CN114823331B - Nitrogen-hydrogen annealing equipment for manufacturing triode device and process thereof - Google Patents
Nitrogen-hydrogen annealing equipment for manufacturing triode device and process thereof Download PDFInfo
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- CN114823331B CN114823331B CN202210428801.2A CN202210428801A CN114823331B CN 114823331 B CN114823331 B CN 114823331B CN 202210428801 A CN202210428801 A CN 202210428801A CN 114823331 B CN114823331 B CN 114823331B
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- 238000000137 annealing Methods 0.000 title claims abstract description 153
- 239000001257 hydrogen Substances 0.000 title claims abstract description 69
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 69
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title claims abstract description 11
- 230000008569 process Effects 0.000 title claims abstract description 10
- 238000009434 installation Methods 0.000 claims abstract description 80
- 238000009423 ventilation Methods 0.000 claims abstract description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 102
- 230000005540 biological transmission Effects 0.000 claims description 65
- 229910052757 nitrogen Inorganic materials 0.000 claims description 51
- 238000007789 sealing Methods 0.000 claims description 40
- 230000007246 mechanism Effects 0.000 claims description 35
- 150000002431 hydrogen Chemical class 0.000 claims description 33
- 238000010438 heat treatment Methods 0.000 claims description 25
- 239000007789 gas Substances 0.000 claims description 23
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 17
- 230000000149 penetrating effect Effects 0.000 claims description 11
- 230000017525 heat dissipation Effects 0.000 claims description 9
- 238000005096 rolling process Methods 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 230000008859 change Effects 0.000 description 8
- 230000003321 amplification Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
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- 206010020649 Hyperkeratosis Diseases 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
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- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
- F27D11/02—Ohmic resistance heating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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Abstract
The invention discloses nitrogen-hydrogen annealing equipment for manufacturing triode devices and a process thereof, and the nitrogen-hydrogen annealing equipment comprises an installation platform, a control box and a mobile station, wherein the control box is installed at the top of the installation platform, the installation box is installed at the top of the installation platform and is positioned on one side of the control box, an annealing box is installed inside the installation box, sliding grooves are symmetrically formed in the inner wall of the bottom of the annealing box, the mobile station is installed on the inner wall of the bottom of the annealing box through the sliding grooves, a first installation plate is installed at the top of the mobile station, a fixing groove is formed in the top of the first installation plate, a rotating shaft is installed on the inner wall of the fixing groove, a support plate is installed at the top of the rotating shaft, and a ventilation box is installed on the inner wall of the annealing box. According to the invention, one end of the triode to be annealed is placed in the fixed groove, and the other end of the triode to be annealed leans against the supporting plate and is limited by the limiting plate, so that the triode is more stable in moving.
Description
Technical Field
The invention relates to the technical field of triode device manufacturing, in particular to nitrogen-hydrogen annealing equipment and a process for manufacturing a triode device.
Background
The amplification factor and the storage time are one of the most important parameters of the triode, and the amplification factor should be as high as possible so as to obtain the maximum working current with the minimum base current and give the lowest possible saturation voltage, which simultaneously reduces the loss in the output and drive circuits, but the amplification factor must be limited in consideration of the switching speed and the current tolerance, so that the amplification factor must be strictly controlled in the daily production process.
The defects of the existing nitrogen-hydrogen annealing equipment and the process thereof are as follows:
1. patent document CN215725065U discloses a box annealing stove, "including box annealing stove body, be equipped with the base on box annealing stove body, top one side of base is equipped with the control by temperature change box, the inner wall equidistant of control by temperature change box is equipped with the control by temperature change pipe, the one end port of control by temperature change box is equipped with the chamber door, a side surface of chamber door that links up with the control by temperature change box is equipped with the linkage plate, be equipped with hydraulic drive hydro-cylinder between linkage plate below and the control by temperature change box top, the top opposite side symmetry of base is equipped with the removal slide rail, it carries the thing groove to be equipped with above the removal slide rail, be equipped with the threaded rod in the anticreep head of carrying the thing tank bottom, the one end of threaded rod is equipped with hydraulic drive motor, the business turn over of hydraulic drive motor drive year thing groove, this box annealing stove can be applicable to the annealing processing of different spare parts, realize automatic feeding, automatic material returned, annealing treatment effect is good. However, in this annealing furnace, when the part is processed, the part is moved without installing a stopper, and the processing of the part is affected.
2. Patent document CN205740735U discloses a box-type annealing furnace with high uniformity, belonging to the technical field of optical material heat treatment. The method mainly solves the problem of poor annealing uniformity in the prior annealing technology. It is mainly characterized in that: the box-type annealing furnace is a cubic box-type annealing furnace with a square horizontal section; heating elements are arranged on all walls of the periphery of the hearth of the box-type annealing furnace, and heat-conducting plates are arranged outside the heating elements; the middle part of the box-type annealing furnace hearth is provided with a three-dimensional heating column which is fixed on a rotating shaft passing through the top, and the rotating shaft is connected with a transmission device outside the furnace. The uniformity of the temperature field of the annealing furnace is greatly improved, the temperature of the product can be rapidly kept consistent with the temperature field during temperature rising and temperature lowering, and the temperature of the center and the surface of the product is more consistent. Use the utility model discloses the product of annealing, not only individual homogeneity is good, and whole stove goods all have high uniformity, are fit for being used for the annealing of high-end optical equipment's goods. However, the annealing furnace cannot be added with nitrogen and hydrogen gas, thereby influencing the annealing effect of parts.
3. Patent document CN210367787U discloses a box annealing furnace, "including the inner shell that has furnace, the work or material rest of setting in furnace, and the water conservancy diversion system, the water conservancy diversion system is including setting up at the furnace top and along the guiding plate that induced drafts that vertical direction extends, be located the centrifugal fan that induced drafts the honeycomb duct top, the cover is established at the outside water conservancy diversion system of centrifugal fan week side, the water conservancy diversion system includes upper cover plate and the lower apron that sets up for the level, be provided with the water conservancy diversion baffle that a plurality of relative centrifugal fan are the vortex form between upper cover plate and the lower apron, the upper cover plate, the lower cover plate, the water conservancy diversion baffle encloses into a plurality of horizontal water conservancy diversion passageways, the water conservancy diversion system is still including setting up the vertical water conservancy diversion passageway of furnace week side, be provided with heating device in the vertical water conservancy diversion passageway, the inner wall of furnace still is provided with a plurality of injection pipes that extend along the horizontal direction. The box-type annealing furnace can ensure that air flow enters the hearth according to uniform flow and flow velocity, the temperature in the furnace is uniform, the heat transfer efficiency is improved, and the annealing treatment time is reduced. However, the annealing furnace cannot be suitable for various annealing parts, and the application range is low.
4. Patent document CN212725240U discloses a control by temperature change box annealing stove, "including annealing stove body, voltmeter and heat dissipation fan, the downside of annealing stove body is fixed with first rubber pad, and the outside of first rubber pad is provided with the callus on the sole, the second rubber pad is installed in the outside of annealing stove body, and the place ahead left side rotation of annealing stove body is connected with the furnace gate, the voltmeter is installed on the annealing stove body, the rear side welding of annealing stove body has the fixed plate, and the rear side integration of fixed plate is provided with the dead lever, the heat dissipation fan is fixed on the fixed plate, the inside of installation frame closely laminates there is the installation piece, the outside welding of clamping ring has the heat dissipation frame. This box annealing stove of control by temperature change facilitates the transport and removes, can effectively protect the lifting point, avoids causing the injury to the annealing stove, and can effectively avoid the mechanism that dispels the heat to go up the ash that falls, and the installation and the dismantlement of being convenient for, the radiating effect can be guaranteed to convenient clearance. However, the annealing furnace is not provided with a quick exhaust pipe, and the air inside cannot be quickly exhausted after the processing is completed.
Disclosure of Invention
The present invention is directed to a nitrogen-hydrogen annealing apparatus and a process thereof for manufacturing a triode device, so as to solve the problems mentioned in the background art.
In order to achieve the purpose, the invention provides the following technical scheme: a nitrogen-hydrogen annealing device for manufacturing triode devices comprises an installation platform, a control box and a mobile station, wherein the control box is installed at the top of the installation platform, the installation box is installed at the top of the installation platform and is positioned on one side of the control box, an annealing box is installed inside the installation box, sliding grooves are symmetrically formed in the inner wall of the bottom of the annealing box, and the mobile station is installed on the inner wall of the bottom of the annealing box through the sliding grooves;
a first mounting plate is mounted at the top of the mobile station, a fixing groove is formed in the top of the first mounting plate, a rotating shaft is mounted on the inner wall of the fixing groove, a supporting plate is mounted at the top of the rotating shaft, limiting plates are symmetrically mounted on the front face of the supporting plate, a connecting rod is mounted at the top of the first mounting plate, and a second mounting plate is mounted at the top end of the connecting rod;
install the box of ventilating on the inner wall of annealing case, sealing door is installed in the front of annealing case, the internally mounted of install bin has fixed case.
Preferably, the bottom of the mounting table is symmetrically provided with supporting legs.
Preferably, a heat dissipation window is installed on one side of the control box, and a control panel is installed on the front face of the control box.
Preferably, the warning light is installed at the top of install bin, and the top of install bin is run through and is installed the blast pipe, and the outside of blast pipe is run through and is installed first solenoid valve, and the gas outlet is installed on the top of blast pipe.
Preferably, the installed part is installed to the front symmetry of annealing case, and the outside of installed part is connected with the outside of sealing door through the moving part, has seted up the mounting groove on the both sides inner wall of annealing case, and the internally mounted of mounting groove has a plurality of heating rods, and the connecting piece is installed in the front of annealing case.
Preferably, the bottom of the mobile station is symmetrically provided with sliding blocks, the sliding blocks are embedded with the inner sides of the sliding grooves, and the front surface of the mobile station is provided with a moving-out handle.
Preferably, the both sides through mounting of box of ventilating have the connector, and the inboard through mounting of box of ventilating has the installation shell, and the front through mounting of installation shell has a plurality of to go out the gas head.
Preferably, sealed piece is installed to one side of sealing door, and sealed piece and the inboard looks gomphosis of feed inlet of annealing box, and the fixed plate is installed in the front of sealing door, and the threaded rod is installed through the screw thread penetration in one side of fixed plate, and the rolling disc is installed to the one end of the positive screw thread mouth looks gomphosis threaded rod of the one end of threaded rod and connecting piece.
Preferably, the front of the fixed box is provided with the dismounting door through a bolt, the inner wall of the bottom of the fixed box is provided with a nitrogen transmission mechanism through a bolt, the output end of the nitrogen transmission mechanism is provided with a nitrogen transmission pipe, the outer side of the nitrogen transmission pipe is provided with a second electromagnetic valve, one end of the nitrogen transmission pipe is connected with one end of the connector, the inner wall of the bottom of the fixed box is provided with a hydrogen transmission mechanism, the hydrogen transmission mechanism is positioned on one side of the nitrogen transmission mechanism, the output end of the hydrogen transmission mechanism is provided with a hydrogen transmission pipe, one end of the hydrogen transmission pipe is connected with one end of the other connector, and the outer side of the hydrogen transmission pipe is provided with a third electromagnetic valve in a penetrating manner.
Preferably, the nitrogen-hydrogen annealing equipment comprises the following processes:
s1, firstly, checking the annealing equipment by a worker, checking whether a position influencing use appears, rotating a threaded rod by rotating a rotating disc, and opening a sealing door by outwards exerting force, wherein one end of the threaded rod leaves a connecting piece when the threaded rod rotates;
s2, after the sealing door is opened, the mobile station is moved by the moving-out handle, so that the first mounting plate at the top is driven to move out, fixing grooves are formed in the tops of the first mounting plate and the second mounting plate, a supporting plate is mounted inside the fixing grooves through a rotating shaft, limiting plates are symmetrically mounted on the front face of the supporting plate, the supporting plate can rotate under the driving of the rotating shaft, when the supporting plate needs to be used, an included angle of ninety degrees is formed between the supporting plate and the fixing grooves through rotation, then one end of a triode needing annealing is placed in the fixing grooves, one end of the triode leans against the supporting plate and is limited through the limiting plates, so that the triode is more stable when moving, meanwhile, when the supporting plate does not need to be used, the supporting plate can be rotated into the fixing grooves to be folded, other parts needing annealing can be used, after the placement is finished, the triode is pushed into the annealing box, and the annealing box is closed through the sealing door;
s3, controlling the annealing equipment through the control panel to enable the annealing equipment to start to operate, enabling a warning lamp at the top of the installation box to be lightened to indicate that the annealing equipment is operating, enabling a heating rod in the installation groove to be electrified, converting electric energy into heat energy through the heating rod after the heating rod is electrified, heating the interior of the annealing box, and controlling the annealing time and temperature through the control panel;
s4, between the beginning of heating, a worker opens the second electromagnetic valve by using the control panel, the nitrogen transmission mechanism can transmit nitrogen, the nitrogen can enter the ventilation box through the nitrogen transmission pipe, the ventilation box is connected with the installation shell, the nitrogen can enter the installation shell, a plurality of gas outlet heads are installed on the front surface of the installation shell, the nitrogen can be discharged into the annealing box from the gas outlet heads, so that air in the annealing box is discharged, the triode can be better processed, then the third electromagnetic valve is opened, the hydrogen transmission mechanism enables hydrogen to enter the ventilation box through the hydrogen transmission pipe, and finally the hydrogen is sprayed out from the gas outlet heads, the permeability of the hydrogen is strong, the heat transfer efficiency can be improved, and the hydrogen can be quickly and uniformly contacted with the triode by being sprayed out of the plurality of gas outlet heads, so that the efficiency can be improved;
and S5, after the triode is heated, opening the first electromagnetic valve, discharging redundant gas inside, opening the sealing door after the annealing box is cooled, and pulling out the sealing door through the moving-out handle to discharge.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the invention, the first mounting plate is mounted at the top of the mobile station, the fixing groove is formed in the top of the first mounting plate, the supporting plate is mounted inside the fixing groove through the rotating shaft, the limiting plates are symmetrically mounted on the front surface of the supporting plate, the supporting plate can rotate under the driving of the rotating shaft, when the supporting plate needs to be used, an included angle of ninety degrees is formed between the supporting plate and the fixing groove through rotation, then one end of a triode needing annealing is placed in the fixing groove, and the other end of the triode needing annealing is abutted to the supporting plate and is limited through the limiting plate, so that the triode is more stable in moving.
2. According to the invention, the nitrogen transmission mechanism and the hydrogen transmission mechanism are arranged in the fixed box, the nitrogen transmission mechanism is used for transmitting nitrogen, the hydrogen transmission mechanism is used for transmitting hydrogen, and the nitrogen and the hydrogen are transmitted into the annealing box, so that the triode in the annealing box can be better processed, the transmission efficiency can be improved, and the air in the annealing box can be exhausted.
3. The support plate is movably arranged in the fixed groove through the rotating shaft, and meanwhile, when the annealing device is not required to be used, the support plate can be rotated into the fixed groove to be folded, so that other parts needing annealing can be used, the annealing device can be suitable for processing more parts, and meanwhile, the connecting rod can be disassembled, so that the second mounting plate can be taken down, and a space is provided for processing other parts.
4. According to the invention, the exhaust pipe penetrates through the top of the installation box, the first electromagnetic valve is installed on the outer side of the exhaust pipe, the exhaust pipe can be opened through the first electromagnetic valve, and the bottom end of the exhaust pipe penetrates through the inner wall of the top of the annealing box, so that gas and heat in the annealing box can be rapidly exhausted.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic view of the control box of the present invention;
FIG. 3 is a schematic view of an exhaust pipe structure according to the present invention;
FIG. 4 is a schematic view of the internal structure of the first mounting plate of the present invention;
FIG. 5 is a schematic view of the structure at position A of the present invention;
FIG. 6 is a schematic view of the construction of the venting box of the present invention;
FIG. 7 is a schematic view of the sealing door of the present invention;
fig. 8 is a schematic structural view of the fixing box of the present invention.
In the figure: 1. an installation table; 101. supporting legs; 2. a control box; 201. a heat dissipation window; 202. a control panel; 3. installing a box; 301. a warning light; 302. an exhaust pipe; 303. a first solenoid valve; 304. an air outlet; 4. an annealing box; 401. a mounting member; 402. mounting grooves; 403. heating a rod; 404. a chute; 405. a connecting member; 5. a mobile station; 501. a slider; 502. removing the handle; 6. a first mounting plate; 601. fixing grooves; 602. a rotating shaft; 603. a support plate; 604. a limiting plate; 605. a connecting rod; 606. a second mounting plate; 7. a ventilation box; 701. a connection port; 702. mounting a shell; 703. an air outlet head; 8. a sealing door; 801. a sealing block; 802. a fixing plate; 803. a threaded rod; 804. rotating the disc; 9. a fixed box; 901. disassembling the door; 902. a nitrogen gas transmission mechanism; 903. a nitrogen conveying pipe; 904. a second solenoid valve; 905. a hydrogen gas transmission mechanism; 906. a hydrogen gas transmission pipe; 907. and a third solenoid valve.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly stated or limited otherwise, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, such as "connected," which may be a fixed connection or a movable connection, a detachable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in a specific case to those of ordinary skill in the art.
Referring to fig. 1-4, an embodiment of the present invention is provided: a nitrogen-hydrogen annealing apparatus for triode device fabrication;
the device comprises an installation platform 1, a control box 2, an installation box 3, an annealing box 4 and a mobile station 5, wherein the control box 2 is installed at the top of the installation platform 1, supporting legs 101 are symmetrically installed at the bottom of the installation platform 1, a heat dissipation window 201 is installed on one side of the control box 2, a control panel 202 is installed on the front surface of the control box 2, the installation box 3 is installed at the top of the installation platform 1, the installation box 3 is positioned on one side of the control box 2, a warning lamp 301 is installed at the top of the installation box 3, an exhaust pipe 302 is installed at the top of the installation box 3 in a penetrating way, a first electromagnetic valve 303 is installed on the outer side of the exhaust pipe 302 in a penetrating way, an air outlet 304 is installed at the top end of the exhaust pipe 302, the installation platform 1 provides installation positions for the installation box 3 and the control box 2 at the top to enable the installation to be carried out, the supporting legs 101 play a supporting role and are used for improving the height of the device, the control box 2 provides installation positions for control elements to enable the installation to be carried out, the heat dissipation window 201 plays a role in heat dissipation, so that heat which can be generated behind the control box 2 can be dissipated, the control panel 202 is used for controlling the equipment, and the equipment is convenient for workers to operate, the installation box 3 provides installation positions for the annealing box 4 and the fixed box 9 so that the annealing box can be installed and starts to operate, the warning lamp 301 at the top of the installation box 3 can be turned on to indicate that the annealing equipment is in operation, the exhaust pipe 302 provides a space for the heat and gas in the annealing box 4 to be exhausted, the first electromagnetic valve 303 plays a role in controlling the opening and closing of the exhaust pipe 302, the gas outlet 304 enables the gas to be exhausted, the annealing box 4 is installed inside the installation box 3, the inner wall at the bottom of the annealing box 4 is symmetrically provided with sliding grooves 404, the installation pieces 401 are symmetrically installed on the front surface of the annealing box 4, and the outer side of the installation pieces 401 are connected with the outer side of the sealing door 8 through moving pieces, the installation groove 402 is formed in the inner walls of the two sides of the annealing box 4, the plurality of heating rods 403 are installed inside the installation groove 402, the connecting piece 405 is installed on the front face of the annealing box 4, the moving platform 5 is installed on the inner wall of the bottom of the annealing box 4 through the sliding groove 404, the sliding blocks 501 are symmetrically installed at the bottom of the moving platform 5, the sliding blocks 501 are embedded with the inner side of the sliding groove 404, the moving handle 502 is installed on the front face of the moving platform 5, the annealing box 4 provides a space for annealing of the triode and also provides an installation position for the annealing structure, the installation piece 401 provides a position for movable installation of the sealing door 8, the installation groove 402 provides a space for installation of the heating rods 403, the heating rods 403 can convert electric energy into kinetic energy after being electrified, accordingly, the internal temperature of the annealing box 4 is increased, annealing treatment is performed on the triode, the sliding groove 404 provides a space for sliding of the sliding blocks 501 and also has a guiding function, the connecting piece 405 provides a fixed position for the fixing of the heating rods 803, the moving platform 5 provides an installation position for installation of the first installation plate 6, the sliding rod 501 to be installed, the moving platform 5 can be conveniently pushed out or pulled out of a worker.
Referring to fig. 4 and 5, an embodiment of the present invention: a nitrogen-hydrogen annealing apparatus for triode device fabrication;
including first mounting panel 6, first mounting panel 6 is installed at the top of mobile station 5, fixed slot 601 has been seted up at the top of first mounting panel 6, install axis of rotation 602 on the inner wall of fixed slot 601, backup pad 603 is installed at the top of axis of rotation 602, the positive symmetry installation limiting plate 604 of backup pad 603, connecting rod 605 is installed at the top of first mounting panel 6, second mounting panel 606 is installed on the top of connecting rod 605, first mounting panel 6 is the position of seting up of fixed slot 601, fixed slot 601 is used for placing the triode, backup pad 603 can rotate under the drive of axis of rotation 602, when backup pad 603 needs to use, be ninety degree contained angle through rotating with fixed slot 601, then put the triode one end that will carry out the annealing in fixed slot 601, one end is leaned on backup pad 603 and is carried out spacingly through limiting plate 604, thereby make this triode more stable when removing, simultaneously when need not carrying out the use, can rotate backup pad 603 in fixed slot 601, make other parts that need carry out the annealing also can use, the strutting arrangement of triode also is installed at the top of second mounting panel 606, also can support the triode.
Referring to fig. 6-8, an embodiment of the present invention is provided: a nitrogen-hydrogen annealing apparatus for triode device fabrication;
the device comprises an air ventilation box 7, a sealing door 8 and a fixed box 9, wherein the air ventilation box 7 is installed on the inner wall of an annealing box 4, connecting ports 701 are installed on two sides of the air ventilation box 7 in a penetrating manner, an installation shell 702 is installed on the inner side of the air ventilation box 7 in a penetrating manner, a plurality of air outlet heads 703 are installed on the front surface of the installation shell 702 in a penetrating manner, the sealing door 8 is installed on the front surface of the annealing box 4, a sealing block 801 is installed on one side of the sealing door 8, the sealing block 801 is embedded with the inner side of a feed port of the annealing box 4, a fixed plate 802 is installed on the front surface of the sealing door 8, a threaded rod 803 is installed on one side of the fixed plate 802 in a penetrating manner through threads, a rotating disc 804 is installed at one end of the threaded rod 803 and one end of the threaded rod 803 embedded with the front surface thread port of a connecting piece 405, the air ventilation box 7 is connected with the installation shell 702, nitrogen can enter the installation shell 702, a plurality of air outlet heads 703 are installed on the front surface of the installation shell 702, and can be discharged into the annealing box 4 from the air outlet heads 703, therefore, air in the annealing box 4 is exhausted, the sealing door 8 is used for sealing the annealing box 4, so that the air cannot enter the annealing box 4, the sealing block 801 plays a role in sealing, the fixing plate 802 provides a position for installing the threaded rod 803, the threaded rod 803 is rotated by rotating the rotating disc 804, one end of the threaded rod 803 leaves the connecting piece 405 when the threaded rod 803 is rotated, the rotating disc 804 provides a position for a worker to rotate the threaded rod 803, so that the worker can rotate more conveniently, the fixed box 9 is installed inside the installation box 3, the detachable door 901 is installed on the front of the fixed box 9 through bolts, the nitrogen transmission mechanism 902 is installed on the inner wall of the bottom of the fixed box 9 through bolts, the nitrogen transmission pipe 903 is installed at the output end of the nitrogen transmission mechanism 902, and the second electromagnetic valve 904 is installed outside the nitrogen transmission pipe 903, one end of a nitrogen transmission pipe 903 is connected with one end of a connector 701, a hydrogen transmission mechanism 905 is installed on the inner wall of the bottom of a fixed box 9, the hydrogen transmission mechanism 905 is located on one side of the nitrogen transmission mechanism 902, a hydrogen transmission pipe 906 is installed at the output end of the hydrogen transmission mechanism 905, one end of the hydrogen transmission pipe 906 is connected with one end of the other connector 701, a third electromagnetic valve 907 penetrates through the outer side of the hydrogen transmission pipe 906, the fixed box 9 provides installation positions for the nitrogen transmission mechanism 902 and the hydrogen transmission mechanism 905 to be installed, the nitrogen transmission mechanism 902 can transmit nitrogen by opening the second electromagnetic valve 904, the nitrogen can enter the nitrogen transmission pipe 903, the nitrogen transmission pipe 903 provides a space for transmitting the nitrogen, the nitrogen can enter a ventilation box 7, the dismounting door 901 can be dismounted, workers can conveniently repair internal equipment, the hydrogen transmission mechanism 905 can transmit the hydrogen, the third electromagnetic valve 907 can open the hydrogen transmission pipe 906, the hydrogen can transmit the hydrogen, and the hydrogen transmission pipe 906 provides a space for transmitting the hydrogen so that the hydrogen can enter the ventilation box 7.
The nitrogen-hydrogen annealing equipment comprises the following processes:
s1, firstly, checking the annealing equipment by a worker, checking whether a position influencing the use appears, rotating the threaded rod 803 by rotating the rotating disc 804, wherein when the threaded rod 803 rotates, one end of the threaded rod 803 leaves the connecting piece 405, and outwards forcing the sealing door 8 to be opened;
s2, after the sealing door 8 is opened, the mobile station 5 is moved through the moving-out handle 502, so that the first mounting plate 6 at the top is driven to move out, fixing grooves 601 are formed in the tops of the first mounting plate 6 and the second mounting plate 606, a supporting plate 603 is mounted in the fixing groove 601 through a rotating shaft 602, limiting plates 604 are symmetrically mounted on the front face of the supporting plate 603, the supporting plate 603 can rotate under the driving of the rotating shaft 602, when the supporting plate 603 needs to be used, a ninety-degree included angle is formed between the supporting plate 603 and the fixing grooves 601 through rotation, one end of a triode needing to be annealed is placed in the fixing groove 601, the other end of the triode needs to be placed on the supporting plate 603 and limited through the limiting plates 604, so that the triode is more stable when moving, meanwhile, when the triode does not need to be used, the supporting plate 603 can be rotated into the fixing grooves 601 to be folded, other parts needing annealing can also be used, after the placing is completed, the triode is pushed into the annealing box 4, and the annealing box 4 is closed through the sealing door 8;
s3, the annealing equipment is controlled through the control panel 202 to start to operate, the warning lamp 301 on the top of the installation box 3 is turned on to indicate that the annealing equipment is operating, the heating rod 403 in the installation groove 402 is electrified, the heating rod 403 can convert electric energy into heat energy after being electrified to heat the inside of the annealing box 4, and the annealing time and temperature are controlled through the control panel 202;
s4, during heating, a worker opens the second electromagnetic valve 904 by using the control panel 202, so that the nitrogen transmission mechanism 902 can transmit the nitrogen, the nitrogen can enter the ventilation box 7 through the nitrogen transmission pipe 903, the ventilation box 7 is mutually connected with the installation shell 702, the nitrogen can enter the installation shell 702, a plurality of gas outlet heads 703 are installed on the front surface of the installation shell 702, the nitrogen can be discharged into the annealing box 4 from the gas outlet heads 703, so that the air in the annealing box 4 is discharged, the triode can be better processed, then the third electromagnetic valve 907 is opened, the hydrogen is introduced into the ventilation box 7 through the hydrogen transmission pipe 906 by the hydrogen transmission mechanism 905, and finally is sprayed out from the gas outlet heads 703, the permeation capability of the hydrogen is strong, the heat transfer efficiency can be improved, and the third electromagnetic valve can be quickly and uniformly contacted with the triode by spraying out of the plurality of gas outlet heads 703, so that the efficiency can be improved;
s5, after the triode is heated, the first electromagnetic valve 303 is opened, redundant gas in the first electromagnetic valve is discharged, the sealing door 8 is opened after the annealing box 4 is cooled, and the sealing door is pulled out through the moving-out handle 502 to discharge.
The working principle is as follows: before using the nitrogen-hydrogen annealing equipment for manufacturing triode devices, whether the nitrogen-hydrogen annealing equipment for manufacturing triode devices has the problem of influencing use or not is checked, firstly, the nitrogen-hydrogen annealing equipment for manufacturing triode devices is placed at a position to be used, the rotary disc 804 is rotated to open the sealing door 8, the mobile station 5 is moved out, the triode to be processed is placed in the fixing groove 601 and is supported by the supporting plate 603, the limiting plate 604 can limit the triode to be more stable, the triode has more area to be heated, the annealing equipment is controlled by the control panel 202 to start to operate, the warning lamp 301 at the top of the installation box 3 can be lightened to indicate that the annealing equipment is operating, the heating rod 403 in the installation groove 402 can be electrified, the heating rod 403 can convert electric energy into heat energy after being electrified, the interior of the annealing box 4 is heated, and the annealing time and temperature are controlled by the control panel 202.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (10)
1. A nitrogen-hydrogen annealing equipment for triode device manufacture comprises an installation platform (1), a control box (2) and a mobile station (5), and is characterized in that: the top of the mounting platform (1) is provided with a control box (2), the top of the mounting platform (1) is provided with a mounting box (3), the mounting box (3) is located on one side of the control box (2), an annealing box (4) is mounted inside the mounting box (3), sliding grooves (404) are symmetrically formed in the inner wall of the bottom of the annealing box (4), and a moving platform (5) is mounted on the inner wall of the bottom of the annealing box (4) through the sliding grooves (404);
a first mounting plate (6) is mounted at the top of the mobile station (5), a fixing groove (601) is formed in the top of the first mounting plate (6), a rotating shaft (602) is mounted on the inner wall of the fixing groove (601), a supporting plate (603) is mounted at the top of the rotating shaft (602), limiting plates (604) are symmetrically mounted on the front surface of the supporting plate (603), a connecting rod (605) is mounted at the top of the first mounting plate (6), and a second mounting plate (606) is mounted at the top end of the connecting rod (605);
install on the inner wall of annealing case (4) and lead to gas box (7), sealing door (8) are installed in the front of annealing case (4), the internally mounted of install bin (3) has fixed case (9).
2. The nitrogen-hydrogen annealing apparatus for triode device fabrication according to claim 1, wherein: the bottom of the mounting table (1) is symmetrically provided with supporting legs (101).
3. The nitrogen-hydrogen annealing apparatus for triode device fabrication according to claim 2, wherein: a heat dissipation window (201) is installed on one side of the control box (2), and a control panel (202) is installed on the front face of the control box (2).
4. The apparatus of claim 3, wherein the apparatus comprises: warning light (301) are installed at the top of install bin (3), and blast pipe (302) are installed to run through at the top of install bin (3), and first solenoid valve (303) are installed to run through in the outside of blast pipe (302), and gas outlet (304) are installed on the top of blast pipe (302).
5. The nitrogen-hydrogen annealing apparatus for triode device fabrication according to claim 4, wherein: installation piece (401) are installed to the front symmetry of annealing case (4), and the outside of installation piece (401) is connected with the outside of sealing door (8) through the moving part, has seted up mounting groove (402) on the both sides inner wall of annealing case (4), and the internally mounted of mounting groove (402) has a plurality of heating rods (403), and connecting piece (405) are installed in the front of annealing case (4).
6. The apparatus of claim 5, wherein the apparatus comprises: the bottom of the mobile station (5) is symmetrically provided with sliding blocks (501), the sliding blocks (501) are embedded with the inner sides of the sliding grooves (404), and the front surface of the mobile station (5) is provided with a shifting-out handle (502).
7. The nitrogen-hydrogen annealing apparatus for triode device fabrication according to claim 6, wherein: the connecting ports (701) are installed on two sides of the ventilation box (7) in a penetrating mode, the installation shell (702) is installed on the inner side of the ventilation box (7) in a penetrating mode, and the air outlet heads (703) are installed on the front face of the installation shell (702) in a penetrating mode.
8. The apparatus of claim 7, wherein the apparatus comprises: sealing block (801) are installed to one side of sealing door (8), and sealing block (801) and the inboard looks gomphosis of the feed inlet of annealing case (4), and fixed plate (802) are installed in the front of sealing door (8), and threaded rod (803) are installed through the screw thread to one side of fixed plate (802), and rolling disc (804) are installed to the one end of threaded rod (803) and the one end of the positive screw thread mouth looks gomphosis threaded rod (803) of connecting piece (405).
9. The nitrogen-hydrogen annealing apparatus for triode device fabrication according to claim 8, wherein: the front face of the fixed box (9) is provided with a dismounting door (901) through bolts, a nitrogen transmission mechanism (902) is installed on the inner wall of the bottom of the fixed box (9) through bolts, a nitrogen transmission pipe (903) is installed at the output end of the nitrogen transmission mechanism (902), a second electromagnetic valve (904) is installed on the outer side of the nitrogen transmission pipe (903), one end of the nitrogen transmission pipe (903) is connected with one end of a connector (701), a hydrogen transmission mechanism (905) is installed on the inner wall of the bottom of the fixed box (9), the hydrogen transmission mechanism (905) is located on one side of the nitrogen transmission mechanism (902), a hydrogen transmission pipe (906) is installed at the output end of the hydrogen transmission mechanism (905), one end of the hydrogen transmission pipe (906) is connected with one end of the other connector (701), and a third electromagnetic valve (907) is installed on the outer side of the hydrogen transmission pipe (906) in a penetrating mode.
10. The process of claim 9, wherein the process comprises the following steps:
s1, firstly, checking the annealing equipment by a worker, checking whether a position influencing use appears, rotating a threaded rod (803) by rotating a rotating disc (804), wherein when the threaded rod (803) rotates, one end of the threaded rod (803) leaves a connecting piece (405), and outwards forcing to open a sealing door (8);
s2, after the sealing door (8) is opened, the mobile station (5) is moved by the aid of the moving-out handle (502), the first mounting plate (6) at the top is driven to move out, fixing grooves (601) are formed in the tops of the first mounting plate (6) and the second mounting plate (606), a supporting plate (603) is mounted in the fixing grooves (601) through a rotating shaft (602), limiting plates (604) are symmetrically mounted on the front face of the supporting plate (603), the supporting plate (603) can rotate under the driving of the rotating shaft (602), when the supporting plate (603) needs to be used, a ninety-degree included angle is formed between the supporting plate and the fixing grooves (601) through rotation, then one end of a triode needing to be annealed is placed in the fixing grooves (601), one end of the triode leans against the supporting plate (603) and is limited through the limiting plate (604), the triode is more stable when moving, meanwhile, when the triode does not need to be used, the supporting plate (603) can be rotated into the fixing grooves (601) to be stored, other parts needing annealing can also be used, and after the parts are placed in the annealing box (4), and the annealing box (4) is closed;
s3, the annealing equipment is controlled through the control panel (202) to start to operate, a warning lamp (301) on the top of the installation box (3) is turned on to indicate that the annealing equipment is operating, a heating rod (403) in the installation groove (402) is electrified, the heating rod (403) can convert electric energy into heat energy after being electrified to heat the inside of the annealing box (4), and the annealing time and temperature are controlled through the control panel (202);
s4, during heating, a worker opens the second electromagnetic valve (904) by using the control panel (202), the nitrogen transmission mechanism (902) can transmit nitrogen, the nitrogen can enter the ventilation box (7) through the nitrogen transmission pipe (903), the ventilation box (7) is connected with the installation shell (702) to enable the nitrogen to enter the installation shell (702), the front surface of the installation shell (702) is provided with a plurality of gas outlet heads (703), the nitrogen can be discharged into the annealing box (4) from the gas outlet heads (703), so that air in the annealing box (4) is discharged, the triode can be processed better, then the third electromagnetic valve (907) is opened, the hydrogen transmission mechanism (905) enables hydrogen to enter the ventilation box (7) through the hydrogen transmission pipe (906), and finally the hydrogen is sprayed out from the gas outlet heads (703), the permeation capability of the hydrogen is strong, the heat transfer efficiency can be improved, and the hydrogen can be rapidly and uniformly contacted with the triode through spraying out of the gas outlet heads (703), so that the efficiency can be improved;
s5, after the triode is heated, the first electromagnetic valve (303) is opened, redundant gas in the first electromagnetic valve is discharged, after the annealing box (4) is cooled, the sealing door (8) is opened, and the sealing door is pulled out through the moving-out handle (502) to discharge.
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