CN117077183B - Semiconductor equipment maintenance data processing method and system - Google Patents

Semiconductor equipment maintenance data processing method and system Download PDF

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CN117077183B
CN117077183B CN202311331180.7A CN202311331180A CN117077183B CN 117077183 B CN117077183 B CN 117077183B CN 202311331180 A CN202311331180 A CN 202311331180A CN 117077183 B CN117077183 B CN 117077183B
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CN117077183A (en
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葛云生
徐培欣
蔡斌
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Li Zhuang Information Technology Suzhou Co ltd
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    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract

The invention discloses a method and a system for processing maintenance data of semiconductor equipment, belonging to the technical field of data processing; the method comprises the following steps: acquiring a maintenance data sequence of the semiconductor equipment; taking the chaotic sequence as a key updating sequence; acquiring the coordinates of any point in a Cartesian coordinate system as an initial key; taking the coordinates of any point on the first encryption straight line except the initial key as the ciphertext of the first data to be encrypted; and analogizing is performed until ciphertext of all data to be encrypted in the data sequence to be encrypted is obtained; obtaining ciphertext sequences from ciphertext of all data to be encrypted; and storing or transmitting the ciphertext sequence, the initial key and the key updating sequence. The invention acquires the ciphertext of each data to be encrypted by constructing the encryption straight line, and has simple encryption method, small calculated amount and high encryption speed.

Description

Semiconductor equipment maintenance data processing method and system
Technical Field
The invention relates to the technical field of data processing, in particular to a method and a system for processing maintenance data of semiconductor equipment.
Background
Semiconductor equipment maintenance is an important work in the production operation process of enterprises, and once the semiconductor equipment fails, the whole production process of the enterprises can be affected. The maintenance of the semiconductor equipment is to fully utilize means such as intellectualization, informatization, big data and the like to collect, analyze and intelligently analyze equipment data, and finally realize the functions such as the monitoring of mechanical equipment, the visualization of equipment management, the predictive maintenance of equipment and the like. The semiconductor equipment maintenance data are collected semiconductor equipment data, and comprise equipment parameters such as temperature, pressure, current, voltage and the like in the working state of the semiconductor equipment, video monitoring data in the working state of the semiconductor equipment and the like.
The semiconductor equipment data relates to the process confidentiality of enterprise production, and encryption of the semiconductor equipment maintenance data is required to ensure the security of the process confidentiality of enterprise production. The existing encryption method has low operation speed like DES algorithm, small key space and easy violent cracking attack; the AES encryption algorithm is block encryption, wherein the ECB mode has the same encryption result for the same data block, and is easy to attack by statistical analysis.
Disclosure of Invention
In order to solve the defects in the prior art, the invention provides a method and a system for processing maintenance data of semiconductor equipment, and the method relates to data encryption which is simple and efficient, has large key space, very high key sensitivity and avalanche effect, and can resist brute force cracking attacks and statistical analysis attacks.
The first object of the present invention is to provide a method for processing maintenance data of semiconductor equipment, comprising the steps of:
acquiring a maintenance data sequence of the semiconductor equipment; converting the semiconductor device repair data sequence into a plurality of binary strings; converting each binary string into decimal numbers to serve as data to be encrypted to form a data sequence to be encrypted;
constructing a chaotic sequence by using chaotic mapping, and taking the chaotic sequence as a key updating sequence;
acquiring the coordinates of any point in a Cartesian coordinate system as an initial key;
acquiring a first encryption straight line according to the slope of the first data to be encrypted in the data sequence to be encrypted as a preset straight line and the initial key as the coordinate of a point on the preset straight line; taking the coordinates of any point on the first encryption straight line except the initial key as the ciphertext of the first data to be encrypted;
acquiring a first element in a key updating sequence as a first step length; taking the coordinates of a point with the distance equal to a first step length from the coordinate point corresponding to the initial key as a key of second data to be encrypted in the data sequence to be encrypted on a first encryption straight line;
similarly, obtaining a ciphertext of the second data to be encrypted according to the key of the second data to be encrypted and the second data to be encrypted; obtaining a key of the next data to be encrypted according to a second element in the key updating sequence as a second step length; and analogizing is performed until ciphertext of all data to be encrypted in the data sequence to be encrypted is obtained; obtaining ciphertext sequences from ciphertext of all data to be encrypted;
and storing or transmitting the ciphertext sequence, the initial key and the key updating sequence.
In an embodiment, in the process of obtaining the key of the second data to be encrypted in the data sequence to be encrypted, a point, which is equal to the first step length from the coordinate point corresponding to the initial key, on the first encryption straight line includes two points, and coordinates of a point, which is the greatest in distance from the origin of coordinates, in the two points are used as the key of the second data to be encrypted in the data sequence to be encrypted.
In one embodiment, the method further comprises decrypting the ciphertext sequence by:
obtaining a straight line according to a first ciphertext and an initial key in the ciphertext sequence, wherein the slope of the straight line is the first decrypted data; and taking the straight line as a first decryption straight line;
acquiring a first element in a key updating sequence as a first step length, acquiring two points when the distance from a first ciphertext to the first step length is equal to the first step length on a first decryption straight line, and taking the coordinates of the point with the largest distance from the origin of coordinates in the two points as a key for decrypting a second ciphertext in the ciphertext sequence;
obtaining second decryption data by using the key for decryption of the second ciphertext and the second ciphertext;
and analogically, obtaining decryption data corresponding to each ciphertext in the ciphertext sequence;
converting each decrypted data into a binary system to obtain a decrypted binary string;
all the decrypted binary strings are spliced together according to the sequence to obtain a decrypted binary sequence;
and then, performing deserialization on the decrypted binary sequence to obtain the maintenance data of the semiconductor equipment.
In an embodiment, in the process of constructing a chaotic sequence, an initial chaotic sequence is constructed according to a single-peak image, and each element in the initial chaotic sequence is multiplied by a hyper-parameter to obtain the chaotic sequence; each element in the chaotic sequence corresponds to all data to be encrypted except the last data to be encrypted in the data sequence to be encrypted one by one.
In an embodiment, the chaotic mapping parameters and the super parameters in the process of constructing the chaotic sequence are taken as the complementary keys.
In one embodiment, the plurality of binary strings are to convert a semiconductor device repair data sequence into a binary sequence; and dividing the binary sequence into a plurality of binary strings.
In one embodiment, the length of the binary sequence is denoted as L during the acquisition of the plurality of binary strings; dividing binary sequences intoBinary string, front->The lengths of the binary strings are n, if the length of the last binary string is less than n, 0 or 1 is randomly supplemented at the tail of the last binary string, so that the length of the last binary string reaches n; where n=15.
A second object of the present invention is to provide a semiconductor device maintenance data processing system, comprising:
the data acquisition module is used for acquiring a maintenance data sequence of the semiconductor equipment; converting the semiconductor device repair data sequence into a plurality of binary strings; converting each binary string into decimal numbers to serve as data to be encrypted to form a data sequence to be encrypted;
the data encryption module is used for constructing a chaotic sequence by utilizing chaotic mapping, and taking the chaotic sequence as a key updating sequence;
acquiring the coordinates of any point in a Cartesian coordinate system as an initial key;
acquiring a first encryption straight line according to the slope of the first data to be encrypted in the data sequence to be encrypted as a preset straight line and the initial key as the coordinate of a point on the preset straight line; taking the coordinates of any point on the first encryption straight line except the initial key as the ciphertext of the first data to be encrypted;
acquiring a first element in a key updating sequence as a first step length; taking the coordinates of a point with the distance equal to a first step length from the coordinate point corresponding to the initial key as a key of second data to be encrypted in the data sequence to be encrypted on a first encryption straight line;
similarly, obtaining a ciphertext of the second data to be encrypted according to the key of the second data to be encrypted and the second data to be encrypted; obtaining a key of the next data to be encrypted according to a second element in the key updating sequence as a second step length; and analogizing is performed until ciphertext of all data to be encrypted in the data sequence to be encrypted is obtained; obtaining ciphertext sequences from ciphertext of all data to be encrypted;
and the data transmission module is used for storing or transmitting the ciphertext sequence, the initial key and the key updating sequence.
The beneficial effects of the invention are as follows:
the invention provides a semiconductor equipment maintenance data processing method, wherein ciphertext of each piece of data to be encrypted, which is related to an encryption method of the method, is obtained according to an updated secret key and the data to be encrypted; the updating key is obtained according to the encryption straight line and the ciphertext of the last data to be encrypted; that is, the first data to be encrypted is encrypted by the initial key, so as to obtain the updated key, and the next data to be encrypted is encrypted by the updated key. Therefore, the encryption method is simple and efficient, has large key space, very high key sensitivity and avalanche effect, and can resist brute force attack and statistical analysis attack. The invention acquires the ciphertext of each data to be encrypted by constructing the encryption straight line, and has simple encryption method, small calculated amount and high encryption speed. The invention has the advantages of small data size of the secret key, simple arrangement, small occupied space and easy management.
The semiconductor equipment maintenance data processing system provided by the invention ensures the confidentiality of the semiconductor equipment maintenance data and further ensures the confidentiality of the business confidentiality related to the semiconductor equipment by encrypting, storing or transmitting the semiconductor equipment maintenance data.
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In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained according to these drawings without inventive faculty for a person skilled in the art.
Fig. 1 is a flowchart illustrating the overall steps of a method for processing repair data of a semiconductor device according to an embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention mainly aims at the equipment parameters such as temperature, pressure, current, voltage and the like in the working state of the semiconductor equipment and the video monitoring data in the working state of the semiconductor equipment related to the maintenance data of the semiconductor equipment, and stores or transmits the data in an encrypted manner. The invention obtains the data sequence to be encrypted by preprocessing the maintenance data of the semiconductor equipment, constructs an encryption straight line by each data to be encrypted and the corresponding key in the data sequence to be encrypted, and realizes the encryption of the maintenance data of the semiconductor equipment by taking any point on the encryption straight line as ciphertext data.
The invention provides a method for processing maintenance data of semiconductor equipment, which is shown in fig. 1, and comprises the following steps:
s1, acquiring a data sequence to be encrypted;
acquiring a maintenance data sequence of the semiconductor equipment; converting the semiconductor device repair data sequence into a plurality of binary strings; converting each binary string into decimal numbers to serve as data to be encrypted to form a data sequence to be encrypted; wherein the plurality of binary strings are used for converting the semiconductor equipment maintenance data sequence into a binary sequence; and dividing the binary sequence into a plurality of binary strings.
It should be noted that, the semiconductor device maintenance data includes device parameters such as temperature, pressure, current, voltage, etc. in the operating state of the semiconductor device, and video monitoring data in the operating state of the semiconductor device, etc., and contains various data types, so it is difficult to directly encrypt the semiconductor device maintenance data. In the computer, any data is stored and transmitted by converting the data into binary data, therefore, the embodiment converts the maintenance data of the semiconductor device into binary data, constructs an encryption straight line according to the maintenance data of the semiconductor device and an initial key, stores any point on the encryption straight line as an encryption result, and the parameters of the straight line are decimal numbers, so that binary data needs to be converted into decimal numbers to construct the straight line to realize encryption.
In the embodiment, a semiconductor device maintenance data sequence is acquired through a sensor and a camera, the semiconductor device maintenance data sequence is firstly converted into a binary sequence by a serialization method, and the length of the binary sequence is recorded as L; dividing binary sequences intoBinary string, front->The lengths of the binary strings are n, if the length of the last binary string is less than n, 0 or 1 is randomly supplemented at the tail of the last binary string, so that the length of the last binary string reaches n; thus far get->Converting each binary string with length of n into decimal numbers, and forming a data sequence to be encrypted by taking each decimal number as data to be encrypted as { c } 1 ,c 2 ,c 3 ,…}。
Wherein each element in the data sequence to be encrypted is decimal data, and the size of each decimal data is 0,2 n -1]Within range, then the complexity of the data sequence to be encryptedIs thatAccording to experience that n=15 in the present embodiment, in the actual operation, the practitioner can set the value of n as needed.
S2, acquiring an initial key and a key updating sequence;
constructing a chaotic sequence by using chaotic mapping, and taking the chaotic sequence as a key updating sequence;
acquiring the coordinates of any point in a Cartesian coordinate system as an initial key;
in the process of constructing the chaotic sequence, firstly, constructing an initial chaotic sequence according to a single-peak image, and then multiplying each element in the initial chaotic sequence by a hyper-parameter to obtain the chaotic sequence; each element in the chaotic sequence corresponds to all data to be encrypted except the last data to be encrypted in the data sequence to be encrypted one by one.
In this embodiment, in order to take the data to be encrypted as the slope of the encryption line, the key is taken as a point on the encryption line, the encryption line is constructed, and any point on the encryption line is taken as the ciphertext of the data to be encrypted. Meanwhile, in order to ensure the complexity of the encryption result and thus resist brute force attack, the key needs to be dynamically updated so that the key of each data to be encrypted is different. The specific implementation process is as follows:
acquiring any point A in a Cartesian coordinate system 1 ,A 1 Is (x) A1 ,y A1 ). Will (x) A1 ,y A1 ) As an initial key. The initial key is required to be simultaneously stored in an encryption end and a decryption end; it is noted that x A1 、y A1 The value range is any real number. It should be noted that the initial key is randomly selected in the cartesian coordinate system, and there are numerous possibilities, so the key space is very large and can resist brute force attack. While the initial key contains x only A1 、y A1 The two values have small data size, simple setting and small occupied space.
According to the chaos mapping parameter mu preset by the encryption end and the decryption end, the single-peak image (lo)The construction length of the method of the chaotic mapping of the dynamics) is as followsWherein L represents the length of the binary sequence, n represents the length of the binary string, and the value range of each element in the initial chaotic sequence is 0,1]Multiplying each element in the initial chaotic sequence by a super parameter m to enlarge and obtain a chaotic sequence, and taking the chaotic sequence as a key updating sequence; in addition, each element in the chaotic sequence corresponds to all data to be encrypted except the last data to be encrypted in the data sequence to be encrypted one by one.
It should be noted that, the key update sequence is used for dynamically updating the key in the encryption process; to ensure that the key obtained from the key update sequence differs significantly from the original key, the super parameter m >20. In actual operation, the practitioner can set the value of m as desired within the range of m >20. The key updating sequence is respectively acquired by an encrypting end and a decrypting end before each encryption of the maintenance data of the semiconductor device. In addition, since the key updating sequence is constructed according to chaotic mapping parameters agreed in advance by the encryption end and the decryption end, the key updating sequence constructed by the encryption end and the decryption end is consistent. In order to ensure confidentiality of the key updating sequence, the chaotic mapping parameter and the hyper-parameter m need to be kept secret, and the chaotic mapping parameter and the hyper-parameter m are recorded as the supplementary key.
The supplementary secret key comprises a chaotic mapping parameter mu and a super parameter m, wherein the value range of the chaotic mapping parameter mu is (3.57,4), and any decimal in the mu desirable (3.57,4) range is provided with countless possibilities.
Thus, the setting of the initial key and the supplementary key is completed, and the key updating sequence is obtained.
S3, acquiring a ciphertext of the first data to be encrypted;
acquiring a first encryption straight line according to the slope of the first data to be encrypted in the data sequence to be encrypted as a preset straight line and the initial key as the coordinate of a point on the preset straight line; taking the coordinates of any point on the first encryption straight line except the initial key as the ciphertext of the first data to be encrypted;
in this embodiment, the preset linear equation is y=k 1 x+b 1 The method comprises the steps of carrying out a first treatment on the surface of the Wherein k is 1 、b 1 Respectively the slope and intercept parameters of a preset straight line. The first data c to be encrypted 1 As the slope of its encryption line, i.e. k 1 =c 1 . The initial key (x A1 ,y A1 ) As a point on a preset straight line; is brought into a preset linear equation to obtain y A1 =c 1 ×x A1 +b 1 Solving for the intercept b 1 Is a value of (2); for this purpose, the encryption line of the first data to be encrypted is recorded as the first encryption line, and then the equation of the encryption line of the first data to be encrypted: y=c 1 x+b 1
Obtaining the encryption line of the first data to be encrypted divided by the initial key (x A1 ,y A1 ) Any point B outside 1 ,B 1 Is (x) B1 ,y B1 ). Will (x) B1 ,y B1 ) As the ciphertext of the first data to be encrypted.
S4, acquiring a key of the second data to be encrypted;
acquiring a first element in a key updating sequence as a first step length; taking the coordinates of a point with the distance equal to a first step length from the coordinate point corresponding to the initial key as a key of second data to be encrypted in the data sequence to be encrypted on a first encryption straight line;
in the process of acquiring the key of the second data to be encrypted in the data sequence to be encrypted, the point which is equal to the first step length from the coordinate point corresponding to the initial key on the first encryption straight line comprises two points, and the coordinates of the point with the largest distance from the origin of coordinates in the two points are used as the key of the second data to be encrypted in the data sequence to be encrypted.
In this embodiment, the first element in the key update sequence is obtainedTaking the element as a first step length, obtaining the point (x) on the encryption straight line of the first data to be encrypted B1 ,y B1 ) Two points of the distance equal to the first step length, respectively denoted as P 1 、P 2 . Respectively calculate P 1 、P 2 The distance to the origin of coordinates is denoted as A 2 Point A is to 2 Coordinates (x) A2 ,y A2 ) As update key, i.e. the key (x) of the second data to be encrypted in the sequence of data to be encrypted A2 ,y A2 ). Thus, the ciphertext of the first data to be encrypted and the key of the second data to be encrypted are obtained according to the encryption straight line of the first data to be encrypted.
Since ciphertext is randomly obtained on an encryption line, there are numerous possible results for ciphertext, even with the same encryption line, the resulting ciphertext results are different. The original data rule is destroyed, and the statistical analysis attack can be resisted.
The initial key is used for obtaining an encryption line of the first data to be encrypted, and further obtaining a ciphertext of the first data to be encrypted. And the updated key is also a point on the encryption straight line of the first data to be encrypted, if the initial key is changed a little, the encryption straight line of the first data to be encrypted is also changed, and the ciphertext obtained according to the encryption straight line of the first data to be encrypted and the updated key are also changed accordingly, so that the ciphertext of all the subsequent data to be encrypted is further changed. Therefore, the encryption method in the embodiment has very high key sensitivity and can resist the attack of statistical analysis.
S5, acquiring ciphertext of all data to be encrypted to acquire a ciphertext sequence;
similarly, obtaining a ciphertext of the second data to be encrypted according to the key of the second data to be encrypted and the second data to be encrypted; obtaining a key of the next data to be encrypted according to a second element in the key updating sequence as a second step length; and analogizing is performed until ciphertext of all data to be encrypted in the data sequence to be encrypted is obtained; obtaining ciphertext sequences from ciphertext of all data to be encrypted;
in this embodiment, according to the key of the second data to be encrypted obtained in step S4 and the second data to be encrypted, the encryption line of the second data to be encrypted obtained by the method of step S3 is the second encryption line; taking the coordinates of any point on the second encryption straight line except the key of the second data to be encrypted as the ciphertext of the second data to be encrypted;
according to the method of step S4, obtaining two points on a second encryption straight line when the distance from a coordinate point corresponding to a key of second data to be encrypted is equal to the second step length according to the second element in the key updating sequence as the second step length, and taking the coordinate of the point with the largest distance from the coordinate origin in the two points as the key of the second data to be encrypted in the data sequence to be encrypted; namely, acquiring a key of the next data to be encrypted in the data sequence to be encrypted;
and analogizing is performed sequentially until ciphertext of all data to be encrypted in the data sequence to be encrypted is obtained, and iteration is stopped; and the ciphertext acquisition ciphertext sequence of all the data to be encrypted is recorded as { (x) B1 ,y B1 ),(x B2 ,y B2 ),(x B3 ,y B3 ),…}。
And S6, storing or transmitting the ciphertext sequence, the initial key and the key updating sequence.
And in the process of storing or transmitting, the chaotic mapping parameters and the hyper-parameters in the process of constructing the chaotic sequence are also stored or transmitted as the complementary key.
In this embodiment, the method further includes decrypting the ciphertext sequence according to the following steps:
obtaining a straight line according to a first ciphertext and an initial key in the ciphertext sequence, wherein the slope of the straight line is the first decrypted data; and taking the straight line as a first decryption straight line;
acquiring a first element in a key updating sequence as a first step length, acquiring two points when the distance from a first ciphertext to the first step length is equal to the first step length on a first decryption straight line, and taking the coordinates of the point with the largest distance from the origin of coordinates in the two points as a key for decrypting a second ciphertext in the ciphertext sequence;
obtaining second decryption data by using the key for decryption of the second ciphertext and the second ciphertext;
and analogically, obtaining decryption data corresponding to each ciphertext in the ciphertext sequence;
converting each decrypted data into a binary system to obtain a decrypted binary string;
all the decrypted binary strings are spliced together according to the sequence to obtain a decrypted binary sequence;
and then, performing deserialization on the decrypted binary sequence to obtain the maintenance data of the semiconductor equipment.
In this embodiment, the decryption end decrypts the ciphertext:
first according to { (x) in ciphertext sequence B1 ,y B1 ),(x B2 ,y B2 ),(x B3 ,y B3 ) … first ciphertext (x B1 ,y B1 ) With the initial key (x) A1 ,y A1 ) Acquiring a straight line, determining a straight line by two specific points, wherein the slope of the straight line is the first decryption data, and taking the straight line as the first decryption straight line;
the first element in the key update sequence is obtained as a first step size, and the first decryption line up to point (x B1 ,y B1 ) Two points of the distance equal to the first step length, respectively denoted as P 1 、P 2 Respectively calculate P 1 、P 2 The distance to the origin of coordinates is denoted as A 2 Point A is to 2 Coordinates (x) A2 ,y A2 ) As an update key;
acquiring next decryption data and a next updating key by using the updating key and the next ciphertext;
this operation is repeated until it is obtainedStopping decrypting the data;
converting each decrypted data into a binary system to obtain a decrypted binary string; all the decrypted binary strings are spliced together in sequence to obtain a decrypted binary sequence; the first L binary numbers of the decrypted binary data are obtained to be used as the maintenance binary data of the semiconductor device, and the maintenance binary data of the semiconductor device are deserialized to obtain a maintenance data sequence of the semiconductor device.
Thus, decryption of the maintenance data of the semiconductor equipment is completed; by encrypting the storage or transmission of the semiconductor device repair data, confidentiality of the semiconductor device repair data is ensured, and confidentiality of business confidentiality related to the semiconductor device is further ensured.
The invention provides a semiconductor equipment maintenance data processing system, which comprises:
the data acquisition module is used for acquiring a maintenance data sequence of the semiconductor equipment; converting the semiconductor device repair data sequence into a plurality of binary strings; converting each binary string into decimal numbers to serve as data to be encrypted to form a data sequence to be encrypted;
the data encryption module is used for constructing a chaotic sequence by utilizing chaotic mapping, and taking the chaotic sequence as a key updating sequence;
acquiring the coordinates of any point in a Cartesian coordinate system as an initial key;
acquiring a first encryption straight line according to the slope of the first data to be encrypted in the data sequence to be encrypted as a preset straight line and the initial key as the coordinate of a point on the preset straight line; taking the coordinates of any point on the first encryption straight line except the initial key as the ciphertext of the first data to be encrypted;
acquiring a first element in a key updating sequence as a first step length; taking the coordinates of a point with the distance equal to a first step length from the coordinate point corresponding to the initial key as a key of second data to be encrypted in the data sequence to be encrypted on a first encryption straight line;
similarly, obtaining a ciphertext of the second data to be encrypted according to the key of the second data to be encrypted and the second data to be encrypted; obtaining a key of the next data to be encrypted according to a second element in the key updating sequence as a second step length; and analogizing is performed until ciphertext of all data to be encrypted in the data sequence to be encrypted is obtained; obtaining ciphertext sequences from ciphertext of all data to be encrypted;
and the data transmission module is used for storing or transmitting the ciphertext sequence, the initial key and the key updating sequence.
The data decryption module is used for decrypting the ciphertext sequence according to the following steps:
obtaining a straight line according to a first ciphertext and an initial key in the ciphertext sequence, wherein the slope of the straight line is the first decrypted data; and taking the straight line as a first decryption straight line;
acquiring a first element in a key updating sequence as a first step length, acquiring two points when the distance from a first ciphertext to the first step length is equal to the first step length on a first decryption straight line, and taking the coordinates of the point with the largest distance from the origin of coordinates in the two points as a key for decrypting a second ciphertext in the ciphertext sequence;
obtaining second decryption data by using the key for decryption of the second ciphertext and the second ciphertext; and analogically, obtaining decryption data corresponding to each ciphertext in the ciphertext sequence; converting each decrypted data into a binary system to obtain a decrypted binary string; all the decrypted binary strings are spliced together according to the sequence to obtain a decrypted binary sequence; and then, performing deserialization on the decrypted binary sequence to obtain the maintenance data of the semiconductor equipment.
The invention provides a semiconductor equipment maintenance data processing method, wherein ciphertext of each piece of data to be encrypted, which is related to an encryption method of the method, is obtained according to an updated secret key and the data to be encrypted; the updating key is obtained according to the encryption straight line and the ciphertext of the last data to be encrypted; that is, the first data to be encrypted is encrypted by the initial key, so as to obtain the updated key, and the next data to be encrypted is encrypted by the updated key. Therefore, the encryption method is simple and efficient, has large key space, very high key sensitivity and avalanche effect, and can resist brute force attack and statistical analysis attack. The invention acquires the ciphertext of each data to be encrypted by constructing the encryption straight line, and has simple encryption method, small calculated amount and high encryption speed. The invention has the advantages of small data size of the secret key, simple arrangement, small occupied space and easy management.
The semiconductor equipment maintenance data processing system provided by the invention ensures confidentiality of semiconductor equipment maintenance data and further ensures confidentiality of business confidentiality related to the semiconductor equipment by carrying out encryption storage or transmission on the semiconductor equipment maintenance data.

Claims (6)

1. A method for processing maintenance data of a semiconductor device, comprising the steps of:
acquiring a maintenance data sequence of the semiconductor equipment; converting the semiconductor device repair data sequence into a plurality of binary strings; converting each binary string into decimal numbers to serve as data to be encrypted to form a data sequence to be encrypted;
constructing a chaotic sequence by using chaotic mapping, and taking the chaotic sequence as a key updating sequence;
acquiring the coordinates of any point in a Cartesian coordinate system as an initial key;
acquiring a first encryption straight line according to the slope of the first data to be encrypted in the data sequence to be encrypted as a preset straight line and the initial key as the coordinate of a point on the preset straight line; taking the coordinates of any point on the first encryption straight line except the initial key as the ciphertext of the first data to be encrypted;
acquiring a first element in a key updating sequence as a first step length; taking the coordinates of a point with the distance equal to a first step length from the coordinate point corresponding to the initial key as a key of second data to be encrypted in the data sequence to be encrypted on a first encryption straight line;
similarly, obtaining a ciphertext of the second data to be encrypted according to the key of the second data to be encrypted and the second data to be encrypted; obtaining a key of the next data to be encrypted according to a second element in the key updating sequence as a second step length; and analogizing is performed until ciphertext of all data to be encrypted in the data sequence to be encrypted is obtained; obtaining ciphertext sequences from ciphertext of all data to be encrypted;
storing or transmitting the ciphertext sequence, the initial key and the key updating sequence;
in the process of acquiring a key of second data to be encrypted in a data sequence to be encrypted, a point which is equal to a first step length in distance from a coordinate point corresponding to the initial key on a first encryption straight line comprises two points, and coordinates of a point with the largest distance from the point to a coordinate origin in the two points are used as the key of the second data to be encrypted in the data sequence to be encrypted;
in the process of constructing the chaotic sequence, firstly, constructing an initial chaotic sequence according to a unimodal image, and then multiplying each element in the initial chaotic sequence by a hyper-parameter to obtain the chaotic sequence; each element in the chaotic sequence corresponds to all data to be encrypted except the last data to be encrypted in the data sequence to be encrypted one by one.
2. The method of claim 1, further comprising decrypting the ciphertext sequence by:
obtaining a straight line according to a first ciphertext and an initial key in the ciphertext sequence, wherein the slope of the straight line is the first decrypted data; and taking the straight line as a first decryption straight line;
acquiring a first element in a key updating sequence as a first step length, acquiring two points when the distance from a first ciphertext to the first step length is equal to the first step length on a first decryption straight line, and taking the coordinates of the point with the largest distance from the origin of coordinates in the two points as a key for decrypting a second ciphertext in the ciphertext sequence;
obtaining second decryption data by using the key for decryption of the second ciphertext and the second ciphertext;
and analogically, obtaining decryption data corresponding to each ciphertext in the ciphertext sequence;
converting each decrypted data into a binary system to obtain a decrypted binary string;
all the decrypted binary strings are spliced together according to the sequence to obtain a decrypted binary sequence;
and then, performing deserialization on the decrypted binary sequence to obtain the maintenance data of the semiconductor equipment.
3. The method for processing maintenance data of a semiconductor device according to claim 1, wherein the chaotic map parameters and the super parameters in the process of constructing the chaotic sequence are used as complementary keys.
4. The semiconductor device repair data processing method according to claim 1, wherein the plurality of binary strings are for converting a semiconductor device repair data sequence into a binary sequence; and dividing the binary sequence into a plurality of binary strings.
5. The method for processing maintenance data of a semiconductor device according to claim 4, wherein a length of the binary sequence is denoted as L in the process of acquiring the plurality of binary strings; dividing binary sequences intoBinary string, front->The lengths of the binary strings are n, if the length of the last binary string is less than n, 0 or 1 is randomly supplemented at the tail of the last binary string, so that the length of the last binary string reaches n; where n=15.
6. A semiconductor equipment repair data processing system, comprising:
the data acquisition module is used for acquiring a maintenance data sequence of the semiconductor equipment; converting the semiconductor device repair data sequence into a plurality of binary strings; converting each binary string into decimal numbers to serve as data to be encrypted to form a data sequence to be encrypted;
the data encryption module is used for constructing a chaotic sequence by utilizing chaotic mapping, and taking the chaotic sequence as a key updating sequence;
acquiring the coordinates of any point in a Cartesian coordinate system as an initial key;
acquiring a first encryption straight line according to the slope of the first data to be encrypted in the data sequence to be encrypted as a preset straight line and the initial key as the coordinate of a point on the preset straight line; taking the coordinates of any point on the first encryption straight line except the initial key as the ciphertext of the first data to be encrypted;
acquiring a first element in a key updating sequence as a first step length; taking the coordinates of a point with the distance equal to a first step length from the coordinate point corresponding to the initial key as a key of second data to be encrypted in the data sequence to be encrypted on a first encryption straight line;
similarly, obtaining a ciphertext of the second data to be encrypted according to the key of the second data to be encrypted and the second data to be encrypted; obtaining a key of the next data to be encrypted according to a second element in the key updating sequence as a second step length; and analogizing is performed until ciphertext of all data to be encrypted in the data sequence to be encrypted is obtained; obtaining ciphertext sequences from ciphertext of all data to be encrypted;
the data transmission module stores or transmits the ciphertext sequence, the initial key and the key updating sequence;
in the process of acquiring a key of second data to be encrypted in a data sequence to be encrypted, a point which is equal to a first step length in distance from a coordinate point corresponding to the initial key on a first encryption straight line comprises two points, and coordinates of a point with the largest distance from the point to a coordinate origin in the two points are used as the key of the second data to be encrypted in the data sequence to be encrypted;
in the process of constructing the chaotic sequence, firstly, constructing an initial chaotic sequence according to a unimodal image, and then multiplying each element in the initial chaotic sequence by a hyper-parameter to obtain the chaotic sequence; each element in the chaotic sequence corresponds to all data to be encrypted except the last data to be encrypted in the data sequence to be encrypted one by one.
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