentioned glass substrate, and move with respect to the spray-hole of nozzle.
The purpose of this utility model and solve its technical problem and can also be further achieved by the following technical measures.
Aforesaid flat-panel screens is arranged on the both sides that kept a pair of glass substrate of tool clamping by substrate with the exterior mechanical lapping device of glass substrate, wherein said nozzle.
Aforesaid flat-panel screens is with the exterior mechanical lapping device of glass substrate, and the distance of the spray-hole of wherein said nozzle till the above-mentioned glass substrate outer surface is in the scope of 5mm to 100mm.
The aforesaid flat-panel screens exterior mechanical lapping device of glass substrate, wherein said each spray-hole is with spaced set, and the distance from each spray-hole to above-mentioned glass substrate outer surface is identical.
Via as can be known above, the utility model is the exterior mechanical lapping device of a kind of flat-panel screens with glass substrate, do mechanical lapping for the glass substrate outer surface that is used for flat-panel screens is used and thin, it comprises: a process chamber, its inside are used to carry out the exterior mechanical milled processed; One is used in the substrate maintenance tool that above-mentioned glass substrate remains on ad-hoc location in the process chamber; Have the dissolution fluid with the above-mentioned glass substrate outer surface material of stripping, wherein this dissolution fluid is a fluoric acid, and a plurality of nozzles of the spray-hole that sprays towards the above-mentioned glass substrate outer surface that is kept tool to keep by aforesaid substrate; With a dissolution fluid feed system of above-mentioned those nozzles being supplied with dissolution fluid, it will be for adding the dissolution fluid of the acceleration that weight own causes, spray and impact above-mentioned glass substrate toward above-mentioned glass substrate outer surface, and the pressure that the physical action that can utilize impact to cause is ground comes said nozzle is supplied with the dissolution fluid person; And one travel mechanism with so that the above-mentioned glass substrate of injected dissolution fluid the spray-hole of nozzle is done mechanicalness relatively moves.
Wherein, above-mentioned dissolution fluid feed system is that above-mentioned dissolution fluid is sprayed from the spray-hole of said nozzle, and said nozzle is supplied with above-mentioned dissolution fluid for 0.5Kg/cm
2To 3.5Kg/cm
2The above-mentioned glass substrate outer surface of the compression shock of scope.Again, aforesaid substrate keeps tool to keep vertical for make above-mentioned glass substrate outer surface in dissolution fluid sprays; And said nozzle is to be arranged on the both sides that kept a pair of glass substrate that tool kept by substrate, in order to the in addition mechanical lapping of both sides' outer surface while of a pair of glass substrate after will binding.When the beginning of grinding, the distance of the spray-hole of said nozzle till the above-mentioned glass substrate outer surface is 5mm to 100mm person; And each spray-hole is uniformly-spaced coming a plurality of settings, and the distance till from each spray-hole to above-mentioned glass substrate outer surface is certain.
The utility model compared with prior art has tangible advantage and beneficial effect.By above technical scheme as can be known, in order to reach aforementioned goal of the invention, major technique of the present utility model thes contents are as follows:
The utility model proposes the exterior mechanical lapping device of a kind of flat-panel screens with glass substrate, it comprises that process chamber is used to carry out milled processed, with the substrate maintenance tool that is used to keep glass substrate ad-hoc location in process chamber; With the dissolution fluid of stripping glass substrate outer surface material, a plurality of nozzles of the spray-hole that sprays towards the glass substrate outer surface; And the dissolution fluid feed system of supplying with dissolution fluid, spray by nozzle by the dissolution fluid that will add the acceleration that weight own causes, toward ejection of glass substrate outer surface and impact glass substrate, the pressure that the physical action that utilizes impact to cause is ground carries out the grinding of glass substrate.The utility model sees through dissolution fluid without interruption and sprays, and can carry out grinding efficient and that evenness is good; Can also fully supply with new dissolution fluid and grind, even the glass composition of outer surface or the uneven glass substrate of crystalline state also can fully grind, and more guarantee higher flatness.
By technique scheme, the utility model flat-panel screens has following advantage at least with the exterior mechanical lapping device of glass substrate:
The utility model sees through dissolution fluid without interruption and sprays, and can carry out grinding efficient and that evenness is good.And the pressure of supplying with above-mentioned dissolution fluid at said nozzle is 0.5Kg/cm
2To 3.5Kg/cm
2Scope is ground so can fully supply with new dissolution fluid, also can make full use of physical action simultaneously, so even the glass composition of outer surface or the uneven glass substrate of crystalline state also can fully grind, and more guarantee higher flatness.
In sum, the flat-panel screens of the utility model special construction exterior mechanical lapping device of glass substrate, it has above-mentioned many advantages and practical value, and in like product, do not see have similar structural design to publish or use and really genus innovation, no matter it structurally or bigger improvement all arranged on the function, have large improvement technically, and produced handy and practical effect, and the lapping device of more existing glass substrate has the multinomial effect of enhancement, thereby be suitable for practicality more, and have the extensive value of industry, really be a novelty, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solutions of the utility model, for can clearer understanding technological means of the present utility model, and can be implemented according to the content of specification, below with preferred embodiment of the present utility model and conjunction with figs. describe in detail as after.
The specific embodiment of the present utility model is provided in detail by following examples and accompanying drawing thereof.
Description of drawings
Fig. 1 is the front schematic view of the exterior mechanical lapping device of embodiment of the present utility model.
Fig. 2 is the side generalized section of device shown in Figure 1.
Fig. 3 is the schematic perspective view that substrate keeps tool in the device of Figure 1 and Figure 2.
Fig. 4 is the schematic perspective view of nozzle form shown in Figure 2.
But Fig. 5 is to pasting the schematic diagram of the average ejection in panel outside dissolution fluid from spray-hole.
The specific embodiment
For further setting forth the utility model is to reach technological means and the effect that predetermined goal of the invention is taked, below in conjunction with accompanying drawing and preferred embodiment, to according to the flat-panel screens that the utility model proposes its specific embodiment of exterior mechanical lapping device, structure, feature and effect thereof with glass substrate. describe in detail as after.
The manufacture method of general FPD, with LCD is example, for adopting worker's method of from bigger a pair of glass substrate, producing most FPD, form engineering and Seal as electrode, a pair of glass substrate is to comply with each FPD purposes of being produced, and forms element electrode respectively in each zone, and pasting etc. after engineering finishes, a pair of glass substrate can be cut into each zone, and then enters the modification engineering, and just exterior mechanical grinds engineering.
In this specification, the face that a pair of substrate is faced one another is called " inner face " in addition, is called " outside " with the face of its opposition side.The exterior mechanical of present embodiment grinds engineering, is the both sides outside of a pair of glass substrate (hereinafter referred to as pasting panel) that will the paste engineering of mechanical lapping in addition.So-called " mechanical lapping " is for the grinding of the dissolution fluid physical action that utilizes so-called ejection pressure with make glass substrate meaning such as do that mechanicalness moves when grinding.So-called " doing mechanicalness moves " is the meaning of " utilizing machinery to move ".In addition, if make comparisons with the term of " reductions " that is " prune and reduce thickness ", as long as then because grind and prune the surface with regard to being bound to and reduce thickness, so " grinding " is the subordinate concept of " pruning ", this thing is clear naturally.
Seeing also Fig. 1, shown in Figure 2, is front skeleton diagram and the side sectional skeleton diagram of the utility model flat-panel screens with the exterior mechanical lapping device of glass substrate.
The utility model is the exterior mechanical lapping device of flat-panel screens with glass substrate, a kind of glass substrate outer surface that is used for flat-panel screens is used is done the device that mechanical lapping thins, it comprises one in order to carry out the process chamber 20 of exterior mechanical milled processed in inside, keep the substrate of glass substrate 10 to keep tool 30 with ad-hoc location in process chamber 20, and has a dissolution fluid L with above-mentioned glass substrate 10 outer surface materials of stripping, and towards being kept tool 30 to keep a plurality of nozzles 40 of the spray-hole 41 that above-mentioned glass substrate 10 outer surfaces spray by aforesaid substrate and nozzle 40 being supplied with the dissolution fluid feed system 50 of dissolution fluid L.In the present embodiment, because after glass substrate 10 is pasted, carry out the outer surface etching, so substrate keeps tool 30 can become the member of the glass substrate 10 after maintenance is pasted.
Possess in this process chamber 20 move into the glass substrate 10 pasted move into mouthfuls 21 and take out of mouthfuls 22 with what the glass substrate after the exterior mechanical milled processed 10 was taken out of.Move into mouth 21 and take out of mouth 22, for coming gauge tap to block lock 23.In addition, switch is for moving and carry out in the horizontal direction (as the paper vertical direction of Fig. 1) perpendicular to the carrying direction by blocking lock 23.
The utility model device possesses makes the spray-hole 41 of 10 pairs of nozzles 40 of glass substrate do the travel mechanism that mechanicalness relatively moves, and the person of this travel mechanism moves into mouth 21 and takes out of mouthful carrying mechanism 300 of 22 carrying glass substrates 10 for seeing through.Substrate keeps tool 30 for being set to constitute the member of carrying mechanism 300.
See also shown in Figure 3ly, be that substrate in the aforementioned means keeps the three-dimensional skeleton diagram of tool 30.The utility model flat-panel screens keeps tool 30 to be made of the substrate plate 31 of level and the stand pillar 32 that is arranged on substrate plate 31 and the buffering tool 33 that is installed in 32 on those pillars with the substrate of the exterior mechanical lapping device of glass substrate.
Those pillars 32 amount to and are provided with 4 for being separately positioned on the corner part of elongated rectangular substrate plate 31.Also be provided with the beam 34 that extends along the long side direction of substrate plate 31, connect each pillar 32 upper end and keep tool 30, and the height of each pillar 32 be for higher than the glass substrate 10 of standing in order to the reinforcement substrate.The interval of two pillars 32 of substrate plate 31 minor faces, also more greatly than the thickness of glass substrate 10, the interval of two pillars 32 on substrate plate 31 long limits, a little longer than glass substrate 10 length of having pasted, and this glass substrate 10 is held for inserting these pillar 32 formed spaces.
Those buffering tools 33 are directly to contact the member of glass substrate 10, and do not abut against glass substrate.Those buffering tools 33 for example form with fluorine resins such as Teflons for the material with can not be corroded for dissolution fluid L (resistance to chemical reagents is arranged) forms.
As shown in Figure 3, those buffering tools 33 are served as reasons and are connected the lower end person of setting of each pillar 32 at substrate plate 31 long side direction two ends, constitute the long side direction two ends connecting struts 32 upper end persons of setting with the same.Maintained glass substrate 10 is for contacting each bight of those buffering tools 33.The downside buffering tool 33 of 10 times vertex angle parts of contact glass substrate is short side direction section shape position concavity, and the long side direction section shape is L word shape person.The upside buffering tool 33 in the bight, upper end of contact glass substrate 10 is for the short side direction section shape is horizontal concavity.As shown in Figure 3, during glassing substrate 10,, drop in the recess that respectively cushions tool 33 for inserting from the top.
This carrying mechanism 300 is for for example there being breech lock and pinion gear mechanism institute constitutor.Carrying mechanism 300 constitutes breech lock substrate plate 31, and with a plurality of pinion 301 interlock persons, those pinions 301 are to be provided with so that specific interval is most along transfer line, and pinion 301 is for being configured in inside and outside the process chamber 20.In addition, suitably be provided with the guide member that the guiding moving substrate keeps tool 30.
As shown in Figure 2, those nozzles 40 can spray dissolution fluid L towards the outside, both sides of glass substrate 10 simultaneously for being arranged on two side positions that substrate keeps the glass substrate 10 of tool 30 maintenances.
Seeing also shown in Figure 4ly, is the utility model flat-panel screens with the schematic perspective view of the exterior mechanical lapping device of glass substrate nozzle 40 shapes shown in Figure 2.
Those nozzles 40 are for having the tubular element of spray-hole 41, and nozzle 40 disposes for extending in vertical direction, at the long side direction (carrying direction) of glass substrate 10 with equal uniformly-spaced a plurality of being arranged side by side.Those spray-holes 41 are for being arranged on the part that faces glass substrate 10 in the nozzle 40, at the bearing of trend (vertical direction) of pipe all uniformly-spaced to be provided with.As the structure of nozzle 40, also parallelism also more (or still less) shown in Figure 4 person's situation is arranged in addition, also have along the situation of horizontal direction or incline direction a plurality of nozzles 40 arranged side by side.Nozzle 40 does not need to be tubulose again, can be tabular or other shapes yet.
Dissolution fluid feed system 50 is served as reasons and is stored the liquid reservoir 51 of dissolution fluid L, with the pipe arrangement 52 that is connected liquid reservoir 51 and each nozzle 40, with be arranged on institutes such as valve 53 on the pipe arrangement 52 or liquid-feeding pump 54 and constitute, from the dissolution fluid L that is supplied with, remove the filter or the pressure regulation pump of impurity or rubbish etc., to be provided with in response to necessity.
Dissolution fluid L is by 50 pairs of each nozzles 40 of dissolution fluid feed system, sprays towards the outside of the glass substrate 10 that is kept tool 30 to keep by substrate from each spray-hole 41, and injected dissolution fluid L can impact the dissolving outside and grind the outside.
In addition as shown in Figure 1, the bottom of process chamber 20 becomes funnel-form, and foot is provided with a tap 24, and this tap 24 is for being connected with the discharge pipe 25 of discharging the dissolution fluid L after using.As mentioned above, dissolve in the dissolution fluid L of the material that glass substrate 10 is arranged, can drop to this process chamber 20 bottoms, see through tap 24 and be discharged from by this discharge pipe 25.
The surface of each member needs dissolution fluid L is had the structure of resistance to chemical reagents in the internal face of process chamber 20, or process chamber again 20.When for example dissolution fluid L was fluoric acid, internal face or each component surface were coated with the structure that is coated with fluorine resins such as Teflon for becoming.In addition, switch is moved into mouth 21 or is taken out of the blockade lock 23 of mouth 22, for blocking design so that dissolution fluid L is flowed out.
The device of present embodiment is because will improve the flatness of outside after the mechanical lapping more, so construct and will work hard especially for nozzle 40.Below at this point, use Fig. 4 and Fig. 5 to illustrate.
Seeing also shown in Figure 5ly, is that the utility model is expression on average sprays dissolution fluid L from 41 pairs of glass substrate 10 outsides of each spray-hole a schematic diagram.
Wherein each spray-hole 41 is to spend the elongated of directions for the pipe bearing of trend (vertical direction) of nozzle 40 for inclination 45, therefore, will be diffused as long cone shape (or horn-like) at this incline direction as shown in Figure 4 from each spray-hole 41 injected dissolution fluid L.
Fig. 5 is the dissolution fluid L of expression from each spray-hole 41 ejection of a nozzle 40.Looking from glass substrate 10 short transverses for expression in Fig. 5 right side, distributes from the emitted dose of the dissolution fluid L of each spray-hole 41.At this moment, face and the outside of the position, middle by two neighbouring spray-holes 41 on put P, can accept the supply of dissolution fluid L from these two adjacent spray-holes 41.At this moment, this P is positioned at the diffusion end of the dissolution fluid L of long cone shape, so shown in Fig. 5 right side, the amount of the dissolution fluid L that accepts from a spray-hole 41, be about 1/2 of other points, and supply with the dissolution fluid L that two adjacent spray-holes 41 up and down receive 1 spray-hole 41 deal.Therefore, in the short transverse of glass substrate 10, the dissolution fluid L quantity delivered of outside each point is average.In addition, just not spreading the situation of dissolution fluid L with section shape shown in Figure 4, also can be the situation that section shapes such as oval, circular, square (square, rectangle), rhombus, parallelogram shape spread dissolution fluid L.
The action of said apparatus now is described.Above-mentioned Seal is arranged and glass substrate 10 after finishing, keep tool 30 for outside process chamber 20, being loaded in substrate.Load action, the situation that useful robot carries out, the situation that also has the hand by operator to carry out.Before substrate being kept tool 30 loadings, also carry out the covering that Covering adhesive tapes caused sometimes.
After carrying out the dissolution fluid L injection of special time, stop liquid-feeding pump 54, shut off valve 53.Carrying mechanism 300 can move then, makes substrate keep tool 30 to move, and opens the blockade lock 23 of taking out of mouth 22 glass substrate 10 is taken out of outside the process chamber 20.By the glass substrate 10 of being taken out of, for carrying out that detergent removers such as pure water are cleaned or operation such as Covering adhesive tapes removal.
In the action of said apparatus, in spraying, dissolution fluid L also can make glass substrate 10 displacements sometimes in response to necessity.On the outside of glass substrate 10 in the each point, when each spray-hole 41 to each nozzle 40 is that its surge of point of beeline is when too high, then by in dissolution fluid L sprays, glass substrate 10 being moved forward and backward, can make the surge equalization of the each point behind the time average.By this, can improve the flatness of outside after the mechanical lapping more.Moving of glass substrate 10 also has at above-below direction and advances passerby.
In the structure of said apparatus, the liquor charging pressure that liquid-feeding pump 54 causes is that the surge that the dissolution fluid L outside being set at causes is 0.5Kg/cm again
2To 3.5kg/cm
2Scope.Each spray-hole 41 of each nozzle 40 just becomes key factor with the distance (representing with d as Fig. 2) of outside at this moment.If excessive apart from d, if then do not improve the liquor charging pressure of liquid-feeding pump 54, just can't be with outside the interior compression shock of above-mentioned scope, and be difficult to practicality.Again hour apart from d, though keep the optimum value of surge easily, can be too high toward the surge of spray-hole 41 the shortest points, on the evenness viewpoint, can have problems.For utility structure as the evenness of guaranteeing to impact (that is grinding flatness), apart from d being good below the above 100mm of 5mm.The afoot process of the grinding of dissolution fluid L in addition though the distance till from spray-hole 41 to the outside can be elongated a little, is actual distance when beginning to grind below the above 100mm of 5mm.
Again if impulsive force compares 0.5Kg/cm
2Little, then can't fully grind because the supply of new dissolution fluid L is less, physical action is also insufficient in addition, so then can't fully grind in the uneven place of glass ingredient or crystalline state, and the problem of flatness reduction is arranged.Again if surge compares 3.5Kg/cm
2Greatly, then having only can be by more grinding from the shortest point of the spray-hole 41 of nozzle 40, and this point can make flatness worsen.Therefore, as 0.5Kg/cm
2To 3.5Kg/cm
2The surge of scope is desirable.
If according to said apparatus, except the chemical action of dissolution fluid L, also utilize the so-called physical action that impacts to carry out the outside and grind, so can carry out the grinding of high flatness; And because the carrying of glass substrate 10 and mechanical lapping are handled all by automation, so productivity is also high.
Each spray-hole 41 of nozzle 40 is for all uniformly-spaced to be provided with again, and the distance till from each spray-hole 41 to the outside is certain, so make the surge of injected dissolution fluid L average easily, this can bring contribution to the higher milled processed of flatness.Keep glass substrate 10 to dissolve this point for vertical state again, the effect that has the dissolution fluid L that promotes the outside to replace is carried out the technical meaning that exterior mechanical grinds and have with abundant efficient.
More and, nozzle 40 is arranged on the both sides of glass substrate 10, both sides outside can be made simultaneously mechanicalness and be ground, so except can more having the contribution the slimming of glass substrate 10, productivity is also higher.
In the structure of the respective embodiments described above, grind outside that dissolution fluid L brings, for utilizing the physical property actor of the impact that dissolution fluid L causes, and only is immersed in etching solution or the etchings such as being afraid of etching solution of only loosing has substantial different.
In the above-mentioned again implementation method,, also can before pasting, carry out the exterior mechanical milled processed sometimes though after pasting a pair of glass substrate 10, carry out the exterior mechanical milled processed.At this moment, grind for before carrying out electrode formation engineering, carrying out exterior mechanical, or before forming colored filter, carry out exterior mechanical and grind.This moment, substrate kept tool 30, also can constitute only to keep a slice glass substrate 10.Though when glass substrate 10 attenuation can produce strength problem, if do mechanical lapping with strong acid such as fluoric acids, then the strong acid effect has the secondary effect of reinforcement, even attenuation does not have problem yet.More and, also have and after cutting apart engineering, carry out the exterior mechanical grinder.Again, also keep a plurality of glass substrates 10 sometimes simultaneously, carry out the exterior mechanical milled processed simultaneously.
In the device of above-mentioned embodiment, be travel mechanism again, also can travel mechanism be set respectively with carrying mechanism 300 though make carrying mechanism 300 double as.For example sometimes substrate is kept tool 30 to be set to the part of travel mechanism, the glass substrate 10 that carrying mechanism 300 is carried moves and is put into substrate and keeps tool 30, is moved.So-called " relatively moving " in addition, purport are the glass substrate 10 and the position of the spray-hole 41 of nozzle 40 to be closed to changing ground move; Can move glass substrate 10 as the spray-hole 41 to static nozzle 40 as the above-mentioned embodiment, also can move both again static glass substrate 10 movable spray holes 41.
Though adopt LCD in the explanation of above-mentioned embodiment, situations such as plasma display panel or OLED display are suitable for too.Because it is backlight that these FPD do not need, so be not glass substrate 10 with the substrate of emitting side opposition side sometimes.That is to have only sometimes be glass substrate 10 on one side.Again in the utility model, one side can also can obtain the effect of this case utility model this moment to carrying out the exterior mechanical milled processed in a pair of glass substrate 10.
The above, it only is preferred embodiment of the present utility model, be not that the utility model is done any pro forma restriction, though the utility model discloses as above with preferred embodiment, yet be not in order to limit the utility model, any those skilled in the art, in the scope that does not break away from technical solutions of the utility model, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be not break away from the technical solutions of the utility model content, foundation technical spirit of the present utility model is to above any simple modification that embodiment did, equivalent variations and modification all still belong in the scope of technical solutions of the utility model.
Claims (4)
1, a kind of flat-panel screens exterior mechanical lapping device of glass substrate is characterized in that it comprises:
One process chamber (20);
One substrate keeps tool (30), and this substrate keeps the above-mentioned glass substrate of tool (30) clamping (10) to be arranged in the process chamber (20);
A plurality of nozzles (40), this nozzle (40) has spray-hole (41), this spray-hole (41), towards the outer surface that is kept the above-mentioned glass substrate (10) of tool (30) clamping by aforesaid substrate, the dissolution fluid (L) of the ejection above-mentioned glass substrate of stripping (10) outer surface material;
One dissolution fluid feed system (50) has the dissolution fluid (L) of the acceleration that weight own causes to above-mentioned those nozzles (40) feeding additional; And
Above-mentioned glass substrate (10) is carried in one travel mechanism, and moves with respect to the spray-hole (41) of nozzle (40).
2, flat-panel screens according to claim 1 is characterized in that with the exterior mechanical lapping device of glass substrate wherein said nozzle (40) is arranged on the both sides that kept a pair of glass substrate (10) of tool (30) clamping by substrate.
3, flat-panel screens according to claim 1 is with the exterior mechanical lapping device of glass substrate, and the distance of the spray-hole (41) that it is characterized in that wherein said nozzle (40) till above-mentioned glass substrate (10) outer surface is in the scope of 5mm to 100mm.
4, the flat-panel screens according to claim 1 exterior mechanical lapping device of glass substrate, it is characterized in that wherein said each spray-hole (41) with spaced set, and the distance from each spray-hole (41) to above-mentioned glass substrate (10) outer surface is identical.
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| Application Number | Priority Date | Filing Date | Title |
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| CNU2008201312886U CN201264218Y (en) | 2008-08-07 | 2008-08-07 | External mechanical lapping device of glass substrate for planar display |
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|---|---|---|---|
| CNU2008201312886U CN201264218Y (en) | 2008-08-07 | 2008-08-07 | External mechanical lapping device of glass substrate for planar display |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102059646A (en) * | 2009-11-18 | 2011-05-18 | 可永佳股份有限公司 | Method for rubbing flat-panel display |
| CN104209867A (en) * | 2013-08-27 | 2014-12-17 | 东旭集团有限公司 | Method and system for carrying out surface treatment on glass substrate |
| CN111805436A (en) * | 2020-06-24 | 2020-10-23 | 哈尔滨鼎智瑞光科技有限公司 | Metal surface polishing and grinding device and method based on additive manufacturing |
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2008
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102059646A (en) * | 2009-11-18 | 2011-05-18 | 可永佳股份有限公司 | Method for rubbing flat-panel display |
| CN102059646B (en) * | 2009-11-18 | 2014-04-16 | 可永佳股份有限公司 | Method for rubbing flat-panel display |
| CN104209867A (en) * | 2013-08-27 | 2014-12-17 | 东旭集团有限公司 | Method and system for carrying out surface treatment on glass substrate |
| CN111805436A (en) * | 2020-06-24 | 2020-10-23 | 哈尔滨鼎智瑞光科技有限公司 | Metal surface polishing and grinding device and method based on additive manufacturing |
| CN111805436B (en) * | 2020-06-24 | 2022-07-01 | 哈尔滨学院 | Metal surface polishing and grinding device and method based on additive manufacturing |
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