CN114188810B - Method for controlling consistency of output pulse energy of laser and optical path system - Google Patents
Method for controlling consistency of output pulse energy of laser and optical path system Download PDFInfo
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- CN114188810B CN114188810B CN202210128956.4A CN202210128956A CN114188810B CN 114188810 B CN114188810 B CN 114188810B CN 202210128956 A CN202210128956 A CN 202210128956A CN 114188810 B CN114188810 B CN 114188810B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/101—Lasers provided with means to change the location from which, or the direction in which, laser radiation is emitted
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0071—Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0085—Modulating the output, i.e. the laser beam is modulated outside the laser cavity
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention relates to a method for controlling the consistency of output pulse energy of a laser, which comprises the following steps: separating the seed light into 1-level light and 0-level light; enabling the 1-level light and the 0-level light to be combined after passing through the same optical path, and enabling the polarization directions of the 1-level light and the 0-level light to be mutually vertical before combining; the combined beam is amplified by a laser amplifier, and the amplified laser beam is split into 0-level light and 1-level light suitable for output. Correspondingly, an optical path system capable of controlling the consistency of the output pulse energy of the laser is also provided. The invention adopts a polarization beam combination mode to simultaneously input the 0-level light and the 1-level light into the laser amplifier, so that the input power of the laser amplifier can be kept unchanged, the laser amplifier is ensured to work in a relatively stable state, the output power of the laser amplifier is kept stable, the laser output pulse can be synchronized with the external control trigger on the precision of the seed light pulse interval, and the output pulse energy can ensure the consistency.
Description
Technical Field
The invention belongs to the technical field of laser processing, and particularly relates to a method for controlling consistency of output pulse energy of a laser and an optical path system.
Background
With the continuous development of laser processing applications, people are continuously pursuing faster processing speed and better processing effect (such as uniformity of dot pitch) in more and more laser processing applications. In the case of conventional laser machining, the beam is moved over the workpiece to machine a particular pattern, either by moving the spot through the galvanometer or by moving the workpiece, or both, and these movements should be as fast as possible in order to maximize speed. The speed is limited by the requirement of motion precision, the moving speed can be fast in a straight line segment, but the moving speed is slow in a curve segment or a small and complex pattern; if the light exit spacing of the laser does not perfectly match the speed of the moving parts, non-uniform dot spacing results. However, in the conventional laser amplification system, it can be simply considered that the product of the pulse energy and the pulse frequency is constant, and therefore, if the light-emitting interval of the laser is changed to perfectly match the speed of the moving part, the pulse energy will be inconsistent. At present, the requirements of ensuring perfect matching between the light-emitting interval and the speed of a moving part and ensuring the consistency of the output pulse energy of a laser are difficult to meet simultaneously.
Disclosure of Invention
The invention relates to a method for controlling the consistency of output pulse energy of a laser and an optical path system, which can at least solve part of defects in the prior art.
The invention relates to a method for controlling the consistency of output pulse energy of a laser, which comprises the following steps:
s1, separating the seed light into 1-level light and 0-level light;
s2, combining the 1 st-order light and the 0 th-order light after passing through the same optical path, wherein the polarization directions of the 1 st-order light and the 0 th-order light are perpendicular to each other before combining;
s3, the combined beam is amplified by the laser amplifier, and the amplified laser beam is split into 0-order light and 1-order light suitable for output.
In one embodiment, in S1, the seed light is split using an acousto-optic modulator.
As one embodiment, in S2, before the beams are combined, the polarization direction of one of the beams is changed by a half-wave plate so as to be perpendicular to the polarization direction of the other beam.
As one embodiment, in S2, at least one mirror is disposed on the optical path of the 1 st order light and/or the 0 th order light so that the 1 st order light and the 0 th order light pass through the same optical path before beam combination.
As one embodiment, in S2, the beam combining operation is performed by using a polarization beam splitter; and/or, in S3, the splitting operation of the laser beam is performed by using a polarization beam splitter.
The invention also relates to an optical path system capable of controlling the consistency of the output pulse energy of a laser, which comprises:
a first light splitting unit for splitting the seed light into 1-order input light and 0-order input light;
a beam combining unit for combining the 1-level input light and the 0-level input light; an optical path adjusting unit is arranged on a 1-level input optical path and/or a 0-level input optical path, so that the 1-level input light and the 0-level input light enter the beam combining unit after passing through the same optical path; a polarization direction changing unit is arranged on a 1-level input light path or a 0-level input light path, so that the polarization directions of the 1-level input light and the 0-level input light are perpendicular to each other before beam combination;
the laser amplifier is arranged on the light emitting path of the beam combining unit and used for amplifying the laser power of the combined beam;
and the second light splitting unit is arranged on the light emitting path of the laser amplifier and is used for splitting the amplified laser beam into 0-level output light and 1-level output light.
As an embodiment, the first light splitting unit comprises an acousto-optic modulator.
In one embodiment, the polarization direction changing unit includes a half-wave plate.
In one embodiment, the optical path length adjusting unit includes at least one mirror.
As an embodiment, the beam combining unit includes a first polarization beam splitter; and/or the second light splitting unit comprises a second polarization beam splitter.
The invention has at least the following beneficial effects:
the invention adopts a polarization beam combination mode to simultaneously input the 0-level light and the 1-level light into the laser amplifier, so that the input power of the laser amplifier can be kept unchanged, the laser amplifier is ensured to work in a relatively stable state, the output power of the laser amplifier is kept stable, the laser output pulse can be synchronized with the external control trigger on the precision of the seed light pulse interval, and the output pulse energy can ensure the consistency.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic composition diagram of an optical path system according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
Referring to fig. 1, an embodiment of the present invention provides a method for controlling the consistency of output pulse energy of a laser, including:
s1, separating the seed light into 1-level light and 0-level light;
s2, combining the 1 st-order light and the 0 th-order light after passing through the same optical path, wherein the polarization directions of the 1 st-order light and the 0 th-order light are perpendicular to each other before combining;
s3, the combined beam is amplified by the laser amplifier 500, and the amplified laser beam is split into 0-order light and 1-order light suitable for output.
In one embodiment, the pulse width of the seed light is less than 1 microsecond and the repetition frequency is greater than 1 MHz.
In one embodiment, in S1, the acousto-optic modulator 100 is used to split the seed light. Of course, the present invention is not limited to this embodiment, and other photoelectric switching devices, such as an electro-optical modulator, may be used.
Preferably, the 1 st order light is diffracted light, which is the tactile light selected by the external control signal, and the 0 th order light is the remaining light after the tactile light is removed.
In one embodiment, in S2, before combining, the polarization direction of one of the beams is changed by the half-wave plate 200 to be perpendicular to the polarization direction of the other beam. Of course, the present invention is not limited to this embodiment, and other devices capable of changing the polarization direction, such as an optical rotator, etc., may be applied to the present embodiment. In the embodiment shown in fig. 1, the half-wave plate 200 is disposed on the optical path of the 0 th order light; when the half-wave plate 200 is disposed on the optical path of the 1 st-order light, the subsequent optical path can be adjusted for matching. In the present embodiment, the seed light is horizontally polarized light; of the 1 st order light and the 0 th order light before the beam combination, the light whose polarization direction is changed by the half-wave plate 200 is vertically polarized light, and the other light is still horizontally polarized light.
In one embodiment, in S2, at least one mirror 400 is disposed on the optical path of the 1 st order light and/or the 0 th order light so that the 1 st order light and the 0 th order light pass through the same optical path before beam combination. Of course, other devices can be used to adjust the optical path length of the light beam, which is easily changed by those skilled in the art and is not exemplified here.
Preferably, in S2, the beam combining operation is performed by using a polarization beam splitter; and/or, in S3, the splitting operation of the laser beam is performed by using a polarization beam splitter. Of course, other devices capable of combining/splitting 1 st order light and 0 th order light are also suitable for use in the present embodiment.
Alternatively, the laser amplifier 500 includes, but is not limited to, a solid-state amplifier, a fiber amplifier, and the like, and is mainly used for amplifying the laser power of the combined beam.
In an alternative embodiment, a wavelength converter may be provided after the laser amplifier 500; the wavelength converter may be arranged before the splitting node or after the splitting node (on the 1-stage output light 901 optical path).
Preferably, in S3, the 0 th order output light 902 may be directed to the absorber 700 for absorption processing.
In a typical laser amplifier 500, only the 1 st order light is typically amplified by the laser amplifier 500 because only the 1 st order light is the light that needs to be utilized and the 0 th order light is the remainder of the light that is ultimately not used. However, if only level 1 light is passed through the laser amplifier 500, the frequency of the level 1 light is changed when the frequency of the external control signal is changed, but the pulse energy is not consistent when the level 1 light with the changed frequency passes through the laser amplifier 500 (it can be simply considered that the product of the pulse energy and the pulse frequency is constant, the pulse width interval is large, the energy of the next pulse is large, and conversely the pulse energy is smaller). In this embodiment, after the 0-level light and the 1-level light are combined, the laser amplifier 500 passes through, and the sum of the power of the 0-level light and the power of the 1-level light is not changed no matter how the external control signal is changed, so that the amplified pulse energy is not changed, and the consistency of the output pulse energy is ensured.
It can be seen that, in the method provided in this embodiment, a polarization beam combination mode is adopted, and the 0-level light and the 1-level light are simultaneously input to the laser amplifier 500, so that the input power of the laser amplifier 500 is kept unchanged, the laser amplifier 500 is ensured to work in a relatively stable state, the output power of the laser amplifier is kept stable, the laser output pulse can be synchronized with the external control trigger on the precision of the seed light pulse interval, and the output pulse energy can be ensured to be consistent.
It should be noted that although the acousto-optic modulator 100 may be placed behind the laser amplifier 500, and the effect of output pulse energy uniformity may also be achieved, the laser power output by the laser amplifier 500 is large, and in order to avoid damage, the laser spot passing through the acousto-optic modulator 100 must be increased, which increases the response time of the acousto-optic modulator 100 and limits the output frequency of the laser. In the above embodiment, the acousto-optic modulator 100 is placed in front of the seed light output place, the laser power is relatively low, the response time of the acousto-optic modulator 100 can be controlled to tens of nanoseconds or even several nanoseconds, and compared with the acousto-optic modulator 100 placed in back, the use frequency range of the laser is remarkably expanded.
Example two
Referring to fig. 1, an embodiment of the present invention provides an optical path system capable of controlling consistency of energy of output pulses of a laser, including:
a first light splitting unit for splitting the seed light into 1-order input light 801 and 0-order input light 802;
a beam combining unit 300 for combining the 1-order input light 801 and the 0-order input light 802; an optical path adjusting unit is disposed on a 1-level input light path 801 and/or a 0-level input light path 802, so that the 1-level input light 801 and the 0-level input light 802 enter the beam combining unit 300 after passing through the same optical path; a polarization direction changing unit is arranged on a 1-level input light path or a 0-level input light 802 path, so that the polarization directions of the 1-level input light 801 and the 0-level input light 802 are perpendicular to each other before beam combination;
a laser amplifier 500 disposed on the light-emitting path of the beam combining unit 300 for amplifying the laser power of the combined beam;
and a second light splitting unit 600, disposed on the light outgoing path of the laser amplifier 500, for splitting the amplified laser beam into 0-order output light 902 and 1-order output light 901.
In one embodiment, the first light splitting unit includes an acousto-optic modulator 100. Of course, the present invention is not limited to this embodiment, and other photoelectric switching devices, such as an electro-optical modulator, may be used.
Preferably, the 1 st order input light 801 is diffracted light, which is the touch light selected by the external control signal, and the 0 th order input light 802 is the remaining light after the touch light is removed.
In one embodiment, the polarization direction changing unit includes a half-wave plate 200. Of course, the present invention is not limited to this embodiment, and other devices capable of changing the polarization direction, such as an optical rotator, etc., may be applied to the present embodiment. In the embodiment shown in fig. 1, the half-wave plate 200 is disposed on the optical path of the 0 th order light; when the half-wave plate 200 is disposed on the optical path of the 1 st-order light, the subsequent optical path can be adjusted for matching. In the present embodiment, the seed light is horizontally polarized light; of the 1 st order input light 801 and the 0 th order input light 802, the light whose polarization direction is changed by the half-wave plate 200 is vertically polarized light, and the other light is still horizontally polarized light.
In one embodiment, the optical path adjusting unit includes at least one mirror 400. Of course, other devices can be used to adjust the optical path length of the light beam, which is easily changed by those skilled in the art and is not exemplified here.
In one embodiment, the beam combining unit 300 includes a first polarization beam splitter; and/or, the second light splitting unit 600 includes a second polarization beam splitter. Of course, other devices capable of combining the 1 st order input light 801 and the 0 th order input light 802, and devices capable of splitting the combined light into the 0 th order output light 902 and the 1 st order output light 901 are also applicable to the present embodiment.
Alternatively, the laser amplifier 500 includes, but is not limited to, a solid-state amplifier, a fiber amplifier, and the like. In an alternative embodiment, a wavelength converter may be provided after the laser amplifier 500; the wavelength converter may be disposed before the second light splitting unit 600 or may be disposed after the second light splitting unit 600 (on the 1-stage output light 901 optical path).
Preferably, the 0 th order output light 902 may be directed into the absorber 700 for absorption.
Obviously, the optical path system provided in this embodiment can implement the method in the first embodiment, and the related contents in the two embodiments can be complementary to each other; the optical path system provided by this embodiment can also obtain the beneficial effects of the first embodiment.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A method of controlling consistency of output pulse energy of a laser, comprising:
s1, separating the seed light into 1-level light and 0-level light;
s2, combining the 1 st-order light and the 0 th-order light after passing through the same optical path, wherein the polarization directions of the 1 st-order light and the 0 th-order light are perpendicular to each other before combining;
s3, the combined beam is amplified by the laser amplifier, and the amplified laser beam is split into 0-order light and 1-order light suitable for output.
2. The method of controlling laser output pulse energy uniformity of claim 1, wherein: in S1, an acousto-optic modulator is used to split the seed light.
3. The method of controlling laser output pulse energy uniformity of claim 1, wherein: in S2, before the beams are combined, the polarization direction of one of the beams is changed by a half-wave plate so as to be orthogonal to the polarization direction of the other beam.
4. The method of controlling laser output pulse energy uniformity of claim 1, wherein: at S2, at least one mirror is disposed on the optical path of the 1 st order light and/or the 0 th order light so that the 1 st order light and the 0 th order light pass through the same optical path before being combined.
5. The method of controlling laser output pulse energy uniformity of claim 1, wherein: in S2, beam combination is completed by using a polarization beam splitter; and/or, in S3, the splitting operation of the laser beam is performed by using a polarization beam splitter.
6. An optical path system capable of controlling the consistency of the energy of output pulses of a laser, comprising:
a first light splitting unit for splitting the seed light into 1-order input light and 0-order input light;
a beam combining unit for combining the 1-level input light and the 0-level input light; an optical path adjusting unit is arranged on a 1-level input optical path and/or a 0-level input optical path, so that the 1-level input light and the 0-level input light enter the beam combining unit after passing through the same optical path; a polarization direction changing unit is arranged on a 1-level input light path or a 0-level input light path, so that the polarization directions of the 1-level input light and the 0-level input light are perpendicular to each other before beam combination;
the laser amplifier is arranged on the light emitting path of the beam combining unit and used for amplifying the laser power of the combined beam;
and the second light splitting unit is arranged on the light emitting path of the laser amplifier and is used for splitting the amplified laser beam into 0-level output light and 1-level output light.
7. The optical circuit system of claim 6, wherein: the first light splitting unit includes an acousto-optic modulator.
8. The optical circuit system of claim 6, wherein: the polarization direction changing unit includes a half-wave plate.
9. The optical circuit system of claim 6, wherein: the optical path adjusting unit includes at least one mirror.
10. The optical circuit system of claim 6, wherein: the beam combination unit comprises a first polarization beam splitter; and/or the second light splitting unit comprises a second polarization beam splitter.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7539231B1 (en) * | 2005-07-15 | 2009-05-26 | Lockheed Martin Corporation | Apparatus and method for generating controlled-linewidth laser-seed-signals for high-powered fiber-laser amplifier systems |
| CN103314486A (en) * | 2010-09-13 | 2013-09-18 | 卡尔曼光纤股份有限公司贸易用名卡尔曼激光 | Generating laser pulses based on chirped pulsed amplification |
| CN107210572A (en) * | 2014-11-21 | 2017-09-26 | 美国光子工业股份有限公司 | Laser pulse picking up system |
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| US9696568B2 (en) * | 2015-05-13 | 2017-07-04 | Lasertec Corporation | Light source apparatus and inspection apparatus |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7539231B1 (en) * | 2005-07-15 | 2009-05-26 | Lockheed Martin Corporation | Apparatus and method for generating controlled-linewidth laser-seed-signals for high-powered fiber-laser amplifier systems |
| CN103314486A (en) * | 2010-09-13 | 2013-09-18 | 卡尔曼光纤股份有限公司贸易用名卡尔曼激光 | Generating laser pulses based on chirped pulsed amplification |
| CN107210572A (en) * | 2014-11-21 | 2017-09-26 | 美国光子工业股份有限公司 | Laser pulse picking up system |
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