CN114253244A - System and method for automatically identifying alarm level of product manufacturing equipment - Google Patents
System and method for automatically identifying alarm level of product manufacturing equipment Download PDFInfo
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- CN114253244A CN114253244A CN202210050354.1A CN202210050354A CN114253244A CN 114253244 A CN114253244 A CN 114253244A CN 202210050354 A CN202210050354 A CN 202210050354A CN 114253244 A CN114253244 A CN 114253244A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 175
- 238000000034 method Methods 0.000 title claims abstract description 30
- 230000002159 abnormal effect Effects 0.000 claims description 41
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 5
- 238000005468 ion implantation Methods 0.000 claims description 5
- 238000005240 physical vapour deposition Methods 0.000 claims description 5
- 230000000875 corresponding effect Effects 0.000 description 18
- 238000010586 diagram Methods 0.000 description 4
- 230000005856 abnormality Effects 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32252—Scheduling production, machining, job shop
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The invention provides a system and a method for automatically identifying the alarm level of product manufacturing equipment, which receive an event identifier sent by the product manufacturing equipment in real time through an equipment automation system, judge the real-time running state of the product manufacturing equipment and the alarm level corresponding to alarm information according to the event identifier to generate a corresponding alarm identifier and send the corresponding alarm identifier to an alarm management system, wherein the alarm management system is used for receiving the alarm identifier in real time and storing the alarm identifier into a database of the alarm management system; the report system is used for accessing the database at preset time intervals to obtain the alarm identifiers in the database, synchronizing the operating state and the alarm level of the product manufacturing equipment to the billboard system according to the alarm identifiers, and visually checking the operating state and the alarm level of the product manufacturing equipment through the billboard system, so that the operating state of the product manufacturing equipment and the alarm level sent by the product manufacturing equipment are reflected in real time.
Description
Technical Field
The invention relates to the technical field of semiconductor manufacturing, in particular to a system and a method for automatically identifying the alarm level of product manufacturing equipment.
Background
In the prior art, various types of product manufacturing equipment process various alarm information during operation through an alarm management system. However, in the manufacturing process of a product (e.g., a chip), thousands or even tens of thousands of alarms may occur in the product manufacturing equipment, when an Alarm occurs in the product manufacturing equipment, the Alarm management system may identify the Alarm according to the Alarm ID (warning identifier) reported by the product manufacturing equipment, and accordingly, the equipment engineer sets the Alarm type and Alarm level of the current product manufacturing equipment, so as to send a reminder. However, since the types of alarms of the product manufacturing equipment are many, the equipment engineer cannot make a correct classification and set a corresponding action for each specific alarm. Meanwhile, the Alarm ID (warning identifier) reported by the product manufacturing device cannot completely and intuitively feed back the current operating state of the product manufacturing device, so that the Alarm level cannot be accurately identified even if the real-time operating state of the product manufacturing device cannot be found in time only according to the Alarm ID reported by the product manufacturing device, and the Alarm level cannot quickly respond to the abnormal condition of the product manufacturing device.
Disclosure of Invention
The invention aims to provide a system and a method for automatically identifying the alarm level of a product manufacturing device so as to reflect the running state of the product manufacturing device and the alarm level sent by the product manufacturing device in real time.
In order to achieve the above object, the present invention provides a system for automatically identifying an alarm level of a product manufacturing facility, the system for automatically identifying an alarm level of a product manufacturing facility comprising a product manufacturing facility, a facility automation system, an alarm management system, a reporting system, and a billboard system; the product manufacturing equipment is used for sending an event identifier to the equipment automation system in real time when the running state of the product manufacturing equipment is switched, wherein the event identifier comprises the real-time running state and alarm information of the product manufacturing equipment, and the running state of the product manufacturing equipment comprises an abnormal alarm state, an abnormal warning state and a normal running state; the equipment automation system receives the event identifier in real time, judges the real-time running state of the product manufacturing equipment and the alarm level corresponding to the alarm information according to the event identifier, generates a corresponding alarm identifier according to the real-time running state of the product manufacturing equipment and the alarm level, and sends the alarm identifier to an alarm management system in real time; the alarm management system is used for receiving the alarm identifier in real time and storing the alarm identifier in a database of the alarm management system; the report system is used for accessing the database at preset time intervals to obtain the alarm identifiers in the database, and synchronizing the running state and the alarm level of the product manufacturing equipment to the billboard system according to the alarm identifiers.
Optionally, in the system for automatically identifying an alarm level of a product manufacturing apparatus, the alarm management system is further configured to send information including the alarm identifier when an operating state of the product manufacturing apparatus is an abnormal alarm state or an abnormal warning state.
Optionally, in the system for automatically identifying an alarm level of a product manufacturing apparatus, the means for sending the information including the alarm identifier includes sending an email and sending a short message.
Optionally, in the system for automatically identifying an alarm level of a product manufacturing apparatus, the product manufacturing apparatus includes at least one of an ion implantation process apparatus, a chemical vapor deposition apparatus, a physical vapor deposition apparatus, and an etching apparatus.
Optionally, in the system for automatically identifying an alarm level of a product manufacturing apparatus, the preset interval time is 5s to 20 s.
Based on the same inventive concept, the present invention also provides a method for automatically identifying an alarm level of a product manufacturing apparatus, the method for automatically identifying an alarm level of a product manufacturing apparatus comprising: when the operation state of the product manufacturing equipment is switched, an event identifier is sent to an equipment automation system in real time, wherein the event identifier comprises the real-time operation state and alarm information of the product manufacturing equipment, and the operation state of the product manufacturing equipment comprises an abnormal alarm state, an abnormal warning state and a normal operation state;
the equipment automation system receives the event identifier in real time, and judges the real-time running state of the product manufacturing equipment and the alarm level corresponding to the alarm information according to the event identifier so as to generate a corresponding alarm identifier according to the real-time running state and the alarm level of the product manufacturing equipment; storing the alert identifier in a database of an alert management system; and accessing the database at predetermined intervals to obtain the alarm identifiers in the database, and synchronizing the operating state and the alarm level of the product manufacturing equipment to a billboard system according to the alarm identifiers.
Optionally, in the method for automatically identifying an alarm level of a product manufacturing apparatus, when the operation state of the product manufacturing apparatus is an abnormal alarm state or an abnormal warning state, the method further includes sending information including the alarm identifier.
Optionally, in the method for automatically identifying an alarm level of a product manufacturing apparatus, the sending information including the alarm identifier includes: e-mail sending and short message sending.
Optionally, in the method for automatically identifying the alarm level of the product manufacturing apparatus, the product manufacturing apparatus includes at least one of an ion implantation process apparatus, a chemical vapor deposition apparatus, a physical vapor deposition apparatus, and an etching apparatus.
Optionally, in the method for automatically identifying the alarm level of the product manufacturing apparatus, the preset interval time is 5s to 20 s.
In the system and the method for automatically identifying the alarm level of the product manufacturing equipment, the system for automatically identifying the alarm level of the product manufacturing equipment comprises the product manufacturing equipment, the product manufacturing equipment is used for sending an event identifier to the equipment automation system in real time when the operation state of the product manufacturing equipment is switched, the event identifier comprises the real-time operation state and the alarm information of the product manufacturing equipment, wherein the operation state of the product manufacturing equipment comprises an abnormal alarm state, an abnormal warning state and a normal operation state; the equipment automation system receives the event identifier in real time, judges the real-time running state of the product manufacturing equipment and the alarm level corresponding to the alarm information according to the event identifier, generates a corresponding alarm identifier according to the real-time running state and the alarm level of the product manufacturing equipment, and sends the alarm identifier to the alarm management system in real time; the alarm management system is used for receiving the alarm identifier in real time and storing the alarm identifier in a database of the alarm management system; and the report system is used for accessing the database at preset time intervals to obtain the alarm identifiers in the database, synchronizing the operation state and the alarm level of the product manufacturing equipment to the billboard system according to the alarm identifiers, and displaying the operation state and the alarm level of the product manufacturing equipment by the billboard system.
Drawings
FIG. 1 is a block diagram of a system for automatically identifying product manufacturing device alarm levels in accordance with an embodiment of the present invention.
FIG. 2 is a flow diagram of a method for automatically identifying an alarm level for a product manufacturing device in accordance with an embodiment of the present invention.
Wherein the reference numerals are as follows: 101-a device automation system; 102-an alarm management system; 1021-a database; 103-reporting system; 104-kanban system.
Detailed Description
The system and method for automatically identifying an alarm level of a product manufacturing facility according to the present invention will be described in further detail with reference to the accompanying drawings and embodiments. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
FIG. 1 is a block diagram of a system for automatically identifying product manufacturing device alarm levels in accordance with an embodiment of the present invention. The present embodiment provides a System for automatically recognizing an Alarm level of a product manufacturing apparatus, as shown in fig. 1, the System includes a product manufacturing apparatus, an apparatus Automation System 101 (EAP), an Alarm Management System (AMS) 102, a Report System 103, and a panel System (FAB Machine Board) 104.
Specifically, as shown in fig. 1, the product manufacturing equipment (not shown) is configured to send an event identifier to the equipment automation system 101 in real time when an operation state of the product manufacturing equipment is switched, where the event identifier includes a real-time operation state of the product manufacturing equipment and alarm information, and the operation state of the product manufacturing equipment includes an abnormal alarm state, an abnormal warning state, and a normal operation state.
The equipment automation system is configured to receive the event identifier in real time, determine a real-time operating state of the product manufacturing equipment and the Alarm level corresponding to the Alarm information according to the event identifier, generate a corresponding Alarm identifier (Alarm ID) according to the real-time operating state of the product manufacturing equipment and the Alarm level, and send the Alarm identifier to the Alarm management system 102 in real time; the alarm management system 102 is configured to receive the alarm identifier in real time and store the alarm identifier in its own database 1021; and the reporting system 103 is configured to access the database 1021 every predetermined time to obtain the alarm identifier in the database 1021, and synchronize the operation state and the alarm level of the product manufacturing equipment to the billboard system 104 according to the alarm identifier, where the billboard system is configured to display the operation state and the alarm level of the product manufacturing equipment, so that the operation state and the alarm level of the product manufacturing equipment can be visually checked through the billboard system 104, and the operation state of the product manufacturing equipment and the alarm level sent by the product manufacturing equipment are reflected in real time.
In this embodiment, the abnormal alarm state is a fault occurring in the product manufacturing apparatus, which may cause a shutdown or damage to the product. The abnormal warning state is that the product manufacturing equipment has a fault but does not affect the operation.
Specifically, when the operating state of the product manufacturing apparatus is the abnormal alarm state or the abnormal warning state, the alarm lamp gives an alarm and the alarm level is indicated by changing the signal of the alarm lamp, for example, the alarm lamp is a red lamp to indicate the abnormal alarm state, the alarm lamp is a yellow lamp to indicate the abnormal warning state, and the alarm lamp is a green lamp to indicate the normal operating state.
Further, when the operation state of the product manufacturing apparatus is switched, for example, from the normal operation state to the abnormal alarm state, or from the abnormal alarm state to the abnormal alarm state, the product manufacturing apparatus sends an Event identifier (Event ID) to the apparatus automation system 101 in real time, where the Event identifier includes the real-time operation state of the product manufacturing apparatus and alarm information, and the apparatus automation system 101 receives the Event identifier in real time and determines the real-time operation state of the product manufacturing apparatus and the alarm level corresponding to the alarm information according to the Event identifier. The alarm information recognized by the equipment is converted into the alarm identifier, and the definition of the alarm identifier is not carried out by artificial subjective factors, so that the alarm identifier converted from the alarm information is accurate.
The event identifier includes an operation state of the product manufacturing apparatus and an alarm level, i.e., the name of the event identifier may be combined according to the operation state of the product manufacturing apparatus and alarm information. Further, the event identifier may also include a number of the product manufacturing apparatus, etc. to facilitate identification, thereby timely resolving an abnormality of the product manufacturing apparatus.
In this embodiment, the equipment automation system 101 is configured to receive the event identifier in real time, and determine the real-time operating status of the product manufacturing equipment and the alarm level corresponding to the alarm information according to the event identifier; and the equipment automation system 101 generates a corresponding Alarm identifier according to the real-time operation state and Alarm level of the product manufacturing equipment, and transmits the Alarm identifier (Alarm ID) to the Alarm management system 102 in real time. Wherein the alarm identifier is an identifier that the alarm management system 102 can recognize.
In this embodiment, the alarm management system 102 is configured to receive the alarm identifier in real time and store the alarm identifier in its own database 1021(Data Base). Further, the alarm management system 102 is further configured to send information including the alarm identifier when the operation state of the product manufacturing apparatus is an abnormal alarm state or an abnormal warning state. The means for transmitting the information including the alarm identifier includes mail transmission and short message transmission, so that timely notification can be made to timely solve the abnormality of the product manufacturing apparatus.
In this embodiment, the reporting system 103 is configured to access the database 1021 at predetermined time intervals to obtain the alarm identifier in the database 1021, and synchronize the operation state and the alarm level of the product manufacturing apparatus to the billboard system 104 according to the alarm identifier, where the billboard system 104 is configured to display the operation state and the alarm level of the product manufacturing apparatus, and may directly display the operation state and the alarm level of the product manufacturing apparatus. In this way, the operation status and the alarm level of the product manufacturing equipment can be visually checked through the billboard system 104, so as to reflect the operation status and the alarm level of the product manufacturing equipment in real time. In this embodiment, the preset interval time for the reporting system 103 to access the data is 5s to 20s, for example, 5s, 10s, or 15s, and thus the operating state and the alarm level of the product manufacturing equipment can be known in time.
In this embodiment, the product manufacturing apparatus includes at least one of an ion implantation process apparatus, a chemical vapor deposition apparatus, a physical vapor deposition apparatus, and an etching apparatus (e.g., a dry etching apparatus and a wet etching apparatus).
FIG. 2 is a flow diagram of a method for automatically identifying an alarm level for a product manufacturing device in accordance with an embodiment of the present invention. As shown in fig. 2, based on the same inventive concept, the present invention also provides a method for automatically identifying an alarm level of a product manufacturing apparatus, the method for automatically identifying an alarm level of a product manufacturing apparatus comprising:
step S1: when the operation state of the product manufacturing equipment is switched, an event identifier is sent to an equipment automation system in real time, wherein the event identifier comprises the real-time operation state and alarm information of the product manufacturing equipment, and the operation state of the product manufacturing equipment comprises an abnormal alarm state, an abnormal warning state and a normal operation state;
step S2: the equipment automation system receives the event identifier in real time, and judges the real-time running state of the product manufacturing equipment and the alarm level corresponding to the alarm information according to the event identifier so as to generate a corresponding alarm identifier according to the real-time running state and the alarm level of the product manufacturing equipment;
step S3: storing the alert identifier in a database of an alert management system; and the number of the first and second groups,
step S4: and accessing the database at preset time intervals to obtain the alarm identifier in the database, and synchronizing the operating state and the alarm level of the product manufacturing equipment to a billboard system according to the alarm identifier, wherein the billboard system is used for displaying the operating state and the alarm level of the product manufacturing equipment.
The above steps will be described in more detail below.
In step S1, when the operation state of the product manufacturing equipment is switched, sending an event identifier to the equipment automation system in real time, wherein the event identifier includes the real-time operation state of the product manufacturing equipment and the alarm information, and the operation state of the product manufacturing equipment includes an abnormal alarm state, an abnormal warning state and a normal operation state; wherein the abnormal alarm state is a failure that a product manufacturing apparatus is shut down or a product is damaged. The abnormal warning state is that the product manufacturing equipment has a fault but does not affect the operation.
In step S2, the equipment automation system receives the event identifier in real time, and determines the real-time operating status of the product manufacturing equipment and the alarm level corresponding to the alarm information according to the event identifier, so as to generate a corresponding alarm identifier according to the real-time operating status and the alarm level of the product manufacturing equipment.
In step S3, the alarm identifier is stored in the database of the alarm management system, so that the subsequent reporting system can obtain the operation status and the alarm level of the product manufacturing equipment in real time through the database. In this embodiment, the alarm identifier may be received in real time by the alarm management system and stored in a database (Data Base).
Further, when the operation state of the product manufacturing apparatus is an abnormal alarm state or an abnormal warning state, information including the alarm identifier is transmitted. The means for transmitting the information including the alarm identifier includes mail transmission and short message transmission, so that timely notification can be made to timely solve the abnormality of the product manufacturing apparatus.
In step S4, the database is accessed at predetermined intervals to obtain the alarm identifiers in the database, and the operation status and the alarm level of the product manufacturing equipment are synchronized to a billboard system according to the alarm identifiers, wherein the billboard system is used for displaying the operation status and the alarm level of the product manufacturing equipment. The billboard system may directly display the operational status and alarm level of the product manufacturing facility. Therefore, the operating state and the alarm level of the product manufacturing equipment can be visually checked through the billboard system, so that the operating state of the product manufacturing equipment and the alarm level sent by the product manufacturing equipment can be reflected in real time. In this embodiment, the preset interval time for the reporting system to access the data is 5s to 20s, for example, 5s, 10s, or 15s, and by such setting, the operating state and the alarm level of the product manufacturing equipment can be known in time, so that the working efficiency is improved.
In summary, in the system and the method for automatically identifying an alarm level of a product manufacturing device according to the present invention, the system for automatically identifying an alarm level of a product manufacturing device includes a product manufacturing device, the product manufacturing device is configured to send an event identifier to the device automation system in real time when an operation state of the product manufacturing device is switched, the event identifier includes an operation state of the product manufacturing device in real time and alarm information, wherein the operation state of the product manufacturing device includes an abnormal alarm state, and a normal operation state; the equipment automation system receives the event identifier in real time, judges the real-time running state of the product manufacturing equipment and the alarm level corresponding to the alarm information according to the event identifier, generates a corresponding alarm identifier according to the real-time running state of the product manufacturing equipment and the alarm level, and sends the alarm identifier to an alarm management system in real time, wherein the alarm management system is used for receiving the alarm identifier in real time and storing the alarm identifier into a database of the alarm management system; and the report system is used for accessing the database at preset time intervals to obtain the alarm identifiers in the database, synchronizing the operation state and the alarm level of the product manufacturing equipment to the billboard system according to the alarm identifiers, and displaying the operation state and the alarm level of the product manufacturing equipment by the billboard system.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.
Claims (10)
1. A system for automatically identifying an alarm level of a product manufacturing facility, the system for automatically identifying an alarm level of a product manufacturing facility comprising a product manufacturing facility, a facility automation system, an alarm management system, a reporting system, and a billboard system;
the product manufacturing equipment is used for sending an event identifier to the equipment automation system in real time when the running state of the product manufacturing equipment is switched, wherein the event identifier comprises the real-time running state and alarm information of the product manufacturing equipment, and the running state of the product manufacturing equipment comprises an abnormal alarm state, an abnormal warning state and a normal running state;
the equipment automation system is used for receiving the event identifier in real time, judging the real-time running state of the product manufacturing equipment and the alarm level corresponding to the alarm information according to the event identifier, generating a corresponding alarm identifier according to the real-time running state of the product manufacturing equipment and the alarm level, and sending the alarm identifier to an alarm management system in real time;
the alarm management system is used for receiving the alarm identifier in real time and storing the alarm identifier in a database of the alarm management system;
the report system is used for accessing the database at preset time intervals to obtain the alarm identifiers in the database, synchronizing the running state and the alarm level of the product manufacturing equipment to the billboard system according to the alarm identifiers, and the billboard system is used for displaying the running state and the alarm level of the product manufacturing equipment.
2. The system for automatically identifying an alarm level for a product manufacturing device of claim 1, wherein the alarm management system is further configured to send information including the alarm identifier when the operational state of the product manufacturing device is an abnormal alarm state or an abnormal warning state.
3. The system for automatically identifying a product manufacturing device alert level of claim 2 wherein the means for transmitting the information including the alert identifier includes mail transmission and text messaging.
4. The system for automatically identifying a product manufacturing facility alarm level of any of claims 1-3, wherein the product manufacturing facility comprises at least one of an ion implantation process facility, a chemical vapor deposition facility, a physical vapor deposition facility, and an etching facility.
5. The system for automatically identifying an alert level for a product manufacturing device according to claim 1 wherein said predetermined interval is between 5s and 20 s.
6. A method for automatically identifying an alarm level of a product manufacturing device, the method comprising:
when the operation state of the product manufacturing equipment is switched, an event identifier is sent to an equipment automation system in real time, wherein the event identifier comprises the real-time operation state and alarm information of the product manufacturing equipment, and the operation state of the product manufacturing equipment comprises an abnormal alarm state, an abnormal warning state and a normal operation state;
the equipment automation system receives the event identifier in real time, and judges the real-time running state of the product manufacturing equipment and the alarm level corresponding to the alarm information according to the event identifier so as to generate a corresponding alarm identifier according to the real-time running state and the alarm level of the product manufacturing equipment;
storing the alert identifier in a database of an alert management system; and the number of the first and second groups,
and accessing the database at preset time intervals to obtain the alarm identifier in the database, and synchronizing the operating state and the alarm level of the product manufacturing equipment to a billboard system according to the alarm identifier, wherein the billboard system is used for displaying the operating state and the alarm level of the product manufacturing equipment.
7. The method of automatically identifying an alarm level for a product manufacturing device of claim 6, further comprising sending information including the alarm identifier when the operational state of the product manufacturing device is an abnormal alarm state or an abnormal warning state.
8. The method for automatically identifying a product manufacturing device alert level of claim 7 wherein the means for sending the information including the alert identifier includes mail sending and text messaging.
9. The method of automatically identifying a product manufacturing facility alarm level of any of claims 6 to 8, wherein the product manufacturing facility comprises at least one of an ion implantation process facility, a chemical vapor deposition facility, a physical vapor deposition facility, and an etching facility.
10. The system for automatically identifying an alert level for a product manufacturing device according to claim 6 wherein said predetermined interval is between 5s and 20 s.
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