CN117631720B - Temperature control method and system for remote plasma generator - Google Patents
Temperature control method and system for remote plasma generator Download PDFInfo
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Abstract
The invention provides a temperature control method and a temperature control system for a remote plasma generator, which relate to the technical field of intelligent control, wherein the method comprises the following steps: according to the unit positive and negative ion reference absorbed heat and the unit negative ion reference absorbed heat, the predicted heat of the electric shock generation cavity is attenuated to generate the theoretical increased heat of the generation cavity by combining the generation quantity of positive and negative ions, the interactive thermocouple monitors the temperature sequence of the generation cavity, carries out abnormal temperature analysis based on the theoretical temperature of the generation cavity, obtains a temperature abnormality coefficient, generates temperature early warning information when the temperature abnormality coefficient does not meet the preset temperature control condition, and sends the temperature early warning information to a remote plasma generator management terminal. The invention solves the technical problems of low monitoring efficiency caused by the fact that overheat monitoring of the remote plasma generator can only preset a threshold value and trigger early warning in the prior art, realizes reasonable and accurate control of the remote plasma generator and improves the monitoring efficiency.
Description
Technical Field
The invention relates to the technical field of intelligent control, in particular to a temperature control method and a temperature control system for a remote plasma generator.
Background
Along with the development of scientific technology, especially the development of the semiconductor production field, a remote plasma generator utilizes a plasma source to synthesize plasma outside a reaction area, the plasma is introduced into the reaction area under the actions of airflow, an electric field, a magnetic field and the like, the main working principle of the plasma generator is that low voltage is increased to positive high voltage and negative high voltage through a booster circuit, and a large amount of positive ions and negative ions are generated by utilizing positive high voltage and negative high voltage ionized air (mainly oxygen), but in the prior art, the overheat monitoring of the remote plasma generator only can preset a threshold value and is triggered to early warn, so that the technical problem of low monitoring efficiency is caused.
Disclosure of Invention
The application provides a temperature control method and a temperature control system for a remote plasma generator, which are used for solving the technical problems in the prior art that the monitoring efficiency is low because overheat monitoring of the remote plasma generator can only preset a threshold value and trigger early warning.
In view of the foregoing, the present application provides a temperature control method and system for a remote plasma generator.
In a first aspect, the present application provides a temperature control method for a remote plasma generator, the method comprising: receiving the gas flow, the gas type and the electric field intensity to execute plasma production prediction, and generating positive ion production and negative ion production; carrying out frequent analysis of the absorption heat of the unit positive ions to generate basic absorption heat of the unit positive ions, and carrying out frequent analysis of the absorption heat of the unit negative ions to generate basic absorption heat of the unit negative ions; activating an electric shock heat calibration table, and executing electric shock production heat prediction according to the electric field intensity to generate electric shock generation cavity prediction heat; according to the unit positive ion reference absorption heat and the unit negative ion reference absorption heat, combining the positive ion generation amount and the negative ion generation amount, attenuating the predicted heat of the electric shock generation cavity to generate theoretical increase heat of the generation cavity; performing temperature conversion on the theoretical increased heat of the generation cavity to generate the theoretical temperature of the generation cavity; the interactive thermocouple monitors the temperature sequence of the generated cavity, and performs abnormal temperature analysis based on the theoretical temperature of the generated cavity to obtain a temperature abnormal coefficient; when the temperature anomaly coefficient does not meet the preset temperature control condition, generating temperature early warning information, and sending the temperature early warning information to a remote plasma generator management terminal.
In a second aspect, the present application provides a temperature control system for a remote plasma generator, the system comprising: one or more technical solutions provided in the present application have at least the following technical effects or advantages: a first prediction module for receiving a gas flow rate, a gas type, and an electric field strength, performing plasma throughput prediction, generating a positive ion generation amount and a negative ion generation amount; the first analysis module is used for carrying out frequent analysis of the absorption heat of the unit positive ions to generate basic absorption heat of the unit positive ions, and carrying out frequent analysis of the absorption heat of the unit negative ions to generate basic absorption heat of the unit negative ions; the second prediction module is used for activating an electric shock heat calibration table, performing electric shock production heat prediction according to the electric field intensity and generating electric shock generation cavity prediction heat; the attenuation module is used for attenuating the predicted heat of the electric shock generation cavity according to the unit positive ion reference absorption heat and the unit negative ion reference absorption heat and combining the positive ion generation amount and the negative ion generation amount to generate theoretical increase heat of the generation cavity; the temperature conversion module is used for carrying out temperature conversion on the theoretical increased heat of the generation cavity to generate the theoretical temperature of the generation cavity; the abnormal temperature analysis module is used for monitoring the temperature sequence of the generated cavity by the interactive thermocouple, and carrying out abnormal temperature analysis based on the theoretical temperature of the generated cavity to obtain a temperature abnormal coefficient; and the first judging module is used for generating temperature early warning information and sending the temperature early warning information to the remote plasma generator management terminal when the temperature anomaly coefficient does not meet the preset temperature control condition.
The application provides a control by temperature change method and system for remote plasma generator, relates to intelligent control technical field, has solved because the overheat monitoring of remote plasma generator only can preset the threshold value in the prior art, triggers just early warning, leads to the low technical problem of monitoring efficiency, has realized rationalizing accurate management and control to remote plasma generator, advances to improve monitoring efficiency.
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FIG. 1 is a schematic flow diagram of a temperature control method for a remote plasma generator according to the present application;
fig. 2 is a schematic diagram of a temperature control system for a remote plasma generator.
Reference numerals illustrate: the device comprises a first prediction module 1, a first analysis module 2, a second prediction module 3, an attenuation module 4, a temperature conversion module 5, an abnormal temperature analysis module 6 and a first judgment module 7.
Detailed Description
The temperature control method and the temperature control system for the remote plasma generator are used for solving the technical problem that in the prior art, due to the fact that overheat monitoring of the remote plasma generator can only preset a threshold value and trigger early warning, monitoring efficiency is low.
Example 1
As shown in fig. 1, an embodiment of the present application provides a temperature control method for a remote plasma generator, the method comprising:
Step A100: receiving the gas flow, the gas type and the electric field intensity to execute plasma production prediction, and generating positive ion production and negative ion production;
further, step a100 of the present application further includes:
step A110: loading a remote plasma generator model as a constraint condition, communicating a plurality of block chain nodes, and receiving plasma history production information;
step A120: extracting gas recording flow, gas recording type, electric field recording strength and positive ion recording generation amount of the plasma history production information, and configuring hyper-parameters of a positive ion generation amount prediction channel;
step a130: extracting gas recording flow, gas recording type, electric field recording strength and negative ion recording generation amount of the plasma history production information, and configuring super parameters of a negative ion generation amount prediction channel;
step A140: and performing plasma throughput prediction according to the positive ion production amount prediction channel and the negative ion production amount prediction channel, and generating the positive ion production amount and the negative ion production amount.
In the application, when the temperature control method for the remote plasma generator is applied to the temperature control system of the remote plasma generator, and the remote plasma generator generates plasma through ionized gas, the model of the remote plasma generator is loaded firstly and is used as a constraint condition, and data communication is carried out with a plurality of block chain link points in the system on the basis, so that plasma historical production information is received, the plasma historical production information refers to production data of ionized gas in a historical time period, further, gas record flow, gas record type, electric field record intensity and positive ion record production amount contained in the plasma historical production information are extracted, the gas recording flow rate refers to the volume of the generated gas of the plasma passing through the remote plasma generator in unit time, the gas recording type refers to the physical quantity used for identifying the electric field intensity and the direction by the gas classification of the remote plasma generator, the electric field recording intensity refers to the physical quantity used for identifying the electric field intensity and the direction, the positive ion recording generation amount refers to the quantity generated in the production process of identifying positive ions, the hyper-parameters of the positive ion generation amount prediction channel are configured on the basis, the hyper-parameters of the positive ion generation amount prediction channel are the reference data used for predicting the generation amount of the positive ions in the production process in the positive ion generation amount prediction channel, the gas recording flow rate, the gas recording type, the electric field recording intensity and the negative ion recording generation amount of the plasma history production information are extracted in a same way, the hyper-parameters of the negative ion generation amount prediction channel are configured, the configuration process is the same as the configuration process of the hyper-parameters of the positive ion generation amount prediction channel, the method comprises the steps of carrying out plasma production prediction according to a positive ion production prediction channel and a negative ion production prediction channel, namely, predicting the positive ion production of a remote plasma generator in the operation process according to super parameters through the positive ion production prediction channel, predicting the negative ion production of the remote plasma generator in the operation process according to the super parameters through the negative ion production prediction channel, so as to obtain the positive ion production and the negative ion production, and taking the temperature control of the remote plasma generator as an important reference basis for the later realization.
Step A200: carrying out frequent analysis of the absorption heat of the unit positive ions to generate basic absorption heat of the unit positive ions, and carrying out frequent analysis of the absorption heat of the unit negative ions to generate basic absorption heat of the unit negative ions;
further, step a200 of the present application further includes:
step a210: loading plasma generation experimental measurement data, wherein the plasma generation experimental measurement data comprises a plurality of unit positive ion absorption heat calibration values;
step A220: when the variance characteristic value of the plurality of unit positive ion absorption heat calibration values is smaller than or equal to a variance threshold value, performing cluster analysis on the plurality of unit positive ion absorption heat calibration values based on preset absorption heat deviation to generate a plurality of groups of unit positive ion absorption heat calibration values, wherein the plurality of groups of unit positive ion absorption heat calibration values have a plurality of in-group calibration value quantity ratios;
step A230: traversing the plurality of groups of unit positive ion absorption heat calibration values to perform mean value analysis, and generating a plurality of unit positive ion absorption heat mean values;
step A240: and carrying out weighted average analysis on the average value of the plurality of unit positive ion absorption heat by taking the number ratio of the calibration values in the plurality of groups as the weight, so as to generate the unit positive ion reference absorption heat.
Further, step a240 of the present application includes:
step A241: when the variance characteristic value of the plurality of unit positive ion absorption heat calibration values is larger than the variance threshold value, carrying out sequential adjustment on the plurality of unit positive ion absorption heat calibration values to generate an absorption heat calibration value sequence;
step a242: extracting a first absorption heat calibration value of a quarter sequence number of the absorption heat calibration value sequence;
step A243: extracting a second absorption heat calibration value of three-quarters of the sequence of absorption heat calibration values;
step a244: calculating the deviation absolute value of the first absorption heat calibration value and the second absorption heat calibration value to generate a quartile range;
step A245: mapping the plurality of unit positive ion absorption heat calibration values according to the first absorption heat calibration value, the second absorption heat calibration value and the quartile range to generate a data distribution box diagram;
step a246: and according to the data distribution box diagram, discrete data cleaning is carried out on the plurality of unit positive ion absorption heat calibration values, and then the unit positive ion reference absorption heat is calculated.
In the application, in order to better ensure the temperature control of the remote plasma generator during operation, therefore, positive ions and negative ions released by the plasma generator in unit time are required to be subjected to heat analysis, firstly, frequent analysis of the absorption heat is carried out in the unit positive ions, namely, the measurement data of the plasma generation experiment are loaded through a system, wherein the measurement data of the plasma generation experiment comprise a plurality of unit positive ion absorption heat calibration values, the plurality of unit positive ion absorption heat calibration values refer to accurate values of the absorption heat of the plurality of unit positive ions obtained through measurement or experiment under different specific conditions, further, variance characteristic values customized by the plurality of unit positive ion absorption heat meters are compared with variance threshold values, the variance threshold values are obtained through demarcating the extremum of the variance characteristic values, when the variance characteristic values of the plurality of unit positive ion absorption heat calibration values are smaller than or equal to the variance threshold values, the plurality of unit positive ion absorption heat calibration values are regarded as being in a normal range, clustering analysis is carried out on the plurality of unit positive ion absorption heat calibration values based on the preset absorption heat deviation, the preset absorption heat calibration values refer to the accurate values of the absorption heat of the plurality of unit positive ion absorption heat calibration values under different specific conditions, the average heat values are measured or obtained through measurement or experiment, the average heat values are measured by a plurality of unit positive ion absorption heat calibration values are more than 80% and the total heat of groups, the average heat of the average heat values are further compared with the absorption heat values are measured by a plurality of groups, and the average heat values are more than 80 groups are compared, and the absorption heat values are more than normal, and sequentially performing data access of the absorbed heat on calibration data nodes in the calibration values of the plurality of groups of unit positive ions, solving the average value of all the accessed calibration data nodes, generating a plurality of unit positive ion absorbed heat average values on the basis, finally taking the number ratio of the calibration values in the plurality of groups as the weight of the plurality of unit positive ion absorbed heat, performing weighted average analysis on the plurality of unit positive ion absorbed heat average values, and performing targeted calculation after the weighted average analysis is required to summarize a large amount of data and accurately determine the weight, wherein the weight ratio of the plurality of unit positive ion absorbed heat average values is the number ratio of the calibration values in the plurality of groups, and the influence parameters after the weighted calculation process are the number of the plurality of unit positive ion absorbed heat average values divided by the number of the plurality of unit positive ion absorbed heat average values after the multiplication of the percentages of the number ratio of the calibration values in the plurality of groups respectively, and obtaining the unit positive ion reference absorbed heat according to the weighted calculation result.
If the variance characteristic value of the plurality of unit positive ion absorption heat calibration values is larger than the variance threshold, the plurality of unit positive ion absorption heat calibration values are regarded as not being in the normal range, the plurality of unit positive ion absorption heat calibration values are sequentially adjusted, namely the plurality of unit positive ion absorption heat calibration values are arranged in an ascending order according to the size of the calibration values to generate an absorption heat calibration value sequence, further, a quarter sequence number of the absorption heat calibration value sequence is taken as a first absorption heat calibration value to be extracted, when the quarter sequence number is a fraction, the sequence number corresponding to the absorption heat calibration value is taken as an integer part +1, and when the quarter sequence number is a fraction, the sequence number corresponding to the absorption heat calibration value is taken as a second absorption heat calibration value to be extracted: the integer part-1 further performs difference between the first absorption heat calibration value and the second absorption heat calibration value, takes the absolute value of the difference value as a quartile range, finally maps the plurality of unit positive ion absorption heat calibration values according to the first absorption heat calibration value, the second absorption heat calibration value and the quartile range as basic reference data, and exemplarily, if the sequence of the absorption heat calibration values is ordered from small to large, the minimum critical line below is the first absorption heat calibration value-1.5 quartile range, the maximum critical line above is the second absorption heat calibration value +1.5 quartile range, and data distributed outside the upper critical line and the lower critical line is marked as outliers, and a data distribution box diagram is drawn according to all data distribution points, so as to achieve enhanced data visualization, and simultaneously improve the data analysis speed.
Further, the heat absorption frequency analysis is performed on the unit negative ions in the same way, and the heat absorption frequency analysis is performed on the unit positive ions and the heat absorption frequency analysis is performed on the unit negative ions by the same algorithm, so that the heat absorption frequency analysis of the positive ions is taken as an example for explanation, the reference heat absorption of the unit negative ions is generated, and further, the temperature control of the remote plasma generator is guaranteed.
Step A300: activating an electric shock heat calibration table, and executing electric shock production heat prediction according to the electric field intensity to generate electric shock generation cavity prediction heat;
in this application, in order to better control the temperature of remote plasma generator in the operation process, then need to predict the heat that produces in the remote plasma generator, at first, activate electric shock heat calibration table, this electric shock heat calibration table is with being used for remote plasma generator's control by temperature change communication connection, this electric shock heat calibration table is through the heat comparison table of making after calibrating the heat that produces at the different moments in the operation process of remote plasma generator, further, under the prerequisite that remote plasma generator model was confirmed, electric shock's electric field strength is strictly controlled, therefore the electric shock heat that has different electric field strengths to correspond is pre-configured, thereby predict electric shock produced heat contrast electric shock heat calibration table according to remote plasma generator's electric field strength, integrate the prediction heat on this basis and summarize the electric shock generation cavity prediction heat of marking as remote plasma generator, for follow-up realization is tamped the temperature control foundation to remote plasma generator.
Step A400: according to the unit positive ion reference absorption heat and the unit negative ion reference absorption heat, combining the positive ion generation amount and the negative ion generation amount, attenuating the predicted heat of the electric shock generation cavity to generate theoretical increase heat of the generation cavity;
in this application, in order to more precisely control the temperature of the remote plasma generator, it is necessary to compare the predicted heat quantity of the generating cavity of the motor obtained by the above prediction with the theoretical calculated heat quantity value, and when there is a large difference in temperature, it is necessary to regulate the temperature in the remote plasma generator, that is, first, based on the unit positive ion reference heat quantity and the unit negative ion reference heat quantity, the data corresponding to the positive ion generation quantity and the negative ion generation quantity are combined, that is, the unit positive ion reference heat quantity and the positive ion generation quantity are compared in numerical value, a positive ion heat quantity difference is generated, the unit negative ion reference heat quantity and the negative ion generation quantity are compared in numerical value, a negative ion heat quantity difference is generated, and the predicted heat quantity of the electric shock generating cavity is attenuated according to the positive ion heat quantity difference and the negative ion heat quantity difference, that is, the total ion absorption heat quantity is calculated is the total ion absorption heat quantity is calculated, and the theoretical increase heat quantity is obtained by subtracting the total ion heat quantity generated, and the theoretical increase heat quantity is recorded as the theoretical increase heat quantity of the generating cavity, so that the temperature control of the remote plasma generator is limited.
Step A500: performing temperature conversion on the theoretical increased heat of the generation cavity to generate the theoretical temperature of the generation cavity;
further, step a500 of the present application further includes:
step A510: based on the thermocouple, receiving an initial monitoring temperature of the generating cavity, wherein the initial monitoring temperature of the generating cavity is a monitoring temperature of the cavity before electric shock;
step A520: loading cavity temperature climbing gradient record data of a remote plasma generator model, wherein the cavity temperature climbing gradient record data comprises an initial temperature record value of a generation cavity, a cavity increase heat record value set and a cavity temperature climbing gradient record value set;
step a530: according to the cavity increment heat record value set and the cavity temperature climbing gradient record value set, constructing a cavity temperature climbing gradient change trend identification curve;
step a540: taking the initial temperature recorded value of the generation cavity as mapping input data, taking the identification curve of the temperature climbing gradient change trend of the cavity as mapping output data, and configuring super parameters of a cavity temperature climbing gradient change trend curve fitting channel;
step A550: constructing a theoretical temperature evaluation formula of the generation cavity:
，
Wherein,to generate the theoretical temperature of the cavity, < > is>To generate the initial temperature of the cavity, < > is->Gradient of cavity temperature climb after determining the cavity heat increase for the cavity temperature climb gradient trend curve, +.>Adding heat to the cavity;
step A560: and fitting the initial monitoring temperature of the generation cavity and the theoretical increasing heat of the generation cavity according to the cavity temperature climbing gradient change trend curve fitting channel and the theoretical temperature evaluation type generation cavity so as to generate the theoretical temperature of the generation cavity.
In the application, theoretical temperature of a generating cavity in a remote plasma generator is obtained after theoretical heat of the generating cavity is increased through temperature conversion, the process can be that the initial monitoring temperature of the generating cavity is received on the basis of a thermocouple, the thermocouple is a commonly used temperature measuring element in a temperature measuring instrument, the temperature can be directly measured, a temperature signal is converted into a thermal electromotive force signal, the initial monitoring temperature of the generating cavity is the monitored temperature of the cavity before electric shock, further, the temperature climbing gradient record data of the cavity of a remote plasma generator model are loaded, the temperature climbing gradient record data comprise a initial temperature record value of the generating cavity, a set of the temperature gradient record value of the cavity and a set of the temperature gradient record value of the cavity, the initial temperature record value of the generating cavity is recorded in a numerical value corresponding to each moment in the remote plasma generator, the set of the temperature record value of the cavity is recorded in each moment, when the generated heat of the generating cavity in the remote plasma generator is continuously increased, the temperature gradient record value set is recorded in a numerical value when the temperature of the generating cavity in the remote plasma generator is increased, the temperature gradient record value is recorded in a curve corresponding to the temperature change curve, the temperature gradient record value is further recorded in a curve, and the temperature gradient record value is further recorded in a curve corresponding to the temperature change direction of the temperature change value of the remote plasma generator, and the temperature change curve is further recorded in a curve, the method comprises the steps of configuring super parameters in a cavity temperature climbing gradient change trend curve fitting channel according to a mapping relation, wherein the super parameters are parameters of set values before the cavity temperature climbing gradient change trend curve fitting channel starts a learning process, and finally fitting initial monitoring temperature of a generating cavity and theoretical increased heat of the generating cavity according to the cavity temperature climbing gradient change trend curve fitting channel and a generating cavity theoretical temperature evaluation formula, wherein the generating cavity theoretical temperature evaluation formula is as follows:
，
Wherein,to generate the theoretical temperature of the cavity, < > is>To generate the initial temperature of the cavity, < > is->Gradient of cavity temperature climb after determining the cavity heat increase for the cavity temperature climb gradient trend curve, +.>Adding heat to the cavity;
the method is characterized in that after the change of the cavity temperature climbing gradient after the heat of the cavity is increased is determined based on the initial temperature of the generating cavity according to the cavity temperature climbing gradient change trend curve, the theoretical temperature of the generating cavity is calculated, so that the theoretical temperature is used as reference data when the temperature of the remote plasma generator is controlled in the later period.
Step A600: the interactive thermocouple monitors the temperature sequence of the generated cavity, and performs abnormal temperature analysis based on the theoretical temperature of the generated cavity to obtain a temperature abnormal coefficient;
further, step a600 of the present application further includes:
step a610: configuring a deviation amplitude threshold of the cavity temperature, and carrying out high-amplitude statistics on the occurrence cavity temperature sequence based on the occurrence cavity theoretical temperature to generate a deviation temperature quantity proportion and a temperature deviation amplitude mean value;
step a620: and adding the deviation temperature quantity proportion and the temperature deviation amplitude mean value into the temperature anomaly coefficient.
In the application, in order to avoid abnormal operation caused by overheat of the remote plasma generator in the operation process, the abnormal temperature analysis is needed to be performed on the remote plasma generator, firstly, a cavity temperature deviation amplitude threshold value is configured according to a cavity temperature sequence monitored by a system and a thermocouple, based on the calculated cavity theoretical temperature, the abnormal temperature analysis is performed on the cavity temperature sequence, namely, when the cavity theoretical temperature rise in the cavity temperature sequence is greater than 40%, data recording is performed on the cavity theoretical temperature, the abnormal temperature is recorded as a deviation temperature, so that iteration is performed, the number of the deviation temperatures is used as a molecule, the number of the sequences of the cavity temperature sequences is used as a denominator, then a deviation temperature number proportion is generated, the number of the deviation temperatures is added and divided, and finally, the deviation temperature number proportion and the deviation amplitude average value are sequentially generated, the abnormal temperature analysis is performed on the cavity temperature in the remote plasma generator, so that the abnormal temperature analysis is performed on the cavity temperature coefficient, and when the deviation temperature number of the deviation temperature is greater than 40%, the abnormal temperature coefficient is accurately controlled after the deviation temperature number of the deviation temperature is greater than the average value, and the abnormal temperature coefficient is accurately controlled after the temperature deviation number is greater.
Step A700: when the temperature anomaly coefficient does not meet the preset temperature control condition, generating temperature early warning information, and sending the temperature early warning information to a remote plasma generator management terminal.
Further, step a700 of the present application further includes:
step a710: configuring a deviation temperature quantity proportion threshold, a temperature threshold and a temperature deviation amplitude threshold, wherein the temperature threshold is the rated early warning temperature of the remote plasma generator;
step A720: when the temperature of any monitoring generation cavity of the generation cavity temperature sequence is greater than or equal to the temperature threshold, generating first type temperature early warning information;
step a730: calculating the sum of the theoretical temperature of the generation cavity and the average value of the temperature deviation amplitude, and setting the sum as the characteristic deviation temperature;
step a740: when the deviation temperature quantity proportion is greater than or equal to the deviation temperature quantity proportion threshold value, or/and the temperature deviation amplitude mean value is greater than or equal to the temperature deviation amplitude threshold value, or/and the characteristic deviation temperature is greater than or equal to the temperature threshold value, generating second type temperature early warning information;
step a750: and adding the first type temperature early-warning information or/and the second type temperature early-warning information into the temperature early-warning information.
In the application, in order to reasonably control the temperature in the operation process of the remote plasma generator, firstly, the temperature anomaly coefficient is compared with a preset temperature control condition, the preset temperature control condition is obtained according to the temperature control data setting of the remote plasma generator in a normal state in big data, firstly, the deviation temperature quantity proportion threshold value, the temperature threshold value and the temperature deviation amplitude threshold value of the remote plasma generator are configured, wherein the deviation temperature quantity proportion threshold value is the deviation temperature quantity proportion of the remote plasma generator in the normal operation state, the temperature threshold value is the rated early warning temperature of the remote plasma generator, the temperature deviation amplitude threshold value is the deviation temperature quantity proportion value in the temperature threshold value, and when the temperature of any monitoring generation cavity body in the generation cavity body temperature sequence of the remote plasma generator is larger than or equal to the temperature threshold value,
and if the real-time temperature value in the generation cavity of the remote plasma generator does not exceed the temperature threshold, the deviation temperature quantity ratio is considered to be greater than or equal to the deviation temperature quantity ratio threshold, or/and the temperature deviation amplitude average value is greater than or equal to the temperature deviation amplitude threshold, or/and the characteristic deviation temperature is greater than or equal to the temperature threshold, so that second type temperature early warning information is generated, finally the first type temperature early warning information or/and the second type temperature early warning information is added into the temperature early warning information, the system is used for sending the first type temperature early warning information or/and the second type temperature early warning information to a remote plasma generator management terminal, and relevant management and control personnel are reminded through the remote plasma generator management terminal, so that the remote plasma generator can be better subjected to temperature early warning in later period.
In summary, the temperature control method for the remote plasma generator provided by the embodiment of the application at least comprises the following technical effects, so that the remote plasma generator is reasonably and accurately controlled, and the monitoring efficiency is improved.
Example two
Based on the same inventive concept as the temperature control method for the remote plasma generator in the foregoing embodiments, as shown in fig. 2, the present application provides a temperature control system for the remote plasma generator, the system comprising:
a first prediction module 1 for performing plasma throughput prediction by receiving a gas flow rate, a gas type, and an electric field intensity, and generating a positive ion generation amount and a negative ion generation amount;
the first analysis module 2 is used for carrying out frequent analysis of the absorption heat of the unit positive ions to generate unit positive ion reference absorption heat, and carrying out frequent analysis of the absorption heat of the unit negative ions to generate unit negative ion reference absorption heat;
the second prediction module 3 is used for activating an electric shock heat calibration table, performing electric shock production heat prediction according to the electric field intensity, and generating electric shock generation cavity prediction heat;
The attenuation module 4 is used for attenuating the predicted heat of the electric shock generation cavity according to the unit positive ion reference absorption heat and the unit negative ion reference absorption heat and combining the positive ion generation amount and the negative ion generation amount to generate theoretical increase heat of the generation cavity;
the temperature conversion module 5 is used for carrying out temperature conversion on the theoretical increased heat of the generation cavity to generate the theoretical temperature of the generation cavity;
the abnormal temperature analysis module 6 is used for monitoring the temperature sequence of the generated cavity by the interactive thermocouple, and carrying out abnormal temperature analysis based on the theoretical temperature of the generated cavity to obtain a temperature abnormal coefficient;
the first judging module 7 is configured to generate temperature early warning information and send the temperature early warning information to the remote plasma generator management terminal when the temperature anomaly coefficient does not meet a preset temperature control condition.
Further, the system further comprises:
the information receiving module is used for loading the model of the remote plasma generator as a constraint condition, communicating a plurality of block chain nodes and receiving plasma history production information;
The first parameter configuration module is used for extracting gas recording flow, gas recording type, electric field recording strength and positive ion recording generation amount of the plasma history production information and configuring hyper-parameters of a positive ion generation amount prediction channel;
the second parameter configuration module is used for extracting gas record flow, gas record type, electric field record intensity and negative ion record generation amount of the plasma history production information and configuring super parameters of a negative ion generation amount prediction channel;
and a third prediction module for performing plasma throughput prediction according to the positive ion production amount prediction channel and the negative ion production amount prediction channel, generating the positive ion production amount and the negative ion production amount.
Further, the system further comprises:
the first loading module is used for loading plasma generation experiment measurement data, wherein the plasma generation experiment measurement data comprise a plurality of unit positive ion absorption heat calibration values;
the second judging module is used for carrying out cluster analysis on the plurality of unit positive ion absorption heat calibration values based on preset absorption heat deviation to generate a plurality of groups of unit positive ion absorption heat calibration values when the variance characteristic value of the plurality of unit positive ion absorption heat calibration values is smaller than or equal to a variance threshold value, wherein the plurality of groups of unit positive ion absorption heat calibration values have a plurality of intra-group calibration value quantity ratios;
The second analysis module is used for traversing the plurality of groups of unit positive ion absorption heat calibration values to perform mean value analysis and generating a plurality of unit positive ion absorption heat mean values;
and the weighted average analysis module is used for carrying out weighted average analysis on the average value of the plurality of unit positive ion absorption heat by taking the number ratio of the calibration values in the plurality of groups as the weight to generate the unit positive ion reference absorption heat.
Further, the system further comprises:
the third judging module is used for carrying out sequential adjustment on the plurality of unit positive ion absorption heat calibration values to generate an absorption heat calibration value sequence when the variance characteristic value of the plurality of unit positive ion absorption heat calibration values is larger than the variance threshold value;
the first extraction module is used for extracting a first absorption heat calibration value of a quarter sequence number of the absorption heat calibration value sequence;
the second extraction module is used for extracting a second absorption heat calibration value of three-quarter sequence numbers of the absorption heat calibration value sequence;
the first calculation module is used for calculating the absolute value of the deviation of the first absorption heat calibration value and the second absorption heat calibration value to generate a quartile range;
The mapping module is used for mapping the plurality of unit positive ion absorption heat calibration values according to the first absorption heat calibration value, the second absorption heat calibration value and the quartile range to generate a data distribution box diagram;
and the second calculation module is used for calculating the reference absorption heat of the unit positive ions after carrying out discrete data cleaning on the calibration values of the absorption heat of the unit positive ions according to the data distribution box diagram.
Further, the system further comprises:
the receiving module is used for receiving initial monitoring temperature of the generating cavity based on the thermocouple, wherein the initial monitoring temperature of the generating cavity is the monitoring temperature of the cavity before electric shock;
the second loading module is used for loading cavity temperature climbing gradient record data of a remote plasma generator model, wherein the cavity temperature climbing gradient record data comprises a generation cavity initial temperature record value, a cavity increase heat record value set and a cavity temperature climbing gradient record value set;
the curve construction module is used for constructing a cavity temperature climbing gradient change trend identification curve according to the cavity increase heat record value set and the cavity temperature climbing gradient record value set;
The first configuration module is used for using the initial temperature record value of the generation cavity as mapping input data, using the cavity temperature climbing gradient change trend identification curve as mapping output data and configuring the super-parameters of the cavity temperature climbing gradient change trend curve fitting channel;
the third calculation module is used for constructing a theoretical temperature evaluation formula of the generation cavity:
，
wherein,to generate the theoretical temperature of the cavity, < > is>To generate the initial temperature of the cavity, < > is->Gradient of cavity temperature climb after determining the cavity heat increase for the cavity temperature climb gradient trend curve, +.>Adding heat to the cavity;
and the fitting module is used for fitting the initial monitoring temperature of the generation cavity and the theoretical increased heat of the generation cavity according to the cavity temperature climbing gradient change trend curve fitting channel and the theoretical temperature evaluation type generation cavity so as to generate the theoretical temperature of the generation cavity.
Further, the system further comprises:
the statistics module is used for configuring a cavity body temperature deviation amplitude threshold value, and carrying out temperature deviation amplitude statistics on the generated cavity body temperature sequence based on the generated cavity body theoretical temperature to generate a deviation temperature quantity proportion and a temperature deviation amplitude mean value;
And the first adding module is used for adding the deviation temperature quantity proportion and the temperature deviation amplitude mean value into the temperature anomaly coefficient.
Further, the system further comprises:
the second configuration module is used for configuring a deviation temperature quantity proportion threshold value, a temperature threshold value and a temperature deviation amplitude threshold value, wherein the temperature threshold value is the rated early warning temperature of the remote plasma generator;
the fourth judging module is used for generating first type temperature early warning information when the temperature of any monitoring generation cavity of the generation cavity temperature sequence is greater than or equal to the temperature threshold value;
the fourth calculation module is used for calculating the sum of the theoretical temperature of the generation cavity and the average value of the temperature deviation amplitude and setting the sum as the characteristic deviation temperature;
the fifth judging module is used for generating second-type temperature early warning information when the deviation temperature quantity proportion is greater than or equal to the deviation temperature quantity proportion threshold value, or/and the temperature deviation amplitude average value is greater than or equal to the temperature deviation amplitude threshold value, or/and the characteristic deviation temperature is greater than or equal to the temperature threshold value;
The second adding module is used for adding the first type temperature early-warning information or/and the second type temperature early-warning information into the temperature early-warning information.
From the foregoing detailed description of the temperature control method for the remote plasma generator, those skilled in the art can clearly understand that the temperature control system for the remote plasma generator in this embodiment, for the apparatus disclosed in the embodiments, since it corresponds to the method disclosed in the embodiments, the description is relatively simple, and the relevant points refer to the description of the method section.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (3)
1. A temperature control method for a remote plasma generator, comprising:
Receiving the gas flow, the gas type and the electric field intensity to execute plasma production prediction, and generating positive ion production and negative ion production;
carrying out frequent analysis of the absorption heat of the unit positive ions to generate basic absorption heat of the unit positive ions, and carrying out frequent analysis of the absorption heat of the unit negative ions to generate basic absorption heat of the unit negative ions;
activating an electric shock heat calibration table, performing electric shock production heat prediction according to the electric field intensity, and generating electric shock generation cavity prediction heat, wherein the electric shock generation cavity prediction heat comprises the following components: firstly, an electric shock heat calibration table is activated, the electric shock heat calibration table is in communication connection with a temperature control device for a remote plasma generator, the electric shock heat calibration table is a heat comparison table which is prepared by calibrating heat generated by the remote plasma generator at different moments in the operation process, further, under the premise that the model of the remote plasma generator is determined, the electric field intensity of electric shock is strictly controlled, so that electric shock heat corresponding to different electric field intensities is preconfigured, the heat generated by electric shock is predicted according to the electric field intensity of the remote plasma generator, the predicted heat is integrated and summarized on the basis, and then is recorded as the predicted heat of an electric shock generation cavity of the remote plasma generator;
According to the unit positive ion reference absorption heat and the unit negative ion reference absorption heat, combining the positive ion generation amount and the negative ion generation amount, attenuating the predicted heat of the electric shock generation cavity to generate theoretical increase heat of the generation cavity;
performing temperature conversion on the theoretical increased heat of the generation cavity to generate the theoretical temperature of the generation cavity;
the interactive thermocouple monitors the temperature sequence of the generated cavity, and performs abnormal temperature analysis based on the theoretical temperature of the generated cavity to obtain a temperature abnormal coefficient;
when the temperature anomaly coefficient does not meet the preset temperature control condition, generating temperature early warning information and sending the temperature early warning information to a remote plasma generator management terminal;
wherein receiving the gas flow rate, the gas type, and the electric field strength performs plasma throughput prediction, generates a positive ion generation amount and a negative ion generation amount, comprising:
loading a remote plasma generator model as a constraint condition, communicating a plurality of block chain nodes, and receiving plasma history production information;
extracting gas recording flow, gas recording type, electric field recording strength and positive ion recording generation amount of the plasma history production information, and configuring hyper-parameters of a positive ion generation amount prediction channel;
Extracting gas recording flow, gas recording type, electric field recording strength and negative ion recording generation amount of the plasma history production information, and configuring super parameters of a negative ion generation amount prediction channel;
performing plasma throughput prediction according to the positive ion production amount prediction channel and the negative ion production amount prediction channel, and generating the positive ion production amount and the negative ion production amount;
the frequent analysis of the absorption heat of the unit positive ions generates the reference absorption heat of the unit positive ions, which comprises the following steps:
loading plasma generation experimental measurement data, wherein the plasma generation experimental measurement data comprises a plurality of unit positive ion absorption heat calibration values;
when the variance characteristic value of the plurality of unit positive ion absorption heat calibration values is smaller than or equal to a variance threshold value, performing cluster analysis on the plurality of unit positive ion absorption heat calibration values based on preset absorption heat deviation to generate a plurality of groups of unit positive ion absorption heat calibration values, wherein the plurality of groups of unit positive ion absorption heat calibration values have a plurality of in-group calibration value quantity ratios;
traversing the plurality of groups of unit positive ion absorption heat calibration values to perform mean value analysis, and generating a plurality of unit positive ion absorption heat mean values;
Taking the number ratio of the calibration values in the groups as the weight, carrying out weighted average analysis on the average value of the heat absorbed by the positive ions of the units to generate the reference heat absorbed by the positive ions of the units;
when the variance characteristic value of the plurality of unit positive ion absorption heat calibration values is larger than the variance threshold value, carrying out sequential adjustment on the plurality of unit positive ion absorption heat calibration values to generate an absorption heat calibration value sequence;
extracting a first absorption heat calibration value of a quarter sequence number of the absorption heat calibration value sequence;
extracting a second absorption heat calibration value of three-quarters of the sequence of absorption heat calibration values;
calculating the deviation absolute value of the first absorption heat calibration value and the second absorption heat calibration value to generate a quartile range;
mapping the plurality of unit positive ion absorption heat calibration values according to the first absorption heat calibration value, the second absorption heat calibration value and the quartile range to generate a data distribution box diagram;
according to the data distribution box diagram, discrete data cleaning is carried out on the plurality of unit positive ion absorption heat calibration values, and then the unit positive ion reference absorption heat is calculated;
Performing temperature conversion on the theoretical increased heat of the generation cavity to generate a theoretical temperature of the generation cavity, including:
based on the thermocouple, receiving an initial monitoring temperature of the generating cavity, wherein the initial monitoring temperature of the generating cavity is a monitoring temperature of the cavity before electric shock;
loading cavity temperature climbing gradient record data of a remote plasma generator model, wherein the cavity temperature climbing gradient record data comprises an initial temperature record value of a generation cavity, a cavity increase heat record value set and a cavity temperature climbing gradient record value set;
according to the cavity increment heat record value set and the cavity temperature climbing gradient record value set, constructing a cavity temperature climbing gradient change trend identification curve;
taking the initial temperature recorded value of the generation cavity as mapping input data, taking the identification curve of the temperature climbing gradient change trend of the cavity as mapping output data, and configuring super parameters of a cavity temperature climbing gradient change trend curve fitting channel;
constructing a theoretical temperature evaluation formula of the generation cavity:
，
wherein,to generate the theoretical temperature of the cavity, < > is>To generate the initial temperature of the cavity, < > is->Gradient of cavity temperature climb after determining the cavity heat increase for the cavity temperature climb gradient trend curve, +. >Adding heat to the cavity;
fitting the initial monitoring temperature of the generation cavity and the theoretical increasing heat of the generation cavity according to the cavity temperature climbing gradient change trend curve fitting channel and the theoretical temperature evaluation of the generation cavity, so as to generate the theoretical temperature of the generation cavity;
the interactive thermocouple monitors the temperature sequence of the generated cavity, analyzes abnormal temperature based on the theoretical temperature of the generated cavity, obtains a temperature abnormal coefficient, and comprises the following steps:
configuring a deviation amplitude threshold of the cavity temperature, and carrying out high-amplitude statistics on the occurrence cavity temperature sequence based on the occurrence cavity theoretical temperature to generate a deviation temperature quantity proportion and a temperature deviation amplitude mean value;
and adding the deviation temperature quantity proportion and the temperature deviation amplitude mean value into the temperature anomaly coefficient.
2. The method of claim 1, wherein when the temperature anomaly coefficient does not meet a preset temperature control condition, generating temperature pre-warning information, and transmitting the temperature pre-warning information to the remote plasma generator management terminal, comprising:
configuring a deviation temperature quantity proportion threshold, a temperature threshold and a temperature deviation amplitude threshold, wherein the temperature threshold is the rated early warning temperature of the remote plasma generator;
When the temperature of any monitoring generation cavity of the generation cavity temperature sequence is greater than or equal to the temperature threshold, generating first type temperature early warning information;
calculating the sum of the theoretical temperature of the generation cavity and the average value of the temperature deviation amplitude, and setting the sum as the characteristic deviation temperature;
when the deviation temperature quantity proportion is greater than or equal to the deviation temperature quantity proportion threshold value, or/and the temperature deviation amplitude mean value is greater than or equal to the temperature deviation amplitude threshold value, or/and the characteristic deviation temperature is greater than or equal to the temperature threshold value, generating second type temperature early warning information;
and adding the first type temperature early-warning information or/and the second type temperature early-warning information into the temperature early-warning information.
3. A temperature control system for a remote plasma generator, comprising:
a first prediction module for receiving a gas flow rate, a gas type, and an electric field strength, performing plasma throughput prediction, generating a positive ion generation amount and a negative ion generation amount;
the first analysis module is used for carrying out frequent analysis of the absorption heat of the unit positive ions to generate basic absorption heat of the unit positive ions, and carrying out frequent analysis of the absorption heat of the unit negative ions to generate basic absorption heat of the unit negative ions;
The second prediction module is used for activating an electric shock heat calibration table, performing electric shock production heat prediction according to the electric field intensity, and generating electric shock generation cavity prediction heat, and comprises the following steps: firstly, an electric shock heat calibration table is activated, the electric shock heat calibration table is in communication connection with a temperature control device for a remote plasma generator, the electric shock heat calibration table is a heat comparison table which is prepared by calibrating heat generated by the remote plasma generator at different moments in the operation process, further, under the premise that the model of the remote plasma generator is determined, the electric field intensity of electric shock is strictly controlled, so that electric shock heat corresponding to different electric field intensities is preconfigured, the heat generated by electric shock is predicted according to the electric field intensity of the remote plasma generator, the predicted heat is integrated and summarized on the basis, and then is recorded as the predicted heat of an electric shock generation cavity of the remote plasma generator;
the attenuation module is used for attenuating the predicted heat of the electric shock generation cavity according to the unit positive ion reference absorption heat and the unit negative ion reference absorption heat and combining the positive ion generation amount and the negative ion generation amount to generate theoretical increase heat of the generation cavity;
The temperature conversion module is used for carrying out temperature conversion on the theoretical increased heat of the generation cavity to generate the theoretical temperature of the generation cavity;
the abnormal temperature analysis module is used for monitoring the temperature sequence of the generated cavity by the interactive thermocouple, and carrying out abnormal temperature analysis based on the theoretical temperature of the generated cavity to obtain a temperature abnormal coefficient;
the first judging module is used for generating temperature early warning information and sending the temperature early warning information to the remote plasma generator management terminal when the temperature anomaly coefficient does not meet the preset temperature control condition;
the information receiving module is used for loading the model of the remote plasma generator as a constraint condition, communicating a plurality of block chain nodes and receiving plasma history production information;
the first parameter configuration module is used for extracting gas recording flow, gas recording type, electric field recording strength and positive ion recording generation amount of the plasma history production information and configuring hyper-parameters of a positive ion generation amount prediction channel;
the second parameter configuration module is used for extracting gas record flow, gas record type, electric field record intensity and negative ion record generation amount of the plasma history production information and configuring super parameters of a negative ion generation amount prediction channel;
A third prediction module for performing plasma throughput prediction according to the positive ion production amount prediction channel and the negative ion production amount prediction channel, generating the positive ion production amount and the negative ion production amount;
the first loading module is used for loading plasma generation experiment measurement data, wherein the plasma generation experiment measurement data comprise a plurality of unit positive ion absorption heat calibration values;
the second judging module is used for carrying out cluster analysis on the plurality of unit positive ion absorption heat calibration values based on preset absorption heat deviation to generate a plurality of groups of unit positive ion absorption heat calibration values when the variance characteristic value of the plurality of unit positive ion absorption heat calibration values is smaller than or equal to a variance threshold value, wherein the plurality of groups of unit positive ion absorption heat calibration values have a plurality of intra-group calibration value quantity ratios;
the second analysis module is used for traversing the plurality of groups of unit positive ion absorption heat calibration values to perform mean value analysis and generating a plurality of unit positive ion absorption heat mean values;
the weighted mean analysis module is used for carrying out weighted mean analysis on the average value of the plurality of unit positive ion absorption heat by taking the number ratio of the calibration values in the plurality of groups as the weight to generate the unit positive ion reference absorption heat;
The third judging module is used for carrying out sequential adjustment on the plurality of unit positive ion absorption heat calibration values to generate an absorption heat calibration value sequence when the variance characteristic value of the plurality of unit positive ion absorption heat calibration values is larger than the variance threshold value;
the first extraction module is used for extracting a first absorption heat calibration value of a quarter sequence number of the absorption heat calibration value sequence;
the second extraction module is used for extracting a second absorption heat calibration value of three-quarter sequence numbers of the absorption heat calibration value sequence;
the first calculation module is used for calculating the absolute value of the deviation of the first absorption heat calibration value and the second absorption heat calibration value to generate a quartile range;
the mapping module is used for mapping the plurality of unit positive ion absorption heat calibration values according to the first absorption heat calibration value, the second absorption heat calibration value and the quartile range to generate a data distribution box diagram;
the second calculation module is used for calculating the reference absorption heat of the unit positive ions after performing discrete data cleaning on the calibration values of the absorption heat of the unit positive ions according to the data distribution box diagram;
The receiving module is used for receiving initial monitoring temperature of the generating cavity based on the thermocouple, wherein the initial monitoring temperature of the generating cavity is the monitoring temperature of the cavity before electric shock;
the second loading module is used for loading cavity temperature climbing gradient record data of a remote plasma generator model, wherein the cavity temperature climbing gradient record data comprises a generation cavity initial temperature record value, a cavity increase heat record value set and a cavity temperature climbing gradient record value set;
the curve construction module is used for constructing a cavity temperature climbing gradient change trend identification curve according to the cavity increase heat record value set and the cavity temperature climbing gradient record value set;
the first configuration module is used for using the initial temperature record value of the generation cavity as mapping input data, using the cavity temperature climbing gradient change trend identification curve as mapping output data and configuring the super-parameters of the cavity temperature climbing gradient change trend curve fitting channel;
the third calculation module is used for constructing a theoretical temperature evaluation formula of the generation cavity:
，
Wherein,to generate the theoretical temperature of the cavity, < > is>To generate the initial temperature of the cavity, < > is->Gradient of cavity temperature climb after determining the cavity heat increase for the cavity temperature climb gradient trend curve, +.>Adding heat to the cavity;
the fitting module is used for fitting the initial monitoring temperature of the generation cavity and the theoretical increased heat of the generation cavity according to the cavity temperature climbing gradient change trend curve fitting channel and the theoretical temperature evaluation type generation cavity so as to generate the theoretical temperature of the generation cavity;
the statistics module is used for configuring a cavity body temperature deviation amplitude threshold value, and carrying out temperature deviation amplitude statistics on the generated cavity body temperature sequence based on the generated cavity body theoretical temperature to generate a deviation temperature quantity proportion and a temperature deviation amplitude mean value;
and the first adding module is used for adding the deviation temperature quantity proportion and the temperature deviation amplitude mean value into the temperature anomaly coefficient.
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