CN113969145A - Deposition composite film and preparation method and application thereof - Google Patents

Deposition composite film and preparation method and application thereof Download PDF

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Publication number
CN113969145A
CN113969145A CN202010710517.5A CN202010710517A CN113969145A CN 113969145 A CN113969145 A CN 113969145A CN 202010710517 A CN202010710517 A CN 202010710517A CN 113969145 A CN113969145 A CN 113969145A
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solution
composite
composite film
beaker
magnetic stirring
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李公让
刘振东
李炳太
李卉
曹婧
于雷
明玉广
周晓蕾
夏晔
张敬辉
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Sinopec Oilfield Service Corp
Sinopec Shengli Petroleum Engineering Corp
Drilling Technology Research Institute of Sinopec Shengli Petroleum Engineering Corp
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Sinopec Oilfield Service Corp
Sinopec Shengli Petroleum Engineering Corp
Drilling Technology Research Institute of Sinopec Shengli Petroleum Engineering Corp
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K8/00Compositions for drilling of boreholes or wells; Compositions for treating boreholes or wells, e.g. for completion or for remedial operations
    • C09K8/02Well-drilling compositions
    • C09K8/03Specific additives for general use in well-drilling compositions
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K8/00Compositions for drilling of boreholes or wells; Compositions for treating boreholes or wells, e.g. for completion or for remedial operations
    • C09K8/42Compositions for cementing, e.g. for cementing casings into boreholes; Compositions for plugging, e.g. for killing wells
    • C09K8/44Compositions for cementing, e.g. for cementing casings into boreholes; Compositions for plugging, e.g. for killing wells containing organic binders only
    • EFIXED CONSTRUCTIONS
    • E21EARTH OR ROCK DRILLING; MINING
    • E21BEARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
    • E21B33/00Sealing or packing boreholes or wells
    • E21B33/10Sealing or packing boreholes or wells in the borehole
    • E21B33/13Methods or devices for cementing, for plugging holes, crevices or the like
    • E21B33/138Plastering the borehole wall; Injecting into the formation
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K2208/00Aspects relating to compositions of drilling or well treatment fluids
    • C09K2208/12Swell inhibition, i.e. using additives to drilling or well treatment fluids for inhibiting clay or shale swelling or disintegrating
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K2208/00Aspects relating to compositions of drilling or well treatment fluids
    • C09K2208/34Lubricant additives

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  • General Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mining & Mineral Resources (AREA)
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  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Environmental & Geological Engineering (AREA)
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Abstract

The invention relates to the field of petroleum drilling, in particular to a sedimentary composite membrane, a preparation method and application thereof, wherein a casting method is utilized to enable an anionic polymer and lamellar inorganic particles to be sedimentated layer by layer to form the composite membrane.

Description

Deposition composite film and preparation method and application thereof
Technical Field
The invention relates to the technical field of petroleum drilling, in particular to a preparation method of a deposition composite film.
Background
The problem of well wall stability is an engineering problem frequently encountered in the process of oil drilling, and great difficulty is brought to safe drilling. Borehole wall instability is often the result of a combination of factors including geological conditions, drilling fluid properties, drilling engineering measures, and the like. At the present stage, a high-quality filter cake is formed by improving the performance of the drilling fluid, the invasion of the filtrate of the drilling fluid to a shale stratum is reduced, and the strengthening of the well wall by a chemical and physical method is the most important means for solving the problem of well wall stability.
In nature, biological tissues such as shells and abalone shells are generally hard tissues produced from organisms using organic and inorganic materials. The microstructure of most biomineralization materials is very fine, and the biomineralization materials are assembled layer by layer under the induction of a biological organic matter (layer), and the lamellar matrixes are piled up to form a layer-by-layer structure.
By self-assembly, it is meant a technique in which the basic building blocks (molecules, nanomaterials, substances on the micrometer or larger scale) spontaneously form ordered structures. During the self-assembly process, the basic building blocks spontaneously organize or aggregate into a stable structure with a certain regular geometric appearance under the interaction based on non-covalent bonds. The self-assembly process is not simple superposition of weak acting force among a large number of atoms, ions and molecules, but a plurality of individuals are simultaneously and spontaneously associated and are integrated to form a compact and ordered whole body, and the complex synergistic effect of the whole body is realized. The recognition of molecules at the interface is crucial in the self-assembly process. Whether self-assembly can be realized depends on the characteristics of basic structural units, such as surface topography, shape, surface functional groups, surface potential and the like, and the final structure has the lowest free energy after the assembly is finished. Studies have shown that internal driving forces are key to achieving self-assembly, including van der waals forces, hydrogen bonding, electrostatic forces, etc. that can only act on non-covalent bonding forces at the molecular level and those that can act on a large size range, such as surface tension, capillary forces, etc.
Many very representative works were done by the White-places led research team at harvard university in terms of self-assembly of macroscopic objects. They selected objects with a certain regular shape of micrometer or larger scale as assembly units, and selectively modified their specific edges to make different edges have different hydrophilicity and hydrophobicity. When the objects are dispersed on the surface of the liquid, the objects self-assemble into various macroscopic three-dimensional ordered structures through hydrophobic-hydrophobic and hydrophilic-hydrophilic interactions under the control of the interface free energy minimization rule. This self-assembly at the liquid interface is simultaneously driven by capillary forces between the assembly cell and the liquid. This study provides a very simple and effective method for building aggregates of regular geometric appearance on the micrometer, centimeter or even larger scale.
Between molecules and macroscopic objects, there is a very important class of substances, in addition to nanomaterials, that is, objects whose size is distributed on the submicrometer scale. One typical representative of the particles is colloidal particle beads with the particle size distribution of 200-400 nm. Many groups have succeeded in self-assembling such colloidal spheres having a single diameter into a large area regularly arranged patterned surface by various approaches. For example, Xia Younan utilizes template-assisted self-assembly techniques to align beads in grooves on a pre-etched substrate by directional flow of liquid in a special apparatus. Brueck et al, usa, assembled silicon nanoballs directly into patterned surfaces by spin coating.
The electrostatic self-assembly method is mainly Dip-coating method (Dip-coating method), which is the most traditional and widely used method for preparing layer-by-layer self-assembly composite films. The preparation process of the multilayer film comprises the following steps: firstly, soaking a solid substrate modified with positive charges in a polyelectrolyte solution with negative charges, adsorbing the polyelectrolyte with negative charges on the surface of the substrate with positive charges due to electrostatic interaction, and washing residual solution remained on the surface of the substrate by water; and (3) drying by using nitrogen, soaking the substrate in the polyelectrolyte solution with positive charges, adsorbing a layer of polyelectrolyte with positive charges on the surface of the substrate, soaking and washing by using water, drying by using nitrogen, and repeating the steps to obtain the alternately deposited polyelectrolyte multilayer film. The research on how to prepare the deposition film suitable for well wall reinforcement in a shaft environment needs to be carried out, the deposition process and the selection of polymers and inorganic substances.
The self-assembly of nano-materials into various hierarchical ordered structures by using the nano-materials as units is a research hotspot which is just rising in recent years. The nanoscale (0.1-100 nm) is a mesoscopic layer between a macroscopic object and a microscopic molecule, and has the extraordinary optical, electrical, magnetic and mechanical properties. Researchers have been expecting to manipulate nanostructure elements like manipulating molecules. By using the self-assembly technology and taking the nano material as a unit, the ordered structure on the nano or micron scale can be effectively constructed. That is, the nanostructure units can self-assemble into a multilevel ordered structure by non-covalent bonding forces without external interference. Compared with the traditional etching technology, the technology realizes the greatest simplification in the aspect of constructing different regular array structures by taking the nano material as a unit, and simultaneously realizes the large-area preparation. This provides an effective way for our functional materials to assemble into highly ordered structures in an ideal way and provides new opportunities for the study of micro-devices.
The excellent properties of the nanoparticles can be adjusted by simple manipulation or adjustment of their dimensions and geometric appearance. Therefore, controllable hierarchical ordered self-assembly of functional nanoparticles is an important direction for nanotechnology development at present and for a long time in the future. Novel overall synergistic properties can be obtained after self-assembly of nanoparticles into one-, two-or three-dimensional ordered structures, and their properties can be tuned by controlling the interactions between nanoparticles. At present, chemical modification is a very important prerequisite for realizing self-assembly of nanoparticles. The organic molecules coated on the outer layer simultaneously play a dual role in stabilizing the nanoparticles and providing interactions between the particles. Through the interaction between these organic molecules, nanoparticles are easily chemically assembled into aggregates with new structures. Therefore, it is important to accurately design and select the organic molecules for modifying the nanoparticles.
Scholars at home and abroad have already done a lot of work on the research of the drilling fluid plugging agent. For example, Zhang et al, in "synthesis of an oil-based swelling plugging agent and evaluation of its performance", synthesized a swelling plugging agent for oil-based drilling fluids (see "journal of the university of Yangtze river (Nature edition)", 2010, 7 (3)), the basic raw materials were styrene, oil-absorbing monomers, cross-linking agent, initiator, polyvinyl alcohol and calcium carbonate. Huwen et al propose an oil-based drilling fluid with strong plugging capability in the application of strong plugging oil-based drilling fluid system in W11-4D oil field, and use emulsified asphalt, resin and ultrafine calcium carbonate as a plugging agent (see drilling fluid and completion fluid, 2007, 24 (3)). Chinese patent CN102863947A discloses a strong-inhibition strong-plugging drilling fluid, wherein the strong plugging agent is one or more of cation modified asphalt, sulfonated asphalt, natural asphalt powder, cation emulsified asphalt, colloidal asphalt, latex and emulsified paraffin. Chinese patent CN103013469A discloses a method for improving the performance of water-based drilling fluids at different temperatures by using nano-silica, and the invention provides a method for improving the performance of water-based drilling fluids at different temperatures by using nano-silica, wherein nano-silica dispersion liquid is added into base slurry, so that the base slurry forms thinner and more compact mud cakes, and the fluid loss reduction effect is improved. However, these techniques have the following disadvantages or shortcomings: the formed filter cake is not compact enough, and the plugging capability to the micro-pores and micro-cracks of the rock is not enough, so that water still invades the shale to a certain degree when a longer shale well section is drilled, and the risk of collapse of the shale well wall is increased.
Disclosure of Invention
The invention aims to overcome the defects of the technology and provides a deposition composite film, a preparation method and application thereof, and the technical scheme is as follows:
the method comprises the following steps:
placing the anionic polymer solution in a beaker, carrying out magnetic stirring, then slowly adding the inorganic particle solution into the beaker, carrying out magnetic stirring for 12-15h to uniformly mix the anionic polymer solution and the inorganic particle solution, and then adding metal ions to obtain a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
In the scheme, the anionic polymer is one or a composition of more of carboxymethyl cellulose, polyacrylamide and polyvinyl alcohol fiber.
The lamellar inorganic particles are one or a composition of more of nano montmorillonite, graphene oxide and phyllosilicate.
The metal ion is one or more of copper ion, aluminum ion, zinc ion, and silver ion, and can be selected from copper chloride, copper oxide, cuprous chloride, copper sulfate, aluminum oxide, aluminum sulfate, zinc oxide, and silver oxide, but is not limited thereto.
In the present invention, the composite film formed by the production method has a regular layered structure. The invention can form a composite film on the well wall of a well and is used for preventing collapse and plugging.
Further, in the preparation step, the inorganic particles are replaced by metal compounds or lamellar inorganic composite materials, and because the composite material solution contains metal ions, the aim of improving the performance of the deposited film is fulfilled without specially adding the metal ions.
The implementation steps are as follows: placing the anionic polymer solution in a beaker, performing magnetic stirring, slowly adding the metal compound or lamellar inorganic substance composite material solution into the beaker, and performing magnetic stirring for 12-15 hours to uniformly mix the metal compound or lamellar inorganic substance composite material solution and the organic substance composite material solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
In the scheme, the metal compound or lamellar inorganic compound material is one or a combination of more of copper-loaded montmorillonite, quaternary ammonium salt-copper-montmorillonite compound, copper oxide/graphene oxide compound and aluminum oxide/graphene oxide compound.
The copper oxide/graphene oxide composite is prepared by redox reaction of graphene oxide sheets and cuprous ions in cuprous chloride.
The quaternary ammonium salt-copper-montmorillonite composite is prepared by sequentially carrying out ion exchange reaction on copper ions and cetyl trimethyl ammonium bromide cations with montmorillonite.
The invention has the following advantages:
the composite membrane is formed by depositing the anionic polymer and the lamellar particles layer by layer, and can be used for plugging a well wall of a drilling well, so that the invasion of drilling fluid filtrate into a stratum is reduced, the hydration expansion of clay is reduced, the filtration loss is reduced, the collapse of the well wall is prevented, and meanwhile, the composite membrane has a better lubricating effect. The metal ions are added in the invention, so that the mechanical capability of the composite can be further improved, and the quality of the composite film is improved.
Drawings
FIG. 1 is a scanning electron microscope image of the composite film of example 15.
Detailed Description
The present invention will be described in detail with reference to examples, but the scope of the present invention is not limited to the examples.
Example 1
Placing the carboxymethyl cellulose solution in a beaker, carrying out magnetic stirring, slowly adding the nano montmorillonite solution into the beaker, carrying out magnetic stirring for 12 hours to uniformly mix the nano montmorillonite solution and the nano montmorillonite solution, and then adding the copper ion solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
Example 2
Placing the polyacrylamide solution in a beaker, carrying out magnetic stirring, then slowly adding the graphene oxide particles or the solution into the beaker, carrying out magnetic stirring for 12 hours to uniformly mix the graphene oxide particles or the solution, and then adding an aluminum ion solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
Example 3
Placing the polyvinyl alcohol fiber solution in a beaker, carrying out magnetic stirring, then slowly adding the graphene particles or the solution into the beaker, carrying out magnetic stirring for 15 hours to uniformly mix the graphene particles or the solution and the solution, and then adding the zinc ion solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
Example 4
Placing the polyvinyl alcohol fiber solution in a beaker, carrying out magnetic stirring, then slowly adding the graphene particles or the solution into the beaker, carrying out magnetic stirring for 12 hours to uniformly mix the graphene particles or the solution and the solution, and then adding the zinc ion solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
Example 5
Placing the polyvinyl alcohol fiber solution in a beaker, carrying out magnetic stirring, then slowly adding the graphene oxide particles or the graphene oxide solution into the beaker, carrying out magnetic stirring for 12 hours to uniformly mix the graphene oxide particles and the graphene oxide solution, and then adding the zinc ion solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
Example 6
Placing the carboxymethyl cellulose solution in a beaker, carrying out magnetic stirring, slowly adding the graphene oxide solution into the beaker, carrying out magnetic stirring for 12 hours to uniformly mix the graphene oxide solution and the graphene oxide solution, and then adding the copper ion solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
Example 7
Placing the carboxymethyl cellulose solution in a beaker, carrying out magnetic stirring, slowly adding the graphene solution into the beaker, carrying out magnetic stirring for 12 hours to uniformly mix the carboxymethyl cellulose solution and the graphene solution, and then adding the copper ion solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
Example 8
Placing the carboxymethyl cellulose solution in a beaker, carrying out magnetic stirring, slowly adding the graphene oxide particles into the beaker, carrying out magnetic stirring for 12 hours to uniformly mix the graphene oxide particles and the graphene oxide particles, and then adding an aluminum ion solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
Example 9
Placing the polyacrylamide solution in a beaker, carrying out magnetic stirring, slowly adding the nano montmorillonite solution into the beaker, carrying out magnetic stirring for 12 hours to uniformly mix the nano montmorillonite solution and the nano montmorillonite solution, and then adding the aluminum ion solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
Example 10
Placing the polyacrylamide solution in a beaker, carrying out magnetic stirring, slowly adding the nano montmorillonite solution into the beaker, carrying out magnetic stirring for 15 hours to uniformly mix the nano montmorillonite solution and the nano montmorillonite solution, and then adding the aluminum ion solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
Example 11
Placing the polyacrylamide solution in a beaker, carrying out magnetic stirring, slowly adding the graphene solution into the beaker, carrying out magnetic stirring for 12 hours to uniformly mix the polyacrylamide solution and the graphene solution, and then adding an aluminum ion solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
Example 12
Placing the carboxymethyl cellulose solution in a beaker, performing magnetic stirring, slowly adding a mixed solution of nano montmorillonite and graphene oxide particles, performing magnetic stirring for 12 hours to uniformly mix the nano montmorillonite and the graphene oxide particles, and adding an aluminum ion solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
Example 13
Placing carboxymethyl cellulose in a beaker, performing magnetic stirring, slowly adding a nano montmorillonite solution, performing magnetic stirring for 12 hours to uniformly mix the nano montmorillonite solution and the polyacrylamide solution, sequentially adding the polyacrylamide solution and the nano montmorillonite solution, performing magnetic stirring for 12 hours respectively, uniformly mixing, and adding an aluminum ion solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
Example 14
Placing the carboxymethyl cellulose solution in a beaker, carrying out magnetic stirring, slowly adding the copper oxide/graphene oxide compound solution into the beaker, and carrying out magnetic stirring for 12 hours to uniformly mix the copper oxide/graphene oxide compound solution and the graphene oxide compound solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
Example 15
The carboxymethyl cellulose solution and the copper oxide/graphene oxide compound solution are injected into the well bore in a slug mode, and after the composite membrane is static, the composite membrane can be formed on the well bore to reinforce the well bore.
The composite membrane performance test formed in the examples is shown in fig. 1.
The relation between transverse stress (sigma) and strain (epsilon) of the composite membrane is measured by adopting a microcomputer control electronic universal tester. The Young modulus of the transverse stretching is calculated by a formula E = sigma/epsilon, the Young modulus of the MTM film formed alone is 0.45GPa, the Young modulus of the CMC film formed alone is 7.74GPa, the Young modulus of the composite film is 11.30 GPa-15.70 GPa, and the Young modulus of the composite film after the copper ions are added is increased by 360 GPa compared with that of the composite film formed before the copper ions are added. Mechanical property test experiments show that the composite membrane prepared by the polymer and the sheet layer material through layer-by-layer deposition has mechanical property superior to that of a single-component membrane, and the mechanical strength of the composite membrane is increased along with the addition of metal ions in the preparation process. The invention can improve the permeability of the mud cake of the well wall by more than 20 percent.
Example 16
The invention is used as a drilling fluid treating agent, is applied to drilling fluid, and utilizes a casting method to enable anionic polymer and lamellar inorganic particles to be deposited layer by layer to form a composite film.

Claims (10)

1. A preparation method of a deposition composite film is characterized by comprising the step of depositing an anionic polymer and lamellar inorganic particles layer by layer to form the composite film by a casting method.
2. A method according to claim 1, comprising the steps of:
placing the anionic polymer solution in a beaker, carrying out magnetic stirring, then slowly adding the inorganic particle solution into the beaker, carrying out magnetic stirring for 12-15h to uniformly mix the anionic polymer solution and the inorganic particle solution, and then adding metal ions to obtain a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
3. The method of claim 2, wherein the anionic polymer is one or more of carboxymethyl cellulose, polyacrylamide, and polyvinyl alcohol fiber.
4. The method of claim 2, wherein the lamellar inorganic particles are one or more of montmorillonite, graphene oxide, and phyllosilicate.
5. The method according to claim 2, wherein the metal ions are one or more of copper ions, aluminum ions, zinc ions and silver ions.
6. A method according to claim 1, comprising the steps of:
placing the anionic polymer solution in a beaker, performing magnetic stirring, slowly adding the metal compound or lamellar inorganic substance composite material solution into the beaker, and performing magnetic stirring for 12-15 hours to uniformly mix the metal compound or lamellar inorganic substance composite material solution and the organic substance composite material solution to form a mixed solution;
slowly adding the mixed solution into a culture dish, naturally airing at room temperature, and drying to obtain the composite membrane.
7. The method of claim 6, wherein the metal compound or lamellar inorganic composite material is a combination of one or more of copper-loaded montmorillonite, quaternary ammonium salt-copper-montmorillonite composite, copper oxide/graphene oxide composite, and aluminum oxide/graphene oxide composite.
8. A method for preparing a deposited composite film according to claim 6, wherein said anionic polymer is one or more of carboxymethylcellulose, polyacrylamide and polyvinyl alcohol fiber.
9. A deposited composite film obtained by the method for producing a deposited composite film according to any one of claims 1 to 8, wherein the composite film has a regular layered structure.
10. Use of a deposited composite film according to claim 9 for forming a composite film on the borehole wall.
CN202010710517.5A 2020-07-22 2020-07-22 Deposition composite film and preparation method and application thereof Pending CN113969145A (en)

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