CN114205929B - Infrared optical system for heating suspended nanoparticles - Google Patents
Infrared optical system for heating suspended nanoparticles Download PDFInfo
- Publication number
- CN114205929B CN114205929B CN202210137958.XA CN202210137958A CN114205929B CN 114205929 B CN114205929 B CN 114205929B CN 202210137958 A CN202210137958 A CN 202210137958A CN 114205929 B CN114205929 B CN 114205929B
- Authority
- CN
- China
- Prior art keywords
- infrared
- lens
- aspheric
- reflector
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses an infrared optical system for heating suspended nanoparticles, which comprises a laser, a first reflector, a second reflector, a third reflector, a fourth reflector, a first infrared optical window, a vacuum cavity, a capture objective, a first aspheric infrared lens, nanoparticles, a second aspheric infrared lens, a second infrared optical window and an optical garbage can, wherein the first reflector is arranged on the first reflector; collimated far infrared light emitted by the laser enters the laser beam expanding system along the optical axis direction, is expanded and collimated by the laser beam expanding system, is reflected, transmits through the first infrared optical window, enters the vacuum cavity, and is focused by the first aspheric infrared lens; the suspended nanoparticles are bound by the trapping beam at the focus position of the trapping objective lens. The invention can realize in-situ thermal desorption of suspended nanoparticles, eliminate impurities on the surfaces and in the particles, improve the high-vacuum suspension resistance probability of the nanoparticles, and avoid the problems of difficult dispersion of particle sintering, particle structure damage and the like caused by other heating means.
Description
Technical Field
The invention relates to an infrared optical system for heating suspended nanoparticles, which is mainly used for heating the suspended nanoparticles in a vacuum environment.
Background
Machinery in vacuum optical tweezers systemThe oscillator can obtain a state almost completely isolated from the external environment, has ultrahigh-sensitivity detection capability, and is an ideal platform for precision measurement and basic physical research. The suspended particles are used as mechanical vibrators in the vacuum optical tweezers, and the stability of the suspended particles has important significance and decisive influence on realizing high-sensitivity detection of the vacuum optical tweezers. With the increase of the vacuum degree, the particle scattering is reduced, the temperature is increased, impurities on the surface or in the particles are released, the movement is intensified, the capture range of the optical trap is exceeded, and finally the particles are lost. The silicon dioxide particle sample widely used in the vacuum optical tweezers technology is prepared in the mixed environment of alcohol-water-ammonia water, and the grown particles can be inevitably introduced into-OH, H in the environment 2 O, etc., these impurities to S i O 2 Stability under vacuum conditions can be adversely affected. The stability of the microparticles can be improved to some extent by heating the microparticles to remove water in the interior of the particles and silanol groups carried by pores in the surface area.
At present, particle impurities can be eliminated to a certain degree by methods such as batch calcination of particle samples in a non-suspension state, but the influence of impurities may be introduced again in the process of supporting particles, and the most direct and effective method is to carry out in-situ treatment on target particles in a suspension state. The publication reports a method for micron scale particle heating using CO at a wavelength of 10.6um 2 The laser device directly irradiates infrared beams to micron-sized suspended particles, and is mainly used for experimental determination of heating the suspended particles and observing escape power density of the particles under different air pressure states.
Literature reports of using 10.6um CO 2 The laser irradiates a light beam emitted by the laser directly onto a 15 um-diameter small ball, and the escape power density of the suspended particles with the diameter of 15um is less than 50mW/mm under the air pressure of 10mbar according to experimental results 2 。
With the increase of the vacuum degree, the particle effective capture area shrinks. Air molecules are further reduced, impurities on the surface or in the particles are released, the movement is accelerated and exceeds the capture range of the optical trap, and the particles are caused to escape. The size of the nanoparticles is two to three smaller than that of the microparticlesOrders of magnitude, smaller diameters are more difficult to heat than larger heat dissipating surface areas. It is estimated that the heating temperature of the particles should be 400 degrees centigrade, and in order to make the nanoparticles (e.g., 200nm in diameter) reach the above temperature, the illumination intensity of the laser (9 um) irradiated onto the surface of the particles should be not less than 10000W/mm 2 . The laser radiation illumination can only reach 7.7W/mm even if the infrared laser with higher 35W optical power on the market is adopted 2 Much less than the required laser radiation illumination. In order to increase the laser radiation illuminance on the surface of the fine particle under a constant laser power, it is necessary to reduce the laser spot size to increase the radiation illuminance. The infrared beam focused by the traditional spherical lens with high infrared transmittance can cause the problems of overlarge focusing light spot, non-concentrated energy and the like due to spherical aberration, and the problem of concentrated energy existing in the process of focusing the infrared laser by the spherical lens can be solved by the pure spherical lens with high infrared transmittance.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides an infrared optical system for heating suspended nanoparticles, which can accurately heat target nanoparticles in a vacuum suspension state and realize in-situ temperature regulation of the nanoparticles; eliminate the surface and internal impurities of the particles, improve the high vacuum suspension resistant probability of the particles and realize stable high vacuum suspension.
The technical scheme for realizing the purpose of the invention is as follows:
an infrared optical system for heating suspended nanoparticles comprises a laser, a first reflector, a second reflector, a third reflector, a fourth reflector, a first infrared optical window, a vacuum cavity, a capture objective lens, a first aspheric infrared lens, nanoparticles, a second aspheric infrared lens, a second infrared optical window and an optical garbage can; collimated far infrared light emitted by the laser is reflected by the first reflecting mirror and the second reflecting mirror along the optical axis direction to enter the laser beam expanding system, is expanded and collimated by the laser beam expanding system, is reflected by the third reflecting mirror and the fourth reflecting mirror, is transmitted through the first infrared optical window to enter the vacuum cavity, and is focused by the first aspheric infrared lens; the suspended nanoparticles are constrained at the focal position of the capture objective lens by a capture light beam focused by the capture objective lens, and the focal point of the first aspheric infrared lens is superposed with the focal point of the capture objective lens; the infrared light is focused and irradiated on the suspended nanoparticles, the focused infrared light starts to diverge again after being focused, the divergent light is collimated by the second aspheric infrared lens, and the collimated light is emitted out of the vacuum cavity after passing through the second infrared optical window and enters the optical garbage can.
The first reflector and the second reflector form 90 degrees in opposite directions, and the surfaces of the first reflector and the second reflector are both plated with high-reflection films meeting the infrared laser damage threshold of continuous waves of not less than 300W/cm and used for adjusting the infrared light beams to be collimated and incident to the laser beam expanding system.
The third reflector and the fourth reflector form a 90-degree angle in opposite directions, and high-reflection films meeting the infrared laser damage threshold value of continuous waves of not less than 300W/cm are plated on the surfaces of the third reflector and the fourth reflector and used for adjusting the position of an infrared focusing light spot to enable the infrared focusing light spot to coincide with the focus of the capture objective.
The first aspheric surface infrared lens is used for focusing infrared light into light spot radiation illuminance which is more than or equal to 10000W/mm 2 。
The second aspheric infrared lens is used for directly guiding infrared light which does not pass through the nano particles out of the vacuum cavity and absorbing the infrared light by the optical garbage can so as to prevent the infrared light from scattering in the cavity; the first aspheric infrared lens and the second aspheric infrared lens are the same aspheric lens, and the focuses of the first aspheric infrared lens, the second aspheric infrared lens and the capture objective lens are coincided.
The front surface of the aspheric lens is aspheric, and the back surface of the aspheric lens is spherical or plane.
The aspheric lens is made of a material with high transmittance in a long-wave infrared band, antireflection films are plated on the front surface and the rear surface, and the surface shape of the aspheric lens meets the following formula
Wherein z is the rise of the vector,Yis a radial distance perpendicular to the optical axis,Rin order to be the radius of curvature,kis a constant of the quadratic curve,A 4 、A 6 、A n is a polynomial coefficient.
The laser beam expanding system is used for expanding the diameter of a light spot of incident light and collimating the incident light, the laser beam expanding system consists of a plano-concave negative lens and a plano-convex positive lens group, the concave surface and the convex surface of the laser beam expanding system are spherical surfaces, materials with high transmittance in a long-wave infrared band are selected, antireflection films are plated on the front surface and the rear surface of the laser beam expanding system, the laser beam sequentially penetrates through the plane of the concave surface of the plano-concave negative lens and the plane and the convex surface of the plano-convex positive lens, and the object space focus of the plano-convex positive lens is superposed with the image space focus of the plano-concave negative lens; the beam expansion factor depends on the ratio of the diameter of an incident beam required by the first aspheric infrared lens to the diameter of a light spot emitted by the laser.
The invention has the beneficial effects that:
compared with the prior art, the method can realize in-situ online particle thermal desorption of the suspended nanoparticles in a capture state in a closed environment, eliminate impurities on the surface and in the particles, improve the high-vacuum-resistant suspension probability of the nanoparticles, realize stable high-vacuum suspension, and avoid the problems of difficult particle sintering scattering, particle structure damage and the like caused by other heating means (such as a calcination heating method). At the same time, burns or influences on the cavity or other components in the cavity are reduced as much as possible.
Drawings
FIG. 1 is a schematic diagram of an in-situ heated infrared optical system.
FIG. 2 shows the light absorption coefficient of silica at a wavelength of 12 μm or less.
In fig. 1, a laser 1, a first reflector 2, a second reflector 3, a plano-concave negative lens 4, a plano-convex positive lens 5, a third reflector 6, a fourth reflector 7, a first infrared optical window 8, a window glass 9, a vacuum chamber 10, a capture objective 11, a first aspheric infrared lens 12, nanoparticles 13, a second aspheric infrared lens 14, a second infrared optical window 15, and an optical trash can 16.
Detailed Description
The invention is further illustrated with reference to the following figures and examples.
As shown in fig. 1, an infrared optical system for heating suspended nanoparticles includes a laser 1, a first reflector 2, a second reflector 3, a plano-concave negative lens 4, a plano-convex positive lens 5, a third reflector 6, a fourth reflector 7, a first infrared optical window 8, a vacuum chamber 10, a capture objective 11, a first aspheric infrared lens 12, nanoparticles 13, a second aspheric infrared lens 14, a second infrared optical window 15, and an optical trash can 16; collimated far infrared light emitted by a laser 1 is reflected by a first reflector 2 and a second reflector 3 along the optical axis direction to enter a laser beam expanding system, is expanded and collimated by the laser beam expanding system, is reflected by a third reflector 6 and a fourth reflector 7, is transmitted through a first infrared optical window 8 to enter a vacuum cavity 10, and is focused by a first aspheric infrared lens 12; the suspended nanometer particles 13 are constrained at the focus position of the capture objective lens 11 by the capture light beam focused by the capture objective lens 11, and the focus of the first aspheric infrared lens 12 is coincident with the focus of the capture objective lens; the infrared light is focused and irradiated on the suspended nanoparticles 13, the focused infrared light starts to diverge again after being focused, the divergent light is collimated by the second aspheric surface infrared lens 14, and the collimated light is emitted out of the vacuum cavity after passing through the second infrared optical window 15 and enters the optical garbage can 16. The infrared optical system can realize in-situ on-line heating of suspended nanoparticles in vacuum or atmospheric environment. The laser 1 is a far infrared laser capable of emitting 9.3um wavelength, the suspended nanoparticles have higher heat absorption effect under the 9.3um wavelength, and the power change of the laser can influence the selection of the parameters of the optical elements in the infrared optical system.
The first reflector 2 and the second reflector 3 in the infrared optical system are opposite to each other to form 90 degrees, and the surfaces of the first reflector 2 and the second reflector 3 are both plated with high-reflection films meeting the infrared laser damage threshold value of continuous waves of not less than 300W/cm and used for adjusting the collimation incidence of infrared beams to the laser beam expanding system. The first reflector 2 and the second reflector 3 are respectively fixed on the two three-dimensional adjusting frames, and light beams can accurately pass through the centers of the plano-concave negative lens 4 and the plano-convex positive lens 5 through adjustment of the three-dimensional adjusting frames, so that off-axis and inclination errors are reduced.
The third reflector 6 and the fourth reflector 7 in the infrared optical system are opposite to each other to form 90 degrees, the surfaces of the third reflector 6 and the fourth reflector 7 are respectively plated with a high-reflection film meeting the infrared laser damage threshold value of continuous waves not less than 300W/cm, the third reflector 6 and the fourth reflector 7 are respectively fixed on two three-dimensional adjusting frames, the light beams can accurately pass through the first aspheric infrared lens 12 through the adjustment of the three-dimensional adjusting frames, and the influence of off-axis or inclination-caused aberration on focusing light spots is reduced. The position of the infrared focusing light spot can be coincided with the focus of the capture objective lens 11 by adjusting the third reflector 6 and the fourth reflector 7.
The first aspheric surface infrared lens 12 in the infrared optical system is used for focusing infrared light into light spot radiation illuminance which is more than or equal to 10000W/mm 2 . The large relative surface area of the nanoparticles dissipates heat quickly, and the suspended nanoparticles can be heated only when the radiation illumination is higher than the threshold value.
The second aspheric infrared lens 14 in the infrared optical system is used for directly guiding the infrared light which does not pass through the nanoparticles 13 out of the vacuum cavity 10 and is absorbed by the optical garbage can 16 to avoid the infrared light from scattering in the cavity; the second aspheric infrared lens 14 can effectively collect most of the infrared laser light which does not pass through the aerosol and the forward-scattered infrared laser light which is partially scattered by the aerosol, so as to prevent the forward-scattered infrared laser light from scattering and reflecting in the vacuum cavity 10 to damage optical mechanical components. The optical trash can is made of metal and can absorb and dissipate infrared laser through blackening treatment.
The first aspheric infrared lens 12 and the second aspheric infrared lens 14 are the same aspheric lens, and the focuses of the first aspheric infrared lens 12, the second aspheric infrared lens 14 and the capture objective lens 11 are coincident. The superposition of the three focuses can ensure that the suspended nanoparticles are positioned at the position with the highest radiation illumination of the infrared focusing light spots, thereby being beneficial to heating the particles. The first aspheric infrared lens 12 and the second aspheric infrared lens 14 are the same aspheric lens, so that the system has symmetry, which can reduce the cost of optical processing or mechanical processing. The front surface of the aspherical lens in the infrared optical system is aspherical and the rear surface is spherical or plane. The aspheric lens is made of a material with high transmittance in a long-wave infrared band, antireflection films are plated on the front surface and the rear surface, and the surface shape of the aspheric lens meets the following formula
Wherein z is the height of the vector and z is the vector height,Yis a radial distance perpendicular to the optical axis,Rin order to be the radius of curvature,kis a constant of the quadratic curve,A 4 、A 6 、A n is a polynomial coefficient. Compared with a common spherical infrared lens, the aspheric infrared lens can solve the problem of spherical aberration caused by overlarge diameter of an incident laser beam, and compared with the spherical infrared lens, the aspheric infrared lens can realize smaller focusing light spots and improve the radiation illumination of the infrared light spots.
The laser beam expanding system in the infrared optical system is used for expanding the diameter of a light spot of incident light and collimating the incident light, the laser beam expanding system consists of a plano-concave negative lens 4 and a plano-convex positive lens 5 lens group, the concave surface and the convex surface are spherical surfaces, materials are selected from materials with high transmittance in a long-wave infrared band, antireflection films are plated on the front surface and the rear surface of the laser beam expanding system, the laser beam sequentially penetrates through the concave surface plane of the plano-concave negative lens 4 and the plane and the convex surface of the plano-convex positive lens 5, and the object space focus of the plano-convex positive lens 5 is superposed with the image space focus of the plano-concave negative lens 4; the beam expansion factor depends on the ratio of the diameter of the incident beam required by the first aspheric infrared lens 12 to the diameter of the spot emitted by the laser 1. The surfaces of the plano-concave negative lens 4 and the plano-convex positive lens 5 are both plated with anti-reflection films with high transmittance to 9.3um, and the material substrates are infrared materials such as zinc selenide or germanium with high transmittance to 9.3 um. The infrared beam expanding system is composed of the plano-concave negative lens 4 and the plano-convex positive lens 5, so that the length of the beam expanding system can be effectively reduced, and a focusing point in the middle of the system is avoided. In addition, after passing through the infrared beam expanding system, the diameter of the light spot of the far infrared laser is increased, so that the smaller infrared focusing light spot can be realized, and the radiation illumination of the infrared light spot is improved.
Example 1
The present embodiment adopts a far infrared continuous light laser with power of 35W and light waist diameter of 2.4 mm.
As shown in fig. 1, collimated far-infrared light emitted by a laser 1 is reflected by two first reflectors 2 and two second reflectors 3 which face each other to form a 90-degree angle along an optical axis direction to enter a laser beam expanding system, and laser beams are expanded and collimated by a beam expanding system composed of a plano-concave negative lens 4 and a plano-convex positive lens 5, then are reflected by two third reflectors 6 and four reflectors 7 which face each other to form a 90-degree angle, and are transmitted through a first infrared optical window 8 to enter a vacuum chamber 10, and then are focused by a first aspheric infrared lens 12. 1064nm capture light passes through the window glass 9 from the outside of the vacuum chamber and enters the vacuum chamber 10, the capture objective 11 focuses 1064nm laser, the suspended nanoparticles 13 are bound at the focal position of the capture objective 11 by the 1064nm capture light beam, the optical axis of the capture optical path is perpendicular to the optical axis of the infrared heating optical path, and the focal point of the first aspheric infrared lens 12, the focal point of the capture objective 11 and the focal point of the second aspheric infrared lens 14 coincide. The infrared light is focused to irradiate the suspended nanoparticles 13, and the focused infrared light starts to diverge again after being focused. In order to prevent the diffused infrared laser from reflecting and scattering in the vacuum cavity to burn the cavity or other elements, the diffused infrared light is collimated by the second aspheric surface infrared lens 14, and the collimated light passes through the second infrared optical window 15 and then is emitted out of the vacuum cavity 10 to enter the optical garbage can 16.
The suspended nanoparticles of example 1 were silica spheres having a diameter of 200nm, and it was estimated that the illuminance of incident radiation on the surface thereof required 10 4 W/mm 2 . Fig. 2 shows the optical absorption coefficient of silica at a wavelength of 12 μm and below, and it can be seen that silica has strong absorption at a long wavelength, and thus can be heated by irradiation with far infrared light. The absorption rate of glass, optical fiber, high polymer molecular material such as PET/FPT and other materials at about 9um wavelength is obviously higher than that of other wave bands, a 9.3um wavelength laser with 35W power is selected, and the diameter of the light waist is 2.4 mm.
Laser beam expanding systemThe main purpose of the system beam expansion is to increase the aperture of the collimated beam, so that an aspheric head lens with a longer rear working distance can be adopted behind the system under the condition of keeping a certain numerical aperture requirement, and the interference of the aspheric lens and other elements such as a capture objective lens is avoided. The laser beam expanding system consists of a plano-concave negative lens 4 and a plano-convex positive lens 5, the focal length of the plano-concave negative lens 4 is-25.4 mm, the radius of curvature of the spherical surface is-35.6 mm, the substrate material is zinc selenide, and the surface of the lens is plated with an antireflection film. The focal length of the plano-convex positive lens 5 is 149mm, the radius of curvature of the spherical surface is 209mm, and the substrate is zinc selenide. The air gap between the plano-concave negative lens 4 and the plano-convex positive lens 5 is 147.3 mm. The first infrared optical window 8 and the second infrared optical window 15 both adopt zinc selenide as a substrate, and the surfaces thereof are plated with antireflection films. The first aspheric infrared lens 12 and the second aspheric infrared lens 14 are aspheric lenses with a focal length of 40mm, the substrate material is germanium, the aspheric curvature radius is 44.05mm, the conic constant is 0, and the polynomial coefficientA 4 、A 6 Respectively is-1.8001258 x 10 -7 and-9.5903211X 10 -11 . The first aspherical infrared lens 12 is spaced from the focal point of the capture objective lens 11 by a distance of 36.35 mm. The other surfaces of the first aspherical infrared lens 12 and the second aspherical infrared lens 14 are spherical surfaces, and the radius of curvature thereof is 65.6 mm. The infrared optical system can make the focusing light spot reach the diffraction limit, and the radius of the diffraction limit light spot is about 29.37 um. The reflectivity of the reflector and the transmissivity of the lens are both about 97%, and the average radiation illumination intensity of the focus of the first aspheric infrared lens 12 is about 10127W/mm 2 。
Example 2
The present embodiment adopts a far infrared continuous light laser with power of 35W and light waist diameter of 2.4 mm.
As shown in fig. 1, collimated far-infrared light emitted by a laser 1 is reflected by two first reflectors 2 and two second reflectors 3 which face each other to form a 90-degree angle along an optical axis direction to enter a laser beam expanding system, and laser beams are expanded and collimated by a beam expanding system composed of a plano-concave negative lens 4 and a plano-convex positive lens 5, then are reflected by two third reflectors 6 and four reflectors 7 which face each other to form a 90-degree angle, and are transmitted through a first infrared optical window 8 to enter a vacuum chamber 10, and then are focused by a first aspheric infrared lens 12. 1064nm capture light passes through the window glass 9 from the outside of the vacuum chamber and enters the vacuum chamber 10, the capture objective 11 focuses 1064nm laser, the suspended nanoparticles 13 are bound at the focal position of the capture objective 11 by the 1064nm capture light beam, the optical axis of the capture optical path is perpendicular to the optical axis of the infrared heating optical path, and the focal point of the first aspheric infrared lens 12, the focal point of the capture objective 11 and the focal point of the second aspheric infrared lens 14 coincide. The infrared light is focused to irradiate the suspended nanoparticles 13, and the focused infrared light starts to diverge again after being focused. In order to prevent the diffused infrared laser from reflecting and scattering in the vacuum cavity to burn the cavity or other elements, the diffused infrared light is collimated by the second aspheric surface infrared lens 14, and the collimated light passes through the second infrared optical window 15 and then is emitted out of the vacuum cavity 10 to enter the optical garbage can 16.
The laser beam expanding system consists of a plano-concave negative lens 4 and a plano-convex positive lens 5, the focal length of the plano-concave negative lens 4 is-25.4 mm, the radius of curvature of the spherical surface is-35.6 mm, the substrate material is zinc selenide, and the surface of the lens is plated with an antireflection film. The focal length of the plano-convex positive lens 5 is 149mm, the radius of curvature of the spherical surface is 209mm, and the substrate is zinc selenide. The air gap between the plano-concave negative lens 4 and the plano-convex positive lens 5 was 147.3 mm. The first infrared optical window 8 and the second infrared optical window 15 both adopt zinc selenide as a substrate, and the surfaces thereof are plated with antireflection films. The first aspheric infrared lens 12 and the second aspheric infrared lens 14 are aspheric lenses with focal length of 30mm, the substrate material is germanium, the aspheric curvature radius is 29.46mm, the conic constant is 0, and the multiple coefficientA 4 、A 6 Respectively is-3.9735336 x 10 -7 and-6.3265251X 10 -11 . The other surfaces of the first aspherical infrared lens 12 and the second aspherical infrared lens 14 are spherical surfaces, and the radius of curvature thereof is 40 mm. The first aspherical infrared lens 12 is spaced from the focal point of the capture objective lens 11 by a distance of 27 mm. The infrared optical system can bring the focused light spot to the diffraction limit, and the radius of the diffraction limit light spot is about 22.26 um. The reflectivity of the reflector and the transmittance of the lens are both about 97%, and the average radiation illumination of the first aspheric infrared lens 12 at the focal point is about 17630.4W/mm 2 。
Example 3
The present embodiment adopts a far infrared continuous light laser with 21W power and 2.4mm diameter light waist.
As shown in fig. 1, collimated far-infrared light emitted by a laser 1 is reflected by two first reflectors 2 and two second reflectors 3 which face each other to form a 90-degree angle along an optical axis direction to enter a laser beam expanding system, and laser beams are expanded and collimated by a beam expanding system composed of a plano-concave negative lens 4 and a plano-convex positive lens 5, then are reflected by two third reflectors 6 and four reflectors 7 which face each other to form a 90-degree angle, and are transmitted through a first infrared optical window 8 to enter a vacuum chamber 10, and then are focused by a first aspheric infrared lens 12. 1064nm capture light passes through the window glass 9 from the outside of the vacuum chamber and enters the vacuum chamber 10, the capture objective 11 focuses 1064nm laser, the suspended nanoparticles 13 are bound at the focal position of the capture objective 11 by the 1064nm capture light beam, the optical axis of the capture optical path is perpendicular to the optical axis of the infrared heating optical path, and the focal point of the first aspheric infrared lens 12, the focal point of the capture objective 11 and the focal point of the second aspheric infrared lens 14 coincide. The infrared light is focused to irradiate the suspended nanoparticles 13, and the focused infrared light starts to diverge again after being focused. In order to prevent the diffused infrared laser from reflecting and scattering in the vacuum cavity to burn the cavity or other elements, the diffused infrared light is collimated by the second aspheric surface infrared lens 14, and the collimated light passes through the second infrared optical window 15 and then is emitted out of the vacuum cavity 10 to enter the optical garbage can 16.
The laser beam expanding system consists of a plano-concave negative lens 4 and a plano-convex positive lens 5, the focal length of the plano-concave negative lens 4 is-25.4 mm, the radius of curvature of the spherical surface is-35.6 mm, the substrate material is zinc selenide, and the surface of the lens is plated with an antireflection film. The focal length of the plano-convex positive lens 5 is 149mm, the radius of curvature of the spherical surface is 209mm, and the substrate is zinc selenide. The air gap between the plano-concave negative lens 4 and the plano-convex positive lens 5 was 147.3 mm. The first infrared optical window 8 and the second infrared optical window 15 both adopt zinc selenide as a substrate, and the surfaces thereof are plated with antireflection films. The first aspheric infrared lens 12 and the second aspheric infrared lens 14 are aspheric lenses with focal length of 30mm, the substrate material is germanium, the aspheric curvature radius is 29.46mm, the conic constant is 0, and the multiple coefficientA 4 、A 6 Respectively is-3.9735336 x 10 -7 and-6.3265251X 10 -11 . The other surfaces of the first aspherical infrared lens 12 and the second aspherical infrared lens 14 are spherical surfaces, and the radius of curvature thereof is 40 mm. The first aspherical infrared lens 12 is spaced from the focal point of the capture objective lens 11 by a distance of 27 mm. The infrared optical system can bring the focused light spot to the diffraction limit, and the radius of the diffraction limit light spot is about 22.26 um. The reflectivity of the reflector and the transmissivity of the lens are both about 97%, and the average radiation illumination intensity of the first aspheric surface infrared lens 12 at the focal point is about 10578W/mm 2 。
Example 4
The present embodiment adopts a far infrared continuous light laser with power of 35W and light waist diameter of 2.4 mm.
As shown in fig. 1, collimated far-infrared light emitted by a laser 1 is reflected by two first reflectors 2 and two second reflectors 3 which face each other to form a 90-degree angle along an optical axis direction to enter a laser beam expanding system, and laser beams are expanded and collimated by a beam expanding system composed of a plano-concave negative lens 4 and a plano-convex positive lens 5, then are reflected by two third reflectors 6 and four reflectors 7 which face each other to form a 90-degree angle, and are transmitted through a first infrared optical window 8 to enter a vacuum chamber 10, and then are focused by a first aspheric infrared lens 12. 1064nm capture light passes through the window glass 9 from the outside of the vacuum chamber and enters the vacuum chamber 10, the capture objective 11 focuses 1064nm laser, the suspended nanoparticles 13 are bound at the focal position of the capture objective 11 by the 1064nm capture light beam, the optical axis of the capture optical path is perpendicular to the optical axis of the infrared heating optical path, and the focal point of the first aspheric infrared lens 12, the focal point of the capture objective 11 and the focal point of the second aspheric infrared lens 14 coincide. The infrared light is focused to irradiate the suspended nanoparticles 13, and the focused infrared light starts to diverge again after being focused. In order to prevent the diffused infrared laser from reflecting and scattering in the vacuum cavity to burn the cavity or other elements, the diffused infrared light is collimated by the second aspheric surface infrared lens 14, and the collimated light passes through the second infrared optical window 15 and then is emitted out of the vacuum cavity 10 to enter the optical garbage can 16.
The laser beam expanding system consists of a plano-concave negative lens 4 and a plano-convex positive lens 5, wherein the focal length of the plano-concave negative lens 4 is-254mm, the radius of curvature of the spherical surface is-35.6 mm, the substrate material is zinc selenide, and the surface of the lens is plated with an antireflection film. The focal length of the plano-convex positive lens 5 is 200mm, the radius of curvature of the spherical surface is 280.5mm, and the substrate material is zinc selenide. The air gap between the plano-concave negative lens 4 and the plano-convex positive lens 5 is 173.1 mm. The first infrared optical window 8 and the second infrared optical window 15 both adopt zinc selenide as a substrate, and the surfaces thereof are plated with antireflection films. The first aspheric infrared lens 12 and the second aspheric infrared lens 14 are aspheric lenses with a focal length of 40mm, the substrate material is germanium, the aspheric curvature radius is 44.05mm, the conic constant is 0, and the polynomial coefficientA 4 、A 6 Respectively is-1.8001258 x 10 -7 and-9.5903211X 10 -11 . The other surfaces of the first aspherical infrared lens 12 and the second aspherical infrared lens 14 are spherical surfaces, and the radius of curvature thereof is 40 mm. The first aspherical infrared lens 12 is spaced from the focal point of the capture objective lens 11 by a distance of 36.35 mm. The infrared optical system can enable a focusing light spot to reach a diffraction limit, and the radius of the diffraction limit light spot is 24.12 um. The reflectivity of the reflector and the transmittance of the lens are both about 97 percent, and the average radiation illumination of the first aspheric surface infrared lens 12 at the focal point can reach 15016W/mm 2 。
Example 5
The present embodiment adopts a far infrared continuous light laser with power of 35W and light waist diameter of 2.4 mm.
As shown in fig. 1, collimated far-infrared light emitted by a laser 1 is reflected by two first reflectors 2 and two second reflectors 3 which face each other to form a 90-degree angle along an optical axis direction to enter a laser beam expanding system, and laser beams are expanded and collimated by a beam expanding system composed of a plano-concave negative lens 4 and a plano-convex positive lens 5, then are reflected by two third reflectors 6 and four reflectors 7 which face each other to form a 90-degree angle, and are transmitted through a first infrared optical window 8 to enter a vacuum chamber 10, and then are focused by a first aspheric infrared lens 12. 1064nm capture light passes through the window glass 9 from the outside of the vacuum chamber and enters the vacuum chamber 10, the capture objective 11 focuses 1064nm laser, the suspended nanoparticles 13 are bound at the focal position of the capture objective 11 by the 1064nm capture light beam, the optical axis of the capture optical path is perpendicular to the optical axis of the infrared heating optical path, and the focal point of the first aspheric infrared lens 12, the focal point of the capture objective 11 and the focal point of the second aspheric infrared lens 14 coincide. The infrared light is focused to irradiate the suspended nanoparticles 13, and the focused infrared light starts to diverge again after being focused. In order to prevent the diffused infrared laser from reflecting and scattering in the vacuum cavity to burn the cavity or other elements, the diffused infrared light is collimated by the second aspheric surface infrared lens 14, and the collimated light passes through the second infrared optical window 15 and then is emitted out of the vacuum cavity 10 to enter the optical garbage can 16.
The laser beam expanding system consists of a plano-concave negative lens 4 and a plano-convex positive lens 5, the focal length of the plano-concave negative lens 4 is-25.4 mm, the radius of curvature of the spherical surface is-35.6 mm, the substrate material is zinc selenide, and the surface of the lens is plated with an antireflection film. The focal length of the plano-convex positive lens 5 is 200mm, the radius of curvature of the spherical surface is 280.5mm, and the substrate material is zinc selenide. The air gap between the plano-concave negative lens 4 and the plano-convex positive lens 5 is 173.1 mm. The first infrared optical window 8 and the second infrared optical window 15 both adopt zinc selenide as a substrate, and the surfaces thereof are plated with antireflection films. The first aspheric infrared lens 12 and the second aspheric infrared lens 14 are aspheric lenses with a focal length of 30mm, the substrate material is germanium, the aspheric curvature radius is 29.46mm, the conic constant is 0, and the polynomial coefficientA 4 、A 6 Respectively is-3.9735336 x 10 -7 and-6.3265251X 10 -11 . The other surfaces of the first aspherical infrared lens 12 and the second aspherical infrared lens 14 are spherical surfaces, and the radius of curvature thereof is 40 mm. The distance between the first aspheric infrared lens 12 and the focus of the capture objective lens 11 is 27mm, and the infrared optical system can enable a focusing light spot to reach a diffraction limit, and the radius of the diffraction limit light spot is 18.05 um. The reflectivity of the reflector and the transmittance of the lens are both about 97 percent, and the average radiation illumination of the first aspheric surface infrared lens 12 at the focal point can reach 26813W/mm 2 。
Example 6
The present embodiment adopts a far infrared continuous light laser with power of 21W and light waist diameter of 2.4 mm.
As shown in fig. 1, collimated far-infrared light emitted by a laser 1 is reflected by two first reflectors 2 and two second reflectors 3 which face each other to form a 90-degree angle along an optical axis direction to enter a laser beam expanding system, and laser beams are expanded and collimated by a beam expanding system composed of a plano-concave negative lens 4 and a plano-convex positive lens 5, then are reflected by two third reflectors 6 and four reflectors 7 which face each other to form a 90-degree angle, and are transmitted through a first infrared optical window 8 to enter a vacuum chamber 10, and then are focused by a first aspheric infrared lens 12. 1064nm capture light passes through the window glass 9 from the outside of the vacuum chamber and enters the vacuum chamber 10, the capture objective 11 focuses 1064nm laser, the suspended nanoparticles 13 are bound at the focal position of the capture objective 11 by the 1064nm capture light beam, the optical axis of the capture optical path is perpendicular to the optical axis of the infrared heating optical path, and the focal point of the first aspheric infrared lens 12, the focal point of the capture objective 11 and the focal point of the second aspheric infrared lens 14 coincide. The infrared light is focused to irradiate the suspended nanoparticles 13, and the focused infrared light starts to diverge again after being focused. In order to prevent the diffused infrared laser from reflecting and scattering in the vacuum cavity to burn the cavity or other elements, the diffused infrared light is collimated by the second aspheric surface infrared lens 14, and the collimated light passes through the second infrared optical window 15 and then is emitted out of the vacuum cavity 10 to enter the optical garbage can 16.
The laser beam expanding system consists of a plano-concave negative lens 4 and a plano-convex positive lens 5, the focal length of the plano-concave negative lens 4 is-25.4 mm, the radius of curvature of the spherical surface is-35.6 mm, the substrate material is zinc selenide, and the surface of the lens is plated with an antireflection film. The focal length of the plano-convex positive lens 5 is 200mm, the radius of curvature of the spherical surface is 280.5mm, and the substrate material is zinc selenide. The air gap between the plano-concave negative lens 4 and the plano-convex positive lens 5 is 173.1 mm. The first infrared optical window 8 and the second infrared optical window 15 both adopt zinc selenide as a substrate, and the surfaces thereof are plated with antireflection films. The first aspheric infrared lens 12 and the second aspheric infrared lens 14 are aspheric lenses with focal length of 30mm, the substrate material is germanium, the aspheric curvature radius is 29.46mm, the conic constant is 0, and the multiple coefficientA 4 、A 6 Respectively is-3.9735336 x 10 -7 and-6.3265251X 10 -11 . The other surfaces of the first aspheric infrared lens 12 and the second aspheric infrared lens 14 are spherical surfaces, and the curvature radius thereof is 40 mm. The first aspherical infrared lens 12 is spaced from the focal point of the capture objective lens 11 by a distance of 27 mm. The infrared optical systemThe focused spot can be brought to the diffraction limit, which is 18.05um in spot radius. The reflectivity of the reflector and the transmittance of the lens are both about 97 percent, and the average radiation illumination at the focus of the first aspheric infrared lens 12 can reach 16088W/mm 2 。
Example 7
The present embodiment adopts a far infrared continuous light laser with power of 35W and light waist diameter of 2.4 mm.
As shown in fig. 1, collimated far-infrared light emitted by a laser 1 is reflected by two first reflectors 2 and two second reflectors 3 which face each other to form a 90-degree angle along an optical axis direction to enter a laser beam expanding system, and laser beams are expanded and collimated by a beam expanding system composed of a plano-concave negative lens 4 and a plano-convex positive lens 5, then are reflected by two third reflectors 6 and four reflectors 7 which face each other to form a 90-degree angle, and are transmitted through a first infrared optical window 8 to enter a vacuum chamber 10, and then are focused by a first aspheric infrared lens 12. 1064nm capture light passes through the window glass 9 from the outside of the vacuum chamber and enters the vacuum chamber 10, the capture objective 11 focuses 1064nm laser, the suspended nanoparticles 13 are bound at the focal position of the capture objective 11 by the 1064nm capture light beam, the optical axis of the capture optical path is perpendicular to the optical axis of the infrared heating optical path, and the focal point of the first aspheric infrared lens 12, the focal point of the capture objective 11 and the focal point of the second aspheric infrared lens 14 coincide. The infrared light is focused to irradiate the suspended nanoparticles 13, and the focused infrared light starts to diverge again after being focused. In order to prevent the diffused infrared laser from reflecting and scattering in the vacuum cavity to burn the cavity or other elements, the diffused infrared light is collimated by the second aspheric surface infrared lens 14, and the collimated light passes through the second infrared optical window 15 and then is emitted out of the vacuum cavity 10 to enter the optical garbage can 16.
The laser beam expanding system consists of a plano-concave negative lens 4 and a plano-convex positive lens 5, the focal length of the plano-concave negative lens 4 is-25.4 mm, the radius of curvature of the spherical surface is-35.6 mm, the substrate material is zinc selenide, and the surface of the lens is plated with an antireflection film. The focal length of the plano-convex positive lens 5 is 200mm, the radius of curvature of the spherical surface is 280.5mm, and the substrate material is zinc selenide. The air gap between the plano-concave negative lens 4 and the plano-convex positive lens 5 is 173.1 mm. The first aspheric infrared lens 12 and the second aspheric infrared lens 14 are asphericThe focal length of the lens is 30mm, the substrate material is germanium, the curvature radius of the aspheric surface of the lens is 29.46mm, the conic constant is 0, and the coefficient of multiple termsA 4 、A 6 Are respectively-3.9735336X 10 -7 and-6.3265251X 10 -11 . The other surfaces of the first aspherical infrared lens 12 and the second aspherical infrared lens 14 are spherical surfaces, and the radius of curvature thereof is 40 mm. The infrared optical system can enable a focusing light spot to reach a diffraction limit, and the radius of the diffraction limit light spot is 18.05 um. The reflectivity of the reflector and the transmittance of the lens are both about 97 percent, and the average radiation illumination of the first aspheric surface infrared lens 12 at the focal point can reach 26813W/mm 2 。
The infrared optical system can realize in-situ on-line thermal desorption of suspended nanoparticles in a capture state, eliminate impurities on the surfaces and in the particles, improve the high-vacuum-resistant suspension probability of the nanoparticles and realize stable high-vacuum suspension.
The infrared optical system can heat the particles in a capture state in a closed environment, and avoids the problems of difficult particle sintering scattering, particle structure damage and the like possibly caused by other preheating means (such as a calcining heating method).
The infrared optical system can realize the independent heating of the target particles in a capture state in a closed environment, and leads infrared light which is not scattered by the particles and part of the infrared light out of the vacuum cavity, thereby reducing the burning or influence on the vacuum cavity or other elements in the cavity as much as possible.
The embodiments in the above description can be further combined or replaced, and the embodiments are only described as preferred examples of the present invention, and do not limit the concept and scope of the present invention, and various changes and modifications made to the technical solution of the present invention by those skilled in the art without departing from the design concept of the present invention belong to the protection scope of the present invention. The scope of the invention is given by the appended claims and any equivalents thereof.
Claims (6)
1. An infrared optical system for heating suspended nanoparticles, comprising: the device comprises a laser (1), a first reflector (2), a second reflector (3), a third reflector (6), a fourth reflector (7), a first infrared optical window (8), a vacuum cavity (10), a capture objective lens (11), a first aspheric infrared lens (12), nanoparticles (13), a second aspheric infrared lens (14), a second infrared optical window (15) and an optical garbage can (16); collimated far infrared light emitted by a laser (1) is reflected by a first reflector (2) and a second reflector (3) along the optical axis direction to enter a laser beam expanding system, is expanded and collimated by the laser beam expanding system, is reflected by a third reflector (6) and a fourth reflector (7), and is transmitted through a first infrared optical window (8) to enter a vacuum cavity (10), and then is focused by a first aspheric infrared lens (12); the suspended nanometer particles (13) are constrained at the focus position of the capture objective lens (11) by a capture light beam focused by the capture objective lens (11), and the focus of the first aspheric infrared lens (12) is coincident with the focus of the capture objective lens; infrared light is focused and irradiated on the suspended nanoparticles (13), the focused infrared light starts to diverge after being focused, the divergent light is collimated by a second aspheric infrared lens (14), and the collimated light is emitted out of the vacuum cavity after passing through a second infrared optical window (15) and enters an optical garbage can (16);
the second aspheric infrared lens (14) is used for directly guiding infrared light which does not pass through the nano particles (13) out of the vacuum cavity (10) and absorbing the infrared light by the optical garbage can (16) so as to avoid the infrared light from scattering in the cavity; the first aspheric infrared lens (12) and the second aspheric infrared lens (14) adopt the same aspheric lens, and the focuses of the first aspheric infrared lens (12), the second aspheric infrared lens (14) and the capture objective lens (11) are superposed;
the laser beam expanding system is used for expanding the diameter of a light spot of incident light and collimating the incident light, and consists of a plano-concave negative lens (4) and a plano-convex positive lens (5) lens group, wherein the concave surface and the convex surface are spherical surfaces, the material is selected from a material with high transmittance in a long-wave infrared band, antireflection films are plated on the front surface and the rear surface of the laser beam expanding system, the laser beam sequentially transmits through the concave surface plane of the plano-concave negative lens (4) and the plane and the convex surface of the plano-convex positive lens (5), and the object space focus of the plano-convex positive lens (5) is superposed with the image space focus of the plano-concave negative lens (4); the beam expansion multiple depends on the ratio of the diameter of an incident beam required by the first aspheric infrared lens (12) to the diameter of a light spot emitted by the laser (1);
the suspended nanometer particles of the heating object are restrained by the converged trapping light beam formed by the trapping objective lens and suspended in the air or vacuum environment;
the optical axis of the capturing optical path is vertical to that of the infrared heating optical path.
2. The infrared optical system of claim 1, wherein: the first reflector (2) and the second reflector (3) form 90 degrees in opposite directions, and high-reflection films meeting the infrared laser damage threshold value of continuous waves of not less than 300W/cm are plated on the surfaces of the first reflector (2) and the second reflector (3) and are used for adjusting infrared beams to be collimated and incident to the laser beam expanding system.
3. The infrared optical system of claim 1, wherein: the third reflector (6) and the fourth reflector (7) form a 90-degree angle in opposite directions, and high-reflection films meeting the infrared laser damage threshold value of continuous waves not less than 300W/cm are plated on the surfaces of the third reflector (6) and the fourth reflector (7) and used for adjusting the position of an infrared focusing light spot to enable the infrared focusing light spot to coincide with the focus of the capture objective lens (11).
4. The infrared optical system of claim 1, wherein: the first aspheric surface infrared lens (12) is used for focusing infrared light into light spot radiation illuminance which is more than or equal to 10000W/mm 2 。
5. The infrared optical system of claim 1, wherein: the aspherical lens has an aspherical front surface and a spherical or flat rear surface.
6. The infrared optical system of claim 5, wherein: the aspheric lens is made of a material with high transmittance in a long-wave infrared band, antireflection films are plated on the front surface and the rear surface, and the surface shape of the aspheric lens meets the following formula
Wherein z is the rise of the vector,Yis a radial distance perpendicular to the optical axis,Rin order to be the radius of curvature,kis a constant of a quadratic curve and is,A 4 、A 6 、A n is a polynomial coefficient.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210137958.XA CN114205929B (en) | 2022-02-15 | 2022-02-15 | Infrared optical system for heating suspended nanoparticles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210137958.XA CN114205929B (en) | 2022-02-15 | 2022-02-15 | Infrared optical system for heating suspended nanoparticles |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114205929A CN114205929A (en) | 2022-03-18 |
| CN114205929B true CN114205929B (en) | 2022-08-05 |
Family
ID=80659007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210137958.XA Active CN114205929B (en) | 2022-02-15 | 2022-02-15 | Infrared optical system for heating suspended nanoparticles |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114205929B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5153679A (en) * | 1989-09-29 | 1992-10-06 | Millipore Corporation | Apparatus and process for measuring light absorbance or fluorescence in liquid samples |
| CN102590125A (en) * | 2011-11-30 | 2012-07-18 | 天津大学 | Biological tissue moisture measurement device and method based on terahertz wave attenuated total reflectance (ATR) |
| CN105705932A (en) * | 2013-11-05 | 2016-06-22 | 马尔文仪器有限公司 | Improvements relating to particle characterisation |
| CN109211847A (en) * | 2018-09-29 | 2019-01-15 | 西北大学 | A kind of device and method of the chemical composition analysis for single suspended particulate |
| CN110300883A (en) * | 2016-11-29 | 2019-10-01 | 光热光谱股份有限公司 | Method and apparatus for enhancing photothermal imaging and spectrum |
| CN212515199U (en) * | 2019-07-24 | 2021-02-09 | 欧姆尼欧美公司 | Objective lens of microscope for imaging nucleic acid array and system for DNA sequencing |
| CN112628617A (en) * | 2021-01-14 | 2021-04-09 | 苏州视奥光电科技有限公司 | Refraction and reflection type laser light-emitting device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5609580B2 (en) * | 2010-11-18 | 2014-10-22 | 横河電機株式会社 | Laser gas analyzer |
| EP2910936A1 (en) * | 2014-02-24 | 2015-08-26 | Fundacio Privada Institut Catala de Nanociencia I Nanotecnologia (ICN2) | Inspecting nanostructures |
| CN105785071B (en) * | 2016-03-07 | 2018-09-07 | 浙江大学 | A kind of high sensitivity ligh trap measuring device and its measurement method |
| DE102019203560A1 (en) * | 2019-03-15 | 2020-09-17 | Bruker Optik Gmbh | IR microscope |
| CN111380829A (en) * | 2020-03-02 | 2020-07-07 | 南方科技大学 | Uncooled optical reading type infrared thermal imaging system |
-
2022
- 2022-02-15 CN CN202210137958.XA patent/CN114205929B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5153679A (en) * | 1989-09-29 | 1992-10-06 | Millipore Corporation | Apparatus and process for measuring light absorbance or fluorescence in liquid samples |
| CN102590125A (en) * | 2011-11-30 | 2012-07-18 | 天津大学 | Biological tissue moisture measurement device and method based on terahertz wave attenuated total reflectance (ATR) |
| CN105705932A (en) * | 2013-11-05 | 2016-06-22 | 马尔文仪器有限公司 | Improvements relating to particle characterisation |
| CN110300883A (en) * | 2016-11-29 | 2019-10-01 | 光热光谱股份有限公司 | Method and apparatus for enhancing photothermal imaging and spectrum |
| CN109211847A (en) * | 2018-09-29 | 2019-01-15 | 西北大学 | A kind of device and method of the chemical composition analysis for single suspended particulate |
| CN212515199U (en) * | 2019-07-24 | 2021-02-09 | 欧姆尼欧美公司 | Objective lens of microscope for imaging nucleic acid array and system for DNA sequencing |
| CN112628617A (en) * | 2021-01-14 | 2021-04-09 | 苏州视奥光电科技有限公司 | Refraction and reflection type laser light-emitting device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114205929A (en) | 2022-03-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4195913A (en) | Optical integration with screw supports | |
| JP2019511819A5 (en) | ||
| CN105182523A (en) | STED super-resolution microscope based on first-order Bessel beams and adjustment method thereof | |
| JP6373421B2 (en) | Arrangement structure of optical elements for focusing a nearly collimated beam | |
| CN208224631U (en) | A kind of optical system generating low speckle annular beam | |
| CA2724209A1 (en) | Device for joining and tapering fibres or other optical components | |
| CA2338422A1 (en) | Apparatus and method for producing an improved laser beam | |
| KR102242926B1 (en) | Lens array-based illumination for wafer inspection | |
| CN114205929B (en) | Infrared optical system for heating suspended nanoparticles | |
| CN110085344B (en) | Microstructure light beam regulation and control system of confocal optical laser trap | |
| CN114724939A (en) | Method and system for improving laser annealing effect of semiconductor device | |
| CN107807451B (en) | Portable variable focal length optical system | |
| CN108897075B (en) | Sub-wavelength imaging device based on silicon ball and photonic crystal negative refraction effect | |
| JPWO2019078092A1 (en) | Laser processing equipment | |
| WO2011026412A1 (en) | Parabolic mirror light-converging system having partially displaceable reflective surface | |
| KR101343632B1 (en) | Levitation Apparatus and Levitation Method | |
| CN101256276B (en) | Laser beam focusing integral form paraboloidal mirror | |
| RU2552029C1 (en) | Optical focusing system with toroidal mirrors | |
| CN206460224U (en) | A kind of continuous multiplying power beam-expanding system of infrared laser suitable for 1064nm wavelength | |
| CN211438581U (en) | Ultraviolet light scanning field lens | |
| CN110018565B (en) | Method and device for improving focusing capacity of ultrafast laser beam | |
| CN103901623A (en) | Heat effect control device used for catadioptric projection objective lens | |
| Shlenov et al. | Energy parameters of CO 2 laser radiation focused in a turbulent atmosphere under wind-dominated thermal blooming | |
| CN108508614B (en) | Infrared laser continuous multiplying power beam expanding system suitable for 1064nm wavelength | |
| JP2003528727A (en) | Laser processing equipment for materials |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |