CN116483021A - Comprehensive compensation method for key errors in five-axis in-machine measurement - Google Patents

Comprehensive compensation method for key errors in five-axis in-machine measurement Download PDF

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CN116483021A
CN116483021A CN202211149789.8A CN202211149789A CN116483021A CN 116483021 A CN116483021 A CN 116483021A CN 202211149789 A CN202211149789 A CN 202211149789A CN 116483021 A CN116483021 A CN 116483021A
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coordinate system
axis
machine tool
measurement
machine
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万能
庄其鑫
郭彦亨
殷浩林
曾照龙
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Northwestern Polytechnical University
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Northwestern Polytechnical University
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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/404Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/35Nc in input of data, input till input file format
    • G05B2219/35408Calculate new position data from actual data to compensate for contour error
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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Abstract

The invention provides a comprehensive compensation method for key errors in five-axis in-machine measurement, which compensates for pre-stroke errors along a normal vector under a machine tool coordinate system in the five-axis in-machine measurement, and avoids the defect of inaccurate compensation along the normal vector under a part coordinate system in the prior art; further, the positioning deviation of the two rotating shafts is identified by means of a laser interferometer device with high precision and good stability, and the identified deviation result is substituted into a machine tool kinematic chain so as to offset the positioning deviation of the rotating angle introduced in the five-axis in-machine measurement. The calculation method is simple and reliable, and can be popularized and applied to the measurement in the four-axis machine tool or the five-axis machine tool with other structures.

Description

Comprehensive compensation method for key errors in five-axis in-machine measurement
Technical Field
The invention belongs to the field of precise measurement, and particularly relates to a comprehensive compensation method for key errors in five-axis in-machine measurement
Background
The adaptive machining technology is increasingly applied to machining of parts with complex structures such as impellers, impeller disks, casings and disk shafts, and the in-machine measurement technology is an important component of the adaptive machining technology, and can identify the actual shape of a part through a measuring head arranged on a machine tool spindle, so that the measurement result can be used for correcting deviation in the machining process of the part. Meanwhile, the in-machine measurement technology can be used as a process detection means in key feature processing, can improve the current situation of measurement by using a detection tool manually in the prior art, and is beneficial to realizing a 'one person and multiple machines' high-efficiency production mode in a processing workshop.
The five-axis in-plane measurement is suitable for detecting the parts with the complex structure of aviation, but the measurement precision of the parts is low at present, which limits the popularization and application of the in-plane measurement technology, and in order to improve the in-plane measurement precision of the parts with the complex structure, the error sources in the measurement system are required to be analyzed and compensated. The built-in measuring system consists of machine tool, measuring head, parts, etc. and has detection precision affected by error sources, and the pre-stroke error and turntable locating deviation of the triggering measuring head are the main factors. In the aspect of compensation of the pre-stroke error, the pre-stroke error is compensated according to the normal vector at the measuring point under the coordinate system of the part in most of the existing compensation methods, and the condition that the position of the normal vector at the measuring point in space changes along with the rotation of the turntable is ignored, so that the compensation direction is not suitable for the compensation of the pre-stroke error in the five-axis in-machine measurement. In the aspect of turntable positioning deviation, many scholars' researches focus on analyzing and establishing an influence model of turntable positioning deviation on machining precision, and lack of researches for compensating turntable positioning deviation in five-axis in-machine measurement results.
Disclosure of Invention
Aiming at the defects in the prior art, in order to improve the in-machine measurement precision of parts with complex structures, the invention provides a comprehensive compensation method for key errors in five-axis in-machine measurement, and the precision of the five-axis in-machine measurement is improved by compensating the pre-stroke errors and the turntable positioning deviation in the measurement result.
The technical scheme of the invention is as follows:
the comprehensive compensation method for the key errors in the five-axis in-machine measurement comprises the following steps:
step 1: constructing a five-axis machine tool kinematic chain:
defining key in five-axis in-machine measurement systemCoordinate system, a nominally homogeneous transformation matrix from machine tool coordinate system to part coordinate system is given by means of the positional relationship between the coordinate systemsConstructing a machine tool kinematic chain;
step 2: identifying positioning deviation of a turntable of a machine tool:
identifying the angle positioning deviation of the B axis, wherein when the angle positioning deviation of the B axis is identified, sampling is performed at set angle intervals within the set rotation angle range of the B axis; identifying the angular positioning deviation of the C-axis under each set sampling angle of the B-axis, wherein sampling is performed at set angle intervals within the set rotation angle range of the C-axis when the angular positioning deviation of the C-axis is identified;
step 3: calculating a compensation direction and a compensation value of the pre-stroke error under a machine tool coordinate system:
step 3.1: selecting measurement characteristics and arranging measurement points under a part coordinate system, obtaining theoretical normal vectors of all the measurement points, and recording n W Then the normal vector n is converted into the normal vector n under the coordinate system of the machine tool M The expression is as follows:
step 3.2: firstly, calculating the touch position of the measuring ball, which is actually contacted with the part in measurement, based on the transformation relation between the measuring ball coordinate system and the part coordinate system and the measurement point coordinates under the part coordinate system; then, a series of evenly distributed points to be calibrated are calibrated on the standard ball, and then the points to be calibrated are converted into touch positions on the measuring ballConstruction from touch position->A composed pre-travel error map; finally, based on the pre-stroke error map, obtaining a pre-stroke error rho corresponding to the actual touch position on the measuring ball in the measurement by interpolation;
step 4: calculating compensation quantity and compensation measurement result by fusing the pre-travel error and the turntable positioning deviation:
step 4.1: planning an in-machine measurement process parameter of the feature to be measured;
step 4.2: calculating the rotation angles of the B axis and the C axis in measurement based on a machine tool kinematic chain, and further interpolating in the identified turntable positioning deviation results to obtain positioning deviations corresponding to the two rotation angles, thereby obtaining an actual transformation matrix from a machine tool coordinate system to a part coordinate system
Step 4.3: the comprehensive compensation quantity delta fusing the pre-stroke error and the turntable positioning deviation is as follows:
the compensation for the measurement results is as follows:
m Last =m Meas
wherein m is Meas For measuring point coordinates, m, obtained in a numerical control system Last The final measurement point coordinates after comprehensive compensation.
Further, in step 1, the key coordinate system in the five-axis in-machine measurement includes: machine tool coordinate system O M -X M Y M Z M Table coordinate system O G -X G Y G Z G B-axis coordinate system O B -X B Y B Z B C-axis coordinate system O C -X C Y C Z C Part coordinate system O W -X W Y W Z W And a geodesic coordinate system O P -X P Y P Z P The method comprises the steps of carrying out a first treatment on the surface of the From machine tool coordinate system O M -X M Y M Z M To part coordinate system O W -X W Y W Z W Is expressed as:
wherein T and R represent translation and rotation transformation matrices, respectively;represented by the C-axis coordinate system O C -X C Y C Z C To part coordinate system O W -X W Y W Z W Is a translation transformation matrix of>Represented by the B-axis coordinate system O B -X B Y B Z B To the C-axis coordinate system O C -X C Y C Z C Is a rotation transformation matrix of>Represented by a table coordinate system O G -X G Y G Z G To the B-axis coordinate system O B -X B Y B Z B Is used for the rotation transformation matrix of the (c),represented by machine tool coordinate system O M -X M Y M Z M To the table coordinate system O G -X G Y G Z G Is provided.
Further, in step 1, the key coordinate system is defined as follows:
machine tool coordinate system O M -X M Y M Z M The origin of (2) is positioned at the center of the tail end of the main shaft when the machine tool resets;
table coordinate system O G -X G Y G Z G The origin of the (E) is established at the intersection point of the axes of the B axis and the C axis of the rotating shaft when the machine tool is reset, and the origin position coordinate is (epsilon) under the machine tool coordinate system xyz ) The coordinate value is not changed along with the movement of the rotating shaft, and in order to ensure the movement performance of the five-axis machine tool, the position needs to be calibrated in a staged way, and three coordinate axes of the workbench coordinate system are respectively parallel to and in the same direction as three axes of the machine tool coordinate system;
b-axis coordinate system O B -X B Y B Z B From a table coordinate system O G -X G Y G Z G Around Y G The axis rotation is obtained, the C-axis coordinate system O C -X C Y C Z C From the B-axis coordinate system O B -X B Y B Z B Around Z B The shaft is rotated to obtain the rotation;
part coordinate system O W -X W Y W Z W Is determined by an operator, and the coordinates in the machine tool coordinate system are (alpha xyz ) The three axes of the part coordinate system and the three axes of the machine tool coordinate system are respectively parallel and in the same direction;
ball measurement coordinate system O P -X P Y P Z P The origin of (2) is established at the sphere center of the measuring sphere, and the three axes of the origin are respectively parallel and in the same direction with the three axes of the machine tool coordinate system.
Further, in the step 1,
further, in the step 2, when the positioning deviation of the B axis is identified, sampling is performed at intervals of 10 degrees within the range of 0-90 degrees, and 10 angular positions are sampled altogether; when the positioning deviation of the C axis is identified, sampling is carried out on the C axis within the range of 0-360 degrees at intervals of 30 degrees under 10 angle positions of the B axis, and 12 angle positions are sampled in total.
Further, in step 2, the positional deviation of the turntable of the machine tool is recognized by using the laser interferometer system and the rotation axis calibration device.
Further, in step 4.1, when planning the in-machine measurement process parameters of the feature to be measured, the following two principles are required to be followed: in the measuring process, the measuring needle cannot interfere and collide with the blade and the rotary table; and the turntable is prevented from violently rotating.
Further, in step 4.2, rotation angles B 'and C' of the B axis and the C axis in measurement are calculated based on the machine tool kinematic chain, and further, the positioning deviation p corresponding to the two rotation angles B 'and C' is obtained by interpolation in the recognized turntable positioning deviation result B 、p C Thereby obtaining the actual transformation matrix from the machine tool coordinate system to the part coordinate system
Wherein the method comprises the steps of
Advantageous effects
The invention provides a comprehensive compensation method for pre-stroke errors and turntable positioning deviation in five-axis in-machine measurement based on the correction and optimization of the existing pre-stroke error compensation method in-machine measurement. The method compensates the pre-stroke error along the normal vector under the coordinate system of the machine tool in the five-axis in-machine measurement, and avoids the defect of inaccurate compensation along the normal vector under the coordinate system of the part in the prior art; further, the positioning deviation of the two rotating shafts is identified by means of a laser interferometer device with high precision and good stability, and the identified deviation result is substituted into a machine tool kinematic chain so as to offset the positioning deviation of the rotating angle introduced in the five-axis in-machine measurement. The calculation method is simple and reliable, and can be popularized and applied to the measurement in the four-axis machine tool or the five-axis machine tool with other structures.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
The foregoing and/or additional aspects and advantages of the invention will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:
FIG. 1 is a flow chart of an implementation of the present invention.
Fig. 2 a key coordinate system defined in five-axis in-plane measurements.
Figure 3 positioning deviation of B-axis angle on turntable.
Figure 4 positioning deviation of C-axis angle on turntable.
The points to be marked are uniformly distributed on the standard northern hemisphere of the sphere in fig. 5.
FIG. 6 illustrates the touch location on a ball under the ball coordinate system.
Fig. 7 is a three-leaf sketch of a pre-stroke error established in an angle-on-ball combination.
Detailed Description
The following detailed description of embodiments of the invention is exemplary and intended to be illustrative of the invention and not to be construed as limiting the invention.
In this embodiment, a BC-axis cradle-type five-axis machine tool is taken as an example, and the implementation flow is shown in fig. 1:
step 1: defining a key coordinate system in a five-axis in-machine measurement system, as shown in fig. 2; by means of the position relation between the coordinate systems, the nominal homogeneous transformation matrix from the machine coordinate system to the part coordinate system is given, and the machine kinematic chain is constructed.
The key coordinate system is defined as follows:
1) Machine tool coordinate system O M -X M Y M Z M The origin of (2) is positioned at the center of the tail end of the main shaft when the machine tool resets;
2) Table coordinate system O G -X G Y G Z G The origin of the (E) is established at the intersection point of the axes of the B axis and the C axis of the rotating shaft when the machine tool is reset, and the origin position coordinate is (epsilon) under the machine tool coordinate system xyz ) The coordinate value does not change along with the movement of the rotating shaft, and in order to ensure the movement performance of the five-axis machine tool, the position needs to be calibrated in a staged way, and three coordinate axes of a workbench coordinate system are respectivelyParallel and equidirectional to three axes of the machine coordinate system;
3) B-axis coordinate system O B -X B Y B Z B From a table coordinate system O G -X G Y G Z G Around Y G The axis rotation is obtained, the C-axis coordinate system O C -X C Y C Z C From the B-axis coordinate system O B -X B Y B Z B Around Z B The shaft is rotated to obtain the rotation;
4) Part coordinate system O W -X W Y W Z W Is determined by an operator, and the coordinates in the machine tool coordinate system are (alpha xyz ) The three axes of the part coordinate system and the three axes of the machine tool coordinate system are respectively parallel and in the same direction;
5) Ball measurement coordinate system O P -X P Y P Z P The origin of (2) is established at the sphere center of the measuring sphere, and the three axes of the origin are respectively parallel and in the same direction with the three axes of the machine tool coordinate system.
Then from machine tool coordinate system O M -X M Y M Z M To part coordinate system O W -X W Y W Z W The nominal homogeneous transformation matrix of (1) is:
in the method, in the process of the invention,and->For a translation transformation matrix, expressed as +.> And->For rotating the transformation matrix, expressed as
Step 2: and identifying the positioning deviation of the turntable of the machine tool by using a prism and an XR20-W wireless type rotating shaft calibrating device in the laser interferometer system. When the positioning deviation of the B axis is identified, sampling is carried out at intervals of 10 degrees within the range of 0-90 degrees, and 10 angular positions are sampled altogether; when the positioning deviation of the C axis is identified, sampling is carried out on the C axis within the range of 0-360 degrees at intervals of 30 degrees under 10 angle positions of the B axis, and 12 angle positions are sampled in total. In the calibration process, the feeding rate of the machine tool is set to 2000 degrees/min, the acquisition pause time is 4s, each group of experiments is subjected to bidirectional linear measurement for 5 times, and the average value is taken as the final identification result of the positioning deviation of the turntable. The B-axis positioning deviation recognition result after fitting is shown in fig. 3, and the C-axis positioning deviation recognition result is shown in fig. 4.
Step 3: calculating the compensation direction and compensation value of the pre-stroke error under the coordinate system of the machine tool
Step 3.1: selecting measurement characteristics and arranging measurement points under a part coordinate system, obtaining theoretical normal vectors of all the measurement points, and recording n W Normal vector n of measuring point in machine tool coordinate system M The expression is as follows:
step 3.2: in the five-axis in-machine measurement, the posture of the probe relative to the part coordinate system is continuously changed along with the rotation of the turntable, so that in order to accurately obtain the pre-stroke error generated when the measuring head is triggered in the five-axis in-machine measurement, the flow comprises the following steps: firstly, calculating the touch position of the measuring ball, which is actually contacted with the part in measurement, based on the transformation relation between the measuring ball coordinate system and the part coordinate system and the measurement point coordinates under the part coordinate system; next, a series of evenly distributed points to be calibrated are calibrated on a standard sphere, as shown in FIG. 5. And converting the point to be calibrated into a ball coordinate systemIs to be touched at a position of (2)As shown in FIG. 6, a touch position is constructed>A combined pre-stroke error clover is shown in fig. 7; and finally, calculating a pre-stroke error corresponding to the actual touch position on the measuring ball by using a bilinear interpolation method based on the pre-stroke error three-leaf sketch, wherein the pre-stroke error is expressed as rho.
Step 4: calculating compensation quantity and compensation measurement result by fusing pre-stroke error and turntable positioning deviation
Firstly, planning the in-machine measurement process parameters of the feature to be measured, and when planning the in-machine measurement process parameters of the feature to be measured, following two principles are required: 1) In the measuring process, the measuring needle cannot interfere and collide with the blade and the rotary table; 2) And the turntable is prevented from violently rotating.
And calculating the rotation angles B ', C' of the B axis and the C axis in the in-computer measurement based on the machine tool kinematic chain. Furthermore, the positioning deviation p corresponding to the two rotation angles B ', C' is obtained from the recognized turntable positioning deviation result by a Lagrangian interpolation method B 、p C . Therefore, the comprehensive compensation quantity delta fusing the pre-stroke error and the turntable positioning deviation is as follows:
in the method, in the process of the invention,the actual transformation matrix from the machine tool coordinate system to the part coordinate system is as follows:
in a matrixIn (I)>And->Keep unchanged (I)>
The compensation for the measurement results is as follows:
m Last =m Meas +Δ (4)
wherein m is Meas For measuring point coordinates, m, obtained in a numerical control system Last The final measurement point coordinates after comprehensive compensation.
Five-axis in-machine measurement experiments for 8 measurement points on a model blade are given below:
the device of the measurement system in the machine mainly comprises: jdgr200_a10h five-axis numerical control machine tool, OMP40-2 mechanical trigger type measuring head of RENISHAW company, measuring needle with the diameter of 2mm and the length of 50mm specification, and ceramic standard ball with the diameter of 19.9998 mm.
And taking a certain type of blade as an implementation object, arranging 8 measuring points on the same curve of the blade, and obtaining normal vectors corresponding to the measuring points. Meanwhile, a three-coordinate measuring machine was used to detect the measuring points on the blade, and the detection results were used as reference values for the actual shape of the blade, as shown in table 1.
TABLE 1 three coordinate measurement of measurement points on blades
And (3) compiling a detection process of 8 measurement points according to a measurement process planning principle, carrying out experiments and repeating measurement for 5 times, and taking an average value as a measurement result. The compensation flow of the measurement result is as follows: firstly, interpolating in a turntable positioning deviation result diagram according to a rotation angle planned in measurement to obtain a positioning deviation corresponding to the rotation angle; the normal vector at the measurement point in the machine coordinate system is then calculated by means of the machine kinematic chain, as shown in table 2. Meanwhile, the corresponding pre-stroke errors when the measuring ball contacts each measuring point are obtained through interpolation in the established pre-stroke error clover diagram. And finally, compensating the pre-stroke error and the turntable positioning deviation introduced in the blade measurement process into a measurement result acquired by a numerical control system, wherein the final measurement coordinate after compensation is shown in a table 3.
TABLE 2 normal vector of measurement points in part coordinate system and machine tool coordinate system
TABLE 3 measurement Point coordinates after Compensation
The experimental result shows that the deviation between the final measurement result compensated by the method and the detection result of the three-coordinate measuring machine is about 0.0165mm, and compared with the deviation value before uncompensated of 0.0306mm, the measurement accuracy in the five-axis machine is improved by about 46.07% on average, thereby illustrating the effectiveness of the method in improving the measurement accuracy in the five-axis machine.
Although embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives, and variations may be made in the above embodiments by those skilled in the art without departing from the spirit and principles of the invention.

Claims (8)

1. A comprehensive compensation method for key errors in five-axis in-machine measurement is characterized by comprising the following steps: the method comprises the following steps:
step 1: constructing a five-axis machine tool kinematic chain:
defining a key coordinate system in a five-axis in-machine measurement system, and giving a nominal homogeneous transformation matrix from a machine tool coordinate system to a part coordinate system by means of a positional relationship between the coordinate systemsConstructing a machine tool kinematic chain;
step 2: identifying positioning deviation of a turntable of a machine tool:
identifying the angle positioning deviation of the B axis, wherein when the angle positioning deviation of the B axis is identified, sampling is performed at set angle intervals within the set rotation angle range of the B axis; identifying the angular positioning deviation of the C-axis under each set sampling angle of the B-axis, wherein sampling is performed at set angle intervals within the set rotation angle range of the C-axis when the angular positioning deviation of the C-axis is identified;
step 3: calculating a compensation direction and a compensation value of the pre-stroke error under a machine tool coordinate system:
step 3.1: selecting measurement characteristics and arranging measurement points under a part coordinate system, obtaining theoretical normal vectors of all the measurement points, and recording n W Then the normal vector n is converted into the normal vector n under the coordinate system of the machine tool M The expression is as follows:
step 3.2: firstly, calculating the touch position of the measuring ball, which is actually contacted with the part in measurement, based on the transformation relation between the measuring ball coordinate system and the part coordinate system and the measurement point coordinates under the part coordinate system; then, a series of evenly distributed points to be calibrated are calibrated on the standard ball, and then the points to be calibrated are converted into touch positions on the measuring ballConstruction of touch-by-touch locationsA composed pre-travel error map; finally, based on the pre-stroke error map, obtaining a pre-stroke error rho corresponding to the actual touch position on the measuring ball in the measurement by interpolation;
step 4: calculating compensation quantity and compensation measurement result by fusing the pre-travel error and the turntable positioning deviation:
step 4.1: planning an in-machine measurement process parameter of the feature to be measured;
step 4.2: calculating the rotation angles of the B axis and the C axis in measurement based on a machine tool kinematic chain, and further interpolating in the identified turntable positioning deviation results to obtain positioning deviations corresponding to the two rotation angles, thereby obtaining an actual transformation matrix from a machine tool coordinate system to a part coordinate system
Step 4.3: the comprehensive compensation quantity delta fusing the pre-stroke error and the turntable positioning deviation is as follows:
the compensation for the measurement results is as follows:
m Last =m Meas
wherein m is Meas For measuring point coordinates, m, obtained in a numerical control system Last The final measurement point coordinates after comprehensive compensation.
2. The method for comprehensively compensating for key errors in five-axis in-machine measurement according to claim 1, wherein the method comprises the following steps: in step 1, the key coordinate system in five-axis in-machine measurement includes: machine tool coordinate system O M -X M Y M Z M Table coordinate system O G -X G Y G Z G B-axis coordinate system O B -X B Y B Z B C-axis coordinate system O C -X C Y C Z C Part coordinate system O W -X W Y W Z W And ball coordinate measurementIs O of P -X P Y P Z P The method comprises the steps of carrying out a first treatment on the surface of the From machine tool coordinate system O M -X M Y M Z M To part coordinate system O W -X W Y W Z W Is expressed as:
wherein T and R represent translation and rotation transformation matrices, respectively;represented by the C-axis coordinate system O C -X C Y C Z C To part coordinate system O W -X W Y W Z W Is a translation transformation matrix of>Represented by the B-axis coordinate system O B -X B Y B Z B To the C-axis coordinate system O C -X C Y C Z C Is a rotation transformation matrix of>Represented by a table coordinate system O G -X G Y G Z G To the B-axis coordinate system O B -X B Y B Z B Is a rotation transformation matrix of>Represented by machine tool coordinate system O M -X M Y M Z M To the table coordinate system O G -X G Y G Z G Is provided.
3. The method for comprehensively compensating for key errors in five-axis in-machine measurement according to claim 2, wherein the method comprises the following steps: in step 1, the key coordinate system is defined as follows:
machine tool coordinate system O M -X M Y M Z M The origin of (2) is positioned at the center of the tail end of the main shaft when the machine tool resets;
table coordinate system O G -X G Y G Z G The origin of the (E) is established at the intersection point of the axes of the B axis and the C axis of the rotating shaft when the machine tool is reset, and the origin position coordinate is (epsilon) under the machine tool coordinate system xyz ) The coordinate value is not changed along with the movement of the rotating shaft, and in order to ensure the movement performance of the five-axis machine tool, the position needs to be calibrated in a staged way, and three coordinate axes of the workbench coordinate system are respectively parallel to and in the same direction as three axes of the machine tool coordinate system;
b-axis coordinate system O B -X B Y B Z B From a table coordinate system O G -X G Y G Z G Around Y G The axis rotation is obtained, the C-axis coordinate system O C -X C Y C Z C From the B-axis coordinate system O B -X B Y B Z B Around Z B The shaft is rotated to obtain the rotation;
part coordinate system O W -X W Y W Z W Is determined by an operator, and the coordinates in the machine tool coordinate system are (alpha xyz ) The three axes of the part coordinate system and the three axes of the machine tool coordinate system are respectively parallel and in the same direction;
ball measurement coordinate system O P -X P Y P Z P The origin of (2) is established at the sphere center of the measuring sphere, and the three axes of the origin are respectively parallel and in the same direction with the three axes of the machine tool coordinate system.
4. A method for the integrated compensation of critical errors in five-axis in-machine measurements as claimed in claim 3, wherein: in the step (1) of the process,
5. the method for comprehensively compensating for key errors in five-axis in-machine measurement according to claim 1, wherein the method comprises the following steps: in the step 2, when the positioning deviation of the B axis is identified, sampling is carried out at intervals of 10 degrees within the range of 0-90 degrees, and 10 angular positions are sampled altogether; when the positioning deviation of the C axis is identified, sampling is carried out on the C axis within the range of 0-360 degrees at intervals of 30 degrees under 10 angle positions of the B axis, and 12 angle positions are sampled in total.
6. The method for comprehensively compensating for key errors in five-axis in-machine measurement according to claim 1, wherein the method comprises the following steps: in step 2, the positioning deviation of the turntable of the machine tool is identified by using the laser interferometer system and the rotating shaft calibration device.
7. The method for comprehensively compensating for key errors in five-axis in-machine measurement according to claim 1, wherein the method comprises the following steps: in step 4.1, when the in-machine measurement process parameters of the feature to be measured are planned, the following two principles are required to be followed: in the measuring process, the measuring needle cannot interfere and collide with the blade and the rotary table; and the turntable is prevented from violently rotating.
8. The method for comprehensively compensating for key errors in five-axis in-machine measurement according to claim 1, wherein the method comprises the following steps: in step 4.2, the rotation angles B ', C' of the B axis and the C axis in measurement are calculated based on the machine tool kinematic chain, and then the positioning deviation p corresponding to the two rotation angles B ', C' is obtained by interpolation in the recognized turntable positioning deviation result B 、p C Thereby obtaining the actual transformation matrix from the machine tool coordinate system to the part coordinate system
Wherein the method comprises the steps of
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