CN1651876A - Self-supplying energy micro-vibration sensor - Google Patents
Self-supplying energy micro-vibration sensor Download PDFInfo
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- CN1651876A CN1651876A CN 200510020426 CN200510020426A CN1651876A CN 1651876 A CN1651876 A CN 1651876A CN 200510020426 CN200510020426 CN 200510020426 CN 200510020426 A CN200510020426 A CN 200510020426A CN 1651876 A CN1651876 A CN 1651876A
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Abstract
Teh present invention relates to a micro self-powered vibration transducer. It mainly includes MEMS variable capacitor, electret and processing circuit, in which the MEMS variable capacitor is formed from a movable plate and two fixed plates, and said movable plate is formed from cantilever, mass block and two groups of fork fingers formed at two sides of mass block, and on the fixed plate a group of fork fingers is set respectively, and two groups of fork fingers of said movable plate are respectively opposite to the fork fingers on two fixed plates so as to form two variable capacitors. On the two fixed plates the lead-out electrode is set respectively, and on the movable plate a movable plate lead-out electrode is set, the above-mentioned electrodes are connected with processing circuit by means of conductor. Said invention also provides its extensive application range.
Description
Technical field
The invention belongs to sensor technical field, particularly a kind of micro-vibration detects uses sensor.
Background technology
Vibration transducer at present commonly used adopts the physical construction of electronic structure, spring and mercury cut-off etc. usually, but exists that volume is big, complex structure, needs deficiencies such as outside energy supply.Along with the fast development of MEMS technology, some novel micro-vibration sensors have been developed in recent years, as pressure resistance type, piezoelectric type vibration transducer, adopt the vibration transducer of electret film etc.For the vibration transducer that adopts electret film, as shown in Figure 1, this vibration transducer mainly is made of shell 21, the substrate 22 that connects electret film, the metal oscillating plate 23 that is oppositely arranged by the electret film on minim gap and this substrate, and substrate is fixed on shell.Electret film and metal oscillating plate constitute a variable capacitance, and the electrostatic field of electret polarizes to the metal oscillating plate, produces induced charge onboard.The principle of work of this sensor is, the vibration of oscillating plate causes changes in capacitance between electret film and the oscillating plate, thereby on oscillating plate, produce the variation of the quantity of electric charge, charge variation is converted to voltage signal takes out, can detect the vibratory output that is added on this sensor.In order to reduce the influence of external voice, adopt airtight shell 21 encapsulation usually to vibration detection.But the vibration transducer of airtight shell encapsulation still responds to low-frequency sound pressure, and output is produced certain influence.Can adopt through hole is set on oscillating plate, raising can reduce the influence of external sound pressure to the modes such as low-limit frequency of pressure response, but through hole is set can make the relative area of oscillating plate and substrate correspondingly reduce, electric charge utilization ratio on the electret film reduces, and has reduced the detection sensitivity of sensor.
Summary of the invention
The purpose of this invention is to provide a kind of highly sensitive, miniature self energizing vibration transducer of not influenced by acoustic pressure.
The present invention is realized by the following technical programs:
Miniature self energizing vibration transducer mainly comprises MEMS variable condenser, electret and treatment circuit.Wherein, the MEMS variable condenser is made of a movable plate electrode and two fixed plates.Movable plate electrode is by semi-girder, mass and two groups of interdigital compositions forming in the mass both sides.Respectively have on the fixed plate one group interdigital.Two groups of movable plate electrodes are interdigital relative with the interdigital difference on two fixed plates respectively, form two variable capacitances.Be respectively equipped with extraction electrode on two fixed plates, movable plate electrode is provided with the movable plate electrode extraction electrode.Above-mentioned electrode via line connection processing circuit.
Electret adopts film type electret (as SiO
2Film type electret etc.), paste on the mass of movable plate electrode, or adopt SiO
2Film type electret is directly processed on the mass of movable plate electrode, and its single-side electrode is drawn out to treatment circuit.
The principle of work of miniature self energizing vibration transducer is, referring to Fig. 2, the MEMS capacitor is polarized under the electric field action that electret produces, on the movable plate electrode of capacitor C1 and capacitor C2, exist polarization charge to distribute, when micro-vibration sensor was in the vibration environment, movable plate electrode produced skew under the acceleration effect, when being subjected to the vibration of y direction, the area inverse variation that two variable condenser pole plates hide, thus the differential change of two capacitors caused; When being subjected to the vibration of x direction, between the pole plate of variable condenser apart from inverse variation, thereby cause the differential change of electric capacity.Thereby the polarization charge on the pole plate is shifted between two capacitor plates, and electric charge forms electric current by external circuit.Just can obtain the differential capacitance variation by the voltage that detects in the external circuit load, thereby obtain the size of vibration.Whole testing process vibration transducer is converted to electrical signal output with the vibrational energy of outside, does not need the outside that power supply is provided.
Advantage of the present invention
1, this miniature self energizing vibration transducer is converted to the electric signal that reflects vibratory output with vibration mechanical energy, does not need the outside that power supply is provided.
2, owing to adopt MEMS technology, microelectric technique to make, wherein electret also can adopt the SiO that utilizes microelectronic technique to make
2Film type electret, the two has good compatibility, and integrated level height, volume are little.
3, the MEMS variable condenser has advantages such as long-life, Stability Analysis of Structures, simultaneously SiO
2The degradation period of film type electret is very long, thereby this miniature self energizing vibration transducer has long advantage of life-span.
4, this miniature self energizing vibration transducer adopts interdigital differential capacitor as the pick-up element, and the mass of movable plate electrode and interdigital group are parallel to the substrate vibration, and be vertical with the acoustic pressure direction, so acoustic pressure can not exert an influence to the difference of differential capacitance.Thereby detected value is not subjected to the influence of acoustic pressure, can detect vibration well.
Therefore, the present invention is the miniature self energizing vibration transducer that a kind of high integration, long-life, volume are little, need not externally fed, not influenced by acoustic pressure, vibrating sensing device and other vibration detection fields that the device that can be applied to vehicle burglar alarms such as electric motor car, motorcycle, automobile matches and uses have purposes very widely.
Description of drawings
Fig. 1 is the schematic diagram of existing electret film vibration transducer
The fundamental diagram of this miniature self energizing vibration transducer of Fig. 2
Fig. 3 is this miniature self energizing vibration transducer structural representation (not containing the treatment circuit part)
Fig. 4 is the shaft side figure of this miniature self energizing vibration transducer.
Embodiment
Below in conjunction with accompanying drawing to further specifying in the technical scheme of the present invention:
Among the figure: 1 is that electret, 2 is that movable plate electrode, 3 is that MEMS variable condenser, 4 is that left fixed plate, 5 is that treatment circuit, 6 is that right fixed plate, 7 is that left fixed plate substrate, 8 is that interdigital group of left fixed plate, 9 is that left interdigital group of movable plate electrode, 10 is that semi-girder, 11 is that mass, 12 is that interdigital group of right fixed plate, 13 is that interdigital group of the movable plate electrode right side, 14 is that right fixed plate substrate, 15 is that right fixed plate extraction electrode, 16 is that movable plate electrode substrate, 17 is left fixed plate extraction electrode.
Movable plate electrode 2 is made of four semi-girders 10, mass 11, interdigital group 9 on a movable plate electrode left side, right interdigital group 13 of movable plate electrode, movable plate electrode substrate 16.
In conjunction with Fig. 2, Fig. 3, Fig. 4, miniature self energizing vibration transducer mainly comprises MEMS variable condenser 3 that electret 1, movable plate electrode 2 and left and right fixed plate 4,6 constitute, treatment circuit 5 etc.Movable plate electrode 2 and left and right fixed plate the 4, the 6th utilize the MEMS technology to process on same chip.Movable plate electrode 2 has movable plate electrode substrate 16, and movable plate electrode substrate 16 supports mass 11 by four semi-girders 10, and mass 11 both sides are distributed with left and right interdigital group 9 of movable plate electrode, 13.Left side fixed plate 4 is made of left fixed plate substrate 7, interdigital group 8 of left fixed plate, left fixed plate extraction electrode 17.Right fixed plate 6 is made of right fixed plate substrate 14, interdigital group 12 of right fixed plate, right fixed plate extraction electrode 15.Left and right interdigital group 9 of the movable plate electrode that interdigital group 8 of the left and right fixed plate that is provided with on the left and right fixed plate 4,6,12 distributes with mass 11 both sides respectively, 13 relative, form two variable condenser, the left and right fixed plate extraction electrode 15,17 of drawing is connected to treatment circuit 5.Electret 1 adopts SiO
2Film type electret is pasted on the mass 11 of movable plate electrode, or directly processes on the mass of movable plate electrode, and its single-side electrode is connected to treatment circuit by lead-in wire.
Treatment circuit is referring to Fig. 2, and it is a current rectifying and wave filtering circuit, and the electric charge on the fixed plate shifts and produces electric current, and electric current enters treatment circuit 5 through left and right fixed plate extraction electrode 15,17, through being rectified into direct current and filtering output.
Claims (2)
1, self-supplying energy micro-vibration sensor is characterized in that: it is made of MEMS variable condenser, electret and treatment circuit; The MEMS variable condenser is made of a movable plate electrode and two fixed plates; Movable plate electrode is by semi-girder, mass and two groups of interdigital compositions forming in the mass both sides; Respectively have on the fixed plate one group interdigital, interdigital relative with two groups of movable plate electrode respectively, form two variable capacitances; Extraction electrode is arranged, through electrode wires connection processing circuit on two fixed plates respectively; Electret is pasted on the mass of movable plate electrode or on mass and directly is processed to form, and its single-side electrode is drawn out to treatment circuit.
2, self-supplying energy micro-vibration sensor according to claim 1 is characterized in that: electret adopts film type electret.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510020426 CN1651876A (en) | 2005-02-26 | 2005-02-26 | Self-supplying energy micro-vibration sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510020426 CN1651876A (en) | 2005-02-26 | 2005-02-26 | Self-supplying energy micro-vibration sensor |
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| CN1651876A true CN1651876A (en) | 2005-08-10 |
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| CN 200510020426 Pending CN1651876A (en) | 2005-02-26 | 2005-02-26 | Self-supplying energy micro-vibration sensor |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101303239B (en) * | 2007-05-10 | 2010-05-26 | 北方工业大学 | Sensor and regulating method thereof |
| EP2278342A1 (en) * | 2008-03-31 | 2011-01-26 | Asahi Glass Company, Limited | Acceleration sensor device and sensor network system |
| CN101682315B (en) * | 2007-06-13 | 2012-08-29 | Nxp股份有限公司 | Controller for tunable mems capacitor |
| CN104364623A (en) * | 2012-05-30 | 2015-02-18 | 欧姆龙株式会社 | Electret-type vibration detection system, method for generating external vibration information, method for generating transfer function information relating to external vibration, program for generating external vibration information, and program for generating transfer function information relating to external vibration |
| CN105634323A (en) * | 2016-02-29 | 2016-06-01 | 杭州电子科技大学 | Electret thin film based energy collector |
| CN107421630A (en) * | 2017-07-31 | 2017-12-01 | 中冶华天南京工程技术有限公司 | Vibrating sensor and detection means |
-
2005
- 2005-02-26 CN CN 200510020426 patent/CN1651876A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101303239B (en) * | 2007-05-10 | 2010-05-26 | 北方工业大学 | Sensor and regulating method thereof |
| CN101682315B (en) * | 2007-06-13 | 2012-08-29 | Nxp股份有限公司 | Controller for tunable mems capacitor |
| US8890543B2 (en) | 2007-06-13 | 2014-11-18 | Nxp B.V. | Tunable MEMS capacitor |
| US9576738B2 (en) | 2007-06-13 | 2017-02-21 | Nxp B.V. | Tunable MEMS capacitor |
| EP2278342A1 (en) * | 2008-03-31 | 2011-01-26 | Asahi Glass Company, Limited | Acceleration sensor device and sensor network system |
| US8763461B2 (en) | 2008-03-31 | 2014-07-01 | Asahi Glass Company, Limited | Acceleration sensor device and sensor network system |
| EP2278342B1 (en) * | 2008-03-31 | 2014-11-12 | Asahi Glass Company, Limited | Acceleration sensor device and sensor network system |
| KR101467017B1 (en) * | 2008-03-31 | 2014-12-01 | 아사히 가라스 가부시키가이샤 | Acceleration sensor device and sensor network system |
| CN104364623A (en) * | 2012-05-30 | 2015-02-18 | 欧姆龙株式会社 | Electret-type vibration detection system, method for generating external vibration information, method for generating transfer function information relating to external vibration, program for generating external vibration information, and program for generating transfer function information relating to external vibration |
| CN104364623B (en) * | 2012-05-30 | 2017-02-22 | 欧姆龙株式会社 | Electret-type vibration detection system, method for generating external vibration information, method for generating transfer function information relating to external vibration, program for generating external vibration information, and program for generating transfer function information relating to external vibration |
| CN105634323A (en) * | 2016-02-29 | 2016-06-01 | 杭州电子科技大学 | Electret thin film based energy collector |
| CN107421630A (en) * | 2017-07-31 | 2017-12-01 | 中冶华天南京工程技术有限公司 | Vibrating sensor and detection means |
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