CN200993249Y - Non-movable-part micro valve - Google Patents

Non-movable-part micro valve Download PDF

Info

Publication number
CN200993249Y
CN200993249Y CN 200620158422 CN200620158422U CN200993249Y CN 200993249 Y CN200993249 Y CN 200993249Y CN 200620158422 CN200620158422 CN 200620158422 CN 200620158422 U CN200620158422 U CN 200620158422U CN 200993249 Y CN200993249 Y CN 200993249Y
Authority
CN
China
Prior art keywords
passage
little valve
inlet channel
valve
curved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 200620158422
Other languages
Chinese (zh)
Inventor
刘世炳
黄永光
陈涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing University of Technology
Original Assignee
Beijing University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing University of Technology filed Critical Beijing University of Technology
Priority to CN 200620158422 priority Critical patent/CN200993249Y/en
Application granted granted Critical
Publication of CN200993249Y publication Critical patent/CN200993249Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Lift Valve (AREA)

Abstract

The utility model relates to a micro valve without movable parts, belongs to the technology field of micro computer electricity system, comprising an inlet passage (1), a bend passage and a spread passage (6); wherein, the inlet passage (1) is a lead out passage, the inlet passage trail namely a branch (3) part appears distributary, one is a continuative forward outspread lead out passage, another is a diffused bend passage, which comprises a bend passage inlet (10) and a semicircle passage (2); the bend passage links the lead out passage through the bend passage inlet (10), which links the spread passage (6) through the semicircle passage (2), the lead out passage after distributing flow links the spread passage (6) at an accordant junction mouth (4). The utility model achieves a certain degree unidirectional flow, does not need a movable valve, just only need surface processing, largely reduces the manufacture trouble and cost.

Description

A kind of little valve that does not have movable member
Technical field
The utility model relates to a kind of little valve that does not have movable member, is the little valve of a kind of on-mechanical in the fluid MEMS, belongs to MEMS (MEMS) field.
Background technique
Little valve is the important composition parts that play the control metering function in the microfluidic system, can be divided into one-way valve and switching valve by the function of valve; By there being no-movable part can be divided into mechanical valve and on-mechanical valve in the valve; By having or not actuator can be divided into aggressive valve and passive valve in the valve.Common comprising utilizes that little processing generates in micro-fluidic with the similar micro-mechanical valve of traditional major valve and utilize the surface tension valve of the different realizations of hydrophilic hydrophobic property of pipeline enclosure.
The principle of micro-mechanical valve is similar to traditional major valve, generally has movable valve block, as film, by the opening and closing of different actuating mode (comprising electrostatically actuated, piezoelectric actuated, thermal actuation, Electromagnetically actuated, ultrasound actuating, the actuating of pneumatic, electric liquid, bubble actuating, memory alloy diaphragm etc.) control valve.This micro-mechanical valve belongs to aggressive valve, and the ratio of precision of control is higher, but there is movable member in this valve, damages easily, and some need carry out three-dimensional little processing and little assembling, and these all are the problems that does not also have fine solution now.
Utilize the hydrophilic hydrophobic property of micro passage material also can realize the function of valve, in the micro passage, utilize the hydrophilic and hydrophobic matter of special contraction extended channel respective outer side edges pipeline material, form the critical pressure differential that can allow fluid pass through, fluid can pass through when greater than this pressure reduction, when less than the time fluid can not pass through, thereby realize the function of valve.This valve does not have movable member, realizes simply, but this hydrophilic and hydrophobic matter is relevant with the material property of pipeline wall also relevant with working fluid, and is different for this critical pressure differential of different liquid, and this back pressure is very low usually, occurs easily leaking.In addition, biochemistry liquid has chemical capacity and may make the hydrophilic hydrophobic property of wall change.
The model utility content
In order to overcome problem that micro-mechanical valve mobile unit self exists and the difficulty on the manufacture method thereof and hydrophobic hydrophilic valve high request to pipe wall material, the utility model provides a kind of micro passage with special construction to realize controlling the function of one-directional fluid flow, belongs to a kind of complementary on-mechanical one-way valve.
The utility model has been taked following technological scheme.This structure mainly includes inlet channel 1, curved passage, diffusion admittance 6, wherein, inlet channel 1 is a straight passage, shunting appears in the afterbody at inlet channel, and one is the straight passage that continues to extend forward, and another is the curved passage of band diffusion, curved passage comprises curved feeder connection 8 and semicircular ring passage 2, curved passage is communicated with straight passage by curved feeder connection 8, and curved feeder connection 8 is communicated with diffusion admittance 6 by semicircular ring passage 2, and the straight passage after the shunting is communicated with diffusion admittance 6 at mouthful 4 places of confluxing; The span of the straight line in more than half circular ring path 2 centers of circle of the joint of semicircular ring passage 2 and diffusion admittance 6 and the axis angulation α of inlet channel 1 is 40 °~60 °; The width of supposing inlet channel 1 is w, and the width at the curved feeder connection place that is communicated with inlet channel 1 is taken as 2.5w; Lower extreme point with inlet channel 1 is an initial point, is X direction with the Way in, is y direction with the direction vertical with Way in, and then the central coordinate of circle of semicircular ring passage 2 is that (L+r, R+a), the scope of a is w/2~w.
Can little valve series connection that a N recited above structure is identical use, the inlet that is about to second little valve 9 tiltedly is communicated with the outlet of first little valve 8, this kind series connection method successively, the import of N little valve is communicated with the outlet of N-1 little valve, the import of first little valve 8 is the import of whole cascaded structure, and the outlet of N little valve is the outlet of whole cascaded structure.
The series connection of described N little valve can be an axis with inlet channel 1, the curved passage of each little valve is successively set on the both sides of inlet channel 1, also the curved passage of each little valve all can be arranged on the homonymy of inlet channel 1, the axis of the inlet channel of the axis of previous little valve inlet passage and a back little valve can be point-blank.
The span of described N is more than or equal to 2.
The cross section of forming each passage of little valve all is rectangles.
The span of the width w of described inlet channel 1 is 50~200 microns, and the height of inlet channel 1 is h, depth-to-width ratio, and promptly h/w is taken as 1.5~2.5, and the length L of inlet channel 1 is greater than 1.5w.
The exradius R of described semicircular ring passage 2 is taken as 2~2.5 times w, interior circle radius r=R-w.
Diffusion admittance 6 connects the bend outlet, and the span of its diffusion half-angle β is 3 °~5 °.
Working principle of the present utility model: little valve arrangement of this one-way flow control by inlet channel 1, curved passage 2, conflux mouthfuls 4 and diffusion admittance form for 6 sections.This structural design is according to the bend effect of microfluid, Elementary Function EFs such as ram's horns, collecting pipe, expanding duct are integrated in one, and adopted the structural parameter of optimizing, utilize the fluid that exists in special effect and the shunting that the pressure local losses of fluid in flowing produce and the process of confluxing to block mutually and realize the unidirectional control of channel design itself microfluidic flow.This structure is in when work, and inlet channel 1 is connected with the fluid drives unit to get final product, and generally realizes driving by the generation fluid pressure difference.From the liquid of 7 inflows that enter the mouth, to shunt during through commentaries on classics fork 3, the liquid after the shunting converges at the mouth 4 that confluxes through curved passage 2 and straight passage respectively again, and the resistance that this process-liquid is subjected to is less.But when reverse relative pressure, the pressure that promptly exports 5 places is during greater than the pressure at inlet 1 place, liquid flows into from original outlet 5, shunts through the mouth 4 that confluxes, and through the liquid behind the curved passage 2 fluid through straight passage is produced certain retardation at 3 places, minute fork.
The fluid control unit of this no movable valve has been realized one-way flow to a certain degree, and one-way flow efficient reaches more than 1.4, and does not need movable valve, only needs can realize with surface Machining, has significantly reduced manufacture difficulty and cost.
Description of drawings
The surface structure schematic representation of the little valve of Fig. 1 one-way flow
The perspective view of the little valve of Fig. 2 one-way flow
Tandem compound mode 1 schematic representation of 4 little valves of one-way flow of Fig. 3 (a)
Tandem compound mode 2 schematic representation of 4 little valves of one-way flow of Fig. 3 (b)
The ratio of the forward and reverse generation pressure drop of the pipeline of Fig. 4 under same entrance velocity
Among the figure: 1, inlet channel, 2, curved passage, 3, change the fork, 4, the mouth that confluxes, 5, outlet, 6, diffusion admittance, 7, inlet, 8, first little valve, 9, second little valve, 10, curved feeder connection.
Embodiment
Describe present embodiment in detail below in conjunction with Fig. 1~Fig. 3.
The concrete structure of present embodiment as shown in Figure 1 and Figure 2, the cross section of each passage of this structure is rectangle, the cross-sectional width of inlet channel 1 is w, w can get 50~200 microns, the height of inlet channel 1 is h, depth-to-width ratio (h/w) generally gets 1.5.Inlet channel 1 is a straight passage, and its length L is 3w.Afterbody at inlet channel 1, promptly shunting has appearred in 3 places, branch fork, divides for two passages, and one is the straight passage that continues to extend forward along the straight passage direction, another is the curved passage of band diffusion, and curved passage is made up of curved feeder connection, the semicircular ring passage 2 of big diffusion.Curved feeder connection is communicated with inlet channel 1, and is communicated with diffusion admittance 6 by the semicircular ring passage.The width at the curved feeder connection place that is communicated with inlet channel 1 is taken as 2.5w.Semicircular ring passage 2 is 60 ° with the straight line in more than half circular ring path 2 centers of circle of the joint of diffusion admittance 6 and the axis angulation α of inlet channel 1.Diffusion admittance 6 connects the bend outlet, and its diffusion half-angle β is 3 °.
The exradius of semicircular ring passage 2 is R=2w, interior circle radius r=R-w, and two round heart positions overlap, and coordinate is that (L+r R+2w/3), is an initial point with the lower extreme point 0 that enters the mouth, and Way in is an X direction, and the direction vertical with Way in is y direction.
N the structure of being mentioned in the present embodiment can be used in identical little valve series connection, as shown in Figure 3, the inlet that is about to second little valve 9 tiltedly is communicated with the outlet of first little valve 8, this kind series connection method successively, the import of N little valve is communicated with the outlet of N-1 little valve, the import of first little valve 8 is the import of whole cascaded structure, and the outlet of N little valve is the outlet of whole cascaded structure.
The series connection of N little valve can be an axis with inlet channel 1, the curved passage of each little valve all can be arranged on the homonymy of inlet channel 1, shown in Fig. 3 (a).Also the curved passage of M wherein little valve can be arranged on a side of inlet channel 1, N-M little valve be arranged on the opposite side of inlet channel 1, shown in Fig. 3 (b).
The processing method of this structure is to be produced on the base plate by surface processing technique, and this base plate is generally plexiglass, and the cover plate of same material on the bonding can generate the micro passage then.
Inlet channel can connect as macroscopical pump by other capillary channels with the method for grand little coupling, carry out fluid drives, also can with little valve outlet port 5 link to each other with the Micropump chamber, inlet 7 is connected with micro reaction pool or microflute, by the Micropump withdrawn fluid, another little valve inlet 7 is linked to each other with the Micropump chamber, outlet 5 links to each other with microflute, by the Micropump pumping liquid, can improve the pumping efficiency of Micropump so greatly.
Fig. 4 is when utilizing the w=100 micron of Fortran simulation, the border is no slip boundary condition, inlet is velocity boundary conditions, apply with the inlet (being the outlet of forward flow) of reverse flow at forward inlet and to apply identical velocity boundary conditions, the pressure reduction of the pipeline opening of the single valve cell that calculates compares P f/ P b(establishing just enters the mouth when flowing into, and pressure reduction is P f, producing pressure reduction when oppositely mouth flows into is P b).

Claims (8)

1, a kind of little valve that does not have movable member, it is characterized in that: mainly include inlet channel (1), curved passage, diffusion admittance (6), wherein, inlet channel (1) is a straight passage, afterbody at inlet channel, promptly branch fork (3) locate to occur shunting, one is the straight passage that continues to extend forward, another is the curved passage of band diffusion, curved passage comprises curved feeder connection (10) and semicircular ring passage (2), curved passage is communicated with straight passage by curved feeder connection (10), and curved feeder connection (10) is communicated with diffusion admittance (6) by semicircular ring passage (2), and the straight passage after the shunting is located to be communicated with diffusion admittance (6) in conflux mouthful (4); The span of the straight line in more than half circular ring path (2) center of circle of the joint of semicircular ring passage (2) and diffusion admittance (6) and the axis angulation α of inlet channel (1) is 40 °~60 °; The width of supposing inlet channel (1) is w, and the width at the curved feeder connection place that is communicated with inlet channel (1) is taken as 2.5w; Lower extreme point O with inlet channel (1) is a true origin, is X direction with the direction of inlet channel (1), is y direction with the direction vertical with Way in, and then the coordinate of the initial point of semicircular ring passage (2) is that (L+r, R+a), the scope of a is w/2~w.
2, a kind of little valve that does not have movable member according to claim 1, it is characterized in that: N the identical little valve series connection of structure can be used, the inlet that is about to second little valve (9) is communicated with the outlet of first little valve (8), this kind series connection method successively, the import of N little valve is communicated with the outlet of N-1 little valve, the import of first little valve is the import of whole cascaded structure, and the outlet of N little valve is the outlet of whole cascaded structure.
3, a kind of little valve that does not have movable member according to claim 2, it is characterized in that: the series connection of described N little valve can be an axis with inlet channel (1), the curved passage of each little valve is successively set on the both sides of inlet channel (1), also the curved passage of each little valve all can be arranged on the homonymy of inlet channel (1).
4, according to claim 2 or the described a kind of little valve that does not have movable member of claim 3, it is characterized in that: the span of described N is more than or equal to 2.
5, a kind of little valve that does not have movable member according to claim 1, it is characterized in that: the cross section of forming each passage of little valve all is rectangles.
6, according to claim 1 or the described a kind of little valve that does not have movable member of claim 2, it is characterized in that: the span of the width w of described inlet channel (1) is 50~200 microns, the height of inlet channel (1) is h, depth-to-width ratio, be that h/w is taken as 1.5~2.5, the length L of inlet channel 1 is greater than 1.5w.
7, according to claim 1 or the described a kind of little valve that does not have movable member of claim 2, it is characterized in that: the exradius R of described semicircular ring passage (2) is taken as 2~2.5 times w, interior circle radius r=R-w.
8, according to claim 1 or the described a kind of little valve that does not have movable member of claim 2, it is characterized in that: diffusion admittance (6) connects the bend outlet, and the span of its diffusion half-angle β is 3 °~5 °.
CN 200620158422 2006-11-10 2006-11-10 Non-movable-part micro valve Expired - Fee Related CN200993249Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200620158422 CN200993249Y (en) 2006-11-10 2006-11-10 Non-movable-part micro valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200620158422 CN200993249Y (en) 2006-11-10 2006-11-10 Non-movable-part micro valve

Publications (1)

Publication Number Publication Date
CN200993249Y true CN200993249Y (en) 2007-12-19

Family

ID=38946324

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200620158422 Expired - Fee Related CN200993249Y (en) 2006-11-10 2006-11-10 Non-movable-part micro valve

Country Status (1)

Country Link
CN (1) CN200993249Y (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112032150A (en) * 2020-08-27 2020-12-04 深圳市卓力能电子有限公司 Component, aerosol forming device component and aerosol forming device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112032150A (en) * 2020-08-27 2020-12-04 深圳市卓力能电子有限公司 Component, aerosol forming device component and aerosol forming device

Similar Documents

Publication Publication Date Title
CN100434728C (en) Minisize diffusion pump and preparation method thereof
CN2809266Y (en) Integrated micro-fluid pump
Ezkerra et al. A microvalve for lab-on-a-chip applications based on electrochemically actuated SU8 cantilevers
CN102278293A (en) Micropump based on capillarity action and using method thereof
CN100447467C (en) Microvalve integrated in flow passage
CN1759267A (en) Fitting
CN102678526A (en) Travelling-wave valveless piezoelectric micropump of multistage diffusion micro-flow pipeline
CN107605713A (en) A kind of valve free pump of big flow
CN200993249Y (en) Non-movable-part micro valve
Cole et al. Two-layer multiplexed peristaltic pumps for high-density integrated microfluidics
CN214288265U (en) High-efficiency single-double emulsion separation splitting microfluidic integrated chip
WO2003081045A1 (en) Valveless micropump
CN109780318B (en) Liquid metal micro-valve device and micro-fluidic system provided with same
CN102852775B (en) Valveless micropump based on laser impact wave mechanical effect and manufacturing method thereof
CN202082073U (en) Piezoelectric microfluid mixer
KR20100030311A (en) Micropump with a membrane driven by an electromagnet
Li et al. A review of recent studies on valve-less piezoelectric pumps
Stehr et al. The selfpriming VAMP
CN103016317B (en) Three-cavity valveless piezoelectric pump based on wall-attachment effect
CN106195439A (en) Micro-valve system based on stream state
CN202157940U (en) Involute flow tube valveless piezoelectric pump
CN206315807U (en) The micro-valve that a kind of surface acoustic wave control is opened and closed
CN100356071C (en) Minitype jet pump and preparation method
CN214424673U (en) Piezoelectric vibrator axial overflowing mixing pump
CN112610751B (en) Pneumatic one-way micro valve capable of being spliced and manufactured through 3D printing

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee