CN116295319B - Angular velocity detection device and micromechanical gyroscope - Google Patents
Angular velocity detection device and micromechanical gyroscope Download PDFInfo
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- CN116295319B CN116295319B CN202310595556.9A CN202310595556A CN116295319B CN 116295319 B CN116295319 B CN 116295319B CN 202310595556 A CN202310595556 A CN 202310595556A CN 116295319 B CN116295319 B CN 116295319B
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- 238000001514 detection method Methods 0.000 title claims abstract description 190
- 239000000758 substrate Substances 0.000 claims abstract description 47
- 239000003990 capacitor Substances 0.000 claims description 77
- 230000000712 assembly Effects 0.000 claims description 26
- 238000000429 assembly Methods 0.000 claims description 26
- 230000008859 change Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 230000008646 thermal stress Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/005—Measuring angular rate using gyroscopic effects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
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Abstract
The present disclosure proposes an angular velocity detection apparatus and a micromechanical gyroscope, relating to the technical field of angular velocity detection, wherein the angular velocity detection apparatus includes: a substrate; the centre of a circle of a plurality of detection module edges circle is central symmetry, and the diameter of detection module edges circle is axisymmetry, and detection module includes: the mass block, cooperated the roof beam and drive the detecting element, the mass block is suspended on base plate, cooperated the roof beam and include: the elastic strips are arranged along the radial direction of the circle, and are connected end to end in sequence, and the cooperating beams of the detection modules are connected to form a star-shaped structure. In the angular velocity detection device and the micromechanical gyroscope, the plurality of mass blocks form the structure with the surrounding supporting centers suspended on the substrate, so that the stability of the mass blocks on the substrate is higher, the resistance to random vibration is stronger, the accuracy of overall angular velocity detection is further ensured, and the performance of the micromechanical gyroscope is effectively improved.
Description
Technical Field
The present disclosure relates to the technical field of angular velocity detection, and in particular, to an angular velocity detection apparatus and a micromechanical gyroscope.
Background
The micromechanical gyroscope is a gyroscope manufactured by using a Micro-Electro-Mechanical-Systems (MEMS), and is used for detecting angular velocity based on the principle of Coriolis force (Coriolis-force), so as to be applied to military fields such as intelligent ammunition, tactical missiles, individual weaponry and the like, and civil fields such as automobile safety anti-shake platforms, balance cars, electronic equipment and the like.
At present, a plurality of mass blocks in the micro-mechanical gyroscope are easily affected by thermal stress in the motion process, so that the motion between adjacent or opposite mass blocks is asymmetric, the detection accuracy of the micro-mechanical gyroscope is affected, and the performance of the micro-mechanical gyroscope is reduced.
Disclosure of Invention
The present disclosure aims to solve, at least to some extent, one of the technical problems in the related art.
To this end, an object of the present disclosure is to provide an angular velocity detection device and a micromechanical gyroscope.
To achieve the above object, a first aspect of the present disclosure provides an angular velocity detection apparatus including: a substrate; the detection module is a plurality of detection module, and a plurality of detection module is central symmetry along the centre of a circle of circle, just detection module is axisymmetry along the diameter of circle, detection module includes: the mass block, cooperated beam and drive detection unit, the mass block is suspended on the base plate, cooperated beam includes: the elastic strips are arranged in the radial direction of the circle, the elastic strips are connected end to end in sequence, the middle of the assistant moving beam is connected with the inner side of the mass block, the end parts of the assistant moving beams of the adjacent detection modules are connected, the assistant moving beams of the detection modules are connected to form a star-shaped structure, the driving detection unit is arranged between the mass block and the base plate and is used for driving the mass block to vibrate in the radial direction of the circle, and the amplitude of tangential vibration of the mass block along the circle is detected.
Optionally, the cooperating beam includes: two elastic groups, the elastic groups comprising: the detection device comprises a first elastic strip and a second elastic strip, wherein the first elastic strip and the second elastic strip are respectively arranged along the radial direction of a circle, one ends of the first elastic strips of two elastic groups are connected with the inner side of a mass block, one end of the first elastic strip, which is far away from the mass block, is connected with one end of the second elastic strip, and one end of the second elastic strip, which is far away from the first elastic strip, of the detection module is connected.
Optionally, the detection module further includes: the support units are arranged on the substrate, and the mass blocks are arranged on the inner sides of the support units.
Optionally, the support unit includes: the support column is arranged on the substrate; the support beam is arranged on the inner side of the support column, the support beam is arranged along the radial direction of the circle, and the mass block is arranged at one end of the support beam far away from the support column; the frame is arranged at one end of the supporting beam, which is far away from the supporting column, and is arranged along the tangential direction of the circle; the cantilever beams are arranged on the inner side of the frame, and one ends of the plurality of cantilever arms Liang Yuanli are connected with the mass blocks.
Optionally, the driving detection unit includes: the two drive assemblies, two drive assemblies are axisymmetric along the tangent line of circle, drive assemblies includes: a first support and a plurality of first capacitors; the first supporting pieces are arranged on the base plate, and a first gap is arranged between the first supporting pieces of the two driving assemblies; the first capacitor includes: the first fixed plates are arranged on the first supporting piece, the first movable plates are arranged on the mass block, and the first fixed plates and the first movable plates are arranged at intervals and uniformly distributed at two ends of the first supporting piece along the tangential direction of the circle.
Optionally, the drive detection unit further includes: the two first detection components, two first detection components are axisymmetric along the tangent line of circle, first detection component includes: a second support and a plurality of second capacitors; the second supporting piece is arranged on the substrate and is positioned outside the first supporting piece; the second capacitor includes: the second fixed plate and the second movable plate are arranged on the second supporting piece, the second movable plate is arranged on the mass block, and the second fixed plates and the second movable plates are arranged at intervals and uniformly distributed at two ends of the second supporting piece along the tangential direction of the circle.
Optionally, the drive detection unit further includes: the two second detection components, two the second detection components are axisymmetric along the tangent line of circle, the second detection component includes: the two detection pieces, two the detection piece is axisymmetric along the diameter of circle, the detection piece includes: a third support and a plurality of third capacitors; the third supporting pieces are arranged on the base plate, the third supporting pieces are positioned on the outer sides of the driving assemblies, and a second gap is formed between the third supporting pieces of the two detecting pieces; the third capacitor includes: the third fixed plates are arranged on the third supporting piece, the third movable plates are arranged on the mass block, and the third fixed plates and the third movable plates are arranged at intervals and uniformly distributed at two ends of the third supporting piece along the tangential direction of the circle.
Optionally, the drive detection unit further includes: the two balancing components are axisymmetric along the tangent line of the circle, and the balancing components comprise: two balancing pieces, the balancing piece includes: a fourth support and a plurality of fourth capacitors; the fourth supporting pieces are arranged on the substrate, the fourth supporting pieces are positioned on the outer sides of the third supporting pieces, and a third gap is formed between the fourth supporting pieces of the two balancing pieces; the fourth capacitor includes: the fourth fixed plate and the fourth movable plate are arranged on the fourth supporting piece, the fourth movable plate is arranged on the mass block, a plurality of fourth fixed plates and a plurality of fourth movable plates are arranged at intervals at two ends of the fourth supporting piece along the tangential direction of the circle, and the distance between the fourth fixed plates and the fourth movable plate is smaller than the distance between the fourth fixed plates and the fourth movable plate between the adjacent fourth capacitors.
Optionally, the drive detection unit further includes: two tuning components, two tuning components are axisymmetric along the tangent line of circle, tuning components includes: two tuning pieces, the tuning pieces comprising: a fifth support and a plurality of fifth capacitors; the fifth supporting piece is arranged on the substrate, and is positioned between the third supporting piece and the fourth supporting piece, and the fifth supporting pieces of the two tuning pieces are connected; the fifth capacitor includes: the fifth fixed plates are arranged on the fifth supporting piece, the fifth movable plates are arranged on the mass block, a plurality of the fifth fixed plates and a plurality of the fifth movable plates are arranged at intervals at two ends of the fifth supporting piece along the tangential direction of the circle, and the distance between the fifth fixed plates and the fifth movable plates is smaller than the distance between the fifth fixed plates and the fifth movable plates between the adjacent fifth capacitors.
Optionally, the drive detection unit further includes: two compensation components, two the compensation components are axisymmetric along the tangent line of circle, the compensation component includes: two compensators, the compensators include: a sixth support and a plurality of sixth capacitors; wherein the sixth support is arranged on the substrate, and the compensator is close to the edge of the mass block; the sixth capacitance includes: the device comprises a mass block, a plurality of fixed plates and a plurality of movable plates, wherein the fixed plates are arranged on a first supporting piece, the movable plates are arranged on the mass block, the fixed plates and the movable plates are arranged at intervals at two ends of the first supporting piece along the tangential direction of a circle, and the distance between the fixed plates and the movable plates is smaller than the distance between the fixed plates and the movable plates between adjacent capacitors.
Optionally, the detection module further includes: the first limiting piece is arranged on the substrate; the second limiting piece is arranged on the substrate; the mass block is provided with a plurality of grooves along the tangential two ends of the circle, the protrusions are positioned in the grooves, the protrusions are abutted with the grooves along the tangential direction of the circle, and vibration spaces are arranged between the protrusions and the grooves along the radial direction of the circle.
A second aspect of the present disclosure provides a micromechanical gyroscope, comprising: the angular velocity detection apparatus as provided in the first aspect of the present disclosure.
The technical scheme provided by the disclosure can comprise the following beneficial effects:
because the middle part of cooperating the movable beam links to each other with the inboard of quality piece for the movable beam that cooperates of a plurality of detection modules has formed star structure in the central point department of a plurality of quality pieces after linking to each other, and because the movable beam that cooperates includes a plurality of elastic strips of end to end in proper order, and the radial setting of elastic strip along the circle, when making the motion between the adjacent or relative quality piece asymmetric, star structure can utilize its star structure and elasticity to exert thrust or pulling force on adjacent or relative quality piece, thereby make adjacent or relative quality piece motion more symmetrical, and then make the quality piece can reduce the thermal stress influence that receives, make whole diagonal velocity detection's accuracy higher, thereby effectively improve micro-mechanical gyroscope's performance.
Additional aspects and advantages of the disclosure will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the disclosure.
Drawings
The foregoing and/or additional aspects and advantages of the present disclosure will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:
fig. 1 is a schematic structural view of an angular velocity detection apparatus according to an embodiment of the present disclosure;
fig. 2 is a schematic structural view of a cooperating beam in an angular velocity detection apparatus according to an embodiment of the present disclosure;
fig. 3 is a schematic diagram of a driving detection unit in the angular velocity detection apparatus according to an embodiment of the present disclosure;
fig. 4 is a schematic view of a structure of a driving assembly in an angular velocity detection apparatus according to an embodiment of the present disclosure;
FIG. 5 is a schematic view showing a structure of a balance assembly in an angular velocity detection apparatus according to an embodiment of the present disclosure;
FIG. 6 is a schematic view showing the structure of a compensation assembly in an angular velocity detection apparatus according to an embodiment of the present disclosure;
as shown in the figure: 1. a substrate;
2. a detection module;
21. the device comprises a supporting unit (211), a supporting column (212), a supporting beam (213), a frame (214) and a cantilever beam;
22. a mass block;
23. A drive detection unit;
231. a driving component 232, a first detection component 233, a second detection component 234, a balancing component 235, a tuning component 236 and a compensation component;
2311. a first support 2312, a first capacitor 23121, a first fixing plate 23122 and a first moving plate;
2321. the second support piece 2322, the second capacitor 23221, the second fixed plate 23222 and the second movable plate;
2331. the detection piece 23311, the third support piece 23312, the third capacitor 233121, the third fixed plate 233122 and the third movable plate;
2341. balance piece, 23411, fourth support piece, 23412, fourth capacitor, 234121, fourth fixed plate, 234122 and fourth movable plate;
2351. tuning piece 23511, fifth supporting piece 23512, fifth capacitor 235121, fifth fixed plate 235122 and fifth movable plate;
2361. a compensating piece 23611, a sixth supporting piece 23612, a sixth capacitor 236121, a sixth fixed plate 236122 and a sixth movable plate;
24. a cooperating beam 241, an elastic group 2411, a first elastic strip 2412 and a second elastic strip;
25. first locating part, 26, second locating part, 27, protruding, 28, recess.
Detailed Description
Embodiments of the present disclosure are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only for explaining the present disclosure and are not to be construed as limiting the present disclosure. On the contrary, the embodiments of the disclosure include all alternatives, modifications, and equivalents as may be included within the spirit and scope of the appended claims.
As shown in fig. 1, the embodiment of the disclosure provides an angular velocity detection device, including a substrate 1 and a plurality of detection modules 2, the plurality of detection modules 2 are centrosymmetric along the center of a circle, and the detection modules 2 are axisymmetric along the diameter of the circle, the detection modules 2 include a mass block 22, a co-moving beam 24 and a driving detection unit 23, the mass block 22 is suspended on the substrate 1, the co-moving beam 24 includes a plurality of elastic strips, the elastic strips are arranged along the radial direction of the circle, the plurality of elastic strips are connected end to end in sequence, the middle part of the co-moving beam 24 is connected with the inner side of the mass block 22, the end parts of the co-moving beams 24 of the adjacent detection modules 2 are connected, the co-moving beams 24 of the plurality of detection modules 2 are connected to form a star structure, the driving detection unit 23 is arranged between the mass block 22 and the substrate 1, and the driving detection unit 23 is used for driving the mass block 22 to vibrate along the radial direction of the circle and detecting the amplitude of the tangential vibration of the mass block 22.
It will be appreciated that when the driving detection unit 23 drives the mass 22 to vibrate along the radial direction of the circle, based on the principle of Coriolis-force (Coriolis-force), a force along the tangential direction of the circle is generated on the mass 22 vibrating along the radial direction of the circle, so that the mass 22 vibrates along the tangential direction of the circle while vibrating along the radial direction, and further the driving detection unit 23 detects the amplitude of the vibration of the mass 22 along the tangential direction of the circle, so as to obtain the integral angular velocity, thereby realizing the detection of the angular velocity and meeting the use requirement.
The middle part of the cooperating beam 24 is connected with the inner sides of the mass blocks 22, so that a star structure is formed at the center positions of the mass blocks 22 after the cooperating beams 24 of the plurality of detection modules 2 are connected, and the cooperating beams 24 comprise a plurality of elastic strips which are sequentially connected end to end, and the elastic strips are arranged along the radial direction of a circle, so that when the movement between the adjacent or opposite mass blocks 22 is asymmetric, the star structure can apply pushing force or pulling force on the adjacent or opposite mass blocks 22 by utilizing the star structure and the elasticity of the star structure, thereby enabling the movement of the adjacent or opposite mass blocks 22 to be more symmetrical, further enabling the mass blocks 22 to reduce the influence of the received thermal stress, enabling the accuracy of the overall diagonal speed detection to be higher, and effectively improving the performance of the micromechanical gyroscope.
Meanwhile, as the plurality of detection modules 2 are centrosymmetric along the center of the circle and the detection modules 2 are axisymmetric along the diameter of the circle, the whole can utilize a differential mode to carry out noise reduction treatment on the detected signals, thereby improving the detection sensitivity, and the weights of the plurality of mass blocks 22 can be uniformly dispersed, so that the stability of the mass blocks 22 on the substrate 1 is improved.
It should be noted that, in the angular velocity detection device, the coriolis force principle is based on the fact that a rotating object generates a tangential force along a circle when moving along a radial direction of the circle, and a specific derivation process of the coriolis force principle is not described herein, where the radial direction of the circle refers to a radial direction of the circle, the tangential direction of the circle refers to a tangential direction of the circle, and the radial direction of the circle is perpendicular to the tangential direction of the circle.
Since the plurality of detection modules 2 are centrally symmetrical along the center of the circle, the number of the detection modules 2 is even, and since the detection modules 2 are axisymmetrical along the diameter of the circle, the angular velocity detection device integrally forms a fully symmetrical structure and has a plurality of symmetry axes, wherein the number of the detection modules 2 can be set according to actual needs, which is not limited, and when the angular velocity detection device comprises two detection modules 2, the angular velocity detection device has two symmetry axes; when the angular velocity detection apparatus includes four detection modules 2, the angular velocity detection apparatus has four symmetry axes.
The mass block 22 is a detection device for vibrating along the circular radial direction and the tangential direction, the substrate 1 is used for bearing and driving the detection unit 23 and other devices, the specific types of the mass block 22 and the substrate 1 can be set according to practical needs, the specific type is not limited, the angular velocity detection device is formed by processing on a silicon wafer substrate, the substrate 1 can be a silicon plate, and the mass block 22 can be a silicon block. The mass block 22 may have a central symmetrical structure, so that the radial vibration frequency of the mass block 22 along the circle is the same as the tangential vibration frequency of the mass block along the circle, and further the detection accuracy of the angular velocity is higher, and the overall performance is better.
The specific type of the drive detection unit 23 may be set according to actual needs, and is not limited thereto.
The elastic strip is a strip plate with elasticity, and the specific type of the elastic strip can be set according to actual needs, and the elastic strip is not limited to the specific type.
The number of elastic strips in the cooperating beam 24 may be set according to actual needs, and is not limited thereto, and the elastic strips may be two, four, eight, etc. by way of example.
Because the spring strips are arranged in the radial direction of the circle, the plurality of spring strips form a serpentine structure after being connected end to end, and the cooperating beams 24 of the serpentine structure facilitate cooperation between adjacent or opposing masses 22.
As shown in fig. 2, in some embodiments, the cooperating beam 24 includes two elastic groups 241, where the elastic groups 241 include a first elastic strip 2411 and a second elastic strip 2412, the first elastic strip 2411 and the second elastic strip 2412 are respectively disposed along a radial direction of a circle, one ends of the first elastic strips 2411 of the two elastic groups 241 are connected to an inner side of the mass 22 after being connected, one end of the first elastic strip 2411 away from the mass 22 is connected to one end of the second elastic strip 2412, and one end of the second elastic strip 2412 of the adjacent detection module 2 away from the first elastic strip 2411 is connected.
It will be appreciated that, since the elastic group 241 includes the first elastic strip 2411 and the second elastic strip 2412, the inner side of the mass 22 has two first elastic strips 2411 and two second elastic strips 2412, and since the second elastic strips 2412 of the adjacent detection modules 2 are connected at one end far from the first elastic strip 2411, the first elastic strips 2411 of the two elastic groups 241 are connected at one end to the inner side of the mass 22, and the first elastic strips 2411 are connected at one end far from the mass 22 to one end of the second elastic strip 2412, so that there are two first elastic strips 2411 and two second elastic strips 2412 between the adjacent detection modules 2, when the motion between the adjacent or opposite masses 22 is asymmetric, the whole can apply a pushing force or pulling force on the adjacent or opposite masses 22 by using the elasticity of the first elastic strips 2411 and the second elastic strips 2412, thereby making the motion of the adjacent or opposite masses 22 more symmetric, and thus making the whole to be subjected to a reduced thermal stress influence, and thus making the whole to more accurate and precise performance of the micromechanical gyroscope.
It should be noted that, when the first elastic strip 2411 and the second elastic strip 2412 are both elastic strips and the movement between the adjacent or opposite masses 22 is asymmetric, the included angle between the first elastic strip 2411 and the second elastic strip 2412 also changes, and after the movement symmetry of the adjacent or opposite masses 22 is restored based on the elasticity of the first elastic strip 2411 and the second elastic strip 2412, the included angle between the first elastic strip 2411 and the second elastic strip 2412 is also restored.
As shown in fig. 1, in some embodiments, the detection module 2 further includes a plurality of support units 21, the support units 21 are disposed on the substrate 1, and the mass 22 is disposed inside the plurality of support units 21.
It can be understood that, through the setting of a plurality of supporting units 21 for the quality piece 22 can be suspended on base plate 1, and through setting up the quality piece 22 in the inboard of a plurality of supporting units 21, make a plurality of quality pieces 22 form the unsettled structure in support center all around on base plate 1, thereby make the stability of quality piece 22 on base plate 1 higher, the resistance ability to random vibration is stronger, and then guaranteed whole diagonal speed detection's accuracy nature, effectively improved the performance of micro-mechanical gyroscope.
Meanwhile, as the plurality of detection modules 2 are centrosymmetric along the center of the circle and the detection modules 2 are axisymmetric along the diameter of the circle, the whole detection module not only can utilize a differential mode to carry out noise reduction treatment on detected signals so as to improve the detection sensitivity, but also can uniformly disperse the weight of the plurality of mass blocks 22 on the plurality of support units 21 so as to improve the stability of the mass blocks 22 on the substrate 1.
The specific type of the supporting unit 21 may be set according to actual needs, which is not limited.
The number of the supporting units 21 in the detecting module 2 may be set according to actual needs, and is not limited thereto, and the number of the supporting units 21 in the detecting module 2 may be 1, 2, 3, 4, or the like, as an example.
As shown in fig. 1, in some embodiments, the support unit 21 includes a support column 211, a support beam 212, a frame 213, and a plurality of cantilever beams 214, the support column 211 is disposed on the substrate 1, the support beam 212 is disposed inside the support column 211, the support beam 212 is disposed along a radial direction of a circle, the mass 22 is disposed at an end of the support beam 212 away from the support column 211, the frame 213 is disposed at an end of the support beam 212 away from the support column 211, and the frame 213 is disposed along a tangential direction of the circle, the cantilever beams 214 are disposed inside the frame 213, and an end of the plurality of cantilever beams 214 away from the frame 213 is connected to the mass 22.
It can be understood that the mass block 22 is disposed on the frame 213 through the cantilever beam 214, the frame 213 is disposed on the support column 211 through the support beam 212, so as to realize the suspension of the mass block 22 on the substrate 1, and the cantilever beam 214, the frame 213, the support beam 212 and the support column 211 for supporting the mass block 22 are sequentially disposed on the outer side of the mass block 22, so that the mass blocks 22 form a structure with suspended supporting centers on the substrate 1, and further the stability of the mass block 22 on the substrate 1 is higher, and the resistance to random vibration is stronger, thereby ensuring the accuracy of overall diagonal speed detection and effectively improving the performance of the micromechanical gyroscope.
The cantilever beam 214, the frame 213, the support beam 212 and the support column 211 are arranged, so that a longer force propagation path is formed between the mass block 22 and the substrate 1, the mass block 22 is suspended on the substrate 1, the interference of the force on the substrate 1 can be reduced, the stability of the mass block 22 is higher, and meanwhile, the support beam 212 is arranged along the radial direction of the circle, so that the frame 213 is difficult to move along the radial direction of the circle, and the mass block 22 can vibrate along the radial direction of the circle more stably on the frame 213.
It should be noted that the specific type of the support column 211 may be set according to actual needs, which is not limited thereto, and the support column 211 may be a columnar structure, for example.
The specific type of support beam 212 may be set according to actual needs, and is not limited thereto, and the support beam 212 may be a rod-like structure, for example.
The specific type of the frame 213 may be set according to actual needs, and the frame 213 may be a structure close to a "C" type, and the cantilever beams 214 are disposed at both ends of the frame 213, as an example.
The cantilever beam 214 is used for setting the mass block 22 on the frame 213, since the mass block 22 needs to vibrate, the cantilever beam 214 needs to have a certain elasticity, the specific type of the cantilever beam 214 can be set according to actual needs, which is not limited by this, the cantilever beam 214 can include a first portion and a second portion, the first portion is set on the inner side of the frame 213, one end of the first portion far away from the frame 213 is connected with the mass block 22 after being bent, the bent portion of the first portion is close to the frame 213, the second portion is set on the inner side of the frame 213, the first portion is located between the second portion and the frame 213, the second portion is connected with the mass block 22 after being bent, and the bent portion of the second portion is close to the first portion, thereby, by setting the first portion and the second portion, not only setting of the mass block 22 on the frame 213 is realized, but also vibration of the mass block 22 along the circular radial direction can be ensured, meanwhile, since the bent portion of the first portion is close to the frame 213, the bent portion of the second portion is close to the first portion, so that the cantilever beams 214 of adjacent detection modules 2 are mutually separated from each other; the cantilever beam 214 may also be a U-shaped structure, one end of which is connected to the inner side of the frame 213, and the other end of which is connected to the outer side of the mass 22.
As shown in fig. 3 and 4, in some embodiments, the driving detection unit 23 includes two driving assemblies 231, the two driving assemblies 231 are axisymmetric along a tangent line of a circle, the driving assemblies 231 include a first support member 2311 and a plurality of first capacitors 2312, wherein the first support member 2311 is disposed on the substrate 1, a first gap is disposed between the first support members 2311 of the two driving assemblies 231, the first capacitors 2312 include a first fixed plate 23121 and a first movable plate 23122, the first fixed plate 23121 is disposed on the first support member 2311, the first movable plate 23122 is disposed on the mass 22, and a plurality of first fixed plates 23121 and a plurality of first movable plates 23122 are disposed at both ends of the first support member 2311 along the tangent line of the circle and uniformly distributed.
It can be appreciated that, by the arrangement of the first supporting member 2311, the plurality of first fixed plates 23121 can be disposed on the base plate 1 and relatively fixed with the base plate 1, and by disposing the first movable plates 23122 on the mass block 22, the plurality of first movable plates 23122 can move relative to the base plate 1 and further move relative to the plurality of first fixed plates 23121, so that when the first capacitor 2312 is supplied with an alternating signal, a variable driving force along a circular radial direction is generated between the first movable plates 23122 and the first fixed plates 23121 under the driving of the alternating signal, so that the plurality of first movable plates 23122 can drive the mass block 22 to reciprocate along the radial direction of the circle under the driving of the variable driving force, thereby realizing the vibration of the mass block 22 along the circular radial direction, and ensuring that the whole body can realize the detection of the angular velocity based on the principle of the coriolis force, thereby meeting the use requirement.
Wherein, the plurality of first fixed plates 23121 and the plurality of first movable plates 23122 are disposed at two ends of the first supporting member 2311 along a tangential direction of the circle at intervals and uniformly distributed, so that the driving assembly 231 forms a comb-shaped capacitor structure, and the driving assembly 231 has a larger driving capacitance and a higher signal-to-noise ratio.
It should be noted that, since the plurality of first fixed plates 23121 and the plurality of first movable plates 23122 are uniformly distributed at both ends of the first supporting member 2311 along the tangential direction of the circle, and the first gap is provided between the first supporting members 2311 of the two driving assemblies 231, the plurality of first movable plates 23122 can reciprocate along the radial direction of the circle with respect to the plurality of first fixed plates 23121 when the alternating signal is input as a whole.
After the structure of the detection module 2 is determined, the vibration frequency of the mass block 22 is also determined, so that when the alternating signal is fed into the first capacitor 2312, the frequency of the alternating signal needs to be kept consistent with the vibration frequency of the mass block 22, and stable resonance of the mass block 22 is ensured.
Under the driving of the driving detection unit 23, the angular velocity detection device may operate in a plurality of modes, and a specific operation mode may be set according to actual needs, which is not limited to this, and in the first mode, the mass blocks 22 vibrate along the radial direction of the circle, and the movement directions between the adjacent mass blocks 22 are opposite, that is, between the adjacent mass blocks 22, if one mass block 22 moves along the direction close to the center, the other mass block 22 moves along the direction away from the center, and meanwhile, when the whole has the angular velocity input, the mass blocks 22 vibrate along the radial direction of the circle and also vibrate along the tangential direction of the circle, and the movement directions between the adjacent mass blocks 22 are opposite, that is, the adjacent mass blocks 22 are either close to each other or far from each other; in the second mode, the two axisymmetric masses 22 vibrate along the radial direction of the circle, and the movement directions between the two masses 22 are opposite, that is, if one mass 22 moves along the direction close to the center of the circle, the other mass 22 moves along the direction away from the center of the circle, meanwhile, when the whole has angular velocity input, the masses 22 vibrate along the radial direction of the circle and simultaneously vibrate along the tangential direction of the circle, and the movement directions between the two masses 22 are opposite, that is, the two masses 22 are either close to each other or far away from each other, and are stationary with the masses 22.
As shown in fig. 3 and 4, in some embodiments, the driving detection unit 23 further includes two first detection assemblies 232, where the two first detection assemblies 232 are axisymmetric along a tangent line of the circle, the first detection assemblies 232 include a second support member 2321 and a plurality of second capacitors 2322, where the second support member 2321 is disposed on the substrate 1, and the second support member 2321 is located outside the first support member 2311, the second capacitors 2322 include a second fixed plate 23221 and a second movable plate 23222, the second fixed plate 23221 is disposed on the second support member 2321, the second movable plate 23222 is disposed on the mass block 22, and a plurality of second fixed plates 23221 and a plurality of second movable plates 23222 are disposed at two ends of the second support member 2321 along the tangent line of the circle at intervals and are uniformly distributed.
It can be appreciated that, by the arrangement of the second supporting member 2321, the plurality of second fixed plates 23221 can be arranged on the base plate 1 and relatively fixed with the base plate 1, while by arranging the second movable plates 23222 on the mass block 22, the plurality of second movable plates 23222 can be fixed relative to the mass block 22, so that when the mass block 22 vibrates along the radial direction of the circle, the relative area between the second movable plates 23222 and the second fixed plates 23221 can be continuously changed, and the capacitance value of the second capacitor 2322 can be continuously changed, so that the amplitude of the vibration of the mass block 22 along the radial direction of the circle can be obtained according to the capacitance value change of the second capacitor 2322, and further, the alternating signal input into the first capacitor 2312 can be adjusted according to the vibration amplitude of the mass block 22 along the radial direction of the circle, thereby forming a closed loop control on the radial vibration of the mass block 22, and further ensuring that the mass block 22 can vibrate along the radial direction within a set range, so as to meet the detection requirement of the angular velocity.
The plurality of second fixed plates 23221 and the plurality of second movable plates 23222 are arranged at intervals and uniformly distributed at two ends of the second support 2321 along the tangential direction of the circle, so that the first detection assembly 232 forms a comb-tooth-shaped arranged capacitor structure, and the first detection assembly 232 has a larger detection capacitance and a higher signal-to-noise ratio.
It should be noted that, since the plurality of second fixed plates 23221 and the plurality of second movable plates 23222 are uniformly distributed at two ends of the second supporting member 2321 along the tangential direction of the circle, and a gap for accommodating the first supporting member 2311 is provided between the second supporting members 2321 of the two first detecting assemblies 232, when the mass block 22 vibrates along the radial direction of the circle under the driving of the first capacitor 2312, the radial vibration amplitude of the mass block 22 can be accurately detected by using the capacitance value change of the second capacitor 2322.
As shown in fig. 3 and 5, in some embodiments, the driving detection unit 23 further includes two second detection assemblies 233, the two second detection assemblies 233 are axisymmetric along a tangent line of the circle, the second detection assemblies 233 include two detection members 2331, the two detection members 2331 are axisymmetric along a diameter of the circle, the detection members 2331 include a third support member 2331 and a plurality of third capacitors 23312, wherein the third support member 2331 is disposed on the substrate 1, the third support member 2331 is located outside the driving assembly 231, a second gap is disposed between the third support members 23311 of the two detection members 2331, the third capacitors 23312 include a third fixed plate 233121 and a third movable plate 233122, the third fixed plate 233121 is disposed on the third support member 2331, the third movable plate 233122 is disposed on the mass block 22, and the plurality of third fixed plates 233121 and the plurality of third movable plates 233122 are disposed at intervals and uniformly distributed at both ends of the third support member 23311 along the tangent line of the circle.
It will be appreciated that by the arrangement of the third supporting member 23311, the plurality of third fixed plates 233121 can be arranged on the base plate 1 and relatively fixed to the base plate 1, while by arranging the third movable plates 233122 on the mass block 22, the plurality of third movable plates 233122 can be fixed to the mass block 22, whereby when the mass block 22 vibrates in the tangential direction of the circle while vibrating in the radial direction with angular velocity input, the relative distance between the third movable plates 233122 and the third fixed plates 233121 can be continuously changed, and thus the capacitance value of the third capacitor 23312 can be continuously changed, and thus the amplitude of the tangential vibration of the mass block 22 in the circular direction can be obtained according to the capacitance value change of the third capacitor 23312, and thus the angular velocity of the external input can be obtained according to the vibration amplitude of the mass block 22 in the circular tangential direction, thereby satisfying the angular velocity detection requirement.
Wherein, because the plurality of third fixed plates 233121 and the plurality of third movable plates 233122 are disposed at intervals and uniformly distributed at two ends of the third supporting member 23311 along the tangential direction of the circle, the detecting members 2331 form a comb-tooth-shaped arranged capacitor structure, so that the second detecting assembly 233 has a larger detecting capacitor and a higher signal-to-noise ratio.
It should be noted that, since the plurality of third fixed plates 233121 and the plurality of third movable plates 233122 are disposed at intervals and uniformly distributed at two ends of the third support member 23311 along the tangential direction of the circle, and the second gap is disposed between the third support members 23311 of the two detection members 2331, when the mass block 22 vibrates along the tangential direction of the circle, the tangential vibration amplitude of the mass block 22 can be accurately detected by using the capacitance value change of the third capacitor 23312 as a whole.
The angular velocity detection apparatus may obtain the overall angular velocity by using the second detection component 233, but the manner of obtaining the overall angular velocity by using the second detection component 233 may not result in high overall stability of the mass 22 due to the tangential vibration required by the mass 22, and thus may affect the overall angular velocity detection accuracy, so that the overall angular velocity may also be obtained by other manners.
As shown in fig. 3 and 5, in some embodiments, the driving detection unit 23 further includes two balancing components 234, the two balancing components 234 are axisymmetric along a tangent line of a circle, the balancing components 234 include two balancing components 2341, the balancing components 2341 include a fourth supporting component 23411 and a plurality of fourth capacitors 23412, wherein the fourth supporting component 23411 is disposed on the substrate 1, the fourth supporting component 23411 is located outside the third supporting component 23311, a third gap is disposed between the fourth supporting components 23411 of the two balancing components 2341, the fourth capacitors 23412 include a fourth fixed plate 234121 and a fourth movable plate 234122, the fourth fixed plate 234121 is disposed on the fourth supporting component 23411, the fourth movable plate 234122 is disposed on the mass block 22, the plurality of fourth fixed plates 234121 and the plurality of fourth movable plates 234122 are disposed at two ends of the fourth supporting component 23411 along the tangential direction of the circle, and a distance between the fourth fixed plate 234121 and the fourth movable plate 234122 is smaller than a distance between the fourth fixed plate 2369 and the fourth movable plate 9743 between adjacent fourth capacitors 23412.
It will be appreciated that by the arrangement of the fourth support 23411, the plurality of fourth fixed plates 234121 can be disposed on the base plate 1 and relatively fixed to the base plate 1, while by the arrangement of the fourth movable plates 234122 on the mass 22, the plurality of fourth movable plates 234122 can be moved relative to the base plate 1 and thus the plurality of fourth fixed plates 234121.
Therefore, when the whole has angular velocity input and the mass block 22 vibrates along the tangential direction of the circle while vibrating along the radial direction, the whole can obtain the tangential vibration amplitude of the mass block 22 according to the capacitance value change of the third capacitor 23312, and then alternating signals are applied to the fourth capacitor 23412 according to the tangential vibration amplitude of the mass block 22, so that a driving force which changes along the tangential direction of the circle is generated between the fourth movable plate 234122 and the fourth fixed plate 234121 under the driving of the alternating signals, and further, a force which counteracts the tangential vibration of the mass block 22 can be applied to the mass block 22 by the plurality of fourth movable plates 234122, and finally, the mass block 22 can be kept stationary along the tangential direction of the circle, and meanwhile, the external input angular velocity can be obtained through the alternating signals applied to the fourth capacitor 23412 due to the alternating signals applied to the fourth capacitor 23412, so that the whole angular velocity detection is realized, and meanwhile, the stability of the mass block 22 is effectively improved, and the whole angular velocity detection precision is effectively improved.
Wherein, because the fourth fixed plates 234121 and the fourth movable plates 234122 are disposed at two ends of the fourth supporting member 23411 along the tangential direction of the circle, the balancing member 2341 forms a comb-shaped capacitor structure, so that the balancing assembly 234 has a larger balancing capacitance and a higher signal-to-noise ratio.
It should be noted that, since the plurality of fourth fixed plates 234121 and the plurality of fourth movable plates 234122 are disposed at the two ends of the fourth supporting member 23411 along the tangential direction of the circle, and the distance between the fourth fixed plate 234121 and the fourth movable plate 234122 is smaller than the distance between the fourth fixed plate 234121 and the fourth movable plate 234122 between the adjacent fourth capacitors 23412, when the mass 22 vibrates along the tangential direction of the circle, the mass 22 can be stably stationary along the tangential direction of the circle by the fourth capacitors 23412 as a whole.
As shown in fig. 3 and 5, in some embodiments, the driving detection unit 23 further includes two tuning assemblies 235, the two tuning assemblies 235 are axisymmetric along a tangent line of a circle, the tuning assemblies 235 include two tuning members 2351, the tuning members 2351 include a fifth supporting member 23511 and a plurality of fifth capacitors 23512, wherein the fifth supporting member 23511 is disposed on the base plate 1, the fifth supporting member 23511 is disposed between the third supporting member 23311 and the fourth supporting member 23411, the fifth supporting members 23511 of the two tuning members 2351 are connected, the fifth capacitors 23512 include a fifth fixed plate 235121 and a fifth movable plate 235122, the fifth fixed plate 235121 is disposed on the fifth supporting member 23511, the fifth movable plate 235122 is disposed on the mass block 22, the plurality of fifth fixed plates 235121 and the plurality of fifth movable plates 235122 are disposed at both ends of the fifth supporting member 23511 along the tangent line of the circle, and the distance between the fifth fixed plate 235121 and the fifth movable plate 235122 is smaller than the distance between the fifth fixed plate 4886 and the fifth movable plate 235122 between adjacent fifth capacitor plates 235122.
It can be appreciated that, by the arrangement of the fifth supporting member 23511, the plurality of fifth fixed plates 235121 can be disposed on the base plate 1 and relatively fixed to the base plate 1, while by disposing the fifth movable plate 235122 on the mass block 22, the plurality of fifth movable plates 235122 can move relative to the base plate 1 and further move relative to the plurality of fifth fixed plates 235121, so that when the mass block 22 vibrates along the tangential direction of the circle while the mass block 22 integrally has an angular velocity input, the tangential vibration amplitude of the mass block 22 can be obtained by the change of the capacitance value of the third capacitor 23312, and then an alternating signal is applied to the fifth capacitor 23512 according to the tangential vibration amplitude of the mass block 22, so that a driving force varying along the tangential direction of the circle is generated between the fifth movable plate 235122 and the fifth fixed plate 235121 under the driving of the alternating signal, and then the frequency of the mass block 22 vibrating along the tangential direction is adjusted, so that the tangential frequency of the mass block 22 is kept constant, and finally the balance of the balance assembly 234 relative to the mass block 22 is more stable, and the overall angular accuracy of the detection speed is further improved.
Wherein, because the plurality of fifth fixed plates 235121 and the plurality of fifth movable plates 235122 are disposed at two ends of the fifth supporting member 23511 along the tangential direction of the circle, the tuning members 2351 form a comb-shaped capacitor structure, so that the tuning assembly 235 has a larger tuning capacitance and a higher signal-to-noise ratio.
It should be noted that, since the plurality of fifth fixed plates 235121 and the plurality of fifth moving plates 235122 are disposed at two ends of the fifth supporting member 23511 at intervals along the tangential direction of the circle, and the distance between the fifth fixed plate 235121 and the fifth moving plate 235122 is smaller than the distance between the fifth fixed plate 235121 and the fifth moving plate 235122 between the adjacent fifth capacitors 23512, when the mass 22 vibrates along the tangential direction of the circle, the tangential vibration frequency of the mass 22 can be adjusted by using the fifth capacitors 23512 as a whole.
As shown in fig. 6, in some embodiments, the driving detection unit 23 further includes two compensation assemblies 236, where the two compensation assemblies 236 are axisymmetric along a tangent line of the circle, the compensation assemblies 236 include two compensation members 2361, the compensation members 2361 include a sixth support member 23611 and a plurality of sixth capacitors 23612, where the sixth support member 23611 is disposed on the base plate 1, the compensation member 2361 is near an edge of the mass 22, the sixth capacitor 23612 includes a sixth fixed plate 236121 and a sixth movable plate 236122, the sixth fixed plate 236121 is disposed on the sixth support member 23611, the sixth movable plate 236122 is disposed on the mass 22, the plurality of sixth fixed plates 236121 and the plurality of sixth movable plates 236122 are disposed at two ends of the sixth support member 23611 along the tangent line of the circle, and the distance between the sixth fixed plate 236121 and the sixth movable plate 236122 is smaller than the distance between the sixth fixed plate 236121 and the sixth movable plate 236122 between adjacent sixth capacitors 23612.
It will be appreciated that, by the arrangement of the sixth supporting member 23611, the plurality of sixth fixed plates 236121 can be disposed on the base plate 1 and relatively fixed to the base plate 1, while by disposing the sixth movable plate 236122 on the mass block 22, the plurality of sixth movable plates 236122 can move relative to the base plate 1 and further move relative to the plurality of sixth fixed plates 236121, if the movement direction of the mass block 22 is not completely in the radial direction, the mass block 22 will generate a tangential component, so that the sixth movable plate 236122 vibrates along the tangential direction of the circle relative to the sixth fixed plate 236121, so that the distance between the sixth movable plate 236122 and the sixth fixed plate 236121 changes, and further, the capacitance of the sixth capacitor 23612 changes, thereby, the alternating signal applied to the fourth capacitor 23412 can be compensated according to the capacitance change of the sixth capacitor 23612, so as to ensure that the force applied by the fourth movable plate 234122 on the mass block 22 can be completely offset from the tangential force applied to the mass block 22, and thus ensure the stable and stationary speed of the mass block 22.
Wherein, since the plurality of sixth fixed plates 236121 and the plurality of sixth movable plates 236122 are disposed at intervals at two ends of the sixth supporting member 23611 along the tangential direction of the circle, the compensating member 2361 forms a comb-shaped capacitor structure, so that the compensating assembly 236 has a larger compensating capacitance and a higher signal-to-noise ratio.
It should be noted that, since the plurality of sixth fixed plates 236121 and the plurality of sixth movable plates 236122 are disposed at intervals at both ends of the sixth support member 23611 along the tangential direction of the circle, and the distance between the sixth fixed plate 236121 and the sixth movable plate 236122 is smaller than the distance between the sixth fixed plate 236121 and the sixth movable plate 236122 between the adjacent sixth capacitors 23612, when the mass block 22 is offset, the compensation value can be accurately obtained by using the sixth capacitors 23612 as a whole.
As shown in fig. 3, in some embodiments, the detection module 2 further includes a first limiting member 25 and a second limiting member 26, where the first limiting member 25 is disposed on the substrate 1, the second limiting member 26 is disposed on the substrate 1, two ends of the first limiting member 25 and the second limiting member 26 are provided with a plurality of protrusions 27, two ends of the mass block 22 along a circular tangential direction are provided with a plurality of grooves 28, the protrusions 27 are located in the grooves 28, the protrusions 27 abut against the grooves 28 along the circular tangential direction, and a vibration space is provided between the protrusions 27 and the grooves 28 along a radial direction of the circle.
It can be appreciated that, since the first limiting member 25 and the second limiting member 26 are respectively disposed on the substrate 1, the first limiting member 25 and the second limiting member 26 do not vibrate along with the vibration of the mass block 22, and meanwhile, due to the tangential abutment between the protrusion 27 and the groove 28 along the circle, the mass block 22 cannot vibrate along the tangential direction of the circle, thereby further ensuring the stability of the mass block 22 and making the overall angular velocity detection precision higher.
Through the setting in vibration space, avoided first locating part 25 and second locating part 26 to cause the influence to the radial vibration of quality piece 22, guaranteed the stable detection of whole angular velocity, moreover, because protruding 27 is located recess 28 for quality piece 22 is at radial vibration limited, thereby avoid quality piece 22 at radial vibration amplitude too big, further improved quality piece 22's stability from this, make holistic angular velocity detection precision higher.
It should be noted that the specific types of the first limiting member 25 and the second limiting member 26 may be set according to actual needs, which is not limited.
The size of the vibration space may be set according to actual needs, which is not limited.
The embodiment of the disclosure also provides a micromechanical gyroscope, which comprises the angular velocity detection device.
It can be understood that when the driving detection unit 23 drives the mass block 22 to vibrate along the radial direction of the circle, based on the principle of coriolis force, a force along the tangential direction of the circle is generated on the mass block 22 vibrating along the radial direction of the circle when the whole has angular velocity input, so that the mass block 22 vibrates along the tangential direction of the circle while vibrating along the radial direction, and further, the amplitude of the vibration of the mass block 22 along the tangential direction of the circle is detected by the driving detection unit 23, so that the whole angular velocity is obtained, thereby realizing the detection of the angular velocity and meeting the use requirement.
The middle part of the cooperating beam 24 is connected with the inner sides of the mass blocks 22, so that a star structure is formed at the center positions of the mass blocks 22 after the cooperating beams 24 of the plurality of detection modules 2 are connected, and the cooperating beams 24 comprise a plurality of elastic strips which are sequentially connected end to end, and the elastic strips are arranged along the radial direction of a circle, so that when the movement between the adjacent or opposite mass blocks 22 is asymmetric, the star structure can apply pushing force or pulling force on the adjacent or opposite mass blocks 22 by utilizing the star structure and the elasticity of the star structure, thereby enabling the movement of the adjacent or opposite mass blocks 22 to be more symmetrical, further enabling the mass blocks 22 to reduce the influence of the received thermal stress, enabling the accuracy of the overall diagonal speed detection to be higher, and effectively improving the performance of the micromechanical gyroscope.
Meanwhile, as the plurality of detection modules 2 are centrosymmetric along the center of the circle and the detection modules 2 are axisymmetric along the diameter of the circle, the whole can utilize a differential mode to carry out noise reduction treatment on the detected signals, thereby improving the detection sensitivity, and the weights of the plurality of mass blocks 22 can be uniformly dispersed, so that the stability of the mass blocks 22 on the substrate 1 is improved.
It should be noted that, the micromechanical gyroscope is a gyroscope made by using a Micro-Electro-Mechanical-Systems (MEMS), which is also called a MEMS gyroscope, and the specific type of the micromechanical gyroscope may be set according to actual needs, which is not limited.
In the description of the present disclosure, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Furthermore, in the description of the present disclosure, unless otherwise indicated, the meaning of "a plurality" is two or more.
Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps of the process, and further implementations are included within the scope of the preferred embodiment of the present disclosure in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the embodiments of the present disclosure.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present disclosure. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Although embodiments of the present disclosure have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the present disclosure, and that variations, modifications, alternatives, and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the present disclosure.
Claims (9)
1. An angular velocity detection apparatus, characterized by comprising:
a substrate;
the detection module is a plurality of detection module, and a plurality of detection module is central symmetry along the centre of a circle of circle, just detection module is axisymmetry along the diameter of circle, detection module includes: the mass block, cooperated beam and drive detection unit, the mass block is suspended on the base plate, cooperated beam includes: the elastic strips are arranged along the radial direction of the circle, the elastic strips are connected end to end in sequence, the middle part of the assistant moving beam is connected with the inner side of the mass block, the end parts of the assistant moving beams of the adjacent detection modules are connected, the assistant moving beams of the plurality of detection modules are connected to form a star-shaped structure, the driving detection unit is arranged between the mass block and the base plate, and the driving detection unit is used for driving the mass block to vibrate along the radial direction of the circle and detecting the amplitude of the tangential vibration of the mass block along the circle;
Wherein the drive detection unit includes: the two drive assemblies, two drive assemblies are axisymmetric along the tangent line of circle, drive assemblies includes: first support piece and a plurality of first electric capacity, wherein, first support piece sets up on the base plate, two be provided with first clearance between the first support piece of drive assembly, first electric capacity includes: the first fixed plates are arranged on the first supporting piece, the first movable plates are arranged on the mass block, and a plurality of the first fixed plates and a plurality of the first movable plates are arranged at intervals and uniformly distributed at two ends of the first supporting piece along the tangential direction of the circle;
the drive detection unit further includes: the two first detection components, two first detection components are axisymmetric along the tangent line of circle, first detection component includes: a second support and a plurality of second capacitors, wherein the second support is disposed on the substrate, and the second support is located outside the first support, the second capacitors comprising: the second fixed plates are arranged on the second supporting piece, the second movable plates are arranged on the mass block, and a plurality of second fixed plates and a plurality of second movable plates are arranged at intervals and uniformly distributed at two ends of the second supporting piece along the tangential direction of the circle;
The drive detection unit further includes: the two second detection components, two the second detection components are axisymmetric along the tangent line of circle, the second detection component includes: the two detection pieces, two the detection piece is axisymmetric along the diameter of circle, the detection piece includes: the third support piece and a plurality of third electric capacity, wherein, the third support piece sets up on the base plate, just the third support piece is located drive assembly's outside, two the detection piece the third support piece between be provided with the second clearance, the third electric capacity includes: the third fixed plates are arranged on the third supporting piece, the third movable plates are arranged on the mass block, and the third fixed plates and the third movable plates are arranged at intervals and uniformly distributed at two ends of the third supporting piece along the tangential direction of the circle.
2. The angular velocity detection apparatus according to claim 1, wherein the cooperative beam includes:
two elastic groups, the elastic groups comprising: the detection device comprises a first elastic strip and a second elastic strip, wherein the first elastic strip and the second elastic strip are respectively arranged along the radial direction of a circle, one ends of the first elastic strips of two elastic groups are connected with the inner side of a mass block, one end of the first elastic strip, which is far away from the mass block, is connected with one end of the second elastic strip, and one end of the second elastic strip, which is far away from the first elastic strip, of the detection module is connected.
3. The angular velocity detection apparatus according to claim 1, wherein the detection module further comprises:
the support units are arranged on the substrate, and the mass blocks are arranged on the inner sides of the support units.
4. An angular velocity detection apparatus according to claim 3, wherein the supporting unit includes:
the support column is arranged on the substrate;
the support beam is arranged on the inner side of the support column, the support beam is arranged along the radial direction of the circle, and the mass block is arranged at one end of the support beam far away from the support column;
the frame is arranged at one end of the supporting beam, which is far away from the supporting column, and is arranged along the tangential direction of the circle;
the cantilever beams are arranged on the inner side of the frame, and one ends of the plurality of cantilever arms Liang Yuanli are connected with the mass blocks.
5. The angular velocity detection apparatus according to claim 1, wherein the drive detection unit further includes:
the two balancing components are axisymmetric along the tangent line of the circle, and the balancing components comprise: two balancing pieces, the balancing piece includes: a fourth support and a plurality of fourth capacitors;
The fourth supporting pieces are arranged on the substrate, the fourth supporting pieces are positioned on the outer sides of the third supporting pieces, and a third gap is formed between the fourth supporting pieces of the two balancing pieces;
the fourth capacitor includes: the fourth fixed plate and the fourth movable plate are arranged on the fourth supporting piece, the fourth movable plate is arranged on the mass block, a plurality of fourth fixed plates and a plurality of fourth movable plates are arranged at intervals at two ends of the fourth supporting piece along the tangential direction of the circle, and the distance between the fourth fixed plates and the fourth movable plate is smaller than the distance between the fourth fixed plates and the fourth movable plate between the adjacent fourth capacitors.
6. The angular velocity detection apparatus according to claim 5, wherein the drive detection unit further comprises:
two tuning components, two tuning components are axisymmetric along the tangent line of circle, tuning components includes: two tuning pieces, the tuning pieces comprising: a fifth support and a plurality of fifth capacitors;
the fifth supporting piece is arranged on the substrate, and is positioned between the third supporting piece and the fourth supporting piece, and the fifth supporting pieces of the two tuning pieces are connected;
The fifth capacitor includes: the fifth fixed plates are arranged on the fifth supporting piece, the fifth movable plates are arranged on the mass block, a plurality of the fifth fixed plates and a plurality of the fifth movable plates are arranged at intervals at two ends of the fifth supporting piece along the tangential direction of the circle, and the distance between the fifth fixed plates and the fifth movable plates is smaller than the distance between the fifth fixed plates and the fifth movable plates between the adjacent fifth capacitors.
7. The angular velocity detection apparatus according to claim 6, wherein the drive detection unit further comprises:
two compensation components, two the compensation components are axisymmetric along the tangent line of circle, the compensation component includes: two compensators, the compensators include: a sixth support and a plurality of sixth capacitors;
wherein the sixth support is arranged on the substrate, and the compensator is close to the edge of the mass block;
the sixth capacitance includes: the device comprises a mass block, a plurality of fixed plates and a plurality of movable plates, wherein the fixed plates are arranged on a first supporting piece, the movable plates are arranged on the mass block, the fixed plates and the movable plates are arranged at intervals at two ends of the first supporting piece along the tangential direction of a circle, and the distance between the fixed plates and the movable plates is smaller than the distance between the fixed plates and the movable plates between adjacent capacitors.
8. The angular velocity detection apparatus according to claim 5, wherein the detection module further comprises:
the first limiting piece is arranged on the substrate;
the second limiting piece is arranged on the substrate;
the mass block is provided with a plurality of grooves along the tangential two ends of the circle, the protrusions are positioned in the grooves, the protrusions are abutted with the grooves along the tangential direction of the circle, and vibration spaces are arranged between the protrusions and the grooves along the radial direction of the circle.
9. A micromechanical gyroscope, comprising: an angular velocity detection apparatus according to any one of claims 1 to 8.
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