CN1986156A - Ultraprecise grinder with two stages of feeding mechanism and its control method - Google Patents
Ultraprecise grinder with two stages of feeding mechanism and its control method Download PDFInfo
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- CN1986156A CN1986156A CN 200610147561 CN200610147561A CN1986156A CN 1986156 A CN1986156 A CN 1986156A CN 200610147561 CN200610147561 CN 200610147561 CN 200610147561 A CN200610147561 A CN 200610147561A CN 1986156 A CN1986156 A CN 1986156A
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Abstract
The present invention relates to ultra precise numerically controlled grinder with two stages of feeding mechanism and its control method. The grinder includes an ultra precise numerically controlled grinder; a micro feeding bench comprising a piezoelectric driver, a flexible hinge mechanism and a control system; a detection system comprising a position sensor and a size measurer; and an integrated interface system for transmitting the pulse signals to realize the integrated control of the grinder. The grinder has numerically controlling system, and increased micro feeding bench control system, monitoring system and integrated interface system. The present invention is for completing the coarse, semi-precise and precise grinding of high precision parts of optical glass, ceramic and other hard and fragile material.
Description
Technical field
The invention belongs to Precision Machining and equipment manufacture category thereof, relate to ultraprecise grinding machine structure and control method thereof with two-stage feed mechanism.
Background technology
Antenna house is a kind of big degree of depth shell structure spare, and material mostly is quartz-ceramics greatly, and is not only hard but also crisp, tensile strength is low, and when it was carried out machining, owing to lack reliable and stable technological datum and select inappropriate grinding dosage for use, its surface very easily produced micro-crack.
During crisp hard thin workpiece such as grinding optical glass, ceramic radome, the grinding carriage amount of feeding reaches submicron order can make abrasive dust become the curling shape of cutting during plastic material, thereby by improving grinding condition, improve the precision and the surface quality that are ground the surface, as optical glass being processed into light glass, promptly being ground to surface roughness value is nano level lens, makes the grinding skin of ceramic radome not produce any micro-crack etc.Therefore, micro-feeding device is the crisp hard special material that waits of grinding, realizes the basic technology device of accurate and ultraprecise machining accuracy.
Yet, when present most of precision grinders are used for the grinding of above-mentioned two kinds of materials, all there is following subject matter:
1, the machine driving feed accuracy of traditional grinding machine is limited, and at present, the minimum feeding resolution ratio of the grinder wheel frame that adopts servomotor, ball screw assembly, directly to drive is 1-0.5 μ m, and it is very difficult further being accurate to 0.2-0.1 μ m, or even impossible.
2, the response frequency during dynamic compensation is low, and this is that at present, the grinding machine performance indications do not relate to the response frequency of feed motion owing to due to grinding carriage and the reason such as the moving-member quality is very big, mechanical transmission mechanism is creeped thereof.
Though 3, the linear electric motors feed arrangement has any impulse stroke, 9.8m/s
2Lot of advantages such as above feeding acceleration, system architecture is simple, but also have the cost height, heating is serious, control system is complicated, every major defects such as the antimagnetic effect of magnetic are still undesirable, influenced the combination property of this feed system.
Summary of the invention
Purpose of the present invention and the technical problem that will solve are, a kind of ultraprecise grinding machine and control method thereof with two-stage feed mechanism is provided, realize the high-precision grinding of crisp and hard materials such as optical glass, pottery with the minimum amount of feeding of 0.1 μ m, realization is to the mirror grinding of optical glass, its surface does not produce microcrack after making ceramic thin-wall workpiece grinding, finishes the thick-half essence-essence-fine grinding of high-precision part thus.
To achieve these goals, the present invention has adopted following technical scheme:
Have the ultraprecise numerically control grinder of two-stage feed mechanism, its substantive distinguishing features is that it comprises: common precise numerical control grinder, micro-feed stage, detection system, integrated interface system;
Described micro-feed stage comprises flexure hinge mechanism, piezoelectric actuator and control system thereof;
Described detection system comprises position sensor, gauging instrument; Wherein, position sensor is used to monitor the grinding carriage parts secondary feed real work position based on micro-feed stage, with the control foundation as the micro-feed stage control system; Gauging instrument is used for detecting the grinding process workpiece actual size of grinding skin, with the foundation as control grinding process and related process parameter thereof;
Described integrated interface system is used to transmit the coherent pulse signal of numerically control grinder, micro-feed stage, gauging instrument, to realize the collaborative and integrated control of ultraprecise numerically control grinder basic technology operation.
Above-mentioned ultraprecise numerically control grinder with two-stage feed mechanism, wherein, the cross slide of described micro-feed stage and common precise numerical control grinder is rigidly connected, flexure hinge mechanism in the micro-feed stage is realized the ultraprecise feeding requirement of grinding carriage parts by deformation under the effect of piezoelectric ceramic actuator; The grinding carriage parts interconnect by guide rail on the general-purpose grinder and cross slide, and under the extension spring effect of general-purpose grinder, remain with the tight of micro-feed stage to contact.
Control method with ultraprecise numerically control grinder of two-stage feed mechanism, wherein, it is on the basis of general-purpose grinder digital control system, set up the micro-feed stage control system, monitoring system, the integrated interface system that are independent of the general-purpose grinder digital control system, make the general-purpose grinder digital control system transmit the coherent pulse signal, thereby realize and the communication of micro-feed stage, the collaborative and integrated control of basic technology operation by numerical control program, integrated interface system.
The control method of above-mentioned ultraprecise numerically control grinder with two-stage feed mechanism, wherein, described micro-feed stage comprises RACS, this RACS comprises little feeding drive part, little feeding test section;
Described little feeding drive part comprises that driving power, man-machine interface, little feeding displacement-voltage data are constructed, four modules of driving, with data input and the demonstration that realizes micro-feed stage, the data processing that comprises decimal number commentaries on classics hexadecimal and digital-to-analogue conversion, the amplification of driving voltage;
Described little feeding test section comprises sensor, voltage-displacement data structure, detects three modules, handles with the displacement detecting and the data that realize micro-feed stage.
Owing to adopted above-mentioned technical scheme, the present invention compared with prior art has following advantage and good effect:
1, utilizes micro-feed stage to make the minimum amount of feeding of precision grinder grinding carriage parts 0.5-1 μ m be accurate to the minimum amount of feeding of 0.1 μ m, satisfy the crisp hard superfine grinding demand that approaches workpiece such as optical glass, ceramic radome.
2, the ultraprecise grinding machine with two-stage feed mechanism is based on common precision grinder, and micro-feed stage is as an auxiliary equipment of precision grinder.Micro-feed stage has that volume is little, the external form standard, characteristics such as can be configured flexibly as required, owing to fully use for reference and utilized the technical advantage of existing ripe precision grinder, the raising of research and development success rate, the cycle of ultraprecise grinding machine are shortened and the expense reduction.
3, ultraprecise grinding machine control method is based on the grinding machine digital control system, by increasing micro-feed stage piezoelectric actuator control system and integrated interface system, make the grinding machine digital control system by numerical control program, the corresponding pulses signal realization of integrated interface system and the communication and the integrated control of micro-feed stage and gauging instrument, brand, kind and the model etc. selecting for use and control all with machine tool numerical control system of micro-feed stage are had nothing to do.
Description of drawings
Fig. 1 has the basic composition and the schematic diagram thereof of the ultraprecise numerically control grinder of two-stage feed mechanism for the present invention;
Fig. 2 is the two-stage feed mechanism schematic diagram of ultraprecise grinding machine of the present invention;
Fig. 3 has the ultraprecise numerically control grinder control method and the workflow diagram thereof of two-stage feed mechanism for the present invention;
Fig. 4 has the basic composition and the schematic diagram thereof of the ultraprecise grinding machine of two-stage feed mechanism for the present invention;
Fig. 5 has the basic composition and the schematic diagram thereof of the open loop type precision grinder of two-stage feed mechanism for the present invention;
Fig. 6 has the ultraprecise grinding machine control method and the workflow diagram thereof of two-stage feed mechanism for the present invention;
Fig. 7 has the open loop type precision grinder control method and the workflow diagram thereof of two-stage feed mechanism for the present invention;
The specific embodiment
Below in conjunction with embodiment and accompanying drawing ultraprecise grinding machine and the control method thereof with two-stage feed mechanism that the present invention relates to is described in further detail.
Referring to Fig. 1, the ultraprecise grinding machine with two-stage feed mechanism that the present invention relates to comprises common precision grinder, micro-feed stage, detection system and integrated interface system four major parts.The feed mechanism of common precision grinder is realized the needed one-level feeding of general correct grinding, and on this basis, increase the flexible hinge micro-feed stage that one-level is driven by piezoelectric ceramic actuator, rely on micro-feed stage to realize the ultraprecise feeding of grinding carriage parts, constitute the secondary feeding, finish the thick-essence-superfine milling of high-precision part thus.The final submicron order feeding requirement that realizes ultraprecise numerically control grinder grinding carriage parts.
Wherein: micro-feed stage is made up of flexure hinge mechanism, piezoelectric actuator and control system three parts thereof; Detection system is divided position sensor part and gauging instrument two parts, position sensor is used to monitor the real work position of grinding carriage parts, with control foundation as piezoelectric actuator, gauging instrument is used for detecting the grinding process actual size of grinding workpiece surface, with the foundation as control grinding process and technological parameter thereof etc.; The effect of integrated interface system is that (1) realizes the information interaction of micro-feed stage control system and grinding machine digital control system; (2) coordinate and the elemental motion of controlling the two-stage feed mechanism; (3) handle to detect (gauging instrument) and monitor (position sensor) result and control the motion and the precision thereof of grinding carriage parts.
Fig. 2 has provided ultraprecise grinding machine basic configuration and the schematic diagram thereof with two-stage feed mechanism, and wherein: cross slide 7, guide rail 9, lathe bed 10, leading screw 11, nut 12 belong to the relevant rudimentary parts of common precision grinder.The ultraprecise grinding machine on this basis, increase micro-feed stage 3, and increase second layer guide rail 8 in grinding carriage parts base 6 and cross slide 7, so that relative cross slide 7 such as grinding carriage parts base 6, emery wheel 2 and relative supports thereof carries out the accurate feeding that the minimum amount of feeding is 0.1 μ m.
During grinding work piece, leading screw 11 drives the big stroke feed motion that nut 12 is realized first order feed system, and according to measurement and the data processed result of size detection instrument to the workpiece grinding skin, drive micro-feed stage and realize the ultraprecise feed motion of second level feed system, until entering the sparking out state and reaching the grinding requirement.
The ultraprecise grinding machine control method that the present invention relates to is based on the general-purpose grinder digital control system, increases micro-feed stage piezoelectric actuator control system and integrated interface system.The grinding machine digital control system is by numerical control program, the corresponding pulses signal realization of integrated interface system and the communication and the integrated control of micro-feed stage and gauging instrument.
The control method of the ultraprecise numerically control grinder that the present invention relates to and workflow thereof as shown in Figure 3, its control method of taking is:
(1) carry out the basic operation of meticulous mill pre-grinding work step according to numerical control program, the pre-grinding work step comprises basic operations such as corase grind, half correct grinding, correct grinding, and the work step parameter all is provided with in numerical control program;
(2) amount of feeding and the feeding number of times thereof in meticulous grinder step are provided with by the micro-feed stage human-computer interaction interface;
(3) foundation that whether finishes of relevant work step operation depends on two aspects, the one, according to set relevant work step and technological parameter thereof; The 2nd, according to the gauging instrument of direct measuring workpieces grinding skin.Gauging instrument can be configured with required precision as required.
Referring to Fig. 1, the minimum setting of the workbench of high precision numerical control grinding machine MGK1320 and grinding carriage unit is 0.5 μ m, adds the gauging instrument among the detection system II as shown in Figure 1, the main machining accuracy that can obtain, and as circularity 1 μ m, cylindricity 3 μ m.On the configure base of above-mentioned high precision numerical control grinding machine, position sensor among increase Fig. 1 among micro-feed stage III and the detection system II, can make the minimum setting unit of grinding carriage is 0.1 μ m, and by increasing the integrated interface IV of system, successively coordinate and drive the two-stage feed mechanism slightly progress greatly to, finish the accurate grinding and the fine grinding of workpiece.Under the cooperation of gauging instrument, can make the dimensional uniformity of workpiece machining accuracy and a collection of workpiece improve more than 1 times or 1 times.
Referring to Fig. 4,6, it is 1 μ m that the minimum of high-precision grinder MG1320E grinding carriage is set unit, adopts and decides the journey grinding, and can obtain to make the diameter uniformity of workpiece to be machined is 10 μ m.Increase the gauging instrument among Fig. 4 detection system II, the diameter uniformity that can make workpiece to be machined is 4 μ m.On the configure base of above-mentioned high-precision grinder, position sensor among increase Fig. 4 among micro-feed stage III and the detection system II, can make the minimum setting unit of grinding carriage is 0.1 μ m, and by the human-machine operation panel IV among Fig. 4, manual coordination and drive the two-stage feed mechanism slightly progress greatly to, finish the accurate grinding and the fine grinding of workpiece, its control method and workflow diagram thereof such as Fig. 6.Under the cooperation of gauging instrument, can make the dimensional uniformity of workpiece machining accuracy and a collection of workpiece improve more than 1 times or 1 times.
Referring to Fig. 5,7, it is 5 μ m that the minimum of general-purpose grinder M14320 grinding carriage is set unit.On the basis of above-mentioned general-purpose grinder, increase the micro-feed stage II among Fig. 5, and adopt open loop to control, can make the minimum setting unit of grinding carriage is 0.5 μ m, and by human-machine operation panel III, manual coordination and drive the two-stage feed mechanism slightly progress greatly to, finish the accurate grinding and the fine grinding of workpiece, its control method and workflow diagram thereof are referring to Fig. 7.
Make the ultraprecise grinding machine carry out the high-precision grinding of crisp and hard materials such as optical glass, pottery with the minimum amount of feeding of 0.1 μ m by micro-feed stage, make optical glass reach mirror grinding precision and surface roughness, make ceramic thin-wall workpiece grinding rear surface not produce microcrack etc.The ultraprecise grinding machine is based on common precise numerical control grinder, but the micro-feed stage that increases has advantages such as the little flexible configuration of volume, the micro-feed stage control system and the integrated interface system that increase, make of the corresponding pulses signal realization and the communication of micro-feed stage, gauging instrument, the collaborative and integrated control of basic technology operation of grinding machine digital control system, brand, kind and the model etc. of the selecting for use of micro-feed stage and gauging instrument, control and machine tool numerical control system are had nothing to do by numerical control program, integrated interface system.Fully use for reference and utilized the technical advantage of existing ripe precision grinder, the raising of research and development success rate, the cycle of ultraprecise grinding machine are shortened and the expense reduction.
Claims (4)
1. have the ultraprecise numerically control grinder of two-stage feed mechanism, it is characterized in that it comprises: common precise numerical control grinder, micro-feed stage, detection system, integrated interface system;
Described micro-feed stage comprises flexure hinge mechanism, piezoelectric actuator and control system thereof;
Described detection system comprises position sensor, gauging instrument; Wherein, position sensor is used to monitor the grinding carriage parts secondary feed real work position based on micro-feed stage, with the control foundation as the micro-feed stage control system; Gauging instrument is used for detecting the grinding process workpiece actual size of grinding skin, with the foundation as control grinding process and related process parameter thereof;
Described integrated interface system is used to transmit the coherent pulse signal of numerically control grinder, micro-feed stage, gauging instrument, to realize the collaborative and integrated control of ultraprecise numerically control grinder basic technology operation.
2, the ultraprecise numerically control grinder with two-stage feed mechanism according to claim 1, it is characterized in that, the cross slide of described micro-feed stage and common precise numerical control grinder is rigidly connected, flexure hinge mechanism in the micro-feed stage is realized the ultraprecise feeding requirement of grinding carriage parts by deformation under the effect of piezoelectric ceramic actuator; The grinding carriage parts interconnect by guide rail on the general-purpose grinder and cross slide, and under the extension spring effect of general-purpose grinder, remain with the tight of micro-feed stage to contact.
3, a kind of control method with ultraprecise numerically control grinder of two-stage feed mechanism, it is characterized in that, it is on the basis of general-purpose grinder digital control system, set up the micro-feed stage control system, monitoring system, the integrated interface system that are independent of the general-purpose grinder digital control system, make the general-purpose grinder digital control system transmit the coherent pulse signal, thereby realize and the communication of micro-feed stage, the collaborative and integrated control of basic technology operation by numerical control program, integrated interface system.
4, the control method with ultraprecise numerically control grinder of two-stage feed mechanism according to claim 3 is characterized in that described micro-feed stage comprises RACS, and this RACS comprises little feeding drive part, little feeding test section;
Described little feeding drive part comprises that driving power, man-machine interface, little feeding displacement-voltage data are constructed, four modules of driving, with data input and the demonstration that realizes micro-feed stage, the data processing that comprises decimal number commentaries on classics hexadecimal number, digital-to-analogue conversion, the amplification of driving voltage;
Described little feeding test section comprises sensor, voltage-displacement data structure, detects three modules, handles with the displacement detecting and the data that realize micro-feed stage.
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| CN 200610147561 CN1986156A (en) | 2006-12-20 | 2006-12-20 | Ultraprecise grinder with two stages of feeding mechanism and its control method |
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| CN 200610147561 CN1986156A (en) | 2006-12-20 | 2006-12-20 | Ultraprecise grinder with two stages of feeding mechanism and its control method |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101738981B (en) * | 2009-12-04 | 2011-06-15 | 清华大学 | Machine learning-based robot grinding method |
| CN101478078B (en) * | 2009-02-17 | 2012-11-07 | 东华大学 | Inner and outer shaped surface precise machining process for antenna cover |
| CN102794688A (en) * | 2012-08-10 | 2012-11-28 | 上海交通大学 | Reconstructing few-shaft ultra-precise large-size optical mirror grinding system |
| CN101559578B (en) * | 2009-06-02 | 2013-01-30 | 河南科技大学 | Coreless abrasive machining measurement and control system and corresponding coreless abrasive machining method |
| CN103056776A (en) * | 2012-11-29 | 2013-04-24 | 厦门大学 | Data acquisition and transmission synchronization method for grinding machine processing environment monitoring system |
| CN106378668A (en) * | 2016-11-15 | 2017-02-08 | 佛山泰冈数控精密机床有限公司 | Control method of five-axis double-end-surface grinding machine |
| CN109782690A (en) * | 2019-03-25 | 2019-05-21 | 浙江大学宁波理工学院 | Double drive electrichydraulic control formula accurate feeding system and its control method |
| CN112548692A (en) * | 2020-12-08 | 2021-03-26 | 哈尔滨工业大学 | Micro-feeding device for uniformly removing tool tip material of arc-edge diamond tool |
| CN112621283A (en) * | 2020-12-09 | 2021-04-09 | 东华大学 | Active locating and clamping method and device for thin-walled part with ultra-large radius-thickness ratio |
| CN114505758A (en) * | 2022-01-20 | 2022-05-17 | 西门子（中国）有限公司 | Grinding machine system, grinding machine control method, numerical control device, and storage medium |
-
2006
- 2006-12-20 CN CN 200610147561 patent/CN1986156A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101478078B (en) * | 2009-02-17 | 2012-11-07 | 东华大学 | Inner and outer shaped surface precise machining process for antenna cover |
| CN101559578B (en) * | 2009-06-02 | 2013-01-30 | 河南科技大学 | Coreless abrasive machining measurement and control system and corresponding coreless abrasive machining method |
| CN101738981B (en) * | 2009-12-04 | 2011-06-15 | 清华大学 | Machine learning-based robot grinding method |
| CN102794688B (en) * | 2012-08-10 | 2014-10-22 | 上海交通大学 | Reconstructing few-shaft ultra-precise large-size optical mirror grinding system |
| CN102794688A (en) * | 2012-08-10 | 2012-11-28 | 上海交通大学 | Reconstructing few-shaft ultra-precise large-size optical mirror grinding system |
| CN103056776B (en) * | 2012-11-29 | 2015-02-04 | 厦门大学 | Data acquisition and transmission synchronization method for grinding machine processing environment monitoring system |
| CN103056776A (en) * | 2012-11-29 | 2013-04-24 | 厦门大学 | Data acquisition and transmission synchronization method for grinding machine processing environment monitoring system |
| CN106378668A (en) * | 2016-11-15 | 2017-02-08 | 佛山泰冈数控精密机床有限公司 | Control method of five-axis double-end-surface grinding machine |
| CN109782690A (en) * | 2019-03-25 | 2019-05-21 | 浙江大学宁波理工学院 | Double drive electrichydraulic control formula accurate feeding system and its control method |
| CN112548692A (en) * | 2020-12-08 | 2021-03-26 | 哈尔滨工业大学 | Micro-feeding device for uniformly removing tool tip material of arc-edge diamond tool |
| CN112621283A (en) * | 2020-12-09 | 2021-04-09 | 东华大学 | Active locating and clamping method and device for thin-walled part with ultra-large radius-thickness ratio |
| CN112621283B (en) * | 2020-12-09 | 2022-03-01 | 东华大学 | Active locating and clamping method and device for thin-walled part with ultra-large radius-thickness ratio |
| CN114505758A (en) * | 2022-01-20 | 2022-05-17 | 西门子（中国）有限公司 | Grinding machine system, grinding machine control method, numerical control device, and storage medium |
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