CN113804652A - OCT device - Google Patents

OCT device Download PDF

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Publication number
CN113804652A
CN113804652A CN202111015056.0A CN202111015056A CN113804652A CN 113804652 A CN113804652 A CN 113804652A CN 202111015056 A CN202111015056 A CN 202111015056A CN 113804652 A CN113804652 A CN 113804652A
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light
module
mirror
reflected
mirau
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孔冠岳
谢会开
赵晖
何方明
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Foshan Light Micro Technology Co ltd
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Foshan Light Micro Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods

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  • Life Sciences & Earth Sciences (AREA)
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  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
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  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The application provides an OCT device, its technical scheme main points are: the method comprises the following steps: the light source module is used for providing a line beam; the beam splitting and scanning module is used for receiving the line light beam provided by the light source module and reflecting the light beam; a mirau module for receiving the reflected light beam reflected by the beam splitting scanning module and generating a reference light and a sample light, wherein the sample light is irradiated by the mirau module, reflected back into the mirau module after being irradiated by a sample and interfered with the reference light to form an interference light, and the interference light is reflected back into the beam splitting scanning module in the mirau module; and the imaging module is used for receiving the interference light reflected back by the beam splitting scanning module and forming an image according to the interference light. The OCT device has the advantages of low production cost and good imaging quality.

Description

OCT device
Technical Field
The application relates to the technical field of medical diagnosis, in particular to an OCT device.
Background
Optical coherence tomography (OCT for short) is a biomedical Optical imaging method, which analyzes backscattered light of a biological tissue to enable a sample to be detected in real time and in vivo without performing a series of chemical processing processes such as slicing, dissociation, staining, and the like.
The OCT technique has the following features, high resolution: the imaging resolution ratio of micron order or below can be realized in biological tissues, and the ultrasonic imaging device is widely used for guiding medical accurate diagnosis and is 1-2 orders of magnitude higher than that of the ultrasonic imaging in the aspect of clinical medical treatment; the imaging speed is high: the scanning speed unit of the OCT system is from a few millimeters per second to hundreds of meters per second at first, the imaging speed reaches 20 frames per second and higher, and the OCT system can be used for real-time detection imaging of samples; non-invasive detection: the light source of the OCT system utilizes the near infrared diagnostic window band, the optical power of the instrument is several milliwatts, and the OCT system can be safely used for detecting and illuminating human tissues. OCT systems can be classified into: time and frequency domain optical coherence tomography.
Full-field OCT, a variation of time-domain optical coherence tomography, is known. With thermal light sources and spatial light paths, extremely high resolution in the order of microns is achieved while the entire surface can be imaged, however at the expense of imaging depth, due to crosstalk and low light source power, the signal-to-noise ratio of full-field OCT is also low. Typically, full-field OCT employs an expensive linnik interferometer configuration, which means that it requires deployment of a comparably expensive optics and motion mechanism on both the reference arm and the sample arm. Therefore, the existing full-field OCT has the technical problems of high price, limited detection depth and the like.
In view of the above problems, the inventors propose a new solution.
Disclosure of Invention
The application aims to provide an OCT device which has the advantages of low production cost and good imaging quality.
In a first aspect, an embodiment of the present application provides an OCT apparatus, and a technical solution is as follows:
the method comprises the following steps:
the light source module is used for providing a line beam;
the beam splitting and scanning module is used for receiving the line light beam provided by the light source module and reflecting the light beam;
a mirau module for receiving the reflected light beam reflected by the beam splitting scanning module and generating a reference light and a sample light, wherein the sample light is irradiated by the mirau module, reflected back into the mirau module after being irradiated by a sample and interfered with the reference light to form an interference light, and the interference light is reflected back into the beam splitting scanning module in the mirau module;
and the imaging module is used for receiving the interference light reflected back by the beam splitting scanning module and forming an image according to the interference light.
Further, in this application embodiment, the mirau module includes at least reference mirror and semi-reflecting and semi-transparent mirror, the reflected light beam passes the semi-reflecting and semi-transparent mirror forms the sample light, the reflected light beam by the semi-reflecting and semi-transparent mirror reflection forms the reference light, the reference mirror is used for with the reference light reflects back the semi-reflecting and semi-transparent mirror, the semi-reflecting and semi-transparent mirror is used for with the interference light reflects back the beam splitting scanning module.
Further, in the embodiment of the present application, the surface of the transflective mirror for receiving the reflected light beam is provided with a beam splitting film which splits the reflected light beam into 3: 7, the reference light and the sample light are divided, and an antireflection film is arranged on the other surface of the semi-reflecting and semi-transmitting lens.
Further, in the embodiment of the application, an au film is arranged at the center of the surface of the reference mirror close to one side of the semi-reflecting and semi-transmitting mirror, an antireflection film is arranged at other positions of the periphery of the au film on the surface, and an antireflection film is arranged on the other surface of the reference mirror.
Further, in this application embodiment, the mirau module further includes an objective lens, and the objective lens is used for converging the reflected light beam onto the reference mirror and the semi-reflecting and semi-transmitting mirror.
Further, in the embodiment of the present application, the mirau module includes a window mirror 340, and the window mirror is fixed on the semi-reflecting and semi-transmitting mirror.
Further, in this embodiment of the present application, the beam splitting and scanning module includes a beam splitter and a galvanometer, the beam splitter is configured to split the line beam into two beams of light in different directions and reflect the interference light to the imaging module, and the galvanometer is configured to receive a beam of light split from the beam splitter and reflect the beam of light into the mirau module.
Further, in the present embodiment, the beam splitter is a non-polarizing beam splitting cube.
Further, in this embodiment of the present application, the light source module includes a laser, an optical fiber collimator, and a cylindrical mirror, the laser outputs a light beam to the optical fiber collimator, the optical fiber collimator is configured to convert the light beam into a gaussian light beam, and the cylindrical mirror receives the gaussian light beam and focuses the gaussian light beam into the line light beam.
Further, in this embodiment of the application, the imaging module includes a sleeve lens and a line camera, the sleeve lens is configured to converge the interference light onto an image plane of the line camera, and the line camera converts the interference light into an electrical signal to generate an image.
From the above, the OCT apparatus provided in the present application utilizes the light source module to perform ultra-wide spectral output, and emits the line beam to the beam splitting scanning module, which splits the line beam into two beams of light in different directions, wherein one of the beams is emitted to the mirau module as a reflected light beam, which is decomposed into reference light and sample light in the mirau module, the sample light passes through the mirau module and then irradiates on the sample, the sample light is reflected back to the mirau module on the sample, the reflected sample light and the reference light interfere in the mirau module to form interference light, the interference light returns to the beam splitting scanning module along the light path, and the beam splitting scanning module reflects the interference light to the imaging module.
Additional features and advantages of the present application will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the embodiments of the present application. The objectives and other advantages of the application may be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
Fig. 1 is a schematic structural diagram of an OCT apparatus according to an embodiment of the present disclosure.
Fig. 2 is a schematic structural diagram of an OCT apparatus according to an embodiment of the present disclosure.
Fig. 3 is a schematic structural diagram of an OCT apparatus according to an embodiment of the present disclosure.
Fig. 4 is a schematic diagram illustrating a process of emitting a light beam from a light source module toward a sample.
FIG. 5 is a schematic diagram of the process of imaging the interference light toward the imaging module
In the figure: 100. a light source module; 200. a beam splitting scanning module; 300. a mirau module; 400. an imaging module; 500. a PZT translation stage; 110. a laser; 120. a fiber collimator; 130. a cylindrical mirror; 210. a beam splitter; 220. a galvanometer; 310. an objective lens; 320. a reference mirror; 330. a half-reflecting and half-transmitting mirror; 340. a window mirror; 410. a sleeve lens; 420. a line scan camera.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.
Referring to fig. 1 to 5, an OCT apparatus includes:
a light source module 100 for providing a line beam;
a beam splitting and scanning module 200 for receiving the line beam from the light source module 100 and reflecting the beam;
the mirau module 300 is configured to receive the reflected light beam reflected by the beam splitting scanning module 200 and generate reference light and sample light, the sample light is irradiated on the sample through the mirau module 300 and then reflected back into the mirau module 300 to interfere with the reference light to form interference light, and the interference light is reflected back into the beam splitting scanning module 200 in the mirau module 300;
and an imaging module 400 for receiving the interference light reflected by the beam splitting scanning module 200 and forming an image according to the interference light.
Through the above technical solution, the light source module 100 is utilized to perform ultra-wide spectral output, a line beam is emitted to the beam splitting scanning module 200, the beam splitting scanning module 200 splits the line beam into two beams of light in different directions, one beam of the light is dissipated in the air, the other beam of the light is emitted to the mirau module 300 as a reflected beam, the reflected beam is split into a reference light and a sample light in the mirau module 300, the sample light passes through the mirau module 300 and then irradiates on a sample, the sample light irradiates on the sample and then is reflected back to the mirau module 300 by the sample, the reflected sample light and the reference light interfere in the mirau module 300 to form an interference light, the interference light returns to the beam splitting scanning module 200 along a light path, the beam splitting scanning module 200 reflects the interference light to the imaging module 400, compared with the conventional OCT, in the technical solution provided by the present application, the mirau structure is used, and two expensive linnik interferometer structures are not needed, therefore, the method has the beneficial effect of low production cost.
Further, in some embodiments, the mirau module 300 includes at least a reference mirror 320 and a half-reflecting and half-transmitting mirror 330, the reflected light beam passes through the half-reflecting and half-transmitting mirror 330 to form the sample light, the reflected light beam is reflected by the half-reflecting and half-transmitting mirror 330 to form the reference light, the reference mirror 320 is used for reflecting the reference light back to the half-reflecting and half-transmitting mirror 330, and the half-reflecting and half-transmitting mirror 330 is used for reflecting the interference light back to the beam splitting and scanning module 200.
Through the above technical solution, the reflected light beam reflected by the beam splitting scanning module 200 is emitted into the mirau module 300, the reflected light beam passes through the reference mirror 320 and is emitted to the semi-reflective and semi-transparent mirror 330, wherein, a part of the reflected light beam is transmitted through the half-reflecting and half-transmitting mirror 330 to the sample, the part of the light beam is the sample light, the other part of the reflected light beam is reflected by the half-reflecting and half-transmitting mirror 330, this portion of light is the reference light, which is reflected onto the reference mirror 320, then reflected back onto the transflective mirror 330 on the reference mirror 320, in this process, the sample light is reflected back to the half mirror 330 after impinging on the sample, so that the reflected sample light interferes with the reflected reference light to form interference light, the interference light is reflected back to the beam splitting and scanning module 200 along the original optical path on the half mirror 330, enters the imaging module 400 under the reflection of the split beam scanning module 200, and then forms an image.
Further, in some embodiments, the surface of the half mirror 330 for receiving the reflected light beam is provided with a beam splitting film, and the beam splitting film splits the reflected light beam into 3: 7 into reference light and sample light, and an anti-reflection film is provided on the other surface of the half-reflecting and half-transmitting mirror 330.
Through the above technical solution, the transflective mirror 330 utilizes 3: 7 reflects the light beam in a direction of 3: 7, and an anti-reflection film is arranged on the other surface of the half-reflecting and half-transmitting mirror 330 to reduce unnecessary interference effect caused by the interaction of the reflected light from the front surface and the back surface of the optical element, thereby reducing energy loss and improving optical imaging quality.
In some embodiments, the applicable wavelength range of the beam splitting film is the same as that of the antireflection film, for example, both of them are 600nm to 900 nm.
Further, in some embodiments, the reference mirror 320 is provided with an au film at the center of the surface close to the half-reflecting and half-transmitting mirror 330, an antireflection film is provided at other positions around the au film on the surface, and an antireflection film is provided on the other surface of the reference mirror 320.
According to the technical scheme, the antireflection films are arranged on the two surfaces of the reference mirror 320 and used for reducing unnecessary interference effect caused by interaction of reflected light of the front surface and the back surface of the optical element, so that light can penetrate through the reference mirror 320 as much as possible, the imaging quality is further improved, the au film is arranged at the central position of the surface close to one side of the semi-reflective and semi-transparent mirror 330, the reference light reflected on the semi-reflective and semi-transparent mirror 330 is emitted to the au film of the reference mirror 320, and the au film reflects the reference light back to the semi-reflective and semi-transparent mirror 330 and further interferes with the reflected sample light to form interference light.
In still other embodiments, the au film is only disposed within 1mm of the center of the surface of the reference mirror 320 on the side close to the transflective mirror 330, that is, the au film is circular with a diameter of 1mm and centered on the center of the surface, and an antireflection film is disposed on the surface of the reference mirror 320 except for the circular area with a diameter of 1mm, where the diameter of the reference mirror 320 is greater than 1mm by default.
Specifically, in some embodiments, the half-reflecting half-mirror 330 and the reference mirror 320 are made of a substrate of ultraviolet-grade fused silica, which has higher transmittance of deep ultraviolet light, better uniformity and lower coefficient of thermal expansion than N-BK7, and the ultraviolet light is as low as 185 nm.
Further, in some embodiments, the mirau module 300 further includes an objective lens 310, and the objective lens 310 is used for converging the reflected light beam onto the reference mirror 320 and the transflective mirror 330.
By the technical scheme, the objective lens 310 is used for correcting axial chromatic aberration and eliminating secondary spectrum, so that the whole view field can be displayed clearly, and better imaging quality is further generated.
Specifically, the objective lens 310 may be a commercially available long working distance objective lens 310 commonly used in the market, such as Olympus SLMPLN 20X.
Further, in some of the embodiments, the mirau module 300 includes a window mirror 340, and the window mirror 340 is fixed on the half mirror 330.
Through the technical scheme, the window mirror 340 is used for providing protection from the external environment.
Specifically, the window mirror 340 is also composed of a fused silica substrate lens.
In some embodiments, the reference mirror 320 is composed of a lens barrel and a lens, the lens barrel of the reference mirror 320 is fixed on the objective lens 310, and the lens of the reference mirror 320 is attached to the objective lens 310; the half-reflecting and half-transmitting mirror 330 is composed of a lens barrel and a lens, and the lens barrel of the half-reflecting and half-transmitting mirror 330 is fixed on the reference mirror 320; the window mirror 340 is composed of a lens barrel and a lens, and the lens barrel of the window mirror 340 is fixed on the half-reflecting half-transmitting mirror 330.
Further, in some embodiments, the beam splitting and scanning module 200 includes a beam splitter 210 and a galvanometer 220, the beam splitter 210 is configured to split the line beam into two beams of light with different directions and reflect the interference light onto the imaging module 400, and the galvanometer 220 is configured to receive one beam of light split from the beam splitter 210 and reflect the beam of light into the mirau module 300.
According to the technical scheme, the line beam emitted from the light source module 100 is firstly incident on the beam splitter 210, the beam splitter 210 divides the line beam into two directions of light, wherein the light in one direction is dissipated in the air, the light in the other direction is emitted to the vibrating mirror 220, the vibrating mirror 220 reflects the light into the mirau module 300, interference light formed by interference of reference light and sample light on the mirau module 300 is reflected inside the mirau module 300 and returns along an incident light path, the interference light is emitted to the vibrating mirror 220 from the mirau module 300 and then reflected back to the beam splitter 210 from the vibrating mirror 220, and the interference light enters the imaging module 400 under the reflection of the beam splitter 210 and then forms an image by the imaging module 400.
Further, in some of these embodiments, beam splitter 210 is a non-polarizing beam splitting cube.
By the technical scheme, the non-polarization beam splitting cube can split incident light into two directions at the same ratio regardless of the wavelength and the polarization state of the light.
Specifically, in some embodiments, galvanometer 220 is a moving magnet galvanometer of a cross flexure bearing design. The galvanometer 220 may be a one-dimensional galvanometer or a two-dimensional galvanometer.
Through the technical scheme, the moving magnetic galvanometer can provide smooth and stable scanning motion, errors caused by noise and lubrication are eliminated through the design of the crossed flexible bearings, and meanwhile abrasion of components is reduced. The angular orientation and position of the galvanometer 220 is measured by a capacitive sensing system that is integrated within the galvanometer 220 and can operate in a closed loop. In the continuous scanning, the galvanometer 220 can be driven to scan the whole optical range of +/-20 degrees, so that plane scanning is realized, namely, the position of the sample light irradiated on the sample is changed by changing the angle of the galvanometer 220, and observation images on different positions of the sample plane are finally obtained.
Further, in some embodiments, the light source module 100 includes a laser 110, a fiber collimator 120, and a cylindrical mirror 130, the laser 110 outputs a light beam to a fiber, the fiber is used to transmit the light beam to the fiber collimator 120, the fiber collimator 120 is used to convert the light beam into a gaussian light beam, and the cylindrical mirror 130 receives the gaussian light beam and focuses the gaussian light beam into a linear light beam.
Through the technical scheme, the sample is observed by utilizing the line beam generated by the light source module 100.
Specifically, in some embodiments, the laser 110 may adopt a super-continuum laser 110, which is based on the principle that ultra-short pulse laser is coupled into a high-nonlinearity fiber, typically a photonic crystal fiber PCF, so that the pulse spectrum of the output light is broadened due to the nonlinear effect, four-wave mixing and optical soliton effect of the fiber, and the spectral width is 0.4um to 2.4um, thereby realizing ultra-wide spectral output.
The light output from the laser 110 is transmitted through an optical fiber into a fiber collimator 120. The optical fiber is a fiber made of glass, and serves as a light transmission means for transmitting a wide spectrum laser by total reflection of light.
Divergent light transmitted from the end of the optical fiber is changed into a gaussian beam of approximately parallel light by the collimator, and is projected onto the cylindrical mirror 130.
The cylindrical lens 130 is an ideal choice for one-dimensional zoom application, the spherical lens has symmetrical effect on the incident light in two directions, the cylindrical lens has only one effect on the incident light in one direction, beam shaping is realized through the cylindrical lens 130, and a single cylindrical lens focuses parallel beams into a linear beam.
The cylindrical mirror 130 is used to focus the light beam into a linear light beam, and only the light emitted by the line on the focal plane can be imaged by the imaging module 400 in the linear-field confocal light path; light rays emitted from lines outside the focal plane are out of focus at the image plane and are mostly unable to reach the photosensitive elements within the imaging module 400. Therefore, the observed target on the focal plane presents bright color, the non-observed point is used as the background to present black color, the contrast is increased, the image is clearer, and the imaging quality is improved.
In other embodiments, a xenon lamp may be used as the light source in place of the laser 110.
Further, in some embodiments, the imaging module 400 includes a sleeve lens 410 and a line camera 420, the sleeve lens 410 is used for converging the interference light onto an image plane of the line camera 420, and the line camera 420 converts the interference light into an electrical signal to generate an image.
Through the above technical solution, the interference light enters the sleeve lens 410 under the reflection of the beam splitting scanning module 200, and the sleeve lens 410 corrects the incident interference light and also corrects apochromatism, thereby realizing diffraction limit performance on the whole field of view. Then, the interference light is converged on an image plane of the line camera 420 by the sleeve lens 410. The line camera 420 is a special camera for converting an optical image into a one-dimensional video signal for output, and compared with an area camera, a sensor of the line camera 420 has only one line of photosensitive elements, so that high scanning frequency and high resolution imaging can be realized.
The sleeve lens 410 may also be a commercially available lens, and specifically, the focal length of the sleeve lens 410 is 200 mm.
In other embodiments, an area-array camera may be used in place of line camera 420.
In addition, in some embodiments, the mirau module 300 is disposed on the PZT translation stage 500, and the PZT translation stage 500 drives the whole mirau module 300 to move up and down, so that the full-depth scanning of the sample can be realized.
Specifically, the PZT translation stage 500 is driven by a piezoelectric translation stage driven by piezoelectric ceramics as a basic element in a mechanism amplification manner, and under the same driving voltage, the displacement of the mechanism amplification stage is several times to dozens of times of that of the conventional direct-drive stage, and the PZT translation stage has a nanoscale resolution and a millisecond-level response time.
In particular, in some embodiments, a five frame phase shift method is employed to improve the signal-to-noise ratio of the image. The algorithm needs to be calculated by five depth-related frames E1, E2, E3, E4 and E5, and according to (E4-E2) ^ 2- (E1-E3) (E3-E5), the phase difference between every two adjacent frames is pi/2. The phase shift is performed by the PZT translation stage 500, for example, with the center wavelength of the light source being 800nm and the refractive index of the tissue being set to 1.5, then the distance each frame requires the PZT translation stage 500 to move is 800/(4 × 1.5) =133.3 nm. This displacement produces a pi/2 optical phase shift in the interferometer. This oscillation is performed in each frame of the overall process of depth scanning performed by the PZT translation stage 500. Where one wavelength is 2Pi, the distance corresponding to Pi/2 needs to be divided by 4.
In summary, in the solution of the present application, a laser 110 with a super-continuum spectrum is used to provide a light beam, the light beam is output to an optical fiber and transmitted through the optical fiber, the light beam enters an optical fiber collimator 120 from the optical fiber, the light beam is expanded into parallel light through the optical fiber collimator 120, the parallel light is focused into a line beam by a cylindrical mirror 130, the line beam is incident on a beam splitter 210, one of the line beam passes through the beam splitter 210 and irradiates on a vibrating mirror 220, and is reflected to an objective lens 310 through the vibrating mirror 220, the reflected light beam passes through the objective lens 310 and a reference mirror 320 and reaches a semi-reflective and semi-transmissive mirror 330, is split into reference light and sample light on the semi-reflective and semi-transmissive mirror 330, the reference light is reflected to the reference mirror 320 through the semi-reflective and semi-transmissive mirror 330 and a window mirror 340 and enters a sample, and is reflected back to the semi-reflective and semi-transmissive mirror 330 in the sample, the reference light is reflected back to the semi-reflective and semi-reflective sample light by the reference mirror 320 and interferes with the sample light to form interference light, the interference light is reflected to the galvanometer 220 by the half-reflecting and half-transmitting mirror 330 along an incident light path, reflected to the beam splitter 210 at the galvanometer 220, reflected to the sleeve lens 410 at the beam splitter 210, converged into a plurality of light spots through the sleeve lens 410 on an image plane of the line camera 420, and converted into a one-dimensional video signal by the line camera 420 to be output, and finally generated into an image.
The above description is only an example of the present application and is not intended to limit the scope of the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (10)

1. An OCT device, comprising:
a light source module (100) for providing a line beam;
a beam splitting and scanning module (200) for receiving the line beam provided from the light source module (100) and reflecting the beam;
a mirau module (300) for receiving the reflected light beam reflected by the beam splitting scanning module (200) and generating a reference light and a sample light, wherein the sample light is reflected back into the mirau module (300) after being irradiated on a sample through the mirau module (300) and interferes with the reference light to form interference light, and the interference light is reflected back into the beam splitting scanning module (200) in the mirau module (300);
and the imaging module (400) is used for receiving the interference light reflected back by the beam splitting scanning module (200) and forming an image according to the interference light.
2. The OCT apparatus of claim 1, wherein the mirau module (300) comprises at least a reference mirror (320) and a half-mirror (330), wherein the reflected light beam passes through the half-mirror (330) to form the sample light, the reflected light beam is reflected by the half-mirror (330) to form the reference light, the reference mirror (320) is configured to reflect the reference light back to the half-mirror (330), and the half-mirror (330) is configured to reflect the interference light back to the split-beam scanning module (200).
3. The OCT apparatus of claim 2, wherein the surface of the half mirror (330) for receiving the reflected light beam is provided with a beam splitting film that splits the reflected light beam into 3: 7, and the other surface of the half-reflecting and half-transmitting mirror (330) is provided with an antireflection film.
4. The OCT device of claim 2, wherein the reference mirror (320) has an au film disposed at the center of the surface near the half mirror (330), and an anti-reflective film disposed at other positions around the au film on the surface, and the other surface of the reference mirror (320) has an anti-reflective film.
5. The OCT apparatus of claim 2, wherein the mirau module (300) further comprises an objective lens (310), and wherein the objective lens (310) is configured to focus the reflected light beam onto the reference mirror (320) and the half mirror (330).
6. OCT device according to claim 2, characterized in that said mirau module (300) comprises a window mirror (340), said window mirror (340) being fixed to said semi-reflecting and semi-transparent mirror (330).
7. The OCT apparatus of claim 1, wherein the split scanning module (200) comprises a beam splitter (210) and a galvanometer (220), the beam splitter (210) being configured to split the line beam into two beams of light in different directions and reflect the interference light onto the imaging module (400), and the galvanometer (220) being configured to receive a beam of light split from the beam splitter (210) and reflect the beam of light into the mirau module (300).
8. The OCT apparatus of claim 7, wherein the beam splitter (210) is a non-polarizing beam splitting cube.
9. The OCT apparatus of claim 1, wherein the light source module (100) comprises a laser (110), a fiber collimator (120), and a cylindrical mirror (130), wherein the laser (110) outputs a light beam to the fiber collimator (120), the fiber collimator (120) is configured to convert the light beam into a gaussian light beam, and the cylindrical mirror (130) receives the gaussian light beam and focuses the gaussian light beam into the line light beam.
10. The OCT apparatus of claim 1, wherein the imaging module (400) comprises a sleeve lens (410) and a line camera (420), the sleeve lens (410) being configured to focus the interference light onto an image plane of the line camera (420), the line camera (420) converting the interference light into an electrical signal and generating an image.
CN202111015056.0A 2021-08-31 2021-08-31 OCT device Pending CN113804652A (en)

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* Cited by examiner, † Cited by third party
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CN115541599A (en) * 2022-11-30 2022-12-30 常州微亿智造科技有限公司 Defect detection method and system based on optical coherence tomography

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115541599A (en) * 2022-11-30 2022-12-30 常州微亿智造科技有限公司 Defect detection method and system based on optical coherence tomography
CN115541599B (en) * 2022-11-30 2023-01-31 常州微亿智造科技有限公司 Defect detection method and system based on optical coherence tomography

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