CN114383761A - Pressure sensor with single-direction conduction function and preparation method and application thereof - Google Patents
Pressure sensor with single-direction conduction function and preparation method and application thereof Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/16—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in the magnetic properties of material resulting from the application of stress
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Abstract
The invention relates to the technical field of sensors, and particularly discloses a pressure sensor with a single-direction conducting function, and a preparation method and application thereof. The pressure sensor includes: the flexible electrode structure comprises two layers of flexible electrodes and a dielectric layer positioned between the two layers of flexible electrodes; the dielectric layer comprises a base material and magnetic conductive fibers distributed in the base material, and the magnetic conductive fibers are arranged in a direction perpendicular to the flexible electrodes. The pressure sensor provided by the invention has the advantages of flexibility, high sensitivity and wide monitoring range.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a pressure sensor with a single-direction conducting function and a preparation method and application thereof.
Background
The electronic sensor is used for accurately measuring important information of the human body in real time, so that the electronic sensor plays an important role in health monitoring and medical care, and the skin of the human body can naturally distinguish pressure and various mechanical stimuli or mechanical deformations and carry out independent sensing, so that the wearable electronic sensing device also has high-sensitivity sensing on the capability of various mechanical stresses. However, most of the existing sensors rely on the change of contact resistance to realize pressure sensing, and the deformation range is small, so that high sensitivity and a wide monitoring range cannot be realized.
Therefore, the preparation of pressure sensors with high sensitivity and wide monitoring range is still a hot spot pursued in the sensor field.
Disclosure of Invention
The invention aims to overcome the technical problems in the prior art and provides a pressure sensor with a unidirectional conduction function, and a preparation method and application thereof.
In order to achieve the above object, a first aspect of the present invention provides a pressure sensor having a unidirectional conductive function, the pressure sensor including: the flexible electrode structure comprises two layers of flexible electrodes and a dielectric layer positioned between the two layers of flexible electrodes; the dielectric layer comprises a base material and magnetic conductive fibers distributed in the base material, and the magnetic conductive fibers are arranged in a direction perpendicular to the flexible electrodes.
In a second aspect, the present invention provides a method of manufacturing a pressure sensor having a single-direction conductive function, the method comprising the steps of:
the magnetic conductive fibers are directionally distributed in the base material, and the flexible electrode is assembled;
wherein the magnetic conductive fibers are aligned perpendicular to the flexible electrodes.
In a third aspect, the present invention provides a pressure sensor prepared by the method described above.
The invention provides an application of the pressure sensor in the wearable device and/or human-computer interaction field.
A fifth aspect of the invention provides a wearable device comprising the aforementioned pressure sensor.
The pressure sensor provided by the invention has the advantages of flexibility, high sensitivity and wide monitoring range.
Drawings
FIG. 1 is a schematic representation of an aligned magnetic conductive fiber according to one embodiment of the present invention;
FIG. 2 is a schematic diagram of a sensor of one embodiment of the present invention as a function of pressure;
FIG. 3 (a) is a graph showing the change in the ratio of the real-time current to the initial current with the change in pressure for the sensors prepared in example 1, example 4 and comparative example 1, respectively, according to the present invention at different pressures; (b) the graphs are respectively the graphs that the ratio of real-time current to initial current changes along with the change of pressure of the sensors prepared in the embodiment 1, the embodiment 2 and the embodiment 3 of the invention under different pressures; (c) the relationship between current and voltage (voltammogram) of the sensor prepared in example 1 under no pressure at different voltages; (d) is a curve diagram of the change of the real-time current and pressure of the sensor (example 1) of a specific implementation mode of the invention under different pressures; (e) the pressure sensor of a specific embodiment of the invention is a current diagram with the same pressure and different frequencies; (f) the sensor (example 1) according to a specific embodiment of the present invention is a real-time current variation curve under pressure stimulation; (g) the sensor (example 1) according to a specific embodiment of the present invention is a real-time current curve under 3000 stimulations at the same pressure.
Detailed Description
The endpoints of the ranges and any values disclosed herein are not limited to the precise range or value, and such ranges or values should be understood to encompass values close to those ranges or values. For ranges of values, between the endpoints of each of the ranges and the individual points, and between the individual points may be combined with each other to give one or more new ranges of values, and these ranges of values should be considered as specifically disclosed herein.
The present invention in a first aspect provides a pressure sensor having a unidirectional conductive function, the pressure sensor comprising: the flexible electrode structure comprises two layers of flexible electrodes and a dielectric layer positioned between the two layers of flexible electrodes; the dielectric layer comprises a base material and magnetic conductive fibers distributed in the base material, and the magnetic conductive fibers are arranged in a direction perpendicular to the flexible electrodes.
According to some embodiments of the invention, the weight ratio of the base material to the magnetic conductive fibers may be (3-25): 1 (e.g., 3:1, 4:1, 5:1, 10:1, 15:1, 20:1, 25:1, or any value therebetween).
According to some embodiments of the invention, the magnetic conductive fibers may be cylindrical.
Preferably, the length of the magnetic conductive fiber is 0.5-3mm, and the diameter is 0.1-0.3 mm.
According to some embodiments of the present invention, the magnetic conductive fiber may have a conductivity of (1.5-2) × 10-3Omega cm; the magnetic permeability can be (8-9) x 103H/m。
According to some embodiments of the present invention, the magnetic conductive fiber may be selected from at least one of nickel-plated carbon fiber, nickel-plated metal fiber, nickel-plated stainless steel, iron-plated carbon fiber, and cobalt-plated carbon fiber, preferably nickel-plated carbon fiber and/or cobalt-plated carbon fiber.
The thickness of the dielectric layer is not particularly limited as long as the requirements of the present invention can be satisfied, and for example, the thickness of the dielectric layer may be 2mm to 5 mm.
According to some embodiments of the invention, the substrate material may be selected from a thermally curable material and/or a photo-curable material.
In the invention, the heat conductivity coefficient of the substrate material can be 0.134-0.159W/M.K, the light transmittance can be 95-100%, and the substrate material has physiological inertia and good chemical stability. The substrate material has electric insulation, weather resistance and shear resistance, and can be used at-50-200 ℃ for a long time.
According to some embodiments of the present invention, the thermally curable material may be selected from polydimethylsiloxane and/or silicone.
According to some embodiments of the invention, the photocurable material may be a photosensitive polyurethane.
According to some embodiments of the invention, the two layers of flexible electrodes may each independently have a thickness of 20 μm to 70 μm.
According to some embodiments of the invention, the flexible electrode may be selected from interdigitated electrodes and/or conductive metal electrodes.
According to some embodiments of the invention, the upper electrode of the pressure sensor is a conductive metal electrode and the lower electrode is an interdigital electrode.
According to some embodiments of the invention, the number of pairs of interdigitated electrodes is 8-20 pairs.
According to some embodiments of the present invention, the inter-digital line width and the line distance of the inter-digital electrodes are each independently 100-200 μm.
According to a preferred embodiment of the invention, the interdigital electrode is prepared by magnetron sputtering, wherein the magnetron sputtering time is 20-40 min.
According to a preferred embodiment of the invention, the magnetron sputtering is performed so that the thickness of the deposited metal on the interdigital electrode is 70-100 nm. Preferably, the deposited metal is selected from copper and/or gold, preferably copper.
According to some embodiments of the invention, the conductive metal electrode is a mesh electrode; the conductive metal electrode is selected from at least one of a copper electrode, a nickel cloth and a silver cloth.
According to some embodiments of the invention, the sensitivity of the pressure sensor may be 10000--1。
In a second aspect, the present invention provides a method of manufacturing a pressure sensor having a single-direction conductive function, the method comprising the steps of:
the magnetic conductive fibers are directionally distributed in the base material, and the flexible electrode is assembled;
wherein the magnetic conductive fibers are aligned perpendicular to the flexible electrodes.
According to some embodiments of the invention, the flexible electrode is assembled in a manner comprising: curing the flexible electrode and the matrix material distributed with the magnetic conductive fibers together;
or after the matrix material distributed with the magnetic conductive fibers is solidified, the flexible electrode is adhered and covered.
The flexible electrodes and the base material distributed with the magnetic conductive fibers are cured together, which means that one or more flexible electrodes and the base material distributed with the magnetic conductive fibers are cured together.
According to some embodiments of the present invention, the magnetic conductive fibers may be directionally distributed in the matrix material by:
and mixing the magnetic conductive fibers with the matrix material, and placing the mixture into a mold, wherein the conductive fibers are directionally distributed in the matrix material in a direction parallel to a magnetic field under the induction of the magnetic field perpendicular to the mold.
According to the invention, the mode of firstly covering the flexible electrode on the upper surface and then curing is adopted, so that the contact resistance can be reduced, the device is favorably stabilized, and meanwhile, the preparation flow is simplified.
According to some embodiments of the invention, the weight ratio of the base material to the magnetic conductive fibers is (5-20): 1.
the magnetic conductive fiber, the base material, and the flexible electrode according to the second aspect of the present invention have the same meanings as those of the first aspect described above. And will not be described in detail herein.
According to some embodiments of the invention, the mold may be a flat plate mold. In order to obtain better effect, the bottom of the mould is made of sand paper. The surface of the sand paper is a sphenoid ridge structure, so that the sensing sensitivity can be effectively improved.
According to some embodiments of the invention, the mixing is performed under stirring. The stirring speed can be 1500-;
according to some embodiments of the invention, the magnetic field inducing conditions may comprise: the magnetic field intensity is 0.1-0.3T; the magnetic field induction is performed under a uniform magnetic field.
According to some embodiments of the invention, the curing is photo-curing or thermal curing.
Preferably, the conditions of photocuring include: the wavelength of the ultraviolet light is 360-380nm, the intensity is 20-50W, and the time is 20-30 s.
Preferably, the conditions for the thermal curing include: at 70-80 deg.C for 60-90 min.
In the present invention, the assembly method of the flexible electrode is not particularly limited as long as the requirements of the present invention can be satisfied. For example, the assembly may be by lamination and/or gluing.
In a third aspect, the present invention provides a pressure sensor prepared by the method described above.
The invention provides an application of the pressure sensor in the wearable device and/or human-computer interaction field.
The method of the invention can also be applied to 3D printing, and sample materials with specific patterns can be directionally printed.
A fifth aspect of the invention provides a wearable device comprising the aforementioned pressure sensor.
The present invention will be described in detail below by way of examples.
Example 1
(1) 4g of nickel-plated carbon fibers (diameter: 0.2mm, length: 2mm, conductivity: 1.5X 10-3. omega. cm, permeability: 8X 103H/m) were added to 16g of a base material (polydimethylsiloxane (PDMS)), stirring at 2000rpm for 20min, mixing, pouring into flat mold (made of acrylic (polymethyl methacrylate; 4cm (length) × 4cm (width) × 2mm (height)), sand paper with rough surface at the bottom of the mold), and the surface of the mixed nickel-plated carbon fiber and the base material is coated by blade (a thin blade is used for uniformly coating the base material), and then the mould filled with the nickel-plated carbon fiber and the base material is placed in a magnetic field in the vertical direction, under the induction of a 0.2T magnetic field (uniform magnetic field), the nickel-plated carbon fibers in the dielectric layer are directionally twisted along the direction of the magnetic field to obtain a dielectric layer precursor; then covering a conductive film (copper mesh, 4cm (length) × 4cm (width)) with the thickness of 50 μm on the upper surface of the obtained dielectric layer precursor, standing at room temperature, and self-leveling for 10min to obtain the dielectric layer precursor with the upper surface covered with the conductive film;
thermally curing the obtained dielectric layer precursor at 70 ℃ for 60min to obtain a dielectric layer with the upper surface covered with a conductive film, wherein the thickness of the dielectric layer is 2 mm;
(2) preparing an interdigital electrode by adopting magnetron sputtering (the time is 30min), wherein the thickness of copper deposited on the interdigital electrode is 100nm, the thickness of the interdigital electrode is 72 mu m, and the interdigital line width and the line distance of the interdigital electrode are respectively 150 mu m; and adhering the lower electrode to the lower surface of the dielectric layer with the upper surface covered with the conductive film.
Example 2
(1) 4.4g of nickel-plated carbon fiber (diameter: 0.2mm, length: 2mm, conductivity: 1.5X 10-3. omega. cm, permeability: 8X 103H/m) was added to 15.6g of a base material (polydimethylsiloxane (PDMS)), stirring at 2000rpm for 20min, mixing, pouring into flat mold (made of acrylic (polymethyl methacrylate; 4cm (length) × 4cm (width) × 2mm (height)), sand paper with rough surface at the bottom of the mold), and the surface of the mixed nickel-plated carbon fiber and the base material is coated by blade (a thin blade is used for uniformly coating the base material), and then the mould filled with the nickel-plated carbon fiber and the base material is placed in a magnetic field in the vertical direction, under the induction of a 0.2T magnetic field (uniform magnetic field), the nickel-plated carbon fibers in the dielectric layer are directionally twisted along the direction of the magnetic field to obtain a dielectric layer precursor; then covering a conductive film (copper mesh, 4cm (length) × 4cm (width)) with a thickness of 50 μm on the upper surface of the obtained dielectric layer, standing at room temperature, and self-leveling for 10min to obtain a dielectric layer precursor with the upper surface covered with the conductive film;
thermally curing the obtained dielectric layer precursor at 70 ℃ for 60min to obtain a dielectric layer with the upper surface covered with a conductive film, wherein the thickness of the dielectric layer is 2 mm;
(2) preparing an interdigital electrode by adopting magnetron sputtering (the time is 30min), wherein the thickness of copper deposited on the interdigital electrode is 100nm, the thickness of the interdigital electrode is 72 mu m, and the interdigital line width and the line distance of the interdigital electrode are respectively 150 mu m; and adhering the lower electrode to the lower surface of the dielectric layer with the upper surface covered with the conductive film.
Example 3
(1) 3.6g of nickel-plated carbon fiber (diameter: 0.2mm, length: 2mm, conductivity: 1.5X 10-3. omega. cm, permeability: 8X 103H/m) was added to 16.4g of a base material (polydimethylsiloxane (PDMS)), stirring at 2000rpm for 20min, mixing, pouring into flat mold (made of acrylic (polymethyl methacrylate; 4cm (length) × 4cm (width) × 2mm (height)), sand paper with rough surface at the bottom of the mold), and the surface of the mixed nickel-plated carbon fiber and the base material is coated by blade (a thin blade is used for uniformly coating the base material), and then the mould filled with the nickel-plated carbon fiber and the base material is placed in a magnetic field in the vertical direction, under the induction of a 0.2T magnetic field (uniform magnetic field), the nickel-plated carbon fibers in the dielectric layer are directionally twisted along the direction of the magnetic field to obtain a dielectric layer precursor; then covering a conductive film (copper mesh, 4cm (length) × 4cm (width)) with a thickness of 50 μm on the upper surface of the obtained dielectric layer, standing at room temperature, and self-leveling for 10min to obtain a dielectric layer precursor with the upper surface covered with the conductive film;
thermally curing the obtained dielectric layer precursor at 70 ℃ for 60min to obtain a dielectric layer with the upper surface covered with a conductive film, wherein the thickness of the dielectric layer is 2 mm;
(2) preparing an interdigital electrode by adopting magnetron sputtering (the time is 30min), wherein the thickness of copper deposited on the interdigital electrode is 100nm, the thickness of the interdigital electrode is 72 mu m, and the interdigital line width and the line distance of the interdigital electrode are respectively 150 mu m; and adhering the lower electrode to the lower surface of the dielectric layer with the upper surface covered with the conductive film.
Example 4
(1) Adding 4g of nickel-plated carbon fiber (with the diameter of 0.2mm, the length of 2mm, the conductivity of 1.5 multiplied by 10 < -3 > omega-cm and the magnetic permeability of 8 multiplied by 103H/m) into 16g of base material (polydimethylsiloxane (PDMS)), stirring for 20min at 2000rpm, uniformly mixing, pouring into a flat plate mold (the material is acrylic (polymethyl methacrylate; 4cm (length) × 4cm (width) × 2mm (height)), the bottom of the mold is a smooth acrylic material), blade-coating the surfaces of the mixed nickel-plated carbon fiber and the base material (uniformly scraping the film on the base material by using a thin blade), flattening, then placing the mold filled with the nickel-plated carbon fiber and the base material in a magnetic field in the vertical direction, and directionally twisting the nickel-plated carbon fiber in the mold along the direction of the magnetic field under the induction of a magnetic field (uniform magnetic field) of 0.2T, obtaining a dielectric layer precursor; then covering a conductive film (copper mesh, 4cm (length) × 4cm (width)) with a thickness of 50 μm on the upper surface of the obtained dielectric layer, standing at room temperature, and self-leveling for 10min to obtain a dielectric layer precursor with the upper surface covered with the conductive film;
thermally curing the obtained dielectric layer precursor at 70 ℃ for 60min to obtain a dielectric layer with the upper surface covered with a conductive film, wherein the thickness of the dielectric layer is 2 mm;
(2) preparing an interdigital electrode by adopting magnetron sputtering (the time is 30min), wherein the thickness of copper deposited on the interdigital electrode is 100nm, the thickness of the interdigital electrode is 72 mu m, and the interdigital line width and the line distance of the interdigital electrode are respectively 150 mu m; and adhering the lower electrode to the lower surface of the dielectric layer with the upper surface covered with the conductive film.
Comparative example 1
The procedure of example 1 was followed except that the nickel-plated carbon fibers were not subjected to orientation induction by a magnetic field.
And (3) carrying out effect test on the obtained pressure sensor:
in FIG. 3 (a), variable pressure was applied to the pressure sensors prepared in examples 1 and 4 and comparative example 1 using a linear motor, wherein a constant voltage was applied using a digital source meter Gichery-2400 (and a current was measured using a digital source meter Gichery-6517).
The test results of (a) in fig. 3 show that the pressure sensors prepared in example 1, example 4 and comparative example 1 have better responsiveness to pressure.
The different curves, different slopes for (a) in fig. 3 illustrate that the pressure sensor prepared in example 1 has a much higher responsiveness to pressure than example 4 and comparative example 1, respectively.
Fig. 3 (b) shows the same test conditions as fig. 3 (a), and represents the response currents of example 1, example 2 and example 3 to different pressures, respectively.
The different curves, different slopes for (a) in fig. 3 illustrate that the pressure sensor prepared in example 1 has a much higher responsiveness to pressure than examples 2 and 3, respectively.
Fig. 3 (c) is a graph of voltage versus current for the pressure sensor test prepared in example 1. The test method is that the electrochemical workstation applies variable voltage and tests the current. The results show that the pressure sensor prepared in example 1 is a pure resistive device.
The test methods of (d) - (g) in FIG. 3 are the same as those of (a) and (b).
FIG. 3 (d) shows the current corresponding to the pressure sensor prepared in example 1 at a particular applied pressure (1-100kPa, such as 1kPa, 15kPa, 38kPa, 48kPa, and 58 kPa); the result shows that the output current signal is stable under the same pressure stimulation and increases along with the increase of the pressure.
Fig. 3 (e) shows that the output current of the pressure sensor prepared in example 1 increases with increasing frequency, and does not increase with increasing frequency of the applied force.
In fig. 3 (f) is shown the force applied to the pressure sensor prepared in example 1, the response time of the current is 30ms, and the instant of the applied force generates a current signal. Indicating that the device signal responds quickly to pressure.
Fig. 3 (g) shows that the current signal of the pressure sensor prepared in example 1 still maintains good stability at 3000 cycles.
The preferred embodiments of the present invention have been described above in detail, but the present invention is not limited thereto. Within the scope of the technical idea of the invention, many simple modifications can be made to the technical solution of the invention, including combinations of various technical features in any other suitable way, and these simple modifications and combinations should also be regarded as the disclosure of the invention, and all fall within the scope of the invention.
Claims (14)
1. A pressure sensor having a unidirectional electrical conduction function, the pressure sensor comprising: the flexible electrode structure comprises two layers of flexible electrodes and a dielectric layer positioned between the two layers of flexible electrodes; the dielectric layer comprises a base material and magnetic conductive fibers distributed in the base material, and the magnetic conductive fibers are arranged in a direction perpendicular to the flexible electrodes.
2. The pressure sensor of claim 1, wherein the weight ratio of the base material to the magnetic conductive fibers is (3-25): 1;
and/or the magnetic conductive fiber is cylindrical; preferably, the length of the magnetic conductive fiber is 0.5-3mm, and the diameter is 0.1-0.3 mm;
and/or the conductivity coefficient of the magnetic conductive fiber is (1.5-2) multiplied by 10-3Omega cm; magnetic permeability of (8-9) × 103H/m。
3. Pressure sensor according to claim 1 or 2, wherein the magnetic conductive fibers are selected from at least one of nickel-plated carbon fibers, nickel-plated metal fibers, nickel-plated stainless steel, iron-plated carbon fibers and cobalt-plated carbon fibers, preferably nickel-plated carbon fibers and/or cobalt-plated carbon fibers.
4. The pressure sensor of claim 1 or 2, wherein the dielectric layer has a thickness of 2mm-5 mm;
and/or, the substrate material is selected from a thermosetting material and/or a photo-curing material;
preferably, the thermosetting material is selected from polydimethylsiloxane and/or silica gel;
preferably, the light-curable material is a light-sensitive polyurethane.
5. The pressure sensor of claim 1 or 2, wherein the two layers of flexible electrodes each independently have a thickness of 20-70 μ ι η;
and/or the flexible electrode is selected from an interdigital electrode and/or a conductive metal electrode;
preferably, the upper electrode of the pressure sensor is a conductive metal electrode, and the lower electrode is an interdigital electrode;
preferably, the number of pairs of the interdigital electrodes is 8-20 pairs;
preferably, the line width and the line distance of the interdigital electrode are respectively and independently 100-200 μm;
preferably, the conductive metal electrode is a mesh electrode; the conductive metal electrode is selected from at least one of a copper electrode, a nickel cloth and a silver cloth.
6. The pressure sensor according to any of claims 1-5, wherein the sensitivity of the pressure sensor is 10000-40000kPa-1。
7. A method of making a pressure sensor having a single-direction conductive function, the method comprising: the magnetic conductive fibers are directionally distributed in the base material, and the flexible electrode is assembled;
wherein the magnetic conductive fibers are aligned perpendicular to the flexible electrodes.
8. The method of claim 7, wherein assembling the flexible electrode comprises: curing the flexible electrode and the matrix material distributed with the magnetic conductive fibers together;
or after the matrix material distributed with the magnetic conductive fibers is solidified, the flexible electrode is adhered and covered.
9. The method of claim 7 or 8, wherein the magnetically conductive fibers are directionally distributed in the matrix material by:
and mixing the magnetic conductive fibers with the matrix material, and placing the mixture into a mold, wherein the conductive fibers are directionally distributed in the matrix material in a direction parallel to a magnetic field under the induction of the magnetic field perpendicular to the mold.
10. The method of claim 9, wherein the weight ratio of the base material to the magnetic, electrically conductive fibers is (5-20): 1;
and/or the magnetic conductive fiber is cylindrical; preferably, the length of the magnetic conductive fiber is 0.5-3mm, and the diameter is 0.1-0.3 mm;
and/or the conductivity coefficient of the magnetic conductive fiber is (1.5-2) multiplied by 10-3Omega cm; magnetic permeability of (8-9) × 103H/m；
And/or the magnetic conductive fiber is selected from at least one of nickel-plated carbon fiber, nickel-plated metal fiber, nickel-plated stainless steel, iron-plated carbon fiber and cobalt-plated carbon fiber, preferably nickel-plated carbon fiber and/or cobalt-plated carbon fiber;
and/or, the substrate material is selected from a thermosetting material and/or a photo-curing material;
preferably, the thermosetting material is selected from polydimethylsiloxane and/or silica gel;
preferably, the light-curable material is a photosensitive polyurethane;
and/or, the mould is a flat mould; the bottom of the mold is made of abrasive paper;
and/or, the mixing is carried out under stirring; the stirring speed is 1500-3000rpm, and the time is 20-30 min;
and/or, the magnetic field-induced conditions comprise: the magnetic field intensity is 0.1-0.3T; the magnetic field induction is carried out under a uniform magnetic field;
and/or, the curing is photo-curing or thermal curing;
preferably, the conditions of photocuring include: the wavelength of the ultraviolet light is 360-380nm, the intensity is 20-50W, and the time is 20-30 s;
preferably, the conditions for the thermal curing include: at 70-80 deg.C for 60-90 min.
11. The method of any one of claims 7-10, wherein the flexible electrode has a thickness of 20 μ ι η to 70 μ ι η;
and/or the flexible electrode is selected from an interdigital electrode and/or a conductive metal electrode;
preferably, the upper electrode of the pressure sensor is a conductive metal electrode, and the lower electrode is an interdigital electrode;
preferably, the conductive metal electrode is a mesh electrode; the conductive metal electrode is selected from at least one of a copper electrode, a nickel cloth and a silver cloth;
preferably, the number of pairs of the interdigital electrodes is 8-20 pairs;
preferably, the line width and the line distance of the interdigital electrode are respectively and independently 100-200 μm;
preferably, the conductive metal electrode is a mesh electrode; the conductive metal electrode is selected from at least one of a copper electrode, a nickel cloth and a silver cloth;
preferably, the interdigital electrode is prepared by magnetron sputtering, wherein the magnetron sputtering time is 20-40min,
and/or the magnetron sputtering ensures that the thickness of the metal deposited on the interdigital electrode is 70-100 nm;
preferably, the deposited metal is selected from copper and/or gold, preferably copper.
12. A pressure sensor prepared by the method of any one of claims 7-11.
13. Use of a pressure sensor according to any of claims 1-6 and 12 in the field of wearable devices and/or human-computer interaction.
14. A wearable device, characterized in that it comprises a pressure sensor according to any of claims 1-6 and 12.
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