CN113745954A - Light beam pointing stabilization system - Google Patents
Light beam pointing stabilization system Download PDFInfo
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- CN113745954A CN113745954A CN202010481801.XA CN202010481801A CN113745954A CN 113745954 A CN113745954 A CN 113745954A CN 202010481801 A CN202010481801 A CN 202010481801A CN 113745954 A CN113745954 A CN 113745954A
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- wave front
- adjusting mirror
- stabilization system
- quick adjusting
- laser
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0071—Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0085—Modulating the output, i.e. the laser beam is modulated outside the laser cavity
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10038—Amplitude control
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10053—Phase control
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/101—Lasers provided with means to change the location from which, or the direction in which, laser radiation is emitted
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0071—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for beam steering, e.g. using a mirror outside the cavity to change the beam direction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0085—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for modulating the output, i.e. the laser beam is modulated outside the laser cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses a light beam pointing stabilization system which is used for carrying out amplitude modulation on laser wave front of a femtosecond laser and comprises a wave front quick adjusting mirror, a position sensitive element, a signal processing system and a laser beam splitter, wherein the wave front quick adjusting mirror forms a first space of a core space of a light beam pointing stabilization system, the light intensity in the first space is total light intensity, photons are distributed in the first space in a Gaussian distribution mode, the wave front quick adjusting mirror is insensitive to wave number and is controlled by the signal processing system, the signal processing system sends a phase control signal to the wave front quick adjusting mirror, the signal guides the wave front quick adjusting mirror to carry out amplitude modulation on laser beams, and the two wave front quick adjusting mirrors are respectively arranged on two sides of light source outgoing light beams and are oppositely arranged. The beam pointing stabilization system disclosed by the invention can accurately control the pointing of the laser beam and reduce the cost.
Description
Technical Field
The invention relates to a light beam pointing stabilization system.
Background
With the rapid development of laser-assisted machining and micro-nano manufacturing technologies, advanced manufacturing technologies represented by the military industry and the aerospace industry are continuously developed towards miniaturization and high precision, and higher requirements are provided for various indexes of a laser system and overall precision indexes of a micro-nano part preparation platform. In order to solve the difficulty in manufacturing the functional micro-nano structure of the high-precision equipment and research on required supporting equipment, the requirement on the precision of the equipment needs to be improved.
The light beam stabilizing technology is widely applied to the high-end fields of space optical communication, photoetching machines and the like. In space optical communication, if the pointing deviation of a light beam at a transmitting end is too large, communication between the two parties fails; in the application of a lithography machine, the pointing direction and the position stability of the illumination light beam greatly restrict the lithography quality and affect the yield of lithography products, so that a light beam stabilizing technology is necessarily introduced to maintain the pointing direction and the position deviation of the light beam within a controllable range.
In the existing light beam stabilizing technology, a light beam position detecting optical system and a light beam position adjusting system consisting of two electric reflecting mirrors are mostly adopted to form a light beam stabilizing device, and the position and the direction of a light beam are corrected to be within a specified tolerance error by controlling the two electric reflecting mirrors which can only rotate in two orthogonal directions according to the output of the light beam position detecting optical system. This approach may have large deviations that affect the accuracy of the stability of the entire system.
Disclosure of Invention
In order to solve the technical problem, the invention provides a light beam pointing stabilization system so as to achieve the purpose of quickly and accurately controlling the pointing of a laser beam.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a light beam pointing stabilization system is used for amplitude modulation of laser wave front of a femtosecond laser and comprises a wave front quick adjusting mirror, a position sensitive element, a signal processing system and a laser beam splitter, wherein the wave front quick adjusting mirror forms a first space of a core space of the light beam pointing stabilization system, light intensity in the first space is total light intensity, photons are distributed in the first space in a Gaussian distribution mode, the wave front quick adjusting mirror is insensitive to wave number and is controlled by the signal processing system, the signal processing system sends a phase control signal to the wave front quick adjusting mirror, and the signal guides the wave front quick adjusting mirror to carry out amplitude modulation on laser beams; the two wavefront rapid adjusting mirrors are respectively arranged on two sides of the light source emergent light beam and are oppositely arranged.
In the scheme, the working wavelength of the light beam pointing stabilization system is 1030 nm.
In the above solution, the wavefront fast adjusting mirror has a three-dimensional concave curved surface structure, and the three-dimensional concave curved surface is described by the following formula:
or by the following formula:
or the following formula:
wherein x is the distribution of the three-dimensional concave curved surface on the horizontal axis of the coordinate axis, y is the distribution of the three-dimensional concave curved surface on the vertical axis of the coordinate axis, z is the distribution of the three-dimensional concave curved surface on the z axis of the coordinate axis, and a and b are distribution coefficients.
In the above scheme, the laser beam splitter is located between the position sensitive element and the wavefront rapid adjusting mirror, and the wavefront rapid adjusting mirror is arranged close to the light source.
In the above scheme, the phase control signal amplitude calculation formula is:
wherein, thetanFor controlling the amplitude of the signal, theta, for the phase at time nn-1Controlling the amplitude, alpha, of the signal for the phase at time n-1n-1Quickly adjusting the axial included angle x of the lens for the wavefront at the n-1 th moment1、x2、x3To scale factor, μ and ν are errors.
According to the technical scheme, the light beam pointing stabilization system provided by the invention detects the position information of the light spot through the position sensitive element and transmits the position information to the signal processing system, the signal processing system sends a phase control signal to the wavefront rapid adjusting mirror, the signal guides the wavefront rapid adjusting mirror to carry out amplitude modulation on the laser beam, and the modulated laser beam is split and output after passing through the laser beam splitter. The beam pointing stabilization system is simple in composition, can realize beam adjustment on the basis of the existing device, and meets the requirement on the pointing stability of the laser beam.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below.
Fig. 1 is a schematic diagram illustrating a beam pointing stabilization system according to an embodiment of the present invention.
In the figure, 1, a wave front quick adjusting mirror; 2. a position sensitive element; 3. a signal processing system; 4. a laser beam splitter; 5. a light source.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
The invention provides a light beam pointing stabilization system, as shown in fig. 1, the system is used for amplitude modulation of laser wave front of a femtosecond laser, and comprises a wave front quick adjusting mirror 1, a position sensitive element 2, a signal processing system 3 and a laser beam splitter 4, wherein the wave front quick adjusting mirror 1 forms a first space of a core space of the light beam pointing stabilization system, light intensity in the first space is total light intensity, photons are distributed in the first space in a Gaussian distribution mode, the wave front quick adjusting mirror 1 is insensitive to wave number, the wave front quick adjusting mirror 1 is controlled by the signal processing system 3, the signal processing system 3 sends a phase control signal to the wave front quick adjusting mirror 1, and the signal guides the wave front quick adjusting mirror 1 to perform amplitude modulation on laser beams. The wavefront quick adjusting mirror 1 comprises two wavefront quick adjusting mirrors which are respectively arranged on two sides of the emergent light beam of the light source and are oppositely arranged.
In this embodiment, the operating wavelength of the beam pointing stabilization system is 1030 nm.
The wavefront quick adjusting mirror 1 has a three-dimensional concave curved surface structure, and the three-dimensional concave curved surface is described by the following formula:
or by the following formula:
or the following formula:
wherein x is the distribution of the three-dimensional concave curved surface on the horizontal axis of the coordinate axis, y is the distribution of the three-dimensional concave curved surface on the vertical axis of the coordinate axis, z is the distribution of the three-dimensional concave curved surface on the z axis of the coordinate axis, and a and b are distribution coefficients.
The laser beam splitter 4 is positioned between the position sensitive element 2 and the wavefront rapid-adjusting mirror 1, and the wavefront rapid-adjusting mirror 1 is arranged close to the light source 5.
The phase control signal amplitude calculation formula is as follows:
wherein, thetanFor controlling the amplitude of the signal, theta, for the phase at time nn-1Controlling the amplitude, alpha, of the signal for the phase at time n-1n-1The axial included angle x of the wave front quick adjusting mirror 1 at the n-1 th moment1、x2、x3For scale factor, μ and v are errors.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (5)
1. A light beam pointing stabilization system is used for amplitude modulation of the laser wave front of a femtosecond laser and comprises a wave front quick adjusting mirror, a position sensitive element, a signal processing system and a laser beam splitter, and is characterized in that the wave front quick adjusting mirror forms a first space of a core space of the light beam pointing stabilization system, the light intensity in the first space is total light intensity, photons are distributed in the first space in a Gaussian distribution mode, the wave front quick adjusting mirror is insensitive to wave number and is controlled by the signal processing system, the signal processing system sends a phase control signal to the wave front quick adjusting mirror, and the signal guides the wave front quick adjusting mirror to carry out amplitude modulation on laser beams; the two wavefront rapid adjusting mirrors are respectively arranged on two sides of the light source emergent light beam and are oppositely arranged.
2. The beam-pointing stabilization system of claim 1, wherein the beam-pointing stabilization system operates at a wavelength of 1030 nm.
3. The beam pointing stabilization system of claim 1, wherein the wavefront fast-adjusting mirror has a three-dimensional concave curved surface structure, the three-dimensional concave curved surface being described by the following formula:
or by the following formula:
or the following formula:
wherein x is the distribution of the three-dimensional concave curved surface on the horizontal axis of the coordinate axis, y is the distribution of the three-dimensional concave curved surface on the vertical axis of the coordinate axis, z is the distribution of the three-dimensional concave curved surface on the z axis of the coordinate axis, and a and b are distribution coefficients.
4. The beam pointing stabilization system of claim 1, wherein the laser beam splitter is positioned between the position sensitive element and a wavefront quick adjusting mirror disposed proximate to the light source.
5. The beam pointing stabilization system of claim 1, wherein the phase control signal amplitude calculation is formulated as:
wherein, thetanFor controlling the amplitude of the signal, theta, for the phase at time nn-1Controlling the amplitude, alpha, of the signal for the phase at time n-1n-1Quickly adjusting the axial included angle x of the lens for the wavefront at the n-1 th moment1、x2、x3For scale factor, μ and v are errors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010481801.XA CN113745954A (en) | 2020-05-27 | 2020-05-27 | Light beam pointing stabilization system |
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| CN202010481801.XA CN113745954A (en) | 2020-05-27 | 2020-05-27 | Light beam pointing stabilization system |
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| CN113745954A true CN113745954A (en) | 2021-12-03 |
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Citations (6)
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|---|---|---|---|---|
| CN103765705A (en) * | 2011-08-18 | 2014-04-30 | Ipg光子公司 | High power fiber pump source with high brightness low noise output in about 974 - 1030 nm wavelength range |
| CN104577687A (en) * | 2015-01-04 | 2015-04-29 | 中国科学院上海光学精密机械研究所 | All-solid-state laser device of 1030 nm |
| CN106207725A (en) * | 2016-09-26 | 2016-12-07 | 中国工程物理研究院应用电子学研究所 | A kind of 1030nm laser amplifier based on Yb dosed optical fiber |
| CN107121189A (en) * | 2017-03-24 | 2017-09-01 | 中国科学院光电研究院 | A kind of light beam pointing control system and its construction method based on FPGA |
| CN108169894A (en) * | 2018-02-08 | 2018-06-15 | 中国科学院西安光学精密机械研究所 | A kind of quick regulator control systems of light beam MEMS |
| CN109781032A (en) * | 2019-02-28 | 2019-05-21 | 西安交通大学 | Based on the optical freeform optics surface face shape interferometric measuring means of cascade adaptive and measurement method |
-
2020
- 2020-05-27 CN CN202010481801.XA patent/CN113745954A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103765705A (en) * | 2011-08-18 | 2014-04-30 | Ipg光子公司 | High power fiber pump source with high brightness low noise output in about 974 - 1030 nm wavelength range |
| CN104577687A (en) * | 2015-01-04 | 2015-04-29 | 中国科学院上海光学精密机械研究所 | All-solid-state laser device of 1030 nm |
| CN106207725A (en) * | 2016-09-26 | 2016-12-07 | 中国工程物理研究院应用电子学研究所 | A kind of 1030nm laser amplifier based on Yb dosed optical fiber |
| CN107121189A (en) * | 2017-03-24 | 2017-09-01 | 中国科学院光电研究院 | A kind of light beam pointing control system and its construction method based on FPGA |
| CN108169894A (en) * | 2018-02-08 | 2018-06-15 | 中国科学院西安光学精密机械研究所 | A kind of quick regulator control systems of light beam MEMS |
| CN109781032A (en) * | 2019-02-28 | 2019-05-21 | 西安交通大学 | Based on the optical freeform optics surface face shape interferometric measuring means of cascade adaptive and measurement method |
Non-Patent Citations (1)
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| 张清平等: "《高等数学（下册）》", 31 May 2013 * |
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Application publication date: 20211203 |