CN113701798B - Calibrating device and method for two-dimensional grid standard plate - Google Patents
Calibrating device and method for two-dimensional grid standard plate Download PDFInfo
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- CN113701798B CN113701798B CN202110999388.0A CN202110999388A CN113701798B CN 113701798 B CN113701798 B CN 113701798B CN 202110999388 A CN202110999388 A CN 202110999388A CN 113701798 B CN113701798 B CN 113701798B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
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Abstract
The invention belongs to the technical field of ultra-precise machining and measurement, and discloses a calibration device for a two-dimensional grid standard plate, which comprises a base and a standard plate bearing table movably mounted at the top of the base, wherein the top of the base is provided with a front positioning pin, a left positioning pin and a right positioning pin, the front positioning pin is provided with two front positioning pins and is arranged at the front part of the standard plate bearing table, the left positioning pin and the right positioning pin are respectively arranged at the left side and the right side of the standard plate bearing table, and the top of the base is also provided with a left ejector rod and a right ejector rod. According to the two-grid standard plate calibration device disclosed by the invention, the rotation or translation pose of the standard plate is changed by the positioning pin and the ejector rod, a rotating motor and a linear motor are not needed, the device structure is simplified, the difficulty and the manufacturing cost for building the device structure are reduced, error factors such as system vibration and the like can be eliminated, and the calibration precision is improved.
Description
Technical Field
The invention belongs to the technical field of ultra-precise machining and measurement, and particularly relates to a device and a method for calibrating a two-dimensional grid standard plate.
Background
The two-dimensional grid standard plate calibration device is a key component of ultra-precise machining and detection equipment, the motion and positioning precision of a two-dimensional ultra-precise workbench determines the machining or detection precision, and the two-dimensional grid standard plate is usually used for calibrating the motion error of the two-dimensional workbench. Calibration work on two-dimensional grid standard plates has been a challenge since the accuracy of the two-dimensional grid standard plates themselves has been high. The self-calibration method uses a two-dimensional workbench with the precision level not higher than that of a two-dimensional grid standard plate to calibrate, changes the position and the posture of the two-dimensional grid template on the workbench through rotation and translation gesture conversion operation, and obtains the grid error of the position of each grid point through data processing of a certain step.
In 1984, a two-dimensional positioning precision self-calibration method is first proposed by M.Raugh of the university of Stenford in the United states, and is applied to precision calibration of an ultra-precise workbench of an electron beam lithography machine, but the corresponding calibration algorithm is not perfect. Until 1996, j.ye at the university of stanford realized a self-calibration algorithm without reconstruction errors based on two-dimensional fourier transform for the first time without accounting for measurement noise. Xu of the German Federal physical technology institute applies a self-calibration method to calibrate a two-dimensional grid standard plate on a metering atomic force microscope. The step-by-step iterative recursion method is proposed by P.Ekberg of the Swedish Royal college of science and technology to realize two-dimensional self-calibration and verify on a two-dimensional grid template.
The application number CN104006777A discloses a self-calibration method of a two-dimensional large-stroke workbench measuring system, the method is based on a self-calibration method of two-dimensional Fourier transform to obtain the system error of each small region, and then linear fitting and coordinate transformation are carried out on the discrete point coordinates of each region to finally obtain a unified calibration coordinate system of the whole region to be calibrated. The method is realized through the combination of the initial pose, the rotation pose and the translational pose of the two-dimensional grid standard plate, and meanwhile, the realization of the rotation and translation actions is driven by a rotating motor and a linear motor, so that the whole calibration device is too complex, and additional error factors such as vibration and the like are brought.
Disclosure of Invention
In order to solve the problems, the invention provides a calibration device of a two-dimensional grid standard plate which does not need a rotary motor and a linear motor, and a method for calibrating the grid error of the two-dimensional grid standard plate based on compound pose. According to the invention, the positioning pin and the ejector rod are used for realizing the transformation of the rotation or translation pose of the standard plate, so that the structure of the device is simplified, error factors such as system vibration and the like can be eliminated, and the calibration precision is improved. Meanwhile, the single pose calibration method is different from the traditional single pose calibration method, the same calibration effect can be achieved through fewer pose combinations, and the calibration efficiency is improved.
In order to achieve the above object, the present invention provides the following technical solutions: the utility model provides a calibrating device and method of two-dimensional grid standard board, includes base 1 and movable mounting in standard board plummer 2 at base 1 top, base 1 top is equipped with preceding locating pin 3, left locating pin 4 and right locating pin 5, preceding locating pin 3 is equipped with two and sets up in the front portion of standard board plummer 2, left locating pin 4 and right locating pin 5 are equipped with one respectively in the left and right sides of standard board plummer 2, left ejector pin 6 and right ejector pin 7 are still installed at the top of base 1, and left ejector pin 6 and right ejector pin 7 accessible rotation tail end realize the screw thread meshing and impel thereby jack the left and right sides corner of base 1 respectively.
Preferably, the top of the standard board plummer 2 is provided with a standard board positioning groove 8, a two-dimensional grid standard board 10 is positioned and installed in the standard board positioning groove 8, the two-dimensional grid standard board 10 is positioned at the center of the standard board plummer 2 after being installed according to the indication of the standard board positioning groove 8, two side surfaces of the standard board plummer 2 are provided with compression blocks 9 in a threaded manner, the inner ends of the compression blocks 9 are used for supporting and fixing the two-dimensional grid standard board 10, the surface and the inner side of the standard board positioning groove 8 are provided with hollow slotted holes, and the inner ends of the compression blocks 9 are provided with a supporting block which penetrates through the hollow grooves on the surface of the standard board positioning groove 8 so as to support the edge of the two-dimensional grid standard board 10, and the supporting block is pressed on the inner wall of the standard board positioning groove 8 to realize clamping and fixing.
Preferably, the distance between the left locating pin 4 and the right locating pin 5 is the sum of the effective grid side length of one side of the standard board bearing table 2 and one grid spacing.
Preferably, when the left ejector rod 6 is ejected and the right ejector rod 7 is released, the standard board bearing table 2 abuts against the front positioning pin 3 and the right positioning pin 5, the two-dimensional grid standard board 10 is in the initial position, particularly in the first state as shown in fig. 2 and 3, the pattern opening is oriented downward, and the two-dimensional grid standard board 10 is located at the center of the base 1.
The standard board bearing table 2 rotates ninety degrees clockwise or anticlockwise, and the two-dimensional grid standard board 10 is in a rotation position at the moment;
when the right ejector rod 7 is ejected and the left ejector rod 6 is released, the standard plate bearing table 2 is abutted against the front positioning pin 3 and the left positioning pin 4, the standard plate bearing table 2 rotates 180 degrees, and the two-dimensional grid standard plate 10 is in a translational and one hundred eighty degree rotational composite pose at the moment;
when the right ejector rod 7 is ejected and the left ejector rod 6 is released, the standard plate bearing table 2 abuts against the front positioning pin 3 and the left positioning pin 4, the standard plate bearing table 2 rotates by 90 degrees, and the two-dimensional grid standard plate 10 is in a translational and ninety-degree rotational composite pose at the moment.
Preferably, the initial pose, the rotation pose, the translation plus one hundred eighty degrees rotation composite pose of the two-dimensional grid standard plate 10 are combined into a first combined pose, a calibration device of the two-dimensional grid standard plate is placed on a measurement platform of a two-dimensional workbench, two-dimensional coordinates corresponding to each grid point of the two-dimensional grid standard plate 10 are measured, and the two-dimensional coordinates are taken into an equation set to be calculated.
Preferably, the initial pose, the rotation pose, the translation plus one hundred eighty degrees rotation compound pose, and the translation plus ninety degrees rotation compound pose of the two-dimensional grid standard plate 10 are combined into a second combined pose.
Preferably, step 1: the two-dimensional grid standard plate 10 is fixed on the standard plate bearing table 2 according to the indication position of the standard plate positioning groove 8, and the grid center point of the two-dimensional grid standard plate 10 is confirmed to be positioned at the center of the standard plate bearing table 2.
Step 2: the two-dimensional grid standard board 10 calibration device is placed on the measurement platform of the two-dimensional workbench. The measurement platform of the two-dimensional table is adjusted in the following manner of operation.
Step 3: the left ejector rod 6 is ejected, the right ejector rod 7 is loosened, the standard plate bearing table 2 is abutted against the front positioning pin 3 and the right positioning pin 5, the two-dimensional grid standard plate 10 is in an initial pose, and the two-dimensional workbench is driven to measure and obtain the two-dimensional coordinates of each grid point on the standard plate.
Step 4: the standard board bearing table 2 is rotated ninety degrees clockwise or anticlockwise, the standard board bearing table 2 abuts against the front positioning pin 3 and the right positioning pin 5, the two-dimensional grid standard board 10 is in ninety degrees rotation position at the moment, and the two-dimensional workbench is driven to measure to obtain the two-dimensional coordinates of each grid point on the standard board.
Step 5: the right ejector rod 7 is ejected, the left ejector rod 6 is loosened, the standard plate bearing table 2 is abutted against the front positioning pin 3 and the left positioning pin 4, the standard plate bearing table 2 rotates by one hundred eighty degrees, at the moment, the two-dimensional grid standard plate 10 is in a translational and one hundred eighty degrees rotating compound pose, and the two-dimensional workbench is driven to measure and obtain the two-dimensional coordinates of each grid point on the standard plate.
Step 6: the right ejector rod 7 is ejected, the left ejector rod 6 is loosened, the standard plate bearing table 2 is abutted against the front positioning pin 3 and the left positioning pin 4, the standard plate bearing table 2 rotates by 90 degrees, at the moment, the two-dimensional grid standard plate 10 is in a translational and ninety-degree rotary composite pose, and the two-dimensional workbench is driven to measure and obtain the two-dimensional coordinates of each grid point on the standard plate.
Step 7: and combining the two-dimensional coordinates of 3 groups of grid points obtained by measurement under the 3 poses of 3-5 steps, and establishing a grid error simultaneous equation set under 3 poses to obtain a grid error least square solution of the two-dimensional grid standard sheet.
Step 8: and combining the two-dimensional coordinates of 4 groups of grid points obtained by measurement under the 4 poses of 3-6 steps, and establishing a grid error simultaneous equation set under the 4 poses to obtain a grid error least square solution of the two-dimensional grid standard sheet.
The basic method for establishing the grid error simultaneous equations under 4 poses described in the eighth step is as follows:
the grid error of the two-dimensional grid standard board 10 can be decomposed into 2 components Rx and Ry in the xy direction, and the systematic error in the two-dimensional table positioning error (hereinafter referred to as the table systematic error) can be decomposed into 2 components Sx and Sy in the xy direction. The center coordinate value of each grid point (hereinafter referred to as a grid point measurement value) on the two-dimensional grid standard board 10 can be decomposed into 2 components Mx and My in the xy direction. Nx and Ny respectively represent unitized ideal coordinate values of the calibrated points, namely the ratio of ideal coordinate positions of grid points to the spacing d of the grid points;
when the two-dimensional grid standard plate 10 is in the initial pose as described in step 3 above, the following set of equations may be established:
when the two-dimensional grid standard plate 10 is in the ninety degree rotational position described in step 4 above, the following set of equations may be established:
when the two-dimensional grid standard plate 10 is in the translational plus one hundred eighty degree rotational compound pose as described in step 5 above, the following set of equations may be established:
when the two-dimensional grid standard plate 10 is in the translational plus ninety degree rotational compound pose as described above in step 6, the following set of equations may be established:
wherein:
M 1x and M 1y : center coordinate values in the XY direction of each grid point on the two-dimensional grid standard plate 10 at the initial pose;
M 2x and M 2y : ninety degree rotation pose, grid point measurement;
M 3x and M 3y : translation plus one hundred eighty degrees rotation of the grid point measurement value when the pose is combined;
M 4x and M 4y : grid point measurement values when the composite pose is rotated by ninety degrees through translation;
N x ＝[0,1,…,N-1,0,1,…N-1,…,0,1,N-1] T -(N-1)/2；
N y ＝[0,…,0,1,…,1,2,…,2,…,N-1,…,N-1] T -(N-1)/2；
N xr ＝[0,1,…,N-2,0,1,…N-2,…,0,1,…,N-2] T -(N-1)/2；
N yr ＝[0,…,0,1,…,1,2,…,2,…,N-1,…,N-1] T -(N-1)/2；
R 90 the size is N 2 ×N 2 Rotated ninety degrees clockwise by the identity matrix of (a);
R 180 the size is N 2 ×N 2 Rotated by one hundred eighty degrees;
i is of size N 2 ×N 2 Is a matrix of units of (a);
I l the size is (N) 2 -N)×N 2 The transfer matrix of the calibrated point of the leftmost column is removed;
I r the size is (N) 2 -N)×N 2 The transfer matrix of the right-most column of calibrated points is removed;
V 1 ,W 1 ,θ 1 ,V 2 ,W 2 ,θ 2 ,V 3 ,W 3 ,θ 3 ,V 4 ,W 4 ,θ 4 a coordinate system offset for each pose;
combining equations 1) through 4) can result in a system of linear equations as follows:
Y＝AX
wherein Y= [ M 1x ,M 1y ,M 2x ,M 2y ,M 3x ,M 3y ,M 4x ,M 4y ] T
X＝[S x ,S y ,R x ,R y ,V 1 ,W 1 ,θ 1 ,V 2 ,W 2 ,θ 2 ,V 3 ,W 3 ,θ 3 ,V 4 ,W 4 ,θ 4 ] T
(5)
And obtaining the grid errors Rx and Ry of the two-dimensional grid standard plate (10) by solving the least square solution. When measurement noise is present in the measurement values Mx and My, the least squares process can suppress the influence of the noise to obtain an optimal estimated solution of the grid error.
The beneficial effects of the invention are as follows:
1. according to the two-dimensional grid standard plate calibration device disclosed by the invention, the rotation or translation pose of the standard plate is changed by the positioning pin and the ejector rod, a rotating motor and a linear motor are not needed, the device structure is simplified, the difficulty and the manufacturing cost for building the device structure are reduced, error factors such as system vibration and the like can be eliminated, and the calibration precision is improved.
2. The two-grid standard plate calibration method disclosed by the invention provides a composite pose comprising translation and rotation, compared with the traditional single pose calibration method, the two-grid standard plate calibration method can achieve the same calibration effect with fewer pose combinations, reduces the complexity of work and improves the calibration efficiency.
Drawings
FIG. 1 is a schematic diagram of a calibration device according to the present invention;
FIG. 2 is a schematic view of a three-position combination of a two-dimensional grid standard plate of the present invention;
FIG. 3 is a schematic diagram of a four-pose assembly of a two-dimensional grid standard plate of the present invention;
fig. 4 is a flowchart of a calibration method.
In the figure: 1. a base; 2. a standard board bearing table; 3. a front locating pin; 4. a left locating pin; 5. a right locating pin; 6. a left ejector rod; 7. a right ejector rod; 8. a standard plate positioning groove; 9. a compaction block; 10. two-dimensional grid standard plate.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1 to 4, in the embodiment of the invention, a calibration device and a method for a two-dimensional grid standard board comprise a base 1 and a standard board carrying table 2 movably mounted at the top of the base 1, wherein the top of the base 1 is provided with a front positioning pin 3, a left positioning pin 4 and a right positioning pin 5, the front positioning pin 3 is provided with two and is arranged at the front part of the standard board carrying table 2, the left positioning pin 4 and the right positioning pin 5 are respectively arranged at the left side and the right side of the standard board carrying table 2, the top of the base 1 is also provided with a left ejector rod 6 and a right ejector rod 7, and the left ejector rod 6 and the right ejector rod 7 can be pushed by screw engagement through a rotating tail end so as to respectively prop up the left side corner and the right side corner of the base 1.
The top of the standard plate bearing table 2 is provided with a standard plate positioning groove 8, a two-dimensional grid standard plate 10 is positioned and installed in the standard plate positioning groove 8, the two-dimensional grid standard plate 10 is positioned at the center of the standard plate bearing table 2 after being installed according to the indication of the standard plate positioning groove 8, two side surfaces of the standard plate bearing table 2 are provided with compression blocks 9 in a threaded mode, the inner ends of the compression blocks 9 are used for supporting and fixing the two-dimensional grid standard plate 10, the surface and the inner side of the standard plate positioning groove 8 are provided with hollow slotted holes, and the inner ends of the compression blocks 9 are provided with a jacking block which penetrates through the hollow grooves on the surface of the standard plate positioning groove 8 so as to support the edge of the two-dimensional grid standard plate 10, and the jacking block is pressed on the inner wall of the standard plate positioning groove 8 to achieve clamping and fixing.
The distance between the left locating pin 4 and the right locating pin 5 is the sum of the effective grid side length of one side of the standard board bearing table 2 and one grid spacing.
When the left ejector rod 6 is ejected and the right ejector rod 7 is released, the standard board bearing table 2 abuts against the front positioning pin 3 and the right positioning pin 5, the two-dimensional grid standard board 10 is in an initial position, particularly in a first state as shown in fig. 2 and 3, a pattern opening in the drawing faces downwards, and the two-dimensional grid standard board 10 is located at the center of the base 1.
The standard board bearing table 2 rotates ninety degrees clockwise or anticlockwise, and the two-dimensional grid standard board 10 is in a rotation position at the moment;
when the right ejector rod 7 is ejected and the left ejector rod 6 is released, the standard plate bearing table 2 is abutted against the front positioning pin 3 and the left positioning pin 4, the standard plate bearing table 2 rotates 180 degrees, and the two-dimensional grid standard plate 10 is in a translational and one hundred eighty degree rotational composite pose at the moment;
when the right ejector rod 7 is ejected and the left ejector rod 6 is released, the standard plate bearing table 2 abuts against the front positioning pin 3 and the left positioning pin 4, the standard plate bearing table 2 rotates by 90 degrees, and the two-dimensional grid standard plate 10 is in a translational and ninety-degree rotational composite pose at the moment.
The initial pose, the rotation pose, the translation plus one hundred eighty degrees rotation composite pose of the two-dimensional grid standard plate 10 are combined into a first combined pose, a calibration device of the two-dimensional grid standard plate is placed on a measurement platform of a two-dimensional workbench, two-dimensional coordinates corresponding to each grid point of the two-dimensional grid standard plate 10 are measured, and the two-dimensional coordinates are taken into an equation set to be calculated.
Wherein, the initial pose, the rotation pose, the translation plus one hundred eighty degrees rotation compound pose, the translation plus ninety degrees rotation compound pose of the two-dimensional grid standard plate 10 are combined into a second combined pose.
Wherein, step 1: the two-dimensional grid standard plate 10 is fixed on the standard plate bearing table 2 according to the indication position of the standard plate positioning groove 8, and the grid center point of the two-dimensional grid standard plate 10 is confirmed to be positioned at the center of the standard plate bearing table 2.
Step 2: the two-dimensional grid standard board 10 calibration device is placed on the measurement platform of the two-dimensional workbench. The measurement platform of the two-dimensional table is adjusted in the following manner of operation.
Step 3: the left ejector rod 6 is ejected, the right ejector rod 7 is loosened, the standard plate bearing table 2 is abutted against the front positioning pin 3 and the right positioning pin 5, the two-dimensional grid standard plate 10 is in an initial pose, and the two-dimensional workbench is driven to measure and obtain the two-dimensional coordinates of each grid point on the standard plate.
Step 4: the standard board bearing table 2 is rotated ninety degrees clockwise or anticlockwise, the standard board bearing table 2 abuts against the front positioning pin 3 and the right positioning pin 5, the two-dimensional grid standard board 10 is in ninety degrees rotation position at the moment, and the two-dimensional workbench is driven to measure to obtain the two-dimensional coordinates of each grid point on the standard board.
Step 5: the right ejector rod 7 is ejected, the left ejector rod 6 is loosened, the standard plate bearing table 2 is abutted against the front positioning pin 3 and the left positioning pin 4, the standard plate bearing table 2 rotates by one hundred eighty degrees, at the moment, the two-dimensional grid standard plate 10 is in a translational and one hundred eighty degrees rotating compound pose, and the two-dimensional workbench is driven to measure and obtain the two-dimensional coordinates of each grid point on the standard plate.
Step 6: the right ejector rod 7 is ejected, the left ejector rod 6 is loosened, the standard plate bearing table 2 is abutted against the front positioning pin 3 and the left positioning pin 4, the standard plate bearing table 2 rotates by 90 degrees, at the moment, the two-dimensional grid standard plate 10 is in a translational and ninety-degree rotary composite pose, and the two-dimensional workbench is driven to measure and obtain the two-dimensional coordinates of each grid point on the standard plate.
Step 7: and combining the two-dimensional coordinates of 3 groups of grid points obtained by measurement under the 3 poses of 3-5 steps, and establishing a grid error simultaneous equation set under 3 poses to obtain a grid error least square solution of the two-dimensional grid standard sheet.
Step 8: and combining the two-dimensional coordinates of 4 groups of grid points obtained by measurement under the 4 poses of 3-6 steps, and establishing a grid error simultaneous equation set under the 4 poses to obtain a grid error least square solution of the two-dimensional grid standard sheet.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. A calibration device for a two-dimensional grid standard plate, characterized in that: the novel standard plate bearing table comprises a base (1) and a standard plate bearing table (2) movably mounted at the top of the base (1), wherein a front positioning pin (3), a left positioning pin (4) and a right positioning pin (5) are arranged at the top of the base (1), the front positioning pin (3) is provided with two front parts arranged at the front part of the standard plate bearing table (2), the left positioning pin (4) and the right positioning pin (5) are respectively arranged at the left side and the right side of the standard plate bearing table (2), a left ejector rod (6) and a right ejector rod (7) are further mounted at the top of the base (1), and the left ejector rod (6) and the right ejector rod (7) can be in threaded engagement pushing through rotary tail ends so as to respectively prop against the left side corner and the right side corner of the base (1);
the top of the standard plate bearing table (2) is provided with a standard plate positioning groove (8), a two-dimensional grid standard plate (10) is positioned and installed in the standard plate positioning groove (8), the two-dimensional grid standard plate (10) is positioned in the center of the standard plate bearing table (2) after being installed according to the indication of the standard plate positioning groove (8), two side surfaces of the standard plate bearing table (2) are provided with compression blocks (9) in a threaded manner, and the inner ends of the compression blocks (9) support and fix the two-dimensional grid standard plate (10);
the distance between the left locating pin (4) and the right locating pin (5) is the sum of the effective grid side length of one side of the standard board bearing table (2) and one grid spacing.
2. A device for calibrating a two-dimensional grid standard according to claim 1, wherein: when the left ejector rod (6) is ejected and the right ejector rod (7) is released, the standard plate bearing table (2) is abutted against the front positioning pin (3) and the right positioning pin (5), and the two-dimensional grid standard plate (10) is in an initial pose at the moment;
the standard plate bearing table (2) rotates ninety degrees clockwise or anticlockwise, and the two-dimensional grid standard plate (10) is in a rotation position at the moment;
when the right ejector rod (7) is ejected and the left ejector rod (6) is released, the standard plate bearing table (2) is abutted against the front positioning pin (3) and the left positioning pin (4), the standard plate bearing table (2) rotates 180 degrees, and the two-dimensional grid standard plate (10) is in a translational and one hundred eighty degree rotational composite pose;
when the right ejector rod (7) is ejected and the left ejector rod (6) is released, the standard plate bearing table (2) abuts against the front positioning pin (3) and the left positioning pin (4), the standard plate bearing table (2) rotates by 90 degrees, and the two-dimensional grid standard plate (10) is in a combined position of translation and ninety degrees rotation at the moment.
3. A device for calibrating a two-dimensional grid standard according to claim 2, wherein: the initial pose, the rotation pose and the translation of the two-dimensional grid standard plate (10) are combined into a first combined pose by one hundred and eighty degrees of rotation.
4. A device for calibrating a two-dimensional grid standard according to claim 2, wherein: the initial pose, the rotation pose, the translation plus one hundred eighty degree rotation compound pose, the translation plus ninety degree rotation compound pose of the two-dimensional grid standard plate (10) are combined into a second combined pose.
5. A method of calibrating a calibration device for a two-dimensional grid standard according to any of claims 1-4, wherein:
step 1: fixing a two-dimensional grid standard plate (10) on a standard plate bearing table (2) according to the indication position of a standard plate positioning groove (8), and confirming that the grid center point of the two-dimensional grid standard plate (10) is positioned at the center of the standard plate bearing table (2);
step 2: placing a two-dimensional grid standard plate (10) calibration device on a measurement platform of a two-dimensional workbench;
step 3: the left ejector rod (6) is ejected, the right ejector rod (7) is loosened, the standard plate bearing table (2) is abutted against the front positioning pin (3) and the right positioning pin (5), the two-dimensional grid standard plate (10) is in an initial pose, and the two-dimensional workbench is driven to measure to obtain the two-dimensional coordinates of each grid point on the standard plate;
step 4: rotating the standard plate bearing table (2) clockwise or anticlockwise by ninety degrees, and tightly abutting the standard plate bearing table (2) against the front positioning pin (3) and the right positioning pin (5), wherein the two-dimensional grid standard plate (10) is in ninety degrees of rotation pose, and driving the two-dimensional workbench to measure and obtain the two-dimensional coordinates of each grid point on the standard plate;
step 5: the right ejector rod (7) is ejected, the left ejector rod (6) is loosened, the standard plate bearing table (2) is abutted against the front positioning pin (3) and the left positioning pin (4), the standard plate bearing table (2) rotates by one hundred eighty degrees, at the moment, the two-dimensional grid standard plate (10) is in a combined position of translation and one hundred eighty degrees rotation, and the two-dimensional workbench is driven to measure and obtain the two-dimensional coordinates of each grid point on the standard plate;
step 6: the right ejector rod (7) is ejected, the left ejector rod (6) is loosened, the standard plate bearing table (2) is abutted against the front locating pin (3) and the left locating pin (4), the standard plate bearing table (2) rotates by 90 degrees, at the moment, the two-dimensional grid standard plate (10) is in a translational and ninety-degree rotary composite pose, and the two-dimensional workbench is driven to measure and obtain the two-dimensional coordinates of each grid point on the standard plate;
step 7: combining the two-dimensional coordinates of 3 groups of grid points obtained by measurement under the 3 poses of 3-5 steps to establish a grid error simultaneous equation system under 3 poses,
the grid error least square solution of the two-dimensional grid standard sheet can be obtained by means of solution;
the grid error of the two-dimensional grid standard plate (10) can be decomposed into 2 components Rx and Ry in the xy direction, the systematic error in the positioning error of the two-dimensional workbench can be decomposed into 2 components Sx and Sy in the xy direction, the central coordinate value of each grid point on the two-dimensional grid standard plate (10) can be decomposed into 2 components Mx and My in the xy direction, and Nx and Ny respectively represent unitized ideal coordinate values of the calibrated points, namely the ratio of the ideal coordinate positions of the grid points to the spacing d of the grid points;
M 1x and M 1y : the central coordinate value of each grid point on the two-dimensional grid standard plate (10) in the XY direction during initial pose;
M 2x and M 2y : ninety degree rotation pose, grid point measurement;
M 3x and M 3y : translation plus one hundred eighty degrees rotation of the grid point measurement value when the pose is combined;
M 4x and M 4y : grid point measurement values when the composite pose is rotated by ninety degrees through translation;
N x ＝[0,1,…,N-1,0,1,…N-1,…,0,1,N-1] T -(N-1)/2；
N y ＝[0,…,0,1,…,1,2,…,2,…,N-1,…,N-1] T -(N-1)/2；
N xr ＝[0,1,…,N-2,0,1,…N-2,…,0,1,…,N-2] T -(N-1)/2；
N yr ＝[0,…,0,1,…,1,2,…,2,…,N-1,…,N-1] T -(N-1)/2；
R 90 the size is N 2 ×N 2 Rotated ninety degrees clockwise by the identity matrix of (a);
R 180 the size is N 2 ×N 2 Rotated by one hundred eighty degrees;
i is of size N 2 ×N 2 Is a matrix of units of (a);
I l the size is (N) 2 -N)×N 2 The transfer matrix of the calibrated point of the leftmost column is removed;
I r the size is (N) 2 -N)×N 2 The transfer matrix of the right-most column of calibrated points is removed;
V 1 ,W 1 ,θ 1 ,V 2 ,W 2 ,θ 2 ,V 3 ,W 3 ,θ 3 ,V 4 ,W 4 ,θ 4 a coordinate system offset for each pose;
step 8: combining the two-dimensional coordinates of 4 groups of grid points obtained by measurement under the 4 poses of 3-6 steps, establishing a grid error simultaneous equation system under 4 poses,
and obtaining the grid error least square solution of the two-dimensional grid standard sheet.
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