CN114137905B - Error compensation method, device and storage medium - Google Patents

Error compensation method, device and storage medium Download PDF

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Publication number
CN114137905B
CN114137905B CN202111368517.2A CN202111368517A CN114137905B CN 114137905 B CN114137905 B CN 114137905B CN 202111368517 A CN202111368517 A CN 202111368517A CN 114137905 B CN114137905 B CN 114137905B
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error
standard position
target
error compensation
data
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CN114137905A (en
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王广炎
曹柳芳
宋晓波
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Hefei Sineva Intelligent Machine Co Ltd
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Hefei Sineva Intelligent Machine Co Ltd
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/35—Nc in input of data, input till input file format
    • G05B2219/35408—Calculate new position data from actual data to compensate for contour error

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  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Numerical Control (AREA)

Abstract

The application provides an error compensation method, an error compensation device and a storage medium, relates to the technical field of precision platforms, and is used for solving the problem of low positioning precision in the prior art. The method comprises the following steps: obtaining a target standard position of the operation equipment, then reading a pre-established corresponding relation between the standard position and error compensation data, wherein the error compensation data in the corresponding relation is determined according to a linear displacement error and a straightness error, determining target error compensation data corresponding to the target standard position, and then determining the actual operation position of the operation equipment according to the target standard position and the target error compensation data. Thus, the positioning accuracy of the working equipment can be effectively improved.

Description

Error compensation method, device and storage medium
Technical Field
The present application relates to the field of precision platforms, and in particular, to a method and apparatus for error compensation, and a storage medium.
Background
In some automated production equipment, the processing precision of products is required to be higher and higher, and the positioning precision of a moving platform in the automated production equipment directly influences the processing precision of the products.
In the prior art, an error compensation method is generally adopted (namely, the positioning error of the motion platform is measured and compensated), so that the influence on the positioning precision is reduced, and the positioning precision of the motion platform is further improved.
However, the error compensation method for the positioning accuracy of the gantry type motion platform is to compensate the straightness, the perpendicularity or other single-direction errors independently, and when the errors in different directions are coupled based on the equipment structure and the motion relation, the errors cannot be compensated, so that the positioning accuracy is lower.
Disclosure of Invention
The application provides an error compensation method, an error compensation device and a storage medium, which are used for improving the positioning precision of operation equipment.
In order to achieve the above purpose, the application adopts the following technical scheme:
in a first aspect, there is provided an error compensation method, comprising: obtaining a target standard position of the operation equipment, then reading a pre-established corresponding relation between the standard position and error compensation data, wherein the error compensation data in the corresponding relation is determined according to a linear displacement error and a straightness error, determining target error compensation data corresponding to the target standard position, and then determining the actual operation position of the operation equipment according to the target standard position and the target error compensation data.
Optionally, acquiring measurement data of a measurement position corresponding to the standard position of the operation equipment; determining a straightness error and a linear displacement error according to the measurement data; and determining error compensation data corresponding to the standard position according to the straightness error and the linear displacement error, and establishing a corresponding relation.
Optionally, the method for determining the straightness error according to the measurement data specifically includes: determining an average value of the plurality of first straightness errors as the straightness error of the standard position corresponding to the first measurement position in the first direction; and determining an average value of the plurality of second straightness errors as the straightness error of the standard position corresponding to the second measurement position in the second direction.
Optionally, the method for determining the linear displacement error according to the measurement data specifically includes: determining linear displacement errors of standard positions corresponding to the third measurement position and the fourth measurement position in the first direction according to the average value of the first linear displacement errors and the average value of the second linear displacement errors; an average value of the plurality of third linear displacement errors is determined as a linear displacement error in the second direction of the standard position corresponding to the fifth measurement position.
Optionally, the method for determining the linear displacement error of the standard position corresponding to the third measurement position and the fourth measurement position in the first direction according to the average value of the plurality of first linear displacement errors and the average value of the plurality of second linear displacement errors specifically includes: the average value of the plurality of first linear displacement errors, the average value of the plurality of second linear displacement errors, and the linear displacement error of the standard position in the first direction satisfy the following formula:
wherein DeltaX X Is the linear displacement error of the standard position in the first direction, Y X Is the position information of the standard position in the second direction, Y i1 For the position information of the third measuring position in the second direction, Y i2 For the position information of the fourth measuring position in the second direction,is the average value of a plurality of first linear displacement errors, < >>Is the average of the plurality of second linear displacement errors.
Optionally, the method for determining the error compensation data corresponding to the standard position according to the straightness error and the linear displacement error and establishing the corresponding relation specifically includes: determining an inverse number of a sum of the straightness error in the first direction and the linear displacement error in the first direction as error compensation data in the first direction; determining an inverse number of a sum of the straightness error in the second direction and the linear displacement error in the second direction as error compensation data in the second direction; and determining the error compensation data in the first direction and the error compensation data in the second direction as error compensation data corresponding to the standard position, and obtaining a corresponding relation.
Optionally, the method for acquiring the target standard position of the working equipment specifically includes: acquiring an original standard position of the operation equipment; and determining a target standard position corresponding to the original standard position.
Optionally, the method for determining the actual working position of the working equipment according to the target standard position and the target error compensation data specifically includes: determining actual error compensation data according to the original standard position, the target standard position and the target error compensation data; the actual error compensation data includes actual error compensation data in a first direction and actual error compensation data in a second direction; determining the sum of the position information of the original standard position in the first direction and the actual error compensation data in the first direction as the position information of the actual operation position in the first direction; and determining the sum of the position information of the original standard position in the second direction and the actual error compensation data in the second direction as the position information of the actual working position in the second direction.
Optionally, determining actual error compensation data in the first direction according to the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, and the target error compensation data in the first direction; the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, the target error compensation data in the first direction, and the actual error compensation data in the first direction satisfy the following formulas:
Wherein DeltaX P For compensating data for actual errors in the first direction, deltaX A Compensating data for a target error of a first target standard position in a first direction, deltaX B Compensating data for a target error of the second target standard position in the first direction, deltaX C Compensating data for a target error of the third target standard position in the first direction, deltaX D Compensating data, X for a target error of a fourth target standard position in the first direction P For the position information of the original standard position in the first direction, Y P X is the position information of the original standard position in the second direction A X is the position information of the first target standard position in the first direction B For the position information of the second target standard position in the first direction, Y A For the position information of the first target standard position in the second direction, Y D The first target standard position, the second target standard position, the third target standard position and the fourth target standard position are the position information of the fourth target standard position in the second direction,The third target standard position and the fourth target standard position are target standard positions corresponding to the original standard position, the first target standard position and the second target standard position are the same in position information in the second direction, the first target standard position and the fourth target standard position are the same in position information in the first direction, the third target standard position and the second target standard position are the same in position information in the first direction, and the third target standard position and the fourth target standard position are the same in position information in the second direction; determining actual error compensation data in the second direction according to the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, and the target error compensation data in the second direction; the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, the target error compensation data in the second direction, and the actual error compensation data in the second direction satisfy the following formulas:
Wherein DeltaY P For compensating the data for actual errors in the second direction ΔY A Compensating data for a target error of the first target standard position in the second direction, Δy B Compensating data for a target error of the second target standard position in the second direction, Δy C Compensating data for a target error of the third target standard position in the second direction, Δy D And compensating data for the target error of the fourth target standard position in the second direction.
In a second aspect, there is provided an error compensation apparatus comprising: an acquisition unit and a determination unit; an acquisition unit configured to acquire a target standard position of the working apparatus; the determining unit is used for reading the corresponding relation between the pre-established standard position and the error compensation data and determining the target error compensation data corresponding to the target standard position acquired by the acquiring unit; the error compensation data in the corresponding relation is determined according to the linear displacement error and the straightness error; and the determining unit is also used for determining the actual working position of the working equipment according to the target standard position and the target error compensation data.
Optionally, the acquiring unit is further configured to: acquiring measurement data of a measurement position corresponding to a standard position of the operation equipment; the determining unit is also used for determining straightness errors and linear displacement errors according to the measurement data acquired by the acquiring unit; and the determining unit is also used for determining error compensation data corresponding to the standard position according to the straightness error and the linear displacement error and establishing a corresponding relation.
Optionally, the determining unit is specifically configured to: determining an average value of the plurality of first straightness errors as the straightness error of the standard position corresponding to the first measurement position in the first direction; and determining an average value of the plurality of second straightness errors as the straightness error of the standard position corresponding to the second measurement position in the second direction.
Optionally, the determining unit is specifically configured to: determining linear displacement errors of standard positions corresponding to the third measurement position and the fourth measurement position in the first direction according to the average value of the first linear displacement errors and the average value of the second linear displacement errors; an average value of the plurality of third linear displacement errors is determined as a linear displacement error in the second direction of the standard position corresponding to the fifth measurement position.
Optionally, the determining unit is specifically configured to: the average value of the plurality of first linear displacement errors, the average value of the plurality of second linear displacement errors, and the linear displacement error of the standard position in the first direction satisfy the following formula:
wherein DeltaX X Is the linear displacement error of the standard position in the first direction, Y X Is the position information of the standard position in the second direction, Y i1 For the third measuring position at the secondPositional information in the direction, Y i2 For the position information of the fourth measuring position in the second direction,is the average value of a plurality of first linear displacement errors, < >>Is the average of the plurality of second linear displacement errors.
Optionally, the determining unit is specifically configured to: determining an inverse number of a sum of the straightness error in the first direction and the linear displacement error in the first direction as error compensation data in the first direction; determining an inverse number of a sum of the straightness error in the second direction and the linear displacement error in the second direction as error compensation data in the second direction; and determining the error compensation data in the first direction and the error compensation data in the second direction as error compensation data corresponding to the standard position, and obtaining a corresponding relation.
Optionally, the acquiring unit is specifically configured to: acquiring an original standard position of the operation equipment; and determining a target standard position corresponding to the original standard position.
Optionally, the determining unit is specifically configured to: determining actual error compensation data according to the original standard position acquired by the acquisition unit, the target standard position acquired by the acquisition unit and the target error compensation data; the actual error compensation data includes actual error compensation data in a first direction and actual error compensation data in a second direction; determining the sum of the position information of the original standard position in the first direction and the actual error compensation data in the first direction as the position information of the actual operation position in the first direction; and determining the sum of the position information of the original standard position in the second direction and the actual error compensation data in the second direction as the position information of the actual working position in the second direction.
Optionally, the determining unit is specifically configured to: determining actual error compensation data in the first direction according to the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, and the target error compensation data in the first direction; the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, the target error compensation data in the first direction, and the actual error compensation data in the first direction satisfy the following formulas:
wherein DeltaX P For compensating data for actual errors in the first direction, deltaX A Compensating data for a target error of a first target standard position in a first direction, deltaX B Compensating data for a target error of the second target standard position in the first direction, deltaX C Compensating data for a target error of the third target standard position in the first direction, deltaX D Compensating data, X for a target error of a fourth target standard position in the first direction P For the position information of the original standard position in the first direction, Y P X is the position information of the original standard position in the second direction A X is the position information of the first target standard position in the first direction B For the position information of the second target standard position in the first direction, Y A For the position information of the first target standard position in the second direction, Y D For the position information of the fourth target standard position in the second direction, the first target standard position, the second target standard position, the third target standard position and the fourth target standard position are target standard positions corresponding to the original standard position, the first target standard position is identical to the position information of the second target standard position in the second direction, the first target standard position is identical to the position information of the fourth target standard position in the first direction, the third target standard position is identical to the position information of the second target standard position in the first direction, and the third target standard position is identical to the position of the fourth target standard position in the second directionThe information is the same; determining actual error compensation data in the second direction according to the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, and the target error compensation data in the second direction; the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, the target error compensation data in the second direction, and the actual error compensation data in the second direction satisfy the following formulas:
Wherein DeltaY P For compensating the data for actual errors in the second direction ΔY A Compensating data for a target error of the first target standard position in the second direction, Δy B Compensating data for a target error of the second target standard position in the second direction, Δy C Compensating data for a target error of the third target standard position in the second direction, Δy D And compensating data for the target error of the fourth target standard position in the second direction.
In a third aspect, an error compensation apparatus is provided, comprising a memory and a processor; the memory is used for storing computer execution instructions, and the processor is connected with the memory through a bus; when the error compensation device is operating, the processor executes computer-executable instructions stored in the memory to cause the error compensation device to perform the error compensation method of the first aspect.
The error compensation means may be a network device or may be a part of a device in a network device, such as a system-on-chip in a network device. The system-on-a-chip is configured to support the network device to implement the functions involved in the first aspect and any one of its possible implementations, for example, to obtain, generate, and send data and/or information involved in the error compensation method described above. The chip system includes a chip, and may also include other discrete devices or circuit structures.
In a fourth aspect, there is provided a computer readable storage medium comprising computer executable instructions which, when run on a computer, cause the computer to perform the error compensation method of the first aspect.
In a fifth aspect, there is also provided a computer program product comprising computer instructions which, when run on an error compensation device, cause the error compensation device to perform the error compensation method as described in the first aspect above.
It should be noted that the above-mentioned computer instructions may be stored in whole or in part on the first computer readable storage medium. The first computer readable storage medium may be packaged together with the processor of the error compensation device, or may be packaged separately from the processor of the error compensation device, which is not limited by the embodiment of the present application.
The description of the second, third, fourth and fifth aspects of the present application may refer to the detailed description of the first aspect; the advantages of the second aspect, the third aspect, the fourth aspect and the fifth aspect may be referred to as analysis of the advantages of the first aspect, and will not be described here.
In the embodiment of the present application, the names of the error compensation devices described above do not limit the devices or functional modules themselves, and in actual implementation, these devices or functional modules may appear under other names. Insofar as the function of each device or function module is similar to that of the present application, it falls within the scope of the claims of the present application and the equivalents thereof.
These and other aspects of the application will be more readily apparent from the following description.
The technical scheme provided by the application has at least the following beneficial effects:
based on any one of the above aspects, the present application provides an error compensation method, which can obtain a target standard position of a working device, then read a corresponding relation between a pre-established standard position and error compensation data, determine target error compensation data corresponding to the target standard position, and then determine an actual working position of the working device according to the target standard position and the target error compensation data. Because the error compensation data in the corresponding relation is determined according to the linear displacement error and the straightness error, the application can enlarge the error compensation range and effectively improve the positioning precision of the operation equipment by adding the influence of error coupling into the error compensation data.
Drawings
FIG. 1 is a schematic diagram of an error compensation system according to an embodiment of the present application;
fig. 2 is a schematic structural diagram of an operation device according to an embodiment of the present application;
fig. 3 is a schematic hardware structure of a communication device according to an embodiment of the present application;
fig. 4 is a schematic diagram of another hardware structure of a communication device according to an embodiment of the present application;
FIG. 5 is a schematic flow chart of an error compensation method according to an embodiment of the present application;
FIG. 6 is a schematic structural diagram of a measuring apparatus according to an embodiment of the present application;
FIG. 7 is a schematic structural diagram of another measuring apparatus according to an embodiment of the present application;
FIG. 8 is a flowchart of another error compensation method according to an embodiment of the present application;
FIG. 9 is a flowchart of another error compensation method according to an embodiment of the present application;
FIG. 10 is a flowchart of another error compensation method according to an embodiment of the present application;
FIG. 11 is a flowchart of another error compensation method according to an embodiment of the present application;
FIG. 12 is a flowchart of another error compensation method according to an embodiment of the present application;
FIG. 13 is a schematic view of a standard position according to an embodiment of the present application;
FIG. 14 is a flowchart of another error compensation method according to an embodiment of the present application;
FIG. 15 is a flowchart of another error compensation method according to an embodiment of the present application;
fig. 16 is a schematic structural diagram of an error compensation device according to an embodiment of the present application.
Detailed Description
The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
It should be noted that, in the embodiments of the present application, words such as "exemplary" or "such as" are used to mean serving as an example, instance, or illustration. Any embodiment or design described herein as "exemplary" or "e.g." in an embodiment should not be taken as preferred or advantageous over other embodiments or designs. Rather, the use of words such as "exemplary" or "such as" is intended to present related concepts in a concrete fashion.
In order to clearly describe the technical solution of the embodiment of the present application, in the embodiment of the present application, the words "first", "second", etc. are used to distinguish identical items or similar items having substantially the same function and effect, and those skilled in the art will understand that the words "first", "second", etc. are not limited in number and execution order.
As described in the background art, the existing error compensation method has a single error direction, resulting in lower positioning accuracy.
In view of the above problems, an embodiment of the present application provides an error compensation method, which may obtain a target standard position of a working device, then read a pre-established correspondence between the standard position and error compensation data, determine target error compensation data corresponding to the target standard position, and then determine an actual working position of the working device according to the target standard position and the target error compensation data. Because the error compensation data in the corresponding relation is determined according to the linear displacement error and the straightness error, the application can enlarge the error compensation range and effectively improve the positioning precision of the operation equipment by adding the influence of error coupling into the error compensation data.
The error compensation method is suitable for an error compensation system. Fig. 1 shows one configuration of the error compensation system. As shown in fig. 1, the error compensation system includes: a working device 101, a measuring device 102, and a server 103.
The working machine 101 is a machine for performing precision machining. The measuring device 102 is used for measuring measurement data of the working device 101, and is in communication connection with the working device 101. The server 103 is communicatively connected to the working device 101 and the measuring device 102, respectively.
In practical applications, the working device 101 may be connected to a plurality of measuring devices, and the server 103 may be connected to a plurality of measuring devices. For ease of understanding, fig. 1 illustrates an example in which one measuring device 102 is connected to each of the working device 101 and the server 103.
As shown in fig. 2, the working scene of the working device 101 in fig. 1 may be a gantry type precision motion platform, including: rail 210, motor 220, gantry 230, and working unit set 240.
Wherein, motor 220 includes: motor 221, motor 222, and motor 223. Motors 221 and 223 are disposed on both sides of the gantry 230 for controlling the movement of the gantry 230 along the rail 210. The working section group 240 is disposed on the gantry 230 for performing precision work. The motor 222 is used to control the movement of the working group 240 along the gantry 230.
The measurement device 102 in fig. 1 may be a laser interferometer and a measurement mirror set. The laser interferometer is used for measuring linear position, speed, angle, true flatness, true straightness, parallelism, perpendicularity and the like by matching with measuring lens groups such as various refracting lenses, reflecting lenses and the like, and can be used as a correction work of a precision tool machine or a measuring instrument.
The server 103 in fig. 1 may be one server in a server cluster (including a plurality of servers), or may be a chip in the server, or may be a system on a chip in the server, or may be implemented by a Virtual Machine (VM) deployed on a physical machine, which is not limited in this embodiment of the present application.
The basic hardware configuration of the work equipment 101, measurement equipment 102, and server 103 in the error compensation system is similar, and includes elements included in the communication device shown in fig. 3 or fig. 4. The hardware configuration of the working device 101, the measuring device 102, and the server 103 will be described below taking the communication devices shown in fig. 3 and 4 as an example.
Fig. 3 is a schematic diagram of a hardware structure of a communication device according to an embodiment of the present application. The communication device comprises a processor 31, a memory 32, a communication interface 33, a bus 34. The processor 31, the memory 32 and the communication interface 33 may be connected by a bus 34.
The processor 31 is a control center of the communication device, and may be one processor or a collective term of a plurality of processing elements. For example, the processor 31 may be a general-purpose central processing unit (central processing unit, CPU), or may be another general-purpose processor. Wherein the general purpose processor may be a microprocessor or any conventional processor or the like.
As one example, processor 31 may include one or more CPUs, such as CPU 0 and CPU 1 shown in fig. 3.
Memory 32 may be, but is not limited to, read-only memory (ROM) or other type of static storage device that can store static information and instructions, random access memory (random access memory, RAM) or other type of dynamic storage device that can store information and instructions, as well as electrically erasable programmable read-only memory (EEPROM), magnetic disk storage or other magnetic storage devices, or any other medium that can be used to carry or store desired program code in the form of instructions or data structures and that can be accessed by a computer.
In a possible implementation, the memory 32 may exist separately from the processor 31, and the memory 32 may be connected to the processor 31 by a bus 34 for storing instructions or program code. The processor 31, when calling and executing instructions or program code stored in the memory 32, is capable of implementing the error compensation method provided in the embodiments of the present invention described below.
In the embodiment of the present application, the software programs stored in the memory 32 are different for the working device 101, the measuring device 102, and the server 103, so the functions realized by the working device 101, the measuring device 102, and the server 103 are different. The functions performed with respect to the respective devices will be described in connection with the following flowcharts.
In another possible implementation, the memory 32 may also be integrated with the processor 31.
A communication interface 33 for connecting the communication device with other devices via a communication network, which may be an ethernet, a radio access network, a wireless local area network (wireless local area networks, WLAN) or the like. The communication interface 33 may include a receiving unit for receiving data, and a transmitting unit for transmitting data.
Bus 34 may be an industry standard architecture (industry standard architecture, ISA) bus, an external device interconnect (peripheral component interconnect, PCI) bus, or an extended industry standard architecture (extended industry standard architecture, EISA) bus, among others. The bus may be classified as an address bus, a data bus, a control bus, etc. For ease of illustration, only one thick line is shown in fig. 3, but not only one bus or one type of bus.
Fig. 4 shows another hardware configuration of the communication apparatus in the embodiment of the present application. As shown in fig. 4, the communication device may include a processor 41 and a communication interface 42. The processor 41 is coupled to a communication interface 42.
The function of the processor 41 may be as described above with reference to the processor 31. The processor 41 also has a memory function and can function as the memory 32.
The communication interface 42 is used to provide data to the processor 41. The communication interface 42 may be an internal interface of the communication device or an external interface of the communication device (corresponding to the communication interface 33).
It should be noted that the structure shown in fig. 3 (or fig. 4) does not constitute a limitation of the communication apparatus, and the communication apparatus may include more or less components than those shown in fig. 3 (or fig. 4), or may combine some components, or may be arranged in different components.
The error compensation method provided by the embodiment of the application is described in detail below with reference to the accompanying drawings.
The error compensation method provided by the embodiment of the application comprises the following steps: the flow of the server establishing the correspondence between the standard position and the error compensation data (simply referred to as "correspondence establishing flow") and the flow of the server determining the actual work position by performing error compensation on the standard position (simply referred to as "error compensating flow").
The "correspondence relation establishment flow" is described first below.
As shown in fig. 5, the method of the "correspondence establishment flow" includes: S501-S503.
S501, the server acquires measurement data of the measurement position corresponding to the standard position of the working equipment.
Specifically, before error compensation is performed on a standard position of an operation device performing an operation, the server may acquire measurement data of a measurement position of the operation device corresponding to the standard position, so that the server may determine a straightness error and a linear displacement error according to the measurement data.
Optionally, the method for obtaining the measurement data of the measurement position corresponding to the standard position by the server may be: and after the measurement equipment measures the obtained measurement data, sending the measurement data to the server. The server receives the measurement data sent by the measurement device.
Alternatively, the measurement device may be a laser interferometer and a measurement mirror set.
Alternatively, the measurement position may be a position preset by the server, or may be a manually set position.
Alternatively, the server may set the position of the work equipment on the movement locus in the first direction and the position on the movement locus in the second direction as the measurement positions.
Wherein the first direction is perpendicular to the second direction.
Alternatively, the server may determine a movement direction of the gantry along one of the side rails in the working apparatus as a first direction, and a direction perpendicular to the first direction as a second direction. .
Wherein, the measurement location includes: a first measurement position, a second measurement position, a third measurement position, a fourth measurement position, and a fifth measurement position.
Alternatively, the server may set one or more positions on the movement trajectory of the working device in the second direction as the first measurement position.
Optionally, the method for setting the first measurement position to a plurality of positions may be: a motion trace in the second direction (length S 1 ) Setting j spacing distances as D Y Wherein j is a positive integer, S 1 And D Y Is positive, satisfies: j=s 1 /D Y +1。
Alternatively, the server may set one or more positions on the movement trajectory of the work equipment in the first direction as the second measurement position.
Optionally, the method for setting the second measurement position to a plurality of positions may be: a movement trace in a first direction (length S 2 ) Setting i spacing distances as D X Wherein i is a positive integer, S 2 And D X Is positive, satisfies: i=s 2 /D X +1。
Alternatively, the server may set one or more positions of the working device on the first movement trajectory in the first direction as the third measurement position, and determine a mapped position of the third measurement position on the second trajectory in the first direction as the fourth measurement position.
Optionally, the method for setting the third measurement position to a plurality of positions may be: a movement trace in a first direction (length S 2 ) Setting i spacing distances as D X Wherein i is a positive integer, S 2 And D X Is positive, satisfies: i=S 2 /D X +1。
Alternatively, the server may set the second measurement location to be the same as the third measurement location, or set the second measurement location to be the same as the fourth measurement location.
Alternatively, the server may set one or more positions on the movement trajectory of the working device in the second direction as the fifth measurement position.
Optionally, the method for setting the fifth measurement position to a plurality of positions may be: a motion trace in the second direction (length S 1 ) Setting j spacing distances as D Y Wherein j is a positive integer, S 1 And D Y Is positive, satisfies: j=s 1 /D Y +1。
Alternatively, the server may set the fifth measurement location to be the same as the first measurement location.
When the measurement positions include a first measurement position and a second measurement position, the measurement apparatus includes a laser interferometer and a measurement mirror group (including a right angle mirror, a mirror, and a spectroscope). The laser interferometer can be arranged on the inner side of the guide rail, the light path of laser is parallel to the guide rail, the right-angle reflecting mirror is arranged on the light path, the reflecting mirror is arranged at the intersection position of the light path reflected by the right-angle reflecting mirror and the inner side of the other guide rail, and the spectroscope is arranged on one side of the working part group facing the laser interferometer.
Optionally, in the moving process of the gantry along the guide rail, when the actual moving direction of the working part group fixed on the gantry has a certain inclination angle with the direction of the optical path between the laser interferometer and the right angle mirror when measuring the straightness error, the server may determine the direction of the optical path as a first direction and determine a direction perpendicular to the first direction as a second direction.
When the measurement positions include the third measurement position and the fourth measurement position, the measurement apparatus includes a laser interferometer and a measurement mirror group (including a mirror).
Alternatively, the measuring device may be one or two sets when the measuring positions comprise a third measuring position and a fourth measuring position.
When the measuring equipment is a group, the laser interferometer can be arranged at two parallel positions on the inner side of the guide rail twice, the light path of the laser is parallel to the guide rail, and the reflecting mirror is arranged at the intersection position of the light path and one side of the gantry, which faces the laser interferometer.
When the measuring equipment is in two groups, the two laser interferometers can be respectively arranged on the inner sides of the guide rails on two sides, wherein the straight lines of the arrangement positions of the two laser interferometers are perpendicular to the guide rails, the condition that the two laser interferometers are not affected by each other is met, the light path of the laser is parallel to the guide rails, and the reflecting mirror is arranged at the intersection position of the light path and one side of the gantry, which faces the laser interferometers.
When the measurement position includes the fifth measurement position, the measurement apparatus includes a laser interferometer and a measurement mirror group (including a mirror). Wherein the laser interferometer is arranged at one side of the gantry, and the reflecting mirror is arranged at one side of the working part group facing the laser interferometer.
Wherein the measurement data includes a plurality of first linear errors of the first measurement location and a plurality of second linear errors of the second measurement location, and a plurality of first linear displacement errors of the third measurement location, a plurality of second linear displacement errors of the fourth measurement location, and a plurality of third linear displacement errors of the fifth measurement location.
Optionally, when the first measurement location is a plurality of locations, the plurality of first linearity errors includes a plurality of sets of first linearity errors for each location of the first measurement location.
Optionally, when the second measurement location is a plurality of locations, the plurality of second straightness errors includes a plurality of sets of second straightness errors for each location of the second measurement location.
Optionally, when the third measurement position is a plurality of positions, the plurality of first linear displacement errors includes a plurality of sets of first linear displacement errors for each position of the third measurement position, and the plurality of second linear displacement errors includes a plurality of sets of second linear displacement errors for each position of the fourth measurement position.
Optionally, when the fifth measurement location is a plurality of locations, the plurality of third linear displacement errors comprises a plurality of sets of third linear displacement errors for each location of the fifth measurement location.
Illustratively, as shown in fig. 6, the preset laser interferometer 601 is disposed inside the guide rail 610, the optical path 620 of the laser light is parallel to the guide rail 610, the right-angle mirror 602 is disposed on the optical path 620, the mirror 603 is disposed at the intersection position of the optical path 621 reflected by the right-angle mirror 602 and the inside of the guide rail 611, and the beam splitter 604 is disposed at the left side of the working unit 612.
As shown in fig. 6 (1), a measurement track and an optical path 621 (with a length S) preset in the second direction of the working portion set 612 1 ) Overlapping. Gantry 613 is controlled to move to a preset position such that beam splitter 604 passes through optical path 621. Then, the working unit 612 is controlled to make N along the gantry 613 1 Group back and forth movement, the server sets j interval distances as D Y Is provided for the first measuring position of the sensor. Measuring first linear errors of each first measuring position, obtaining 2j first linear errors by each group of reciprocating motion servers, obtaining 2N by each first measuring position 1 A first linearity error.
As shown in fig. 6 (2), the measurement track and the optical path 620 (the length is S) preset in the first direction of the working portion set 612 2 ) Overlapping. The working group 612 is controlled to a preset position such that the beam splitter 604 passes through the optical path 620. Then, control gantry 613 makes N along rail 610 2 Group back and forth movement, the server sets i interval distances as D X Is provided for the second measuring position of (a). Measuring second straightness errors of each second measuring position, obtaining 2i second straightness errors by each group of reciprocating motion servers, and obtaining 2N by each second measuring position 2 And a second linearity error.
Still another exemplary, as shown in fig. 7, the preset laser interferometer 701 is disposed inside the guide rail 710, the optical path 720 of the laser light is parallel to the guide rail 710, and the reflecting mirror 702 is disposed at the intersection position of the optical path 720 and the left side of the gantry 712; the preset laser interferometer 703 is disposed inside the guide rail 711, the optical path 721 of the laser light is parallel to the guide rail 711, and the reflecting mirror 704 is disposed at the intersection position of the optical path 721 and the left side of the gantry 712.
Is preset on a first track (length S of the gantry 712 2 ) Cover the optical path 720, a second track (length S 2 ) Covering the optical path 721. Control gantry 712 along guide rail 710 and guideRail 711 does N 3 Group back and forth movement, the server sets the i interval distances on the first track as D X And determining the position of the third measurement position mapped onto the second track as i fourth measurement positions. Measuring a first linear displacement error of each third measuring position and a second linear displacement error of each fourth measuring position, obtaining 2i first linear displacement errors and 2i second linear displacement errors by each group of reciprocating motion servers, obtaining 2N by each third measuring position 3 Each fourth measuring position obtains 2N 3 And a second linear displacement error.
S502, the server determines straightness errors and linear displacement errors according to the measured data.
Specifically, after the measurement data is obtained, the server may determine a straightness error and a linear displacement error corresponding to the standard position according to the measurement data, so that the server may determine error compensation data corresponding to the standard position according to the straightness error and the linear displacement error, and establish a correspondence between the standard position and the error compensation data.
The straightness error comprises straightness error in a first direction and straightness error in a second direction. The linear displacement error includes a linear displacement error in the first direction and a linear displacement error in the second direction.
Optionally, when the server determines the straightness error from the measurement data, the measurement data includes a plurality of first straightness errors and a plurality of second straightness errors. The server may determine a linearity error in the first direction corresponding to the standard position from the plurality of first linearity errors, and determine a linearity error in the second direction corresponding to the standard position from the plurality of second linearity errors.
Still further optionally, when the server determines the linear displacement error from the measurement data, the measurement data includes a plurality of first linear displacement errors, a plurality of second linear displacement errors, and a plurality of third linear displacement errors. The server may determine a linear displacement error in the first direction corresponding to the standard position from the plurality of first linear displacement errors and the plurality of second linear displacement errors, and determine a linear displacement error in the second direction corresponding to the standard position from the plurality of third linear displacement errors.
S503, the server determines error compensation data corresponding to the standard position according to the straightness error and the linear displacement error, and establishes a corresponding relation.
Specifically, after determining the straightness error and the linear displacement error, the server may determine error compensation data corresponding to the standard position according to the straightness error and the linear displacement error, and establish a correspondence between the standard position and the error compensation data.
Wherein the error compensation data includes error compensation data in a first direction and error compensation data in a second direction.
Alternatively, the server may determine the error compensation data in the first direction according to the straightness error in the first direction and the linear displacement error in the first direction, and then determine the error compensation data in the second direction according to the straightness error in the second direction and the linear displacement error in the second direction.
Optionally, the server may further determine error data corresponding to the standard position according to the straightness error and the linear displacement error, and establish a correspondence between the standard position and the error data.
In one embodiment, as shown in fig. 8, when the measurement data includes a plurality of first straightness errors of a first measurement position in a first direction and a plurality of second straightness errors of a second measurement position in a second direction, the method for determining the straightness errors by the server according to the measurement data includes: S801-S802.
S801, the server determines an average value of a plurality of first linearity errors as a linearity error of a standard position corresponding to the first measurement position in the first direction.
Specifically, after the measurement data is obtained, the server may obtain an average value of the plurality of first linearity errors according to the plurality of first linearity errors of the first measurement position in the first direction in the measurement data, and determine the average value of the plurality of first linearity errors as the linearity error of the standard position corresponding to the first measurement position in the first direction.
Wherein the server determines the same standard position as the position information of the first measured position in the second direction as the standard position corresponding to the first measured position.
Optionally, when the actual motion direction of the working part group has a certain inclination angle with the light path direction between the laser interferometer and the right angle reflecting mirror when the straightness error is measured, after obtaining the average value of the plurality of first straightness errors, the server may determine the straightness error of the standard position corresponding to the first measurement position in the first direction according to the average value of the plurality of first straightness errors, the inclination angle and the position information of the standard position in the first direction.
Wherein the average value of the plurality of first linear errors isThe inclination angle between the actual motion direction of the working part group and the light path direction between the laser interferometer and the right-angle reflecting mirror when the straightness error is measured is theta, and the position information of the standard position in the second direction is Y j The straightness error of the standard position corresponding to the first measurement position in the first direction is DeltaX Y The formula is satisfied:
exemplary, preset θ=0.1°, the position information of the standard position in the second direction is Y j =100.00 mm, the server determines the average of the first linear errors of the first measurement bits asThe server may calculate 0.001+100.00×tan0.1°= 0.1755 and determine that the straightness error of the standard position in the first direction is Δx Y ＝0.1755mm。
S802, the server determines an average value of the plurality of second straightness errors as the straightness error of the standard position corresponding to the second measurement position in the second direction.
Specifically, after the measurement data is obtained, the server may obtain an average value of the plurality of second straightness errors according to the plurality of second straightness errors of the second measurement position in the second direction in the measurement data, and determine the average value of the plurality of second straightness errors as the straightness error of the standard position corresponding to the second measurement position in the second direction.
Wherein the server determines the same standard position as the position information of the second measurement position in the first direction as the standard position corresponding to the second measurement position.
Optionally, when the actual motion direction of the working part group has a certain inclination angle with the light path direction between the laser interferometer and the right angle reflecting mirror when the straightness error is measured, after obtaining the average value of the plurality of second straightness errors, the server may determine the straightness error of the standard position corresponding to the second measurement position in the second direction according to the average value of the plurality of second straightness errors, the inclination angle and the position information of the standard position in the second direction.
Wherein the average value of the second linearity errors isThe inclination angle between the actual motion direction of the working part group and the light path direction between the laser interferometer and the right-angle reflecting mirror when the straightness error is measured is theta, and the position information of the standard position in the first direction is X i The straightness error of the standard position corresponding to the second measurement position in the second direction is delta Y X The offset displacement of the first measuring position in the optical path direction in the second direction is delta Y 0 The formula is satisfied:
exemplary, the preset θ=0.1°, the position information of the standard position in the second direction is X i The offset displacement of the first measurement position in the actual movement direction in the second direction is =200.00 mm is Δy 0 =0.01 mm, the server determines an average of a plurality of second straightness errors of the second measurement position asThe server can calculate 0.02-200.00 Xtan 0.1-0.01 = -0.3391, and determine the straightness error of the standard position in the second direction as delta Y X ＝-0.3391mm。
The embodiment of the application is not limited to the sequence of S801 and S802. The server may perform S801 first and then S802; s802 may be executed first, and S801 may be executed later; s801 and S802 may also be performed simultaneously.
In one embodiment, as shown in fig. 9, when the measurement data includes a plurality of first linear displacement errors of a third measurement position on a first trajectory, a plurality of second linear displacement errors of a fourth measurement position on a second trajectory, and a plurality of third linear displacement errors of a fifth measurement position in a second direction, the method of determining the linear displacement errors by the server from the measurement data includes: S901-S902.
S901, the server determines a linear displacement error of a standard position corresponding to the third measurement position and the fourth measurement position in the first direction according to an average value of the plurality of first linear displacement errors and an average value of the plurality of second linear displacement errors.
Specifically, after the measurement data is obtained, the server may obtain an average value of the plurality of first linear displacement errors according to the plurality of first linear displacement errors of the third measurement position on the first track in the measurement data, and obtain an average value of the plurality of second linear displacement errors according to the plurality of second linear displacement errors of the fourth measurement position on the second track in the measurement data. Then, the server determines the linear displacement error of the standard position corresponding to the third measurement position and the fourth measurement position in the first direction based on the average value of the plurality of first linear displacement errors and the average value of the plurality of second linear displacement errors.
Wherein the server determines a standard position between the third measurement position and the fourth measurement position as a standard position corresponding to the third measurement position and the fourth measurement position.
The average value of the first linear displacement errors isThe average value of the plurality of second linear displacement errors isThe position information of the standard position corresponding to the third measuring position and the fourth measuring position in the second direction is Y X The position information of the third measuring position in the second direction is Y i1 The position information of the fourth measuring position in the second direction is Y i2 The linear displacement error of the standard position in the first direction is DeltaX X The formula is satisfied:
s902, the server determines an average value of the plurality of third linear displacement errors as a linear displacement error in the second direction of the standard position corresponding to the fifth measurement position.
Specifically, after the measurement data is acquired, the server may obtain an average value of the plurality of third linear displacement errors according to the plurality of third linear displacement errors of the fifth measurement position in the second direction, and determine the average value of the plurality of third linear displacement errors as the linear displacement error of the standard position corresponding to the fifth measurement position in the second direction.
Wherein the server determines the same standard position as the position information of the fifth measurement position in the second direction as the standard position corresponding to the fifth measurement position.
The embodiment of the application is not limited to the sequence of S901 and S902. The server may perform S901 first and then S902; s902 may be executed first, and S901 may be executed later; s901 and S902 may also be performed simultaneously.
In one embodiment, referring to fig. 5, as shown in fig. 10, the method for determining error compensation data corresponding to the standard position and establishing a correspondence by the server in S503 specifically includes: S1001-S1003.
S1001, the server determines, as error compensation data in the first direction, the inverse number of the sum of the straightness error in the first direction and the linear displacement error in the first direction.
Specifically, after determining the straightness error and the linear displacement error of the standard position in the first direction, the server determines the opposite number of the sum of the straightness error and the linear displacement error as error compensation data in the first direction.
S1002, the server determines the inverse number of the sum of the straightness error in the second direction and the linear displacement error in the second direction as error compensation data in the second direction.
Specifically, after determining the straightness error and the linear displacement error of the standard position in the second direction, the server determines the opposite number of the sum of the straightness error and the linear displacement error as error compensation data in the second direction.
The embodiment of the present application is not limited to the order of S1001 and S1002. The server may perform S1001 first and then S1002; s1002 may be executed first, and S1001 may be executed later; s1001 and S1002 may also be performed simultaneously.
S1003, the server determines error compensation data in the first direction and error compensation data in the second direction as error compensation data corresponding to the standard position, and obtains a corresponding relation.
Specifically, after determining the error compensation data in the first direction and the error compensation data in the second direction, the server determines the error compensation data of the standard position in the first direction and the error compensation data of the standard position in the second direction as the error compensation data corresponding to the standard position, and obtains the corresponding relation between the standard position and the error compensation data.
Optionally, when the correspondence is a correspondence between the standard position and the error data, the server may establish the correspondence between the standard position and the error data according to the error data in the first direction and the error data in the second direction.
Exemplary, the preset first direction is X direction, the second direction is Y direction, and the standard position (i, j) represents that the position information in the first direction is X i And the position information in the second direction is Y j Is a standard location of (c). The server determines the error compensation data of the standard position (A, A) in the X direction as delta X (A，A) The error compensation data in the Y direction is Δy (A，A) The method comprises the steps of carrying out a first treatment on the surface of the Error compensation data of the standard position (A, B) in the X direction is DeltaX (A，B) The error compensation data in the Y direction is Δy (A，B) The method comprises the steps of carrying out a first treatment on the surface of the Error compensation data of the standard position (B, B) in the X direction is DeltaX (B，B) The error compensation data in the Y direction is Δy (B，B) The method comprises the steps of carrying out a first treatment on the surface of the Error compensation data of the standard position (B, A) in the X direction is DeltaX (B，A) The error compensation data in the Y direction is Δy (B，A) . The server may establish a correspondence relationship according to the above data as shown in table 1.
TABLE 1
X A X B …
Y A [ΔX (A，A) ，ΔY (A，A) ] [ΔX (B，A) ，ΔY (B，A) ] …
Y B [ΔX (A，B) ，ΔY (A，B) ] [ΔX (B，B) ，ΔY (B，B) ] …
… … … …
The "error compensation flow" is described first below.
As shown in fig. 11, the method of the "error compensation flow" includes: S1101-S1103.
S1101, the server acquires the target standard position of the working equipment.
Specifically, in order to determine the actual working position of the working device based on the target error compensation data of the target standard position, the server acquires the target standard position of the working device.
Optionally, the method for obtaining the target standard position by the server may be: the server acquires an original standard position of the work equipment, and then the server determines a plurality of standard positions adjacent to the original standard position as target standard positions.
Optionally, the method for obtaining the target standard position by the server may further be: the server acquires an original standard position of the operation equipment, and then judges whether the original standard position is in a corresponding relation. When the original standard position is in the correspondence relationship, the server determines the original standard position as the target standard position. When the original standard position is not in the correspondence relationship, the server determines a plurality of standard positions adjacent to the original standard position as target standard positions.
S1102, the server reads the corresponding relation between the pre-established standard position and the error compensation data, and determines target error compensation data corresponding to the target standard position.
The error compensation data in the corresponding relation is determined according to the linear displacement error and the straightness error.
Specifically, in order to compensate the target standard position of the working device in the working process, the server may read the corresponding relationship between the pre-established standard position and the error compensation data, and determine the target error compensation data corresponding to the target standard position.
Alternatively, when the target standard position is a plurality of standard positions, the server may determine target error compensation data corresponding to each of the plurality of standard positions from the correspondence.
Wherein the target error compensation data includes target error compensation data in a first direction and target error compensation data in a second direction.
Optionally, when the correspondence is a correspondence between the standard position and the error data, the server may determine target error data corresponding to the target standard position.
S1103, the server determines the actual working position of the working equipment according to the target standard position and the target error compensation data.
Specifically, after determining the target error compensation data, the server may determine an actual working position of the working device according to the target standard position and the target error compensation data.
Alternatively, the server may determine the actual error compensation data based on the original standard position, the target standard position, and the target error compensation data, and then determine the actual work position based on the original standard position and the actual error compensation data.
Optionally, when the correspondence is a correspondence between the standard position and the error data, the server may determine an actual working position of the working device according to the target standard position and the target error data.
In one embodiment, in conjunction with fig. 11, as shown in fig. 12, a method for obtaining a target standard position of a working device by a server in S1101 includes: S1201-S1202.
S1201, the server acquires the original standard position of the working device.
Specifically, in order to determine a target standard position corresponding to the original standard position of the working device, the server may acquire the original standard position of the working device.
Optionally, the original standard position may be a preset operation position of the server, or may be a manually set operation position.
S1202, the server determines a target standard position corresponding to the original standard position.
Specifically, after the original standard position is acquired, the server may determine a plurality of standard positions adjacent to the original standard position as target standard positions.
Alternatively, when the original standard position is in the correspondence relationship, the server may determine the original standard position as the target standard position.
Optionally, when the target standard position includes a first target standard position, a second target standard position, a third target standard position, and a fourth target standard position, the first target standard position is identical to the second target standard position in the position information in the second direction, the first target standard position is identical to the fourth target standard position in the position information in the first direction, the third target standard position is identical to the second target standard position in the position information in the first direction, and the third target standard position is identical to the fourth target standard position in the position information in the second direction.
Exemplary, the preset first direction is X direction, the second direction is Y direction, and the standard position (i, j) represents that the position information in the first direction is X i And the position information in the second direction is Y j Is a standard location of (c). As shown in fig. 13, the server acquires the original standard position 1301, the original standard position 1302, and the original standard position 1303 of the working apparatus. The corresponding relation between the standard position and the error compensation data established by the preset server comprises a standard position 1311, a standard position 1312, a standard position 1313 and a standard position 1314.
As can be seen from fig. 13, the original standard position 1301 is in the correspondence relationship, and therefore, the server determines the standard position 1313 as the target standard position corresponding to the original standard position 1301.
As can be seen from fig. 13, the original standard position 1302 is not in the correspondence relationship, and the server determines the standard position 1313 and the standard position 1314 adjacent to the original standard position 1302 as the target standard position corresponding to the original standard position 1302.
As can be seen from fig. 13, the original standard position 1303 is not in the correspondence relationship, and the server determines the standard position 1311, the standard position 1312, the standard position 1313, and the standard position 1314 adjacent to the original standard position 1303 as target standard positions corresponding to the original standard position 1303.
In one embodiment, in conjunction with fig. 12, as shown in fig. 14, the method for determining the actual working position of the working device by the server in S1103 according to the target standard position and the target error compensation data includes: S1401-S1403.
S1401, the server determines actual error compensation data according to the original standard position, the target standard position, and the target error compensation data.
Wherein the actual error compensation data includes actual error compensation data in the first direction and actual error compensation data in the second direction.
Specifically, after the original standard position, the target standard position, and the target error compensation data are acquired, the server may determine the actual error compensation data.
Alternatively, the server may determine the target error compensation data as the actual error compensation data when the target standard position is the original standard position.
Alternatively, when the target standard position is not the original standard position, the server may determine the actual error compensation data based on the original standard position, the target standard position, and the target error compensation data.
Optionally, when the correspondence is a correspondence between the standard position and the error data, the server may determine the actual error data according to the original standard position, the target standard position, and the target error data.
S1402, the server determines the sum of the position information of the original standard position in the first direction and the actual error compensation data in the first direction as the position information of the actual work position in the first direction.
Specifically, after determining the actual error compensation data, the server determines the sum of the position information of the original standard position in the first direction and the actual error compensation data in the first direction as the position information of the actual work position in the first direction.
Optionally, when the correspondence is a correspondence between the standard position and the error data, the server may determine a difference between the position information of the original standard position in the first direction and the target error data in the first direction as the position information of the actual working position in the first direction.
S1403, the server determines the sum of the position information of the original standard position in the second direction and the actual error compensation data in the second direction as the position information of the actual work position in the second direction.
Specifically, after determining the actual error compensation data, the server determines the sum of the position information of the original standard position in the second direction and the actual error compensation data in the second direction as the position information of the actual work position in the second direction.
Optionally, when the correspondence is a correspondence between the standard position and the error data, the server may determine a difference between the position information of the original standard position in the second direction and the target error data in the second direction as the position information of the actual working position in the second direction.
The embodiment of the application is not limited to the sequence of S1402 and S1403. The server may perform S1402 first and S1403 later; s1403 may be executed first, and S1402 may be executed later; s1402 and S1403 may also be performed simultaneously.
In one embodiment, in combination with 14, as shown in fig. 15, the method for determining actual error compensation data by the server in S1401 according to the original standard position, the target standard position and the target error compensation data includes: s1501 to S1502.
S1501, the server determines actual error compensation data in the first direction according to the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, and the target error compensation data in the first direction.
Wherein the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, the target error compensation data in the first direction and the actual error compensation data in the first direction satisfy the following formulas:
wherein DeltaX P For compensating data for actual errors in the first direction, deltaX A Compensating data for a target error of a first target standard position in a first direction, deltaX B Compensating data for a target error of the second target standard position in the first direction, deltaX C Compensating data for a target error of the third target standard position in the first direction, deltaX D Compensating data, X for a target error of a fourth target standard position in the first direction P For the position information of the original standard position in the first direction, Y P X is the position information of the original standard position in the second direction A X is the position information of the first target standard position in the first direction B For the position information of the second target standard position in the first direction, Y A For the position information of the first target standard position in the second direction, Y D Is the position information of the fourth target standard position in the second direction.
S1502, the server determines actual error compensation data in the second direction according to the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, and the target error compensation data in the second direction.
Wherein the position information of the original standard position in the first direction and the position information of the target standard position in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, the target error compensation data in the second direction and the actual error compensation data in the second direction satisfy the following formulas:
Wherein DeltaY P For compensating the data for actual errors in the second direction ΔY A Compensating data for a target error of the first target standard position in the second direction, Δy B Compensating data for a target error of the second target standard position in the second direction, Δy C Compensating data for a target error of the third target standard position in the second direction, Δy D And compensating data for the target error of the fourth target standard position in the second direction.
In summary, the error compensation device in the embodiment of the application obtains the target standard position of the operation equipment, reads the corresponding relation between the pre-established standard position and the error compensation data, wherein the error compensation data in the corresponding relation is determined according to the linear displacement error and the straightness error, determines the target error compensation data corresponding to the target standard position, and then determines the actual operation position of the operation equipment according to the target standard position and the target error compensation data. Therefore, the influence of error coupling is added to the error compensation data, so that the error compensation range is enlarged, and the positioning precision of the working equipment is effectively improved.
The foregoing description of the solution provided by the embodiments of the present application has been mainly presented in terms of a method. To achieve the above functions, it includes corresponding hardware structures and/or software modules that perform the respective functions. Those of skill in the art will readily appreciate that the various illustrative elements and algorithm steps described in connection with the embodiments disclosed herein may be implemented as hardware or combinations of hardware and computer software. Whether a function is implemented as hardware or computer software driven hardware depends upon the particular application and design constraints imposed on the solution. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the present application.
The embodiment of the application can divide the functional modules of the server according to the method example, for example, each functional module can be divided corresponding to each function, or two or more functions can be integrated in one processing module. The integrated modules may be implemented in hardware or in software functional modules. Optionally, the division of the modules in the embodiment of the present application is schematic, which is merely a logic function division, and other division manners may be implemented in practice.
Fig. 16 is a schematic structural diagram of an error compensation device according to an embodiment of the present application. The error compensation means may be used to perform the method of error compensation shown in fig. 5, 8, 9, 10, 11, 12, 14 or 15. The error compensation device shown in fig. 16 includes: an acquisition unit 1601, and a determination unit 1602.
An acquisition unit 1601 for acquiring a target standard position of the work equipment. For example, in connection with fig. 11, the acquisition unit 1601 is configured to execute S1101.
A determining unit 1602, configured to read a pre-established correspondence between the standard position and the error compensation data, and determine target error compensation data corresponding to the target standard position acquired by the acquiring unit 1601. For example, in connection with fig. 11, the determining unit 1602 is configured to execute S1102.
The determining unit 1602 is further configured to determine an actual working position of the working device according to the target standard position and the target error compensation data. For example, in connection with fig. 11, the determining unit 1602 is configured to execute S1103.
Optionally, the acquiring unit 1601 is further configured to: and acquiring measurement data of the working equipment at a measurement position corresponding to the standard position. For example, in connection with fig. 5, the acquisition unit 1601 is used to perform S501.
The determining unit 1602 is further configured to determine a straightness error and a linear displacement error according to the measurement data acquired by the acquiring unit 1601. For example, in connection with fig. 5, the determining unit 1602 is configured to execute S502.
The determining unit 1602 is further configured to determine error compensation data corresponding to the standard position according to the straightness error and the linear displacement error, and establish a corresponding relationship. For example, in connection with fig. 5, the determining unit 1602 is configured to execute S503.
Optionally, the determining unit 1602 is specifically configured to: determining an average value of the plurality of first straightness errors as the straightness error of the standard position corresponding to the first measurement position in the first direction; and determining an average value of the plurality of second straightness errors as the straightness error of the standard position corresponding to the second measurement position in the second direction. For example, in connection with fig. 8, the determining unit 1602 is configured to execute S801-S802.
Optionally, the determining unit 1602 is specifically configured to: determining linear displacement errors of standard positions corresponding to the third measurement position and the fourth measurement position in the first direction according to the average value of the first linear displacement errors and the average value of the second linear displacement errors; an average value of the plurality of third linear displacement errors is determined as a linear displacement error in the second direction of the standard position corresponding to the fifth measurement position. For example, in connection with fig. 9, the determining unit 1602 is configured to perform S901-S902.
Optionally, the determining unit 1602 is specifically configured to: the average value of the plurality of first linear displacement errors, the average value of the plurality of second linear displacement errors, and the linear displacement error of the standard position in the first direction satisfy the following formula:
wherein DeltaX X Is the linear displacement error of the standard position in the first direction, Y X Is the position information of the standard position in the second direction, Y i1 For the third measuring position in the second directionPositional information, Y i2 For the position information of the fourth measuring position in the second direction,is the average value of a plurality of first linear displacement errors, < >>Is the average of the plurality of second linear displacement errors.
Optionally, the determining unit 1602 is specifically configured to: determining an inverse number of a sum of the straightness error in the first direction and the linear displacement error in the first direction as error compensation data in the first direction; determining an inverse number of a sum of the straightness error in the second direction and the linear displacement error in the second direction as error compensation data in the second direction; and determining the error compensation data in the first direction and the error compensation data in the second direction as error compensation data corresponding to the standard position, and obtaining a corresponding relation. For example, in connection with fig. 10, the determining unit 1602 is configured to execute S1001-S1003.
Optionally, the acquiring unit 1601 is specifically configured to: acquiring an original standard position of the operation equipment; and determining a target standard position corresponding to the original standard position. For example, in connection with fig. 12, the acquisition unit 1601 is used to execute S1201-S1202.
Optionally, the determining unit 1602 is specifically configured to: determining actual error compensation data according to the original standard position acquired by the acquisition unit 1601, the target standard position acquired by the acquisition unit 1601, and the target error compensation data; the actual error compensation data includes actual error compensation data in a first direction and actual error compensation data in a second direction; determining the sum of the position information of the original standard position in the first direction and the actual error compensation data in the first direction as the position information of the actual operation position in the first direction; and determining the sum of the position information of the original standard position in the second direction and the actual error compensation data in the second direction as the position information of the actual working position in the second direction. For example, in connection with fig. 14, the determination unit 1602 is used to execute S1401-S1403.
Optionally, the determining unit 1602 is specifically configured to: determining actual error compensation data in the first direction according to the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, and the target error compensation data in the first direction; the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, the target error compensation data in the first direction, and the actual error compensation data in the first direction satisfy the following formulas:
Wherein DeltaX P For compensating data for actual errors in the first direction, deltaX A Compensating data for a target error of a first target standard position in a first direction, deltaX B Compensating data for a target error of the second target standard position in the first direction, deltaX C Compensating data for a target error of the third target standard position in the first direction, deltaX D Compensating data, X for a target error of a fourth target standard position in the first direction P For the position information of the original standard position in the first direction, Y P X is the position information of the original standard position in the second direction A X is the position information of the first target standard position in the first direction B For the position information of the second target standard position in the first direction, Y A For the position information of the first target standard position in the second direction, Y D Position information of the fourth target standard position in the second direction; the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, the target error compensation data in the second direction, and the actual error compensation data in the second direction satisfy the following formulas:
Wherein DeltaY P For compensating the data for actual errors in the second direction ΔY A Compensating data for a target error of the first target standard position in the second direction, Δy B Compensating data for a target error of the second target standard position in the second direction, Δy C Compensating data for a target error of the third target standard position in the second direction, Δy D And compensating data for the target error of the fourth target standard position in the second direction. For example, in connection with fig. 15, the determining unit 1602 is configured to execute S1501-S1502.
Embodiments of the present application also provide a computer-readable storage medium including computer-executable instructions that, when executed on a computer, cause the computer to perform the error compensation method provided in the above embodiments.
The embodiment of the application also provides a computer program which can be directly loaded into a memory and contains software codes, and the computer program can realize the error compensation method provided by the embodiment after being loaded and executed by a computer.
Those skilled in the art will appreciate that in one or more of the examples described above, the functions described in the present application may be implemented in hardware, software, firmware, or any combination thereof. When implemented in software, these functions may be stored on or transmitted over as one or more instructions or code on a computer-readable medium. Computer-readable media includes both computer-readable storage media and communication media including any medium that facilitates transfer of a computer program from one place to another. A storage media may be any available media that can be accessed by a general purpose or special purpose computer.
From the foregoing description of the embodiments, it will be apparent to those skilled in the art that, for convenience and brevity of description, only the above-described division of functional modules is illustrated, and in practical application, the above-described functional allocation may be implemented by different functional modules according to needs, i.e. the internal structure of the apparatus is divided into different functional modules to implement all or part of the functions described above.
In the several embodiments provided by the present application, it should be understood that the disclosed apparatus and method may be implemented in other manners. For example, the above-described embodiments of the apparatus are merely illustrative, and the division of modules or units, for example, is merely a logical function division, and other manners of division are possible when actually implemented. For example, multiple units or components may be combined or may be integrated into another device, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be an indirect coupling or communication connection via some interfaces, devices or units, which may be in electrical, mechanical or other form. The units described as separate parts may or may not be physically separate, and the parts shown as units may be one physical unit or a plurality of physical units, may be located in one place, or may be distributed in a plurality of different places. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in the embodiments of the present application may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit. The integrated units may be implemented in hardware or in software functional units. The integrated units, if implemented in the form of software functional units and sold or used as stand-alone products, may be stored in a readable storage medium. Based on such understanding, the technical solution of the embodiments of the present application may be essentially or a part contributing to the prior art or all or part of the technical solution may be embodied in the form of a software product stored in a storage medium, including several instructions for causing a device (may be a single-chip microcomputer, a chip or the like) or a processor (processor) to perform all or part of the steps of the method described in the embodiments of the present application. And the aforementioned storage medium includes: a usb disk, a removable hard disk, a ROM, a RAM, a magnetic disk, or an optical disk, etc.
The foregoing is merely illustrative of the present application, and the present application is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present application should be included in the present application. Therefore, the protection scope of the application is subject to the protection scope of the claims.

Claims (14)

1. An error compensation method, comprising:
acquiring measurement data of a measurement position corresponding to a standard position of the operation equipment;
determining a straightness error according to the measurement data; the straightness error includes: straightness error in the first direction and straightness error in the second direction; the first direction is perpendicular to the second direction; the measurement data includes: a plurality of first straightness errors of a first measurement position in the first direction, a plurality of second straightness errors of a second measurement position in the second direction; determining a straightness error from the measurement data, comprising: determining an average value of the plurality of first straightness errors as a straightness error of a standard position corresponding to the first measurement position in the first direction, and determining an average value of the plurality of second straightness errors as a straightness error of a standard position corresponding to the second measurement position in the second direction;
determining a linear displacement error from the measurement data; the linear displacement error includes: a linear displacement error in the first direction and a linear displacement error in the second direction; the measurement data includes: a plurality of first linear displacement errors at a third measurement location on the first trajectory, a plurality of second linear displacement errors at a fourth measurement location on the second trajectory, a plurality of third linear displacement errors at a fifth measurement location in the second direction; the first track and the second track are both motion tracks of the working equipment in the first direction; the fourth measurement position is a mapping position of the third measurement position on the second track; determining the linear displacement error from the measurement data comprises: determining a linear displacement error of a standard position corresponding to the third measurement position and the fourth measurement position in the first direction according to the average value of the first linear displacement errors and the average value of the second linear displacement errors, and determining the average value of the third linear displacement errors as the linear displacement error of the standard position corresponding to the fifth measurement position in the second direction;
Determining error compensation data corresponding to the standard position according to the straightness error and the linear displacement error, and establishing a corresponding relation between the standard position and the error compensation data;
acquiring a target standard position of the operation equipment;
reading the corresponding relation and determining target error compensation data corresponding to the target standard position;
and determining the actual working position of the working equipment according to the target standard position and the target error compensation data.
2. The error compensation method according to claim 1, wherein the determining the linear displacement error of the standard position corresponding to the third measurement position and the fourth measurement position in the first direction based on the average value of the plurality of first linear displacement errors and the average value of the plurality of second linear displacement errors specifically includes:
the average value of the plurality of first linear displacement errors, the average value of the plurality of second linear displacement errors, and the linear displacement error of the standard position in the first direction satisfy the following formula:
wherein the DeltaX X For the linear displacement error of the standard position in the first direction, the Y X For the position information of the standard position in the second direction, the Y i1 For the position information of the third measurement position in the second direction, the Y i2 For the position information of the fourth measurement position in the second direction, theThe +.>Is an average of the plurality of second linear displacement errors.
3. The error compensation method according to claim 1, wherein the determining error compensation data corresponding to the standard position according to the straightness error and the linear displacement error, and establishing a correspondence between the standard position and the error compensation data, specifically comprises:
determining an inverse number of a sum of the straightness error in the first direction and the linear displacement error in the first direction as error compensation data in the first direction;
determining an inverse number of a sum of the straightness error in the second direction and the linear displacement error in the second direction as error compensation data in the second direction;
and determining the error compensation data in the first direction and the error compensation data in the second direction as the error compensation data corresponding to the standard position, and obtaining the corresponding relation.
4. The error compensation method according to claim 1, wherein the obtaining the target standard position of the working equipment specifically includes:
acquiring an original standard position of the operation equipment;
and determining the target standard position corresponding to the original standard position.
5. The error compensation method according to claim 4, wherein the determining the actual working position of the working equipment according to the target standard position and the target error compensation data specifically includes:
determining actual error compensation data according to the original standard position, the target standard position and the target error compensation data; the actual error compensation data includes actual error compensation data in the first direction and actual error compensation data in the second direction;
determining the sum of the position information of the original standard position in the first direction and the actual error compensation data in the first direction as the position information of the actual working position in the first direction;
and determining the sum of the position information of the original standard position in the second direction and the actual error compensation data in the second direction as the position information of the actual working position in the second direction.
6. The error compensation method according to claim 5, wherein said determining actual error compensation data from said original standard position, said target standard position and said target error compensation data comprises:
determining actual error compensation data in the first direction according to the position information of the original standard position in the first direction and the position information of the target standard position in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, and the target error compensation data in the first direction; the position information of the original standard position in the first direction and the position information of the second direction, the position information of the target standard position in the first direction and the position information of the target standard position in the second direction, the target error compensation data in the first direction, and the actual error compensation data in the first direction satisfy the following formulas:
wherein the DeltaX P Compensating the data for the actual error in the first direction, the ΔX A Compensating data for a target error of a first target standard position in the first direction, the Δx B Compensating data for a target error of a second target standard position in the first direction, the Δx C Compensating data for a target error of a third target standard position in the first direction, the Δx D Compensating data for a target error of a fourth target standard position in the first direction, the X P For the position information of the original standard position in the first direction, the Y P For the position information of the original standard position in the second direction, the X A For the position information of the first target standard position in the first direction, the X B For the position information of the second target standard position in the first direction, the Y A For the position information of the first target standard position in the second direction, the Y D The first target standard position, the second target standard position, the third target standard position and the fourth target standard position are the target standard positions corresponding to the original standard positions, the first target standard position is the same as the position information of the second target standard position in the second direction, the first target standard position is the same as the position information of the fourth target standard position in the first direction, and the third target standard position is the same as the position information of the second target standard position in the first direction The position information of the third target standard position and the fourth target standard position in the second direction are the same;
determining actual error compensation data in the second direction according to the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, and the target error compensation data in the second direction; the position information of the original standard position in the first direction and the position information of the second direction, the position information of the target standard position in the first direction and the position information of the target standard position in the second direction, the target error compensation data in the second direction, and the actual error compensation data in the second direction satisfy the following formulas:
wherein the DeltaY P Compensating the data for the actual error in the second direction, the ΔY A Compensating data for a target error of the first target standard position in the second direction, the Δy B Compensating data for a target error of the second target standard position in the second direction, the Δy C Compensating data for a target error of the third target standard position in the second direction, the Δy D And compensating data for a target error of the fourth target standard position in the second direction.
7. An error compensation device, comprising: an acquisition unit and a determination unit;
the acquisition unit is used for acquiring measurement data of the measurement position corresponding to the standard position of the operation equipment;
the determining unit is used for determining straightness errors according to the measurement data; the straightness error includes: straightness error in the first direction and straightness error in the second direction; the first direction is perpendicular to the second direction; the measurement data includes: a plurality of first straightness errors of a first measurement position in the first direction, a plurality of second straightness errors of a second measurement position in the second direction; determining a straightness error from the measurement data, comprising: determining an average value of the plurality of first straightness errors as a straightness error of a standard position corresponding to the first measurement position in the first direction, and determining an average value of the plurality of second straightness errors as a straightness error of a standard position corresponding to the second measurement position in the second direction;
The determining unit is further used for determining a linear displacement error according to the measurement data; the linear displacement error includes: a linear displacement error in the first direction and a linear displacement error in the second direction; the measurement data includes: a plurality of first linear displacement errors at a third measurement location on the first trajectory, a plurality of second linear displacement errors at a fourth measurement location on the second trajectory, a plurality of third linear displacement errors at a fifth measurement location in the second direction; the first track and the second track are both motion tracks of the working equipment in the first direction; the fourth measurement position is a mapping position of the third measurement position on the second track; determining the linear displacement error from the measurement data comprises: determining a linear displacement error of a standard position corresponding to the third measurement position and the fourth measurement position in the first direction according to the average value of the first linear displacement errors and the average value of the second linear displacement errors, and determining the average value of the third linear displacement errors as the linear displacement error of the standard position corresponding to the fifth measurement position in the second direction;
The determining unit is further configured to determine error compensation data corresponding to the standard position according to the straightness error and the linear displacement error, and establish a correspondence between the standard position and the error compensation data;
the acquisition unit is also used for acquiring the target standard position of the operation equipment;
the determining unit is further configured to read the correspondence and determine target error compensation data corresponding to the target standard position acquired by the acquiring unit; the error compensation data in the corresponding relation is determined according to the linear displacement error and the straightness error;
the determining unit is further configured to determine an actual working position of the working device according to the target standard position and the target error compensation data.
8. The error compensation device according to claim 7, wherein the determining unit is specifically configured to:
the average value of the plurality of first linear displacement errors, the average value of the plurality of second linear displacement errors, and the linear displacement error of the standard position in the first direction satisfy the following formula:
wherein the DeltaX X For the linear displacement error of the standard position in the first direction, the Y X For the position information of the standard position in the second direction, the Y i1 For the position information of the third measurement position in the second direction, the Y i2 For the position information of the fourth measurement position in the second direction, theThe +.>Is an average of the plurality of second linear displacement errors.
9. The error compensation device according to claim 7, wherein the determining unit is specifically configured to:
determining an inverse number of a sum of the straightness error in the first direction and the linear displacement error in the first direction as error compensation data in the first direction;
determining an inverse number of a sum of the straightness error in the second direction and the linear displacement error in the second direction as error compensation data in the second direction;
and determining the error compensation data in the first direction and the error compensation data in the second direction as the error compensation data corresponding to the standard position, and obtaining the corresponding relation.
10. The error compensation device of claim 7, wherein the acquisition unit is specifically configured to:
Acquiring an original standard position of the operation equipment;
and determining the target standard position corresponding to the original standard position.
11. The error compensation device according to claim 10, wherein the determining unit is specifically configured to:
determining actual error compensation data according to the original standard position acquired by the acquisition unit, the target standard position acquired by the acquisition unit and the target error compensation data; the actual error compensation data includes actual error compensation data in the first direction and actual error compensation data in the second direction;
determining the sum of the position information of the original standard position in the first direction and the actual error compensation data in the first direction as the position information of the actual working position in the first direction;
and determining the sum of the position information of the original standard position in the second direction and the actual error compensation data in the second direction as the position information of the actual working position in the second direction.
12. The error compensation device according to claim 11, wherein the determining unit is specifically configured to:
Determining actual error compensation data in the first direction according to the position information of the original standard position in the first direction and the position information of the target standard position in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, and the target error compensation data in the first direction; the position information of the original standard position in the first direction and the position information of the second direction, the position information of the target standard position in the first direction and the position information of the target standard position in the second direction, the target error compensation data in the first direction, and the actual error compensation data in the first direction satisfy the following formulas:
wherein the DeltaX P Compensating the data for the actual error in the first direction, the ΔX A Compensating data for a target error of a first target standard position in the first direction, the Δx B Compensating data for a target error of a second target standard position in the first direction, the Δx C Compensating data for a target error of a third target standard position in the first direction, the Δx D Compensating data for a target error of a fourth target standard position in the first direction, the X P For the position information of the original standard position in the first direction, the Y P For the position information of the original standard position in the second direction, the X A For the position information of the first target standard position in the first direction, the X B For the position information of the second target standard position in the first direction, the Y A For the position information of the first target standard position in the second direction, the Y D For the position information of the fourth target standard position in the second direction, the first target standard position, the second target standard position, the third target standard position and the fourth target standard position are the target standard positions corresponding to the original standard position, the first target standard position is identical to the position information of the second target standard position in the second direction, the first target standard position is identical to the position information of the fourth target standard position in the first direction, the third target standard position is identical to the position information of the second target standard position in the first direction, and the third target standard position is identical to the position information of the fourth target standard position in the second direction;
Determining actual error compensation data in the second direction according to the position information of the original standard position in the first direction and the position information in the second direction, the position information of the target standard position in the first direction and the position information in the second direction, and the target error compensation data in the second direction; the position information of the original standard position in the first direction and the position information of the second direction, the position information of the target standard position in the first direction and the position information of the target standard position in the second direction, the target error compensation data in the second direction, and the actual error compensation data in the second direction satisfy the following formulas:
wherein the DeltaY P Compensating the data for the actual error in the second direction, the ΔY A Compensating data for a target error of the first target standard position in the second direction, theΔY B Compensating data for a target error of the second target standard position in the second direction, the Δy C Compensating data for a target error of the third target standard position in the second direction, the Δy D And compensating data for a target error of the fourth target standard position in the second direction.
13. An error compensation device, comprising a memory and a processor; the memory is used for storing computer execution instructions, and the processor is connected with the memory through a bus; when the error compensation device is operated, the processor executes the computer-executable instructions stored in the memory to cause the error compensation device to perform the error compensation method of any one of claims 1-6.
14. A computer readable storage medium comprising computer executable instructions which, when run on a computer, cause the computer to perform the error compensation method of any of claims 1-6.
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