CN113945530A - Gas concentration detection method and mass spectrometer - Google Patents

Gas concentration detection method and mass spectrometer Download PDF

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CN113945530A
CN113945530A CN202111216912.9A CN202111216912A CN113945530A CN 113945530 A CN113945530 A CN 113945530A CN 202111216912 A CN202111216912 A CN 202111216912A CN 113945530 A CN113945530 A CN 113945530A
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黄泽建
江游
方向
戴新华
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National Institute of Metrology
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Abstract

The invention belongs to the technical field of mass spectrometry, and provides a gas concentration detection method. And respectively multiplying the standard relational expressions corresponding to the n gases to be detected under the same mass number by the corresponding concentration coefficients, summing, establishing an equality relation with the mixed relational expression under the same mass number to form an equality equation, forming an equation set by the equality equations corresponding to the mass numbers, and solving the equation set to obtain the concentration coefficient, namely the concentration value of each corresponding gas to be detected. Thus, the concentration value of each gas to be detected in the mixed gas can be measured. The mass spectrometer provided by the invention for executing the gas concentration detection method has the advantages as described above.

Description

Gas concentration detection method and mass spectrometer
Technical Field
The invention relates to the technical field of mass spectrometry, in particular to a gas concentration detection method and a mass spectrometer.
Background
Mass spectrometry is one of the most basic instruments for researching the basic composition, structural characteristics, physical and chemical properties of substances, is a necessary instrument in the fields of life science, material science, food safety, environmental protection and the like, and is the core of modern analytical instruments. It is essentially a spectroscopic method in which moving ions are separated by their mass-to-charge ratios using electric and/or magnetic fields and detected. The compound composition of the ions can be determined by measuring the exact mass of the ions.
The ion source is a key component in a mass spectrometer and its function is to ionize gaseous sample molecules introduced by the sample introduction system into ions. Ionization of sample molecules is the primary link in mass spectrometry. The performance of the ion source has great influence on multiple indexes of the instrument, and whether effective ionization of sample molecules can directly influence important indexes such as the type, detection limit and sensitivity of a detectable substance.
For industrial on-line fields, such as petroleum refining, there are many process steps in the whole production process, and the intermediate process gas needs to be monitored on line to control the quality of the whole production process. The process gases are usually a mixture of known gases, and the on-line monitoring is to monitor the concentration of each gas, so as to control the process level of the whole production process and ensure the product quality.
Mass spectrometry detection of mixtures is typically combined with gas chromatography, GC. This is at the expense of time, since GC separation tends to take longer, in minutes, and tens of minutes. The detection of mass spectra is calculated in milliseconds between transients. But all material enters the mass spectrometry system without separation. The conventional EI source can ionize all substances together, the ionized ions have molecular ions and fragment ions of all substances, but all the ions have only one spectral peak, so that whether the ions are molecular ions or fragment ions of a certain substance cannot be known, and the possibility of mutual overlapping of the fragment ions of different substances exists. For example, in the process of refining and reforming petroleum, when various mixed gases such as nitrogen, oxygen, hydrogen, carbon dioxide, methane, C2-C5 and the like are ionized by a traditional EI source, the mass spectrum ions are overlapped. Therefore, it is impossible to accurately determine whether the ion signals are derived from only one species or from a plurality of species, and thus, it is eventually impossible to distinguish all the species one by one, and it is impossible to quantify the species.
Disclosure of Invention
The invention provides a gas concentration detection method and a mass spectrometer, which are used for solving the defect that substances cannot be distinguished one by one in a mass spectrogram obtained after ionization of an EI source with fixed electronic energy in the prior art and realizing the effect of detecting the concentration of each pure substance in a mixture.
The invention provides a gas concentration detection method, which comprises the following steps:
acquiring n groups of standard three-dimensional data corresponding to n types of gases to be detected, and establishing a standard relational expression of which the relative percentage content of ions changes along with the change of electron energy under each mass number according to the standard three-dimensional data;
acquiring three-dimensional data of a mixture corresponding to a mixed gas at least containing n kinds of gases to be detected, and establishing a mixing relation formula of which the relative percentage content of ions changes along with the change of electron energy under each mass number according to the three-dimensional data of the mixture;
and multiplying the standard relational expressions corresponding to the n gases to be detected under the same mass number by the corresponding concentration coefficients respectively, summing the standard relational expressions, establishing an equality relation with the mixed relational expression under the same mass number to form an equality equation, forming an equation set with a plurality of equality equations corresponding to a plurality of mass numbers, and solving to obtain the concentration coefficients.
According to the gas concentration detection method provided by the invention, the acquiring of n groups of standard three-dimensional data corresponding to n types of gases to be detected comprises the following steps:
receiving a gas to be detected into an ion source;
acquiring initial electron energy, and acquiring first standard three-dimensional data corresponding to the gas to be detected under the initial electron energy;
acquiring a stepping increment of electron energy, repeatedly superposing the stepping increment on the initial electron energy, and acquiring one standard three-dimensional data corresponding to the gas to be detected every time the stepping increment is superposed, wherein the standard three-dimensional data is stopped until the electron energy is superposed to be more than or equal to the ending electron energy, and finally acquiring a group of standard three-dimensional data corresponding to different electron energies;
repeating the steps until n types of the gas to be detected are detected, and obtaining n groups of standard three-dimensional data corresponding to the n types of the gas to be detected one by one.
According to the gas concentration detection method provided by the invention, the acquiring of the three-dimensional data of the mixture corresponding to the mixed gas at least containing n types of gases to be detected comprises the following steps:
receiving a mixed gas into an ion source, wherein the mixed gas at least comprises n kinds of gases to be detected;
acquiring initial electron energy, and acquiring first three-dimensional data of the mixture corresponding to the mixed gas under the initial electron energy;
and acquiring a stepping increment of electron energy, repeatedly superposing the stepping increment on the initial electron energy, and acquiring three-dimensional data of the mixture corresponding to the mixed gas every time the stepping increment is superposed until the electron energy is superposed to be more than or equal to the ending electron energy to obtain a group of three-dimensional data of the mixture corresponding to different electron energies.
According to the gas concentration detection method provided by the invention, the initial electron energy is lower than the ionization energy of the gas to be detected and the mixed gas, and/or the termination electron energy is higher than the ionization energy of the gas to be detected and the mixed gas.
According to the gas concentration detection method provided by the invention, the scanning range of the electron energy is 5 eV-100 eV.
According to the gas concentration detection method provided by the invention, the step increment is more than or equal to 1eV and less than or equal to 5 eV.
According to the gas concentration detection method provided by the invention, the mass number is smaller than the minimum mass-to-charge ratio of all ionized ions and larger than the maximum mass-to-charge ratio of all ionized ions.
According to the gas concentration detection method provided by the invention, the stepping interval between two adjacent mass numbers is more than or equal to 0.1amu and less than or equal to 1 amu.
The invention also provides a mass spectrometer for performing the gas concentration detection method as described in any one of the above, comprising an electron energy modulation system for modulating the electron energy of bombarding electrons in a mass spectrometry system and a mass spectrometry system.
According to the mass spectrometer provided by the invention, the mass spectrometry system comprises a sample introduction system, an electron bombardment ion source, a quadrupole mass analysis system, a vacuum system, an ion detection system and a mass spectrometry data analysis system.
According to the gas concentration detection method provided by the invention, the standard relational expression and the mixed relational expression of which the ion relative percentage content changes along with the change of the electron energy under each mass number are established by acquiring the standard three-dimensional data of the gas to be detected and the three-dimensional data of the mixture of the mixed gas containing the gas to be detected. When the number of the to-be-detected gases to be detected is n, the acquired standard three-dimensional data comprises n groups, and the n groups of standard three-dimensional data respectively correspond to the n to-be-detected gases. And respectively multiplying the standard relational expressions corresponding to the n gases to be detected under the same mass number by the corresponding concentration coefficients, summing, establishing an equality relation with a mixed relational expression under the same mass number to form an equality equation, wherein each mass number corresponds to one equality equation, the equality equations corresponding to the mass numbers form an equation set, and solving the equation set to obtain the concentration coefficient, namely the concentration value of each corresponding gas to be detected. Thus, the concentration value of each gas to be detected in the mixed gas can be measured.
Further, the present invention provides a mass spectrometer for performing the above gas concentration detection method, and therefore, has the same advantages as above.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic flow chart of a gas concentration detection method provided by the present invention;
FIG. 2 is a second schematic flow chart of the gas concentration detection method provided by the present invention;
FIG. 3 is a third schematic flow chart of a gas concentration detection method provided by the present invention;
FIG. 4 is a schematic representation of three-dimensional data provided by the present invention;
FIG. 5 is a schematic diagram of a mass spectrometer provided by the present invention;
reference numerals:
1: an electronic energy conditioning system; 2: electron bombardment ion source; 3: a quadrupole mass analysis system;
4: a mass spectrometry data analysis system.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The gas concentration detection method of the present invention is described below with reference to fig. 1 to 4.
The invention provides a gas concentration detection method, which comprises the following steps:
s101, acquiring n groups of standard three-dimensional data corresponding to n gases to be detected, and establishing a standard relational expression of which the relative percentage content of ions changes along with the change of electron energy under each mass number according to the standard three-dimensional data.
Wherein, the gas to be detected is the gas of which the concentration needs to be monitored in the mixed gas. The three-dimensional dimensions of the standard three-dimensional data are respectively as follows: the first dimension is the mass number, the second dimension is the electron energy, and the third dimension is the relative percentage content of ions, and the first dimension, the second dimension and the third dimension correspond to the X axis, the Y axis and the Z axis of the space rectangular coordinate system respectively.
Respectively acquiring a group of standard three-dimensional data corresponding to n kinds of gases to be detected, and establishing a standard relational expression of ion relative percentage content under each mass number changing along with the change of electron energy according to the standard three-dimensional data, wherein the standard relational expression can be as follows:
Figure BDA0003311104910000061
where n is 1, 2, 3, … …, n denotes the nth gas to be detected.
Where min represents the minimum mass-to-charge ratio of all ionized ions covering all substances to be measured (including the gas to be detected and the mixed gas), max represents the maximum mass-to-charge ratio of all ionized ions covering all substances to be measured, and Δ m represents the step length of the mass-to-charge ratio.
X is the independent variable and is the electron energy.
When the gas to be detected comprises two gases A and B, two groups of standard three-dimensional data of the gas A and the gas B can be respectively obtained, and a standard relational expression of which the relative percentage content of ions changes along with the change of electron energy under each mass number is respectively established according to the two groups of standard three-dimensional data.
Taking substance A as an example, the standard relation is as follows:
Figure BDA0003311104910000062
the plurality of standard relations corresponding to the plurality of mass numbers can be represented by the following arrays:
Figure BDA0003311104910000063
the same principle of the B substance can obtain the following groups:
Figure BDA0003311104910000071
step S102, obtaining three-dimensional data of a mixture corresponding to a mixed gas at least containing n kinds of gases to be detected, and establishing a mixing relation formula of which the relative percentage content of ions changes with the change of electron energy under each mass number according to the three-dimensional data of the mixture.
Taking the mixed gas as the substance C as an example, the mixing relation is as follows:
Figure BDA0003311104910000072
the mixing relations corresponding to the mass numbers can be represented by the following arrays:
Figure BDA0003311104910000073
step S103, multiplying the standard relational expressions corresponding to the n types of gases to be detected under the same mass number by the corresponding concentration coefficients respectively, summing the multiplied relational expressions, establishing an equality relation with the mixed relational expression under the same mass number to form an equality equation, forming an equation set with a plurality of equality equations corresponding to a plurality of mass numbers, and solving to obtain the concentration coefficients.
The concentration coefficient of the gas A may be a, and the concentration coefficient of the gas B may be B.
The standard relational expressions corresponding to the n types of gases to be detected under the same mass number are multiplied by the corresponding concentration coefficients respectively and summed, and the equality equation formed by establishing the equality relationship with the mixed relational expression under the same mass number can be as follows:
Figure BDA0003311104910000074
a plurality of equation equations corresponding to the plurality of mass numbers form the following array:
Figure BDA0003311104910000075
further comprises the following steps:
Figure BDA0003311104910000081
and solving the equation set to obtain the values of concentration coefficients a and B, wherein the values of the concentration coefficients a and B are the concentration values of the gas A and the gas B.
Of course, the above method is equally applicable when the amount of gas to be detected is greater than two.
In one embodiment of the present invention, for step S101, acquiring n sets of standard three-dimensional data corresponding to n types of gases to be detected includes the following steps:
step S201, receiving a gas to be detected into an ion source.
In order to solve the problem of long time consumption caused by the combination of a mass spectrometer and a gas chromatograph GC in the prior art, in the embodiment, a direct sample introduction mode is adopted for detection, gas to be detected is directly introduced into an ion source, and the gas to be detected is ionized.
Step S202, obtaining initial electron energy, and obtaining first standard three-dimensional data corresponding to the gas to be detected under the initial electron energy.
For each gas to be detected, an increasing scanning or decreasing scanning process of the electron energy is carried out in the ionization process, preferably an increasing scanning process, the electron energy gradually increases from a minimum value to a maximum value, and the gas to be detected is ionized under each stepped electron energy.
The initial electron energy may be understood as the minimum value of the scanning range of electron energies, which may be denoted as j, for exampleminUnder the initial electron energy, the gas to be detected is ionized for the first time to obtain molecular ions and fragment ions under the electron energy, and thus the standard III corresponding to the initial electron energy is obtainedDimension data.
And S203, acquiring a step increment of the electron energy, repeatedly superposing the step increment on the initial electron energy, acquiring one standard three-dimensional data corresponding to the gas to be detected every time superposition is performed, and stopping until the electron energy is superposed to be more than or equal to the ending electron energy, thereby finally acquiring a group of standard three-dimensional data corresponding to different electron energies.
After the initial electron energy is ionized and standard three-dimensional data is obtained, a step increment of the electron energy is obtained, for example, the step increment may be Δ j, and the step increment is repeatedly superimposed on the initial electron energy. E.g. after a step increment is superimposed, the electron energy is jmin+ delta j, carrying out secondary ionization on the gas to be detected under the electron energy, obtaining a group of standard three-dimensional data corresponding to the electron energy, and superposing the standard three-dimensional data once again to increase the electron energy to be jminAnd +2 delta j, carrying out third ionization on the gas to be detected under the electron energy, and obtaining a set of standard three-dimensional data corresponding to the electron energy. And so on until the electron energy is superimposed to be greater than or equal to the termination electron energy. And after all the actions are finished, obtaining a group of standard three-dimensional data corresponding to a plurality of electronic energies.
According to the set of standard three-dimensional data, an array formed by a plurality of standard relational expressions of which the ion relative percentage content under each mass number changes along with the change of the electron energy can be obtained.
The set of standard three-dimensional data obtained and the resulting array are for only one gas to be detected.
And S204, repeating the steps until n types of gases to be detected are detected, and obtaining n groups of standard three-dimensional data corresponding to the n types of gases to be detected one by one.
In order to obtain the standard three-dimensional data and the array of n gases to be detected, the steps can be continuously repeated, different gases to be detected are received each time until the n gases to be detected are detected, and the n groups of standard three-dimensional data corresponding to the n gases to be detected one by one are obtained.
In one embodiment of the present invention, acquiring three-dimensional data of a mixture corresponding to a mixed gas containing at least n kinds of gases to be detected includes the steps of:
step S301, receiving a mixed gas into an ion source, wherein the mixed gas at least comprises n types of gases to be detected;
the mixed gas at least comprises the n gases to be detected. The same as the detection of the gas to be detected, the detection is carried out by adopting a direct sample introduction mode, and the mixed gas is directly introduced into an ion source to ionize the mixed gas.
Step S302, obtaining initial electron energy, and obtaining first mixture three-dimensional data corresponding to the mixed gas under the initial electron energy;
for each gas mixture, an increasing scanning or decreasing scanning process of the electron energy is carried out in the ionization process, preferably an increasing scanning process, the electron energy gradually increases from a minimum value to a maximum value, and the gas mixture is ionized at each step of the electron energy.
The initial electron energy may be understood as the minimum value of the scanning range of electron energies, which may be denoted as j, for exampleminUnder the initial electron energy, primary ionization is carried out on the mixed gas to obtain molecular ions and fragment ions under the electron energy, and therefore three-dimensional data of the mixture corresponding to the initial electron energy are obtained.
Step S303, obtaining a step increment of the electron energy, repeatedly superposing the step increment on the initial electron energy, and obtaining a mixture three-dimensional data corresponding to the mixed gas every time the step increment is superposed until the electron energy is superposed to be more than or equal to the ending electron energy, so as to obtain a group of mixture three-dimensional data corresponding to different electron energies.
After the initial electron energy has been ionized and three-dimensional data of the mixture is obtained, a step increment of the electron energy is obtained, for example, the step increment may be Δ j, and the step increment is repeatedly superimposed on the initial electron energy. E.g. after a step increment is superimposed, the electron energy is jmin+ Δ j, feeding the mixed gas under the electron energyPerforming secondary ionization to obtain a group of mixture three-dimensional data corresponding to the electron energy, and superposing the mixture three-dimensional data by a step increment to obtain the electron energy jminAnd +2 delta j, carrying out third ionization on the mixed gas under the electron energy, and obtaining a set of mixture three-dimensional data corresponding to the electron energy. And so on until the electron energy is superimposed to be greater than or equal to the termination electron energy. And after all the actions are finished, obtaining a group of mixture three-dimensional data corresponding to a plurality of electronic energies.
According to the three-dimensional data of the mixture, an array formed by a plurality of mixing relational expressions of which the ion relative percentage content under each mass number changes along with the change of the electron energy can be obtained.
In one embodiment of the invention, in order to make the scanning range of the electron energy cover the highest and lowest ionization energies of the gas and the mixed gas to be detected, the initial electron energy may be lower than the ionization energies of the gas and the mixed gas to be detected, and the final electron energy is higher than the ionization energies of the gas and the mixed gas to be detected.
The ionization energy tends to be different for different substances. Such as nitrogen and carbon monoxide, both of which have a molecular weight of 28Da, but the ionization energy of nitrogen is 15.58eV, and the ionization energy of carbon monoxide is 14.01 eV; further examples are ethylbenzene and ortho/meta/para-xylene each having the formula C8H10The molecular weights were all 106Da, but the ionization energy of ethylbenzene was 8.77eV, that of o-xylene was 8.56eV, that of m-xylene was 8.55eV, and that of p-xylene was 8.44 eV. The magnitude of the ionization energy determines under what conditions the substance may or may not be ionized. Taking an electron bombardment ion source as an example, when the energy of electrons is lower than the ionization energy of a substance, the substance cannot be ionized; a substance can be ionized when the electron energy is equal to or greater than the ionization energy of the substance. Thus, by scanning the electron energy and passing the scanning range of the electron energy through the electron energy value of the substance, the substance can be gradually ionized from completely non-ionized to gradually ionized. Furthermore, along with the increase of the electron energy, the second dimension information with ionization energy as a parameter can be given, and the mass number information of the first dimension is combinedAnd the third-dimensional ion relative percentage content information, so that the standard three-dimensional data of the gas to be detected and the mixture three-dimensional data of the mixed gas can be obtained.
In a further embodiment, the scanning range of electron energies may be 5eV to 100 eV.
Preferably, the above-mentioned step increment of the electron energy may be between 1eV and 5 eV.
In one embodiment of the present invention, the mass number of the three-dimensional data (including the standard three-dimensional data and the mixture three-dimensional data) covers all the mass numbers of all the ionized ions, or is smaller than the minimum mass-to-charge ratio of all the ionized ions and larger than the maximum mass-to-charge ratio of all the ionized ions. In mass spectrometry, the mass-to-charge ratio is equal to the mass number.
Furthermore, the stepping interval between two adjacent mass numbers is more than or equal to 0.1amu and less than or equal to 1amu, and amu is an atomic mass unit.
Referring to fig. 5, the present invention also provides a mass spectrometer for carrying out the above-described gas concentration detection method, the mass spectrometer of the present invention comprising an electron energy modulation system 1 and a mass spectrometry system.
The mass spectrometry system comprises a sample introduction system, an electron bombardment ion source 2, a quadrupole mass analysis system 3, a vacuum system and a mass spectrometry data analysis system 4.
The mass spectrometer provided by the invention is mainly used in the field of industrial online, and is used for online detection of process gases in a production process and monitoring the concentration of each gas in the process gases. For the detection of mixtures, usually in conjunction with gas chromatography, the mixture is separated and then fed to the sample injection system. However, the detection of the online mass spectrum is carried out in milliseconds during transient, and the separation of the gas chromatography takes longer time and cannot meet the requirement of industrial online detection, so that the sample introduction system of the mass spectrometer provided by the invention adopts a direct sample introduction mode to accelerate the detection speed.
The electron bombardment ion source 2 is connected with the sample introduction system and used for ionizing a sample, and the electron energy control system 1 is connected with the electron bombardment ion source 2 and used for adjusting the electron energy of bombardment electrons in the electron bombardment ion source, wherein the electron energy of the bombardment electrons is increased or decreased progressively according to a certain step length and a certain period.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (10)

1. A gas concentration detection method, comprising:
acquiring n groups of standard three-dimensional data corresponding to n types of gases to be detected, and establishing a standard relational expression of which the relative percentage content of ions changes along with the change of electron energy under each mass number according to the standard three-dimensional data;
acquiring three-dimensional data of a mixture corresponding to a mixed gas at least containing n kinds of gases to be detected, and establishing a mixing relation formula of which the relative percentage content of ions changes along with the change of electron energy under each mass number according to the three-dimensional data of the mixture;
and multiplying the standard relational expressions corresponding to the n gases to be detected under the same mass number by the corresponding concentration coefficients respectively, summing the standard relational expressions, establishing an equality relation with the mixed relational expression under the same mass number to form an equality equation, forming an equation set with a plurality of equality equations corresponding to a plurality of mass numbers, and solving to obtain the concentration coefficients.
2. The gas concentration detection method according to claim 1, wherein the acquiring n sets of standard three-dimensional data corresponding to n types of gases to be detected includes:
receiving a gas to be detected into an ion source;
acquiring initial electron energy, and acquiring first standard three-dimensional data corresponding to the gas to be detected under the initial electron energy;
acquiring a stepping increment of electron energy, repeatedly superposing the stepping increment on the initial electron energy, and acquiring one standard three-dimensional data corresponding to the gas to be detected every time the stepping increment is superposed, wherein the standard three-dimensional data is stopped until the electron energy is superposed to be more than or equal to the ending electron energy, and finally acquiring a group of standard three-dimensional data corresponding to different electron energies;
repeating the steps until n types of the gas to be detected are detected, and obtaining n groups of standard three-dimensional data corresponding to the n types of the gas to be detected one by one.
3. The gas concentration detection method according to claim 1, wherein the acquiring three-dimensional data of a mixture corresponding to a mixed gas containing at least n kinds of the gases to be detected includes:
receiving a mixed gas into an ion source, wherein the mixed gas at least comprises n kinds of gases to be detected;
acquiring initial electron energy, and acquiring first three-dimensional data of the mixture corresponding to the mixed gas under the initial electron energy;
and acquiring a stepping increment of electron energy, repeatedly superposing the stepping increment on the initial electron energy, and acquiring three-dimensional data of the mixture corresponding to the mixed gas every time the stepping increment is superposed until the electron energy is superposed to be more than or equal to the ending electron energy to obtain a group of three-dimensional data of the mixture corresponding to different electron energies.
4. The gas concentration detection method according to claim 2 or 3, wherein the initial electron energy is lower than the ionization energy of the gas to be detected and the mixed gas, and/or the terminating electron energy is higher than the ionization energy of the gas to be detected and the mixed gas.
5. The method according to claim 4, wherein the scanning range of the electron energy is 5eV to 100 eV.
6. The gas concentration detection method according to claim 5, wherein the step increment is 1eV or more and 5eV or less.
7. The gas concentration detection method according to claim 1, wherein the mass number is smaller than a minimum mass-to-charge ratio of all the ionized ions and larger than a maximum mass-to-charge ratio of all the ionized ions.
8. The gas concentration detection method according to claim 7, wherein a step interval between two adjacent mass numbers is 0.1amu or more and 1amu or less.
9. A mass spectrometer for performing the method of detecting a gas concentration as claimed in any one of claims 1 to 8, comprising an electron energy modulation system for modulating the electron energy of bombarding electrons in the mass spectrometry system and a mass spectrometry system.
10. The mass spectrometer of claim 9, wherein the mass spectrometry system comprises a sample introduction system, an electron bombardment ion source, a quadrupole mass analysis system, a vacuum system, an ion detection system, and a mass spectrometry data analysis system.
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