CN1856596A

CN1856596A - Electrochemical deposition chambers for depositing materials onto microfeature workpieces

Info

Publication number: CN1856596A
Application number: CN 200480015795
Authority: CN
Inventors: K·汉森; K·L·多尔切克; P·R·麦克休; G·J·威尔森; J·A·戴维斯; 兰迪·哈里斯
Original assignee: Semitool Inc
Current assignee: Semitool Inc
Priority date: 2003-06-06
Filing date: 2004-06-04
Publication date: 2006-11-01

Abstract

A wet chemical processing chamber comprising a fixed unit, a detachable unit releasably coupled to the fixed unit, a seal contacting the fixed unit and the detachable unit, and a processing component disposed in the fixed unit and/or the detachable unit. The fixed unit can have a first flow system configured to direct a processing fluid through the fixed unit and a mounting fixture for fixedly attaching the fixed unit to a platform or deck of an integrated processing tool. The detachable unit can include a second flow system configured to direct the processing fluid to and/or from the first flow system of the fixed unit. The seal has an orifice through which processing fluid can flow between the first and second flow systems, and the processing component can impart a property to the processing fluid for processing a surface on a microfeature workpiece having submicron microfeatures.

Description

Be used to handle the wet chemical processing chamber of miniature parts workpiece

Mutually with reference to related application

The present invention requires to help the Application No. 60/476,333 that on June 6th, 2003 proposed; 60/476,881; 60/476,786; And 60/476,776, this paper comprises their full contents, comprising appendix as a reference.

Technical field

The objective of the invention is to be used for equipment and method that miniature parts workpiece (microfeatureworkpieces) is handled, this miniature parts workpiece have a plurality of be integrated in the workpiece and/or on microdevice.These microdevices can comprise submicron part (submicron features).Special aspects purpose of the present invention is a kind of wet chemical processing chamber, its have fixed cell (fixed unit) but and in order to keep in repair this indoor part the detachable unit (detachable unit) of fast Demolition.The purpose of the other aspect of the present invention is a kind of have fixed cell and the unitary electrochemical deposition of detachable electrode chamber.

Background technology

Microdevice is by depositing and process the manufacturing of some material layers in single substrate (substrate), thus a large amount of independent device of producing.For example, to photo-resist, the layer of electro-conductive material and dielectric substance deposits, and forms pattern, develop, etching, complanation, and other processing, thereby in substrate and/or on form part.Arrange these parts so that form unicircuit, microfluid system and other structures.

Usually adopt wet-chemical treatment on the miniature parts workpiece, to form part.Generally in wet-chemical treatment equipment (tools), carry out wet-chemical treatment, have a plurality of independently treatment chambers in this chemical-treating facility, be used to clean, etching, the electrochemical deposition material, or carry out the combination of these processing.Fig. 1 briefly shows integrated equipment 10, and it can carry out one or more wet-chemical treatment.Equipment 10 comprises housing or the case 20 of (platform) 22 that have platform, a plurality of wet chemical processing chambers 30 that are positioned at case 20, and transfer system 40.This equipment 10 also comprises the lifting-rotary unit (lift-rotate units) 32 that is connected with respective handling chamber 30, is used to adorn/unload workpiece W.Treatment chamber 30 can be the washing/drying chamber, clean box, etching box, electrochemical deposition chamber, or the wet-chemical treatment container (vessels) of other types.Transfer system 40 comprises linear track 42 and mechanical manipulator 44, and this mechanical manipulator 44 moves along track 42, so that transmit each workpiece W in equipment 10.Integrated equipment 10 further comprises workpiece storage unit 60, and it has a plurality of storages (containers) 62 that are used to preserve workpiece W.On-stream, mechanical manipulator 44 is according to predetermined workflow (workflow), in equipment 10 to/from storage 62 and treatment chamber 30 conveying work pieces.

A problem of operating comprehensive wet-chemical treatment equipment is to repair and/or safeguard these treatment chambers.In the electrochemical deposition chamber, for example, consumable electrode is degenerated in time, because the reaction between electrode and the electrolytic solution can be decomposed electrode.Therefore, the consumable electrode change of shape can make electric field change.As a result, must change consumable electrode termly, so that on workpiece, keep the deposition parameter of expection.Also need termly the electrical contact of those contact workpieces is cleaned or changes.In order to safeguard or repair the electrochemical deposition chamber, can will pull down in their slave units 10, and replace them with spare room, perhaps can on-site maintenance in equipment.

Repair or safeguard that a problem of existing wet chemical processing chamber is, equipment must long-time off line (offline), so that change the miscellaneous part in electrode or the maintenance process chamber 30.When pulling down treatment chamber 30 on the slave unit, the treatment chamber 30 that keeped in repair in advance is installed on the empty position of platform 22.When on-site maintenance treatment chamber 30 on platform, lifting-rotary unit 32 to be removed usually, the operator enters from above in the treatment chamber 30 again, to repair or to change the parts in the chamber 30.For example,, disconnect being connected of old electrode and chamber 30, install new electrode then in order to change consumable electrode.This is the treating processes that bothers very much, because have only limited amount space to enter into the lower section of the residing chamber 30 of electrode in equipment 10.After chamber 30 was repaired or changed, recalibrate mechanical manipulator 44 and lifting-rotary unit 32, so that it is worked with treatment chamber.

For changing old electrode, on-site maintenance miscellaneous part in equipment, or the used treating processes of replacing of carrying out the chamber needs considerable time, and equipment can't be handled workpiece in the meantime.In addition, after each the repairing, recalibrate mechanical manipulator 44 and lifting-rotary unit 32 usually with respect to the chamber of having repaired; This is a treating processes consuming time, and it has increased the stop time of repairing or safeguarding treatment chamber.Therefore, when having only a treatment chamber 30 not reach specification requirement in the equipment 10, often more efficiently is this equipment 10 that remains in operation, and does not stop work to those treatment chamber 30 places under repair, up to there being more treatment chamber not reach the specification requirement.So the production loss of single treatment chamber 30 does not resemble to repairing or safeguard the production loss that an independent treatment chamber 30 causes equipment 10 off lines so serious.

Equipment 10 operating practices prove, do not reach the output that specification requirement just seriously influences equipment 10 up at least two treatment chambers 30.For example, if equipment 10 do not repair or safeguard, up to the requirement that falls short of specifications of two or three treatment chambers 30 at least, the equipment part off-line maintenance just then of its whole work capacity just that will turn round for some time at that time.This has increased the operating cost of equipment 10, because its output incurs loss when not only changing wet chemical processing chamber 30 and recalibrating mechanical manipulator 44 owing to equipment 10 off lines, and when equipment online (online),, also reduced output because running only is the part of its whole work capacity.In addition, when accessory size dwindled, electrochemical deposition chamber 30 also must reach higher specification requirement consistently.This just causes very fast its specification requirement of disengaging of treatment chamber 30, thereby causes equipment to be shut down continually.Therefore, with repair and/or safeguard electrochemical deposition chamber or the relevant operating cost that has increased wet-chemical treatment equipment stop time widely of other types wet chemical processing chamber.

Summary of the invention

The objective of the invention is to have the wet chemical processing chamber of the detachable unit that speed unloads, compare with existing wet chemical processing chamber, it has reduced and is used to repair or safeguard the stop time that this indoor processing element is required.In several embodiment of wet chemical processing chamber of invention, hold or other modes are installed the processing element that those need regular maintenance or repairing by detachable unit.For example, electrode can be one type the processing element that is contained in the detachable unit.Can change these processing element apace by detachable unit is pulled down and loaded onto the detachable unit of replacement simply from the chamber.Usually, needn't mobile lifting-rotary unit or pull down the head assembly (head assembly) of these chambers, just can be near this detachable unit.Also can utilize and be easy to approaching quick release mechanism, detachable unit is connected on the chamber.Like this; with on existing wet chemical processing chamber, be used to carry out the required several hrs of identical work and compare; as long as several minutes is just detachable and change, this has just shortened repairs or safeguards electrode or indoor other processing element required stop times by these parts being arranged in the detachable unit.

In one embodiment, wet chemical processing chamber according to the present invention comprises fixed cell, be connected to the detachable unit on the fixed cell separably, the sealing that contacts with detachable unit with fixed cell, and the processing element that is positioned at fixed cell and/or detachable unit.Fixed cell can have and is configured to the conduct process fluid and flows through first flow system of this fixed cell and be used for this fixed cell is fixedly attached to the platform of comprehensive treatment equipment or the sectional fixture (mounting-fixture) on the cover plate (deck).Detachable unit can comprise second flow system that is configured to conduct process direction of flow fixed cell first flow system and/or treat fluid is gone out from the fixed cell first mobile system flow.Sealing has the hole, treat fluid can flow between first flow system and second flow system by this hole, and processing element can be passed to treat fluid with characteristic (property), so that the surface of miniature parts workpiece with submicron miniature parts is handled.

Another aspect of the present invention is a kind of integrated equipment that is used for the miniature parts workpiece is carried out wet-chemical treatment.In one embodiment, this equipment comprises the installed module (mounting moolule) with a plurality of setting elements and connect elements.In this embodiment, wet chemical processing chamber can have the fixed cell that comprises sectional fixture, sectional fixture have with installed module in first interface component (interface member) that setting element engages, and with installed module in first fastening piece that connect elements engages.Installed module is configured to keep the relative position between the setting element, when replacing this treatment chamber with another treatment chamber with box lunch, or when replacing a certain detachable unit with another detachable unit, needn't to from/recalibrate to the transfer system of wet chemical processing chamber conveying work pieces.

The present invention also aims to have the electrochemical deposition chamber of at least one electrode in speed is unloaded detachable unit, it has shortened the stop time that is used to change old electrode.In several embodiment of the electrochemical deposition chamber of inventing, one or more consumable electrode is installed in the detachable unit, this detachable unit can be removed apace, and available another detachable unit is replaced.Therefore, have the detachable unit of old electrode by removing simply, and load onto replacement detachable unit, can promptly change old electrode with new electrode with new electrode.Usually, detachable unit is the bottom of chamber, needn't mobile lifting-rotary unit or open this chamber from above, and just can be near this position.Utilization can be easy to approaching quick release mechanism, equally detachable unit is connected on the chamber.Like this; with be generally used for changing the several hrs that the existing indoor electrode of electrochemical deposition spent and compare; as long as several minutes is just dismountable and the speed of replacing is unloaded in the detachable unit, this has just shortened repairing widely or has safeguarded the stop time that electrode is required by these electrodes are arranged on.

In one embodiment, the electrochemical deposition chamber comprises head assembly and is positioned at container below the head assembly.Head assembly comprises and is configured to the miniature parts workpiece is positioned at the workpiece clamp (holder) of handling the position, and is arranged to the electrical contact that layer on workpiece provides electric current.Container has fixed cell, this fixed cell comprises and is used for this fixed cell is connected to sectional fixture on the equipment cover plate, detachable unit, it is connected with fixed cell below sectional fixture separably, thereby is located below the equipment cover plate interface element, it is between fixed cell and detachable unit, so that the control treat fluid flows fixed cell and detachable unit spare, and connected system, it is connected to detachable unit on the fixed cell separably.The electrochemical deposition chamber also comprises the electrode that is positioned at detachable unit.In several specific embodiments, detachable unit further comprises and is used for the fluid intake of treat fluid is provided and is used for from container emission treatment fluidic liquid exit to container.

Description of drawings

Fig. 1 is the wet-chemical treatment equipment schematic top plan view according to prior art.

Fig. 2 represents wet chemical processing chamber synoptic diagram according to an embodiment of the invention.

Fig. 3 is the operation chart of expression according to embodiment of the invention wet chemical processing chamber.

Fig. 4 A is a sectional view, and summary is represented according to the wet chemical processing chamber of the embodiment of the invention in the dismounting structure.

Fig. 4 B is a sectional view, and summary is represented according to the wet chemical processing chamber of the embodiment of the invention in assembled configuration.

Fig. 5 is a sectional view, and summary is represented according to the electrochemical deposition chamber of the embodiment of the invention in the dismounting structure.

Fig. 6 is a sectional view, and summary is represented according to the electrochemical deposition chamber of the embodiment of the invention in assembled configuration.

Fig. 7 is the electrochemical deposition chamber sectional view of expression according to the embodiment of the invention.

Fig. 8 be expression along with Fig. 7 in the electrochemical deposition chamber sectional view of different cross section.

Fig. 9 represents the sectional view of the used container in electrochemical deposition chamber according to another embodiment of the present invention.

Figure 10 is the electrochemical deposition chamber bottom perspective view according to the embodiment of the invention.

Figure 11 represents electrochemical deposition chamber sectional view according to another embodiment of the present invention.

Figure 12 A is support (carriage) the top stereographic map that is used for adorning/unloading from wet chemical processing chamber detachable unit according to the embodiment of the invention.

Figure 12 B is the support bottom stereographic map that is used to adorn/unload the wet chemical processing chamber detachable unit according to the embodiment of the invention.

Figure 13 is the plan view from above that comprises the wet-chemical treatment equipment of wet chemical processing chamber according to a further aspect of the invention.

Figure 14 is the installed module stereographic map that is used for keeping at wet-chemical treatment equipment wet chemical processing chamber according to the embodiment of the invention.

Figure 15 cuts open the sectional view of getting according to the installed module that the embodiment of the invention is used to support wet chemical processing chamber along Figure 14 center line 15-15.

Figure 16 is a sectional view of representing installed module cover plate part in detail.

Figure 17 is a cross-sectional perspective view, and summary is represented according to the wet chemical processing chamber of the embodiment of the invention by installed module supporting in the wet-chemical treatment equipment.

Describe in detail

Term as used herein " miniature parts workpiece " or " workpiece " refer to the substrate that and/or wherein forms microdevice thereon.Typical microdevice comprises microelectronic circuit or parts, thin film recording head, data storage elements, microfluidic device (microfluidic devices) and other goods.Micromachine or micromachine device are also included within this definition, because they are to make in the mode identical with unicircuit.Substrate can be semiconductor chip (for example, adulterated silicon wafer or gallium arsenide wafer), non-conductive (for example, various ceramic bases) or conducting strip.

Be used for Workpiece structure or on it electrolysis or do not have electro-deposition of metal or the indoor appearance of the electrochemical deposition of electrophoresis resist in several embodiment that are used to handle the wet chemical processing chamber of miniature parts workpiece have been described.Yet, also can be used for etching according to wet chemical processing chamber of the present invention, clean, perhaps in the semiconductor-based end or other types workpiece and/or on it, carry out the wet-chemical treatment of the other types of miniature parts manufacturing.Stated in Fig. 2-17 and in the related text several according to the present invention the embodiment of wet chemical processing chamber and integrated equipment, so that the complete understanding to specific embodiments of the present invention to be provided.Yet, it will be appreciated by the skilled addressee that the present invention can have additional embodiment, perhaps there are not the some details of embodiment shown in Fig. 2-17 can implement the present invention yet.

A. the embodiment of wet chemical processing chamber

Fig. 2 briefly shows wet chemical processing chamber 100, and it can repair or change parts apace, safeguards the stop time that treatment chamber is used with shortening.Treatment chamber 100 comprises wet-chemical container 102 and head 104.By equipment cover plate 106 supporting containers 102, this equipment can comprise other several treatment chamber (not shown) and be used for the workpiece transfer system (not shown) of automatic loading and unloading workpiece.Treat fluid and some parts are housed in the container 102, are used for the conduct process fluid or otherwise characteristic are passed to treat fluid, so that handle workpiece.By lifting-rotary unit 108 supporting heads 104, this lifting-rotation 108 moving-heads 104 adorning/to unload workpiece, and is positioned at workpiece on the interior processing position 109 of container 102.When treatment chamber 100 is when being used for that material is electroplated onto electrochemical deposition place on the workpiece, container 102 generally has fluid flow system and at least one electrode, and head 104 generally comprises the workpiece clamp with contact assembly, and this contact assembly has a plurality of electrical contacts of engaging with conductive layer on the workpiece of being configured to.When treatment chamber 100 was the box of cleaning chamber or other types, 102 in container comprised and is used to make fluid to flow through a plurality of fluid distributors (dispensers) of workpiece, and head 104 generally comprises workpiece clamp.At (a) U.S. Patent number 6,569,297 and 6,660,137, and (b) U.S.'s publication number 2003/0068837; 2003/0079989; 2003/0057093; 2003/0070918; 2002/0032499; 2002/0139678; 2002/0125141; 2001/0032788; 2003/0127337; With the electrochemical deposition chamber that is fit to is disclosed in 2004/0013808 the document, the full content that this paper comprises them is as a reference.In addition, at U.S. Patent number 6,309,524 and U. S. application numbers 6,527,925; And the workpiece clamp that is fit to is disclosed in 2002/0000372 the document, this paper comprises its full content as a reference equally.

Container 102 comprises fixed cell 110 that is installed on the cover plate 106 and the detachable unit 120 that is supported by fixed cell 110.Fixed cell 110 can comprise underframe (chassis) 112, the first flow systems 114 (briefly showing) and sectional fixture 116 (briefly showing).Underframe 112 can be insulation shell (dielectric housing), and it can be compatible mutually on chemical property with treat fluid.For example, underframe 112 can be high density polymer and other materials that is fit to.First flow system 114 can be configured to provides predetermined flow to handling position 109.In the electrochemical deposition chamber, first flow system 114 can be configured to provide have basic uniform acceleration, perpendicular to the direction of workpiece, spread all over the flow of entire treatment position 109.Sectional fixture 116 can be flange or the rings that outwards protrude from underframe 112, so that engage with the end face of cover plate 106.Sectional fixture 116 can be configured to as following detailed description more, fixed cell 110 accurately is set with respect to cover plate 106.Fixed cell 110 can further comprise processing element 118 (briefly showing), characteristic is passed to the treat fluid that flows through this fixed cell 110.For example, processing element 118 can be at the electric field forming element of handling position 109 shaping electric fields, strainer, film, nozzle, or the fluid distributor of other types.Processing element 118 also can be any combination of these type structures.Be used for fixing first flow system 114 in the unit 110, the suitable construction of sectional fixture 116 and processing element 118 as disclosing in the document with reference to the U. S. application that comprised number 09/872,151 and 09/804,697 in the above.

Detachable unit 120 in the container 102 comprises storage 122, be configured to conduct process direction of flow fixed cell 110 first flow systems 114 and/or conduct process fluid from fixed cell 110 first flow systems 114 effusive second flow systems 124 (briefly showing), and the processing element 126 (briefly showing) of characteristic being passed to treat fluid.Second flow system 124 can include an inlet and an outlet, and is used for to first flow system, 114 transport process fluids and the treat fluid that receives from first flow system 114.First and

second flow systems

114 and 124 are moved jointly, to provide the treat fluid predetermined amount of flow in the processing position.Also first and

second flow systems

114 and 124 can be configured to provide positive flow (forwardflow) with respect to processing element 126.In the positive flow system, before treat fluid arrived processing position 109, treat fluid flow through the processing element 126 in the detachable unit 120.Also first and

second flow systems

114 and 124 can be configured to provide the reverse direction flow (reverse flow) that flows through processing element 126.In the reverse direction flow structure, after treat fluid had flow through processing position 109, treat fluid flow through processing element 126.

Processing element 126 is arranged in the detachable unit 102.Processing element 126 can be strainer, film or electrode.In addition, processing element 126 can be an electrode assemblie, and it has a plurality of being applicable to concentric structure or other material is electroplated onto the electrode that the structure on the workpiece is arranged.Also have among other the embodiment, processing element 126 can be the combination of following each part: strainer, film, electrode, be positioned at the dielectric spacer that limits each electrode space between electrode, spray boom (spray bars) with a plurality of nozzles, blade coater (paddle platers), or other are used to handle the parts of miniature parts workpiece.Usually; processing element 126 be the consumable parts (for example; consumable electrode), particulate matter or other bad components may not have to clean with the protection parts (for example, membrane filter) of workpiece surface or other and maybe need the parts that clean in a kind of collection and treatment fluid.Therefore, carry out regular maintenance or replacing to the processing element 126 in the detachable unit 120, so as with the property retention of treatment chamber 100 in predetermined dimension requires.So, needn't moving-head 104, lifting-rotary unit 108 or fixed cell 110 as long as change a certain detachable unit 120 with the replacement detachable unit simply, are changed these processing element apace with regard to available parts newly or that rebuild.

Container 102 also comprises sealing 130, to prevent leakage between fixed cell 110 and the detachable unit 120.Seal 130 operated by rotary motion between fixed cell 110 and detachable unit 120.Sealing 130 can comprise at least one hole, so that treat fluid is can be in fixed cell 110 mobile between second flow system 124 in first flow system 114 and the detachable unit 120.In many examples, sealing 130 is the liners with pass formula, so that fluid can flow between first flow system 114 and second flow system 124.Sealing 130 or liner generally are compressible members, leak between each flow passage of flow system to prevent liquid.Sealing 130 also can be made by dielectric substance, and when fluid flowed between first flow system 114 and second flow system 124, this sealing 130 was with different liquid stream electrical isolation.Be suitable for sealing the closed-cell foamed plastics that 130 material comprises VITON , closed pore silicon, elastomerics, polymkeric substance, rubber and other materials.

Container 102 also comprises tie-in module 140, is used for detachable unit 120 is connected to fixed cell 110.Tie-in module 140 can be that speed is unloaded the unit, for example a clip (clamp) or a plurality of clip, and it is directed to detachable unit 120 on the preset bearing with respect to fixed cell 110, and detachable unit 120 is firmly held on the fixed cell 110.Tie-in module 140 can be configured to move from the first location and the second position, is fixed on the fixed cell 110 at first location detachable unit 120, can remove from fixed cell 110 at second position detachable unit 120.In some embodiment, when tie-in module 140 when the second position moves to first location, tie-in module 140 just drives detachable unit 120 towards fixed cell 110.This motion compresses sealing 130, and detachable unit 120 is positioned at predetermined position with respect to fixed cell 110.Tie-in module 140 can be a gripping ring, a plurality of kaysers (latches), a plurality of bolts, or the fastening piece of other types.

Fig. 3 briefly shows to repairing or safeguard the operation of the wet chemical processing chamber 100 that processing element is carried out in the detachable unit.In Fig. 2 and 3, identical Reference numeral is represented identical parts.After flow system 124a in the first detachable unit 120a and/or processing element 126a no longer reach specification requirement, the first detachable unit 120a is pulled down from fixed cell 110.Also removable lower seal 130, but this chooses wantonly.Then,, again tie-in module 140 is engaged with the second detachable unit 120b, the second detachable unit 120b is installed by the second detachable unit 120b is aimed at fixed cell 110.The second detachable unit 120b can comprise flow system 124b and processing element 126b, and they are new or had rebuild, handle the required specification requirement of miniature parts workpiece so that treatment chamber 100 can be reached.

An advantage at the treatment chamber 100 shown in Fig. 2 and 3 is that available parts new or that rebuild are replaced the parts that need repairing or safeguard apace, and need not the running that long duration ground stops treatment chamber 100.Can from fixed cell 110, pull down a certain detachable unit 120 fast, only just can load onto then and replace detachable unit 120 with the time of several minutes.With need on equipment, maybe need the conventional system of pulling down in the slave unit of whole chamber is compared by the spot reconditioning parts, this has shortened greatly to repairing electrode or other processing element used stop times.

Another advantage of this treatment chamber 100 is can be easy to approaching position below cover plate 106 processing element 126 in the detachable unit 120 is changed.As a result, promptly need not mobile fixed cell 110, head 104 also need not mobile lifting-rotary unit 108, with regard to replaceable old processing element.This has further shortened to safeguard the stop time that processing element is used, reorientates with respect to 110 pairs of heads 104 of fixed cell and lifting-rotary unit 108 because need not.In addition, need not with respect to treatment chamber 100 subtend heads, 104 conveying workpieces and the 104 workpiece transfer systems recalibrations of fetching workpiece from the head, because the position between head 104 and this workpiece transfer system does not change.By significantly reducing that treatment chamber 100 provides to changing used this advantage stop time of processing element, compare with existing installation, can estimate to improve greatly the throughput of wet-chemical treatment equipment.

Fig. 4 A is the sectional view of expression container 102 embodiment according to the present invention.In this embodiment, fixed cell 110 can further comprise a plurality of hooks of arranging with common radius or other patterns with respect to fixed cell 110 medullary rays (hangers) 180.Hook 180 can comprise the convex shoulder (shoulders) 182 that keeps tie-in module.For example, tie-in module 140 can be a ring, and it radially outward ejects, and 180 contacting with hook, and at open position tie-in module 140 is rested on the convex shoulder 182.Fixed cell 110 further comprises the guide surface 183 of inclination, the neck collar 184 on inclined guide rails face 183, and trim 185.Guide surface 183 can be a ring surface or a series of to increase progressively the acclivitous toxoplasma of radius.Neck collar 184 can be a metal ring, and it has with the acclivitous bearing surface of the radius that successively decreases.Neck collar 184 also can be made by other materials, and this material generally is stiffer than the material of underframe 112.

Detachable unit 120 can comprise the edge (rim) 190 with lower surface 192 and upper surface 194.Lower surface 192 and upper surface 194 can increase progressively radius and be inclined upwardly.More precisely, upper surface 194 tiltable certain angles are to match with the guide surface 183 of fixed cell 110.Detachable unit 120 can further comprise the trim 195 that is configured to clamping sealing 130,

chute

196a and 196b and bottom surface 197.

Tie-in module 140 can comprise and be configured to first edge 172 that engages with detachable unit 120 lower surfaces 192, and is configured to second edge 174 that engages with neck collar 184 bearing surfaces.Tie-in module 140 can comprise kayser (not shown) or lever, and it radially moves inward ring, and ring lock is fixed on the fixed position.

Fig. 4 B illustrates the container 102 after detachable unit 120 being connected on the fixed cell 110.In operation, tie-in module 140 radially moves inward, thereby first edge 172 is engaged with the lower surface 192 of detachable unit 120, and second edge 174 then engages with the bearing surface of neck collar 184.First edge 172 upwards rises towards fixing part 110 detachable unit 120 along radially inwardly moving of lower surface 192.When detachable unit 120 moved up, upper surface 194 just engaged with guide surface 183, thereby detachable unit 120 is positioned on the predetermined position with respect to fixed cell 110.Second edge 174 of tie-in module 140 radially moves inward along the scarp of neck collar 184, is clamped between

trim

185 and 195 will seal 130.Lever (not shown) on the tie-in module 140 can move to off-position from open position, to produce hoop stress in tie-in module 140, detachable unit 120 is firmly held on the fixed cell 110.

B. the general embodiment of electrochemical deposition container

Fig. 5 briefly shows the sectional view of electrochemical deposition chamber 100a, and this electrochemical deposition chamber 100a can change electrode and miscellaneous part apace, to shorten to the stop time of safeguarding that treatment chamber is used.Some aspects of electrochemical deposition chamber 100a are all similar to the described wet chemical processing chamber of reference Fig. 2-4B 100.Therefore identical Reference numeral is represented identical parts in Fig. 2-5.For example, treatment chamber 100a comprises wet-chemical container 102 and head 104 (briefly showing).

In the present embodiment, the processing element 118 among the 100a of chamber is an electric field forming element or a shaping module (briefly showing), and it is handling position 109 internal shaping electric fields.The field forming element can be static dielectric insert, is used for controlling the current density of handling 109 places, position.Forming element can also be a dynamic component, and in the work of plating cycle period, this dynamic component moves, so that change or electric field that otherwise 109 places, position are handled in control.Processing element 118 in the present embodiment can also be a strainer, film, or the arbitrary combination of these type structures.

In the embodiment of the 100a of chamber shown in Fig. 5, the processing element 126 in the detachable unit 120 comprises one or more electrodes (briefly showing) and optional processing element 150 (briefly showing).Optional processing element 150 can be strainer and/or film.Several electrodes is described below, the embodiment of strainer and film.In the positive flow system, before treat fluid arrived processing position 109, at least a portion treat fluid flow through the electrode in the detachable unit 120.Also can be configured to provide reverse direction flow with first and second flow systems, after treat fluid had flow through processing position 109, at least a portion treat fluid flow through electrode in reverse direction flow.

Fig. 6 represent detachable unit 120 be connected on the fixed cell 110 after the container 102 of chamber 100a.In operation, the description according to chamber 100 shown in top Fig. 4 B is connected to detachable unit 120 on the fixed cell 110.

Treatment chamber 100a advantage is shown in Fig. 5 and 6, need not the running that considerable time stops treatment chamber 100, promptly replaces old electrode with regard to available electrode new or that rebuild.Can from fixed cell 110, promptly pull down detachable unit 120, only just can load onto replacement detachable unit 120 then with new electrode 130 with the time of several minutes with old electrode 130.With need on equipment, maybe need the conventional system of pulling down in the slave unit of whole chamber is compared by the spot reconditioning parts, this has shortened greatly to repairing electrode or other processing element used stop times.

Another advantage of this treatment chamber 100 is can be easy to approaching position below cover plate 106 electrode and/or processing element 150 in the detachable unit 120 are changed.As a result, both needn't mobile fixed cell 110, head 104 also need not mobile lifting-rotary unit 108, with regard to replaceable old processing element.Further like this shortening to safeguard the stop time that processing element is used reorientated with respect to 110 pairs of heads 104 of fixed cell and lifting-rotary unit 108 because need not.

C. the embodiment of multiple-electrode electrochemical deposition vessel

Fig. 7-9 illustrates the embodiment aspect with a plurality of electrode containers, and these electrodes are used for the electrochemical deposition of material.Described aspect these embodiment many having four contexts that are arranged in the electrode of detachable unit independent operation.Each electrode can be independent of other electrodes to be controlled, and makes each electrode can produce independent current density like this, but it can remain unchanged or dynamic change electroplating work cycle period.In Application No. 09/849,505; 09/866,391; And having set forth the treating processes that is applicable to the operation electrode in 09/866,463, this paper comprises its full content as a reference.In addition, will be appreciated that other embodiment of a plurality of electrode containers can have the arbitrary combination of two or more electrodes, thereby the present invention do not had the restriction of four electrodes.

Fig. 7 is the sectional view that container 400 is shown, its have the fixed cell 402 that is configured to firmly be connected on the cover plate (not shown) with the fixed cell 402 separable detachable units that are connected 404.Some aspects of container 400 are similar to those aspects of chamber 100a, so identical Reference numeral is represented identical parts among Fig. 5-9.Utilize foregoing tie-in module 140 and hook 180, detachable unit 404 can be connected on the fixed cell 402 separably.Therefore, as mentioned above,, can pull down detachable unit 404 from fixed cell 402 at short notice according to the embodiment shown in Fig. 5 and 6.

Fixed cell 402 comprises the underframe 410 with flow system 414, and these flow system 414 conduct process fluids flow through underframe 410.Flow system 414 is specific embodiments of first flow system 114 noted earlier.Flow system 414 can be the individual components that is connected on the underframe 410, and perhaps flow system 414 can be that (a) is formed on the fluid channel and the combination that (b) is connected to the individual components on the underframe 410 in the underframe 410.In this embodiment, flow system 414 comprises the inlet 415 of reception from detachable unit 404 mobile treat fluid, has the first-class action-oriented spare 416 and the cup (antechamber) 418 in a plurality of slits (slot) 417.Described stream is radially distributed to cup 418 in slit 417 in first-class action-oriented spare 416.

Flow system 414 further comprises second movement-oriented 420, and its reception comes from the fluid of cup 418.Can comprise sidewall 421 with a plurality of openings 422 and jet flow device (flow projector) 424 for second movement-oriented 420 with a plurality of apertures 425.Opening 422 can be the horizontal gap of radial arrangement around sidewall 421, so that provide radially the inwardly a plurality of mobile composition (flow components) of injection to jet flow device 424.Aperture 425 on jet flow device can be a plurality of elongated gaps or other openings, and they are inclined upwardly and are radially inside.The radial flow composition that jet flow device 424 receives from opening 422, and make this stream change direction pass aperture 425.Will be appreciated that opening 422 can have some different configurations with aperture 425.For example, aperture 425 can be radially inside jet flow, be not inclined upwardly, perhaps aperture 425 angle bigger that can be inclined upwardly than angle shown in Fig. 7.Therefore, aperture can have from 0 °-45 ° slant range, and in several specific embodiments, aperture about 5 °-25 ° angle that can be inclined upwardly.

Fixed cell 402 also can comprise a shaping insert 440, is used to the electric field that is shaped, and flows at processing position conduct process fluidic.Field shaping insert 440 is specific embodiments of processing element 118 in the fixed cell 110 noted earlier.In this embodiment, the first dividing plate 442a that shaping insert 440 has with the first edge 443a is with the second partition 442b of the second edge 443b and with the 3rd dividing plate 442c of the 3rd edge 443c.The first edge 443a limits the first opening 444a.The first edge 443a and the second edge 443b limit the second opening 444b, and the second edge 443b and the 3rd edge 443c then limit the 3rd opening 444c.Fixed cell 402 can further comprise the weir (weir) 445 with edge 446, and treat fluid can flow in the accumulator tank (recovery channel) 447 thereon.The 3rd edge 443c and weir 445 limit the 4th opening 444d.Utilize a plurality of bolts or screw 448, field forming unit 440 and weir 445 are connected on the fixed cell 402, and some sealings 449 are positioned between fixed cell 402 and a forming unit 440 and the weir 445.

Fig. 8 is that container shown in Fig. 7 400 cuts open the sectional view of getting along different cross section, and it illustrates the interaction between fixed cell 402 and the detachable unit 404 in more detail.With reference to Fig. 7 and 8, detachable unit 404 comprises the storage 510 that the electrode assemblie and second flow system are housed together.Electrode assemblie is a specific embodiments of processing element 126 noted earlier, and second flow system is a specific embodiments of second flow system 124 noted earlier.Storage 510 also is connected on the underframe 410 as previously described like that separably.In the present embodiment, storage 510 comprises a plurality of partition members (dividers) or wall 512, and it limits a plurality of intervals 513.Have four intervals 513 in the specific embodiments shown in Fig. 7 and 8, but in other embodiments, storage 510 can comprise the interval of any amount, so that hold electrodes individually.513 also can limit the part that can flow through treat fluid in second flow system at interval.

Second flow system of detachable unit 404 comprises to fixed cell 402 inlets 415 provides mobile inlet 515, and receives from the outlet 516 of the streaming fluid at interval 513.In the specific embodiments shown in Fig. 5, flow system 414 in the fixed cell 402 further comprises the cup 418 and first first channel 520a between 513 at interval, the first opening 444b and second is the second passage 520b between 513 at interval, the 3rd opening 444c and the 3rd is the third channel 520c between 513 at interval, and the four-way 520d between the 4th opening 444d and the 4th interval 513.

Container 400 also comprises the interface element 530 between fixed cell 402 and the detachable unit 404.In this embodiment, interface element 530 is the sealings with a plurality of openings 532, so that can fluid connection between passage 520a-d and the corresponding interval 513.Sealing is a dielectric substance, the electric field of its electrical isolation in interval 513 and respective channel 520a-d.

Container 400 can further comprise a plurality of electrodes that are positioned at detachable unit 404.In the embodiment shown in Fig. 7 and 8, container 400 comprises first the 4th electrode 554 in 513 at interval of the third electrode 553, the four in 513 at interval of second electrode 552, the three in 513 at interval of first electrode 551, the second in 513 at interval.Electrode 551-554 can be the annular or the circular conductive elements of arranging concentrically with respect to one another.Yet electrode can be toxoplasma or have other shapes and structure.In this embodiment, each electrode all with run through detachable unit 404 in the electrical cnnector 560 of storage 510 be connected, thereby electrode is connected with power supply.Can provide constant current separately at whole plating work cycle period electrode 551-554, perhaps,, electric current is changed by one or more electrode 551-554 according to the special parameter of workpiece electroplating work cycle period.In addition, each electrode can have the unique electric current different with other electrode currents.

With reference to Fig. 8, co-operate fixed cell 402, detachable unit 404 and electrode 551-554 are to provide predetermined treat fluid flow distribution (flow profile) and the electric distribution of handling 109 places, position.In this specific embodiments, treat fluid 515 and 415 enters and flows through first-class action-oriented spare 416 by entering the mouth.Then, the fluid flow bifurcated: a part of fluid upwards flows through second fluid guide 420 via cup 418, and another part fluid crosses first electrode 551 downwards via passage 520a.Flow through second movement-oriented 420 fluid that makes progress and pass the jet flow device 424 and the first opening 444a.Therefore, first electrode 551 provides by the first opening 444a that is limited by the first dividing plate 442a edge 443a and effectively is exposed to the electric field (Fig. 4) of handling position 109.So, according to the structure of edge 443a, the be shaped field of first electrode 551 of opening 444a.Part fluid is upwards crossed edge 443a, by handling position 109, flows through the edge 446 on weir 445 then again.Another part of treat fluid is passed down through each passage 520b-d to electrode 552-554.Pass this part fluid of second passage 520b and cross second electrode 552, the electric field of second electrode 552 so that the opening 444b that is limited by the first edge 443a and the second edge 443b is shaped.Similarly, pass the fluid of third channel 520c and cross third electrode 553, and the fluid that passes four-way 520d is crossed the 4th electrode 554.Therefore, the electric field of opening 444c shaping third electrode 553, the electric field of the 4th electrode 554 and opening 444d is shaped.Then, fluid passes interval 513 and flows out from container 400 by outlet 516.

Above-mentioned flow pattern is a reverse direction flow, in this reverse direction flow electrode 551-554 in the downstream of handling position 109, thereby bubble that will be produced by electrode 551-554 in the treat fluid or particulate matter be taken away from handling position 109.This downstream configuration is estimated particularly useful to consumable electrode, because consumable electrode can produce bubble and particulate matter, and this phenomenon may cause on the workpiece plate surface and defective occurs.

Compare with existing electrochemical deposition chamber, estimate that container 400 shortens and a plurality of electrodes of repairing relevant stop times greatly.With reference to Fig. 8, by opening tie-in module 140 simply, detachable unit 404 is pulled down from fixed cell 402, replacement detachable unit with new electrode is set below fixed cell 402, and then close tie-in module 140, so just all electrode 551-554 can be replaced with new electrode.Because detachable unit 404 is positioned at the outside of fixed cell 402, so the operator need not to resemble the open top that will pass fixed cell 402 indoor in routine and arrives electrode 551-554 position.This can not only be quickly near electrode 551-554, but also saves time than conventional chamber, then reinstalls because need not to pull down a shaping insert 440.In fact, when the off line of this chamber, need not to pull down from container electrode 551-554, because the replacement detachable unit can be installed at any time once pulling down detachable unit with old electrode.Therefore, the time that the online time is less than conventional chamber is greatly returned in the electrochemical deposition chamber with

container

102 or 400 embodiment.

Fig. 9 is the sectional view of container 400 another embodiment.This embodiment is similar with the embodiment shown in 8 to Fig. 7, and therefore, identical Reference numeral is represented identical parts in these accompanying drawings.The embodiment of container shown in Fig. 9 400 comprises the interface element 610 with liner 620 and lining 630.Liner 620 can be arranged between fixed cell 402 and the detachable unit 404, and lining 630 is arranged in detachable unit 404 and/or the fixed cell 402.Lining 630 can be film or strainer, intercepts and captures at interval bubble or particulate matter in 513 with it, thereby preventing that them from transferring to handles 109 places, position.If strainer, then according to the flowing of positive flow system or reverse direction flow system, treat fluid flows through the lining (liner) 630 between fixed cell 402 and the detachable unit 404.If film, then that fluid is seen through is mobile for lining, but allows ion to pass corresponding passage 520a-d from electrode 551-554, thereby reaches ion plating on the surface of workpiece.Lining 630 can have a plurality of discrete portions (discrete sections) that are arranged in interval 513 and/or passage 520a-d.Liner 620 can be connected with lining 630, thereby interface element 610 can be installed and removed as a separate part.

The embodiment of container shown in Fig. 9 400 estimates to be used in bubble and particulate matter, and to produce the place of defective very effective.Should be appreciated that lining 630 also can further weaken bubble or particulate matter and arrive processing position 109.It also is effectively that container shown in Fig. 9 400 is applied to following occasion, promptly uses a kind of treat fluid in fixed cell, and use another kind of treat fluid in detachable unit.In such an embodiment, detachable lining 630 can be a film, and it allows ion to flow to passage 520a-d from interval 513, but does not allow treat fluid to flow between interval 513 and passage 520a-d.

Figure 10 is the bottom perspective view of expression container 400 all respects of other embodiment according to the present invention.Container 400 can further comprise inlet 515 first accessories 701 that are connected with treatment fluid sources (supply), and will export 516 and flow second accessories 702 that holding tank (holding tank) is connected with processing.In a specific embodiments, accessory 701 is female fitting (female fitting), 515 is male fitting (male fitting) and enter the mouth, and accessory 702 is male fittings, is female fittings and export 516.By making female fitting 701 joint accesses 515 and making male fitting 702 be connected outlet 516, the treat fluid supply line can only be connected on the inlet 515, and treat fluid flows out pipeline and can only be connected in the outlet 516.Therefore, this structure has been guaranteed the installation that detachable unit 404 is correct.

Figure 10 also illustrates tie-in module 140 in more detail.In this embodiment, tie-in module 140 comprises gripping ring 708 and kayser 710, and this kayser 710 is mobile gripping ring in the first location with first diameter with between having less than the second position of second diameter of first diameter.When kayser 710 with gripping ring when first location moves to the second position, dwindled the diameter of gripping ring 708, thereby detachable unit 404 be clamped on the fixed cell 402.

Figure 11 represents according to another embodiment of container of the present invention.Described those parts of all relevant with the front Fig. 7-10 of some parts of Figure 11 are similar.Container 800 shown in Figure 11 has fixed cell 810, utilizes clip 830 to be connected to detachable unit 820 on the fixed cell 810 and the interface element 840 between fixed cell 810 and detachable unit 820 separably.The key distinction between container 800 and the container 400 is that container 800 has nonplanar interface element 840, and container 400 has planar interface element 530.

D. the support embodiment that is used for the attachment/detachment detachable unit

Foregoing chamber can further comprise the support below this chamber, is used for installing and removing detachable unit.Below just detachable unit 404 aspects shown in Fig. 7-10 several embodiment of support are described, but should be appreciated that this support can work with any detachable unit of the present invention.

Figure 12 A is support 900 top perspective view that are used for installing and removing detachable unit 404 (Fig. 7).Support 900 can comprise the carriage (bracket) 910 that is installed to below the equipment cover plate 106 (Fig. 2).This support 900 can further comprise guide rail 912 and end stop (endstop) 914.Guide rail 912 receives chute (slide channels) 196a and 196b (Fig. 4 A-B, 5,6,8 and 10), and end stop 914 engages with the circular portion of detachable unit 404.In operation, the operator engages with end stop 914 up to this detachable unit along guide rail 912 slip detachable units 404.

Figure 12 B is the bottom perspective view of expression support 900 other aspects.Support 900 can further comprise the topworks (actuator) 920 with handle 922, axle 924 and the elevating lever (lifters) 926 that is moved by axle 924.Topworks 920 can further comprise the connecting rod 928 that is connected and is arranged in joint (joint) 929 with elevating lever 926.Therefore, the rotation of handle is the connecting rod 928 in the swivel 929 then, thereby rises and reduce elevating lever 926.For detachable unit is installed, topworks 920 is moved to the first location shown in Figure 12 B, and insert detachable unit along guide rail 912.Upwards rise (arrow R) topworks 920 then to the second position, cause elevating lever 926 that detachable unit 404 is elevated to fixed cell 402 like this.When topworks 920 rotated up, handle 922 was by the gap 930 in carriage 910 base flange 931.By along axle 924 slide handle 922 axially, topworks 920 is remained on the second position, thereby make flange 931 support handles 922.

Support 900 has further strengthened the process that detachable unit is changed mutually.At first, support 900 guarantees that detachable unit 404 generally aims at fixed cell 402.Secondly, this support guarantee to enter the mouth 515 and outlet 516 aim at supply line and vent line.The 3rd, this support is more prone to the installation of detachable unit 404 and dismounting, because when being operatively connected assembly 140 simultaneously, the operator will not be pressed against on the fixed cell 402 by detachable unit 404.Therefore, this support estimates that further shortening detachable unit changes the used time mutually.

E. the embodiment of integrated equipment

Figure 13 is the plan view from above of expression according to integrated equipment 1300 parts of the embodiment of the invention.In this embodiment, integrated equipment 1300 comprises framework 1310, installs to the installed module 1320 of the dimensional stabilizing of framework 1310, a plurality of wet chemical processing chambers 1370 and a plurality of lifting-rotary unit 1380.Equipment 1300 can also comprise transfer system 1390.Installed module 1320 supporting treatment chamber 1370, lifting-rotary unit 1380 and transfer systems 1390.As reference prior figures 2-12B was described, the wet chemical processing chamber 1370 in the equipment 1300 can comprise the container with fixed cell and detachable unit.

The framework 1310 of equipment 1300 has a plurality of posts (posts) 1311 and cross bar (cross-bars) 1312, and they weld together with manner known in the art.Installed module 1320 is contained in the framework 1310 at least in part.In one embodiment, by the cross bar 1312 supporting installed modules 1320 of framework 1310, but installed module 1320 can be placed directly on the ground or other structures among other embodiment of facility.

Installed module 1320 is inflexible rock steady structures, and it keeps wet chemical processing chamber 1370, the relative position between lifting-rotary unit 1380 and the transfer system 1390.An aspect of installed module 1320 is that it is very hard, and has the structural integrity bigger than framework 1310, makes wet chemical processing chamber 1370, and the relative position between lifting-rotary unit 1380 and the transfer system 1390 can not change in time.Another aspect of installed module 1320 is its cover plate 1330 that is included in the dimensional stabilizing that has setting element on the exact position, is used for treatment chamber 1370 and lifting-rotary unit 1380 are positioned at cover plate 1330 known positions.(not shown) can directly be installed in transfer system 1390 on the cover plate 1330 in one embodiment.In other embodiments, installed module 1320 also has the platform 1350 of dimensional stabilizing, and transfer system 1390 is installed on this platform 1350.Cover plate 1330 and platform 1350 are located each other securely, make and can not move each other at setting element on the cover plate 1330 and the setting element on platform 1350.Therefore, installed module 1320 provides a kind of like this system, wherein, and dismountable wet chemical processing chamber 1370 and lifting-rotary unit 1380, and be positioned at mode on cover plate 1330 exact positions exactly according to replacing parts, with interchange components it is replaced.

Equipment 1300 is specially adapted to following application scenario, promptly has strict technical requirements, and to wet chemical processing chamber 1370, lifting-rotary unit 1380 or transfer system 1390 need frequent maintenance.By pulling down this chamber from handling cover plate 1330 simply, and with have be configured to the installation hardware that docks with setting element on the cover plate 1330 the exchange chamber with these chamber 1370 replacings, can be to wet chemical processing chamber 1370 places under repair or maintenance.Because installed module 1320 is dimensional stabilizings, and the installation hardware of replacing treatment chamber 1370 docks with cover plate 1330, so need not just can exchange chamber 3170 on cover plate 1330 to transfer system 1390 recalibrations.Estimate to shorten greatly with repairing like this or safeguard the stop time that treatment chamber 1370 is relevant, thereby make equipment in application, can keep high turnout with strict performance specification requirement.When repairing when pulling down fixed cell 110 (Fig. 2) so that to the chamber, this of equipment 1300 is particularly useful on the one hand.

Transfer system 1390 is from the dress that is connected with installed module 1320/unload the module 1398 and fetch workpiece.Transfer system 1390 comprises track 1392, mechanical manipulator 1394 and at least one terminal operating device (end-effector) 1396.Track 1392 is installed on the platform 1350.More precisely, track 1392 docks with setting element on the platform 1350, so that locate exactly with respect to

chamber

1370 and 1380 pairs of tracks 1392 of lifting-rotary unit of being connected on the cover plate 1330.Therefore, mechanical manipulator 1394 and terminal operating device 1396 can move in the infrastructural frame of the fixed that is formed by installed module 1320, dimensional stabilizing.Equipment 1300 can further comprise a plurality of panels 1399 that are connected with framework 1310, with installed module 1320, and wet chemical processing chamber 1370, lifting-rotary unit 1380 and transfer system 1390 are encapsulated in the case.In other embodiments, the panel 1399 of dismounting equipment 1300 one or both sides in can be on handle cover plate 1330 regional is so that provide the equipment of an open type.

F. the embodiment of the installed module of dimensional stabilizing

Figure 14 is used in installed module 1320 stereographic maps in the equipment 1300 according to the embodiment of the invention.In this embodiment, cover plate 1330 comprises rigidity first panel 1331 and eclipsed rigidity second panel 1332 below first panel 1331.First panel 1331 can be an external member, and second panel 1332 can be and the juxtaposed internals of external member.First panel 1331 and second panel 1332 also can have with Figure 14 in the different structure of structure.A plurality of chambers jack 1333 is arranged in first panel 1331 and second panel 1332, is used to receive wet chemical processing chamber 1370 (Figure 13).

Cover plate 1330 can further comprise a plurality of setting element 1334 and connect elements 1335 that first panel 1331 is arranged with accurate pattern that pass.Setting element 1334 can be the hole of accurate location mechanical workout in first panel 1331, and has accurate dimension, is used for receiving the blind nail (dowels) or the pin that dock with wet chemical processing chamber 1370 (Figure 13).In other embodiments, setting element 1334 can be a pin, for example circular pegs or tapered pin, and they are protruding upward from first panel 1331, are received by the fit structure in the wet chemical processing chamber 1370.Cover plate 1330 has the first group of setting element 1334 that is positioned at each chamber jack 1333 place, each wet chemical processing chamber is positioned at exactly the accurate location of installed module 1320.Cover plate 1330 also can comprise second group of setting element 1334 near each jack 1333, each lifting-rotary unit 1380 is positioned at exactly the accurate location of installed module 1320.Connect elements 1335 can be the threaded hole in first panel 1331, in order to receive bolt, so that chamber 1370 and lifting-rotary unit 1380 are fixed on the cover plate 1330.

Installed module 1320 also comprises along cover plate 1330 vertical outer peripheral outer panels 1360, along the interior plate 1361 of cover plate 1330 vertical preglabellar fields, and the

end plate

1362 and 1364 that is connected with cover plate 1330 ends.Delivery platform 1350 is connected with 1364 with interior plate 1361 and end plate 1362.Delivery platform 1350 comprises setting element 1354, is used for the track 1392 (Figure 13) of transfer system 1390 is positioned at installed module 1320 exactly.Delivery platform 1350 can further comprise connect elements, and threaded hole for example is in order to receive bolt, so that track 1392 is fixed on the platform 1350.

Figure 15 is the sectional view of a suitable embodiment of expression cover plate 1330 internal structures, and Figure 16 is the detail drawing of the part of cover plate shown in Figure 15.In this embodiment, cover plate 1330 comprises support (bracing) 1340, joist for example, its horizontal expansion between outer panel 1360 and interior plate 1361.First panel 1331 is connected to and supports 1340 upside, and second panel 1332 then is connected to and supports 1340 downside.Cover plate 1330 can further comprise a plurality of straight-through bolts 1342 and nut 1344, so that first panel 1331 and second panel 1332 are fixed in the support 1340.As in Figure 16, clearly expressing, support 1340 and have a plurality of holes 1345, straight-through bolt 1342 runs through this hole.Nut 1344 can be soldered on the bolt 1342, to strengthen the connection between these parts.

The panel of cover plate 1330 and support can be by stainless steels, other metal alloys, and fine and close casting (solid cast) material or fiber reinforcement synthetics are made.For example, panel and plate can be by Nitronic 50 stainless steels, Hastelloy (Hastelloy) 625 steel alloys, or fine and close casting filling micaceous Resins, epoxy is made.The fiber reinforcement synthetics can comprise Kevlar  (aramid fiber) reticulation (mesh) of carbon fiber or hardening resin.Be used for

panel

1331 and 1332 material and must be high rigidity and with compatible mutually at the used chemical preparations of wet-chemical treatment.Stainless steel fully is suitable for a lot of purposes, because it is firm, and the electrolytic solution or the cleaning soln that are not subjected to much to use in wet-chemical treatment influence.In one embodiment, panel and

plate

1331,1332,1360,1361,1362 and 1364 are 0.125 to 0.375 inch thick stainless steels, and more precisely, they can be 0.250 inch thick stainless steels.Yet panel can have different thickness with plate in other embodiments.

Supporting 1340 also can be stainless steel, fiber reinforcement synthetics material, other metal alloys and/or fine and close cast material.In one embodiment, support can be 0.5 to 2.0 inch wide stainless steel joist, more precisely, is 1.0 inches wide * 2.0 inch high stainless steel joists.In other embodiments, supporting 1340 can be honeycomb core (honey-comb core), the foams of light foam metal or other types, polymkeric substance, glass fibre or other materials.

By assembling cover plate 1330 each several parts, and then with

end plate

1362 and 1364 welding or adhere to structure installed module 1320 on cover plate 1330 each several parts in addition.Usually need not weld, and cover plate 1330 each parts are fixed together with straight-through bolt 1342.Utilize welding and/or fastening piece, outer panel 1360 and interior plate 1361 are connected on cover plate 1330 and end plate 1362 and 1364.And then platform 1350 is connected to

end plate

1362 and 1364 securely, and on the interior plate 1361.

Installed module 1320 provides a heavy dimensional space stable structure, it remains on the relative position between the setting element 1354 on setting element on the cover plate 1,330 1334 and the platform 1350 in this scope, promptly need not at every turn when replacing treatment chamber 1370 or lifting-rotary unit 1380 and install on the cover plate 1330 just to transfer system 1390 recalibrations.Usually installed module 1320 is rigid structures, when with wet chemical processing chamber 1370, when lifting-rotary unit 1380 and transfer system 1390 installed on the installed module 1320, this rigid structure had enough intensity to keep relative position between setting element 1334 and 1354.In certain embodiments, installed module 1320 is configured to the relative position between setting

element

1334 and 1354 is remained in 0.025 inch scope in predetermined original position (reference positions).In other embodiments, installed module is configured to setting element 1334 and 1354 s' relative position is remained in about 0.005-0.015 inch scope in predetermined original position.After this manner, cover plate 1330 often remains on the uniform planar in about 0.025 inch scope, in embodiment more specifically greatly about the 0.005-0.015 inch.

G. the embodiment of wet chemical processing chamber

Figure 17 is the perspective, cut-away view of interface between expression wet chemical processing chamber 1370 and the cover plate 1330.Chamber 1370 can comprise the

processing vessel

102 and 400 with sectional fixture 116 noted earlier.Sectional fixture 116 and container 102/400 can be the separate parts that links together.In this case, sectional fixture 116 can be made by the material of dimensional stabilizing, for example stainless steel, fiber reinforced material, steel alloy, fine and close cast material or other rigid materials that is fit to.In other embodiments, sectional fixture 116 is whole with 102/400 one-tenth in container, and is made of high density polymer and other materials that is fit to.

Sectional fixture 116 shown in Figure 17 comprises a plurality of interface component 1374, and it is arranged to pattern and aims at the setting element 1334 on the cover plate 1330.Setting element 1334 and interface component 1374 are configured to be fitted to each other equally, thereby accurately the location and installation anchor clamps 116, therefore and chamber 1370 is positioned on the scheduled operation position on the cover plate 1330, so that work with lifting-rotary unit 1380 and transfer system 1390.Setting element 1334 can be hole that accurate machine adds in one group of cover plate 1330 and the blind nail that is contained in these holes, and interface component 1374 can be the hole that accurate machine adds in sectional fixture 116, to match with blind nail.Blind nail can be cylindrical, sphere, and the pin of taper and other suitable shapes is to aim at and to be provided with sectional fixture 116 on respect to the exact position of cover plate 1330.Sectional fixture 116 can further comprise a plurality of be arranged to cover plate in 1330 connect elements, 1335 aligned fastening pieces 1375, fastening piece 1375 can be bolt or other screw members, in order to engage connect elements 1335 securely, so that sectional fixture 116 is fixed on the cover plate 1330.Therefore, sectional fixture 116 is with on the processing vessel 102/400 maintenance fixedly exact position on the cover board.

From foregoing, to should be appreciated that this paper is described specific embodiments of the present invention in order specifying, but, can to do various modifications under the spirit and scope of the present invention condition.Therefore, the present invention is unrestricted, but except the claims.

Claims

1, a kind of chamber that is used for the miniature parts workpiece is carried out wet-chemical treatment comprises:

Fixed cell, it has and is configured to the conduct process fluid and flows through first flow system of this fixed cell and be used for this fixed cell is connected to sectional fixture on the device support member securely;

Detachable unit, it has and is configured to conduct process direction of flow fixed cell first flow system and/or conduct process fluid from fixed cell first second flow system that system flow goes out that flows, and characteristic passed to the processing element of treat fluid, be used for the surface on the miniature parts workpiece with submicron miniature parts is handled; With

Connected system, it is connected to detachable unit on the fixed cell separably, and wherein, connected system has the second position that detachable unit is fixed to the first location on the fixed cell and detachable unit can be removed from fixed cell.

2, according to the chamber of claim 1, further comprise the head that is positioned at above the fixed cell, wherein this head comprises the workpiece clamp that is configured to workpiece is remained on the processing position.

3, according to the chamber of claim 1, wherein:

Processing element comprises the electrode in the detachable unit; And

Described chamber further comprises the head with workpiece clamp, and this workpiece clamp comprises and is configured to workpiece is remained on the electrical contact of handling the position and engaging with conductive layer on the workpiece.

4, according to the chamber of claim 1, wherein:

Processing element comprises electrode assemblie, but this electrode assemblie have and a plurality ofly they be spaced from each other the electrode of independent operation with dielectric spacer, and this electrode assemblie is arranged in the detachable unit; And

5, according to the chamber of claim 1, wherein, processing element comprises the strainer in the detachable unit.

6, according to the chamber of claim 1, wherein, processing element comprises film, and described film configuration is for to pass this film with conduction of current.

7, according to the chamber of claim 1, wherein, tie-in module comprises the gripping ring that is configured to radially be moved into from first location the second position, so that detachable unit is clamped on the fixed cell.

8,, further comprise the sealing between fixed cell primary sealing area and the detachable unit secondary sealing area according to the chamber of claim 1.

9, according to the chamber of claim 1, wherein:

Fixed cell further comprises to increase progressively the acclivitous inclined guide rails face of radius, to have tilting axis carrier ring and primary sealing area with the acclivitous bearing surface of radius that successively decreases;

Detachable unit further comprises edge and secondary sealing area, and this edge has to increase progressively the acclivitous lower surface of radius and to increase progressively the acclivitous upper surface of radius; And

Sealing, it is between first and second trim.

10, according to the chamber of claim 1, wherein:

Processing element comprises the electrode in the detachable unit; And

Described chamber comprises that further (a) has the head of workpiece clamp, and this workpiece clamp comprises and be configured to workpiece is remained on the electrical contact of handling the position and engaging with conductive layer on the workpiece, and (b) sealing between a part of fixed cell and the detachable unit.

11, according to the chamber of claim 1, wherein:

Processing element comprises electrode in the detachable unit and the strainer between electrode and the processing position; And

12, according to the chamber of claim 1, wherein:

Processing element comprises electrode in the detachable unit and the film between electrode and the processing position, and wherein, this film configuration is a conduction current; And

13, a kind of chamber that is used for the miniature parts workpiece is carried out wet-chemical treatment comprises:

Fixed cell, it has and is configured to the conduct process fluid and flows through first flow system of this fixed cell and be used for this fixed cell is connected to sectional fixture on the device support face securely;

Detachable unit, it is connected on the fixed cell separably, and this detachable unit has and is configured to conduct process direction of flow fixed cell first flow system and/or conduct process fluid from fixed cell first second flow system that system flow goes out that flows;

Sealing, it leaks between fixed cell and detachable unit to prevent treat fluid between fixed cell and detachable unit, and sealing has the hole, can flow between first and second flow system by this hole treat fluid; With

Processing element, it is positioned at fixed cell and/or detachable unit, and wherein, this processing element is passed to treat fluid with characteristic, is used for the surface on the miniature parts workpiece with submicron miniature parts is handled.

14, according to the chamber of claim 13, further comprise the head that is positioned at above the fixed cell, wherein, this head comprises the workpiece clamp that is configured to workpiece is remained on the processing position.

15, according to the chamber of claim 13, wherein:

Processing element comprises the electrode in the detachable unit; And

16, according to the chamber of claim 13, wherein:

17, according to the chamber of claim 13, wherein, processing element comprises the strainer in the detachable unit.

18, according to the chamber of claim 13, wherein, processing element comprises the film in the detachable unit, and this film configuration is for to pass this film with conduction of current.

19, according to the chamber of claim 13, further comprise tie-in module, this tie-in module has the gripping ring that is configured to radially be moved into from first location the second position, so that detachable unit is clamped on the fixed cell.

20, according to the chamber of claim 13, wherein:

21, according to the chamber of claim 13, wherein:

Processing element comprises the electrode in the detachable unit, and the film between electrode and the processing position, and wherein this film configuration is a conduction current; And

22, a kind of integrated equipment that is used for the miniature parts workpiece is carried out wet-chemical treatment comprises:

Installed module, it has a plurality of setting elements and connect elements;

Wet chemical processing chamber, it is supported by installed module, this wet chemical processing chamber comprises fixed cell, detachable unit, connected system and processing position, wherein (a) fixed cell has and is configured to the conduct process fluid and flows through first flow system of this fixed cell and have the sectional fixture of first interface component that engages with one of setting element and first fastening piece that engages with one of connect elements, (b) detachable unit has and is configured to conduct process direction of flow fixed cell first flow system and/or conduct process fluid from fixed cell first second flow system that system flow goes out that flows, and the processing element of characteristic being passed to treat fluid, be used for the surface on the miniature parts workpiece with submicron miniature parts is handled, (c) connected system is connected to detachable unit on the fixed cell separably, (d) handle placement configurations for receiving the miniature parts workpiece, this processing position is arranged in fixed cell or detachable unit one so that workpiece with have a part of treat fluid of passing to characteristic by processing element and contact;

Transfer system, it is supported by installed module, is used for conveying work pieces in equipment; And

Wherein, installed module is configured to keep the relative position between the setting element, when replacing this treatment chamber with box lunch with another treatment chamber, need not to recalibrate transfer system.

23, according to the equipment of claim 22, wherein, installed module further comprises cover plate, and this cover plate has rigidity first panel, the joist below first panel between eclipsed rigidity second panel, first and second panel and the bolt that passes first panel, joist and second panel.

24, according to the equipment of claim 22, wherein, installed module further comprises cover plate, this cover plate have rigidity first panel, and juxtaposed rigidity second panel of first panel and first and second panel between support.

25, according to the equipment of claim 24, further comprise the head that is positioned at above the fixed cell, wherein, this head comprises the workpiece clamp that is configured to workpiece is remained on the processing position.

26, according to the equipment of claim 24, wherein:

Processing element comprises the electrode in the detachable unit; And

27,, further comprise the sealing between fixed cell primary sealing area and the detachable unit secondary sealing area according to the equipment of claim 24.

28, according to the equipment of claim 24, wherein:

Processing element comprises the electrode in the detachable unit; And

29, according to the equipment of claim 24, wherein:

30, according to the equipment of claim 24, wherein:

31, a kind of integrated equipment that is used for the miniature parts workpiece is carried out wet-chemical treatment comprises:

Installed module, it has a plurality of setting elements;

Wet chemical processing chamber, it is supported by installed module, this wet chemical processing chamber comprises fixed cell, is connected to the sealing between detachable unit, fixed cell and the detachable unit on this fixed cell and be positioned at the processing element of detachable unit separably, wherein, fixed cell comprises the sectional fixture with first interface component that engages with one of setting element and first fastening piece that engages with one of setting element;

Transfer system, it is supported by installed module, is used for conveying work pieces in equipment, and this transfer system has second interface component that engages with one of setting element and second fastening piece that engages with one of connect elements; And

32, according to the equipment of claim 31, wherein, installed module further comprises cover plate, and this cover plate has rigidity first panel, the joist below first panel between eclipsed rigidity second panel, first and second panel and the bolt that passes first panel, joist and second panel.

33, according to the equipment of claim 31, wherein, installed module further comprises cover plate, this cover plate have rigidity first panel, and juxtaposed rigidity second panel of first panel and first and second panel between support.

34, according to the equipment of claim 31, further comprise the head that is positioned at above the fixed cell, wherein, this head comprises the workpiece clamp that is configured to equipment is remained on the processing position.

35, according to the equipment of claim 31, wherein:

Processing element comprises the electrode in the detachable unit; And

36, a kind of being used for comprises in the electrochemical deposition chamber with deposition material on the miniature parts workpiece of submicron part:

Head assembly, it has the workpiece clamp that is configured to the miniature parts workpiece is positioned at the processing position;

Fixed cell, it has first flow system, to provide treat fluid to handling the position;

Detachable unit, it has second flow system, is communicated with the first mobile system fluid of fixed cell;

Sealing, it prevents that treat fluid from leaking between fixed cell and detachable unit;

Tie-in module, it is connected to detachable unit on the fixed cell separably; And

At least one first electrode and at least one first electrical cnnector that is connected with first electrode in the detachable unit.

37,, further comprise second electrode in the detachable unit and the dielectric spacer between first electrode and second electrode according to the chamber of claim 36.

38,, further comprise the strainer in first flow system and/or second flow system according to the chamber of claim 36.

39, according to the chamber of claim 36, further comprise the film in first flow system and/or second flow system, wherein, this film configuration is a conduction current.

40, according to the chamber of claim 36, wherein, tie-in module comprises the gripping ring that is configured to radially be moved into from first location the second position, so that detachable unit is clamped on the fixed cell.

41, according to the chamber of claim 36, wherein:

Fixed cell further comprise with increase progressively the acclivitous inclined guide rails face of radius, have with the tilting axis carrier ring of the acclivitous bearing surface of radius that successively decreases and with the primary sealing area of sealing one side contacts; And

Detachable unit further comprise the edge and with the secondary sealing area that contacts of sealing opposite side, this edge has to increase progressively the acclivitous lower surface of radius and to increase progressively the acclivitous upper surface of radius.

42, according to the chamber of claim 36, wherein, fixed cell further comprises a shaping module, in its shaping treat fluid by electrode induced electric field.

43, according to the chamber of claim 36, further comprise:

The first electrode arranged concentric in second electrode, itself and detachable unit; With

Field shaping module, it is positioned at fixed cell, wherein, this shaping module is made of dielectric substance, and having first opening and second opening, first opening surface can pass this opening to handling position first part by the first electrode induced ion, second opening surface can pass this opening to handling the position second section by the second electrode induced ion.

44, according to the chamber of claim 43, further comprise second electrical cnnector that is connected with second electrode, but and first and second electrodes independent operation each other.

45, according to the chamber of claim 36, further comprise:

Second electrode, it is concentric with first electrode and the dielectric spacer between first and second electrode in the detachable unit;

Field shaping module, it is positioned at fixed cell, and this shaping module is made of dielectric substance, its electric field by in the treat fluid of first and second electrodes generation that is configured to be shaped; With

Strainer, it is positioned at fixed cell and/or detachable unit.

46, according to the chamber of claim 36, further comprise:

Film, it is positioned at fixed cell and/or detachable unit, with conduction current.

47, according to the chamber of claim 36, wherein, detachable unit be positioned at the fixed cell outside below.

48, according to the chamber of claim 36, wherein, detachable unit further comprises the outside come-at-able fluid accessories that treat fluid can flow through.

49, a kind of being used for comprises in the electrochemical deposition chamber with deposition material on the miniature parts workpiece of submicron part:

Head assembly, it has workpiece clamp and electrical contact, and this workpiece clamp is configured to the miniature parts workpiece is positioned at the processing position, and the layer of the electrical contact of layout on workpiece provides electric current;

Container, it has: comprise with fixed cell be connected to the fixed cell of the sectional fixture on the equipment cover plate, below sectional fixture, be connected to separably on the fixed cell be located outside come-at-able detachable unit below the equipment cover plate, between fixed cell and the detachable unit with control fixed cell and detachable unit between treat fluid interface element and detachable unit is connected to tie-in module on the fixed cell separably; And

Electrode, it is positioned at detachable unit.

50,, further comprise second electrode in the detachable unit and the dielectric spacer between first electrode and second electrode according to the chamber of claim 49.

51,, further comprise the strainer in the container according to the chamber of claim 49.

52, according to the chamber of claim 49, further comprise the film that is configured to conduction current in the container.

53, according to the chamber of claim 49, wherein, tie-in module comprises the gripping ring that is configured to radially be moved into from first location the second position, so that detachable unit is clamped on the fixed cell.

54, according to the chamber of claim 49, wherein:

Interface element comprises the liner between fixed cell and the detachable unit; And

The outside come-at-able fluid accessories that treat fluid can flow through.

55, according to the chamber of claim 49, further comprise:

Flow system, it is positioned at container, is configured to guide the mobile treat fluid to be substantially perpendicular at least and handles locational workpiece; With

Field shaping module, it is positioned at container, to be shaped by the electric field in the electrode institute induced treat fluid.

56, according to the chamber of claim 49, further comprise:

Field shaping module, it is positioned at container, this shaping module is made of dielectric substance, and this shaping module has first opening and second opening, first opening surface is handled the first part of position to workpiece, can pass this opening by the first electrode induced ion, second opening surface is handled the position second section to workpiece, can pass this opening by the second electrode induced ion.

57, according to the chamber of claim 49, further comprise:

Field shaping module, it is positioned at container, and this shaping die block structure is for being shaped by the electric field in the treat fluid of first and second electrodes generation;

Flow system, it is positioned at container, has wall, and this wall guided mobile treat fluid is substantially perpendicular at least handles locational workpiece; With

Strainer, it is positioned at container, is communicated with the treat fluid fluid.

58, according to the chamber of claim 49, wherein:

Field shaping module, it is positioned at container, and this shaping die block structure is for being shaped by the electric field in the receptacle treat fluid of first and second electrodes generation;

Flow system, it is positioned at container, has wall, and this wall guided treat fluid is substantially perpendicular at least handles locational workpiece; With

Film, it is positioned at container, and conduction processes flows intravital electric current.

59, a kind of integrated equipment that is used for the miniature parts workpiece is carried out wet-chemical treatment comprises:

Installed module, it has a plurality of setting elements and connect elements;

The electrochemical deposition chamber, it comprises: head assembly, this head assembly have the workpiece clamp that is configured to the miniature parts workpiece is positioned at the processing position; Fixed cell, this fixed cell have to handling position first flow system that treat fluid is provided and the sectional fixture that is used for securely this fixed cell being connected on the equipment supporting member; Detachable unit, this detachable unit have second flow system that is communicated with the fixed cell first mobile system fluid; Sealing, sealing prevent that treat fluid from leaking between fixed cell and detachable unit; Tie-in module, this tie-in module is connected to detachable unit on the fixed cell separably; And first electrode in the detachable unit at least;

Wherein installed module is configured to keep the relative position between the setting element, when replacing this treatment chamber with box lunch with another treatment chamber, need not to recalibrate transfer system.

60, according to the equipment of claim 59, wherein, installed module further comprises cover plate, and this cover plate has rigidity first panel, the joist below first panel between eclipsed rigidity second panel, first and second panel and the bolt that passes first panel, joist and second panel.

61, according to the equipment of claim 59, wherein, installed module further comprises cover plate, this cover plate have rigidity first panel, and juxtaposed rigidity second panel of first panel and first and second panels between support.

62,, further comprise second electrode and first electrode and the second interelectrode dielectric spacer in the detachable unit according to the equipment of claim 59.

63,, further comprise the strainer in first flow system and/or second flow system according to the equipment of claim 59.

64, according to the equipment of claim 59, further comprise the film in first flow system and/or second flow system, wherein, this film configuration is a conduction current.

65, according to the equipment of claim 59, wherein, tie-in module comprises the gripping ring that is configured to radially be moved into from first location the second position, so that detachable unit is clamped on the fixed cell.

66, according to the equipment of claim 59, wherein:

67, according to the equipment of claim 59, wherein, fixed cell further comprises a shaping module, and it is shaped by the electric field in the electrode induced treat fluid.

68, according to the equipment of claim 59, further comprise:

Field shaping module, it is positioned at fixed cell, wherein, this shaping module is made of dielectric substance, and have first opening and second opening, first opening surface can pass this opening to handling the first part of position by the first electrode induced ion, second opening surface can pass this opening to handling the second section of position by the second electrode induced ion.

69, according to the equipment of claim 68, further comprise second electrical cnnector that is connected on second electrode, but and first and second electrodes independent operation each other.

70, according to the equipment of claim 49, further comprise:

Shaping module, it is positioned at fixed cell, and this shaping module is made of dielectric substance, the electric field in the treat fluid that is produced by first and second electrodes that is configured to be shaped; With

Strainer, it is positioned at fixed cell and/or detachable unit.

71, according to the equipment of claim 49, further comprise:

72, a kind of integrated equipment that is used for the miniature parts workpiece is carried out wet-chemical treatment comprises:

Installed module, it has a plurality of setting elements and connect elements;

The electrochemical deposition chamber, it comprises head assembly and container, this head assembly has and is configured to the miniature parts workpiece is positioned at the electrical contact that the workpiece clamp of handling the position and the layer on workpiece provide electric current to arrange, and container has: fixed cell, this fixed cell comprise this fixed cell are connected to sectional fixture on the equipment cover plate; The come-at-able detachable unit from the outside, this detachable unit is connected on the fixed cell separably below sectional fixture, thereby is located below the equipment cover plate; At the interface element of controlling treat fluid between fixed cell and the detachable unit between fixed cell and the detachable unit; Electrode in the detachable unit; And tie-in module, this tie-in module is connected to detachable unit on the fixed cell separably;

73, according to the equipment of claim 72, wherein, installed module further comprises cover plate, and this cover plate has rigidity first panel, the joist below first panel between eclipsed rigidity second panel, first and second panel and the bolt that passes first panel, joist and second panel.

74, according to the equipment of claim 72, wherein, installed module further comprises cover plate, this cover plate have rigidity first panel, and juxtaposed rigidity second panel of first panel and first and second panel between support.

75, according to the equipment of claim 72, further comprise second electrode in the detachable unit, and the dielectric spacer between first electrode and second electrode.

76,, further comprise the strainer in the container according to the equipment of claim 72.

77, according to the equipment of claim 72, further comprise the film that is configured to conduction current in the container.

78, according to the equipment of claim 72, wherein, tie-in module comprises the gripping ring that is configured to radially be moved into from first location the second position, so that detachable unit is clamped on the fixed cell.

79, according to the equipment of claim 72, wherein:

Interface element comprises the liner between fixed cell and the detachable unit;

Fixed cell further comprises to increase progressively the acclivitous inclined guide rails face of radius having the tilting axis carrier ring with the acclivitous bearing surface of radius that successively decreases, and with the primary sealing area of liner one side contacts; And

Detachable unit further comprises edge and the secondary sealing area that contacts with the liner opposite side, and this edge has to increase progressively the acclivitous lower surface of radius and to increase progressively the acclivitous upper surface of radius.

80, according to the equipment of claim 72, further comprise:

Field shaping module, it is positioned at container, to be shaped by the electric field in electrode induced, the treat fluid.

81, according to the equipment of claim 72, further comprise:

Field shaping module, it is positioned at container, this shaping module is made of dielectric substance, and this shaping module has first opening and second opening, first opening surface is handled the first part of position to workpiece, can pass this opening by the first electrode induced ion, second opening surface is handled the second section of position to workpiece, can pass this opening by the second electrode induced ion.

82, according to the equipment of claim 72, further comprise:

Field shaping module, it is positioned at container, the treatment solution intravital electric field of this shaping die block structure for being shaped and being produced by first and second electrodes;

Flow system, it is positioned at container, has wall, and this wall guided mobile treatment liq is substantially perpendicular at least handles locational workpiece; With

83, according to the equipment of claim 72, further comprise:

84, a kind of be used for electrochemical deposition indoor on workpiece the method for electrochemical deposition material, this electrochemical deposition chamber comprises head assembly and the container with workpiece clamp, this container has: the fixed cell of tape handling position; Be connected to first detachable unit on the fixed cell separably; With first electrode in first detachable unit, this method comprises:

By it is contacted with treat fluid in the container, and form the electric field between first workpiece and first electrode, will be deposited on first workpiece with submicron part;

By first detachable unit is separated with fixed cell, below fixed cell, pull down detachable unit, second detachable unit that will have second electrode be positioned at fixed cell below, again second detachable unit is connected on the fixed cell separably, carries out the replacing of first electrode; With

By second workpiece is positioned on the processing position of fixed cell, the interior treat fluid of itself and container is contacted, form the electric field between second workpiece and second electrode, will be deposited on second workpiece with submicron part.

85, a kind of method to being used for keeping in repair in electrochemical chamber with deposition material on the submicron part workpiece, this method comprises:

The electrochemical deposition chamber is provided, and this electrochemical deposition chamber comprises head assembly and the container with workpiece clamp, and this container has: the fixed cell of tape handling position; Be connected to first detachable unit on the fixed cell separably; With first electrode in first detachable unit;

By on the external position in the fixed cell outside, detachable unit and fixed cell being separated, first detachable unit is pulled down from fixed cell; With

Second detachable unit that will have second electrode is connected on the fixed cell part separably.