CN115266032A - Waveguide piece detecting system - Google Patents

Waveguide piece detecting system Download PDF

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Publication number
CN115266032A
CN115266032A CN202210812481.0A CN202210812481A CN115266032A CN 115266032 A CN115266032 A CN 115266032A CN 202210812481 A CN202210812481 A CN 202210812481A CN 115266032 A CN115266032 A CN 115266032A
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China
Prior art keywords
axis
waveguide sheet
clamp
imaging device
relative
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CN202210812481.0A
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Chinese (zh)
Inventor
张东亮
魏丽欣
张敬辉
蔡永利
赵兴明
隋磊
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Hangzhou Yuguang Optoelectronics Technology Co ltd
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Hangzhou Yuguang Optoelectronics Technology Co ltd
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Priority to CN202210812481.0A priority Critical patent/CN115266032A/en
Publication of CN115266032A publication Critical patent/CN115266032A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0242Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0207Details of measuring devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0207Details of measuring devices
    • G01M11/0214Details of devices holding the object to be tested
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/30Testing of optical devices, constituted by fibre optics or optical waveguides

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Geometry (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The invention discloses a waveguide slice detection system. The device comprises a base, a clamp used for clamping the waveguide sheet, an imaging device used for shooting the waveguide sheet, a moving device and a control device. A moving device is provided to the base and movable relative to the base, the moving device being connected to at least one of the jig and the imaging device for making the jig movable relative to the imaging device. The control device is coupled to the moving device and the imaging device for controlling the moving device to move according to the image taken by the imaging device. The moving device comprises a Z-axis moving device, an X-axis moving device, a Y-axis moving device and a rotating device. The Z axis, the X axis and the Y axis are vertical in pairs, the Z axis is parallel to the optical axis of a camera of the imaging device, and the rotation axis of the rotating device is parallel to the Z axis. According to the invention, the waveguide slice can move and rotate in three-dimensional space relative to the imaging device, so that the waveguide slice can be adjusted to any position relative to the imaging device, and the waveguide slice detection is favorably implemented.

Description

Waveguide piece detecting system
Technical Field
The invention relates to the technical field of waveguide slice detection, in particular to a waveguide slice detection system.
Background
When the optical performance of an optical waveguide product is detected, it needs to be ensured that the relative positions of the incoupling grating of the optical machine and the waveguide sheet, and the relative positions of the detection imaging system and the outcoupling grating are adjusted to appropriate positions. At present, the work is usually finished manually by detection personnel, the requirement on the operation skill of the detection personnel is high, and the labor intensity is high when the detection personnel finely and manually adjust the position of the waveguide sheet for a long time.
Therefore, there is a need for a waveguide sheet inspection system that at least partially addresses the above problems.
Disclosure of Invention
In this summary, concepts in a simplified form are introduced that are further described in the detailed description. This summary of the invention is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.
To at least partially solve the above problems, the present invention provides a waveguide sheet inspection system, comprising:
a base;
a clamp for clamping the waveguide sheet;
an imaging device for photographing the waveguide sheet;
a moving device provided to the base and movable relative to the base, the moving device being connected to at least one of the jig and the imaging device for making the jig movable relative to the imaging device; and
a control device coupled to the mobile device and the imaging device for controlling movement of the mobile device based on images captured by the imaging device,
wherein the mobile device comprises:
a Z-axis moving device for moving the imaging device relative to the clamp along the Z-axis direction,
an X-axis moving device for moving the imaging device relative to the clamp along the X-axis direction,
a Y-axis moving device for moving the image forming device relative to the jig in a Y-axis direction, and
a rotating device for rotating the imaging device relative to the clamp around a rotation axis parallel to the Z-axis direction, wherein
The Z-axis direction, the X-axis direction and the Y-axis direction are perpendicular to each other, and the Z-axis direction is parallel to an optical axis of a camera of the imaging device.
According to the waveguide slice detection system, the waveguide slice can move and rotate in a three-dimensional space relative to the imaging device through an electric control method, so that the waveguide slice can be adjusted to any position relative to the imaging device, the labor intensity of detection personnel is reduced, and the waveguide slice detection is favorably implemented.
Optionally, the clamp comprises:
a first clamp connected to the moving device, the first clamp including a first clamping portion for clamping the uncut waveguide sheet; and
and the second clamp is used for clamping the cut waveguide piece and is detachably connected to the first clamp.
According to the waveguide sheet detection system of the present invention, by simply replacing the jig, it is possible to detect not only an uncut waveguide sheet but also a cut waveguide sheet.
Optionally, the first clamp further comprises:
a back plate including a first side facing the imaging device and a second side opposite the first side connected to the mobile device; and
a first mounting portion provided to the first side for mating with a second mounting portion of the second clamp such that the second clamp is detachably connected to the first clamp,
wherein the first clamping portion is disposed to the first side.
Further, optionally, the first clamping portion is configured as a first groove, and/or
The first mounting portion is configured as a mounting hole.
According to the waveguide sheet detection system of the present invention, the method of mounting the waveguide sheet to the jig is simple.
Optionally, the first clamp further includes a second clamping portion, the second clamping portion is disposed to the first side of the back plate, and the second clamping portion is located between the first mounting portion and the back plate and used for clamping the light shielding plate.
According to the waveguide slice detection system, a light shielding plate can be additionally arranged behind the waveguide slice, so that the imaging effect of the waveguide slice in an imaging device is improved.
Optionally, the second clamping portion is configured as a second groove.
According to the waveguide sheet detection system of the invention, the method for installing the light shielding plate to the clamp is simple.
Optionally, when the uncut waveguide piece is placed in the first clamping portion, the uncut waveguide piece is at a first distance d1 from the back plate,
when the cut waveguide piece is connected to the first clamp through the second clamp, the distance between the cut waveguide piece and the back plate is a second distance d2,
wherein the jig is configured such that the first distance d1 is equal to the second distance d2 by sizing or adjusting a distance of the second jig from the back plate.
According to the waveguide piece detection system, after the clamp is replaced, the distance between the waveguide piece and the back plate can be kept unchanged, and the process of adjusting the position of the waveguide piece relative to the imaging device can be simplified.
Optionally, the second clamp includes a first clamp portion and a second clamp portion, the first clamp portion is disposed opposite to the second clamp portion, and the first clamp portion is detachably connected to the second clamp portion to clamp the cut waveguide sheet together with the second clamp portion.
According to the waveguide piece detection system, the second clamp is simple in structure and convenient to use.
Optionally, the Z-axis moving device, the X-axis moving device, and the Y-axis moving device are connected to the imaging device, and the rotating device is connected to the jig.
Further, the waveguide piece detection system further comprises a clamp support which is arranged to the base and is static relative to the base, wherein the rotating device is arranged to the clamp support, the clamp is connected to the rotating device and is driven by the rotating device to rotate around the rotating axis relative to the clamp support,
the Z-axis moving device is provided to the base, the Z-axis moving device includes a Z-axis moving platform, the Z-axis moving platform is movable in the Z-axis direction with respect to the base,
the X-axis moving device is arranged to the Z-axis moving platform, the X-axis moving device comprises an X-axis moving platform, the X-axis moving platform is movable along the X-axis direction relative to the Z-axis moving platform,
the Y-axis moving device is provided to the X-axis moving stage, the Y-axis moving device includes a Y-axis moving stage movable in the Y-axis direction with respect to the X-axis moving stage,
wherein the image forming device is provided to the Y-axis moving stage.
According to the waveguide sheet detection system, the mobile device is compact in structure and convenient to control.
Optionally, the Z-axis moving device further includes:
a Z-axis lead screw provided to the base and extending in the Z-axis direction;
the Z-axis screw nut is matched with the Z-axis screw; and
a Z-axis motor provided to the base, the Z-axis motor coupled to the control device for driving the Z-axis screw to rotate,
wherein, Z axle moving platform is connected to Z axle screw nut.
Optionally, the X-axis moving device further comprises:
the X-axis lead screw is arranged to the Z-axis moving platform and extends along the X-axis direction;
the X-axis screw nut is matched with the X-axis screw; and
an X-axis motor coupled to the Z-axis moving platform for driving the X-axis lead screw to rotate,
wherein the X-axis moving platform is connected to the X-axis lead screw nut.
Optionally, the Y-axis moving device further comprises:
the Y-axis screw is arranged to the X-axis moving platform and extends along the Y-axis direction;
the Y-axis screw nut is matched with the Y-axis screw; and
a Y-axis motor provided to the X-axis moving stage, the Y-axis motor being coupled to the control device for driving the Y-axis screw to rotate,
wherein the Y-axis moving stage is connected to the Y-axis lead screw nut.
Optionally, the rotating device includes a rotating motor provided to the clamp mount and coupled to the control device, and a rotation transmission assembly connected between an output shaft of the rotating motor and the clamp such that the clamp rotates with rotation of the output shaft of the rotating motor.
According to the waveguide sheet detection system, the mobile device is stable in performance and convenient to operate and control.
Optionally, the imaging device includes a positioning imaging device and a detection imaging device, the relative position of the detection imaging device and the positioning imaging device is kept unchanged, and the waveguide sheet detection system is configured to complete the following steps in a detection process of the waveguide sheet:
the control device controls the Z-axis moving device, the Y-axis moving device and the X-axis moving device to work so that the clamp is located at a second position P2 relative to the imaging device, and controls the rotating device to work so that the rotating angle of the clamp relative to the imaging device is a first angle R1;
the control device controls the positioning imaging device to shoot a waveguide sheet to be detected so as to obtain a second picture, and the control device controls the rotating device to work according to the second picture, so that the rotating angle of the clamp relative to the imaging device is a second angle R2; and
the control device controls the positioning imaging device to shoot the waveguide sheet to be detected so as to obtain a third picture, and the control device controls the Z-axis moving device, the Y-axis moving device and the X-axis moving device to work according to the third picture so that the clamp is located at a third position P3 relative to the imaging device.
Further, in the detection process of the waveguide sheet, a calibration process is further included before the detection process, and the waveguide sheet detection system is configured to complete the following steps in the calibration process:
the control device controls the Z-axis moving device, the Y-axis moving device and the X-axis moving device to work so that the clamp is located at a first position P1 relative to the imaging device, and controls the rotating device to work so that the rotating angle of the clamp relative to the imaging device is the first angle R1, so that a standard waveguide sheet presents a desired image in the detection imaging device;
the control device records the information of the first position P1 and the information of the first angle R1;
the control device controls the Z-axis moving device, the Y-axis moving device and the X-axis moving device to work, so that the clamp is located at the second position P2 relative to the imaging device, and the calibration waveguide sheet presents a desired image in the positioning imaging device;
the control device records the information of the second position P2;
the control device controls the positioning imaging device to shoot the calibration waveguide sheet to obtain a first picture;
the control device analyzes a first rotation angle r1 of the calibration waveguide relative to a reference line in the first picture, and records information of the first rotation angle r1; and
the control means analyzes a first pixel position p1 of a feature point of the calibration waveguide sheet in the first picture and records information of the first pixel position p1,
the relative positions of the coupling-in grating and the coupling-out grating of the calibration waveguide sheet are the same as those of the coupling-in grating and the coupling-out grating of the to-be-detected waveguide sheet, and the datum line is a straight line with an unchanged angle in a shooting visual field of the positioning imaging device.
When the optical performance of the optical waveguide product is detected, it is required to ensure that the relative positions of the coupling-in grating of the optical machine and the waveguide sheet, and the relative positions of the detection imaging system and the coupling-out grating are adjusted to appropriate positions. In the process of transferring the waveguide sheet, only the fixed relative position between the coupling-in grating and the coupling-out grating can be ensured, but the fixed relative position between the coupling-in grating and the coupling-out grating can not be ensured, so that the position of the waveguide sheet needs to be adjusted when the optical performance of each waveguide sheet is detected. According to the waveguide sheet detection system, the detection imaging device and the positioning imaging device are arranged in pairs, the calibration process is arranged before the detection process, for the waveguide sheet with the same specification, the ideal positions of the coupling-in grating and the coupling-out grating of the waveguide sheet relative to the detection system are determined in the calibration process, and then the ideal positions are adjusted by the device automatically in the detection process, so that the stability of the test result is effectively ensured. And, only need once to mark to the waveguide piece of same specification, be favorable to improving detection efficiency.
Optionally, the controlling device controls the rotating device to operate according to the second picture, so that the angle between the clamp and the imaging device is a second angle R2, including:
the control device analyzes a second rotation angle R2 of the waveguide to be detected relative to the datum line in the second picture, and the second angle R2 is a difference obtained by adding the first angle R1 to the second rotation angle R2 and then subtracting the first rotation angle R1.
Optionally, the controlling device controls the Z-axis moving device, the Y-axis moving device and the X-axis moving device to operate according to the third picture, so that the clamp is located at a third position P3 relative to the imaging device, including:
the control device analyzes a second pixel position P2 of the feature point of the waveguide sheet to be detected in the third picture, and the control device determines the third position P3 according to the first pixel position P1 and the second pixel position P2.
Optionally, the first pixel position p1 includes a first Y-axis coordinate position Y1 along the Y-axis direction and a first X-axis coordinate position X1 along the X-axis direction,
the second pixel position p2 includes a second Y-axis coordinate position Y2 in the Y-axis direction and a second X-axis coordinate position X2 in the X-axis direction,
the third position P3 is a position moved from the first position P1 by a first movement distance D1 in the Y-axis direction and a second movement distance D2 in the X-axis direction, wherein,
D1=(Y2-Y1)×a,D2=(X2-X1)×a,
where a is the actual physical size corresponding to a pixel.
According to the waveguide sheet detection system of the present invention, in the detection process, the adjustment of the position of the waveguide sheet is based on the ideal position determined in the calibration process, and thus the incoupling grating and the outcoupling grating of the detected waveguide sheet can be adjusted to the ideal position.
Optionally, the feature point is a vertex of a boundary angle of the outcoupling grating; and/or
The datum line is a horizontal line or a vertical line in a shooting visual field of the positioning imaging device.
According to the waveguide sheet detection system, the feature points and the reference lines are reasonably selected, and the correlation algorithm is mature, so that the stability of the detection result is ensured.
Optionally, the rotation angle of the waveguide sheet relative to the reference line is an included angle between the characteristic line of the waveguide sheet and the reference line.
Further, the characteristic line is an edge of an out-grating of the waveguide sheet.
According to the waveguide slice detection system, the characteristic line is reasonably selected, and the related algorithm is mature, so that the stability of the detection result is ensured.
Optionally, the positioning imaging device comprises a positioning camera, and the positioning camera comprises a telecentric lens.
According to the waveguide sheet detection system, the telecentric lens has no perspective phenomenon, so that the object coordinate in the image is not influenced by the movement error of the Z-axis moving device to change, and the final positioning error is reduced.
Optionally, the detection imaging device includes an optical engine and a detection camera, wherein an optical axis of the detection camera and an optical axis of the positioning camera both extend along the Z-axis direction, and a relative position of the optical engine and the detection camera corresponds to a relative position of the coupling-in grating of the waveguide sheet and the coupling-out grating of the waveguide sheet.
Further, the detection imaging device further comprises a light machine moving device, which is used for enabling the light machine to move relative to the detection camera along at least one of the Y-axis direction and the X-axis direction.
According to the waveguide piece detection system, the relative position of the optical machine and the detection camera can be adjusted, so that the waveguide piece detection system can detect waveguide pieces of different types.
Drawings
The following drawings of the invention are included to provide a further understanding of the invention. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.
In the drawings:
FIG. 1 is a front perspective view of a waveguide sheet inspection system according to a preferred embodiment of the present invention;
FIG. 2 is a rear perspective view of the waveguide sheet inspection system shown in FIG. 1;
FIG. 3 is a perspective view of a first fixture of the waveguide sheet inspection system shown in FIG. 1;
FIG. 4 is a schematic view of the fixture of the waveguide sheet inspection system of FIG. 1 holding an uncut waveguide sheet;
FIG. 5 is a schematic diagram of the fixture of the waveguide sheet inspection system of FIG. 1 holding a cut waveguide sheet;
FIG. 6 is a schematic view of the detection imaging device of the waveguide sheet detection system shown in FIG. 1 aligned with a waveguide sheet;
FIG. 7 is a schematic diagram of a first picture of a calibration waveguide sheet taken by a positioning imaging device in a calibration process for detecting and detecting the waveguide sheet by the waveguide sheet detecting system shown in FIG. 1;
FIG. 8 is a schematic diagram of a second picture of a waveguide sheet to be detected taken by a positioning imaging device in a detection process of detecting the waveguide sheet by the waveguide sheet detection system shown in FIG. 1;
fig. 9 is a schematic diagram of a third picture of the waveguide sheet to be detected, which is taken by the positioning imaging device in the detection process of detecting the waveguide sheet by the waveguide sheet detection system shown in fig. 1.
Description of the reference numerals:
10: base seat
12: clamp support
20: clamp apparatus
21: first clamp
22: back plate
23: first side
24: second side
25: first mounting part
26: a first clamping part
27: second clamping part
31: second clamp
32: a first clamp part
33: second clamp part
35: second mounting part
40: mobile device
41: z-axis moving device
42: z-axis moving platform
43: z-axis lead screw
45: z-axis motor
51: x-axis moving device
52: x-axis moving platform
53: x-axis lead screw
55: x-axis motor
61: y-axis moving device
62: y-axis moving platform
63: y-axis lead screw
65: y-axis motor
71: rotating device
75: rotating electrical machine
80: waveguide sheet
81: coupling grating
82: light coupling grating
83: characteristic point
90: image forming apparatus with a plurality of image forming units
91: detection imaging device
92: positioning imaging device
93: detection camera
94: optical machine
95: positioning camera
100: waveguide sheet detection system
DZ: in the Z-axis direction
DX: direction of X axis
DY: direction of Y axis
FL: characteristic line
PR: axis of rotation
RL: reference line
Detailed Description
In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. It will be apparent, however, to one skilled in the art, that the present invention may be practiced without one or more of these specific details. In other instances, well-known features have not been described in order to avoid obscuring the invention.
In the following description, a detailed description will be given in order to thoroughly understand the present invention. It should be understood that these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of these exemplary embodiments to those skilled in the art. It is apparent that the implementation of the embodiments of the invention is not limited to the specific details familiar to those skilled in the art. The following detailed description of preferred embodiments of the invention, however, the invention is capable of other embodiments in addition to those detailed.
It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. As used herein, the singular is intended to include the plural unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
Ordinal words such as "first" and "second" are referred to herein merely as labels, and do not have any other meaning, such as a particular order, etc. Also, for example, the term "first component" does not itself imply the presence of "second component", and the term "second component" does not itself imply the presence of "first component".
It is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "inner", "outer", and the like are used herein for purposes of illustration only and are not limiting.
The invention provides a waveguide slice detection system.
Exemplary embodiments according to the present invention will now be described in more detail with reference to the accompanying drawings.
As shown in fig. 1 and 2, in a preferred embodiment, a waveguide sheet inspection system 100 according to the present invention includes a base 10, a jig 20, an imaging device 90, a moving device 40, and a control device (not shown). The jig 20 is used to hold the waveguide sheet 80. The imaging device 90 is used to photograph the waveguide sheet 80 so that the quality of the waveguide sheet 80 can be detected from the photographed image. The moving device 40 is provided to the base 10. The moving device 40 is movable relative to the base 10. The moving device 40 is connected to at least one of the jig 20 and the imaging device 90 for making the jig 20 movable relative to the imaging device 90 (i.e., making the imaging device 90 movable relative to the jig 20) so that the imaging device 90 can be aligned with the waveguide sheet 80. The control device is coupled to the moving device 40 and the imaging device 90, respectively, for controlling the moving device 40 to move according to the image taken by the imaging device 90, so that the imaging device 90 can be aligned with the waveguide sheet 80. Meanwhile, preferably, the control device may also analyze and process the image taken by the imaging device 90 so as to identify the quality of the waveguide sheet 80.
In this application, "movement" may be translational movement or rotational movement.
Preferably, the moving device 40 includes a Z-axis moving device 41 that effects movement (translation) of the imaging device 90 in a Z-axis direction DZ with respect to the jig 20, an X-axis moving device 51 that effects movement (translation) of the imaging device 90 in an X-axis direction DX with respect to the jig 20, a Y-axis moving device 61 that effects movement (translation) of the imaging device 90 in a Y-axis direction DY with respect to the jig 20, and a rotating device 71 that effects rotation (rotation) of the imaging device 90 with respect to the jig 20 about a rotation axis PR parallel to the Z-axis direction DZ. The Z-axis direction DZ, the X-axis direction DZ, and the Y-axis direction DY are perpendicular to each other, and the Z-axis direction DZ is parallel to the optical axis of the camera of the imaging device 90. That is, the Z-axis direction DZ is a shooting direction of the imaging device 90, and the waveguide sheet 80 is held by the jig 20 to lie in a plane perpendicular or substantially perpendicular to the Z-axis direction DZ, that is, a normal line of the waveguide sheet 80 is parallel or substantially parallel to the Z-axis direction DZ.
One or more of the Z-axis moving device 41, the X-axis moving device 51, the Y-axis moving device 61, and the rotating device 71 are connected to the imaging device 90, and the others are connected to the jig 20. Alternatively, the Z-axis moving device 41, the X-axis moving device 51, the Y-axis moving device 61, and the rotating device 71 are all connected to the imaging device 90. Alternatively, the Z-axis moving device 41, the X-axis moving device 51, the Y-axis moving device 61, and the rotating device 71 are all connected to the jig 20. Preferably, as shown in fig. 1 and 2, the Z-axis moving device 41, the X-axis moving device 51, and the Y-axis moving device 61 are connected to the imaging device 90, and the rotating device 71 is connected to the jig 20.
Specifically, the Z-axis moving device 41 is provided to the base 10. The Z-axis moving device includes a Z-axis moving platform 42, a Z-axis lead screw 43, a Z-axis lead screw nut (not shown), and a Z-axis motor 45. Wherein, the Z-axis lead screw 43 is provided to the base 10 and extends in the Z-axis direction DZ. The Z-axis lead screw nut is matched with the Z-axis lead screw 43. The Z-axis motor 45 is provided to the base 10. The Z-axis motor 45 is coupled to the control device for driving the Z-axis screw 43 to rotate. The Z-axis translation stage 42 is connected to the Z-axis screw nut. When the Z-axis motor 45 is operated, the Z-axis screw 43 is rotated so that the Z-axis screw nut is moved on the Z-axis screw 43 in the Z-axis direction DZ, thereby making the Z-axis moving platform 42 movable in the Z-axis direction DZ with respect to the base 10.
The X-axis moving device 51 is provided to the Z-axis moving stage 42. The X-axis moving device 51 includes an X-axis moving platform 52, an X-axis lead screw 53, an X-axis lead screw nut (not shown), and an X-axis motor 55. The X-axis lead screw 53X is provided to the Z-axis moving stage 42 and extends in the X-axis direction DX. The X-axis lead screw nut is matched with the X-axis lead screw 53. An X-axis motor 55 is provided to the Z-axis moving stage 42. The X-axis motor 55 is coupled to a control device for driving the X-axis screw 53 in rotation. The X-axis translation stage 52 is connected to the X-axis screw nut. When the X-axis motor 55 is operated, the X-axis lead screw 53 is rotated so that the X-axis lead screw nut is moved on the X-axis lead screw 53 in the X-axis direction DX, so that the X-axis moving platform 52 is movable in the X-axis direction DX with respect to the Z-axis moving platform 42, that is, so that the X-axis moving platform 52 is movable in the X-axis direction DX with respect to the base 10.
The Y-axis moving device 61 is provided to the X-axis moving stage 52. The Y-axis moving device 61 includes a Y-axis moving stage 62, a Y-axis lead screw 63, a Y-axis lead screw nut (not shown), and a Y-axis motor 65. The Y-axis lead screw 63 is provided to the X-axis moving stage 52 and extends in the Y-axis direction DY. The Y-axis lead screw nut is matched with the Y-axis lead screw 63. A Y-axis motor 65 is provided to the X-axis moving stage 52. The Y-axis motor 65 is coupled to the control device for driving the Y-axis screw 63 to rotate. The Y-axis translation stage 62 is connected to the Y-axis lead screw nut. When the Y-axis motor 65 is operated, the Y-axis lead screw 63 is rotated so that the Y-axis lead screw nut moves on the Y-axis lead screw 63 in the Y-axis direction DY, so that the Y-axis moving platform 62 is movable in the Y-axis direction DY with respect to the X-axis moving platform 52, that is, so that the Y-axis moving platform 62 is movable in the Y-axis direction DY with respect to the Z-axis moving platform 42, that is, so that the Y-axis moving platform 62 is movable in the Y-axis direction DY with respect to the base 10.
The image forming device 90 is provided to the Y-axis moving stage 62. Accordingly, the imaging device 90 is movable in the Y-axis direction DY with respect to the X-axis moving stage 52, the Z-axis moving stage 42, and the base 10. The imaging device 90 is movable in the X-axis direction DX with respect to the Z-axis moving stage 42 and the base 10. The imaging device 90 is movable in the Z-axis direction DZ with respect to the base 10.
As shown in fig. 1 and 2, waveguide sheet inspection system 100 further includes a fixture support 12. The jig support 12 is provided to the base 10 and is stationary with respect to the base 10. The clamp mount 12 may also be considered part of the base 10. The jig 20 is stationary relative to the base 10 in the Z-axis direction DZ. The gripper 20 is connected to the rotating means 71 and is rotatable about a rotation axis PR relative to the gripper support 12 under the drive of the rotating means 71. The rotating device 71 is provided to the jig support 12, or the rotating device 71 is provided to the base 10. The rotation device 71 includes a rotation motor 75 and a rotation transmission assembly (not shown). The rotating motor 75 is provided to the jig support 12 (i.e., the base 10) and is coupled to the control device. The rotary drive assembly is connected between the output shaft of the rotary motor 75 and the clamp 20 such that the clamp 20 rotates relative to the clamp mount 12 (i.e., the base 10) about a rotation axis PR that extends in the Z-axis direction DZ as the output shaft of the rotary motor 75 rotates.
As is apparent from the above description, the Y-axis moving platform 62 on which the image forming apparatus 90 is mounted does not rotate with respect to the base 10. Therefore, in the present invention, the rotating device 71 effects the rotation of the imaging device 90 relative to the jig 20 about the rotation axis PR parallel to the Z-axis direction DZ by being configured such that the jig 20 rotates relative to the base 10 about the rotation axis PR parallel to the Z-axis direction DZ. The jig 20 does not move in the Z-axis direction DZ, the Y-axis direction DY, and the X-axis direction DX with respect to the base 10. Therefore, in the present invention, the Z-axis moving device 41 effects the imaging device 90 to be movable in the Z-axis direction DZ with respect to the jig 20 by being configured such that the imaging device 90 is movable in the Z-axis direction DZ with respect to the base 10; the X-axis moving device 51 enables the imaging device 90 to be movable in the X-axis direction DX relative to the jig 20 by being configured such that the imaging device 90 is movable in the X-axis direction DX relative to the base 10; the Y-axis moving device 61 enables the imaging device 90 to be movable in the Y-axis direction DY relative to the jig 20 by being configured such that the imaging device 90 is movable in the Y-axis direction DY relative to the base 10.
In other words, in the preferred embodiment, the imaging device 90 is translatable relative to the base 10 and the clamp 20 along a Z-axis direction DZ, an X-axis direction DX, and a Y-axis direction DY, and the clamp 20 is rotatable relative to the base 10 and the imaging device 90 about a rotation axis PR. The translational movement of the imaging device 90 determines the relative position of the imaging device 90 and the holder 20 (i.e., the waveguide sheet 80). The rotational movement of the fixture 20 determines the relative rotation angle between the molding device 90 and the fixture 20 (i.e., the waveguide sheet 80).
The position of the imaging device 90 relative to the jig 20 is determined by the Z-axis moving device 41, the X-axis moving device 51, and the Y-axis moving device 61, so that the imaging device 90 has a connection relationship with each of the Z-axis moving device 41, the X-axis moving device 51, and the Y-axis moving device 61.
As shown in fig. 3, 4 and 5, the jig 20 includes a first jig 21 and a second jig 31. The first clamp 21 is connected to the moving device 40. In particular, the first clamp 21 is connected to the rotation transmission assembly of the rotation device 71 of the movement device 40, so that the first clamp 21 is rotatable with respect to the base 10 about the rotation axis PR. The second clamp 31 is detachably connected to the first clamp 21. The first clamp 21 is used to clamp the uncut waveguide sheet 80. The second jig is used to hold the cut waveguide sheet 80. For example, the waveguide sheet 80 is cut in a circular shape (as shown in fig. 4), which can be applied to eyeglasses, and thus the waveguide sheet 80 is cut in the shape of an eyeglass lens (as shown in fig. 5). Therefore, the waveguide sheet inspection system 100 according to the present invention can inspect the waveguide sheet 80 before cutting, and can inspect the waveguide sheet 80 after cutting.
As shown in fig. 3 and 4, the first clamp 21 includes a back plate 22, a first clamping portion 26, and a second clamping portion 27. The back plate 22 extends along a plane perpendicular or substantially perpendicular to the Z-axis direction DZ, i.e., the back plate 22 is perpendicular or substantially perpendicular to the Z-axis direction DZ. The back plate 22 comprises a first side 23 and a second side 24 opposite the first side. The first side 23 faces the imaging device 90. The first side 23 extends in a plane perpendicular or substantially perpendicular to the Z-axis direction DZ, i.e. the normal of the back plate 22 is parallel or substantially parallel to the Z-axis direction DZ. The second side 24 is connected to the moving means 40, i.e. to the rotary transmission assembly of the rotating means 71 of the moving means 40. The first clamping portion 26 is provided to the first side 23 of the back plate 22. The first clamping portion 26 is configured as a first groove for clamping the uncut waveguide sheet 80 (the cut waveguide sheet 80 is inserted into the first groove). The second clamping portion 27 is also provided to the first side 23 of the back plate 22 and between the first mounting portion 25 and the back plate 22 for clamping the light-shielding plate, so that the imaging device 90 can obtain a better photographing effect. The second clamping portion 27 is configured as a second groove (into which the light shielding plate is inserted).
As shown in fig. 5, the second jig 31 includes a first jig portion 32 and a second jig portion 33. The first clamp portion 32 is disposed opposite to the second clamp portion 33. The first clamp portion 32 is detachably connected to the second clamp portion 33 to clamp the cut waveguide sheet 80 together with the second clamp portion 33.
The first clamp 21 further includes a first mounting portion 25. The second clamp 31 further comprises a second mounting portion 35. A first mounting portion 25 is provided to the first side 23 for mating with a second mounting portion 35 of the second clamp 31 such that the second clamp 31 is detachably connected to the first clamp 21. For example, the first mounting portion 25 and the second mounting portion 35 are each configured as a mounting hole, and the second clamp 31 is mounted to the first clamp 21 by a bolt. Alternatively, the first mounting portion 25 is configured as a mounting hole, and the second mounting portion 35 is configured as a mounting pin on a side of the second jig for facing the first jig 21, the mounting pin being insertable into the mounting hole, thereby mounting the second jig 31 to the first jig 21.
It is understood that, when the waveguide sheet 80 is mounted to the jig 20, the waveguide sheet 80 rotates in synchronization with the jig 20 with respect to the base 10, and the waveguide sheet 80 rotates in synchronization with the jig 20 with respect to the imaging device 90. As shown in fig. 4 and 5, the waveguide sheet 80 includes an incoupling grating 81 and an outcoupling grating 82. The relative positions of the coupling-in grating 81 and the coupling-out grating 82 are unchanged for the same type or model of waveguide 80.
As shown in fig. 1 and 2, the imaging device 90 comprises a detection imaging device 91, the detection imaging device 91 being coupled to the control device for detecting the properties of the waveguide sheet 80. The detection imaging device 91 includes an optical engine 94 and a detection camera 93. Both the light engine 94 and the detection camera 93 are coupled to the control means. Wherein the optical axis of the detection camera 93 extends in the Z-axis direction DZ. The relative position between the optical engine 94 and the detection camera 93 corresponds to the relative position between the incoupling grating 81 and the outcoupling grating 82, that is, when the optical engine 94 is aligned with the incoupling grating 81, the detection camera 93 is aligned with the outcoupling grating 82 at the same time (as shown in fig. 6). During inspection, the optical engine 94 aligns the incoupling grating of the waveguide 80, so that light enters the waveguide 80 through the incoupling grating 81. The user then observes the image in the outcoupling grating 82 through the detection camera 93, so that the performance of the waveguide sheet 80 can be analyzed. When the types of the waveguide sheets 80 are different, the relative positions of the incoupling grating 81 and the outcoupling grating 82 may be different. Therefore, it is preferable that the detection imaging device 91 further includes an optical engine moving device (not shown) for making the optical engine 94 movable in at least one of the Y-axis direction DY and the X-axis direction DX with respect to the detection camera 93, thereby adjusting the relative position of the optical engine 94 and the detection camera 93. For example, the optical engine moving device is configured as an optical engine moving platform which is provided to the Y-axis moving platform 62 and is movable relative to the Y-axis moving platform 62 in at least one of a Y-axis direction DY and an X-axis direction DX. The detection camera 93 is arranged to the Y-axis moving platform 62, and the optical engine 94 is arranged to the optical engine moving platform, so that the relative position of the detection camera 93 and the optical engine can be adjusted.
When the optical performance of the optical waveguide product is detected, it is necessary to ensure that the relative positions of the coupling-in grating of the optical machine and the waveguide sheet and the detection imaging system and the coupling-out grating are adjusted to appropriate positions, and at present, the relative positions are adjusted according to experience by observing images of the imaging system by people. In the process of transferring the waveguide sheet, only the fixed relative position between the coupling-in grating and the coupling-out grating can be ensured, but the fixed relative position between the coupling-in grating and the coupling-out grating can not be ensured, so that the position of the waveguide sheet needs to be adjusted when the optical performance of each waveguide sheet is detected. Due to the existence of subjective factors, the relative positions of the coupling grating of the optical machine and the waveguide sheet and the relative positions of the detection imaging system and the coupling grating can not be ensured to be consistent during each measurement, and the stability of a test result is influenced.
In other words, during the transfer process of the waveguide sheet 80, it is ensured that only the relative position between the incoupling grating 81 and the outcoupling grating 82 is fixed, and it is not ensured that the relative position between the two and the waveguide sheet 80 is not changed, that is, it is not ensured that the incoupling grating 81 and the outcoupling grating 82 are always located at the fixed position on the waveguide sheet 80. Therefore, each time the waveguide sheet 80 is replaced, the optical machine 94 needs to be realigned with the coupling grating 81 (or the detection camera 93 needs to be realigned), which makes the detection operation cumbersome and inefficient in the case of manual operation, and at the same time, the operation stability of manual alignment lacks guarantee, which affects the stability of the detection result.
To address this problem, the imaging device 90 further includes a positioning imaging device 92, as shown in fig. 1 and 2. The positioning imaging device 92 is coupled to the control device. The relative positions of the positioning imaging device 92 and the detection imaging device 91 remain unchanged. The positioning imaging device 92 includes a positioning camera 95. Wherein the optical axis of the positioning camera 95 extends in the Z-axis direction DZ. The positioning imaging device 92 is used to automatically adjust the positions of the incoupling grating 81 and the outcoupling grating 82 of the waveguide sheet 80 to a certain fixed position (also referred to as a detection position) relative to the detection imaging device 91 after each replacement of the waveguide sheet 80, so that the relative positions of the detection imaging device 91 and the waveguide sheet 80 are always kept unchanged, and the working efficiency and the detection stability can be improved.
Specifically, the detection process of the waveguide sheet 80 includes a calibration process and a detection process in sequence. In the calibration process, the user determines an ideal position of the jig 20 for detecting the waveguide sheet 80 with respect to the detection imaging device 91 from the calibration waveguide sheet through subjective experience, and the control device records the relevant information. In the detection process, the control device automatically adjusts the jig 20 to the ideal position relative to the detection imaging device 91 according to the recorded information, so that the relative position of each waveguide sheet to be detected and the detection imaging device 91 is the ideal position. It can be understood that the calibration waveguide plate and the waveguide plate to be detected are of the same type, that is, the relative positions of the incoupling grating and the outcoupling grating of the calibration waveguide plate are the same as the relative positions of the incoupling grating and the outcoupling grating of the waveguide plate to be detected.
First, in a calibration process, the waveguide sheet inspection system 100 is configured to perform the following steps.
S11, the control device controls the moving device 40 to operate, so that the jig 20 is located at the first position P1 relative to the imaging device 90, and the rotation angle of the jig 20 relative to the imaging device 90 is set to the first angle R1, so that the waveguide sheet 80 (also referred to as a calibration waveguide sheet 80) as a calibration waveguide sheet presents a desired image in the detection imaging device 91.
In step S11, any one of the waveguide pieces 80 of a certain type is first set as a calibration waveguide piece and clamped in the jig 20. The user manipulates the control means such that the moving means 40 operates, including controlling the Z-axis moving means 41, the X-axis moving means 51, the Y-axis moving means 61, and the rotating means 71 to operate, thereby adjusting the relative position and relative angle of the jig 20 and the imaging device 90, that is, the relative position and relative angle of the waveguide sheet 80 and the imaging device 90. Specifically, the user manipulates the control device so that the Z-axis moving device 41, the Y-axis moving device 61, and the X-axis moving device 51 operate to position the jig 20 at the first position P1 with respect to the imaging device 90; and the user manipulates the control device such that the control device controls the rotating device 71 to operate such that the rotation angle of the jig 20 with respect to the image forming device 90 is the first angle R1. When the user sees a desired image in the image taken by the detection camera 93 (for example, a clear intended image in the image taken by the detection camera 93), the moving device 40 is controlled by the control device to stop moving. At this time, the Z-axis moving device 41, the X-axis moving device 51, and the Y-axis moving device 61 cause the jig 20 to be located at the first position P1 with respect to the imaging device 90, and the rotating device 71 causes the rotation angle of the jig 20 with respect to the imaging device 90 to be the first angle R1. That is, at this time, the Z-axis moving device 41, the X-axis moving device 51, and the Y-axis moving device 61 cause the waveguide sheet 80 to be located at the first position P1 with respect to the imaging device 90, and the rotating device 71 causes the angle of the waveguide sheet 80 with respect to the imaging device 90 to be the first angle R1. In the present application, the positions of the incoupling grating 81 and the outcoupling grating 82 with respect to the detection imaging device 91 when the waveguide sheet 80 is located at the first position P1 and the first angle R1 with respect to the imaging device 90 are referred to as detection positions. It is to be understood that, in the present application, after each replacement of the waveguide sheet 80, the operation of the moving device 40 is controlled so that the waveguide sheet 80 is moved to the detection position with respect to the detection imaging device 91.
For example, in the present invention, the mechanical zero point of the X-axis direction DX is at the left end in fig. 1, the mechanical zero point of the Y-axis direction DY is at the lower end in fig. 1, and the mechanical zero point of the Z-axis direction DZ is at the left end in fig. 1. The coordinate unit of the movement in the X-axis direction DX, the Y-axis direction DY, and the Z-axis direction DZ is mm. In the present invention, the angle of rotation of the jig 20 about the rotation axis PR is also referred to as the R-axis position, and the user can set the rotation angle of the jig 20 with respect to the base 10 to 0 degree at a certain rotation angle of the output shaft of the rotating motor 75.
For example, in step S11, when the manual adjustment moving device 40 adjusts the relative positions of the detection camera 93 and the coupling grating 82 and the optical engine 94 and the coupling grating 81 to be proper (when the relative positions are adjusted to the P1 position and the R1 angle), the detection imaging device 91 is located at the detection position relative to the calibration waveguide 80 (as shown in fig. 6, the optical engine 94 is aligned with the coupling grating 81, and the detection camera 93 is aligned with the coupling grating 82), the X, Y, and Z axes of the detection imaging device 91 (i.e., the imaging device 90, i.e., the positioning imaging device 92) are (100.3, 20.2, 135), and the R axis of the jig 20 is 90.5 degrees.
S12, the control device records the information of the first position P1 and the information of the first angle R1.
In step S12, the control device records the information of the first position P1 as: the X-axis coordinate position is 100.3mm, the Y-axis coordinate position is 20.2mm, and the Z-axis coordinate position is 135mm. The control device records the information of the first angle R1 as: the R-axis coordinate position is 90.5 degrees. That is, it is preferable that the first position P1 of the jig 20 with respect to the imaging device 90 at this time be equivalent to the position of the imaging device 90 with respect to the base 10, and the first angle R1 of the jig 20 with respect to the imaging device 90 at this time be equivalent to the angle of the jig 20 with respect to the base 10.
It will be appreciated that since the clamp mount 12 is fixed relative to the base 10, the position of the imaging device 90 relative to the base 10 and the position of the imaging device 90 relative to the clamp 20 will always differ by a constant value, and thus the position of the imaging device 90 relative to the base 10 can be used to characterize the position of the imaging device 90 relative to the clamp 20. On the other hand, the imaging device 90 does not rotate relative to the base 10, and therefore the rotation angle of the jig 20 relative to the imaging device 90 can be characterized by the rotation angle of the jig 20 relative to the base 10.
S13, the control device controls the moving device 40 to operate, so that the clamp 20 is located at the second position P2 relative to the imaging device 90, so that the calibration waveguide sheet 80 presents a desired image in the positioning imaging device 92.
In step S13, after the calibration waveguide 80 presents the desired image in the detection camera 93, the user controls the moving device 40 to operate through the control device, so that the jig 20 moves relative to the imaging device 90, and the calibration waveguide 80 also presents the desired image in the positioning camera 95, specifically, the user controls the Z-axis moving device 41, the Y-axis moving device 61, and the X-axis moving device 51 to operate through the control device, so that the jig 20 is located at the second position P2 in the imaging device 90. At this point, the boundary angle of the outcoupling grating 82 is clearly seen in the image taken by the positioning camera 95 (as shown in fig. 7). For example, at this time, the X, Y, and Z axis positions of the imaging device 91 (i.e., the imaging device 90, i.e., the positioning imaging device 92) are detected as (150.5, 15.0, 100).
And S14, the control device records the information of the second position P2.
In step S14, the control device records the information of the second position P2 as: the X-axis coordinate position is 150.5mm, the Y-axis coordinate position is 15.0mm, and the Z-axis coordinate position is 100mm. That is, it is preferable that the position of the imaging device 90 relative to the base 10 at this time is equivalent to the second position P2 of the jig 20 relative to the imaging device 90.
S15, the control device controls the positioning imaging device 92 to shoot the waveguide slice 80 for calibration so as to obtain a first picture.
In this step, the control device controls the positioning imaging device 92 to take a first picture of the waveguide sheet 80 for calibration as shown in fig. 7.
S16, the control device analyzes the first rotation angle r1 of the calibration waveguide sheet 80 with respect to the reference line RL in the first picture, and records information of the first rotation angle r1.
Specifically, the reference line RL is, for example, a straight line in which the angle in the shooting field of the positioning imaging device 92 is constant, such as a horizontal line (pixel Y-axis coordinate is constant) or a vertical line (pixel X-axis coordinate is constant) in the shooting field of the positioning imaging device 92. The rotation angle of the waveguide sheet 80 with respect to the reference line RL may be characterized by the angle between the characteristic line FL of the waveguide sheet 80 and the reference line RL. For example, as shown in fig. 7, the control device analyzes an angle between an edge (characteristic line FL) of the coupling-out grating 82 of the waveguide sheet 80 and the reference line RL in the first picture, where the angle is 0.46 degrees, that is, the first rotation angle r1 is 0.46 degrees.
S17, the control device analyzes the first pixel position p1 of the feature point of the waveguide sheet 80 for calibration in the first picture, and records information of the first pixel position p 1.
Specifically, the characteristic point 83 of the calibration waveguide 80 is, for example, a vertex of a boundary angle of the coupling-out grating 82. The first pixel position p1 includes a first Y-axis coordinate position Y1 in the Y-axis direction and a first X-axis coordinate position X1 in the X-axis direction. The pixel position of the boundary corner vertex 83 (feature point 83) in the first picture is, for example, (780, 594), that is, the boundary corner vertex 83 is located at the position of the pixel at the 594 rd row and the 780 th column in the digital picture, which is the first pixel position p1, where X1=780 and Y1=594. It will be appreciated that the boundary angle vertex 83 may select a vertex that couples out any of the four boundary angles of the grating 82.
The prior art visual guiding positioning method usually requires placing a marker at a target position as an identification target, the marker may be temporarily placed at the target position or permanently processed at the target position (for example, engraving or printing), and an error is inevitably generated between the marker and the target position, and one more process is required. In this step, the present invention directly uses the boundary angle of the coupling-out grating 82 as the recognition target, thereby avoiding the error caused by the marker and simplifying the process.
And finishing the calibration process. The user takes out the calibration waveguide 80 from the jig 20, puts the waveguide 80 to be detected (also referred to as the detection waveguide 80) into the jig 20, and proceeds to the detection process. In the detection step, the waveguide sheet detection system 100 detects the performance of the detection waveguide sheets 80 one by one. The waveguide sheet detection system 100 needs to make the relative positions of the detection imaging device 91 and the incoupling grating 81 and the outcoupling grating 82 of the detection waveguide sheet 80 the same as the relative positions of the detection imaging device 91 and the incoupling grating 81 and the outcoupling grating 82 of the calibration waveguide sheet 80 in step S11. In the inspection process of the waveguide sheet, the waveguide sheet inspection system 100 is configured to perform the following operations.
And S21, the control device controls the moving device 40 to work, so that the clamp 20 is located at the second position P2 relative to the imaging device 90, and the rotation angle of the clamp 20 relative to the imaging device 90 is a first angle R1.
Specifically, the control device controls the Z-axis moving device 41, the Y-axis moving device 61, and the X-axis moving device 51 to operate so that the jig 20 is located at the second position P2 with respect to the imaging device 90; and the control device controls the rotating device 71 to operate so that the rotation angle of the jig 20 with respect to the imaging device 70 is the first angle R1. The information of the second position P2 is recorded in step S14, and the information of the first angle R1 is recorded in step S12. The control device automatically controls the moving device 40 to move the imaging device 90 (i.e. the detection imaging device 91, i.e. the positioning imaging device 92) to the second position P2 with the X, Y and Z axis positions (150.5, 15.0 and 100) according to the recorded information, and rotates the clamp 20 to 90.5 degrees relative to the base 10. In step S21, it can be appreciated that, as shown in fig. 8, a clear outcoupling grating 82 is now visible in the imaging field of view of the positioning imaging device 92.
And S22, the control device controls the positioning imaging device 92 to shoot the waveguide sheet 80 to be detected to obtain a second picture, and controls the rotating device 71 to work according to the second picture, so that the rotating angle of the clamp 20 relative to the imaging device 90 is a second angle R2.
In this step, the control device controls the positioning imaging device 92 to take a second picture of the waveguide sheet 80 to be detected as shown in fig. 8. Specifically, the control device analyzes the second rotation angle R2 of the waveguide sheet 80 to be detected in the second picture with respect to the reference line RL, where the second angle R2 is the sum of the first angle R1 plus the second rotation angle R2 minus the first rotation angle R1, that is, the angle by which the waveguide sheet 80 is rotated with respect to the imaging device 90 is the difference of the first rotation angle R1 minus the second rotation angle R2. In step S12, information of the first angle R1 is recorded, and a value of the first rotation angle R1 is recorded in step S16. For example, as shown in fig. 9, a second rotation angle r2 of the edge of the out-coupling grating 82 of the waveguide sheet 80 (the characteristic line FL) and the reference line RL is 12.24 degrees. The rotation angle of the clamp 20 in this step is R1-R2=0.46-12.24= -11.78 degrees, and the second angle R2= R1+ R2-R1=90.5+12.24-0.46= -102.28 degrees. After the above calculation, the control device controls the rotation device 71 to operate to rotate the jig 20 by-11.78 degrees with respect to the imaging device 90, that is, to rotate the jig 20 by-11.78 degrees with respect to the base 10, so that the rotation angle of the jig 20 with respect to the imaging device 90 is 102.28 degrees, that is, the rotation angle of the jig 20 with respect to the base 10 is 102.28 degrees. Fig. 9 shows how the detection waveguide sheet 80 is seen in the imaging field of the positioning imaging device 92 after the rotation of the jig 20.
And S23, the control device controls the positioning imaging device 92 to shoot the waveguide sheet to be detected to obtain a third picture, and the control device controls the Z-axis moving device 41, the Y-axis moving device 61 and the X-axis moving device 51 to work according to the third picture so that the clamp 20 is located at a third position P3 relative to the imaging device 90.
In this step, the control device controls the positioning imaging device 92 to take a third picture of the waveguide sheet 60 for detection as shown in fig. 9. Specifically, the control device analyzes the second pixel position P2 of the feature point 83 of the waveguide sheet 80 for detection in the third picture, and determines the third position P3 from the first pixel position P1 and the second pixel position P2. In the third picture, the second pixel position p2 includes a second Y-axis coordinate position Y2 in the Y-axis direction DY and a second X-axis coordinate position X2 in the X-axis direction DX. The third position P3 is a position moved by the first movement distance D1 in the Y-axis direction DY and the second movement distance D2 in the X-axis direction DX from the first position P1, where D1= (Y2-Y1) × a, D2= (X2-X1) × a, and a is an actual physical size corresponding to one pixel. For example a =3.45 μm.
The information of the first pixel position p1 is recorded in step S17. For example, in the first picture shown in fig. 7, X1=780 and Y1=594 are located in the first pixel position p1 where the vertex 83 of the boundary corner of the grating 82 is coupled out.
For example, in the third picture shown in fig. 9, the vertex 83 in the upper left corner of the out-coupling grating 82 has coordinates (1278, 1291) in the image, i.e., X2=1278, Y2=1291. Then:
D1=(Y2-Y1)×a=(1291-594)×0.00345=2.40465mm;
D2=(X2-X1)×a=(1278-780)×0.00345=1.7181mm。
the third position P3 is a position moved by the first movement distance D1 in the Y-axis direction DY and the second movement distance D2 in the X-axis direction DX from the first position P1. That is, the Y-axis coordinate position of the third position P3 differs from the Y-axis coordinate position of the first position P1 by D1, the X-axis coordinate position of the third position P3 differs from the X-axis coordinate position of the first position P1 by D2, and the Z-axis coordinate position of the third position P3 is the same as that of the first position P1. The values of the parameters of the first position P1 are recorded in step S12, and the X, Y and Z axes of the first position P1 are (100.3, 20.2, 135). Then, the X-axis coordinate of the third position P3 is 100.3+1.7181=102.0181mm, the Y-axis coordinate of the third position P3 is 20.2+2.40465=22.60425mm, and the Z-axis coordinate of the third position P3 is 135mm.
After the coordinates of the third position P3 are calculated, the control device controls the Z-axis moving device 41, the X-axis moving device 51, and the Y-axis moving device 61 to operate, and moves the imaging device 90 from the second position P2 to the third position P3.
In this step, the control means compensates for the difference in the relative positions of the incoupling grating 81 and the outcoupling grating 82 of different waveguide sheets 80 and the profile of the waveguide sheet 80 according to the pixel positions of the feature points 83 in the first image and the third image, so that the relative positions of the imaging means 90 and the incoupling grating 81 and the outcoupling grating 82 of the detection waveguide sheet 80 and the relative positions of the imaging means 90 and the incoupling grating 81 and the outcoupling grating 82 of the calibration waveguide sheet 80 are the same. The control device obtains the second pixel position p2 of the vertex feature point 83 directly from the third image, instead of obtaining the pixel position of the feature point 83 after the fixture 20 rotates to the second angle R2 only by calculation, so that the value of the pixel position p2 of the feature point 83 is more accurate, which is beneficial to aligning the detection imaging device 91 with the incoupling grating 81 and the outcoupling grating 82 at the ideal position.
Preferably, the positioning camera 95 of the positioning imaging device 92 comprises a telecentric lens. The conventional lens has a perspective phenomenon, and when the position of the imaging device 90 along the Z-axis direction DZ changes, the coordinates of the non-image center object in the image change, and the Z-axis motor 45 itself has an unavoidable error, so that the error caused by the perspective phenomenon of the conventional lens cannot be avoided. The telecentric lens has no perspective phenomenon, the object coordinate in the image is not influenced by the error of the Z-axis motor 45 to change, and the final positioning error is reduced.
To this end, the waveguide sheet inspection system 100 performs the operation of aligning the inspection imaging device 91 with the incoupling grating 81 and the outcoupling grating 82 at the inspection position.
And S24, the control device acquires the image of the coupling grating 82 of the waveguide sheet 80 to be detected, which is shot by the detection camera 93, and analyzes the quality and the performance of the waveguide sheet 80.
It can be understood that after the calibration process of steps S11 to S17, all the waveguide sheets 80 to be tested with the same specification and model as the waveguide sheets 80 for calibration can be tested for quality through the testing process of steps S21 to S24, and during each testing process, the testing imaging device 91 is aligned with the coupling-in grating 81 and the coupling-out grating 82 at the testing position determined by the user in the calibration process. That is, the waveguide sheet detection system 100 can realize one-time calibration and multiple detections.
When the uncut waveguide sheet 80 is placed directly in the first clamping portion 26, the uncut waveguide sheet 80 is at a first distance d1 from the back plate 22. When the cut waveguide sheet 80 is connected to the first jig 21 by the second jig 31, the distance between the cut waveguide sheet 80 and the back plate 22 is the second distance d2. Wherein the jig 20 is configured such that the first distance d1 is equal to the second distance d2 by sizing the second jig 31 or adjusting the distance of the second jig 31 from the back plate 22. Thus, the mounting method of the waveguide sheet 80 to the jig 20 does not affect the positional alignment in the above-described inspection process.
According to the waveguide sheet detection system, the waveguide sheet is clamped by the clamp, and the imaging device is used for shooting the waveguide sheet so as to detect the quality of the waveguide sheet. Wherein, make imaging device can remove and rotate in three-dimensional space for the waveguide piece through setting up mobile device to can adjust imaging device to the position that is fit for detecting the waveguide piece for the waveguide piece, effectively guarantee detection quality. The flows and steps described in all the preferred embodiments described above are only examples. Unless an adverse effect occurs, various processing operations may be performed in a different order from the order of the above-described flow. The above-mentioned steps of the flow can be added, combined or deleted according to the actual requirement.
Unless defined otherwise, technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Features described herein in one embodiment may be applied to another embodiment, either alone or in combination with other features, unless the feature is otherwise inapplicable or otherwise stated in the other embodiment.
The present invention has been described in terms of the above embodiments, but it should be understood that the above embodiments are for purposes of illustration and description only and are not intended to limit the invention to the described embodiments. Furthermore, it will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that many variations and modifications may be made in accordance with the teaching of the present invention, which variations and modifications fall within the scope of the present invention as claimed.

Claims (25)

1. A waveguide sheet inspection system, comprising:
a base;
a jig for holding the waveguide sheet;
an imaging device for photographing the waveguide sheet;
a moving device provided to the base and movable relative to the base, the moving device being connected to at least one of the jig and the imaging device for making the jig movable relative to the imaging device; and
a control device coupled to the mobile device and the imaging device for controlling movement of the mobile device based on images captured by the imaging device,
wherein the mobile device comprises:
a Z-axis moving device for moving the imaging device relative to the clamp along the Z-axis direction,
an X-axis moving device for moving the imaging device relative to the clamp along the X-axis direction,
a Y-axis moving device for moving the image forming device relative to the jig in a Y-axis direction, and
a rotating device for rotating the imaging device relative to the clamp around a rotation axis parallel to the Z-axis direction, wherein
The Z-axis direction, the X-axis direction and the Y-axis direction are perpendicular to each other, and the Z-axis direction is parallel to an optical axis of a camera of the imaging device.
2. The waveguide sheet inspection system of claim 1, wherein the fixture comprises:
a first clamp connected to the moving device, the first clamp including a first clamping portion for clamping an uncut waveguide sheet; and
and the second clamp is used for clamping the cut waveguide piece, and the second clamp is detachably connected to the first clamp.
3. The waveguide sheet inspection system of claim 2, wherein the first clamp further comprises:
a back plate including a first side facing the imaging device and a second side opposite the first side connected to the mobile device; and
a first mounting portion provided to the first side for mating with a second mounting portion of the second clamp such that the second clamp is detachably connected to the first clamp,
wherein the first clamping portion is disposed to the first side.
4. The waveguide sheet inspection system of claim 3,
the first clamping part is designed as a first groove and/or
The first mounting portion is configured as a mounting hole.
5. The waveguide sheet detection system of claim 3, wherein the first clamp further comprises a second clamping portion provided to the first side of the back plate, the second clamping portion being located between the first mounting portion and the back plate for clamping a light shielding plate.
6. The waveguide sheet inspection system of claim 5, wherein the second clamping portion is configured as a second groove.
7. The waveguide sheet inspection system of claim 6,
the distance between the uncut waveguide piece and the back plate is a first distance d1 when the uncut waveguide piece is placed in the first clamping part,
when the cut waveguide piece is connected to the first clamp through the second clamp, the distance between the cut waveguide piece and the back plate is a second distance d2,
wherein the jig is configured such that the first distance d1 is equal to the second distance d2 by sizing or adjusting a distance of the second jig from the back plate.
8. The waveguide sheet inspection system of claim 2, wherein the second clamp includes a first clamp portion and a second clamp portion, the first clamp portion being disposed opposite the second clamp portion, the first clamp portion being detachably connected to the second clamp portion to clamp the cut waveguide sheet together with the second clamp portion.
9. The waveguide sheet inspection system of any one of claims 1 to 8, wherein the Z-axis movement device, the X-axis movement device, and the Y-axis movement device are connected to the imaging device, and the rotation device is connected to the clamp.
10. The waveguide sheet inspection system of claim 9,
the waveguide sheet detection system further comprises a clamp support which is arranged to the base and is stationary relative to the base, wherein the rotating device is arranged to the clamp support, the clamp is connected to the rotating device and is rotatable relative to the clamp support around the rotation axis under the drive of the rotating device,
the Z-axis moving device is arranged to the base and comprises a Z-axis moving platform which is movable along the Z-axis direction relative to the base,
the X-axis moving device is arranged to the Z-axis moving platform, the X-axis moving device comprises an X-axis moving platform, the X-axis moving platform is movable along the X-axis direction relative to the Z-axis moving platform,
the Y-axis moving device is provided to the X-axis moving stage, the Y-axis moving device includes a Y-axis moving stage movable in the Y-axis direction with respect to the X-axis moving stage,
wherein the image forming device is provided to the Y-axis moving stage.
11. The waveguide sheet inspection system of claim 10, wherein the Z-axis moving device further comprises:
a Z-axis lead screw provided to the base and extending in the Z-axis direction;
the Z-axis screw nut is matched with the Z-axis screw; and
a Z-axis motor provided to the base, the Z-axis motor coupled to the control device for driving the Z-axis screw to rotate,
wherein the Z-axis moving platform is connected to the Z-axis lead screw nut.
12. The waveguide sheet inspection system of claim 10, wherein the X-axis moving device further comprises:
the X-axis lead screw is arranged to the Z-axis moving platform and extends along the X-axis direction;
the X-axis screw nut is matched with the X-axis screw; and
an X-axis motor coupled to the Z-axis translation stage for driving rotation of the X-axis screw,
wherein the X-axis moving platform is connected to the X-axis lead screw nut.
13. The waveguide sheet inspection system of claim 10, wherein the Y-axis moving device further comprises:
the Y-axis screw is arranged to the X-axis moving platform and extends along the Y-axis direction;
the Y-axis screw nut is matched with the Y-axis screw; and
a Y-axis motor provided to the X-axis moving stage, the Y-axis motor being coupled to the control device for driving the Y-axis screw to rotate,
wherein the Y-axis moving platform is connected to the Y-axis lead screw nut.
14. The waveguide sheet inspection system of claim 9, wherein the rotation device includes a rotary motor disposed to the clamp mount and coupled to the control device, and a rotary drive assembly coupled between an output shaft of the rotary motor and the clamp such that the clamp rotates with rotation of the output shaft of the rotary motor.
15. The waveguide sheet inspection system according to any one of claims 1 to 8, wherein the imaging device comprises a positioning imaging device and a detection imaging device, the relative positions of the detection imaging device and the positioning imaging device are kept unchanged, and the waveguide sheet inspection system is configured to perform the following steps in an inspection process of the waveguide sheet:
the control device controls the Z-axis moving device, the Y-axis moving device and the X-axis moving device to work so that the clamp is located at a second position P2 relative to the imaging device, and controls the rotating device to work so that the rotating angle of the clamp relative to the imaging device is a first angle R1;
the control device controls the positioning imaging device to shoot a waveguide sheet to be detected so as to obtain a second picture, and the control device controls the rotating device to work according to the second picture so that the rotating angle of the clamp relative to the imaging device is a second angle R2; and
the control device controls the positioning imaging device to shoot the waveguide sheet to be detected so as to obtain a third picture, and the control device controls the Z-axis moving device, the Y-axis moving device and the X-axis moving device to work according to the third picture so that the clamp is located at a third position P3 relative to the imaging device.
16. The waveguide sheet inspection system of claim 15,
during the detection process of the waveguide sheet, a calibration process is further included before the detection process, and the waveguide sheet detection system is configured to complete the following steps in the calibration process:
the control device controls the Z-axis moving device, the Y-axis moving device and the X-axis moving device to work so that the clamp is located at a first position P1 relative to the imaging device, and controls the rotating device to work so that the rotating angle of the clamp relative to the imaging device is the first angle R1, so that a standard waveguide sheet presents a desired image in the detection imaging device;
the control device records information of the first position P1 and information of the first angle R1;
the control device controls the Z-axis moving device, the Y-axis moving device and the X-axis moving device to work, so that the clamp is located at the second position P2 relative to the imaging device, and the calibration waveguide sheet presents a desired image in the positioning imaging device;
the control device records the information of the second position P2;
the control device controls the positioning imaging device to shoot the calibration waveguide sheet to obtain a first picture;
the control device analyzes a first rotation angle r1 of the calibration waveguide relative to a reference line in the first picture, and records information of the first rotation angle r1; and
the control means analyzes a first pixel position p1 of the characteristic point of the calibration waveguide sheet in the first picture and records information of the first pixel position p1,
the relative positions of the coupling-in grating and the coupling-out grating of the calibration waveguide sheet are the same as the relative positions of the coupling-in grating and the coupling-out grating of the waveguide sheet to be detected, and the datum line is a straight line with an unchanged angle in a shooting field of the positioning imaging device.
17. The waveguide sheet detection system according to claim 16, wherein the control device controls the rotating device to operate according to the second picture so that the angle between the clamp and the imaging device is a second angle R2, and the control device comprises:
the control device analyzes a second rotation angle R2 of the waveguide to be detected relative to the reference line in the second picture, wherein the second rotation angle R2 is a difference obtained by adding the first rotation angle R1 to the second rotation angle R2 and subtracting the first rotation angle R1.
18. The waveguide sheet inspection system of claim 16, wherein the control device controls the Z-axis moving device, the Y-axis moving device and the X-axis moving device to operate according to the third picture, so that the clamp is located at a third position P3 with respect to the imaging device, comprising:
the control device analyzes a second pixel position P2 of the feature point of the waveguide sheet to be detected in the third picture, and the control device determines the third position P3 according to the first pixel position P1 and the second pixel position P2.
19. The waveguide sheet inspection system of claim 18,
the first pixel position p1 includes a first Y-axis coordinate position Y1 in the Y-axis direction and a first X-axis coordinate position X1 in the X-axis direction,
the second pixel position p2 includes a second Y-axis coordinate position Y2 in the Y-axis direction and a second X-axis coordinate position X2 in the X-axis direction,
the third position P3 is a position moved from the first position P1 by a first movement distance D1 in the Y-axis direction and a second movement distance D2 in the X-axis direction, wherein,
D1=(Y2-Y1)×a,D2=(X2-X1)×a,
where a is the actual physical size corresponding to a pixel.
20. The waveguide sheet inspection system of claim 16,
the characteristic point is the vertex of the boundary angle of the coupling grating; and/or
The datum line is a horizontal line or a vertical line in a shooting visual field of the positioning imaging device.
21. The waveguide sheet detection system of claim 16 or 17, wherein the rotation angle of the waveguide sheet relative to the reference line is an angle between the characteristic line of the waveguide sheet and the reference line.
22. The waveguide sheet detection system of claim 21, wherein the characteristic line is an edge of an out-coupling grating of the waveguide sheet.
23. The waveguide sheet inspection system of claim 15, wherein the positioning imaging device comprises a positioning camera, the positioning camera comprising a telecentric lens.
24. The waveguide sheet inspection system of claim 23, wherein the inspection imaging device includes an optical engine and an inspection camera, wherein an optical axis of the inspection camera and an optical axis of the positioning camera both extend along the Z-axis direction, and a relative position of the optical engine and the inspection camera corresponds to a relative position of an in-grating of the waveguide sheet and an out-grating of the waveguide sheet.
25. The waveguide sheet inspection system of claim 24, wherein the inspection imaging device further comprises a carriage moving device for moving the carriage relative to the inspection camera in at least one of the Y-axis direction and the X-axis direction.
CN202210812481.0A 2022-07-11 2022-07-11 Waveguide piece detecting system Pending CN115266032A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210812481.0A CN115266032A (en) 2022-07-11 2022-07-11 Waveguide piece detecting system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210812481.0A CN115266032A (en) 2022-07-11 2022-07-11 Waveguide piece detecting system

Publications (1)

Publication Number Publication Date
CN115266032A true CN115266032A (en) 2022-11-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210812481.0A Pending CN115266032A (en) 2022-07-11 2022-07-11 Waveguide piece detecting system

Country Status (1)

Country Link
CN (1) CN115266032A (en)

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