CN201112364Y - Bearing disc - Google Patents

Abstract

The utility model discloses a bearing disc, which comprises a disc body and a V-shaped groove opened on the outer circumference of the disc body along the axial direction, wherein the disc body is made of silicon carbide ceramics. A plurality of micro-pores are processed on and pass through the surface of the disc body along the axial direction; and the diameter of the micro-pore is equal to or less than 0.02 mm, and the porosity of the micro-pore is equal to or more than 30%. Compared with the prior bearing disc, the bearing disc of the utility model has the advantages of (1) hydraulic resistance, thus facilitating the passing of various gas or fluid; (2) high hole density, and large specific surface area, thereby having the effects of filtering and purifying; (3) high temperature resistance, small coefficient of heat expansion, and good heat storage function; and (4) better acid and corrosion resistance ability. Due to the above advantages, the aims of improving the productivity efficiency and the production capacity of large scale integrated circuit can be reached.

Description

Carrier

Technical field

The utility model relates to the carrier that is used for the large scale integrated circuit production process.

Background technology

At present, the carrier that is used for the large scale integrated circuit production process mostly is entity structure, therefore in use the disk body gas permeability is poor, in the bearing integrated chip processes, make excessive glue on the chip and the gas hold-up that given out on the carrying card, directly influenced the production efficiency and the product quality of large scale integrated circuit.

The utility model content

The utility model purpose is to provide a kind of carrier that improves large scale integrated circuit production efficiency.

For achieving the above object, the utility model can be taked following technical proposals:

Carrier described in the utility model, it comprises disc, is opened in the V-shaped groove on the described disc outer peripheral face vertically, described disc is made by thyrite; On the card of disc, run through card vertically and offer a plurality of micropores; Aperture≤the 0.02mm of described micropore, porosity 〉=30%.

The utility model is owing to run through a plurality of micropores that card offers aperture≤0.02mm vertically on the card of described disc, the porosity of its micropore 〉=30%, therefore, with existing carrier contrast, its advantage be mainly reflected in following some:

1, fluid resistance is little, can freely pass through all gases or liquid;

2, hole density height, specific area is big, can play the filtration, purification effect;

3, high temperature resistant, thermal coefficient of expansion is little, good good heat accumulation function;

4, has better antiacid caustic corrosion ability.

Because the above-mentioned advantage that is had improves large scale integrated circuit production efficiency and production scale purpose thereby reach.

Description of drawings

Fig. 1 is a front view of the present utility model.

Fig. 2 is the A portion zoomed-in view of Fig. 1.

Embodiment

As shown in the figure, carrier described in the utility model, it comprises disc 1, is opened in the V-shaped groove 2 on described disc 1 outer peripheral face vertically, described disc 1 is made by thyrite; On the card of disc 1, run through card vertically and offer a plurality of micropores 3; Aperture≤the 0.02mm of described micropore 3, porosity 〉=30%.

Claims (1)

1, a kind of carrier, it comprises disc (1), is opened in the V-shaped groove (2) on described disc (1) outer peripheral face vertically, it is characterized in that: described disc (1) is made by thyrite; On the card of disc (1), run through card vertically and offer a plurality of micropores (3); Aperture≤the 0.02mm of described micropore (3), porosity 〉=30%.

Images