CN116995986A - Control method, device and system for double-loop moving mirror - Google Patents
Control method, device and system for double-loop moving mirror Download PDFInfo
- Publication number
- CN116995986A CN116995986A CN202311246975.8A CN202311246975A CN116995986A CN 116995986 A CN116995986 A CN 116995986A CN 202311246975 A CN202311246975 A CN 202311246975A CN 116995986 A CN116995986 A CN 116995986A
- Authority
- CN
- China
- Prior art keywords
- speed
- unit
- current
- value
- moving mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 56
- 238000001514 detection method Methods 0.000 claims abstract description 72
- 230000003068 static effect Effects 0.000 claims abstract description 14
- 238000001228 spectrum Methods 0.000 claims abstract description 8
- 238000006073 displacement reaction Methods 0.000 claims description 40
- 241000282346 Meles meles Species 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 15
- 230000009977 dual effect Effects 0.000 claims description 13
- 230000009466 transformation Effects 0.000 claims description 3
- 230000003595 spectral effect Effects 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 abstract description 3
- 230000008859 change Effects 0.000 abstract description 2
- 230000008713 feedback mechanism Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 7
- 125000003275 alpha amino acid group Chemical group 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 6
- 238000004590 computer program Methods 0.000 description 6
- 238000009966 trimming Methods 0.000 description 6
- 238000004891 communication Methods 0.000 description 5
- 230000004044 response Effects 0.000 description 4
- 241000282345 Meles Species 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- NAWXUBYGYWOOIX-SFHVURJKSA-N (2s)-2-[[4-[2-(2,4-diaminoquinazolin-6-yl)ethyl]benzoyl]amino]-4-methylidenepentanedioic acid Chemical compound C1=CC2=NC(N)=NC(N)=C2C=C1CCC1=CC=C(C(=O)N[C@@H](CC(=C)C(O)=O)C(O)=O)C=C1 NAWXUBYGYWOOIX-SFHVURJKSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 235000012907 honey Nutrition 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P23/00—Arrangements or methods for the control of AC motors characterised by a control method other than vector control
- H02P23/14—Estimation or adaptation of motor parameters, e.g. rotor time constant, flux, speed, current or voltage
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P23/00—Arrangements or methods for the control of AC motors characterised by a control method other than vector control
- H02P23/18—Controlling the angular speed together with angular position or phase
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
- Feedback Control In General (AREA)
Abstract
The invention provides a control method, a device and a system of a double-loop moving mirror, which relate to the field of spectrum measurement, wherein the system comprises a light source unit, a semi-transparent and semi-reflective unit, a static mirror, a moving mirror, a shifting unit, a sample detection unit, a laser reflection unit, a laser detection unit and the device, and the method comprises the following steps: inputting the current position of the moving mirror to a position feedback controller to obtain a speed expected value; inputting the expected speed value and the current speed value to a speed feedback controller to obtain a current feedback value; and determining the next current change amount according to the current feedback value and the current value. Compared with a single negative feedback mechanism, the invention does not need to additionally increase equipment cost, avoids the condition that a servo motor in a Fourier spectrometer has temporary decoupling and unstable motion, can ensure the real-time motion accuracy of a motion mirror and reduces final spectral noise.
Description
Technical Field
The present invention relates to the field of spectrum measurement, and in particular, to a method, apparatus, and system for controlling a dual-loop moving mirror.
Background
The Fourier spectrometer comprises an interferometer, the core component of the Fourier spectrometer is a shifting part for driving the moving reflector to move, the Fourier spectrometer comprises a controller and a servo motor, and the servo motor is controlled by generally adopting a laser interference signal as feedback control or adopting a grating ruler coding signal on the motor as feedback.
However, if the motor is temporarily decoupled during movement, the negative feedback signal is liable to cause oscillation and jitter, which results in unstable system, and in severe cases, the control capability is lost, so that the real-time monitoring of the position of the moving mirror increases difficulty.
Disclosure of Invention
The invention provides a control method, a device and a system for a double-loop moving mirror, which are used for solving the technical problem that the prior art cannot guarantee accurate monitoring of the real-time position of the moving mirror.
In a first aspect, the present invention provides a dual-loop moving mirror control method, where the dual-loop moving mirror control method is implemented according to a dual-loop moving mirror control device, the dual-loop moving mirror control device includes a position feedback controller and a speed feedback controller, the dual-loop moving mirror control device is connected with a laser detection unit and a shift unit, and the shift unit is connected with a moving mirror;
The double-loop moving mirror control method comprises the following steps:
inputting the current position and the expected position of the moving mirror to a position feedback controller, and acquiring a speed expected value output by the position feedback controller, wherein the position feedback controller processes the current position through a position control parameter and determines the speed expected value;
inputting the speed expected value and the current speed value to a speed feedback controller, and obtaining a current feedback value output by the speed feedback controller, wherein the speed feedback controller processes the speed expected value and the current speed value through a speed control parameter, and determines the current feedback value;
determining a next current value according to the current feedback value and the current value, wherein the next current value is used for indicating to drive the shifting unit to drive the moving mirror to move;
the current position is determined according to the interference signal acquired by the laser detection unit, and the current speed value is determined according to a motor speed encoder signal of the displacement unit;
the position control parameters of the position feedback controller and the speed control parameters of the speed feedback controller are determined according to the badger algorithm.
According to the double-loop moving mirror control method provided by the invention, the position control parameters comprise a proportional outer loop parameter, an integral outer loop parameter and a differential outer loop parameter;
the method for inputting the current position of the moving mirror to the position feedback controller, obtaining the speed expected value output by the position feedback controller comprises the following steps:
determining a position difference value according to the current position and a preset expected position;
determining a proportional outer loop score according to the position difference value and the proportional outer loop parameter, determining an integral outer loop score according to the position difference value and the integral outer loop parameter, and determining a differential outer loop score according to the position difference value and the differential outer loop parameter;
and determining a speed expected value according to the proportional outer loop score, the integral outer loop score and the differential outer loop score, and outputting the speed expected value by the position feedback controller.
According to the double-loop moving mirror control method provided by the invention, the speed control parameters comprise a proportional inner loop parameter, an integral inner loop parameter and a differential inner loop parameter;
the step of inputting the speed expected value and the current speed value to a speed feedback controller, and obtaining the current feedback value output by the speed feedback controller comprises the following steps:
Determining a speed difference value according to the speed expected value and the current speed value;
determining a proportional inner loop score according to the speed difference value and the proportional inner loop parameter, determining an integral inner loop score according to the speed difference value and the integral inner loop parameter, and determining a differential inner loop score according to the speed difference value and the differential inner loop parameter;
and determining a current feedback value according to the proportional inner loop score, the integral inner loop score and the differential inner loop score, and outputting the current feedback value by the speed feedback controller.
In a second aspect, there is provided a dual loop moving mirror control device comprising: a signal generator, a position feedback controller, a speed feedback controller, a current loop controller, and an amplifier;
the signal generator is connected with the position feedback controller, the position feedback controller is connected with the speed feedback controller, the speed feedback controller is connected with the current loop controller, and the current loop controller is connected with the amplifier;
the signal generator is used for obtaining a preset expected position of the moving mirror, and responding to a preset driving instruction, and indicating the current position of the moving mirror to be input to the position feedback controller;
The position feedback controller is used for acquiring a speed expected value according to the current position of the moving mirror;
the speed feedback controller is used for acquiring a current feedback value according to the speed expected value and the current speed value;
the current loop controller is used for determining a next current value according to the current feedback value and the current value, and the next current value is used for indicating to drive the shifting unit to drive the moving mirror to move;
the amplifier is used for amplifying the next current value;
the current position is determined according to the interference signal acquired by the laser detection unit, and the current speed value is determined according to the motor speed encoder signal of the displacement unit;
the position control parameters of the position feedback controller and the speed control parameters of the speed feedback controller are determined according to the badger algorithm.
According to the dual-loop moving mirror control device provided by the invention, the amplifier is connected with the shifting unit, the speed feedback controller, the current loop controller, the amplifier and the shifting unit form an inner loop control circuit, and the speed control parameter is used for calculating the driving current of the shifting unit in the inner loop control circuit;
The displacement unit is connected with the moving mirror, the position feedback controller, the speed feedback controller, the current loop controller, the amplifier, the displacement unit and the moving mirror form an outer loop control circuit, and the position control parameter is used for calculating the expected speed of the displacement unit.
According to the dual-loop moving mirror control device provided by the invention, the bandwidth of the inner loop control circuit is a preset multiple of the bandwidth of the outer loop control circuit.
In a third aspect, a dual-loop moving mirror control system is provided, including a light source unit, a semi-transparent and semi-reflective unit, a stationary mirror, a moving mirror, a shift unit, a sample detection unit, a laser reflection unit, a laser detection unit, and a control device;
the semi-transparent and semi-reflective unit is respectively connected with the light source unit, the static mirror, the moving mirror, the sample unit, the laser detection unit and the laser reflection unit;
the sample unit is connected with the sample detection unit, the laser reflection unit is connected with the laser unit, and the laser detection unit is connected with the control device;
The wide-spectrum light source emitted by the light source unit passes through the half-transmission half-reflection unit to form a first light source and a second light source, wherein the first light source is reflected to the half-transmission half-reflection unit through the static mirror, and is reflected to the half-transmission half-reflection unit through the moving mirror with the second light source to be interfered after beam combination and irradiated on the sample unit;
the laser light source emitted by the laser unit passes through the half-transmission half-reflection unit to form a third light source and a fourth light source, wherein the third light source is reflected to the half-transmission half-reflection unit through the static mirror, and is reflected to the half-transmission half-reflection unit through the moving mirror with the fourth light source to be interfered after beam combination and irradiated on the laser detection unit.
According to the dual-loop moving mirror control system provided by the invention, the light source unit, the laser reflection unit and the laser unit are arranged at the first side end of the semi-transparent and semi-reflective unit;
the static mirror is arranged at the second side end of the half-transmission half-reflection unit;
the moving mirror, the shifting unit and the control device are arranged at the third side end of the semi-transparent and semi-reflective unit;
the laser detection unit, the sample unit and the sample detection unit are arranged at the fourth side end of the semi-transparent and semi-reflective unit;
The straight line formed by the first side end and the third side end is perpendicular to the straight line formed by the second side end and the fourth side end.
According to the dual-loop moving mirror control system provided by the invention, the control device is used for driving the displacement unit to drive the moving mirror to reciprocate, and interference signals in the reciprocation process are acquired according to the laser detection unit.
According to the double-loop moving mirror control system provided by the invention, after interference signals in the reciprocating movement process are acquired according to the laser detection unit, the interference signals are analyzed to acquire zero-crossing signals, and the zero-crossing signals are sent to the sample detection unit;
the sample detection unit is used for receiving the irradiated target interference light beam of the sample unit as trigger according to the zero crossing signal indication so as to process the target interference light beam according to Fourier transformation and obtain the spectrum information of the sample unit.
The invention provides a control method, a device and a system for a double-loop moving mirror, which are characterized in that the position control parameter of a position feedback controller and the speed control parameter of a speed feedback controller are determined according to a badger algorithm, the current position of the moving mirror is determined according to an interference signal obtained by a laser detection unit, the current speed value is determined according to a motor speed encoder signal of a shifting unit, the current position is input to the position feedback controller, the speed expected value is obtained, and then the speed expected value and the current speed value are input to the speed feedback controller, so that the current feedback value is obtained; and finally, determining a next current value according to the current feedback value and the current value to instruct a driving shifting unit to drive the moving mirror to move. According to the invention, servo control is performed on the shifting unit according to the two feedback signals, namely the interference signal and the motor speed encoder signal, so that stable reciprocating movement is generated.
Drawings
In order to more clearly illustrate the invention or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic flow chart of a dual loop motion mirror control method provided by the invention;
FIG. 2 is a flow chart of the method for obtaining the expected speed value according to the present invention;
FIG. 3 is a schematic flow chart of obtaining a current feedback value according to the present invention;
FIG. 4 is a schematic diagram of a dual loop moving mirror control device according to the present invention;
FIG. 5 is a schematic diagram of a dual loop motion mirror control system provided by the present invention;
fig. 6 is a schematic structural diagram of an electronic device provided by the present invention.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The Fourier spectrometer is a spectrum measurement system developed based on the Fourier transform principle, can be used for quantitative or qualitative analysis on a sample, is widely applied to the analysis and identification fields of various industries, and consists of an interferometer and a computer, wherein the computer is used for analyzing acquired signals or images and the like, a broad spectrum light beam which is interfered by the interferometer is used for detecting the sample, and an important part in the interferometer is that the broad spectrum light is divided into two beams, one beam irradiates on a static reflector, the other beam irradiates on a moving reflector, and the two beams irradiate on the sample to form interference signals. In order to solve the above technical problems, the present invention provides a dual-loop moving mirror control method, device and system, fig. 1 is a schematic flow diagram of the dual-loop moving mirror control method, where the dual-loop moving mirror control method is implemented according to a dual-loop moving mirror control device, the dual-loop moving mirror control device includes a position feedback controller and a speed feedback controller, the dual-loop moving mirror control device is connected with a laser detection unit and a displacement unit, the displacement unit is connected with a moving mirror, the dual-loop moving mirror control device includes, but is not limited to, a position feedback controller and a speed feedback controller, the position feedback controller and the speed feedback controller are internal control parts of the dual-loop moving mirror control device, and the laser detection unit, the displacement unit and the moving mirror are external connection parts of the dual-loop moving mirror control device.
The double-loop moving mirror control method comprises the following steps:
step 101, inputting the current position of the moving mirror to a position feedback controller, and obtaining a speed expected value output by the position feedback controller, wherein the position feedback controller processes the current position and the expected position through a position control parameter, and determines the speed expected value.
In step 101, the position feedback controller in the present invention is a position loop of an outer loop, and is configured to determine a feedback amount to an inner loop according to a current position and an expected position of a moving mirror, and because the inner loop is a speed loop, the present invention obtains a speed expected value according to the position feedback controller.
Optionally, the current position is determined according to an interference signal obtained by a laser detection unit, and steps 101 to 103 of the invention are steps of performing circulation, the current position of the moving mirror is changed at different moments, the invention continuously determines the current position of the moving mirror through the interference signal obtained by the laser detection unit, in the invention, since the laser light source emitted by the laser unit forms two light sources after passing through the half-mirror unit, one light source is reflected to the half-mirror unit through a stationary mirror, and irradiates the laser detection unit after being combined with the other light source after passing through the moving mirror to the half-mirror unit, the laser detection unit obtains a level signal (Transistor Transistor Logic, TTL) or an orthogonal sine and cosine signal, and the current position of the moving mirror is determined according to the level signal or the orthogonal sine and cosine signal.
Step 102, inputting the speed expected value and the current speed value to a speed feedback controller, and obtaining a current feedback value output by the speed feedback controller, wherein the speed feedback controller processes the speed expected value and the current speed value through a speed control parameter, and determines the current feedback value.
In step 102, the speed feedback controller is an inner loop speed loop, and is configured to determine a feedback amount to the current loop according to the speed expected value and the current speed value fed back by the outer loop.
Optionally, the current speed value is determined according to a motor speed encoder signal of the displacement unit, and since the moving unit and the moving mirror remain relatively fixed, the current speed value of the moving unit is the current speed value of the moving mirror, so that after the current speed value is obtained, the current feedback value output by the speed feedback controller is obtained according to the speed expected value and the current speed value.
Optionally, the position control parameter of the position feedback controller and the speed control parameter of the speed feedback controller are determined according to a mel-mel algorithm, the invention adopts a dual-loop PID (Proportional Integral Derivative) control system, the dual-loop comprises the speed loop and the position loop, the control circuit of the invention generates a control signal according to a preset instruction, drives the displacement unit to reciprocate to generate an interference signal, the control device receives the interference signal detected by the laser detection unit and a motor speed encoder signal in the displacement unit and respectively serves as a position feedback signal and a speed feedback signal, the control circuit receives the two paths of signals, and calculates the position feedback signal and the speed feedback signal through proportional integral differentiation in the control circuit, and then drives a servo motor in the displacement unit to move after generating a proper driving current.
Optionally, the position control parameter of the position feedback controller and the speed control parameter of the speed feedback controller are obtained by adopting a mel-mel algorithm, the integral-differential control system of the comparative example is optimized, the balance is performed in overshoot and rising time, the control performance of the integral-differential control system of the comparative example is maintained, and the problem of parameter adjustment is rapidly solved.
Alternatively, the performance of the PID control system is reflected in two aspects, one is rise timeThe other is excessive time +>And overshoot->Said rise time ∈ ->Refers to the time from zero to first steady state, said excessive time +.>The overshoot is the instantaneous maximum deviation of the step response from the steady state value for the time the step response enters the steady state range.
Alternatively, the PID control is characterized by multiplying the selected time of the present invention by an error absolute value integral indicator (Integral Time Absolute Error, ITAE), the following formula can be referenced:
（1）
wherein the method comprises the steps ofThe time for the PID to reach steady state.
Optionally, in the badger algorithm (Honey Badger Algorithm, HBA), the intensity is related to the prey concentration force and the distance of the badger, if the smell is high, the movement speed is high, and the following formula can be referred to:
（2）
In the formula (2), S represents a source intensity or a concentration intensity,indicating the distance of the prey from the current individual, +.>Is the odor intensity of the prey.
The density factor controls the time-varying randomization to ensure that the exploration is smooth and excessive, the following formula can be referred to:
（3）
in the formula (3), the amino acid sequence of the compound,for the maximum iteration number, C is more than or equal to 1, and defaults to 2.
Optionally, the meles perform a heart-like action during the mining phase, the heart-like motion being simulated by
（4）
In the formula (4), the amino acid sequence of the compound,for global optimal solution, < >>Representing the ability of the meles to acquire the real object, default 5,/for the meles>、/>、/>3 random numbers between 0 and 1, ">For changing the sign of the search direction, the following formula can be referred to:
（5）
in the honey producing stage, the following formula can be referred to:
（6）
the following formula can be referred to for the application of the mel-mel algorithm to the PID control:
（7）
in the formula (7), the amino acid sequence of the compound,for compensation factor->For overshoot proportion term, ++>Control->When->When the value is larger, the overshoot is less influenced; when->When the value of (c) is small, the effect on overshoot is large. />The method is characterized in that the method is expressed as an overshoot, can be adjusted according to the expression of the parameter, balances in overshoot and rising time, and maintains the performance of ITAE.
Step 103, determining a next current value according to the current feedback value and the current value, wherein the next current value is used for driving the shifting unit to drive the moving mirror to move;
the current position is determined according to the interference signal acquired by the laser detection unit, and the current speed value is determined according to the motor speed coding signal of the displacement unit;
the position control parameters of the position feedback controller and the speed control parameters of the speed feedback controller are determined according to the badger algorithm.
In step 103, the current feedback value is a current reference value monitored in real time according to a dual-loop PID control system, and is used for providing a reference for the current value to calibrate and adjust the current value, and optionally, the present invention may determine a next current value according to the current feedback value and a mean value of the current value; and generating a first trimming parameter according to the product of the current feedback value and a first preset coefficient, generating a second trimming parameter according to the product of the current value and a second preset coefficient, determining a target trimming parameter according to the first trimming parameter and the second trimming parameter, and adjusting the current value according to the target trimming parameter to determine the next current value.
Optionally, after the next current value is determined, the shift unit is driven to drive the moving mirror to move according to the next current value, and at this time, the next current value is taken as the current value when step 103 is executed next time.
Alternatively, the fourier spectrometer usually uses fast fourier transform to process the acquired interference signal, so that the equidistant optical path difference is important, and a dual-loop control mode is adopted to control the moving mirror in the fourier spectrometer, so that the moving speed is more stable, the sampling interval change is smaller, and the final spectral noise is optimized.
The invention provides a control method of a double-loop moving mirror, which comprises the steps of determining a position control parameter of a position feedback controller and a speed control parameter of a speed feedback controller according to a badger algorithm, determining the current position of the moving mirror according to an interference signal obtained by a laser detection unit, determining the current speed value according to a motor speed coding signal of a shifting unit, inputting the current position to the position feedback controller, obtaining a speed expected value, and inputting the speed expected value and the current speed value to the speed feedback controller to obtain a current feedback value; and finally, determining a next current value according to the current feedback value and the current value to instruct a driving shifting unit to drive the moving mirror to move. According to the invention, servo control is carried out on the shifting unit according to the two feedback signals, namely the interference signal and the motor speed coding signal, so that stable reciprocating movement is generated.
FIG. 2 is a schematic flow chart of the method for obtaining the expected speed value, wherein the position control parameters comprise a proportional outer loop parameter, an integral outer loop parameter and a differential outer loop parameter;
the step of inputting the current position of the moving mirror to a position feedback controller and obtaining a speed expected value output by the position feedback controller comprises the following steps:
step 201, determining a position difference according to the current position and a preset expected position.
In step 201, a position difference is determined according to the current position and a preset expected position, and the following formula may be referred to:
（8）
in the formula (8), the amino acid sequence of the compound,for the position difference +.>For presetting the expected position, < >>Is the current location.
And 202, determining a proportional outer loop score according to the position difference value and the proportional outer loop parameter, determining an integral outer loop score according to the position difference value and the integral outer loop parameter, and determining a differential outer loop score according to the position difference value and the differential outer loop parameter.
In step 203, the position control parameters include a proportional outer loop parameter, an integral outer loop parameter, and a derivative outer loop parameter, the proportional outer loop parameterIntegral outer loop parameter- >Differential outer loop parameter ∈ ->For the outer loop PID control factor, according to said position difference +.>The proportional outer loop parameterDetermining the specific loop score +.>According to the position difference ∈ ->The integral outer loop parameter +.>Determining the integrated outer loop score +.>According to the position difference ∈ ->Said differential outer loop parameter +.>Determining differential outer loop score +.>。
And 203, determining a speed expected value according to the proportional outer loop score, the integral outer loop score and the differential outer loop score, and outputting the speed expected value by the position feedback controller.
In step 203, determining the speed expectation value from the proportional outer loop score, the integral outer loop score, and the derivative outer loop score may refer to the following formula:
（9）
in the formula (9), theFor the speed expectation, +.>For proportional outer loop score, +.>For the score of the outer loop>The speed expectation value is output by the position feedback controller as a differential outer loop score.
FIG. 3 is a schematic flow chart of the current feedback value acquisition provided by the invention, wherein the speed control parameters comprise a proportional inner loop parameter, an integral inner loop parameter and a differential inner loop parameter;
The step of inputting the speed expected value and the current speed value to a speed feedback controller, and obtaining the current feedback value output by the speed feedback controller comprises the following steps:
step 301, determining a speed difference value according to the speed expected value and the current speed value.
In step 301, a speed difference is determined according to the speed expected value and the current speed value, and the following formula may be referred to:
（10）
in the formula (10), the amino acid sequence of the compound,for speed difference +.>For the speed expectation, +.>Is the current speed value.
And 302, determining a proportional inner loop score according to the speed difference value and the proportional inner loop parameter, determining an integral inner loop score according to the speed difference value and the integral inner loop parameter, and determining a differential inner loop score according to the speed difference value and the differential inner loop parameter.
In step 302, the speed control parameters include a proportional inner loop parameterIntegral inner loop parametersDifferential inner loop parameter ∈ ->According to the speed difference ∈ ->The proportional inner loop parameter +.>Determining the proportional inner loop score +.>According to the speed difference ∈ ->The integral inner loop parameter +.>Determining the integrated inner loop score +.>According to the speed difference Said differential inner loop parameter +.>Determining differential inner loop score +.>。
And 303, determining a current feedback value according to the proportional inner loop score, the integral inner loop score and the differential inner loop score, and outputting the current feedback value by the speed feedback controller.
In step 303, a current feedback value is determined according to the proportional inner loop score, the integral inner loop score, and the derivative inner loop score, and the following formula may be referred to:
（11）
in the formula (11), the amino acid sequence of the compound,for the expected current feedback value, +.>For proportional inner loop score, ++>For the integral inner loop score, +.>And outputting the current feedback value by the speed feedback controller for the differential inner loop score.
Fig. 4 is a schematic structural diagram of a dual-loop moving mirror control device provided by the present invention, which includes a signal generator 41, a position feedback controller 42, a speed feedback controller 43, a current loop controller 44, and an amplifier 45;
the signal generator 41 is connected with the position feedback controller 42, the position feedback controller 42 is connected with the speed feedback controller 43, the speed feedback controller 43 is connected with the current loop controller 44, and the current loop controller 44 is connected with the amplifier 45;
The signal generator 41 is used for obtaining a preset expected position of the moving mirror, generating an expected position in response to a preset driving instruction, and indicating the current position of the moving mirror to be input to the position feedback controller 42, and the signal generator 41 is a position feedback signal circuit, the preset driving instruction is generated according to user input, and the double-loop PID control system is used for realizing cooperative control of an outer loop and an inner loop based on the control device in response to the preset driving instruction, wherein the current loop controller 44 and the amplifier 45 form an innermost loop, so that motor current is regulated by the controller, the inner loop calculates a required expected current according to a motor speed coding speed signal, and the outer loop calculates a required expected speed according to position signal feedback of an interference signal.
Optionally, the position feedback controller 42 is configured to obtain the speed expected value according to the current position and the preset expected position of the moving mirror, and the working principle of the position feedback controller 42 may refer to the foregoing step 101, which is not described herein.
Optionally, the speed feedback controller 43 is configured to obtain a current feedback value according to the speed expected value and the current speed value, and the working principle of the speed feedback controller 43 may refer to the foregoing step 102, which is not described herein.
Optionally, the current loop controller 44 is configured to determine a next current value according to the current feedback value and the current value, where the next current value is used to instruct the driving shift unit to drive the moving mirror to move, and the working principle of the current loop controller 44 may refer to the foregoing step 103 and is not repeated herein.
The amplifier is used for amplifying the next current value;
the current position is determined according to the interference signal acquired by the laser detection unit, and the current speed value is determined according to a speed encoder signal of a motor of the displacement unit;
the position control parameters of the position feedback controller and the speed control parameters of the speed feedback controller are determined according to the badger algorithm.
The invention provides a double-loop moving mirror control device, which is characterized in that a position control parameter of a position feedback controller and a speed control parameter of a speed feedback controller are determined according to a badger algorithm, the current position of a moving mirror is determined according to an interference signal obtained by a laser detection unit, a current speed value is determined according to a motor speed encoder signal of a shifting unit, the current position is input to the position feedback controller to obtain a speed expected value, and then the speed expected value and the current speed value are input to the speed feedback controller to obtain a current feedback value; and finally, determining a next current value according to the current feedback value and the current value to instruct a driving shifting unit to drive the moving mirror to move.
Alternatively, as shown in fig. 4, the amplifier 45 is connected to the shift unit 55, and the speed feedback controller 43, the current loop controller 44, the amplifier 45, and the shift unit 55 form an inner loop control circuit, and the speed control parameter is used to calculate a driving current of the shift unit in the inner loop control circuit.
The moving unit 55 is connected to the amplifier 45 of the control device, the moving unit 55 is fixedly connected to the moving mirror, and when the moving unit 55 reciprocates, the speed of the moving unit 55 is determined according to a motor speed encoder signal in the moving unit 55, so as to form an inner loop control circuit based on speed feedback.
The displacement unit 55 is connected to the moving mirror 54, and the position feedback controller 42, the speed feedback controller 43, the current loop controller 44, the amplifier 45, the displacement unit 55 and the moving mirror 54 form an outer loop control circuit, and the position control parameter is used for calculating the expected speed of the displacement unit.
Optionally, in the reciprocating movement process of the moving mirror 54, since the laser light source emitted by the laser unit 58 passes through the half-transmitting and half-reflecting unit 52 to form two light sources, one light source is reflected to the half-transmitting and half-reflecting unit 52 by the stationary mirror 53 and is combined with the other light source by the moving mirror 54 to the half-transmitting and half-reflecting unit 52 for irradiation on the laser detection unit 60, and in the moving process of the moving mirror 54, the current position of the moving mirror 54 can be determined according to the interference signal obtained by the laser detection unit 60, so as to form the outer loop control circuit based on position feedback.
Optionally, the bandwidth of the inner loop control circuit is a preset multiple of the bandwidth of the outer loop control circuit.
Optionally, the bandwidth of the inner loop control circuit is 3 to 5 times of the bandwidth of the outer loop control circuit based on the bandwidth isolation principle in the double loop control, so that the working frequency range of the outer loop is lower than the low frequency range of the inner loop, the stability of the whole system is not affected by mutual interference of the inner loop and the outer loop, the problem of unstable motion caused by temporary decoupling of a servo motor in a Fourier spectrometer is solved, the accuracy of real-time position monitoring of a moving mirror is ensured, the key effect of improving the accuracy and stability of spectrum data obtained by Fourier transformation is achieved, and the application of the double loop moving mirror control method and the device in the invention is not limited to interferometers of the Fourier spectrometer, and can be widely applied to similar interference equipment.
Fig. 5 is a schematic structural diagram of the dual-loop moving mirror control system provided by the present invention, and the present invention further provides a dual-loop moving mirror control system, which includes a light source unit 51, a half-mirror unit 52, a stationary mirror 53, a moving mirror 54, a displacement unit 55, a sample unit 56, a sample detection unit 57, a laser unit 58, a laser reflection unit 59, a laser detection unit 60, and a control device 4.
Optionally, the light source unit 51 is configured to emit a broad spectrum light source, the half-transmitting half-reflecting unit 52 may divide the light entering the half-transmitting half-reflecting unit 52 into two beams according to the characteristic of half-transmitting half-reflecting, the static mirror 53 is fixedly disposed on one side of the half-transmitting half-reflecting unit 52, and is configured to reflect light, and the moving mirror 54 is relatively fixed to the displacement unit 55 and is capable of performing reciprocating motion under the action of a servo motor of the displacement unit 55. The stationary mirror 53 and the moving mirror 54 are composed of a plane mirror or a pyramid mirror, or other devices capable of reflecting light. The sample unit 56 is a detection object for spectrum analysis, the sample detection unit 57 is used for receiving interference light passing through the sample unit 56, the laser unit 58 is used for emitting laser, the laser reflection unit 59 is used for reflecting the laser, the laser detection unit 60 is used for receiving the laser after beam combination from the half-transmission half-reflection unit 52, and the control device 4 is used for performing servo control on the displacement unit 55 according to two feedback signals, namely an interference signal and a motor speed coding signal, so as to generate stable reciprocating movement.
Alternatively, the half mirror 52 is connected to the light source unit 51, the stationary mirror 53, the moving mirror 54, the sample unit 56, the laser detection unit 60, and the laser reflection unit 59, respectively. The sample unit 56 is connected with the sample detection unit 57, the laser reflection unit 59 is connected with the laser unit 58, and the laser detection unit 60 is connected with the control device 4.
Alternatively, the broad spectrum light emitted by the light source unit 51 passes through the half-transmission half-reflection unit 52 to form a first light source and a second light source, the first light source is reflected to the half-transmission half-reflection unit 52 by the static mirror 53, and is reflected to the half-transmission half-reflection unit 52 by the moving mirror 54 together with the second light source to be irradiated to the sample unit 56 after being combined, the broad spectrum light emitted by the light source unit 51 enters the half-transmission half-reflection unit 52 and is divided into two beams to be respectively irradiated to the static mirror 53 and the moving mirror 54, and after being reflected, a beam is synthesized by the half-transmission half-reflection unit 52 to be irradiated to the sample unit 56, and after being detected by the sample unit 56, the beam is converted into an electrical signal by the sample detection unit 57, and then the sample spectral information is obtained through processing.
Alternatively, the laser light source emitted by the laser unit 58 passes through the half-transmitting and half-reflecting unit 52 to form a third light source and a fourth light source, where the third light source is reflected to the half-transmitting and half-reflecting unit 52 by the static mirror 53, and is reflected to the half-transmitting and half-reflecting unit 52 by the moving mirror 54 together with the fourth light source to be irradiated to the laser detection unit 60 after being combined.
Optionally, the laser unit 58 emits a laser light source, and the laser light source is reflected by the laser reflection unit 59 and enters the system to interfere, and is converted into an electrical signal by the laser detection unit 60, and the laser detection unit 60 converts the detected laser interference signal into a TTL signal or an orthogonal sine-cosine signal, and the TTL signal or the orthogonal sine-cosine signal is connected to the control device 4 together with the coding signal in the shift unit 55.
Optionally, the control device 4 is configured to drive the displacement unit 55 to drive the moving mirror 54 to reciprocate, and obtain an interference signal during the reciprocation according to the laser detection unit 60. The shift unit 55 drives the moving mirror 54 to reciprocate and form signal interference of broad spectrum light and laser, the laser forms cosine signals after interference due to long interference distance, and the cosine signals can be converted into square wave signals after shaping and are connected to the control device 4; the voice coil motor displacement stage or the velocity encoder feedback signal in the piezoelectric displacement stage in the displacement unit 55 is connected to the control device 4, the quadrature sine and cosine signals and the velocity encoder feedback signal of the motor are respectively used as a position feedback signal and a velocity feedback signal to be connected to the control device 4, and the dual-loop control circuit in the control device 4 generates an outer loop position feedback and an inner loop velocity feedback according to a preset command, the position feedback signal and the velocity feedback signal, and accurately performs servo control on the displacement unit 55 to generate stable reciprocating movement. Compared with a method of independently using a laser interference signal as a load feedback signal, the method of using the load feedback signal and the motor feedback signal dual-loop control can eliminate oscillation jump caused by load feedback when the motor is temporarily decoupled.
Alternatively, the light source unit 51, the laser reflection unit 59, and the laser unit 58 are disposed at a first side end of the half mirror unit 52;
the stationary mirror 53 is disposed at the second side end of the half-transmitting and half-reflecting unit 52;
the moving mirror 54, the displacement unit 55, and the control device 4 are disposed at a third side end of the half mirror 52;
the laser detection unit 60, the sample unit 56, and the sample detection unit 57 are disposed at a fourth side end of the half mirror unit 52;
the straight line formed by the first side end and the third side end is perpendicular to the straight line formed by the second side end and the fourth side end.
Alternatively, the present invention does not limit the modes of the four side ends of the half-transmitting and half-reflecting unit 52, and only needs to satisfy that the straight line formed by the first side end and the third side end is perpendicular to the straight line formed by the second side end and the fourth side end, and after the above components are arranged in the above manner, the broad spectrum light source emitted by the light source unit 51 can be formed into a first light source and a second light source after passing through the half-transmitting and half-reflecting unit 52, the first light source is reflected to the half-transmitting and half-reflecting unit 52 through the stationary mirror 53, and is combined with the second light source through the moving mirror 54 to the half-transmitting and half-reflecting unit 52 and then irradiated to the sample unit 56, and the third light source and the fourth light source can be formed after passing through the half-transmitting and half-reflecting unit 52, and the third light source is reflected to the half-reflecting unit 52 through the stationary mirror 53, and the half-reflecting and half-reflecting unit 52 is combined with the fourth light source through the moving mirror 54 and the half-reflecting unit 60 to irradiate after the half-transmitting and half-reflecting unit 52.
Optionally, after the interference signal during the reciprocating motion is acquired according to the laser detection unit 60, the interference signal is parsed to acquire a zero-crossing signal, and the zero-crossing signal is sent to the sample detection unit 57, where the sample detection unit is configured to receive the target interference beam irradiated by the sample unit 56 according to the zero-crossing signal indication, so as to process the target interference beam according to fourier transform, and obtain spectral information of the sample unit 56.
Alternatively, the laser unit 58 is composed of a laser with good wavelength and power stability, and emits a laser signal into the fourier transform spectrometer to form an interference signal, which is detected by the laser detection unit 60, where the laser detection unit 60 is composed of a single detector or multiple detectors, and the detected interference signal can be used to monitor the real-time position of the moving mirror 54 on the one hand, and to determine a zero crossing signal, which is a signal at the moment when the amplitude of the ac signal is zero, on the other hand, to drive the sample detection unit 57 to sample.
The invention provides a double-loop moving mirror control system, which is characterized in that a position control parameter of a position feedback controller and a speed control parameter of a speed feedback controller are determined according to a badger algorithm, the current position of a moving mirror is determined according to an interference signal obtained by a laser detection unit, a current speed value is determined according to a motor speed encoder signal of a shifting unit, the current position is input to the position feedback controller to obtain a speed expected value, and then the speed expected value and the current speed value are input to the speed feedback controller to obtain a current feedback value; and finally, determining a next current value according to the current feedback value and the current value to instruct a driving shifting unit to drive the moving mirror to move. According to the invention, servo control is performed on the shifting unit according to the two feedback signals, namely the interference signal and the motor speed encoder signal, so that stable reciprocating movement is generated.
Fig. 6 is a schematic structural diagram of an electronic device provided by the present invention. As shown in fig. 6, the electronic device may include: processor 610, communication interface (Communications Interface) 620, memory 630, and communication bus 640, wherein processor 610, communication interface 620, and memory 630 communicate with each other via communication bus 640. The processor 610 may invoke logic instructions in the memory 630 to perform a dual loop moving mirror control method comprising: inputting the current position of the moving mirror to a position feedback controller, and obtaining a speed expected value output by the position feedback controller; inputting the speed expected value and the current speed value to a speed feedback controller, and obtaining a current feedback value output by the speed feedback controller; determining a next current value according to the current feedback value and the current value, wherein the next current value is used for indicating to drive a shifting unit to drive the moving mirror to move; the current position is determined according to the interference signal acquired by the laser detection unit, and the current speed value is determined according to the motor speed encoder signal of the displacement unit; the position control parameters of the position feedback controller and the speed control parameters of the speed feedback controller are determined according to the badger algorithm.
Further, the logic instructions in the memory 630 may be implemented in the form of software functional units and stored in a computer-readable storage medium when sold or used as a stand-alone product. Based on this understanding, the technical solution of the present invention may be embodied essentially or in a part contributing to the prior art or in a part of the technical solution, in the form of a software product stored in a storage medium, comprising several instructions for causing a computer device (which may be a personal computer, a server, a network device, etc.) to perform all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a random access Memory (RAM, random Access Memory), a magnetic disk, or an optical disk, or other various media capable of storing program codes.
In another aspect, the present invention also provides a computer program product, where the computer program product includes a computer program, where the computer program can be stored on a non-transitory computer readable storage medium, where the computer program, when executed by a processor, can perform the method, apparatus and system for controlling a dual-loop moving mirror provided by the methods above, where the method includes: inputting the current position of the moving mirror to a position feedback controller, and obtaining a speed expected value output by the position feedback controller; inputting the speed expected value and the current speed value to a speed feedback controller, and obtaining a current feedback value output by the speed feedback controller; determining a next current value according to the current feedback value and the current value, wherein the next current value is used for indicating to drive a shifting unit to drive the moving mirror to move; the current position is determined according to the interference signal acquired by the laser detection unit, and the current speed value is determined according to the motor speed encoder signal of the displacement unit; the position control parameters of the position feedback controller and the speed control parameters of the speed feedback controller are determined according to the badger algorithm.
In yet another aspect, the present invention also provides a non-transitory computer readable storage medium having stored thereon a computer program which, when executed by a processor, is implemented to perform the dual loop moving mirror control method provided by the above methods, the method comprising: inputting the current position of the moving mirror to a position feedback controller, and obtaining a speed expected value output by the position feedback controller; inputting the speed expected value and the current speed value to a speed feedback controller, and obtaining a current feedback value output by the speed feedback controller; determining a next current value according to the current feedback value and the current value, wherein the next current value is used for indicating to drive a shifting unit to drive the moving mirror to move; the current position is determined according to the interference signal acquired by the laser detection unit, and the current speed value is determined according to the motor speed encoder signal of the displacement unit; the position control parameters of the position feedback controller and the speed control parameters of the speed feedback controller are determined according to the badger algorithm.
The apparatus embodiments described above are merely illustrative, wherein the elements illustrated as separate elements may or may not be physically separate, and the elements shown as elements may or may not be physical elements, may be located in one place, or may be distributed over a plurality of network elements. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment. Those of ordinary skill in the art will understand and implement the present invention without undue burden.
From the above description of the embodiments, it will be apparent to those skilled in the art that the embodiments may be implemented by means of software plus necessary general hardware platforms, or of course may be implemented by means of hardware. Based on this understanding, the foregoing technical solution may be embodied essentially or in a part contributing to the prior art in the form of a software product, which may be stored in a computer readable storage medium, such as ROM/RAM, a magnetic disk, an optical disk, etc., including several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute the method described in the respective embodiments or some parts of the embodiments.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. The double-loop moving mirror control method is characterized in that the double-loop moving mirror control method is realized according to a double-loop moving mirror control device, the double-loop moving mirror control device comprises a position feedback controller and a speed feedback controller, the double-loop moving mirror control device is connected with a laser detection unit and a displacement unit, and the displacement unit is connected with a moving mirror;
the double-loop moving mirror control method comprises the following steps:
inputting the current position of the moving mirror to a position feedback controller, and acquiring a speed expected value output by the position feedback controller, wherein the position feedback controller processes the current position and a preset expected position through a position control parameter, and determines the speed expected value;
inputting the speed expected value and the current speed value to a speed feedback controller, and obtaining a current feedback value output by the speed feedback controller, wherein the speed feedback controller processes the speed expected value and the current speed value through a speed control parameter, and determines the current feedback value;
determining a next current value according to the current feedback value and the current value, wherein the next current value is used for indicating to drive the shifting unit to drive the moving mirror to move;
The current position is determined according to the interference signal acquired by the laser detection unit, and the current speed value is determined according to a motor speed encoder signal of the displacement unit;
the position control parameters of the position feedback controller and the speed control parameters of the speed feedback controller are determined according to the badger algorithm.
2. The dual loop moving mirror control method according to claim 1, wherein the position control parameters include a proportional outer loop parameter, an integral outer loop parameter, and a differential outer loop parameter;
the step of inputting the current position of the moving mirror to a position feedback controller and obtaining a speed expected value output by the position feedback controller comprises the following steps:
determining a position difference value according to the current position and a preset expected position;
determining a proportional outer loop score according to the position difference value and the proportional outer loop parameter, determining an integral outer loop score according to the position difference value and the integral outer loop parameter, and determining a differential outer loop score according to the position difference value and the differential outer loop parameter;
and determining a speed expected value according to the proportional outer loop score, the integral outer loop score and the differential outer loop score, and outputting the speed expected value by the position feedback controller.
3. The dual loop moving mirror control method according to claim 1, wherein the speed control parameters include a proportional inner loop parameter, an integral inner loop parameter, and a differential inner loop parameter;
the step of inputting the speed expected value and the current speed value to a speed feedback controller, and obtaining the current feedback value output by the speed feedback controller comprises the following steps:
determining a speed difference value according to the speed expected value and the current speed value;
determining a proportional inner loop score according to the speed difference value and the proportional inner loop parameter, determining an integral inner loop score according to the speed difference value and the integral inner loop parameter, and determining a differential inner loop score according to the speed difference value and the differential inner loop parameter;
and determining a current feedback value according to the proportional inner loop score, the integral inner loop score and the differential inner loop score, and outputting the current feedback value by the speed feedback controller.
4. A dual loop moving mirror control device, comprising: a signal generator, a position feedback controller, a speed feedback controller, a current loop controller, and an amplifier;
the signal generator is connected with the position feedback controller, the position feedback controller is connected with the speed feedback controller, the speed feedback controller is connected with the current loop controller, and the current loop controller is connected with the amplifier;
The signal generator is used for obtaining a preset expected position of the moving mirror, and responding to a preset driving instruction, and indicating the current position of the moving mirror to be input to the position feedback controller;
the position feedback controller is used for acquiring a speed expected value according to the current position of the moving mirror and a preset expected position;
the speed feedback controller is used for acquiring a current feedback value according to the speed expected value and the current speed value;
the current loop controller is used for determining a next current value according to the current feedback value and the current value, and the next current value is used for indicating to drive the shifting unit to drive the moving mirror to move;
the amplifier is used for amplifying the next current value;
the current position is determined according to the interference signal acquired by the laser detection unit, and the current speed value is determined according to the motor speed encoder signal of the displacement unit;
the position control parameters of the position feedback controller and the speed control parameters of the speed feedback controller are determined according to the badger algorithm.
5. The dual loop moving mirror control device according to claim 4, wherein the amplifier is connected to the shift unit, the speed feedback controller, the current loop controller, the amplifier, and the shift unit form an inner loop control circuit, and the speed control parameter is used to calculate a driving current of the shift unit in the inner loop control circuit.
6. The dual loop moving mirror control device of claim 5, wherein the displacement unit is connected to the moving mirror, the position feedback controller, the speed feedback controller, the current loop controller, the amplifier, the displacement unit, and the moving mirror form an outer loop control circuit, and the position control parameter is used to calculate an expected speed of the displacement unit.
7. A dual-loop moving mirror control system, comprising a light source unit, a semi-transparent and semi-reflective unit, a stationary mirror, a moving mirror, a displacement unit, a sample detection unit, a laser reflection unit, a laser detection unit, and the control device of any one of claims 4-6;
the semi-transparent and semi-reflective unit is respectively connected with the light source unit, the static mirror, the moving mirror, the sample unit, the laser detection unit and the laser reflection unit;
the sample unit is connected with the sample detection unit, the laser reflection unit is connected with the laser unit, and the laser detection unit is connected with the control device;
the wide-spectrum light source emitted by the light source unit passes through the half-transmission half-reflection unit to form a first light source and a second light source, wherein the first light source is reflected to the half-transmission half-reflection unit through the static mirror, and is reflected to the half-transmission half-reflection unit through the moving mirror with the second light source to be combined to interfere and irradiate the sample unit, and the sample detection unit is irradiated through the sample unit;
The laser light source emitted by the laser unit passes through the half-transmission half-reflection unit to form a third light source and a fourth light source, wherein the third light source is reflected to the half-transmission half-reflection unit through the static mirror, and is reflected to the half-transmission half-reflection unit through the moving mirror with the fourth light source to be interfered after beam combination and irradiated on the laser detection unit.
8. The dual loop moving mirror control system according to claim 7, wherein the light source unit, the laser reflection unit and the laser unit are provided at a first side end of the half-transmission half-reflection unit;
the static mirror is arranged at the second side end of the half-transmission half-reflection unit;
the moving mirror, the shifting unit and the control device are arranged at the third side end of the semi-transparent and semi-reflective unit;
the laser detection unit, the sample unit and the sample detection unit are arranged at the fourth side end of the semi-transparent and semi-reflective unit;
the straight line formed by the first side end and the third side end is perpendicular to the straight line formed by the second side end and the fourth side end.
9. The dual-loop moving mirror control system according to claim 7 or 8, wherein the control device is configured to drive the displacement unit to drive the moving mirror to reciprocate, and obtain an interference signal during reciprocation according to the laser detection unit.
10. The dual loop moving mirror control system according to claim 9, wherein after acquiring an interference signal in a reciprocating process according to the laser detection unit, analyzing the interference signal to acquire a zero crossing signal, and transmitting the zero crossing signal to the sample detection unit;
the sample detection unit is used for receiving the target interference light beam irradiated by the sample unit according to the zero crossing signal indication so as to process the target interference light beam according to Fourier transformation and obtain the spectrum information of the sample unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311246975.8A CN116995986B (en) | 2023-09-26 | 2023-09-26 | Control method, device and system for double-loop moving mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311246975.8A CN116995986B (en) | 2023-09-26 | 2023-09-26 | Control method, device and system for double-loop moving mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116995986A true CN116995986A (en) | 2023-11-03 |
| CN116995986B CN116995986B (en) | 2024-02-06 |
Family
ID=88523490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311246975.8A Active CN116995986B (en) | 2023-09-26 | 2023-09-26 | Control method, device and system for double-loop moving mirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116995986B (en) |
Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH039228A (en) * | 1989-06-05 | 1991-01-17 | Jeol Ltd | Driving mirror position detecting device |
| US5684374A (en) * | 1995-07-27 | 1997-11-04 | Allen-Bradley Company, Inc. | Method and apparatus for tuning a motion control system having an external velocity loop |
| US20010020192A1 (en) * | 1999-12-16 | 2001-09-06 | Takamichi Ito | Automatic speed loop gain adjustment method and apparatus for a feedback control system |
| JP2004250180A (en) * | 2003-02-20 | 2004-09-09 | Konica Minolta Holdings Inc | Feeding device, image reading apparatus, and image forming apparatus |
| JP2004356505A (en) * | 2003-05-30 | 2004-12-16 | Picarro Inc | External cavity laser with its single mode operation improved |
| US20070040529A1 (en) * | 2005-08-19 | 2007-02-22 | Smc Corporation Of America | Stepping motor control system and method for controlling a stepping motor using closed and open loop controls |
| KR100860771B1 (en) * | 2008-01-11 | 2008-09-30 | 한국유지관리 주식회사 | System for acquiring inside space information of underground space and shielding structure |
| WO2011035290A1 (en) * | 2009-09-21 | 2011-03-24 | Faro Technologies, Inc. | Laser pointing mechanism |
| CN102156436A (en) * | 2011-05-18 | 2011-08-17 | 山西飞虹激光科技有限公司 | Multi-closed-loop feedback control system for laser cutter |
| JP2014096038A (en) * | 2012-11-09 | 2014-05-22 | Horiba Ltd | Interferometer, spectroscopic analyzer, and control program of interferometer |
| JP2016004377A (en) * | 2014-06-16 | 2016-01-12 | 旭化成エレクトロニクス株式会社 | Linear motion device control circuit |
| US20160116900A1 (en) * | 2014-10-24 | 2016-04-28 | Okuma Corporation | Numerical control device and method |
| WO2021169442A1 (en) * | 2020-02-24 | 2021-09-02 | 杭州海康威视数字技术股份有限公司 | Monitoring device and camera |
| WO2021184169A1 (en) * | 2020-03-16 | 2021-09-23 | 中国科学院深圳先进技术研究院 | Real-time automatic focusing system for microscope |
-
2023
- 2023-09-26 CN CN202311246975.8A patent/CN116995986B/en active Active
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH039228A (en) * | 1989-06-05 | 1991-01-17 | Jeol Ltd | Driving mirror position detecting device |
| US5684374A (en) * | 1995-07-27 | 1997-11-04 | Allen-Bradley Company, Inc. | Method and apparatus for tuning a motion control system having an external velocity loop |
| US20010020192A1 (en) * | 1999-12-16 | 2001-09-06 | Takamichi Ito | Automatic speed loop gain adjustment method and apparatus for a feedback control system |
| JP2004250180A (en) * | 2003-02-20 | 2004-09-09 | Konica Minolta Holdings Inc | Feeding device, image reading apparatus, and image forming apparatus |
| JP2004356505A (en) * | 2003-05-30 | 2004-12-16 | Picarro Inc | External cavity laser with its single mode operation improved |
| US20070040529A1 (en) * | 2005-08-19 | 2007-02-22 | Smc Corporation Of America | Stepping motor control system and method for controlling a stepping motor using closed and open loop controls |
| KR100860771B1 (en) * | 2008-01-11 | 2008-09-30 | 한국유지관리 주식회사 | System for acquiring inside space information of underground space and shielding structure |
| WO2011035290A1 (en) * | 2009-09-21 | 2011-03-24 | Faro Technologies, Inc. | Laser pointing mechanism |
| CN102156436A (en) * | 2011-05-18 | 2011-08-17 | 山西飞虹激光科技有限公司 | Multi-closed-loop feedback control system for laser cutter |
| JP2014096038A (en) * | 2012-11-09 | 2014-05-22 | Horiba Ltd | Interferometer, spectroscopic analyzer, and control program of interferometer |
| JP2016004377A (en) * | 2014-06-16 | 2016-01-12 | 旭化成エレクトロニクス株式会社 | Linear motion device control circuit |
| US20160116900A1 (en) * | 2014-10-24 | 2016-04-28 | Okuma Corporation | Numerical control device and method |
| WO2021169442A1 (en) * | 2020-02-24 | 2021-09-02 | 杭州海康威视数字技术股份有限公司 | Monitoring device and camera |
| WO2021184169A1 (en) * | 2020-03-16 | 2021-09-23 | 中国科学院深圳先进技术研究院 | Real-time automatic focusing system for microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116995986B (en) | 2024-02-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102792183B (en) | Physical quantity sensor and physical quantity measuring method | |
| JP2021006814A (en) | Single laser lidar system | |
| CN108474689A (en) | For the on-line calibration of repetitive rate correlated performance variable | |
| CN109802291B (en) | Optical fiber laser aperture coherent synthesis phase control method based on deep learning | |
| CN107735913A (en) | Pulsed light beam spectrum signature controls | |
| US11256220B2 (en) | Machine learning device, control device and machine learning method | |
| CN116995986B (en) | Control method, device and system for double-loop moving mirror | |
| JP6858854B2 (en) | Wavelength control system for pulse-by-pulse wavelength target tracking in DUV light sources | |
| US9945723B2 (en) | Interferometer, spectrophotometer using interferometer and control method for interferometer | |
| Reilly et al. | Optimal generators for quantum sensing | |
| CN113054877B (en) | Permanent magnet motor harmonic disturbance torque suppression system based on characteristic frequency observer | |
| JP6606019B2 (en) | Component concentration measuring apparatus and method | |
| JP5155106B2 (en) | Spectroscopic apparatus and spectral method | |
| JP5947193B2 (en) | Interferometer, spectroscopic analyzer, and interferometer control program | |
| CN115138982A (en) | Wafer laser invisible cutting cooperative detection method and system | |
| CN107843969B (en) | Multi-focus frequency-sweeping OCT focusing device and method thereof | |
| JP2009247088A (en) | Stage-positioning device | |
| WO2020162200A1 (en) | Control device and control program | |
| JP2024503309A (en) | Multi-beam LIDAR using zoom lens | |
| CN116990236B (en) | Sampling control method, device and system | |
| US7598697B2 (en) | Electric motor and a method therefor | |
| US20160084711A1 (en) | Object movement control device and fourier transform infrared spectrophotometer | |
| Das et al. | Genetic algorithm based optimal PI controller for position control of Maxon S-DC motor with dSPACE | |
| US10663347B2 (en) | Optical measurement apparatus and recording medium | |
| KR102506261B1 (en) | Method and apparatus for recognizing object by the motion of lidar applying the lissajous motion to control the phase in real time |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |