CN114322771B - Method and system for detecting position information of interference signal - Google Patents
Method and system for detecting position information of interference signal Download PDFInfo
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Abstract
The present disclosure describes a method and system for detecting position information of an interference signal. The method includes collecting interference signals by a first processing module of the detection system, informing a second processing module of the detection system to record first position information in response to meeting a judging condition determined by an amplitude threshold value and fluctuation information of the interference signals, informing the second processing module to record second position information in response to the signal strength of the interference signals being reduced to a preset signal strength, and taking the interference signals between the first position information and the second position information as target interference signals; transmitting the target interference signal and the position information including the first position information and the second position information to a third processing module of the detection system; and the third processing module determines target position information of the target interference signal based on a proportional relationship between the data amount of the target interference signal and the position information length corresponding to the position information. Thus, effective interference signals and corresponding position information can be acquired.
Description
Technical Field
The present disclosure relates to the field of signal processing, and in particular, to a method and system for detecting position information of an interference signal.
Background
Measurement instruments (e.g., interferometers) operating based on the interference principle often utilize interference patterns to effect measurement of sample information by changing the optical path or phase to form different interference patterns (which may also be referred to as interference signals). For example, an interferometer having a reference arm and a sample arm may generate an interference pattern by adjusting the position of a reference mirror to change the arm length of the reference arm to change the optical path difference between the two arms, thereby causing interference. At present, a measuring instrument working based on an interference principle can be widely applied to the fields of biomedicine, industrial material measurement and the like.
Therefore, how to accurately acquire the interference signal and the position information corresponding to the sampling point in the interference signal is important in measuring the sample information by using the interference signal. However, the interference signal is generally very fast (for example, a frequency approaching 1mhz can be achieved), and when the measuring instrument is used, an unavoidable disturbance (for example, disturbance such as subway passing, electric drill on a construction site or hand trembling) is easily generated, so that the interference signal is invalid or the interference signal cannot be in one-to-one correspondence with the position information, and the interference signal cannot be in correspondence with the position information, so that the research and use value of the interference signal is lost.
Disclosure of Invention
The present disclosure has been made in view of the above-described conventional art, and an object thereof is to provide a method and a system for detecting position information of an interference signal, which can collect an effective interference signal and corresponding position information.
To this end, a first aspect of the present disclosure provides a method of detecting positional information of an interference signal, the interference signal being an optical signal generated by a co-operation of a sample arm and a reference arm of an interferometer, the method comprising: collecting interference signals from the interferometer by using a first processing module of a detection system, informing a second processing module of the detection system to record first position information by the first processing module in response to meeting a judging condition determined by an amplitude threshold value and fluctuation information of the interference signals, continuously collecting the interference signals, informing the second processing module to record second position information by responding to the fact that the signal intensity of the interference signals is reduced to a preset signal intensity, and taking the interference signals between the first position information and the second position information as target interference signals; the first processing module and the second processing module respectively transmit the target interference signal and the position information comprising the first position information and the second position information to a third processing module of the detection system; and the third processing module receives the target interference signal and adds a first data set, receives the position information and adds a second data set, and determines the position information corresponding to the target interference signal in the first data set and serves as the target position information of the target interference signal based on the proportional relation of the data amount of the target interference signal in the first data set and the position information length corresponding to the position information in the second data set. Under the condition, the probability of acquiring the interference signal can be effectively reduced, the interference signal can be accurately predicted as soon as possible when the interference signal is small, and then the effective interference signal can be completely and accurately acquired, the target position information corresponding to the effective interference signal can be obtained, and the interference signal has stronger anti-interference capability. Thus, effective interference signals and corresponding position information can be acquired.
Further, in the method according to the first aspect of the present disclosure, optionally, a parameter of a sample is measured based on the target interference signal and target position information of the target interference signal, wherein the parameter of the sample includes at least one of a length, a thickness, and a refractive index of the sample. Thus, the parameters of the sample can be measured.
In addition, in the method according to the first aspect of the present disclosure, optionally, functions of the first processing module, the second processing module, and the third processing module are executed by a processor, where functions of the first processing module and the second processing module are executed by different processors, or functions of the first processing module, the second processing module, and the third processing module are executed by the same processor, or functions of the second processing module and the third processing module are executed by the same processor, respectively.
In addition, in the method according to the first aspect of the present disclosure, optionally, if the fluctuation information is a fluctuation frequency, the judging condition is that the amplitude of the interference signal in a preset time is greater than the amplitude threshold, and the fluctuation frequency corresponding to the interference signal in the preset time is located in a target frequency range, where the fluctuation frequency is the number of fluctuations in a unit time, and the target frequency range is determined by an actual frequency of the interference signal; if the fluctuation information is the fluctuation quantity, the judgment condition is that the amplitude of the interference signal in the preset time is larger than the amplitude threshold, and the fluctuation quantity corresponding to the interference signal in the preset time is located in a target quantity range, wherein the target quantity range is determined by the actual frequency of the interference signal. In this case, the interference signal can be double-screened by the amplitude threshold and the fluctuation frequency to identify whether the interference signal starts or can be double-screened by the amplitude threshold and the fluctuation number to identify whether the interference signal starts.
Further, in the method according to the first aspect of the present disclosure, optionally, the signal strength of the interference signal is a sum of amplitudes within one interference period or an average value of the sum of amplitudes within at least one interference period. Thereby, the signal strength of the interference signal can be obtained.
In addition, in the method related to the first aspect of the present disclosure, optionally, when processing the target interference signal in the first data set, acquiring, from the first data set, the target interference signal that is first added to the first data set as an interference signal to be processed; checking the interference signal to be processed to confirm whether the interference signal to be processed is a correct signal; discarding the pending interference signal in response to the pending interference signal being an error signal; and searching for position information, which accords with a preset proportional range, from the second data set as the target position information in response to the interference signal to be processed being a correct signal, wherein the position information which is added to the second data set first is searched for when the position information is searched for. Thus, the target position information of the target interference signal can be acquired quickly.
Further, in the method according to the first aspect of the present disclosure, optionally, the data amount is a number of interference peaks in the target interference signal, and the preset proportional range is determined by a movement speed of the reference arm of the interferometer.
In addition, in the method according to the first aspect of the present disclosure, optionally, the type of the location information includes at least one of a time type and a distance type, where the location information of the time type is a time corresponding to a timer, and the location information of the distance type is a distance corresponding to a distance measurement tool. Thus, a plurality of modes of collecting position information can be supported.
In addition, in the method according to the first aspect of the present disclosure, optionally, in transmitting the target interference signal, if a new interference signal satisfying the determination condition is detected, the first processing module cuts off transmission of the target interference signal in preparation for receiving the new interference signal. In this case, the risk of missing acquisition of an effective interference signal can be effectively reduced.
In addition, in the method according to the first aspect of the present disclosure, optionally, the first processing module has an analog-to-digital conversion chip for converting an analog signal collected from the interferometer into a digital signal and serving as the interference signal. Thus, the storage, processing, and transmission of digital signals by a computing device can be facilitated.
A second aspect of the present disclosure provides a system for detecting positional information of an interference signal, wherein the interference signal is an optical signal generated by a cooperative action of a sample arm and a reference arm of an interferometer, the system comprising a first processing module, a second processing module, and a third processing module; the first processing module is used for collecting interference signals from the interferometer, informing the second processing module to record first position information in response to meeting judging conditions determined by an amplitude threshold value and fluctuation information of the interference signals, continuously collecting the interference signals, informing the second processing module to record second position information in response to the fact that the signal strength of the interference signals is reduced to a preset signal strength, taking the interference signals between the first position information and the second position information as target interference signals, and transmitting the target interference signals to the third processing module; the second processing module is used for recording the first position information and the second position information and transmitting the position information comprising the first position information and the second position information to the third processing module; and the third processing module is used for receiving the target interference signal and adding a first data set, receiving the position information and adding a second data set, and determining the position information corresponding to the target interference signal in the first data set and serving as the target position information of the target interference signal based on the proportional relation of the data amount of the target interference signal in the first data set and the position information length corresponding to the position information in the second data set. Under the condition, the probability of acquiring the interference signal can be effectively reduced, the interference signal can be accurately predicted as soon as possible when the interference signal is small, and then the effective interference signal can be completely and accurately acquired, the target position information corresponding to the effective interference signal can be obtained, and the interference signal has stronger anti-interference capability. Thus, effective interference signals and corresponding position information can be acquired.
According to the present disclosure, a method and system for detecting position information of an interference signal, which can collect an effective interference signal and corresponding position information, can be provided.
Drawings
Embodiments of the present disclosure will now be explained in further detail by way of example only with reference to the accompanying drawings, in which:
fig. 1 is an exemplary scenario illustrating a system of detecting position information of an interference signal according to an example of the present disclosure.
Fig. 2 is an exemplary block diagram illustrating a system for detecting position information of an interference signal according to an example of the present disclosure.
Fig. 3 is a flow chart illustrating one example of the processing of an interference signal by a first processing module in accordance with examples of the present disclosure.
Fig. 4 is a flow chart illustrating one example of a third processing module in accordance with examples of the present disclosure processing a target interference signal in a first data set.
Fig. 5 is another exemplary block diagram illustrating a system for detecting position information of an interference signal according to an example of the present disclosure.
Fig. 6 is a flowchart illustrating a method of detecting position information of an interference signal according to an example of the present disclosure.
Detailed Description
Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In the following description, the same members are denoted by the same reference numerals, and overlapping description thereof is omitted. In addition, the drawings are schematic, and the ratio of the sizes of the components to each other, the shapes of the components, and the like may be different from actual ones. It should be noted that the terms "comprises" and "comprising," and any variations thereof, in this disclosure, such as a process, method, system, article, or apparatus that comprises or has a list of steps or elements is not necessarily limited to those steps or elements expressly listed or inherent to such process, method, article, or apparatus, but may include or have other steps or elements not expressly listed or inherent to such process, method, article, or apparatus. All methods described in this disclosure can be performed in any suitable order unless otherwise indicated herein or otherwise clearly contradicted by context.
The present disclosure relates to a method and system for detecting position information of an interference signal. The method of detecting the position information of the interference signal may be simply referred to as a method, a detection method, or a signal processing method, hereinafter simply referred to as a detection method. In addition, the system for detecting the position information of the interference signal may be simply referred to as a system, a detection system, or a signal processing system, hereinafter simply referred to as a detection system.
The detection method and the detection system can collect effective interference signals and corresponding position information, and can be suitable for processing interference signals of a measuring instrument working based on an interference principle. It should be noted that examples of the present disclosure are described below using a measuring instrument as an interferometer, and are not meant to limit the present disclosure.
The interference signals to which the present disclosure relates may be from interferometers. In some examples, the interference signal may be an optical signal generated by the interaction of a sample arm and a reference arm of the interferometer. In some examples, the light generates an interference signal by interfering with the sample arm and the reference arm of the interferometer, respectively, under conditions that satisfy the interference. For example, the interference condition may be that the optical path difference of the sample arm and the reference arm is less than the coherence length of the light source.
In some examples, the interference signal may be combined from sine waves. For example, an interference signal having a length of about 1ms (millisecond) may be composed of several hundred sine waves of 600khz or so. It would therefore be of great interest to be able to acquire valid interference signals correctly and to know the position of each point in the interference signal, which data can have a great deal of research value. For example, the thickness of the material can be detected according to the influence of different materials on the interference peak in the interference signal, n+1 interference peaks are assumed to exist on the assumption that n layers of thin coating films exist, and the thickness of the coating film can be detected by the position difference of the interference peaks.
Fig. 1 is an exemplary scenario illustrating a system of detecting position information of an interference signal according to an example of the present disclosure.
In some examples, the detection system 20 to which the present disclosure relates may be applied in a scenario as shown in fig. 1. In a scenario, detection system 20 (see FIG. 2 for specific structure) may collect and process interference signals from interferometer 10. Interferometer 10 can include a light source 110, a fiber coupler 120, a reference arm 130, a sample arm 140, and a light detector 150 (e.g., a spectrometer), wherein light from the light source 110 is split by the fiber coupler 120, one path enters the reference arm 130, the other path is transmitted to a sample 160 by the sample arm 140, the light reflected by the sample 160 and return light of the reference arm 130 enter the fiber coupler 120 together to couple, interference occurs under interference conditions, an interference signal is recorded by the light detector 150 and transmitted to the detection system 20, and the interference signal is processed by the detection system 20. In some examples, the interference signal transmitted by the photodetector 150 to the detection system 20 may be via photoelectric conversion (i.e., converting an analog signal to a digital signal). In other examples, photoelectric conversion may also be performed in the detection system 20.
In some examples, as shown in fig. 1, the reference arm 130 may have a reference mirror 131, and a stepper motor may be used in the reference arm 130 to move the reference mirror 131 to change the arm length of the reference arm 130 (i.e., the reference arm 130 moves), thereby changing the optical path difference between the reference arm 130 and the sample arm 140 to interfere to generate an interference signal.
In some examples, detection system 20 may also be integrated into interferometer 10. Thus, the interference signal can be processed conveniently.
Fig. 2 is an exemplary block diagram illustrating a system for detecting position information of an interference signal according to an example of the present disclosure.
In some examples, as shown in fig. 2, the detection system 20 may include a first processing module 210, a second processing module 220, and a third processing module 230. In this case, the three processing modules cooperate with one another to be able to collect effective interference signals and corresponding position information.
In some examples, the first processing module 210 may be configured to collect interference signals and process the interference signals to identify the beginning and end of the interference signals and to obtain target interference signals (i.e., valid interference signals). In some examples, the first processing module 210 may be connected with the light detector 150 of the interferometer 10 to collect interference signals.
In some examples, the first processing module 210 may process the interference signal to identify a beginning and an end of the interference signal and obtain a target interference signal using the amplitude threshold, fluctuation information of the interference signal, and signal strength of the interference signal.
In some examples, the amplitude threshold may be slightly higher than the amplitude of the noise. For example, if the noise is 50, the amplitude threshold may be set to 55, and if a value greater than 55 is acquired, it may be indicated that the amplitude threshold is valid.
In some examples, the first processing module 210 may identify the beginning of the interference signal (i.e., identify whether a valid interference signal is forthcoming) based on the amplitude threshold and the fluctuation information of the interference signal. In some examples, the determination condition may be determined from the amplitude threshold and fluctuation information of the interference signal, and when the determination condition is satisfied, it is determined that the interference signal is started (i.e., a valid interference signal is imminent). Since the frequency of the effective interference signal is generally stronger than the background noise and the frequency is substantially fixed, other interference factors may be difficult to satisfy the condition of the fluctuation information at the same time under the condition that the amplitude threshold is satisfied. In this case, it can be accurately predicted whether a valid interference signal is imminent or not by using the double screening of the amplitude threshold and the fluctuation information.
In some examples, the first processing module 210 may collect the interference signal for a preset time and determine whether the determination condition is satisfied.
In some examples, if the fluctuation information is a fluctuation frequency, the judgment condition may be that the amplitude of the interference signal in the preset time is greater than the amplitude threshold, and the fluctuation frequency corresponding to the interference signal in the preset time is located in the target frequency range. In this case, the interference signal can be double screened by the amplitude threshold and the fluctuation frequency to identify whether the interference signal starts.
In some examples, the fluctuation frequency may be the number of fluctuations per unit time. In some examples, an interference signal greater than an amplitude threshold for a preset time may be collected as a signal to be processed, and the number of fluctuations (which may also be referred to as an amplitude number) that is the number of fluctuations that increases and decreases in the sampling value in the signal to be processed is obtained as the fluctuation frequency, and the fluctuation number is divided by the preset time and is used as the fluctuation frequency.
In some examples, the target frequency range may be determined by an actual frequency of the interference signal. In addition, the actual frequency of the interference signal may be known. In some examples, the boundary value of the target frequency range may be obtained by decreasing the actual frequency of the interference signal by a first preset value and increasing the actual frequency by a second preset value. In some examples, the first preset value and the second preset value may be the same. For example, the actual frequency of the several interference signals is 600khz, and the target frequency range may be 500khz to 700khz.
In some examples, if the fluctuation information is the number of fluctuations, the judgment condition may be that the amplitude of the interference signal in the preset time is greater than the amplitude threshold, and the number of fluctuations corresponding to the interference signal in the preset time is in the target number range. In this case, the interference signal can be double-screened by the amplitude threshold and the number of fluctuations to identify whether the interference signal starts.
In some examples, the target number range may be determined by an actual frequency of the interference signal. In some examples, the theoretical number of fluctuations in the preset time may be obtained from the actual frequency of the interference signal, and the target number range may be determined based on the theoretical number of fluctuations. In some examples, the boundary value of the target number range may be obtained by decreasing the theoretical number of fluctuations by a third preset value and increasing the theoretical number of fluctuations by a fourth preset value. In some examples, the third preset value and the fourth preset value may be the same. For example, an actual frequency of 600khz (kilohertz) for several interference signals, 10us (microseconds) will produce 6 complete waveforms (i.e., theoretical number of fluctuations), and if the first processing module 210 can obtain 5 to 7 complete waveforms (i.e., target number range) in the interference signals within 10us, it may indicate that the judgment condition is satisfied.
However, examples of the present disclosure are not limited thereto, and in other examples, the first processing module 210 may collect a preset number of interference signals and determine whether the determination condition is satisfied. Specifically, the first processing module 210 may acquire a preset number of interference signals according to the acquisition frequency, determine the acquisition time (corresponding to the preset time) according to the acquisition frequency and the preset number, and further may acquire the corresponding fluctuation frequency and the corresponding fluctuation number in the acquisition time according to the preset number of interference signals and the corresponding acquisition time, so as to determine whether the judgment condition is satisfied. For example, if the acquisition frequency of the first processing module 210 is 10mhz (megahertz), the acquisition time corresponding to 100 sample values may be 10us. If the amplitude threshold condition is satisfied, if the fluctuation frequency corresponding to 100 sampling values is within the target frequency range or the fluctuation number corresponding to 100 sampling values is within the target number range, it may be indicated that the judgment condition is satisfied. For details, the first processing module 210 collects interference signals within a preset time and determines whether the relevant description of the determination condition is satisfied.
As described above, in some examples, the first processing module 210 may identify a start of the interference signal based on the amplitude threshold and fluctuation information of the interference signal. In some examples, the first processing module 210 may identify an end of the interference signal (i.e., whether to stop acquiring the interference signal) based on a signal strength of the interference signal.
In some examples, the first processing module 210 may continue to collect the interference signal after identifying the start of the interference signal and identify whether the interference signal is over based on the signal strength of the interference signal. In some examples, the end of the interference signal may be determined when the signal strength of the interference signal decreases to a preset signal strength. In this case, when the signal intensity of the effective interference signal becomes small, it is possible to recognize in time that the interference signal is about to end. That is, the position where the interference signal is weakened can be determined. In addition, the preset signal strength may be a fixed value. The preset signal strength can be adjusted according to actual conditions.
In some examples, the signal strength of the interference signal may be the sum of the amplitudes over one interference period, or an average of the sum of the amplitudes over at least one interference period (i.e., the sum of the amplitudes over each interference period in at least one interference period may be taken and then averaged). Thereby, the signal strength of the interference signal can be obtained.
For example, taking one interference period as an example, the actual frequency of the interference signals is 1mhz, and the acquisition frequency of the first processing module 210 is 10mhz, then 10 acquisitions may acquire the entire interference period, if the sum of the amplitudes of the 10 acquisitions is less than a preset signal strength (e.g., 200), it may indicate that the signal strength of the interference signal is already small, and the acquisition may be stopped.
As described above, in some examples, the first processing module 210 may identify a start of the interference signal based on the amplitude threshold and fluctuation information of the interference signal, and may identify an end of the interference signal based on a signal strength of the interference signal. In some examples, the first processing module 210 may notify the second processing module 220 to record the location information when it is determined that the interference signal starts and ends.
In some examples, the location information may include first location information (which may also be referred to as start location information) and second location information (which may also be referred to as end location information). Examples of the present disclosure are not limited thereto and in other examples, the location information may also include a plurality of intermediate location information. For example, after determining that the interference signal starts, the second processing module 220 may inform the second processing module 220 to record intermediate position information at fixed or non-fixed intervals until the interference signal ends. In this case, more positional information can be subsequently used to match the target interference signal and more positional information can be acquired for measurement of the sample.
In some examples, the first processing module 210 may notify the second processing module 220 to record the first location information after determining that the interference signal begins and continue to collect the interference signal, and may notify the second processing module 220 to record the second location information after determining that the interference signal ends. Thereby, the second processing module 220 can be made to record the first position information and the second position information in time. In some examples, the first processing module 210 may notify the second processing module 220 through an IO port flip of the single-chip microcomputer. In this case, the second processing module 220 can be notified at a faster speed. Thereby, the second processing module 220 can be made to record accurate position information.
In some examples, the first processing module 210 may target an interference signal between a beginning of the interference signal and an end of the interference signal (i.e., the first processing module 210 may target the interference signal between the first location information and the second location information). In some examples, the first processing module 210 may begin storing the interference signal after determining that the interference signal begins, stop storing the interference signal until after determining that the interference signal ends, take the interference signal stored between the beginning of the interference signal and the end of the interference signal as the target interference signal, and then continue listening to identify the arrival of a new interference signal. In this case, an effective interference signal can be acquired and stored, and the requirement for hardware (e.g., a storage medium) is low. In some examples, the first processing module 210 may transmit the target interference signal to the third processing module 230.
To more clearly describe the process of the first processing module 210 processing the interference signal, fig. 3 is a flowchart showing one example of the process of the first processing module 210 processing the interference signal, which is related to the example of the present disclosure. It should be noted that the present disclosure is not limited thereto.
As shown in fig. 3, in some examples, the process of the first processing module 210 processing the interference signal may include:
step S102, an interference signal from the interferometer 10 is acquired.
Step S104, judging whether the judging condition is satisfied. In addition, the judgment condition may be determined by the amplitude threshold value and fluctuation information of the interference signal. In some examples, step S102 may be performed (i.e., continuing to collect interference signals from interferometer 10) in response to the determination condition not being met.
Step S106, notifying the second processing module 220 to record the first location information in response to the satisfaction of the judgment condition.
Step S108, the interference signal is continuously collected.
Step S110, judging whether the signal intensity of the interference signal is reduced to the preset signal intensity. In some examples, step S108 may be performed (i.e., continuing to acquire the interference signal) in response to the signal strength of the interference signal not decreasing to the preset signal strength.
In step S112, the second processing module 220 is informed to record the second position information in response to the signal strength of the interference signal decreasing to the preset signal strength.
In step S114, the interference signal between the first position information and the second position information is used as the target interference signal and transmitted to the third processing module 230.
In some examples, the first processing module 210 may cut off the transmission target interference signal in preparation for receiving the new interference signal if the new interference signal satisfying the judgment condition is detected in the transmission target interference signal. That is, the first processing module 210 may be ready to cut off transmission and re-acquire the interference signal at any time. In general, a new interference signal may arrive soon after a valid interference signal has been acquired. In this case, the probability of continuously acquiring an effective interference signal can be effectively improved (i.e., the risk of missing acquisition of an effective interference signal is reduced). In addition, the collected valid interference signals may determine whether to continue transmission based on the operational state (e.g., idle) of the first processing module 210.
In some examples, the first processing module 210 may have an analog-to-digital conversion chip. The analog-to-digital conversion chip may be used to convert the analog signal acquired from interferometer 10 into a digital signal and as an interference signal. Thus, storage, processing, and transmission of digital signals by a computing device (e.g., a computer) can be facilitated.
As described above, in some examples, the detection system 20 may include a second processing module 220. In some examples, the second processing module 220 may be used to monitor location information. In some examples, the second processing module 220 may be used to record location information (i.e., first location information and second location information).
In some examples, the type of location information may include at least one of a time type and a distance type. Thus, a plurality of modes of collecting position information can be supported.
In some examples, the time-type location information may be a time corresponding to a timer. For example, the time of the movement process of the reference arm 130 may be recorded using a timer, and the corresponding time points may be respectively used as the first position information and the second position information. In addition, the corresponding time point may be a time point at which the above-described determination condition is satisfied and a time point at which the signal intensity of the above-described interference signal is reduced to a preset signal intensity. In some examples, the distance traveled by the reference arm 130 may be obtained by multiplying time by a speed (i.e., the speed of movement of the reference arm 130).
In some examples, the distance-type location information may be a distance corresponding to a distance measurement tool. For example, the moving distance of the reference arm 130 may be recorded using a distance measuring tool, with the corresponding distance being respectively the first position information and the second position information. In addition, the corresponding distance may be a distance corresponding to the case where the above-mentioned judgment condition is satisfied and a distance corresponding to the case where the signal intensity of the above-mentioned interference signal is reduced to a preset signal intensity. In some examples, the distance measuring tool may be a micrometer. In addition, the micrometer may be accurate to a micrometer. Thereby, accurate position information can be acquired.
In some examples, the second processing module 220 may take the current location information as the first location information when the first processing module 210 is received to notify the recording of the first location information, and may take the current location information as the second location information when the first processing module 210 is received to notify the recording of the second location information. In some examples, the second processing module 220 may obtain current location information as location information from a timer or a distance measurement tool.
In some examples, the second processing module 220 may transmit the recorded location information to the third processing module 230. In other examples, the second processing module 220 may not transmit the recorded position information to the third processing module 230, receive the target interference signal from the first processing module 210, and process the target interference signal and the position information to determine the position information corresponding to the target interference signal (i.e., the second processing module 220 may perform the related functions of the third processing module 230). For details, see the description of the third processing module 230.
As described above, in some examples, the detection system 20 may include a third processing module 230. In some examples, the third processing module 230 may be configured to process the target interference signal and the location information to determine target location information for the target interference signal.
Although the target interference signal and the position information seem to have a corresponding relationship when acquired, in practical application, due to the influence of the interference factor, there is a possibility that the target interference signal or the position information is wrong or the target interference signal or the position information is not corresponding to the position information. In some examples, the third processing module 230 may determine the target position information of the target interference signal using a proportional relationship of a data amount of the target interference signal to a position information length corresponding to the position information. In addition, the position information length may be a distance value between the first position information and the second position information in the position information. For example, the location information length may be a time length or a distance length.
In some examples, the third processing module 230 may receive the target interference signal from the first processing module 210 and add to the first data set, and receive the position information from the second processing module 220 and add to the second data set, and determine and as the target position information of the target interference signal in the first data set based on a proportional relationship of a data amount of the target interference signal in the first data set to a length of the position information corresponding to the position information in the second data set. That is, the third processing module 230 may find, from the second data set, the position information matching the target interference signal in the first data set as the target position information of the target interference signal. In this case, the position information corresponding to the target interference signal is found by the proportional relation, and it is possible to cope with the case where the target interference signal does not correspond to the position information under the influence of the interference factor. Thus, accurate position information of the target interference signal can be obtained, and the anti-interference capability can be improved.
In some examples, the data structures of the first data set and the second data set may be a group, linked list, stack, queue, or the like. In other examples, the data structures of the first data set and the second data set may also be databases.
In some examples, each target interference signal in the first data set may be deleted from the first data set or moved to other data sets after processing. In some examples, the second data set may have a preset length, and when the second data set is full (i.e., the number of location information in the second data set is greater than or equal to the preset length), the location information that first entered the second data set may be deleted when new location information enters the second data set. In some examples, if the location information in the second data set has matched (i.e., has been determined to be) the target interference signal in the first data set, then the location information may be deleted from the second data set.
Fig. 4 is a flowchart illustrating one example of the processing of the target interference signal in the first data set by the third processing module 230 in accordance with examples of the present disclosure. Thus, the target position information of the target interference signal can be acquired quickly.
In some examples, as shown in fig. 4, the third processing module 230 processing the target interference signal in the first data set may include acquiring the target interference signal first added to the first data set from the first data set as the interference signal to be processed (step S202).
In some examples, as shown in fig. 4, the third processing module 230 processing the target interference signal in the first data set may include checking the interference signal to be processed to confirm whether the interference signal to be processed is a correct signal (step S204). In some examples, the interference signal to be processed may be verified in the same manner as described above for identifying the beginning and end of the interference signal. For example, it may be determined whether the interference signal to be processed satisfies the above-described determination condition and/or whether the signal strength of the interference signal to be processed is not less than a preset signal strength. In this case, a case where an ineffective interference signal enters the first data set due to the influence of the interference factor can be excluded. Thus, the anti-jamming capability can be improved.
In some examples, as shown in fig. 4, the third processing module 230 processing the target interference signal in the first data set may include discarding the pending interference signal in response to the pending interference signal being an error signal (step S206). In some examples, after step S206, step S202 may be performed (i.e., the target interference signal first added to the first data set may continue to be acquired from the first data set as the interference signal to be processed) until the target interference signal in the first data set (not shown) is traversed.
In some examples, as shown in fig. 4, the third processing module 230 processing the target interference signal in the first data set may include searching for, as the target position information, position information from the second data set in which a proportional relationship with a data amount of the interference signal to be processed conforms to a preset proportional range in response to the interference signal to be processed being a correct signal (step S208).
In some examples, in step S208, in locating the location information, the locating may begin with the location information that was first added to the second data set. Thus, the time complexity can be reduced. In some examples, if no location information corresponding to the target interference signal is found from the second data set, the target interference signal may be discarded to be used, otherwise, the target interference signal may be deleted from the first data set. Thereby, overflow of the first data set can be prevented. In some examples, after step S208, step S202 may be performed until a target interference signal (not shown) in the first dataset is traversed.
In some examples, the data amount of the target interference signal (e.g., the interference signal to be processed) may be the number of interference peaks in the target interference signal.
In some examples, the preset scale range may be determined by the speed of movement of the reference arm 130 of the interferometer 10. Specifically, the movement speed of the reference arm 130 may be known, the movement distance or movement time of the reference arm 130 has a correspondence relationship with the number of interference peaks (for example, at the known movement speed, the movement of the reference arm 130 by 1 micrometer may correspond to approximately 10 interference peaks), and a preset scale range may be obtained according to the correspondence relationship. For example, assuming that the reference arm 130 moves by 1 micrometer and may correspond to approximately 10 interference peaks (i.e., the ratio of the moving distance to the number of interference peaks may be approximately 10:1), the preset ratio range may be 8 to 12, in which case, if the data amount of the target interference signal is 300 interference peaks, the second data set has position information with a position information length of 30 micrometers, the ratio of the position information corresponds to 10:1, and within the preset ratio range of 8 to 12, the position information may be regarded as the target position information of the target interference signal. In addition, the preset proportional range may be adjusted according to the movement speed of the reference arm 130 of the interferometer 10, and the present disclosure is not particularly limited to a specific value of the preset proportional range.
In some examples, the detection system 20 may also include a measurement module (not shown). The measurement module may measure a parameter of the sample based on the target interference signal and the target position information of the target interference signal. In some examples, the parameters of the sample may include at least one of a length, a thickness, and a refractive index of the sample. Thus, the parameters of the sample can be measured.
For example, for the measurement of the eye axis length, the peak position of one interference peak may be taken from the target interference signal, the position of the adjacent interference peak may be taken, the position distance between two interference peaks may be measured, and the eye axis length may be measured by conversion based on the position distance. For another example, for the detection of the film thickness, the position distance (for example, 30um (micrometers)) of the whole target interference signal can be measured according to experiments, if n (for example, two) or more coating films exist within the position distance, n or more interference peaks will appear in the target interference signal, and the position information of the peak-peak value of the target interference signal will reflect the thickness of the coating film, so that the detection of the film thickness in the micrometer scale can be applied. For another example, when the movement speed of the reference arm 130 that generates interference is constant and the refractive index of the measurement sample is constant, the period of the interference peak that generates interference may be constant, so that the sampling value in the target interference signal may also change at the same period, so that, assuming that the movement speed of the reference arm 130 is known, the refractive index change of the measurement sample may be estimated from the sampling value, and if the refractive index of the measurement sample is known, the movement speed of the reference arm 130 may also be estimated from the sampling value.
As described above, in some examples, the detection system 20 may include a first processing module 210, a second processing module 220, and a third processing module 230. In some examples, data may be transferred between the various processing modules in the detection system 20 (i.e., the first processing module 210, the second processing module 220, and the third processing module 230) by way of threaded communications, process communications (e.g., shared memory, messaging, shared files), storage, or serial ports (e.g., the data may be targeted interference signals, location information, notifications, etc.). In particular with respect to the implementation of the first processing module 210, the second processing module 220 and the third processing module 230.
In some examples, the functions of the first processing module 210, the second processing module 220, and the third processing module 230 may be performed by a processor. In addition, the processor may be a core of a single-chip or multi-core processor. In some examples, the first processing module 210, the second processing module 220, and the third processing module 230 may have different implementations depending on different usage scenarios. The following describes three exemplary implementations, and it should be noted that, without limiting the disclosure, the functions of the first processing module 210, the second processing module 220, and the third processing module 230 of the disclosure may be performed by processors of any relationship.
Fig. 5 is another exemplary block diagram illustrating a system for detecting position information of an interference signal according to an example of the present disclosure.
In some examples, the first processing module 210 and the second processing module 220 may be executed by different processors, respectively. In this case, having a dedicated processor for acquiring the interference signals to ensure that the effective interference signals can be acquired in time, can be suitable for use scenarios where the hardware performance of a single processor is limited (e.g., integrating the first processing module 210 and the second processing module 220 on a measuring instrument). In addition, the functions of the second processing module 220 and the third processing module 230 may be executed by the same processor, or may be executed by different processors. Thereby, the second processing module 220 and the third processing module 230 can be flexibly implemented.
For example, as shown in fig. 5, the functions of the first processing module 210 may be performed by the first processor 21 (i.e., the first processor 21 may implement the functions of the first processing module 210), and the functions of the second processing module 220 and the third processing module 230 may be performed by the second processor 22 (i.e., the second processor 22 may implement the functions of the second processing module 220 and the third processing module 230). Specifically, the first processor 21 may be used to control the analog-to-digital conversion chip to convert an analog signal into a digital signal at a preset acquisition frequency (for example, 10 mhz), and detect the digital signal to pre-determine the start of a valid interference signal and the end of the valid interference signal and to acquire a valid interference signal (i.e., a target interference signal) and notify the second processor 22 to record corresponding position information, the second processor 22 may be used to monitor the position information, and the current position information may be recorded as the first position information or the second position information when the notification of the first processor 21 is received. In addition, the target interference signal and the position information may be processed by the second processor 22 to determine target position information for the target interference signal. In other examples, the target interference signal and the position information may also be processed by a third processor (not shown) different from the first and second processors 21, 22 to determine target position information of the target interference signal.
In some examples, the functions of the first processing module 210, the second processing module 220, and the third processing module 230 may be performed by the same processor. In this case, the functions of the first processing module 210, the second processing module 220, and the third processing module 230 can be simultaneously implemented on a higher-performance processor. Thus, the interference signal can be processed conveniently.
In some examples, the second processing module 220 and the third processing module 230 may be executed by the same processor. In this case, for the operation of monitoring the position information and processing the collected effective interference signals, which is not so real-time and high-speed relative to the collected interference signals, the same processor is adopted, so that the hardware resources can be saved, and the implementation difficulty can be reduced.
A method of detecting position information of an interference signal (hereinafter, simply referred to as a detection method) according to the present disclosure is described below with reference to the accompanying drawings. The detection method according to the present disclosure may be applied to the detection system 20 described above. Unless otherwise indicated, the description of the detection system 20 in relation to the present disclosure applies equally to the detection method in relation to the present disclosure. Fig. 6 is a flowchart illustrating a method of detecting position information of an interference signal according to an example of the present disclosure.
In some examples, as shown in fig. 6, the detection method may include acquiring an interference signal and processing the interference signal to identify a start and end of the interference signal and acquire a target interference signal (step S302).
In some examples, in step S302, the first processing module 210 of the detection system 20 may be utilized to collect interference signals and process the interference signals to identify the beginning and end of the interference signals and to obtain a target interference signal. Additionally, the interference signal may come from interferometer 10. In some examples, the first processing module 210 may identify a start of the interference signal based on the amplitude threshold and fluctuation information of the interference signal. In some examples, the determination condition may be determined from the amplitude threshold and fluctuation information of the interference signal, and when the determination condition is satisfied, the interference signal is determined to start. In some examples, the first processing module 210 may identify an end of the interference signal based on a signal strength of the interference signal. In some examples, the end of the interference signal may be determined when the signal strength of the interference signal decreases to a preset signal strength. In some examples, the first processing module 210 may notify the second processing module 220 to record the first location information after determining that the interference signal begins and continue to collect the interference signal, and may notify the second processing module 220 to record the second location information after determining that the interference signal ends. Specifically, in step S302, the first processing module 210 may be used to collect the interference signal, and the first processing module 210 may notify the second processing module 220 of the detection system 20 to record the first position information in response to the determination condition being satisfied (i.e., determining that the interference signal starts), and continue to collect the interference signal, and notify the second processing module 220 to record the second position information in response to the signal strength of the interference signal decreasing to the preset signal strength (i.e., determining that the interference signal ends), and take the interference signal between the first position information and the second position information as the target interference signal. For details, see the description of the first processing module 210.
In some examples, as shown in fig. 6, the detection method may include transmitting the target interference signal and the position information (step S304).
In some examples, in step S304, the target interference signal may be transmitted by the first processing module 210 to the third processing module 230 of the detection system 20, and the position information may be transmitted by the second processing module 220 to the third processing module 230 (i.e., the first processing module 210 and the second processing module 220 may respectively transmit the target interference signal and the position information to the third processing module 230 of the detection system 20). In addition, the location information may include first location information and second location information. For details, see the description of the first processing module 210 and the second processing module 220.
In some examples, as shown in fig. 6, the detection method may include processing the target interference signal and the position information (step S306).
In some examples, in step S306, the third processing module 230 may receive the target interference signal and the location information and process it. In some examples, the third processing module 230 may receive the target interference signal from the first processing module 210 and join the first data set, and receive the location information from the second processing module 220 and join the second data set. In some examples, the third processing module 230 may determine and as the target location information of the target interference signal in the first data set based on a proportional relationship of the data amount of the target interference signal in the first data set to the location information length corresponding to the location information in the second data set. For details, see the description of the third processing module 230.
In some examples, the detection method may further include measuring a parameter of the sample based on the target interference signal and target position information of the target interference signal (not shown). In some examples, the parameters of the sample may include at least one of a length, a thickness, and a refractive index of the sample. See for details the relevant description of the measurement module.
The detection system 20 and the detection method according to the present disclosure perform double screening on the interference signal by using the amplitude threshold value and the fluctuation information of the interference signal to identify the first position information (i.e., predict the start of the valid interference signal), and identify the second position information (i.e., identify the end of the valid interference signal) based on the signal strength of the interference signal, so that the target interference signal and the position information including the first position information and the second position information can be obtained, and the target position information of the target interference signal can be determined by using the proportional relationship between the data amount of the target interference signal and the length of the position information. Under the condition, the probability of acquiring the interference signal can be effectively reduced, the interference signal can be accurately predicted as soon as possible when the interference signal is small, and then the effective interference signal can be completely and accurately acquired, the target position information corresponding to the effective interference signal can be obtained, and the interference signal has stronger anti-interference capability. Thus, effective interference signals and corresponding position information can be acquired.
While the disclosure has been described in detail in connection with the drawings and embodiments, it should be understood that the foregoing description is not intended to limit the disclosure in any way. Modifications and variations of the present disclosure may be made as desired by those skilled in the art without departing from the true spirit and scope of the disclosure, and such modifications and variations fall within the scope of the disclosure.
Claims (11)
1. A method of detecting positional information of an interference signal, the interference signal being an optical signal generated by a co-operation of a sample arm and a reference arm of an interferometer, the method comprising:
collecting interference signals from the interferometer by using a first processing module of a detection system, informing a second processing module of the detection system to record first position information by the first processing module in response to meeting a judging condition determined by an amplitude threshold value and fluctuation information of the interference signals, continuously collecting the interference signals, informing the second processing module to record second position information by responding to the fact that the signal intensity of the interference signals is reduced to a preset signal intensity, and taking the interference signals between the first position information and the second position information as target interference signals;
The first processing module and the second processing module respectively transmit the target interference signal and the position information comprising the first position information and the second position information to a third processing module of the detection system; and is also provided with
The third processing module receives the target interference signal and adds a first data set, receives the position information and adds a second data set, and determines the position information corresponding to the target interference signal in the first data set and serves as the target position information of the target interference signal based on the proportional relation of the data amount of the target interference signal in the first data set and the position information length corresponding to the position information in the second data set.
2. The method according to claim 1, characterized in that:
and measuring a parameter of a sample based on the target interference signal and target position information of the target interference signal, wherein the parameter of the sample comprises at least one of a length, a thickness and a refractive index of the sample.
3. The method according to claim 1, characterized in that:
the functions of the first processing module, the second processing module and the third processing module are performed by a processor,
The functions of the first processing module and the second processing module are executed by different processors, or the functions of the first processing module, the second processing module and the third processing module are executed by the same processor, or the functions of the second processing module and the third processing module are executed by the same processor.
4. The method according to claim 1, characterized in that:
if the fluctuation information is the fluctuation frequency, the judgment condition is that the amplitude of the interference signal in the preset time is larger than the amplitude threshold, and the fluctuation frequency corresponding to the interference signal in the preset time is located in a target frequency range, wherein the fluctuation frequency is the fluctuation quantity in unit time, and the target frequency range is determined by the actual frequency of the interference signal;
if the fluctuation information is the fluctuation quantity, the judgment condition is that the amplitude of the interference signal in the preset time is larger than the amplitude threshold, and the fluctuation quantity corresponding to the interference signal in the preset time is located in a target quantity range, wherein the target quantity range is determined by the actual frequency of the interference signal.
5. The method according to claim 1, characterized in that:
the signal strength of the interference signal is the sum of the amplitudes within one interference period or the average value of the sum of the amplitudes within at least one interference period.
6. The method of claim 1, wherein, in processing the target interference signal in the first dataset,
acquiring a target interference signal which is added into the first data set first from the first data set as an interference signal to be processed;
checking the interference signal to be processed to confirm whether the interference signal to be processed is a correct signal;
discarding the pending interference signal in response to the pending interference signal being an error signal; and is also provided with
And responding to the interference signal to be processed as a correct signal, searching for position information, which accords with a preset proportion range, of the proportion relation of the data quantity of the interference signal to be processed from the second data set as the target position information, wherein the position information added into the second data set first is searched for when searching for.
7. The method according to claim 6, wherein:
the data amount is the number of interference peaks in the target interference signal, and the preset proportion range is determined by the movement speed of the reference arm of the interferometer.
8. The method according to claim 1, characterized in that:
the type of the position information comprises at least one of a time type and a distance type, the position information of the time type is corresponding to the time of the timer, and the position information of the distance type is corresponding to the distance of the distance measuring tool.
9. The method according to claim 1, characterized in that:
and the first processing module cuts off transmission of the target interference signal to prepare for receiving the new interference signal if the new interference signal meeting the judging condition is detected in the process of transmitting the target interference signal.
10. The method according to claim 1, characterized in that:
the first processing module is provided with an analog-to-digital conversion chip, and the analog-to-digital conversion chip is used for converting an analog signal acquired from the interferometer into a digital signal and taking the digital signal as the interference signal.
11. A system for detecting positional information of an interference signal, wherein the interference signal is an optical signal generated by a co-operation of a sample arm and a reference arm of an interferometer, the system comprising a first processing module, a second processing module, and a third processing module; and is also provided with
The first processing module is used for collecting interference signals from the interferometer, informing the second processing module to record first position information in response to meeting judging conditions determined by an amplitude threshold value and fluctuation information of the interference signals, continuously collecting the interference signals, informing the second processing module to record second position information in response to the fact that the signal strength of the interference signals is reduced to a preset signal strength, taking the interference signals between the first position information and the second position information as target interference signals, and transmitting the target interference signals to the third processing module;
the second processing module is used for recording the first position information and the second position information and transmitting the position information comprising the first position information and the second position information to the third processing module; and
the third processing module is used for receiving the target interference signal and adding a first data set, receiving the position information and adding a second data set, and determining the position information corresponding to the target interference signal in the first data set and serving as the target position information of the target interference signal based on the proportional relation of the data amount of the target interference signal in the first data set and the position information length corresponding to the position information in the second data set.
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