CN115542544A - Near-to-eye display technology, structure and implementation scheme based on MEMS technology - Google Patents

Near-to-eye display technology, structure and implementation scheme based on MEMS technology Download PDF

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Publication number
CN115542544A
CN115542544A CN202211139254.2A CN202211139254A CN115542544A CN 115542544 A CN115542544 A CN 115542544A CN 202211139254 A CN202211139254 A CN 202211139254A CN 115542544 A CN115542544 A CN 115542544A
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fabry
eye display
light source
mems
lens
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杨美慧
徐海桐
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/0101Head-up displays characterised by optical features
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/017Head mounted
    • G02B27/0172Head mounted characterised by optical features
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/0101Head-up displays characterised by optical features
    • G02B2027/0118Head-up displays characterised by optical features comprising devices for improving the contrast of the display / brillance control visibility
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/0101Head-up displays characterised by optical features
    • G02B2027/0123Head-up displays characterised by optical features comprising devices increasing the field of view
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/0101Head-up displays characterised by optical features
    • G02B2027/0147Head-up displays characterised by optical features comprising a device modifying the resolution of the displayed image
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/017Head mounted
    • G02B2027/0178Eyeglass type

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)

Abstract

The invention belongs to the technical field of near-eye display, in particular to a near-eye display technology, a near-eye display structure and an implementation scheme based on an MEMS (micro electro mechanical system) technology, and provides a plurality of single pixel point structures with certain transparency aiming at the problems of low resolution, high price, large volume and optical phase difference of the existing near-eye display scheme, wherein each single pixel point structure comprises a transparent substrate, a light source, a collimating micro lens and an MEMS Fabry-Perot cavity structure, an imaging area in each single pixel point structure emits parallel light beams emitted at a certain angle, the display brightness of the light source on each pixel point can be controlled through a circuit, and the wavelength lambda of the emitted light beams is controlled by the single pixel point through the circuit. The present invention has significant advantages in resolution, price, volume, weight, and optical phase.

Description

Near-to-eye display technology, structure and implementation scheme based on MEMS technology
Technical Field
The invention relates to the technical field of near-eye display, in particular to a near-eye display technology, a near-eye display structure and a near-eye display implementation scheme based on an MEMS technology.
Background
AR (augmented reality)/VR (virtual display) is a wearable smart device that delivers virtual image and text information to a user in some optical way and can interact; with the development of information network technology, AR/VR technology has gradually gone from academic to marketable commercial transition as a core of combining virtual world and real world.
At present, the realization schemes of technologies such as AR, VR and the like need to be provided with an additional micro display screen independently, and then images of the micro display screen are projected into human eyes through various optical schemes; the near-to-eye display scheme using a micro display screen has the following drawbacks:
1. the resolution is low: the imaging resolution is completely dependent on the resolution of the microdisplay itself. At present, the commercialized miniature display screen can achieve 2k resolution at most, and the mass production difficulty for further reducing the pixel size is very high.
2. The price is high: in near-eye display devices, the micro display screen and the optical elements often occupy over half of the manufacturing cost, so that the price of the products is still high.
3. Heavy, bulky: the miniature display screen and optical elements in conventional near-eye display devices result in devices that are still bulky and heavy.
4. Having an optical phase difference: various optical phase differences inevitably occur in the process of carrying out image transmission on the miniature display screen image by the optical element, and extra algorithms are often needed for image quality correction in order to ensure the real image effect.
Disclosure of Invention
Based on the technical problems of low resolution, high price, large volume and optical phase difference of the existing near-eye display scheme, the invention provides a near-eye display technology, a near-eye display structure and an implementation scheme based on an MEMS (micro electro mechanical system) technology.
The invention provides a near-to-eye display technology, a near-to-eye display structure and a near-to-eye display implementation scheme based on an MEMS (micro electro mechanical system) technology.
Preferably, the transparent substrate is a bendable plastic, in which case the display screen of the present invention can be placed on the curved lens surface; the transparent substrate may also be a rigid material such as inflexible rigid plastic, glass, etc., in which case the transparent substrate is a lens of the near-to-eye display device.
Preferably, the light source is a self-luminous structure, typically a white LED, with a wavelength range covering the spectral band of visible light (about 400nm-780 nm), and can be OLED, miniLED, micro LED, or other self-luminous structures with different sizes and properties according to specific applications, and the brightness of the light source is controlled by adjusting current or voltage.
Preferably, the collimating micro-lens is located above the light source and is a micro-sized lens with focusing function.
Preferably, the MEMS fabry-perot cavity structure is located above the light source and the collimating micro-lens, and the MEMS fabry-perot cavity structure constitutes a fabry-perot cavity structure by using a phase difference formed by back-and-forth reflection of light between two mirrors, so that a light wave λ satisfying the following formula can form an interference effect outside the cavity to transmit.
mλ=2nhcos(α)
Wherein m is the order, n is the refractive index of the Fabry-Perot cavity, if the air Fabry-Perot cavity is used, n =1, h is the interval thickness of the Fabry-Perot cavity, and alpha is the incident angle of the light beam entering the Fabry-Perot cavity; the purpose of changing the emergent wavelength can be realized by controlling the interval thickness h of the Fabry-Perot cavity or the refractive index n of the intermediate medium, the Fabry-Perot cavity with the air interval is easy to manufacture, and the control of the thickness h of the Fabry-Perot cavity can be completed by the electrostatic driving effect of an actuator in the MEMS. Metal electrodes are respectively plated on the upper part and the lower part of the Fabry-Perot cavity in the modes of etching, film plating and the like, and the voltage applied in the cavity can be controlled to h.
Preferably, the function and principle of the single-pixel structure in the near-eye display scheme are as follows: the collimating lens is placed at a position L3 away from the light source, the focal length is f1, an image plane B of the light source is focused on a virtual image B 'at the position L1 in front of the eyeball, and B' is imaged in human eyes through the eyeball; the distance between the virtual image plane and the eyeball L1 position can be optimized according to the following formula:
1/L3-1/(L1-L4)=1/f1
1/L1+1/L2=1/f2
wherein L2 is the image distance from the image surface in the eye to the crystalline lens, L4 is the distance from the lens surface to the eyeball, and f2 is the focal length of the crystalline lens of the human eye.
For making the pixel of different positions can image at eyeball relevant position, need to make every pixel exit angle according to its position decision of skew center, the angle of the nth pixel apart from the center can be expressed as:
Β(n)=arctan(nxD/L4)
by using the method, the field angle of the system is twice of the corresponding emergent angle p of the marginal pixel point
FOV=2Xp。
Preferably, the light source emits light beam angles according to the following two schemes:
s1, selecting a flexible transparent material as a substrate material, such as plastic, PET (polyethylene terephthalate) and the like, wherein in the case of ensuring that a light source of each pixel forms an image in a human eye, the flexible screen needs to be attached to a transparent glass lens with a radius of R = L4, and then each pixel point is attached to a surface structure to form a structure which is respectively vertical to the center of a crystalline lens without using other complex elements;
s2, a reflecting plate with a parallel structure is placed at the front end of the transparent screen, the reflecting plate is made of transparent materials such as glass, reflecting films with different angles are plated at the positions of every interval D inside the reflecting plate, and the emergent parallel light beams are changed into parallel light beams with different angles after passing through the reflecting plate.
Preferably, the single pixel point structure is set as a square area with a side length of D, and the single pixel point structure is distributed on the surface of the spectacle lens in a parallel structure to form a two-dimensional (x, y) area array display structure, the center of each pixel point structure is formed by a square area with a side length of D, the area is an opaque imaging area (the area contains a circuit structure, a supporting structure, a light source structure and a series of micro optical structures required by display), and the area outside the area is a transmission area without any element shielding; when external light penetrates through the structure, the imaging area can shield part of the light, and finally the effect of transparency T = D ^2/D ^2 can be realized; the transparency of the display screen can be selectively adjusted by adjusting the size of the imaging area of 8230d 2 relative to the size of the pixel D2
Compared with the prior art, the invention provides a near-to-eye display technology, structure and implementation scheme based on MEMS technology, and has the following beneficial effects:
1) The technology adopts a structure of a spectacle lens, namely a display screen, and completely avoids the problem that all the current schemes need to use a miniature display screen. The current micro display screen can only achieve the highest resolution of 2k, and the current micro screen is still high in price and large in size and resolution limitation due to the problem of mass transfer in the process of mass production of the micro screen. So that currently all near-eye display devices can only achieve a resolution of 2 k. Although the scheme adopted by the invention needs to use the LED, the LED does not need to be infinitely reduced in size due to the nature of directly imaging on the screen, so that the scheme has multiple advantages in price, mass production feasibility and resolution.
2) The technology avoids the process of using optical elements such as optical waveguides and prisms to carry out secondary screen projection on the micro screen, directly uses the screen as an original phase surface, has no problem of optical phase difference completely, and avoids the step that software is required to correct the phase difference in the traditional display equipment.
3) The volume and weight of the whole glasses are greatly optimized because the optical elements and the micro-screen are not arranged.
4) The micro display screen and the optical element occupy about half of the whole cost, and the price of the glasses can be greatly reduced.
Drawings
Fig. 1 is a schematic diagram of a near-eye imaging scheme of a near-eye display technology, a near-eye display structure and a near-eye imaging implementation scheme based on an MEMS technology according to the present invention;
FIG. 2 is a schematic top view of a single pixel structure for a near-eye display technology, structure and implementation of MEMS technology in accordance with the present invention;
FIG. 3 is a schematic diagram of a side view structure of a single pixel structure for a near-to-eye display technology, structure and implementation based on MEMS technology according to the present invention;
FIG. 4 is a schematic diagram of MEMS Fabry-Perot cavity structure control color output based on MEMS technology near-eye display technology, structure and implementation scheme provided by the present invention;
fig. 5 is a schematic diagram of a pixel structure near-eye imaging principle of a near-eye display technology, structure and implementation scheme based on the MEMS technology according to the present invention;
FIG. 6 is a schematic view of beam angles for a near-to-eye display technique, structure and implementation scheme based on MEMS technique according to the present invention;
FIG. 7 is a schematic diagram of beam emission angle control according to a first embodiment of the present invention, a near-eye display technique, structure and implementation thereof based on MEMS technique;
FIG. 8 is a schematic diagram of beam emission angle control according to a second embodiment of the present invention for a near-eye display technology, structure and implementation based on MEMS technology;
FIG. 9 is a schematic diagram of a screen and pixel structure of a near-eye display technology, structure and implementation scheme based on MEMS technology according to the present invention;
fig. 10 is a schematic diagram of a final structure of a display device based on a near-eye display technology, a structure and an implementation scheme of the MEMS technology.
In the figure: 1. a transparent substrate; 2. MEMS Fabry-Perot cavity structure; 3. a collimating microlens; 4. a light source.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
Referring to fig. 1-10, a near-to-eye display technology, structure and implementation scheme based on an MEMS technology includes a plurality of single pixel structures with a certain transparency, each single pixel structure includes a transparent substrate 1, a light source 4, a collimating microlens 3, and an MEMS fabry-perot cavity structure 2, an imaging region in each single pixel structure emits a parallel light beam emitted at a certain angle, and the display brightness of the light source on the pixel can be controlled by a circuit, and the wavelength λ of the emitted light beam is controlled by the single pixel through the circuit.
Further, the transparent substrate 1 is a flexible plastic, in which case the display screen of the present invention can be placed on the surface of the curved lens; the transparent substrate 1 may also be a rigid material such as inflexible rigid plastic, glass, etc., in which case the transparent substrate 1 is a lens of a near-to-eye display device.
Further, the light source 4 is a self-luminous structure, typically a white LED, whose wavelength range covers the spectral band of visible light (about 400nm-780 nm), and can be a self-luminous structure with different sizes and properties such as OLED, miniLED, and micro LED according to specific applications, and the brightness of the light source 4 is controlled by adjusting current or voltage.
Further, the collimating micro-lens 3 is located above the light source 4, and is a micro-sized lens with focusing function.
Further, the MEMS Fabry-Perot cavity structure 2 is located above the light source 4 and the collimating micro-lens 3, the MEMS Fabry-Perot cavity structure 2 forms a Fabry-Perot cavity structure by utilizing a phase difference formed by back-and-forth reflection of light between the two reflectors, so that light waves lambda meeting the following formula can form an interference effect outside the cavity and penetrate through the interference effect.
mλ=2nhcos(α)
Wherein m is the order, n is the refractive index of the Fabry-Perot cavity, if the air Fabry-Perot cavity is used, n =1, h is the interval thickness of the Fabry-Perot cavity, and alpha is the incident angle of the light beam entering the Fabry-Perot cavity; the purpose of changing the emergent wavelength can be realized by controlling the interval thickness h of the Fabry-Perot cavity or the refractive index n of the intermediate medium, the Fabry-Perot cavity with the air interval is easy to manufacture, and the control of the thickness h of the Fabry-Perot cavity can be completed by the electrostatic driving effect of an actuator in the MEMS. Metal electrodes are respectively plated on the upper part and the lower part of the Fabry-Perot cavity in the modes of etching, film plating and the like, and the voltage applied in the cavity can be controlled to h.
Further, the function and principle of the pixel structure with the single-pixel structure in the near-eye display scheme are as follows: the collimating lens is placed at a position L3 away from the light source, the focal length is f1, an image plane B of the light source is focused on a virtual image B 'at the position L1 in front of the eyeball, and B' is imaged in human eyes through the eyeball; the distance between the virtual image plane and the eyeball L1 can be optimized according to the following formula:
1/L3-1/(L1-L4)=1/f1
1/L1+1/L2=1/f2
wherein L2 is the image distance from the image surface in the eye to the crystalline lens, L4 is the distance from the lens surface to the eyeball, and f2 is the focal length of the crystalline lens of the human eye.
For making the pixel of different positions can image in eyeball relevant position, need to make every pixel outgoing angle decide according to its position of skew center, the angle of the nth pixel apart from the center can be expressed as:
Β(n)=arctan(nxD/L4)
by using the method, the field angle of the system is twice of the corresponding emergent angle p of the marginal pixel point
FOV=2Xp。
Furthermore, the light source (4) can emit light beams at the following two angles:
s1, selecting a flexible transparent material as a substrate material, such as plastic, PET and the like, in this case, in order to ensure that a light source of each pixel forms an image on a human eye, the flexible screen needs to be attached to a transparent glass lens with a radius of R = L4, and then each pixel point is attached to a surface structure to form a structure which is respectively vertical to the center of a crystalline lens without using other complex elements;
s2, a reflecting plate with a parallel structure is placed at the front end of the transparent screen, the reflecting plate is made of transparent materials such as glass, reflecting films with different angles are plated at the positions of every interval D inside the reflecting plate, and the emergent parallel light beams are changed into parallel light beams with different angles after passing through the reflecting plate.
Furthermore, the single pixel point structure is set as a square area with the side length of D, the single pixel point structure is distributed on the surface of the spectacle lens in a parallel structure to form a two-dimensional (x, y) area array display structure, the center of each pixel point structure is formed by a square area with the side length of D, the area is an opaque imaging area (the area contains a circuit structure, a supporting structure, a light source structure and a series of micro optical structures required by display), the area outside the area is a transmission area, and no element is shielded; when external light penetrates through the structure, the imaging area can shield part of the light, and the effect of transparency T = D ^2/D ^2 can be finally realized; the transparency of the display screen can be selectively adjusted by adjusting the size of the < lambda > 8230 </lambda > 2 relative to the pixel size D < lambda > 2 of the imaging area.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered as the technical solutions and the inventive concepts of the present invention within the technical scope of the present invention.

Claims (8)

1. The near-eye display technology, structure and implementation scheme based on the MEMS technology comprise a plurality of single pixel point structures with certain transparency, and are characterized in that each single pixel point structure comprises a transparent substrate (1), a light source (4), a collimating micro lens (3) and an MEMS Fabry-Perot cavity structure (2), an imaging area in each single pixel point structure emits parallel light beams emitted at a certain angle, the display brightness of the light source on each pixel point can be controlled through a circuit, and the wavelength lambda of the emitted light beams is controlled through the circuit by the single pixel point.
2. A MEMS technology based near-to-eye display technology, structure and implementation according to claim 1, characterized in that the transparent substrate (1) is a bendable plastic, in which case the inventive display screen can be placed on a curved lens surface; the transparent substrate (1) may also be a rigid material such as inflexible rigid plastic, glass, etc., in which case the transparent substrate (1) is a lens of a near-to-eye display device.
3. A MEMS-based near-eye display technology, structure and implementation according to claim 2, wherein the light source (4) is a self-luminous structure, typically a white LED, with a wavelength range covering the visible spectrum (about 400nm-780 nm), and depending on the specific application, can be OLED, miniLED, micro LED, or other self-luminous structures with different size properties, and the brightness of the light source (4) is controlled by adjusting the current or voltage.
4. A near-to-eye display technology, structure and implementation solution based on MEMS technology as claimed in claim 3, characterized in that the collimating micro-lens (3) is located above the light source (4) and is a micro-sized lens with focusing function.
5. A near-eye display technology, structure and implementation scheme based on MEMS technology according to claim 4 is characterized in that the MEMS Fabry-Perot cavity structure (2) is located above the light source (4) and the collimating micro-lens (3), the MEMS Fabry-Perot cavity structure (2) forms a Fabry-Perot cavity structure by using the phase difference formed by the back and forth reflection of light between two reflectors, so that the light wave λ satisfying the following formula can form an interference effect outside the cavity to transmit.
mλ=2nhcos(α)
Wherein m is the order, n is the refractive index of the Fabry-Perot cavity, if the air Fabry-Perot cavity is used, n =1, h is the interval thickness of the Fabry-Perot cavity, and alpha is the incident angle of the light beam entering the Fabry-Perot cavity; the purpose of changing the emergent wavelength can be realized by controlling the interval thickness h of the Fabry-Perot cavity or the refractive index n of the intermediate medium, the Fabry-Perot cavity with the air interval is easy to manufacture, and the control of the thickness h of the Fabry-Perot cavity can be completed by the electrostatic driving effect of an actuator in the MEMS. The upper part and the lower part of the Fabry-Perot cavity are respectively plated with metal electrodes by means of etching, film plating and the like, and the voltage applied in the cavity can be controlled to h.
6. A near-to-eye display technology, structure and implementation scheme based on MEMS technology as claimed in claim 5, wherein the single pixel structure functions and principle in the near-to-eye display scheme as follows: the collimating lens is placed at a position L3 away from the light source, the focal length is f1, an image plane B of the light source is focused on a virtual image B 'at the position L1 in front of the eyeball, and B' is imaged in the human eye through the eyeball; the distance between the virtual image plane and the eyeball L1 can be optimized according to the following formula:
1/L3-1/(L1-L4)=1/f1
1/L1+1/L2=1/f2
wherein L2 is the image distance from the image surface in the eye to the crystalline lens, L4 is the distance from the lens surface to the eyeball, and f2 is the focal length of the crystalline lens of the human eye.
For making the pixel of different positions can image in eyeball relevant position, need to make every pixel outgoing angle decide according to its position of skew center, the angle of the nth pixel apart from the center can be expressed as:
Β(n)=arctan(n x D/L4)
by using the method, the field angle of the system is twice of the corresponding emergent angle p of the marginal pixel point
FOV=2Xp。
7. A near-to-eye display technology, structure and implementation solution based on MEMS technology as claimed in claim 6, wherein the light source (4) emits light beam angles according to the following two schemes:
s1, selecting a flexible transparent material as a substrate material, such as plastic, PET and the like, in this case, in order to ensure that a light source of each pixel forms an image on a human eye, the flexible screen needs to be attached to a transparent glass lens with a radius of R = L4, and then each pixel point is attached to a surface structure to form a structure which is respectively vertical to the center of a crystalline lens without using other complex elements;
s2, a reflecting plate with a parallel structure is placed at the front end of the transparent screen, the reflecting plate is made of transparent materials such as glass, reflecting films with different angles are plated at the positions of every interval D inside the reflecting plate, and the emergent parallel light beams are changed into parallel light beams with different angles after passing through the reflecting plate.
8. The near-to-eye display technology, structure and implementation scheme based on the MEMS technology as claimed in claim 7, wherein the single pixel structure is set as a square area with side length D, which is distributed on the surface of the glasses lens in a parallel structure to form a two-dimensional (x, y) area display structure, the center of each pixel structure is formed by a square area with side length D, which is an opaque imaging area (the area contains a circuit structure, a supporting structure, a light source structure and a series of micro optical structures required for display), and the area outside the area is a transparent area without any element shielding; when external light penetrates through the structure, the imaging area can shield part of the light, and the effect of transparency T = D ^2/D ^2 can be finally realized; the transparency of the display screen can be selectively adjusted by adjusting the size of the < lambda > 8230 </lambda > 2 relative to the pixel size D < lambda > 2 of the imaging area.
CN202211139254.2A 2022-09-19 2022-09-19 Near-to-eye display technology, structure and implementation scheme based on MEMS technology Withdrawn CN115542544A (en)

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