CN114608716B - Flexible temperature and pressure bimodal sensor and preparation and testing method thereof - Google Patents
Flexible temperature and pressure bimodal sensor and preparation and testing method thereof Download PDFInfo
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- CN114608716B CN114608716B CN202210300789.7A CN202210300789A CN114608716B CN 114608716 B CN114608716 B CN 114608716B CN 202210300789 A CN202210300789 A CN 202210300789A CN 114608716 B CN114608716 B CN 114608716B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/34—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
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Abstract
The invention relates to a flexible temperature and pressure bimodal sensor and a preparation and test method thereof, and relates to the technical field of sensors. The flexible temperature-pressure bimodal sensor comprises a first flexible electrode, a second flexible electrode and an ionic gel layer, wherein the ionic gel layer is fixed between the first flexible electrode and the second flexible electrode, and the ionic gel layer is of a porous structure. The invention respectively arranges the flexible electrodes on the upper and lower surfaces of the ionic gel layer to form a sandwich structure, and the pressure and temperature sensitive layers are made of the same ionic gel material as the sensitive response layer, thereby having the function of simultaneously monitoring the pressure and the temperature. The principle of temperature response is to use the difference of movement rates of ions at different temperatures so as to cause the change of the electrical properties (resistance and capacitance) of the ionic gel layer; the principle of the pressure response is to use the change of the distance between the ionic gel layer and the flexible electrodes on the upper and lower surfaces caused by the pressure, so as to influence the capacitance change of the ionic gel layer.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a flexible temperature-pressure bimodal sensor and a preparation and test method thereof.
Background
With the development of artificial intelligence, health monitoring and human repair technology, the development of electronic skin which can imitate human skin functions, acquire external environment information and interact with the external environment information becomes a research hotspot. Due to the complexity of external stimulus, the multifunctional electronic skin with multiple sensing functions and capable of sensing and distinguishing multiple stimulus simultaneously is a future development trend of the electronic skin. The existing multifunctional electronic skin mainly integrates a plurality of single devices with different functions, and the method is high in cost and difficult to miniaturize or even miniaturize.
In recent years, attempts have been made to realize multi-parameter detection of a single device by using a stacked manner of multiple sensitive layer materials, but the device is greatly limited in the accuracy of simultaneously detecting and effectively distinguishing various stimuli because the multiple stimuli easily cause interference of output signals.
Disclosure of Invention
The invention provides a flexible temperature-pressure bimodal sensor and a preparation and test method thereof for solving one or more of the technical problems.
The technical scheme for solving the technical problems is as follows: a flexible temperature pressure bimodal sensor comprises a first flexible electrode, a second flexible electrode and an ionic gel layer, wherein the ionic gel layer is fixed between the first flexible electrode and the second flexible electrode, and the ionic gel layer has a porous structure.
The beneficial effects of the invention are as follows: the flexible temperature and pressure bimodal sensor is characterized in that flexible electrodes are respectively arranged on the upper surface and the lower surface of an ionic gel layer to form a sandwich structure, and the pressure and temperature sensitive layers are made of the same ionic gel material as a sensitive response layer, so that the flexible temperature and pressure bimodal sensor has two functions of monitoring pressure and temperature simultaneously. The principle of temperature response is to use the difference of movement rates of ions at different temperatures so as to cause the change of the electrical properties (resistance and capacitance) of the ionic gel layer; the principle of pressure response is to use the change of the distance between the ionic gel layer and the flexible electrodes on the upper and lower surfaces caused by the pressure, so as to influence the capacitance change of the ionic gel layer.
The flexible temperature and pressure bimodal sensor has advantages in the aspect of small (micro) integration, and can solve the problem of miniaturization of the traditional multifunctional electronic skin.
On the basis of the technical scheme, the invention can be improved as follows.
Further, the ionic gel layer is prepared from ionic liquid and polymer.
Further, the ionic liquid includes: any one of tri (2-hydroxyethyl) sulfate ethylmethyl ammonium salt, 1-ethyl-3-methylimidazole hexafluorophosphate, 1-ethyl-3-methylimidazole bifluoride mesylate and 1-ethyl-3-methylimidazole bifluoride mesylate.
The beneficial effects of adopting the further scheme are as follows: the ionic liquids are water-insoluble ionic liquids and can be compatible with later wet etching.
Further, the polymer is a vinylidene fluoride-hexafluoropropylene copolymer.
The beneficial effects of adopting the further scheme are as follows: the polymer has excellent chemical stability and elasticity, is not easy to dissolve in the etching process, and is easy to deform when being subjected to external force.
Further, the first flexible electrode and the second flexible electrode each include a flexible substrate and a conductive layer obtained by vapor plating a metal film or printing a conductive material on the flexible substrate.
A preparation method of a flexible temperature-pressure bimodal sensor comprises the following steps:
s1, preparing a first flexible electrode and a second flexible electrode;
s2, preparing an ionic gel precursor solution, and putting foam metal into the prepared ionic gel precursor solution, so that the ionic gel precursor solution completely fills the pores of the foam metal;
s3, solidifying the foam metal filled with the ionic gel precursor solution to form an ionic gel material;
s4, putting the ionic gel material obtained in the step S3 into a preset solution for soaking, so that the foam metal is completely dissolved to obtain an ionic gel layer with a porous structure;
s5, fixedly connecting the upper surface and the lower surface of the ionic gel layer obtained in the S4 with a first flexible electrode and a second flexible electrode respectively to form the flexible temperature-pressure bimodal sensor.
The beneficial effects of the invention are as follows: according to the preparation method, the foam metal is put into the prepared ionic gel precursor solution, and dissolved after solidification, so that the foam metal can be utilized to form the ionic gel layer with a porous structure, the operation is simple, and the original ions are not damaged.
Further, in S2, preparing an ionic gel precursor solution includes dissolving a polymer in a solvent, adding an ionic liquid, mixing and stirring to form an ionic gel precursor solution;
s3, the curing temperature is 70-150 ℃;
s4, the preset solution is aqua regia.
The beneficial effects of adopting the further scheme are as follows: aqua regia can dissolve metallic materials, but aqua regia does not dissolve the ionic gel materials and polymers.
The testing method of the flexible temperature and pressure bimodal sensor comprises the following steps: the change of temperature and pressure to the electrical properties of the flexible bimodal sensor is obtained by switching the test frequency, respectively.
The beneficial effects of the invention are as follows: according to the testing method disclosed by the invention, the change of temperature and pressure on the electrical property of the flexible bimodal sensor can be obtained by utilizing the relation between the electrical property of the ionic gel layer and the input frequency, so that the mutual interference between signals is effectively avoided.
Further, the method comprises the steps of: testing the change of the impedance of the flexible bimodal sensor under the first test frequency condition to obtain temperature change, and testing the change of the capacitance of the flexible bimodal sensor under the second test frequency condition to obtain pressure change; wherein the second test frequency is higher than the first test frequency.
The beneficial effects of adopting the further scheme are as follows: the electrical properties of the ion gel material vary with frequency, and the impedance of the ion gel material varies with frequency, as can be seen in the graphs of FIGS. 3a and 3b, where the impedance is divided into 3 segments, the diagonal 1 is the impedance when the input frequency is very low (ω < ω) 1 ω is frequency) material exhibits an ionic capacitance mode, and its capacitance value is constituted by a micro-capacitance in contact between the upper and lower surfaces and the flexible electrode, exhibiting an "electric double layer" characteristic. Flattening 2, i.e. when the input frequency is intermediate frequency (omega 1 ＜ω＜ω 2 ) When the impedance value is kept unchanged, the curve becomes smooth, so that the ion gel layer is entirely represented by an ion conductor and the impedance Z re R; diagonal segment 3 when the input frequency is high frequency (omega > omega 2 ) When the ionic gel layer is wholly expressed as molecular capacitance characteristic, Z re ≈1/ωC；
Therefore, when the input frequency is low frequency (ω < ω 1 ω is frequency), when stimulated by an external pressure (P), will cause a contact area between the ionic gel layer and the flexible electrode and thus a micro-capacitance change; in addition, when the external temperature changes, the flexible temperature and pressure sensor is heated, the ion movement rate also changes, therebyThe ion aggregation quantity between the positive electrode and the negative electrode is changed, and the micro capacitance is changed, so that the capacitance is changed under the influence of temperature and pressure dual-stimulus, the signal interference is strong, and the micro capacitance is not easy to distinguish.
And when the input frequency is the first test frequency, i.e. the intermediate frequency (ω 1 ＜ω＜ω 2 ) When the resistance r=d/δa, R is the resistance, d is the ionic gel layer thickness, δ is the ionic conductivity, and a is the area in contact with the electrode; wherein the delta value changes with temperature, thereby causing a change in resistance, and decreases with an increase in temperature, as described above for the impedance Z re R, thus impedance Z re The external pressure is negligible to the resistance change at this time, as shown in fig. 3a, wherein the solid line is the impedance change curve with frequency conversion at low temperature, and the dotted line is the impedance change curve with frequency at high temperature.
When the input frequency is the second test frequency, i.e. high frequency (ω > ω 2 ) The capacitance C=epsilon A/d, wherein C is the capacitance, d is the thickness of the ionic gel layer, A is the contact area with the electrode, epsilon is the dielectric constant of the ionic gel material, and when the ionic gel material is stimulated by the outside, d becomes smaller, so that C becomes larger, as described above Z re Approximately 1/ωC, so impedance Z re And becomes smaller, the temperature versus capacitance change is now negligibly small, as shown in fig. 3b, where the solid line is the frequency-dependent curve of the impedance without external pressure, and the dashed line is the frequency-dependent curve of the impedance with external pressure (P).
In conclusion, temperature and pressure monitoring can be achieved by simply switching the test frequency in the actual test process.
Drawings
FIG. 1 is a schematic diagram of a flexible temperature and pressure bimodal sensor of the present invention;
FIG. 2 is a schematic flow chart of a method for manufacturing the flexible temperature-pressure bimodal sensor of the present invention;
FIG. 3a is a schematic diagram of the working principle of the flexible temperature-pressure bimodal sensor of the present invention when stimulated by temperature;
FIG. 3b is a schematic diagram of the operation principle of the flexible temperature-pressure bimodal sensor of the present invention when stimulated by pressure;
FIG. 4 is a graph showing the test result of the impedance of the flexible temperature-pressure bimodal sensor according to the present invention as a function of frequency;
FIG. 5 is a graph of the temperature response obtained by the flexible temperature-pressure bimodal sensor of the present invention under a first test frequency condition;
FIG. 6 is a graph of the pressure response obtained by the flexible temperature-pressure bimodal sensor of the present invention under a second test frequency condition.
In the drawings, the list of components represented by the various numbers is as follows:
1. a first flexible electrode; 2. a second flexible electrode; 3. an ionic gel layer.
Detailed Description
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present invention and should not be construed as limiting the invention.
As shown in fig. 1, the invention provides a flexible temperature-pressure bimodal sensor, which comprises a first flexible electrode 1, a second flexible electrode 2 and an ionic gel layer 3, wherein the ionic gel layer 3 is fixed between the first flexible electrode 1 and the second flexible electrode 2, and the ionic gel layer 3 has a porous structure.
The first flexible electrode 1 and the second flexible electrode 2 of the present invention each comprise a flexible substrate and a conductive layer obtained by vapor plating a metal film or printing a conductive material on the flexible substrate. Specifically, a vacuum evaporation method can be used to deposit metal or print conductive ink, such as poly 3, 4-ethylenedioxythiophene: polystyrene sulfonic acid (PEDOT: PSS), silver nanowires, copper inks, and the like; wherein the flexible substrate is polyethylene terephthalate (PDMS) or Polyimide (PI).
The preparation materials of the ionic gel layer comprise ionic liquid and polymer. The ionic liquid comprises: tri (2-hydroxyethyl) sulfate ethylMethyl ammonium salt ([ MTEOA)] + [MeOSO 3 ] - ) 1-ethyl-3 methylimidazole hexafluorophosphate ([ EMIM)] + [PF 6 ] - ) 1-ethyl-3-methylimidazole bis-fluoromethanesulfonate ([ EMIm)] + [Tf 2 N] - ) 1-ethyl-3-methylimidazole bis-fluoromethanesulfonate ([ EMIm)] + [TFSI] - ) Any one of them. The polymer is vinylidene fluoride-hexafluoropropylene copolymer (P (VDF-HFP)).
The flexible temperature and pressure bimodal sensor is characterized in that flexible electrodes are respectively arranged on the upper surface and the lower surface of an ionic gel layer to form a sandwich structure, and the pressure and temperature sensitive layers are made of the same ionic gel material as a sensitive response layer, so that the flexible temperature and pressure bimodal sensor has two functions of monitoring pressure and temperature simultaneously. The principle of temperature response is to use the difference of movement rates of ions at different temperatures so as to cause the change of the electrical properties (resistance and capacitance) of the ionic gel layer; the principle of pressure response is to use the change of the distance between the ionic gel layer and the flexible electrodes on the upper and lower surfaces caused by the pressure, so as to influence the capacitance change of the ionic gel layer.
The preparation method of the flexible temperature and pressure bimodal sensor, as shown in fig. 2, comprises the following steps:
s1, preparing a first flexible electrode 1 and a second flexible electrode 2;
s2, preparing an ionic gel precursor solution, and putting foam metal into the prepared ionic gel precursor solution, so that the ionic gel precursor solution completely fills the pores of the foam metal;
the preparation of the ionic gel precursor solution comprises the steps of dissolving a polymer in a solvent, adding an ionic liquid, mixing and stirring to form the ionic gel precursor solution; the solvent may be a volatile solvent such as acetone;
s3, solidifying the foam metal filled with the ionic gel precursor solution to form an ionic gel material; the curing temperature is 70-150 ℃;
s4, soaking the ionic gel material obtained in the S3 in aqua regia to enable the foam metal to be completely dissolved so as to obtain an ionic gel layer 3 with a porous structure;
s5, the upper surface and the lower surface of the ionic gel layer 3 obtained in the S4 are respectively and fixedly connected with the first flexible electrode 1 and the second flexible electrode 2 (for example, the ionic gel layer can be fixed through gluing, and the used glue is conductive glue) so as to form the flexible temperature pressure bimodal sensor.
According to the preparation method, the foam metal is put into the prepared ionic gel precursor solution, and dissolved after solidification, so that the foam metal can be utilized to form the ionic gel layer with a porous structure, the operation is simple, and the original ions are not damaged.
The testing method of the flexible bimodal sensor comprises the following steps: and respectively obtaining the change of the temperature and the pressure to the electrical property of the flexible temperature-pressure bimodal sensor by switching the test frequency.
The method specifically comprises the following steps: testing the change of the impedance of the flexible temperature-pressure bimodal sensor under the first test frequency condition to obtain temperature change, and testing the capacitance change of the flexible temperature-pressure bimodal sensor under the second test frequency condition to obtain pressure change; wherein the second test frequency is higher than the first test frequency. When the input frequency is the first test frequency (intermediate frequency omega 2 ) The overall material exhibits a resistive characteristic, the resistance of which changes with temperature, and the external pressure changes negligible to the resistance. And when the input frequency is the second test frequency (high frequency omega 3 ) When the external stimulus is applied, the contact area between the surface microstructure and the electrode or the contact distance between the material and the upper electrode and the lower electrode is changed, so that the whole capacitance value is changed, and the change of the temperature to the capacitance is negligibly small.
Example 1
The embodiment provides a flexible temperature-pressure bimodal sensor, which comprises a first flexible electrode 1, a second flexible electrode 2 and an ionic gel layer 3, wherein the ionic gel layer 3 is fixed between the first flexible electrode 1 and the second flexible electrode 2, and the ionic gel layer 3 has a porous structure.
The flexible substrates of the first flexible electrode 1 and the second flexible electrode 2 are flexible PI films, the first flexible electrode 1 and the second flexible electrode 2 are gold electrodes, wherein the gold electrodes are 200nm gold films which are formed by vacuum evaporation on the flexible PI films, and the first flexible electrode and the second flexible electrode are respectively obtained.
The ionic gel layer 3 is formed by thermal polymerization of material tri (2-hydroxyethyl) sulfate ethylmethyl ammonium salt and vinylidene fluoride-hexafluoropropylene copolymer.
The preparation method of the flexible temperature and pressure bimodal sensor in the embodiment is as follows:
s1, forming a first flexible electrode 1 and a second flexible electrode 2 by vacuum evaporation of a 200nm gold film on a flexible PI film;
s2, dissolving a vinylidene fluoride-hexafluoropropylene copolymer in an acetone solvent, and then adding a certain amount of ethyl methyl ammonium tri (2-hydroxyethyl) sulfate, mixing and stirring to form an ionic gel precursor solution, wherein the mass ratio of the vinylidene fluoride-hexafluoropropylene copolymer to the ethyl methyl ammonium tri (2-hydroxyethyl) sulfate is 5:4;
s3, immersing the nickel foam into the ion gel precursor solution prepared in the step S2, so that the ion gel precursor solution completely fills the gaps of the nickel foam;
s4, placing the nickel foam attached with the ionic gel precursor solution on a heating table to react and solidify at 120 ℃ to form an ionic gel material;
s5, putting the nickel foam attached with the ionic gel material into a prepared aqua regia solution, soaking and etching until the nickel foam is completely dissolved, taking out and drying to obtain the ionic gel layer with a porous structure;
s6, packaging the ion gel layer with the porous structure prepared in the S5 and the first flexible electrode and the second flexible electrode prepared in the S1, so that the first flexible electrode and the second flexible electrode are respectively fixed on the upper surface and the lower surface of the ion gel layer, and a sandwich-type flexible temperature-pressure bimodal sensor is formed.
The flexible temperature-pressure bimodal sensor provided in example 1 was subjected to temperature and pressure detection, respectively, and its temperature-pressure sensing performance was characterized as follows:
(1) Impedance characteristics: by testing the relation that the impedance changes along with the input frequency at different temperatures, the change rule of the impedance of the flexible temperature-pressure bimodal sensor along with the frequency and the temperature is obtained, as shown in fig. 4, the abscissa of fig. 4 is the frequency, and the ordinate is the impedance, and the impedance of the flexible temperature-pressure sensor at different temperatures (20 ℃, 25 ℃, 30 ℃, 35 ℃, 40 ℃, 45 ℃ and 50 ℃) is detected respectively. At low frequencies (less than 10 3 Hz), the impedance of the flexible temperature-pressure sensor remains almost unchanged at the same temperature, and appears as an ion conductor, and the impedance of the flexible temperature-pressure sensor at different temperatures decreases with an increase in temperature. But with a frequency greater than 10 4 When in Hz, the impedance of the flexible temperature and pressure sensor at different temperatures is linearly reduced along with the increase of frequency, which is equivalent to a stable capacitor, and the size of the capacitor is not affected by temperature.
(2) Pressure sensing performance: connecting the upper and lower electrodes with an external circuit at a frequency of 10 5 Under the Hz condition, different pressures are respectively applied at different temperatures, and the change curve of the capacitance value of the flexible bimodal sensor along with the external pressure value at different temperatures is tested, wherein the result is shown in figure 5, the abscissa is the pressure, and the ordinate is C/C 0 The flexible temperature and pressure sensor is respectively used for detecting the C/C in the pressure process when the temperature is different (30 ℃, 35 ℃ and 40 ℃), and the temperature is changed 0 Values. In the figure, C is the capacitance value after pressure is applied, C 0 Is the initial capacitance. From the figure, it can be seen that the C/C of the flexible pressure temperature sensor 0 The capacitance value increases with the increase of the external pressure, and the capacitance value changes the same under different temperature conditions, which indicates that the temperature changes do not affect the detection of the pressure signal.
(3) Temperature-sensitive sensing performance: the upper and lower electrodes are also connected to an external circuit, as shown in FIG. 6, at a frequency of 10 3 Testing the curve of sensor electrical performance with temperature under different external pressure conditions (0 Pa, 100Pa, 150Pa, 200Pa, 500Pa, 1000 Pa) under Hz (hertz), and selecting external circuit charge relaxation time tau to characterize its electrical propertyWhere R is the resistance of the flexible bimodal sensor, C is the capacitance, and as shown in fig. 6, the abscissa is temperature (C) and the ordinate is ln (τ). As can be seen from fig. 6, the charge relaxation time of the flexible temperature-pressure sensor increases linearly with the increase of temperature, and meanwhile, the electrical performance changes under the same temperature conditions under different external pressure stimulus conditions are the same, which indicates that the pressure changes do not affect the detection of the temperature signal.
Example 2
As another improvement, the flexible temperature-pressure bimodal sensor provided in embodiment 2 is different from embodiment 1 in that the ionic liquid in the ionic gel layer is [ EMIM] + [PF6] - The method comprises the steps of carrying out a first treatment on the surface of the The flexible electrode was 80nm PEDOT printed on the PDMS surface: PSS conductive polymer.
The other components are the same as those in embodiment 1, and will not be described in detail here.
The flexible temperature-pressure bimodal sensor provided in example 2 was subjected to temperature and pressure detection, respectively, to characterize its temperature-pressure sensing performance, and the resulting law was substantially identical to that of example 1.
Example 3
As another improvement, the flexible temperature and pressure sensor provided in embodiment 3 is different from embodiment 1 in that the ionic liquid in the ionic gel layer is [ EMIm] + [TFSI] - The method comprises the steps of carrying out a first treatment on the surface of the The flexible electrode is an Ag nanowire film printed on the surface of the PDMS.
The other components are the same as those in embodiment 1, and will not be described in detail here.
The flexible temperature-pressure bimodal sensor provided in example 3 was subjected to temperature and pressure detection, respectively, to characterize its temperature-pressure sensing performance, and the resulting law was substantially identical to that of example 1.
Example 4
As another improvement, the flexible temperature-pressure bimodal sensor provided in embodiment 4 is different from embodiment 1 in that the ionic liquid in the ionic gel material is [ EMIm] + [TFSI] - The method comprises the steps of carrying out a first treatment on the surface of the The flexible electrode is a 60nm Cu film deposited on a PI substrate.
The other components are substantially the same as those of embodiment 1, and will not be described in detail here.
The flexible temperature-pressure bimodal sensor provided in example 4 was subjected to temperature and pressure detection, respectively, to characterize its temperature-pressure sensing performance, and the resulting law was substantially identical to that of example 1.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the invention.
Claims (9)
1. A method for preparing a flexible temperature-pressure bimodal sensor is characterized in that,
the flexible temperature-pressure bimodal sensor comprises a first flexible electrode, a second flexible electrode and an ionic gel layer, wherein the ionic gel layer is fixed between the first flexible electrode and the second flexible electrode, and the ionic gel layer is of a porous structure;
the preparation method comprises the following steps:
s1, preparing a first flexible electrode and a second flexible electrode;
s2, preparing an ionic gel precursor solution, and putting foam metal into the prepared ionic gel precursor solution, so that the ionic gel precursor solution completely fills the pores of the foam metal;
s3, solidifying the foam metal filled with the ionic gel precursor solution to form an ionic gel material;
s4, putting the ionic gel material obtained in the step S3 into a preset solution for soaking, so that the foam metal is completely dissolved to obtain an ionic gel layer with a porous structure;
s5, fixedly connecting the upper surface and the lower surface of the ionic gel layer obtained in the S4 with a first flexible electrode and a second flexible electrode respectively to form the flexible temperature-pressure bimodal sensor.
2. The method of claim 1, wherein in S2, preparing the ionic gel precursor solution comprises dissolving a polymer in a solvent, adding an ionic liquid, mixing and stirring to form the ionic gel precursor solution.
3. The method for manufacturing the flexible temperature-pressure bimodal sensor according to claim 1, wherein in the step S3, the curing temperature is 70-150 ℃;
s4, the preset solution is aqua regia.
4. The method for manufacturing a flexible temperature pressure bimodal sensor according to claim 1 wherein the ionic gel layer comprises an ionic liquid and a polymer.
5. The method for manufacturing a flexible temperature-pressure bimodal sensor as claimed in claim 4, wherein said ionic liquid comprises: any one of tri (2-hydroxyethyl) sulfate ethylmethyl ammonium salt, 1-ethyl-3-methylimidazole hexafluorophosphate, 1-ethyl-3-methylimidazole bifluoride mesylate and 1-ethyl-3-methylimidazole bifluoride mesylate.
6. The method of manufacturing a flexible temperature and pressure bimodal sensor as in claim 4 wherein said polymer is a vinylidene fluoride-hexafluoropropylene copolymer.
7. The method for manufacturing a flexible temperature pressure bimodal sensor according to claim 1, wherein the first flexible electrode and the second flexible electrode each comprise a flexible substrate and a conductive layer, and the conductive layer is obtained by evaporating a metal film or printing a conductive material on the flexible substrate.
8. A method for testing a flexible temperature pressure bimodal sensor obtained by the method according to any one of claims 1 to 7, comprising: and respectively obtaining the change of the temperature and the pressure to the electrical property of the flexible temperature-pressure bimodal sensor by switching the test frequency.
9. The test method according to claim 8, comprising: testing the change of the impedance of the flexible bimodal sensor under the first test frequency condition to obtain temperature change, and testing the change of the capacitance of the flexible bimodal sensor under the second test frequency condition to obtain pressure change; wherein the second test frequency is higher than the first test frequency.
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| CN116499522B (en) * | 2023-04-11 | 2024-01-12 | 山东大学 | High-sensitivity flexible temperature and pressure dual-mode decoupling and sensor |
| CN117064363B (en) * | 2023-08-21 | 2024-03-22 | 华南农业大学 | Multimode respiration sensor and preparation method thereof |
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