CN115015817A - Device and method for detecting probe state abnormity and contact abnormity on line - Google Patents
Device and method for detecting probe state abnormity and contact abnormity on line Download PDFInfo
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- CN115015817A CN115015817A CN202210549414.4A CN202210549414A CN115015817A CN 115015817 A CN115015817 A CN 115015817A CN 202210549414 A CN202210549414 A CN 202210549414A CN 115015817 A CN115015817 A CN 115015817A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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Abstract
The invention discloses a device for detecting the state abnormity and the contact abnormity of a probe on line, which comprises a detection head, a bedplate fixedly connected below the detection head, a probe arranged below the bedplate, a controller, a vibration detection sensor, an inclination sensor A, an inclination sensor B, a side vertical plate, an infrared detection assembly and a resistance transmitter. The invention relates to the technical field of electronic equipment, in particular to a device and a method for detecting the state abnormity and the contact abnormity of a probe on line, which can detect the abnormity of the probe on line, such as the vertical state of the probe and whether the probe is damaged or not, ensure that the detection work of a semiconductor is carried out under the normal condition of the probe and can ensure the quality of a product.
Description
Technical Field
The invention relates to the technical field of electronic equipment, in particular to a device and a method for detecting probe state abnormity and contact abnormity on line.
Background
In the semiconductor field, probes are mostly used in the wafer testing stage, and in the actual working process, a corresponding detection system is not provided, online detection is not available, and further, when the probes are abnormal or contact abnormal, such as probe inclination, probe breakage, foreign matter carried on the surfaces of the probes and the like, the probes cannot be detected timely, and then a large number of wafers which are failed in semiconductor detection or are not detected directly appear.
Based on the occurrence of the problem, the device for detecting the abnormal state and the contact abnormal state of the probe on line is developed by my company, the probe can be detected on line, the abnormality of the probe can be found in time, and the quality of a product is ensured.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a device and a method for detecting the probe state abnormity and the contact abnormity on line, which solve the problem that the probe cannot detect the probe abnormity on line.
In order to achieve the purpose, the invention is realized by the following technical scheme: a device for detecting the state abnormality and the contact abnormality of a probe on line comprises a detection head, a bedplate is fixedly connected below the detection head, the probe is arranged below the bedplate, and a side plate and a rear plate are respectively and fixedly connected to the side surface and the rear part below the bedplate;
the controller is used for controlling the pushing and retracting work of the detection head;
the vibration detection sensor is fixedly connected below the bedplate, is abutted against the probe, is used for detecting the vibration frequency of the probe and is electrically connected with the controller;
the inclination sensor A is fixedly connected to the side panel, is used for detecting whether the probe is inclined or not, and is electrically connected with the controller;
the inclination sensor B is fixedly connected to the rear panel, is used for detecting whether the probe is inclined or not, and is electrically connected with the controller;
the side vertical plate is arranged on one side of the detection head, is parallel to the detection head and is arranged opposite to the side panel, an imaging device is arranged on the side vertical plate and is used for acquiring the integral integrity of the probe, and the imaging device is electrically connected with the controller;
the infrared detection assembly comprises an infrared transmitter and an infrared receiver which are oppositely arranged, the infrared transmitter is fixedly connected to the lower portion of the inner side of the side panel, the infrared receiver is fixedly connected to the lower portion of the inner side of the side plate, and the infrared transmitter and the infrared receiver are electrically connected with the controller.
Preferably, still including resistance transmitter, the both ends of probe and resistance transmitter are connected with current detector A and current detector B respectively through the connecting wire, current detector A and current detector B are connected with comparator A and comparator B respectively through the connecting wire, comparator A and comparator B all are connected with the controller electricity, the controller electricity is connected with the display.
Preferably, the infrared transmitter and the infrared receiver are located at the same level as the bottom end of the probe.
A method for online detection of probe condition anomalies and contact anomalies, the method comprising:
1) when the probe retracts to the original point after the round crystal is detected, the vibration detection sensor detects the amplitude of the probe, and when the amplitude is too large to cause abnormity, the machine is stopped to detect whether the probe is damaged;
2) the inclination sensor A and the inclination sensor B detect whether the probes are inclined at two sides, and if the inclination condition occurs, the machine is stopped to detect whether the probes are damaged;
3) the infrared transmitter transmits an infrared signal, and when the infrared receiver receives the signal, the machine is stopped to detect whether the probe is in shortage or inclined;
4) the imaging device shoots a film of the probe, and when the controller compares the film and finds that foreign matters or notch shadows exist on the surface of the probe, the imaging device stops to detect whether the probe is damaged;
5) current detector A and current detector B circular telegram gather the electric current of probe and resistance changer, and the current signal who will gather transmits comparator A and comparator B, confirms whether probe and resistance changer are normal state through the contrast with the default, and when the electric current is unusual or no current, the controller carries out the shut down operation and reports to the police through the display and suggests.
Advantageous effects
The invention provides a device and a method for detecting probe state abnormity and contact abnormity on line. The method has the following beneficial effects: the device and the method for detecting the state abnormity and the contact abnormity of the probe on line can detect the abnormity of the probe on line, and are used for finding out the abnormity of the probe in time, such as the vertical state of the probe and whether the probe is damaged or not, so that the detection work of the probe on a semiconductor under the normal condition is ensured, and the quality of a product can be ensured.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a bottom view of the inventive platen;
FIG. 3 is a schematic block diagram of the probe and resistive transmitter current sensing of the present invention.
In the figure: 1. the device comprises a detection head, 2, a bedplate, 3, a vibration detection sensor, 4, a probe, 5, a rear panel, 6, a side panel, 7, an inclination sensor A, 8, an infrared transmitter, 9, a side vertical plate, 10, an imaging device, 11, an infrared receiver, 12, an inclination sensor B, 13, a display, 14, a controller, 15, a comparator A, 16, a comparator B, 17, a current detector A, 18, a current detector B, 19 and a resistance transmitter.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The first embodiment is as follows:
as can be seen from fig. 1-2, an apparatus for online detecting abnormal probe status and contact comprises a detection head 1, wherein the detection head 1 is a telescopic mechanism for pushing a platen 2 to press down and pull back, the telescopic mechanism is a hydraulic cylinder or an electric cylinder, the platen 2 is fixedly connected below the detection head 1, a probe 4 is arranged below the platen 2, and a side panel 6 and a rear panel 5 are respectively fixedly connected to the lower side and the rear of the platen 2;
also comprises;
a controller 14 for controlling the pushing and retracting operations of the detection head 1;
and a vibration detection sensor 3 fixed below the platen 2 and abutting against the probe 4 for detecting the vibration frequency of the probe 4, and electrically connected to the controller 14. The vibration detection sensor 3 detects the amplitude of the probe 4, and if the amplitude is too large and abnormal, the operation is stopped to detect whether the probe 4 is broken.
An inclination sensor A7 fixed on the side panel 6 for detecting whether the probe 4 is inclined or not, and electrically connected with the controller 14;
an inclination sensor B12 fixed on the back panel 5 for detecting whether the probe 4 is inclined or not and electrically connected with the controller 14;
the inclination sensor a7 and the inclination sensor B12 detect whether the probe 4 is inclined on both sides, and stop detecting whether the probe 4 is broken if the inclination occurs.
The side vertical plate 9 is arranged on one side of the detection head 1, is parallel to the detection head 1 and is arranged opposite to the side panel 6, an imaging device 10 is arranged on the side vertical plate 9 and is used for acquiring the integral integrity of the probe 4, and the imaging device 10 is electrically connected with the controller 14;
the imaging device 10 shoots a film of the probe 4, and when the controller 14 compares the film and finds that foreign matters or notch shadows exist on the surface of the probe 4, the controller stops the operation to detect whether the probe 4 is damaged.
The infrared detection assembly comprises an infrared transmitter 8 and an infrared receiver 11 which are oppositely arranged, the infrared transmitter 8 is fixedly connected below the inner side of the side panel 6, the infrared receiver 11 is fixedly connected below the inner side of the side vertical plate 9, the infrared transmitter 8 and the infrared receiver 11 are electrically connected with the controller 14, and the infrared transmitter 8 and the infrared receiver 11 are positioned on the same horizontal plane with the bottom end of the probe 4;
the infrared transmitter 8 transmits an infrared signal, and when the infrared receiver 11 receives the signal, the halt detection probe 4 detects whether the signal is in short supply or is tilted, and if the signal is tilted, the halt detection is performed.
Example two:
as can be seen from fig. 3, the apparatus further includes a resistance transmitter 19, two ends of the probe 4 and the resistance transmitter 19 are respectively connected with a current detector a17 and a current detector B18 through connecting wires, the current detector a17 and the current detector B18 are respectively connected with a comparator a15 and a comparator B16 through connecting wires, the comparator a15 and the comparator B16 are both electrically connected with the controller 14, and the controller 14 is electrically connected with the display 13;
in the specific implementation process, it is worth particularly pointing out that the current of the probe 4 and the resistance transmitter 19 is collected as a set value through the current detector a17 and the current detector B18 in advance, during actual operation, detection can be performed after a single operation of the probe 4 or after N operations of the probe 4, during detection, the current detector a17 and the current detector B18 collect the currents of the probe 4 and the resistance transmitter 19, comparison with the set value is performed through the comparator a15 and the comparator B16, and when the current is abnormal or no current exists, the controller 14 performs shutdown operation and performs alarm prompt through the display 13.
Example three:
as can be seen from fig. 1 to 3, a method for online detecting abnormal probe status and contact abnormality includes:
1) when the probe 4 retracts to the original point after the round crystal is detected, the vibration detection sensor 3 detects the amplitude of the probe 4, and when the amplitude is too large to cause abnormity, the machine is stopped to detect whether the probe 4 is damaged;
2) the inclination sensor A7 and the inclination sensor B12 detect whether the probe 4 is inclined at two sides, and if the inclination occurs, the machine is stopped to detect whether the probe 4 is damaged;
3) the infrared transmitter 8 transmits an infrared signal, and when the infrared receiver 11 receives the signal, the shutdown detection probe 4 detects whether the infrared signal is in shortage or inclined;
4) the imaging device 10 shoots a film of the probe 4, and when the controller 14 compares the film and finds that foreign matters or gap shadows exist on the surface of the probe 4, the imaging device stops to detect whether the probe 4 is damaged;
5) the current detector A17 and the current detector B18 are electrified to collect the current of the probe 4 and the resistance transmitter 19, the collected current signals are transmitted to the comparator A15 and the comparator B16, whether the probe 4 and the resistance transmitter 19 are in a normal state or not is determined through comparison with preset values, and when the current is abnormal or no current exists, the controller 14 carries out shutdown operation and carries out alarm prompt through the display 13.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (4)
1. The utility model provides an unusual and contact unusual device of online detection probe state, includes detects head (1), the below rigid coupling of detecting head (1) has platen (2), the below of platen (2) is provided with probe (4), its characterized in that: the lower side surface and the rear part of the bedplate (2) are respectively and fixedly connected with a side panel (6) and a rear panel (5) and also comprises a connecting plate;
the controller (14) is used for controlling the pushing and retracting work of the detection head (1);
the vibration detection sensor (3) is fixedly connected below the bedplate (2), is abutted against the probe (4), is used for detecting the vibration frequency of the probe (4), and is electrically connected with the controller (14);
the inclination sensor A (7) is fixedly connected to the side panel (6) and used for detecting whether the probe (4) is inclined or not and is electrically connected with the controller (14);
the inclination sensor B (12) is fixedly connected to the rear panel (5) and used for detecting whether the probe (4) is inclined or not and is electrically connected with the controller (14);
the side vertical plate (9) is arranged on one side of the detection head (1), arranged in parallel with the detection head (1) and arranged opposite to the side panel (6), an imaging device (10) is arranged on the side vertical plate (9) and used for acquiring the integral integrity of the probe (4), and the imaging device (10) is electrically connected with the controller (14);
the infrared detection assembly comprises an infrared transmitter (8) and an infrared receiver (11) which are oppositely arranged, the infrared transmitter (8) is fixedly connected to the lower portion of the inner side of the side panel (6), the infrared receiver (11) is fixedly connected to the lower portion of the inner side of the side plate (9), and the infrared transmitter (8) and the infrared receiver (11) are electrically connected with the controller (14).
2. The apparatus for on-line detecting abnormal probe status and abnormal contact according to claim 1, wherein: still including resistance transmitter (19), the both ends of probe (4) and resistance transmitter (19) are connected with current detector A (17) and current detector B (18) respectively through the connecting wire, current detector A (17) and current detector B (18) are connected with contrast ware A (15) and contrast ware B (16) respectively through the connecting wire, contrast ware A (15) and contrast ware B (16) all are connected with controller (14) electricity, controller (14) electricity is connected with display (13).
3. The apparatus for on-line detection of abnormal probe status and abnormal contact according to claim 1, wherein: the infrared transmitter (8) and the infrared receiver (11) are positioned on the same horizontal plane with the bottom end of the probe (4).
4. A method for detecting probe state abnormity and contact abnormity on line is characterized in that: the method comprises the following steps:
1) when the probe (4) retracts to the original point after the round crystal is detected, the vibration detection sensor (3) detects the amplitude of the probe (4), and when the amplitude is too large to cause abnormality, the machine is stopped to detect whether the probe (4) is damaged;
2) the inclination sensor A (7) and the inclination sensor B (12) detect whether the probe (4) inclines or not at two sides, and if the inclination condition occurs, the machine is stopped to detect whether the probe (4) is damaged or not;
3) the infrared transmitter (8) transmits an infrared signal, and when the infrared receiver (11) receives the signal, the machine is stopped to detect whether the probe (4) is in shortage or inclined;
4) the imaging device (10) shoots a film of the probe (4), and when a controller (14) compares the film and finds that foreign matters or notch shadows exist on the surface of the probe (4), the imaging device is stopped to detect whether the probe (4) is damaged;
5) the current detector A (17) and the current detector B (18) are electrified to collect the current of the probe (4) and the resistance transmitter (19), collected current signals are transmitted to the comparator A (15) and the comparator B (16), whether the probe (4) and the resistance transmitter (19) are in a normal state or not is determined through comparison with preset values, and when the current is abnormal or no current exists, the controller (14) carries out shutdown operation and carries out alarm prompt through the display (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210549414.4A CN115015817B (en) | 2022-05-20 | 2022-05-20 | Device and method for detecting abnormal state and abnormal contact of probe on line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210549414.4A CN115015817B (en) | 2022-05-20 | 2022-05-20 | Device and method for detecting abnormal state and abnormal contact of probe on line |
Publications (2)
| Publication Number | Publication Date |
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| CN115015817A true CN115015817A (en) | 2022-09-06 |
| CN115015817B CN115015817B (en) | 2023-08-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202210549414.4A Active CN115015817B (en) | 2022-05-20 | 2022-05-20 | Device and method for detecting abnormal state and abnormal contact of probe on line |
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| US20040083073A1 (en) * | 2002-08-21 | 2004-04-29 | Nec Electronics Corporation | Probe testing method and apparatus for determining acceptable/defective end shape of contact probe through image analysis |
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| CN111600383A (en) * | 2020-05-12 | 2020-08-28 | 合肥中科类脑智能技术有限公司 | Intelligent integrated inspection device for power transmission line |
| CN112325923A (en) * | 2020-07-29 | 2021-02-05 | 国网湖北省电力有限公司襄阳供电公司 | Distribution network overhead line defect real-time supervision device |
| CN113671339A (en) * | 2021-09-22 | 2021-11-19 | 广州粤芯半导体技术有限公司 | Apparatus and method for verifying probe abnormality and contact abnormality and wafer testing method |
-
2022
- 2022-05-20 CN CN202210549414.4A patent/CN115015817B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040083073A1 (en) * | 2002-08-21 | 2004-04-29 | Nec Electronics Corporation | Probe testing method and apparatus for determining acceptable/defective end shape of contact probe through image analysis |
| JP2007071765A (en) * | 2005-09-08 | 2007-03-22 | Tokyo Seimitsu Co Ltd | Probe control apparatus and probe control method for measuring probe position |
| JP2009162723A (en) * | 2008-01-10 | 2009-07-23 | Fujitsu Microelectronics Ltd | Testing device and testing method |
| CN201331816Y (en) * | 2009-01-06 | 2009-10-21 | 西安同步电气有限责任公司 | Anti-theft device for video monitoring transmission line |
| CN102646307A (en) * | 2012-04-28 | 2012-08-22 | 成都电业局 | Monitoring device capable of preventing external force damage of power transmission line pole tower |
| CN204946279U (en) * | 2015-09-16 | 2016-01-06 | 国家电网公司 | Based on Fusion electric power line pole tower abnormity early warning device |
| CN107436373A (en) * | 2016-05-26 | 2017-12-05 | 中芯国际集成电路制造(上海)有限公司 | A kind of clear needle system of card grinding and method for being used to test probe oxidation |
| CN208921847U (en) * | 2018-08-29 | 2019-05-31 | 武汉电信器件有限公司 | A kind of laser driving probe unit |
| CN111600383A (en) * | 2020-05-12 | 2020-08-28 | 合肥中科类脑智能技术有限公司 | Intelligent integrated inspection device for power transmission line |
| CN112325923A (en) * | 2020-07-29 | 2021-02-05 | 国网湖北省电力有限公司襄阳供电公司 | Distribution network overhead line defect real-time supervision device |
| CN113671339A (en) * | 2021-09-22 | 2021-11-19 | 广州粤芯半导体技术有限公司 | Apparatus and method for verifying probe abnormality and contact abnormality and wafer testing method |
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| CN115015817B (en) | 2023-08-11 |
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