CN117434777B - Photon integrated optical phased array, single-wavelength two-dimensional angle scanning device and method - Google Patents
Photon integrated optical phased array, single-wavelength two-dimensional angle scanning device and method Download PDFInfo
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- CN117434777B CN117434777B CN202311755134.XA CN202311755134A CN117434777B CN 117434777 B CN117434777 B CN 117434777B CN 202311755134 A CN202311755134 A CN 202311755134A CN 117434777 B CN117434777 B CN 117434777B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims abstract description 15
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 53
- 239000000758 substrate Substances 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 description 8
- 230000008569 process Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/292—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by controlled diffraction or phased-array beam steering
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/13306—Circuit arrangements or driving methods for the control of single liquid crystal cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention relates to the technical field of light beam control, and discloses a photonic integrated optical phased array, a single-wavelength two-dimensional angle scanning device and a method. Wherein the photonic integrated optical phased array comprises: a waveguide layer and a liquid crystal layer. Wherein the waveguide layer comprises: a plurality of waveguide periods side by side; the waveguide period includes a first waveguide segment and a second waveguide segment; in the same waveguide period, the light wave output end of the first waveguide section is connected with the light wave input end of the second waveguide section; the second waveguide segment is used for conducting light waves and radiating light waves; the liquid crystal layer is used for changing the refractive index of the first waveguide section and the refractive index of the second waveguide section. The invention realizes the two-dimensional angle scanning of the photonic integrated optical phased array on a single wavelength.
Description
Technical Field
The invention relates to the technical field of light beam control, in particular to a photonic integrated optical phased array, a single-wavelength two-dimensional angle scanning device and a method.
Background
The photonic integrated optical phased array is a 'non-mechanical' smart beam control technology, integrates the advantages of large-scale integration, high-precision manufacture, high speed, low size, weight and power consumption and the like of the photonic integrated technology, has the technical advantages of no moment of inertia, high scanning speed, high resolution and module multiplexing of the optical phased array technology, and is expected to improve and even subvert a traditional optical system in multiple aspects.
The core function of the optical phased array is to realize two-dimensional angle scanning of a single-wavelength laser beam. However, the two-dimensional phase shifting method limited by the photonic integrated optical phased array is high in difficulty and control complexity in the antenna configuration process, so that the existing photonic integrated optical phased array is restricted in realizing single-wavelength two-dimensional scanning, and application and development of the photonic integrated optical phased array in the fields of laser communication, laser radar and the like are hindered.
Disclosure of Invention
The invention aims to provide a photonic integrated optical phased array, a single-wavelength two-dimensional angle scanning device and a method, which realize the two-dimensional angle scanning of the photonic integrated optical phased array on the single wavelength.
The invention is realized by the following technical scheme:
in a first aspect, there is provided a photonic integrated optical phased array comprising: a waveguide layer and a liquid crystal layer. Wherein the waveguide layer comprises: a plurality of waveguide periods side by side; the waveguide period includes a first waveguide segment and a second waveguide segment; in the same waveguide period, the light wave output end of the first waveguide section is connected with the light wave input end of the second waveguide section; the second waveguide segment is used for conducting light waves and radiating light waves; the liquid crystal layer is used for changing the refractive index of the first waveguide section and the refractive index of the second waveguide section.
Further, the light wave input end of the first waveguide section of the current waveguide period is connected with the light wave output end of the second waveguide section of the previous waveguide period; the optical wave output section of the second waveguide section of the current waveguide period is connected with the optical wave input end of the first waveguide section of the next waveguide period.
Further, the plurality of waveguide periods are side-by-side along a length direction perpendicular to the second waveguide segment; the first waveguide segment is S-shaped.
Further, the second waveguide segment includes a grating antenna.
Further, the photonic integrated optical phased array further includes a first conductive layer, a first liquid crystal alignment layer, a second conductive layer, and a second liquid crystal alignment layer. The first conductive layer and the first liquid crystal alignment layer are located above the liquid crystal layer, the second conductive layer and the second liquid crystal alignment layer are located below the liquid crystal layer, and the waveguide layer is located below the second conductive layer.
Further, the photonic integrated optical phased array further comprises a substrate, a buried oxide layer and a cover plate. The buried oxide layer is located between the substrate and the waveguide layer, and the cover plate is located above the second conductive layer.
Further, the substrate is a silicon-based waveguide grating substrate; the first conductive layer and the second conductive layer are transparent conductive films; the cover plate is made of quartz glass.
In a second aspect, there is provided a single wavelength two-dimensional angular scanning apparatus comprising a laser transmitter, a power supply device, a voltage controller and a photonic integrated optical phased array as described in the first aspect. Wherein the laser transmitter is used for inputting the laser with single wavelength to the first waveguide segment. The power supply device is used for loading voltage to the liquid crystal layer. The voltage controller is used for controlling the power supply equipment to adjust the voltage applied to the liquid crystal layer.
In a third aspect, a single wavelength two-dimensional angular scanning method is provided, including the steps of: by adjusting the magnitude of the voltage applied to the liquid crystal layer of the photonic integrated optical phased array as described in the first aspect, the light waves conducted on the waveguide layer are controlled to deflect in both the x-direction and the y-direction.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. the device is provided with a waveguide grating antenna structure comprising a plurality of waveguide periods, each waveguide period comprises two different waveguide sections, the waveguide grating antenna structure is further combined with liquid crystal, evanescent wave fields generated by the different waveguide sections are simultaneously regulated and controlled by regulating voltage loaded on the liquid crystal, the delay control of phases of two dimensions generated by light waves radiated by the antenna is realized, the two-dimensional angle scanning of a photonic integrated optical phased array on single wavelength is further realized, and the dependence on a wavelength adjustable laser when the one-dimensional photonic integrated optical phased array is utilized for two-dimensional scanning is avoided; in addition, as the liquid crystal can simultaneously regulate and control evanescent wave fields of a plurality of waveguide periods, only 1 path of voltage control signals is needed, compared with N paths needed by one-dimensional configuration and N needed by two-dimensional configuration 2 The photonic integrated optical phased array does not need large-scale control signals, the control complexity is greatly reduced, and the liquid crystal and a plurality of side-by-side waveguide periods with the first waveguide section and the second waveguide section are formed; in addition, the difficulty of integrating the liquid crystal process and the photonic chip is small, and the liquid crystal display device is easy to modularize, large in caliber and high in power expansion.
2. The multiple parallel waveguide periods adopt serial S-shaped structures, spaced S-shaped waveguide gratings are integrally formed, and multiple parallel waveguide grating arrays are formed in the direction perpendicular to the length direction of the grating antenna, so that a cascade beam splitter is not required, most of energy loss is avoided, and meanwhile, the filling factor of the antenna can be greatly improved.
Drawings
In order to more clearly illustrate the technical solutions of the exemplary embodiments of the present invention, the drawings that are needed in the examples will be briefly described below, it being understood that the following drawings only illustrate some examples of the present invention and therefore should not be considered as limiting the scope, and that other related drawings may be obtained from these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a cross-sectional view of a photonic integrated optical phased array provided by embodiments of the present invention;
fig. 2 is a top view of a photonic integrated optical phased array according to an embodiment of the present invention.
In the drawings, the reference numerals and corresponding part names:
1-waveguide layer, 2-liquid crystal layer, 3-first conductive layer, 4-second conductive layer, 5-substrate, 6-buried oxide layer, 7-cover plate, 11-first waveguide section, 12-second waveguide section, 31-first liquid crystal alignment layer, 41-second liquid crystal alignment layer.
Description of the embodiments
For the purpose of making apparent the objects, technical solutions and advantages of the present invention, the present invention will be further described in detail with reference to the following examples and the accompanying drawings, wherein the exemplary embodiments of the present invention and the descriptions thereof are for illustrating the present invention only and are not to be construed as limiting the present invention.
Examples: the two-dimensional phase shifting method of the photonic integrated optical phased array is complex, the antenna arrangement configuration and the process difficulty are high, the control complexity is high, and the like, so that the single-wavelength two-dimensional scanning by using the existing photonic integrated optical phased array is not easy to realize. Aiming at the problems, the embodiment provides a photonic integrated optical phased array, which can realize two-dimensional angle scanning of the photonic integrated optical phased array on single wavelength by adjusting voltages loaded on liquid crystal to simultaneously regulate evanescent wave fields generated by different waveguide sections.
As shown in fig. 1, the photonic integrated optical phased array provided in this embodiment includes, in order from bottom to top: a substrate 5, a buried oxide layer 6, a waveguide layer 1, a second conductive layer 4, a second liquid crystal alignment layer 41, a liquid crystal layer 2, a first conductive layer 3, a first liquid crystal alignment layer 31, and a cover plate 7. Wherein, the substrate 5, the buried oxide layer 6 and the waveguide layer 1 can be developed through a semiconductor process, and the substrate 5 is a silicon-based waveguide grating substrate; the first conductive layer 3, the liquid crystal layer 2, the second conductive layer 4 and the cover plate 7 can be processed by a liquid crystal device process, and the first conductive layer 3 and the second conductive layer 4 are transparent conductive films; the cover plate 7 is quartz glass.
As shown in fig. 2, the waveguide layer 1 is composed of 10 waveguide periods, each having a first waveguide segment 11 and a second waveguide segment 12. Wherein the second waveguide segment 12 is a grating antenna, which is capable of conducting light waves and radiating light waves. The liquid crystal layer 2 is used to change the refractive index of the first waveguide segment 11 and the refractive index of the second waveguide segment 12.
From the structure, in one waveguide period, the light wave input end of the first waveguide section 11 is connected with the light wave output end of the second waveguide section 12 in the previous waveguide period, the light wave output end of the first waveguide section 11 is connected with the light wave input end of the second waveguide section 12, the light wave output end of the second waveguide section 12 is connected with the light wave input end of the first waveguide section 11 in the next waveguide period, thus 10 side-by-side waveguide periods are formed, a serial S-shaped structure is adopted, an interval S-shaped waveguide grating is formed as a whole, and a multi-path parallel waveguide grating array is formed in the direction perpendicular to the length direction of the grating antenna. The photonic integrated optical phased array with the structure does not need to use a cascade beam splitter, can avoid most of energy loss, and can greatly improve the filling factor of an antenna.
The liquid crystal layer 2 is arranged above the waveguide grating array with the structure, the refractive index of the crystal oscillator is changed by adjusting the voltage loaded on the crystal oscillator layer, and then the evanescent wave field of the waveguide grating array is regulated and controlled, so that the phase difference in the x direction and the y direction is regulated and controlled simultaneously.
Specifically, when the optical field propagates in the entire waveguide layer 1, its evanescent field is regulated by the liquid crystal layer 2 thereabove. On the one hand, the refractive index of the liquid crystal is changed by adjusting the voltage, and the change of the refractive index of the liquid crystal affects the effective refractive index of the waveguide section (namely the first waveguide section 11) with no grating structure, so that the phase delay of the optical field passing through the first waveguide section 11 is changed, and further, the optical field radiated by each section of grating generates a phase difference along the y direction, and the optical wave is deflected along the y direction in an angle manner. On the other hand, the change of the refractive index of the liquid crystal can influence the effective refractive index difference of the optical wave along the period of the grating in the x direction, and when the optical wave is radiated outwards from the grating, the phase difference of the emergent optical wave at different radiation positions is regulated, so that the optical wave deflects along the x direction. From the total effect, when the refractive index of the liquid crystal is regulated by an external electric field, the two-dimensional beam deflection effect in the x and y directions can be realized.
In summary, according to the photonic integrated optical phased array provided in this embodiment, the evanescent wave fields generated by different waveguide segments are simultaneously regulated and controlled by adjusting the voltage loaded on the liquid crystal, so that delay control is performed on the phases of two dimensions generated by the light waves radiated by the antenna, and further two-dimensional angle scanning of the photonic integrated optical phased array on a single wavelength is realized, and dependence on a wavelength-adjustable laser during two-dimensional scanning by using a one-dimensional photonic integrated optical phased array is avoided; in addition, as the liquid crystal can simultaneously regulate and control evanescent wave fields of a plurality of waveguide periods, only 1 path of voltage control signals is needed, compared with N paths needed by one-dimensional configuration and N needed by two-dimensional configuration 2 The photonic integrated optical phased array does not need large-scale control signals, the control complexity is greatly reduced, and the liquid crystal and a plurality of side-by-side waveguide periods with the first waveguide section and the second waveguide section are formed; in addition, the difficulty of integrating the liquid crystal process and the photonic chip is small, and the liquid crystal display device is easy to modularize, large in caliber and high in power expansion.
Based on the above-mentioned photonic integrated optical phased array, the present embodiment further provides a single-wavelength two-dimensional angle scanning device, which includes a laser emitter, a power supply device, a voltage controller, and the photonic integrated optical phased array according to the first aspect. Wherein the laser transmitter is used for inputting the laser with single wavelength to the first waveguide segment. The power supply device is used for loading voltage to the liquid crystal layer. The voltage controller is used for controlling the power supply equipment to adjust the voltage applied to the liquid crystal layer.
Further, the single-wavelength two-dimensional angle scanning device further comprises a light source controller.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the invention, and is not meant to limit the scope of the invention, but to limit the invention to the particular embodiments, and any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (6)
1. A photonic integrated optical phased array comprising: a waveguide layer (1) and a liquid crystal layer (2); the waveguide layer (1) comprises: a plurality of waveguide periods side by side; the waveguide period comprises a first waveguide section (11) and a second waveguide section (12); in the same waveguide period, the light wave output end of the first waveguide section (11) is connected with the light wave input end of the second waveguide section (12); the second waveguide section (12) is used for conducting light waves and radiating light waves; the liquid crystal layer (2) is used for changing the refractive index of the first waveguide section (11) and the refractive index of the second waveguide section (12);
the light wave input end of a first waveguide section (11) of the current waveguide period is connected with the light wave output end of a second waveguide section (12) of the previous waveguide period; the light wave output section of the second waveguide section (12) of the current waveguide period is connected with the light wave input end of the first waveguide section (11) of the next waveguide period;
a plurality of waveguide periods are side-by-side along a length direction perpendicular to the second waveguide segment (12); the first waveguide section (11) is S-shaped;
the second waveguide segment (12) includes a grating antenna.
2. A photonic integrated optical phased array according to claim 1, further comprising a first conductive layer (3), a first liquid crystal alignment layer (31), a second conductive layer (4) and a second liquid crystal alignment layer (41); the first conductive layer (3) and the first liquid crystal alignment layer (31) are located above the liquid crystal layer (2), the second conductive layer (4) and the second liquid crystal alignment layer (41) are located below the liquid crystal layer (2), and the waveguide layer (1) is located below the second conductive layer (4).
3. A photonic integrated optical phased array according to claim 2, further comprising a substrate (5), a buried oxide layer (6) and a cover plate (7); the buried oxide layer (6) is located between the substrate (5) and the waveguide layer (1), and the cover plate (7) is located above the second conductive layer (4).
4. A photonic integrated optical phased array according to claim 3, characterized in that the substrate (5) is a silicon-based waveguide grating substrate; the first conductive layer (3) and the second conductive layer (4) are transparent conductive films; the cover plate (7) is made of quartz glass.
5. A single wavelength two-dimensional angular scanning device comprising a laser transmitter, a power supply, a voltage controller, and a photonic integrated optical phased array according to any of claims 1-4;
the laser transmitter is used for inputting laser with single wavelength to the first waveguide section (11);
the power supply device is used for loading voltage to the liquid crystal layer (2);
the voltage controller is used for controlling the power supply equipment to adjust the voltage applied to the liquid crystal layer (2).
6. The single-wavelength two-dimensional angle scanning method is characterized by comprising the following steps of: by adjusting the magnitude of the voltage applied to the liquid crystal layer (2) of the photonic integrated optical phased array as claimed in any of claims 1-4, the light waves conducted on the waveguide layer (1) are controlled to deflect in both the x-direction and the y-direction.
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