CN117420083B - Online monitoring device and method for trace products of plasma erosion - Google Patents
Online monitoring device and method for trace products of plasma erosion Download PDFInfo
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- 238000012806 monitoring device Methods 0.000 title claims abstract description 10
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- 238000012544 monitoring process Methods 0.000 claims abstract description 15
- 238000004458 analytical method Methods 0.000 claims abstract description 14
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- 230000003595 spectral effect Effects 0.000 abstract description 10
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- NMFHJNAPXOMSRX-PUPDPRJKSA-N [(1r)-3-(3,4-dimethoxyphenyl)-1-[3-(2-morpholin-4-ylethoxy)phenyl]propyl] (2s)-1-[(2s)-2-(3,4,5-trimethoxyphenyl)butanoyl]piperidine-2-carboxylate Chemical compound C([C@@H](OC(=O)[C@@H]1CCCCN1C(=O)[C@@H](CC)C=1C=C(OC)C(OC)=C(OC)C=1)C=1C=C(OCCN2CCOCC2)C=CC=1)CC1=CC=C(OC)C(OC)=C1 NMFHJNAPXOMSRX-PUPDPRJKSA-N 0.000 description 3
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N9/00—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
- G01N9/24—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity by observing the transmission of wave or particle radiation through the material
Abstract
An on-line monitoring device and method for trace products of plasma erosion relates to the technical field of plasma spectrum testing, and solves the technical problem of how to monitor trace products of plasma thruster work parts, wherein the device comprises a metal shielding cover, a first convex lens, a first reflecting mirror, a beam splitting prism, a second convex lens, a grating and a second reflecting mirror which are arranged in the metal shielding cover, and a photomultiplier and analysis processing equipment which are arranged outside the metal shielding cover; an incident light slit and an emergent light slit are fixed on the side wall of the metal shielding cover, the emergent light slit is connected with the photomultiplier, and the photomultiplier is connected with the analysis processing equipment; the device and the method design spectrometer equipment to monitor the light intensity of the trace product spectral line, establish the relationship between the radiation spectral line intensity of the trace substance and the light intensity signal fluctuation, so as to obtain the absolute density of the trace product, and have high reliability and sensitive monitoring.
Description
Technical Field
The invention relates to the technical field of plasma spectrum testing.
Background
The plasma thruster is the core equipment of the electric propulsion system, plays an important role in satellite propulsion and attitude control, and the performance state of the plasma thruster directly determines the state of the propulsion system.
The traditional life assessment test of the plasma thruster is high in cost and requires a great deal of time, which is unfavorable for the rapid iterative optimization design of engineering units. In fact, studies have shown that the cause of plasma thruster life failure is mainly component erosion, e.g. hollow cathode emitter erosion and hall thruster wall erosion, leading to thruster failure. Thus, monitoring of plasma thruster component erosion trace products is an effective means of assessing plasma thruster lifetime, whereas emission spectroscopy methods have in-situ, instant, non-invasive features that can be used for monitoring of plasma thruster component erosion trace products. In fact, the plasma erosion trace product density is orders of magnitude lower than the thruster body discharge working medium density, and a spectrometer device is required to be designed so as to have the capability of monitoring trace products.
However, the signals detected by the existing spectrometry methods in other fields have the characteristic of strong signals, and the signals do not relate to the test and analysis of weak signals of trace substances, so the signals are not suitable for the collection of trace weak signals in the service life evaluation of a plasma thruster, and if the signals are directly applied, the problem that trace product signals cannot be detected exists.
Therefore, how to solve the problem of monitoring trace products of corrosion of plasma thruster parts is a technical problem to be solved in the field.
Disclosure of Invention
In order to solve the technical problems, the invention provides an on-line monitoring device and method for trace products of plasma erosion, and the device is designed to monitor the light intensity of trace product spectral lines by spectrometer equipment, and establish the relationship between the radiation spectral line intensity of trace substances and the fluctuation of light intensity signals so as to obtain the absolute density of trace products, and has high reliability and sensitive monitoring.
The on-line monitoring device for the trace products of the plasma erosion comprises a metal shielding cover, a first convex lens, a first reflecting mirror, a beam splitting prism, a second convex lens, a grating, a second reflecting mirror, a photomultiplier and analysis processing equipment, wherein the first convex lens, the first reflecting mirror, the beam splitting prism, the second convex lens, the grating and the second reflecting mirror are arranged inside the metal shielding cover;
an incident light slit and an emergent light slit are fixed on the side wall of the metal shielding cover, the emergent light slit is connected with the photomultiplier, and the photomultiplier is connected with the analysis processing equipment; the first convex lens is arranged in the metal shielding cover close to the incident light slit, and the first reflecting mirror is arranged corresponding to the first convex lens;
the plasma radiation light collected by the incident light slit sequentially passes through the first convex lens, the first reflecting mirror, the beam splitting prism, the second convex lens, the grating and the second reflecting mirror, and is incident to the photomultiplier through the emergent light slit, and the photomultiplier transmits the acquired experimental light intensity information to the analysis processing equipment;
the analysis processing device comprises the following modules:
the light intensity acquisition module is used for acquiring experimental light intensity information in the wavelength range of the trace product;
the fluctuation error calculation module is used for calculating fluctuation errors caused by the fluctuation of the experimental light intensity based on the experimental light intensity;
the relation establishing module is used for establishing the relation between the theoretical light intensity and the experimental light intensity;
the trace product density calculation module is used for calculating the density of the trace product based on the fluctuation error and the relation between the theoretical light intensity and the experimental light intensity;
wherein the theoretical light intensity is expressed by the following formula:
Imodel=ε×n e ×n i ×Q i ；
wherein epsilon is the light ratio of the incident light slit to the plasma radiation, n e Is electron density, n i For trace product density, Q i For the excitation rate coefficient, imodel represents the intensity of the theoretical trace product luminescence, i.e., the theoretical light intensity.
Further, the incident light slit width is 25um.
Further, the incident light slit is externally connected with an SMA connector, the SMA connector is connected with an optical fiber, the other side of the optical fiber is used for receiving light radiated by a plasma region, and the optical fiber is a high-transmittance deep ultraviolet optical fiber with a core of 1000 um.
Further, the device further comprises a grating angle regulating component, wherein the grating angle regulating component is arranged on the side wall of the metal shielding cover adjacent to the side wall of the incident light slit, and the grating angle regulating component is connected with the grating.
A plasma erosion trace product on-line monitoring method, which is applied to the device, comprises the following steps:
collecting experimental light intensity information in the wavelength range of trace products;
calculating fluctuation errors caused by the fluctuation of the experimental light intensity based on the experimental light intensity;
establishing a relation between theoretical light intensity and experimental light intensity;
and calculating the density of the trace product based on the fluctuation error and the relation between the theoretical light intensity and the experimental light intensity.
Further, when the experimental light intensity information in the wavelength range of the trace product is acquired, the preset times are acquired in continuous time, and the preset times are 100 times.
Further, the trace product wavelength ranges are: the wavelength center was 250nm, and the range was 1 nm.
Further, the density of the trace product is calculated by the following formula:
n i =erro 2 /(ε×n e ×Q i )；
wherein epsilon is the light ratio of the incident light slit to the plasma radiation, n e Is electron density, n i For trace product density, Q i For the excitation rate coefficient, erro is the fluctuation error.
Further, ε is 0.01, n e Taking a hollow cathode equipment probe to measure an electron density value of 10 11 cm -3 ；
The excitation rate coefficient is expressed as follows:
Q i =2.56×10 -8 ×T e (0.193) ×exp(-3.93/T e )；
wherein T is e The electron temperature value measured by the hollow cathode equipment probe is 3eV.
The device and the method for on-line monitoring the trace product of the plasma erosion provided by the invention at least comprise the following beneficial effects:
(1) The spectrometer equipment is designed to monitor the spectral line intensity of trace products, after plasma radiation light enters the device, the plasma radiation light is received by the photomultiplier after being split and diverged and converged twice through the beam splitter prism and the grating, the measured spectral intensity is received for multiple times in continuous time, and the relation between the spectral line intensity of trace substances and the fluctuation of light intensity signals is established so as to obtain the absolute density of trace products.
(2) The measured spectrum intensity is received for multiple times in continuous time, so that the fluctuation of the light intensity of the trace product can be measured better.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following description will briefly introduce the drawings that are needed in the embodiments or the description of the prior art, it is obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an embodiment of an on-line monitoring device for trace products of plasma etching according to the present invention;
FIG. 2 is a flow chart of one embodiment of a method for on-line monitoring of trace products of plasma erosion;
reference numerals: the device comprises a 1-metal shielding cover, a 2-incident light slit, a 3-first convex lens, a 4-first reflecting mirror, a 5-beam splitting prism, a 6-second convex lens, a 7-grating, an 8-second reflecting mirror, a 9-emergent light slit, a 10-photomultiplier and an 11-precision mechanical stepping regulation and control table.
Detailed Description
In order to better understand the above technical solutions, the following detailed description will be given with reference to the accompanying drawings and specific embodiments.
Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout, and the following is exemplary by referring to the embodiments of the drawings, which are intended to be illustrative of the present application and not to be construed as limiting the present application.
In the description of the present application, it should be noted that, directions or positional relationships indicated by terms such as "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., are based on directions or positional relationships shown in the drawings, are merely for convenience of description of the present application and for simplification of the description, and do not indicate or imply that the apparatus or element referred to must have a specific direction, be configured and operated in a specific direction, and thus should not be construed as limiting the present application.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In this application, the meaning of "a plurality of" means two or more, unless specifically defined otherwise.
In this application, unless explicitly stated and limited otherwise, terms such as "mounted," "connected," "coupled," and "connected" are to be construed broadly, and may be, for example, mechanically coupled, electrically coupled, directly coupled, indirectly coupled via an intermediate medium, or in communication between two elements or in an interaction relationship between two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
Embodiment one:
referring to fig. 1, in some embodiments, there is provided an on-line monitoring device for a trace product of plasma erosion, comprising a metal shield 1, and a first convex lens 3, a first reflecting mirror 4, a beam splitting prism 5, a second convex lens 6, a grating 7 and a second reflecting mirror 8 which are arranged inside the metal shield 1, and a photomultiplier 10 and an analysis processing device which are arranged outside the metal shield 1;
an incident light slit 2 and an emergent light slit 9 are fixed on the side wall of the metal shielding cover 1, the emergent light slit 9 is connected with the photomultiplier 10, and the photomultiplier 10 is connected with the analysis processing equipment; the entrance light slit 2 is used for collecting plasma radiation. The first convex lens 3 is arranged in the metal shielding case 1 near the incident light slit 2, and the first reflecting mirror 4 is arranged corresponding to the first convex lens 3;
the optical fiber of SMA905 joint is connected in front of the incident light slit 2, and the light that the plasma radiation comes out is collected at the area of waiting to monitor to the optic fiber other end, then from incident light slit 2 passes through in proper order first convex lens 3 first speculum 4 splitting prism 5, second convex lens 6 grating 7 and second speculum 8, and warp exit light slit 9 incidence to photomultiplier 10, photomultiplier 10 will the experimental light intensity information who obtains is transmitted to analytical processing equipment.
The analysis processing device comprises the following modules:
the light intensity acquisition module is used for acquiring experimental light intensity information in the wavelength range of the trace product;
the fluctuation error calculation module is used for calculating fluctuation errors caused by the fluctuation of the experimental light intensity based on the experimental light intensity;
the relation establishing module is used for establishing the relation between the theoretical light intensity and the experimental light intensity;
and the trace product density calculation module is used for calculating the density of the trace product based on the fluctuation error and the relation between the theoretical light intensity and the experimental light intensity.
Preferably, the normal direction of the first reflecting mirror 4 makes an angle of 45 degrees with the incident light beam from the first convex lens 3.
Preferably, the width of the incident light slit 2 is 25um, the incident light slit 2 is externally connected with an SMA connector, the SMA connector is used for inserting an optical fiber, the other side of the optical fiber is used for receiving light radiated by a plasma region, and the optical fiber is a high-transmittance deep ultraviolet optical fiber with a core of 1000 um. The size of the slit affects the resolution and the luminous flux, and generally, the smaller the slit is, the higher the resolution is, but the smaller the luminous flux is, the smaller the light channel is, which reduces the signal intensity, and the device is difficult to measure. Therefore, in order to achieve both resolution and luminous flux, a size of 25um is selected.
The device further comprises a grating 7 angle regulating component, wherein the grating 7 angle regulating component is arranged on the side wall of the metal shielding cover 1 adjacent to the side wall of the incident light slit 2, and the grating 7 angle regulating component is connected with the grating 7.
Preferably, the angle regulation and control part of the grating 7 is a precision mechanical stepping regulation and control table 11, and the precision mechanical stepping regulation and control table 11 is connected with the grating 7 and is used for controlling the angle of the grating 7.
During operation, light beams collected through the incident light slits 2 are transmitted to the first convex lenses 3, the first convex lenses 3 converge optical fibers, and the optical fibers are changed into parallel light; the light beam is incident to the first reflecting mirror 4, the propagation direction of the light beam is changed by 90 degrees through the triangular first reflecting mirror 4 and is incident to the beam splitting prism 5, the light beam is dispersed through the beam splitting prism 5, the beam splitting prism 5 is used for decomposing the multi-color light into monochromatic light and then enters the second convex lens 6, and the second convex lens 6 converges the light beam; the light beam is converged and incident to the grating 7 through the second convex lens 6 to be split, and the light beam split twice through the beam splitting prism 5 and the grating 7 is further transmitted to the second reflecting mirror 8; the light beam is received by the outgoing light slit 9 and is incident on the photomultiplier tube 10 detector, which converts it into an analytically processable electrical signal. The wavelength band of the light received by the photomultiplier 10 is related to the deflection angle of the grating 7, and the deflection angle of the grating 7 can be controlled by a precision mechanical stepping regulating table 11. The light emitted from the plasma is split up and received by the photomultiplier tube 10.
The above is a general description of a monitoring device, and the implementation of the device and the application of the method are further described by taking the monitoring of the B atomic spectrum line of the trace product corroded by the emitter of the aerospace electric propulsion hollow cathode device as an example in combination with a specific application scene.
The typical wavelengths of B atoms of the erosion products of aerospace electric propulsion hollow cathode equipment are 249.68nm and 249.77nm. The spectrometer system therefore needs to extract spectral lines in the region with a wavelength center of 250nm in the range of 1 nm. The angle of the grating 7 is controlled by adjusting the precision mechanical stepping regulating and controlling table 11, so that the aim can be fulfilled.
The light of the plasma radiation enters the spectrometer system through optical fiber light guide. One end of the optical fiber is fixed through an optical fiber coupler and then the luminous area of the electric propulsion hollow cathode equipment is monitored in the vacuum tank, and the other end of the optical fiber is fixed on the over-vacuum optical fiber feed-through flange. One optical fiber is used outside the vacuum tank, one side of the optical fiber is connected to the over-vacuum optical fiber feed-through flange, and the other side of the optical fiber is screwed at an SMA interface of an incident slit of the spectrometer. Preferably, the optical fiber is selected to have a core of 1000um high-transmittance deep ultraviolet optical fiber. The position of the wavelength where the signal of the trace product appears is an ultraviolet signal, and if a non-ultraviolet fiber is used, the signal is reduced due to the fiber, so that a part of the signal which is weak originally is lost, and the signal is weaker and is difficult to detect. Whereas a core of 1000um can increase the luminous flux in order to improve the signal to noise ratio of the signal.
To this end, the polychromatic light of the plasma radiation of the electrically propelled hollow cathode device is processed by the spectrometer system, detected and received by the photomultiplier 10. The photomultiplier tube 10 is controlled to be arranged, and continuous time acquisition can be realized. Preferably, the hollow cathode device for plasma is continuously collected for 100 times under one working condition so as to measure the fluctuation of the light intensity of trace products.
Embodiment two:
referring to fig. 2, in some embodiments, an on-line monitoring method of trace products of plasma erosion is provided, and the apparatus is applied, including the steps of:
s1, acquiring experimental light intensity information in a trace product wavelength range;
s2, calculating fluctuation errors caused by experimental light intensity fluctuation based on the experimental light intensity;
s3, establishing a relation between theoretical light intensity and the experimental light intensity;
s4, calculating the density of the trace product based on the fluctuation error and the relation between the theoretical light intensity and the experimental light intensity.
Specifically, in step S1, when the experimental light intensity information in the trace product wavelength range is collected, the preset times are collected in continuous time, and the preset times are 100 times.
In the acquisition process, the acquisition of experimental light intensity information in the wavelength range of trace products is realized by adjusting the angle of the grating 7. The trace product wavelength ranges are: the wavelength center was 250nm, and the range was 1 nm.
In step S3, the theoretical light intensity is expressed by the following formula:
Imodel=ε×n e ×n i ×Q i ；
wherein epsilon is the light ratio of the incident light slit to the plasma radiation, n e Is electron density, n i For trace product density, Q i For the excitation rate coefficient, imodel represents the intensity of the theoretical trace product luminescence, i.e., the theoretical light intensity.
In step S4, the density of the trace product is calculated by the following formula:
n i =erro 2 /(ε×n e ×Q i )；
wherein epsilon is the light ratio of the incident light slit to the plasma radiation, n e Is electron density, n i For trace product density, Q i Is the excitation rate coefficient.
As a preferred embodiment, ε is 0.01, n e Taking a hollow cathode equipment probe to measure an electron density value of 10 11 cm -3 ；
The excitation rate coefficient is expressed as follows:
Q i =2.56×10 -8 ×T e (0.193) ×exp(-3.93/T e )；
wherein T is e The electron temperature value measured by the hollow cathode equipment probe is 3eV.
The specific deduction calculation process is as follows:
trace product spectra were identified and their intensity was noted as I i (i=1-100)。
The error caused by the fluctuation of the experimental light intensity is expressed by the following formula:
erro=( I i -I i ’)/ I i ’,i=1-100；
wherein I is i ' average value of experimental multiple collection, error is error caused by fluctuation of experimental light intensity.
The intensity of luminescence of the theoretical trace product was recalculated as follows:
I model =ε×n e ×n i ×Q i ；
wherein epsilon is the light proportion of the plasma radiation received by the incident light slit, and is expressed byOptical fiber and radiation geometric optical relation determination, n e Is electron density, n i For trace product density, Q i For excitation rate coefficient, I model Indicating the intensity of luminescence of the trace product theoretically.
In this embodiment, ε is 0.01, n e Taking a probe of the hollow cathode equipment to measure the electron density value which is 10 11 cm -3 , T e The electron temperature value measured by the hollow cathode equipment probe is 3eV. Q (Q) i Is 2.56 multiplied by 10 -8 ×T e (0.193) ×exp(-3.93/T e )。
The relation between the fluctuation of the experimental light intensity and the absolute intensity of the experimental light intensity is as follows:
erro=1./sqrt(I model )；
erro=1./sqrt(ε×n e ×n i ×Q i )；
erro=( I i -I i ’)/ I i ’, i=1-100；
the densities of the trace products thus obtained are expressed as follows:
n i =erro 2 /(ε×n e ×Q i )。
the on-line monitoring device and the on-line monitoring method for the trace product of the plasma erosion, provided by the embodiment, are designed to monitor the light intensity of the spectral line of the trace product by spectrometer equipment, after the plasma radiation light enters the device, the plasma radiation light is received by the photomultiplier after being split and diverged and converged twice by the beam splitter prism and the grating, the measured spectral intensity is received for multiple times in continuous time, and the relationship between the radiation line intensity of the trace substance and the fluctuation of the light intensity signal is established, so that the absolute density of the trace product is obtained, and compared with the traditional testing method, the monitoring method has high reliability and sensitive monitoring; the measured spectrum intensity is received for multiple times in continuous time, so that the fluctuation of the light intensity of the trace product can be measured better.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the invention. It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (5)
1. The on-line monitoring device for the trace products of the plasma erosion is characterized by comprising a metal shielding cover, a first convex lens, a first reflecting mirror, a beam splitting prism, a second convex lens, a grating and a second reflecting mirror which are arranged in the metal shielding cover, and a photomultiplier and analysis processing equipment which are arranged outside the metal shielding cover;
an incident light slit and an emergent light slit are fixed on the side wall of the metal shielding cover, the emergent light slit is connected with the photomultiplier, and the photomultiplier is connected with the analysis processing equipment;
the plasma radiation light collected by the incident light slit sequentially passes through the first convex lens, the first reflecting mirror, the beam splitting prism, the second convex lens, the grating and the second reflecting mirror, and is incident to the photomultiplier through the emergent light slit, and the photomultiplier transmits the acquired experimental light intensity information to the analysis processing equipment;
the analysis processing device comprises the following modules:
the light intensity acquisition module is used for acquiring experimental light intensity information in the wavelength range of the trace product;
the fluctuation error calculation module is used for calculating fluctuation errors caused by the fluctuation of the experimental light intensity based on the experimental light intensity;
the relation establishing module is used for establishing the relation between the theoretical light intensity and the experimental light intensity;
the trace product density calculation module is used for calculating the density of the trace product based on the fluctuation error and the relation between the theoretical light intensity and the experimental light intensity;
wherein the theoretical light intensity is expressed by the following formula:
Imodel=ε×n e ×n i ×Q i ；
wherein epsilon is the light ratio of the incident light slit to the plasma radiation, n e Is electron density, n i For trace product density, Q i For the excitation rate coefficient, imodel represents the intensity of the luminescence of the theoretical trace product, i.e., the theoretical light intensity;
when the experimental light intensity information in the wavelength range of the trace product is acquired, the preset times are acquired in continuous time, and the preset times are 100 times;
the trace product wavelength ranges are: a region having a wavelength center of 250nm and a range of 1 nm;
the density of the trace product is calculated by the following formula:
n i =erro 2 /(ε×n e ×Q i )；
wherein epsilon is the light ratio of the incident light slit to the plasma radiation, n e Is electron density, n i For trace product density, Q i For excitation rate coefficients, erro is the fluctuation error;
epsilon is 0.01, n e Taking a hollow cathode equipment probe to measure an electron density value of 10 11 cm -3 ；
The excitation rate coefficient is expressed as follows:
Q i =2.56×10 -8 ×T e (0.193) ×exp(-3.93/T e )；
wherein T is e The electron temperature value measured by the hollow cathode equipment probe is 3eV.
2. The apparatus of claim 1, wherein the entrance light slit width is 25um.
3. The apparatus of claim 1, wherein the incident light slit is circumscribed by an SMA joint, the SMA joint is connected to an optical fiber, the other side of the optical fiber is used for receiving light radiated by a plasma region, and the optical fiber is a high-transmittance deep ultraviolet optical fiber with a core of 1000 um.
4. The apparatus of claim 1, further comprising a grating angle modulation component disposed on a sidewall of the metal shield adjacent to the sidewall of the incident light slit, the grating angle modulation component being coupled to the grating.
5. An on-line monitoring method for trace products of plasma erosion, which is applied to the device as claimed in any one of claims 1 to 4, and comprises the following steps:
collecting experimental light intensity in the wavelength range of trace products;
calculating fluctuation errors caused by the fluctuation of the experimental light intensity based on the experimental light intensity;
establishing a relation between theoretical light intensity and experimental light intensity;
and calculating the density of the trace product based on the fluctuation error and the relation between the theoretical light intensity and the experimental light intensity.
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Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
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