CN114950584A - Three-dimensional micro-channel chip structure for generating liquid drops and manufacturing method - Google Patents
Three-dimensional micro-channel chip structure for generating liquid drops and manufacturing method Download PDFInfo
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Abstract
The invention discloses a three-dimensional micro-channel chip structure for generating liquid drops and a manufacturing method thereof, wherein the three-dimensional micro-channel chip structure comprises five micro-channel layers which are arranged up and down, the first micro-channel layer and the second micro-channel layer are used for leading in and shunting a first phase and a second phase, the third micro-channel layer is provided with mixing units which are arranged in a matrix form and are used for mixing the first phase and the second phase, the fourth micro-channel flow is provided with liquid drop releasing units which are in one-to-one correspondence with the mixing units and are used for forming liquid drops after the first phase and the second phase are mixed, and the fifth micro-channel is used for collecting and leading out the liquid drops. The invention solves the problem that a plane liquid drop generating chip can produce less liquid drops, reduces the floor area of a single liquid drop generating module by using a three-dimensional micro-channel, can realize the liquid drop output of a few liters per hour through matrix arrangement, and is expected to realize annual ton grade.
Description
Technical Field
The invention belongs to the technical field of micromachining, and particularly relates to a three-dimensional micro-channel chip structure for droplet generation and a manufacturing method thereof.
Background
The traditional liquid drops are generated by adopting methods such as an oscillation method, a stirring method, ultrasonic emulsification and the like, and are applied to the fields of fixed-point transportation of foods, cosmetics, medicines and the like. With the rapid development of biological detection technology and micro-nano materials, micro-nano sized droplets are beginning to be applied to micro-molecular biological detection, micro-capsule preparation, micro-nano particle preparation and other works.
Aiming at the preparation of microcapsules and micro-nano particles, how to realize high-flux liquid drop generation is the key of commercialization of a liquid drop generation chip. The existing planar microfluid droplet generation chip increases the number of parallel droplet generation modules in a parallel array mode, and adopts a glass-silicon-glass material, wherein the length of a single planar droplet generation module is 1.4mm, the width of the single planar droplet generation module is 80um, the size of generated droplets is 21-28um, the yield per hour is up to the liter level, and the yield of the droplets needs to be further improved.
Disclosure of Invention
Aiming at the problems and the defects of the prior technical scheme, the invention discloses a three-dimensional array type three-dimensional micro-channel chip structure applied to liquid drop generation and a manufacturing method thereof.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
a three-dimensional micro-channel chip structure for generating liquid drops,
the beneficial effects of the invention are as follows:
1) the three-dimensional array micro-channel structure of the chip for generating the micro-fluid liquid drops and the manufacturing method thereof are provided, the problem that the planar micro-fluid liquid drop generating chip can generate less liquid drops is solved, the three-dimensional micro-channel is applied to reduce the floor area of a single liquid drop generating channel, wherein the size of a fluid shearing part can be as small as 1-2 um;
2) through the array type three-dimensional micro-channel, the size of the liquid drops is in the range of 5um to hundreds of um, the high yield of the liquid drops of a plurality of liters per hour can be achieved, and the production of ton grade per year is expected to be realized.
Drawings
FIG. 1 is a three-dimensional array micro flow channel structure;
FIG. 2 is an exploded view of a three-dimensional array micro flow channel structure;
FIG. 3 is a cross-sectional view of a three-dimensional array micro flow channel structure;
FIG. 4 is a schematic diagram (three-dimensional diagram) of the generation of three-dimensional array micro-channel droplets;
FIG. 5 is a schematic diagram (cross-sectional view) of the generation of three-dimensional array micro-channel droplets;
FIGS. 6 to 12 are flow charts of the manufacturing process of the three-dimensional array micro flow channel.
Detailed Description
The invention is further explained below with reference to the figures and the specific embodiments. The drawings are only schematic and can be easily understood, and the specific proportion can be adjusted according to design requirements.
The present embodiment discloses a three-dimensional array micro-channel chip structure for generating liquid droplets, which can refer to fig. 1 to 3, and includes five micro-channel layers, from bottom to top, a first micro-channel layer 100, a second micro-channel layer 200, a third micro-channel layer 300, a fourth micro-channel layer 400, and a fifth micro-channel layer 500.
The first micro-channel layer 100 has a first vertical micro-channel 101 and a first semi-open planar micro-channel 102;
the second micro-channel layer 200 has a second vertical micro-channel 201;
the third micro-channel layer 300 has a second semi-open planar micro-channel 301, a third vertical micro-channel 302 and a third semi-open planar micro-channel 303;
the fourth micro channel layer 400 has a fourth vertical micro channel 401 and a fifth vertical micro channel 402;
the fifth microchannel layer 500 has a fourth semi-open planar microchannel 501 and a sixth vertical microchannel 502.
If the micro-channel chip structure is used for generating oil-in-water droplets, the walls of the micro-channels need to have hydrophilicity; if water-in-oil droplets are formed, the microchannel walls need to be hydrophobic. The hydrophilicity and hydrophobicity of the micro flow channel can be achieved by material selection or surface modification of the channel walls.
The five micro-channel layers form a plurality of channels for introducing, dividing and collecting fluid through superposition conduction, for example, when the continuous phase fluid and the discrete phase fluid generate droplets:
the first semi-open type plane micro-channel 102 is divided into a continuous phase dispersion channel 105 and a discrete phase dispersion channel 106 which are designed in an interdigital mode, and the first vertical micro-channel 101 is divided into a continuous phase inlet 103 and a discrete phase inlet 104 which are communicated with the continuous phase dispersion channel 105 and the discrete phase dispersion channel 106 in a one-to-one correspondence mode; the first microfluidic layer 100 is used for independent entry and transmission of multiphase fluid;
the second vertical microchannel 201 is divided into a plurality of continuous phase channels 202 and discrete phase channels 203 which are respectively communicated with the continuous phase dispersion channel 105 and the discrete phase dispersion channel 106; the second microfluidic layer 200 is used for shunting fluid;
the third micro-channel layer 300 forms a plurality of mixing units which are arranged in an array manner, each mixing unit is formed by combining a second semi-open type plane micro-channel 301, a third vertical micro-channel 302 and a third semi-open type plane micro-channel 303 from bottom to top, is divided into a continuous phase channel 304 and a discrete phase channel 305, and is respectively communicated with the continuous phase channel 202 and the discrete phase channel 203 correspondingly, so that the continuous phase and the discrete phase respectively enter the mixing units; in this embodiment, each mixing unit communicates with 1 discrete phase flow channel 203 and 2 continuous phase flow channels 202, and the discrete phase flow channel 203 is located between two continuous phase flow channels 202; the second semi-open type plane micro-channel 301 has a winding channel structure and is used as a fluid flow resistance channel to ensure that continuous phase and discrete phase pressure entering the mixing unit are consistent; the third semi-open planar fluidic channel 303 forms a fluid sink that communicates the continuous phase channel 304 and the discrete phase channel 305.
The fourth vertical micro-channel 401 and the fifth vertical micro-channel 402 are connected up and down one by one to form a droplet release unit and are communicated with the mixing units one by one, the fourth vertical micro-channel 401 forms fluid shearing, the fifth vertical micro-channel 402 is used for droplet release, and fluid two phases of each mixing unit are mixed to form droplets in the fourth micro-channel layer 400; that is, the third micro-channel layer 300 and the fourth micro-channel layer 400 are combined to form a single droplet generation module, and a plurality of modules are arranged in an array.
The fifth vertical micro-channel 402, the fourth semi-open planar micro-channel 501 and the sixth vertical micro-channel 502, wherein the fourth semi-open planar micro-channel 501 is used for collecting liquid drops, and the sixth vertical micro-channel 502 is provided with a liquid drop outlet used for leading out liquid drops.
For the three-dimensional array micro-channel chip structure for generating liquid drops, referring to fig. 4-5, the continuous phase fluid and the discrete phase fluid respectively pass through the first micro-channel layer, the second micro-channel layer, the third micro-channel layer and the fourth micro-channel layer to form liquid drops, and the fifth micro-channel layer is used for collecting and leading out the liquid drops.
First, continuous phase fluid 602 passes through continuous phase inlet 103, and discrete phase fluid 601 passes through discrete phase inlet 104, is introduced into the microchannel, and then passes through continuous phase dispersion channel 105 and discrete phase dispersion channel 106 to reach a single droplet generation module. Further, after the fluid flows through the continuous phase channel 202 (discrete phase channel 203), the second semi-open type plane micro channel 301, the continuous phase channel 304 (discrete phase channel 305) to the third semi-open type plane micro channel 303 to realize fluid convergence, the fluid converges in the fourth vertical micro channel 401 and forms a droplet 603 through the fifth vertical micro channel 402. Finally, the same positions of the fourth vertical micro-channel 401 and the fifth vertical micro-channel 402 in the array generate liquid droplets, the liquid droplets are communicated with the fourth semi-open type plane micro-channel 501, and a large number of liquid droplets are led out through the sixth vertical micro-channel 502. The generation of droplets of 5um to hundreds um level can be realized by respectively controlling the flow (ul/min) of continuous phase fluid and discrete phase fluid entering the chip and the size of the shearing part of micro-channel fluid to be several micrometers/dozens of micrometers.
The fluid flow resistance channel designed in the third micro-channel layer 300 ensures that the dynamic pressure of the continuous phase and the dispersed phase entering each droplet generation module in the array is consistent. Tens of thousands of single three-dimensional micro-channel array liquid drop generating modules are arranged in an array manner, namely liquid drops with the volume per hour are generated.
With further reference to fig. 6-12, the present example also discloses a method for manufacturing a three-dimensional array micro flow channel chip for oil-in-water droplet generation, comprising the steps of:
step 1, as shown in fig. 6(a), a first micro-channel layer 100 uses polydimethylsiloxane as a substrate, a first vertical micro-channel 101 is processed on a lower surface 110 by a polymer replication forming technology, as shown in fig. 6(b), a first semi-open planar micro-channel 102 is processed on an upper surface 120, the first vertical micro-channel 101 is communicated with the first semi-open planar micro-channel 102, and a hydrophilic coating is formed on the micro-channel;
step 2, as shown in fig. 7, the second micro-channel layer 200 uses glass as a substrate, and a second vertical micro-channel layer 201 communicating the lower surface 210 and the upper surface 220 can be formed by a laser processing technique;
step 3, as shown in fig. 8(a), the third micro-channel layer 300 uses silicon as a substrate, and etches a second semi-open planar micro-channel 301 on the lower surface 310 by a deep reactive ion etching technique, as shown in fig. 8(b), and etches a third semi-open planar micro-channel 303 on the upper surface 320, as shown in fig. 8(c), and processes a third vertical micro-channel 302 on the second semi-open planar micro-channel 303 downward;
step 4, as shown in fig. 9(a), after the fourth channel layer 400 is formed by using glass as a substrate and forming a fifth vertical micro channel 402 on the upper surface 420 by using a laser processing technique, as shown in fig. 9(b), a fourth vertical micro channel 401 is formed on the lower surface 410;
step 5, as shown in fig. 10(a), the fifth micro-channel layer 500 uses polydimethylsiloxane as a substrate, and a fourth semi-open planar micro-channel 501 is processed on the lower surface 510 by a polymer replication forming technique, as shown in fig. 10(b), a sixth vertical micro-channel 502 is processed on the upper surface 120, and the fourth semi-open planar micro-channel 501 is communicated with the sixth vertical micro-channel 502, and a hydrophilic coating is formed on the micro-channel;
step 6, as shown in fig. 11, a silicon glass anodic bonding process is adopted, and a second channel layer 200 and a fourth channel layer 400 are respectively bonded on two sides of a third channel layer 300 so as to communicate a second vertical channel layer 201, a second semi-open type plane micro channel 301, a third vertical micro channel 302, a third semi-open type plane micro channel 303, a fourth vertical micro channel 401 and a fifth vertical micro channel 402;
step 7, as shown in fig. 12, a plasma bonding method is adopted on the basis of step 7, the first micro-channel layer 100 is bonded on the lower surface of the second micro-channel layer 200, and the fifth micro-channel layer 100 is bonded on the upper surface of the fourth micro-channel layer 400, so that the communication between the first vertical micro-channel 101 and the sixth vertical micro-channel is realized.
The minimum characteristic size of the micro-channel can reach 1-2um, and the micro-channel can also be controlled to be dozens or hundreds of micrometers; the footprint of a single droplet generation module is less than 1mm x 50 um.
In the steps 1 and 5, the substrate can be made of silicon, glass, Teflon, acrylic or other high polymer materials besides polydimethylsiloxane; in the steps 1 and 5, a deep reactive ion etching technology or a laser-induced etching rapid prototyping technology or a wet etching or hot embossing technology or laser ablation or sand blasting or ultrasonic micromachining or CNC machining and other methods can be selected besides the polymer replication forming technology;
in the steps 2 and 4, the substrate can be made of silicon, teflon, acrylic, polydimethylsiloxane or other high polymer materials besides glass as a base; in the steps 2 and 4, in addition to the laser processing technology, a deep reactive ion etching technology or a laser induced etching rapid prototyping technology or a wet etching or hot embossing technology or laser ablation or sand blasting or ultrasonic micro-processing or CNC machining and other methods can be selected;
in the step 3, the substrate can be made of glass, Teflon, acrylic, polydimethylsiloxane or other high polymer materials besides silicon as a substrate; in step 3, in addition to the deep reactive ion etching technology, a laser-induced etching rapid prototyping technology, a wet etching technology, a hot embossing technology, a laser ablation technology, a sand blasting technology, an ultrasonic micro-machining technology, a CNC machining technology and other methods can be selected;
in step 6, besides the silicon glass anodic bonding process, methods such as thermal bonding, adhesive bonding, metal interlayer bonding or low-temperature bonding technology can be adopted.
In step 7, in addition to the plasma bonding method, thermal bonding, adhesive bonding, metal interlayer bonding, or low-temperature bonding techniques may be used.
The above embodiments are only used to further illustrate the three-dimensional micro-channel array chip structure for droplet generation and the manufacturing method thereof, but the present invention is not limited to the embodiments, and any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention fall within the protection scope of the technical solution of the present invention.
Claims (10)
1. A three-dimensional micro-channel chip structure for generating liquid drops is characterized in that: the micro-channel structure comprises a first micro-channel layer, a second micro-channel layer, a third micro-channel layer, a fourth micro-channel layer and a fifth micro-channel layer from bottom to top;
the first microfluidic layer has a first vertical microchannel for fluid entry and a first semi-open planar microchannel for fluid dispersion;
the second micro-channel layer is provided with a plurality of second vertical micro-channels which are arranged in an array manner; the first vertical micro-channel, the first semi-open type plane micro-channel and the second vertical micro-channel form a first-phase channel and a second-phase channel which are mutually independent;
the third micro-channel layer is provided with a plurality of mixing units which are arranged in an array manner, and each mixing unit is formed by combining a second semi-open type plane micro-channel, a third vertical micro-channel and a third semi-open type plane micro-channel from bottom to top; each mixing unit is communicated with the second vertical micro-channel of the first phase and the second vertical micro-channel of the second phase and is used for mixing the first phase and the second phase;
the fourth micro-channel layer is provided with liquid drop release units which are correspondingly communicated with the outlets of the mixing units one by one, and each liquid drop release unit is formed by combining a fourth vertical micro-channel and a fifth vertical micro-channel;
the fifth micro-channel layer is provided with a fourth semi-open type plane micro-channel for converging the liquid drops formed by the liquid drop releasing unit and a sixth vertical micro-channel for leading out the liquid drops.
2. The three-dimensional microfluidic chip structure for droplet generation of claim 1, wherein: the first semi-open type plane micro-channel is divided into a first phase dispersing channel and a second phase dispersing channel which are designed in an interdigital mode, and the first vertical micro-channel is divided into a first phase inlet and a second phase inlet which are communicated with the first phase dispersing channel and the second phase dispersing channel in a one-to-one correspondence mode.
3. The three-dimensional micro flow channel chip structure for droplet generation according to claim 1, wherein: the fourth perpendicular miniflow channel is connected the export of mixing unit, the fourth perpendicular miniflow channel is used for forming the fluid and cuts, fourth perpendicular miniflow channel size range is 1-100 um.
4. The three-dimensional micro flow channel chip structure for droplet generation according to claim 1, wherein: the second semi-open type plane micro-channel is provided with a winding channel structure and is used as a fluid flow resistance channel to enable the dynamic pressure of the first phase and the dynamic pressure of the second phase entering the plurality of mixing units arranged in an array mode to be consistent.
5. The three-dimensional micro flow channel chip structure for droplet generation according to claim 1, wherein: the first and second phases are a continuous phase fluid and a discrete phase fluid, which are formed into droplets by the mixing unit and the droplet discharge unit.
6. The three-dimensional micro flow channel chip structure for droplet generation according to claim 5, wherein: the mixing unit communicates the second perpendicular micro-channel of two continuous phases and the second perpendicular micro-channel of a discrete phase, and the second perpendicular micro-channel of a discrete phase is located in the middle of the second perpendicular micro-channel of two continuous phases, the discrete phase and the continuous phase are in mix in the third semi-open plane micro-channel.
7. The three-dimensional micro flow channel chip structure for droplet generation according to claim 1, wherein: the mixing unit and the droplet release unit form a droplet generation module, and the floor area of the droplet generation module is smaller than 1mm x 50 um.
8. A method for manufacturing a three-dimensional micro flow channel chip structure for droplet generation according to any one of claims 1 to 7, comprising: the method comprises the following steps:
1) the first micro-channel layer adopts a first substrate, a first vertical micro-channel is processed on the lower surface, a first semi-open type plane micro-channel is processed on the upper surface, and the first vertical micro-channel is communicated with the first semi-open type plane micro-channel;
2) the second micro-flow channel layer adopts a second substrate to form a second vertical micro-flow channel layer communicated with the lower surface and the upper surface;
3) the third micro-channel layer adopts a third substrate, a second semi-open type plane micro-channel is processed on the lower surface, a third semi-open type plane micro-channel is processed on the upper surface, and a third vertical micro-channel is processed downwards on the second semi-open type plane micro-channel;
4) the fourth micro-channel layer adopts a fourth substrate, and a fifth vertical micro-channel is processed on the upper surface and a fourth vertical micro-channel is processed on the lower surface;
5) the fifth micro-channel layer adopts a fifth substrate, a fourth semi-open type plane micro-channel is processed on the lower surface, a sixth vertical micro-channel is processed on the upper surface, and the fourth semi-open type plane micro-channel is communicated with the sixth vertical micro-channel;
6) bonding a second substrate and a fourth substrate on two sides of the third substrate respectively to communicate the second vertical micro-channel layer, the second semi-open type plane micro-channel, the third vertical micro-channel, the third semi-open type plane micro-channel, the fourth vertical micro-channel and the fifth vertical micro-channel;
7) and the first substrate is bonded on the lower surface of the second substrate, and the fifth substrate is bonded on the upper surface of the fourth substrate, so that the communication from the first vertical micro-channel to the sixth vertical micro-channel is realized.
9. The method of manufacturing according to claim 8, wherein: the materials of the first substrate, the second substrate, the third substrate, the fourth substrate and the fifth substrate comprise polydimethylsiloxane, acrylic, silicon, glass or Teflon; in the steps 1) to 5), the processing includes a polymer replication forming technology, a deep reactive ion etching technology, a laser-induced etching rapid prototyping technology, wet etching, a hot embossing technology, laser ablation, sand blasting, ultrasonic micro-processing or CNC machinery.
10. The method of manufacturing according to claim 8, wherein: in the step 6) and the step 7), the bonding includes thermal bonding, adhesive bonding, metal interlayer bonding or low-temperature bonding.
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| WO2018033609A1 (en) * | 2016-08-19 | 2018-02-22 | Dublin City University | A microfluidic device |
| CN107583692A (en) * | 2017-05-23 | 2018-01-16 | 深圳市博瑞生物科技有限公司 | Drop micro-fluidic chip and preparation method thereof |
| CN110918141A (en) * | 2018-09-20 | 2020-03-27 | 北京怡天佳瑞科技有限公司 | Micro-fluidic chip, device containing micro-fluidic chip and application for preparing micro-emulsified liquid drops |
| CN113304790A (en) * | 2021-05-26 | 2021-08-27 | 南京工业大学 | Three-dimensional microfluidic chip for realizing high-throughput preparation of micro-droplets by parallelization design |
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