CN115267966A - Easy-to-manufacture double-layer waveguide platform for biological detection - Google Patents
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Abstract
The utility model provides a double-deck waveguide platform that is used for biological detection's easy manufacturing, relate to biological entity detection technical field, be formed with the double-deck waveguide structure that two kinds of different materials are constituteed in the double-deck waveguide platform, double-deck waveguide structure is as light restriction structure, double-deck waveguide platform still is formed with the nanopore structure simultaneously, the nanopore structure is as biological detection point, cooperate each other through double-deck waveguide structure and nanopore structure, when placing the analyte in the biological detection point and detecting, light is restricted in the double-deck waveguide platform except that the position of waveguide is in order to realize weakening the fluorescence background of testing environment in the biological detection point, increase the interact between light and the analyte simultaneously. Compared with a slit waveguide, the double-layer waveguide structure and the nanopore structure are easier to manufacture, and can limit a field in a surrounding medium instead of the inside of a waveguide material, so that the detection contribution of each light wave to a single analyte is ensured, and the detection sensitivity of the biosensor is ensured.
Description
Technical Field
The invention relates to the technical field of biological entity detection, in particular to a double-layer waveguide platform which is used for biological detection and easy to manufacture.
Background
A biosensor (biosensor) is an instrument that is sensitive to a biological substance and converts its concentration into an electrical signal for detection. Is an analysis tool or system composed of immobilized biological sensitive material as recognition element (including enzyme, antibody, antigen, microbe, cell, tissue, nucleic acid, etc.), proper physicochemical transducer (such as oxygen electrode, photosensitive tube, field effect tube, piezoelectric crystal, etc.) and signal amplification device.
Biosensors may employ integrated photonics technology to help increase yield and save significant time and resources by manufacturing products that are compact, scalable, and reliable (repeatable). Applications of such biosensors are useful for cell counting, colorimetric, spectroscopic, and fluorescent detection.
An optical waveguide is a dielectric device for guiding light waves to propagate therein, and is a guiding structure formed by an optical transparent medium (such as quartz glass) and used for transmitting electromagnetic waves at optical frequencies, and is also called a dielectric optical waveguide. There are two main categories of optical waveguides: one type is an integrated optical waveguide, including planar (thin film) dielectric optical waveguides and strip dielectric optical waveguides. The transmission principle of the optical waveguide is that on a medium interface with different refractive indexes, the total reflection phenomenon of electromagnetic waves leads the optical waves to be limited in the waveguide and propagate in a limited area around the waveguide. For example, thin film waveguides and strip waveguides are mainly used to fabricate active and passive optical waveguide components, such as lasers, modulators, and optical couplers. They are suitable for making integrated optical circuits (i.e. optical integrated components) of planar structure using semiconductor thin film processes.
When the existing biosensor is used for detecting biological particles, an optical waveguide is also commonly used as an optoelectronic integrated component, and a portable biochip using the optical waveguide as an excitation mode is manufactured by using the property that the optical waveguide can limit the propagation of light waves in a limited area. For example, CN210665507U is a high-throughput optical waveguide biosensor chip, which is a proof of the combination of optical waveguide and biosensor.
It is well known in the field of biological detection that integrated optical waveguides can be used to provide miniaturized and reasonably priced detection systems. For the application scenario of optical waveguides involving field intensity interaction between the light and the analyte surface, locating the size of the detection volume has a certain effect on suppressing the fluorescence noise in the detection environment, and it is a common practice to integrate the detection system in as small a floor space as possible. Furthermore, increasing the waveguide length can increase the light-analyte interaction length, thereby achieving higher signal power, which is both convenient and cost effective.
In fig. 1, the (a) stripe waveguide cross-sectional geometry, (b) fundamental TE mode distribution, (c) fundamental TM mode distribution, respectively, are shown, showing the cross-sectional geometry of a rectangular waveguide and the mode distributions of the fundamental TE and TM modes of a single mode waveguide, such a strip waveguide well confines the mode distributions to the interior of the waveguide medium, not the structured surface. Therefore, the excitation power of the light-analyte surface interaction is also limited, since the evanescent field of the optical mode from the edge to the surrounding medium decays exponentially, extending only 80 to 200nm, depending on the material.
To increase the excitation power, a well-known structure known as a slot waveguide has been used to confine the field in the surrounding medium, rather than inside the waveguide. Based on this, there is also a slit waveguide in the optical waveguide technology, the principle of which is to achieve considerable field confinement in the medium, the gap must be as narrow as 10s nm, which is not achievable by ordinary wafer-level photonic lithography tools, and therefore, the fabrication of this structure is difficult.
In addition, one of the challenges of single particle detection is the overlap of signals from multiple analytes or global background. As shown in fig. 1, a rectangular waveguide can separate signals from multiple analytes by locating a field near the waveguide, however, since the same waveguide can be freely filled with multiple analytes along the direction of the propagation axis of light, the excitation power between the analytes is mutually limited, and the waveguide is difficult to ensure that the detection contribution of only one analyte is detected at a time, which inevitably affects the sensitivity and efficiency of detection.
Therefore, in view of the above problems, the present invention provides an easy-to-manufacture double-layer waveguide platform for biological detection, which is difficult to manufacture slit waveguides and has disadvantages in the conventional method for detecting biological particles by using rectangular waveguides.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide an easy-to-manufacture double-layer waveguide platform for biological detection, and the specific scheme is as follows:
an easily manufactured double-layer waveguide platform for biological detection is characterized in that a double-layer waveguide structure composed of two different materials is formed in the double-layer waveguide platform and serves as a light limiting structure, a nanopore structure located above the double-layer waveguide structure is formed in the double-layer waveguide platform at the same time and serves as a biological detection point, when an analyte is placed in the biological detection point to be detected through the mutual matching of the double-layer waveguide structure and the nanopore structure, light is limited in the double-layer waveguide platform except for a waveguide to weaken the fluorescence background of a detection environment in the biological detection point, and interaction between the light and the analyte is enhanced at the same time.
Further, the double-layer waveguide platform sequentially comprises a top cladding layer, a first waveguide layer, a second waveguide layer and a bottom cladding layer;
the first waveguide layer and the second waveguide layer form the double-layer waveguide structure, the refractive index of the second waveguide layer is larger than that of the first waveguide layer, and a gap is arranged between the first waveguide layer and the second waveguide layer;
the top cladding is formed with a plurality of nanopores for placement of analyte particles, the plurality of nanopores forming the nanopore structure.
Further, a side surface of the second waveguide layer facing the nanopore is fully or partially exposed in the nanopore, and when the analyte particles are in the nanopore, corresponding side wall surfaces and bottom surfaces of the analyte particles are chemical surfaces with two different surface chemistries, so that the analyte particles are fixed at the bottom of the nanopore.
Further, the double-layer waveguide structure is specifically a double-layer single-film waveguide structure, and when light is partially exposed to the analyte particles, the photoetching shapes of the second waveguide layer and the first waveguide layer, the thicknesses of the second waveguide layer and the first waveguide layer, and the gap width between the second waveguide layer and the first waveguide layer are changed to design field intensity positioning for biological detection.
Further, the material of the first waveguide layer may be SiN, and the material of the second waveguide layer may be Al2O3、AlN、Nb2O5ITO or TiO2And the materials of the top cladding and the bottom cladding can adopt SiO2。
Further, the thickness of the second waveguide layer ranges from 10nm to 200nm.
Furthermore, the thickness of the first waveguide layer is smaller than that of the second waveguide layer, transition structures are formed on one side of the second waveguide layer and one side of the first waveguide layer respectively along opposite directions, and coupling between the first waveguide layer and the second waveguide layer can be achieved by changing the taper of the transition structures and the distance between the first waveguide layer and the second waveguide layer.
Further, the double-layer waveguide platform can be used for biological entity detection of viruses, proteins, antibodies, antigens, proteins and nucleotides.
Compared with the prior art, the invention has the following beneficial effects:
(1) When the double-layer waveguide platform is used for biological detection in a matching mode, the nanopore structure serves as a biological detection point, an analyte is placed in a groove of the nanopore structure, when the double-layer waveguide platform works in the biosensor, after the double-layer waveguide platform is illuminated, the double-layer waveguide structure serves as a light limiting structure, so that part of incident light is normally used for interacting with the analyte in the transmission process, other unnecessary light is limited outside a waveguide material to reduce an unnecessary fluorescence background, and when the part of emergent light is located in the upper nanopore structure, the mode that the analyte is fixed in the nanopore structure can ensure that the space of interaction between light and the analyte is small enough, the interaction between light and the analyte is enhanced, the detection contribution of each time of light waves to a single analyte is ensured, and the detection sensitivity of the biosensor is ensured.
In addition, compared with a slit waveguide, the double-layer waveguide structure and the nano-pore structure are easier to manufacture, and the field can be limited in the surrounding medium instead of the inside of the waveguide junction.
(2) When the incident light propagates in the double-layer waveguide structure, most of the incident light is limited to be propagated at the bottom layer of the first waveguide layer, because the refractive index of the second waveguide layer is larger than that of the first waveguide layer, a gap is arranged between the first waveguide layer and the second waveguide layer, when the other part of the incident light propagates, the limit is larger when the other part of the incident light passes through the second waveguide layer, on the basis that the refractive index of the second waveguide layer is larger, the propagation loss of the light in the second waveguide layer is smaller, the limit of the incident light in the first waveguide layer is smaller, on the basis that the refractive index of the incident light is smaller, the light wave is closer to the second waveguide layer, meanwhile, because the second waveguide layer is used as a single-film waveguide, the internal light part is exposed to the analyte in the nanopore, the double-layer waveguide platform with the two materials can be used for reducing the unnecessary fluorescence background in the positioning detection region, and meanwhile, the interaction of the light and the analyte is obviously enhanced.
(3) The double-layer waveguide structure is specifically used as a double-layer single-film waveguide structure and can be used for positioning and enhancing any light or polarized field, and the geometric parameters of the second waveguide layer determine the propagation loss of the double-layer single-film waveguide structure in the invention compared with the traditional rectangular waveguide, so that the sectional field intensity under different mode distributions is modified by changing the sizes and gaps of the upper and lower waveguide structures, for example, most of basic TM mode fields and analyte detection areas can be positioned to dozens of nanometers on a vertical axis, and the stability of field positioning is improved;
(4) The thickness of the second waveguide layer is determined by the process and the required field strength, and when the thickness of the second waveguide layer is larger (for example, larger than 50 nm), if there is a structure with a smaller bending curvature (for example, the bending curvature is smaller than 100 um), the double-layer waveguide structure will generate larger loss, resulting in light radiating out of the center of the waveguide structure. Thus, a transition structure is required to reduce losses when the second waveguide is thicker. Because the second waveguide layer is thick, light can be easily radiated in a bending mode with the radius smaller than 100um, generally, in order to reduce the propagation loss caused by the bent connection structure as much as possible, the radius of the bent structure is required to be set to be large, but the occupied area of the photonic circuit is in direct proportion to the square of the bending radius, so that the large curvature radius means a large circuit area, thereby causing excessive unnecessary propagation loss, and therefore, the second waveguide layer can be used for coupling and transmitting the light from the first waveguide layer to the second waveguide layer when necessary by arranging the transition structure, and the propagation loss of the light is better reduced. Moreover, the optical transmission efficiency between the first waveguide layer and the second waveguide layer can be changed by changing the taper of the transition structure.
(5) In immobilizing analyte particles in a nanopore in a top cladding, it may be difficult to immobilize the analyte particles because the nanopore and the top cladding sidewall retain the same surface chemistry, whereas immobilization of a biomaterial in a particular region requires a different surface localization characteristic than other surfaces, and thus, by providing a coordination of the nanopore structure and the bilayer waveguide structure, two different surface chemistry chemical surfaces can be provided directly between the bottom surface and the sidewall of the nanopore to selectively immobilize the analyte in a region, which is a relatively simple way of manufacturing a bilayer waveguide structure using two different material waveguides compared to a manufacturing process where only one material is added to the sidewall of the nanopore.
Preferably, the top of the nanopore can be partially covered by disposing a metal material, thereby blocking or reflecting light for in-situ enhancement.
Drawings
FIG. 1 is a schematic diagram of a rectangular waveguide in the background of the invention;
FIG. 2 is a schematic illustration of a first dual-layer waveguide platform in an embodiment of the invention;
FIG. 3 is a schematic illustration of a second dual-layer waveguide platform in an embodiment of the invention;
FIG. 4 is a schematic illustration of a third dual-layer waveguide platform in an embodiment of the invention;
FIG. 5 Al with a thickness of 100nm2O3A plot of bending loss versus bending radius for the layer;
fig. 6 is a display diagram of a transition structure in an embodiment of the invention.
Detailed Description
The present invention will be described in further detail with reference to examples and drawings, but the present invention is not limited to these examples.
In the prior art, an optical waveguide is a guiding structure composed of an optical transparent medium (such as quartz glass) for transmitting optical frequency electromagnetic waves, and on a medium interface with different refractive indexes, the total reflection phenomenon of the electromagnetic waves enables the optical waves to be limited in the waveguide and a limited area around the waveguide for propagation. Different types of optical waveguides are made of different materials, such as lithium niobate (LiNbO 3), group iii-v semiconductor compounds, silicon dioxide (SiO 2), SOI (Silicon-on-Insulator), polymers (Polymer), and glass, which are commonly used in planar optical waveguides. In the planar optical waveguide, for example, an SOI waveguide is fabricated on an SOI substrate, the materials of the bottom, the lower cladding, the core layer, and the upper cladding are Si, siO2, si, and air, respectively, and the waveguide structure is ridge-shaped. The visible light waveguide is a multilayer structure.
As we have introduced in the background, the field strength pattern of the slit waveguide has been used in raman spectroscopy-based devices and refractive non-standard quantity sensors, however, due to the difficult nature of slit waveguides, it does not offer the advantage of rapid, mass production in the field of biosensors.
In this regard, the present invention provides an easily fabricated double-layered waveguide platform for biological assays, which can be used for biological entity assays, including viral, protein, antibody, antigen, protein, nucleotide assays. With the double-layer waveguide platform, detection methods such as fluorescence and raman spectroscopy, refractometry, and colorimetry can be used.
The rectangular waveguide of the prior art confines the mode distribution to the interior of the waveguide medium, rather than to the structured surface, and therefore the excitation power of the light-analyte surface interaction is also limited, affecting the sensitivity of detection. While slot waveguides, while useful for confining fields to the surrounding medium, have very high process requirements (e.g., requiring line resolution of less than ten and a few nm). As with slot waveguides, double layer slot waveguides are an attractive structure due to the high non-linear and two-photon absorption properties of silicon, since light can be more confined in the cladding without nonlinear effects (e.g., siO 2), and in the case of other non-TPA waveguide materials (e.g., siN), the fluorescence background can also be created, thus mitigating the unwanted fluorescence background if the light is confined outside of the waveguide material.
Based on the structure, a double-layer waveguide structure composed of two different materials is formed in the double-layer waveguide platform, the double-layer waveguide structure is used as a light limiting structure, a nanopore structure is formed in the double-layer waveguide platform, and the nanopore structure is used as a biological detection point.
When the double-layer waveguide platform is used for biological detection in a matched mode, the nanopore structure serves as a biological detection point, an analyte is placed in a groove of the nanopore structure, when the double-layer waveguide platform works in the biosensor, after the double-layer waveguide platform is illuminated, the double-layer waveguide structure serves as a light limiting structure, so that part of incident light except for normal light is used for interacting with the analyte in the transmission process, other unnecessary light is limited in the waveguide structure to reduce an unnecessary fluorescence background, and when the part of emergent light is located in the upper nanopore structure, due to the fact that the analyte is fixed in the nanopore structure, the space of interaction between light and the analyte can be small enough, interaction between the light and the analyte is enhanced through the mutual matching of the double-layer waveguide structure and the nanopore structure, the detection contribution of each light wave to a single analyte is guaranteed, and therefore the detection sensitivity of the biosensor is guaranteed.
In detail, the dual-layer waveguide platform is also a layer structure, and specifically includes a top cladding layer, a first waveguide layer, a second waveguide layer, and a bottom cladding layer in sequence. The first waveguide layer and the second waveguide layer form a double-layer waveguide structure, the refractive index of the second waveguide layer is larger than that of the first waveguide layer, and a gap is arranged between the first waveguide layer and the second waveguide layer. A plurality of nanopores are formed in the top cladding for receiving analyte particles, the plurality of nanopores forming a nanopore structure.
The double-layer waveguide structure is particularly used as a double-layer single-film waveguide structure and can be used for positioning and enhancing any light or polarization field, when incident light propagates in the double-layer waveguide structure, most of the incident light can be limited to propagate at the bottom layer of the first waveguide layer, because the refractive index of the second waveguide layer is larger than that of the first waveguide layer, a gap is arranged between the second waveguide layer and the first waveguide layer, the other part of the incident light is limited to be larger when passing through the second waveguide layer when propagating, on the basis of larger refractive index, the propagation loss of the light in the second waveguide layer is smaller, on the basis of smaller refractive index, the limit of the incident light in the first waveguide layer is smaller, and on the basis of smaller refractive index, the light wave is closer to the second waveguide layer.
Meanwhile, the side of the second waveguide layer facing the nanopore is fully or partially exposed in the nanopore, and when the analyte particles are in the nanopore, the corresponding side wall surface and bottom surface of the analyte particles are chemical surfaces with two different surface chemistries. Because the second waveguide layer acts as a single film waveguide, the internal light portion is exposed to the analyte in each nanopore in the nanopore structure, which in combination enables a dual layer waveguide platform with two materials to be used to reduce the unwanted fluorescent background in the localized detection zone, while enabling the light-analyte interaction to be significantly enhanced.
In the prior art, the formation of the nanopore is achieved through an etching process, however, for the small-sized nanopore, the aspect ratio of the etched metal during the preparation process has a limitation. To reduce manufacturing difficulties, the size of the nanopore may be increased or the thickness of the metal layer may be reduced. Thus, larger size nanopores increase the light-analyte interaction volume, while the metal layer is thinner near the waveguide core layer. However, since the propagation loss increases due to the presence of the metal layer in the vicinity, the size of the nanopore needs to be appropriate. It should be noted that the design of the multiple spaced-apart nanopores makes the dual-layer waveguide platform resemble a rib waveguide structure, which reduces propagation loss, and reduces scattering of the sidewalls because the mode near the etched sidewalls is less light-confining.
In immobilizing analyte particles in nanopores in the top cladding, it may be difficult to immobilize analyte particles because the nanopores retain the same surface chemistry as the top cladding sidewalls, whereas immobilization of biomaterials in specific areas requires different surface localization characteristics than other surfaces, so by providing the interaction of the nanopore structure and the bilayer waveguide structure, two chemical surfaces of different surface chemistry can be provided directly between the bottom surface and the sidewalls of the nanopore, so as to immobilize analytes well in the nanopores.
When the light is partially exposed to the analyte particles, the photoetching shapes on the second waveguide layer and the first waveguide layer are changed by etching and deposition, and the field intensity positioning for biological detection is designed by changing the thicknesses of the second waveguide layer and the first waveguide layer and the width of a gap between the second waveguide layer and the first waveguide layer.
The material of the second waveguide layer can be Al2O3、AlN、Nb2O5ITO or TiO2However, the present invention is not limited to these materials. The first waveguide layer can be made of SiN, the invention is not limited, the first waveguide layer and the second waveguide layer can be used as core layers of the double-layer waveguide platform, and the top cladding layer and the bottom cladding layer can be made of SiO2And both act as the film layer of the dual-layer waveguide platform.
The thickness range of the second waveguide layer is 10nm-200nm, and through optimization experiments, the thickness of the second waveguide layer is larger than 50nm, and the thickness of the first waveguide layer is smaller than that of the second waveguide layer.
In this embodiment, the dual-layer waveguide platform has three different forms according to the difference of the thickness and the width of the second waveguide layer and the first waveguide layer, and each dual-layer waveguide platform respectively shows (a) the cross sections of the first waveguide layer and the second waveguide layer which are made of different materials; (b) A bilayer waveguide platform cross-section with a nanopore for detection of biological entities (c) a cross-section of a substantially TE mode distribution (d) a cross-section of a substantially TM mode distribution. See in particular fig. 2, fig. 3, fig. 4. In the figure, material 1 corresponds to the first waveguide layer and material 2 corresponds to the second waveguide layer. It should be noted that fig. 2 also shows (e) the cross section of the light that may be deflected and radiated out of the central waveguide structure when there is a small radius of curvature, so that the transition structure shown in fig. 6 needs to be supplemented.
The geometrical parameters of the second waveguide layer determine the propagation loss of the double-layer single-film waveguide structure in the invention compared with the traditional rectangular waveguide, so that the sectional field intensity under different mode distributions is modified by changing the sizes and gaps of the upper and lower waveguide structures (namely the first waveguide layer and the second waveguide layer), for example, most of basic TM mode fields and analyte detection regions can be positioned to dozens of nanometers on a vertical axis, and the stability of field positioning is improved.
As can be seen from FIGS. 2-4, the double layer waveguide structure with two materials allows for a significant enhancement of the interaction of light with the analyte by adjusting the gap width while ensuring that the side of the second waveguide layer facing the nanopore is fully or partially exposed to the nanopore. The range of the gap width is 0-250 nm, the smaller the gap width is, the larger the field intensity in the nano-hole is, but the higher the loss is, so that a balance value can be adjusted under the actual environment to enable the field intensity and the loss to meet the set requirements.
When the thickness of the second waveguide layer is thicker, it may cause light to easily radiate at the bend with radius less than 100um as shown in fig. 2 (e) and increase curvature loss, as shown in fig. 5, where fig. 5 is Al with thickness of 100nm2O3The functional relationship between the bending loss and the bending radius of the layer indicates that the bending loss tends to decrease as the bending radius increases, and the radius of the bent structure needs to be larger in order to minimize the propagation loss caused by the bent structure.
Because the occupied area of the photonic circuit is in direct proportion to the square of the bending radius, as shown in fig. 6, transition structures are gradually formed on one side of the second waveguide layer and one side of the first waveguide layer respectively along opposite directions, the coupling between the first waveguide layer and the second waveguide layer can be realized by changing the taper of the transition structures and the interval between the first waveguide layer and the second waveguide layer, the interval between the first waveguide layer and the second waveguide layer can be between 50nm and 500nm nanometers, the smaller the interval is, the higher the coupling efficiency is, but the smaller the required taper angle is, the larger the size is, and therefore, the balance value between the interval and the taper can be adjusted in an actual environment to meet the set requirement. The transition structure can be used for coupling and transmitting light from the first waveguide layer to the second waveguide layer when needed, and the propagation loss of the light is better reduced. Also, the light transmission efficiency between the first waveguide layer and the second waveguide layer can be changed by changing the taper of the transition structure, for example, one of the combinations is a single-sided taper angle of the first waveguide layer of 2.32 degrees and a single-sided taper angle of the second waveguide layer of 0.22 degrees. The smaller the angle of taper, the lower the losses that result, but at the same time the longer the length that is required, i.e. the larger the size, the more balancing values need to be taken.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to those skilled in the art without departing from the principles of the present invention should also be considered as within the scope of the present invention.
Claims (8)
1. An easily manufactured double-layer waveguide platform for biological detection is characterized in that a double-layer waveguide structure composed of two different materials is formed in the double-layer waveguide platform and serves as a light limiting structure, a nanopore structure located above the double-layer waveguide structure is formed in the double-layer waveguide platform at the same time and serves as a biological detection point, when an analyte is placed in the biological detection point for detection through mutual matching of the double-layer waveguide structure and the nanopore structure, light is limited in the double-layer waveguide platform except for a waveguide so as to weaken a fluorescence background of a detection environment in the biological detection point and enhance interaction between the light and the analyte.
2. The easy-to-manufacture double-layered waveguide platform for biological detection of claim 1, wherein the double-layered waveguide platform comprises, in order, a top cladding layer, a first waveguide layer, a second waveguide layer, a bottom cladding layer;
the first waveguide layer and the second waveguide layer form the double-layer waveguide structure, the refractive index of the second waveguide layer is larger than that of the first waveguide layer, and a gap is arranged between the first waveguide layer and the second waveguide layer;
the top cladding has a plurality of nanopores formed therein for receiving analyte particles, the nanopores forming the nanopore structure.
3. The easy-to-manufacture double-layered waveguide platform for biological detection according to claim 2, wherein the side of the second waveguide layer facing the nanopore is fully or partially exposed in the nanopore, and the corresponding side wall and bottom surfaces of the analyte particles are chemical surfaces of two different surface chemistries when the analyte particles are in the nanopore, so that the analyte particles are immobilized at the bottom of the nanopore.
4. The easy-to-manufacture double-layered waveguide platform for biological detection as claimed in claim 2, wherein the double-layered waveguide structure is embodied as a double-layered single-film waveguide structure, and the gap width between the second waveguide layer and the first waveguide layer is designed to be positioned by changing the photolithographic etching shape on the second waveguide layer and the first waveguide layer, the thickness of the second waveguide layer and the first waveguide layer, and the gap width between the second waveguide layer and the first waveguide layer when the light is partially exposed to the analyte particles.
5. The easy-to-manufacture double waveguide platform for biological detection as claimed in any one of claims 2 to 4, wherein the material of the first waveguide layer is SiN and the material of the second waveguide layer is Al2O3、AlN、Nb2O5ITO or TiO2And the materials of the top cladding and the bottom cladding can adopt SiO2。
6. The easy-to-manufacture double waveguide platform for biological detection according to any one of claims 2 to 4, wherein the second waveguide layer has a thickness in the range of 10nm to 200nm.
7. The easy-to-manufacture double-layered waveguide platform for biological detection as claimed in claim 6, wherein the thickness of the first waveguide layer is smaller than that of the second waveguide layer, and one side of the second waveguide layer and one side of the first waveguide layer are respectively and gradually formed with a transition structure along the opposite direction, and the coupling between the first waveguide layer and the second waveguide layer can be realized by changing the taper of the transition structure and the distance between the first waveguide layer and the second waveguide layer.
8. The easy-to-manufacture double-layered waveguide platform for biological detection according to claim 1, wherein the double-layered waveguide platform is useful for biological entity detection of viruses, proteins, antibodies, antigens, proteins, nucleotides.
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