CN113655710A - Automatic ingot pulling system and method for EB (Electron Beam) furnace - Google Patents

Automatic ingot pulling system and method for EB (Electron Beam) furnace Download PDF

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CN113655710A
CN113655710A CN202110983115.7A CN202110983115A CN113655710A CN 113655710 A CN113655710 A CN 113655710A CN 202110983115 A CN202110983115 A CN 202110983115A CN 113655710 A CN113655710 A CN 113655710A
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ingot pulling
automatic
central processing
processing unit
oil cylinder
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张省平
皮坤
郭尊杰
张凯
王杉
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Yunnan Kungang Electronic Information Technology Co ltd
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    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00Automatic controllers
    • G05B11/01Automatic controllers electric
    • G05B11/36Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.

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Abstract

The invention relates to an automatic ingot pulling system and method for an EB (Electron Beam) furnace, belonging to the technical field of ingot pulling. The system comprises a five-stage oil cylinder, a hydraulic station, a ingot pulling rod, a displacement sensor, an operating platform, a central processing unit and an HMI unit; the hydraulic station is connected with the five-stage oil cylinder and provides power for the five-stage oil cylinder; the five-stage oil cylinder is connected with the ingot pulling rod; the central processing unit is respectively connected with the hydraulic station, the displacement sensor, the operating platform and the HMI unit; the operating platform is used for switching between manual ingot pulling and automatic ingot pulling, selecting the speed of the automatic ingot pulling and the gear of the manual ingot pulling, and sending switching and selecting information to the central processing unit; the central processing unit is responsible for controlling the whole ingot pulling process; the HMI unit displays the ingot pulling operation condition. The invention can realize full-automatic ingot pulling in the production process and is easy to popularize and apply.

Description

Automatic ingot pulling system and method for EB (Electron Beam) furnace
Technical Field
The invention belongs to the technical field of ingot pulling, and particularly relates to an automatic ingot pulling system and method for an EB (Electron Beam) furnace.
Background
The EB furnace is English name EBCHR, also called electron beam cold bed furnace, is the most advanced production equipment of titanium and titanium alloy cast ingot in the world, the country which can produce the EB furnace at present only has Germany, America and Ukrainian, in order to reduce the construction cost of the EB furnace, break the foreign technical barrier, Kun steel company organization technical specialist, develop the localization EB furnace. Besides the localization of the equipment, the control system also needs localization so as to improve the controllability of the production operation of the control system.
The whole ingot pulling process is long, the requirement on the ingot pulling speed is high, and the ingot pulling speed is about 6mm/min to 36mm/min according to different ingot specifications. In such high demand, quality problems (e.g., density non-uniformity, composition non-uniformity, etc.) are likely to occur if manual operations are employed. Therefore, it is very necessary to realize full-automatic ingot pulling to meet the speed requirements of ingots with different specifications. Under the background, the development of an automatic ingot pulling system with a speed regulation function is urgent.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides an automatic ingot pulling system and method for an EB furnace.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
an automatic ingot pulling system of an EB furnace comprises a five-stage oil cylinder, a hydraulic station, an ingot pulling rod, a displacement sensor, an operation platform, a central processing unit and an HMI unit;
the hydraulic station is connected with the five-stage oil cylinder and provides power for the five-stage oil cylinder;
the five-stage oil cylinder is connected with the ingot pulling rod;
the displacement sensor is used for detecting the position of the ingot pulling rod so as to determine the ingot pulling length;
the central processing unit is respectively connected with the hydraulic station, the displacement sensor, the operating platform and the HMI unit;
the operating platform is used for switching between manual ingot pulling and automatic ingot pulling, selecting the speed of the automatic ingot pulling and the gear of the manual ingot pulling, and sending switching and selecting information to the central processing unit;
the central processing unit is used for receiving information transmitted from the operating platform, and controlling the hydraulic station to work by acquiring the information transmitted from the displacement sensor so as to control the ingot pulling process; meanwhile, the information transmitted by the operating platform, the information transmitted by the displacement sensor and the corresponding ingot pulling condition are transmitted to the HMI unit for displaying.
Further, it is preferable that an algorithm model of the manual ingot pulling and the automatic ingot pulling is prestored in the central processing unit.
Further, it is preferable that the HMI unit displays the pulling operation curve.
The invention also provides an EB furnace automatic ingot pulling method, which adopts the EB furnace automatic ingot pulling system and comprises the following steps:
step (1), a central processing unit determines whether PID control is started or not according to manual ingot pulling and automatic ingot pulling selection information given by an operation console;
when the selection switch is manually operated, the central processing unit directly gives an ascending or descending command to the five-stage oil cylinder according to the ascending or descending command of the operating platform;
step (3), when the selection switch is set to be automatic, the central processing unit adjusts the parameters of the PID control model according to the data transmitted by the PID control model and the displacement sensor prestored in the central processing unit, and limits the PID control output value to be between 20% and 30% of the full range; thereby controlling the five-stage oil cylinder to work and realizing automatic ingot pulling;
and (4) the central processing unit sends all the operation data to the HMI unit for display.
Further, it is preferable that the parameters of the PID control model are adjusted as close to a control target as possible, the control target being: the control values E-PV-SP, Kp-400, Ki-6, Kd-0, where PV is the process value, SP is the set value, K is the set valueP、KI、KDFor the PID control model to be adjusted, Kp is a proportional parameter, Ki is an integral parameter, and Kd is a differential parameter.
Further, preferably, when the central processing unit acquires an unexpected stop signal of the hydraulic motor of the hydraulic station and an out-of-range jumping signal of the value of the displacement sensor, the central processing unit directly cuts off a control signal of the PID control model to the five-stage oil cylinder, and sets the control signal of the five-stage oil cylinder to zero and locks the five-stage oil cylinder.
Further, preferably, the HMI unit displays and automatically stores ingot pulling data, and forms ingot pulling curves and reports from the ingot pulling process data.
The invention can automatically determine the ingot pulling speed range according to the specification of the titanium ingot. If the ingot pulling speed range is automatically set according to the diameter of the round ingot, the ingot pulling weight per hour can be calculated according to the specification.
The invention can realize the automatic ingot pulling for smelting square ingot and round ingot blanks and is suitable for a large number of titanium ingot sizes.
The automatic ingot pulling and manual ingot pulling adopt the same actuating mechanism, but the algorithms of the manual ingot pulling and the automatic ingot pulling are different.
When the spindle discharging device discharges spindles, the opening degree of the five-stage oil cylinder is controlled by the speed-regulating potentiometer, and whether the five-stage oil cylinder runs or not is controlled by the knob, so that manual spindle discharging is realized.
The invention makes historical record on the data of the automatic ingot pulling process and can display the automatic ingot pulling condition in the modes of curves, pie charts and the like.
The invention provides a speed regulation interface, wherein the speed regulation interface sends a 4-20mA signal to a central controller by adopting a speed regulation potentiometer, and the central controller regulates the running speed of a five-stage oil cylinder according to the signal size, so that an operator can conveniently control the automatic ingot pulling speed.
Compared with the prior art, the invention has the beneficial effects that:
the invention discloses an automatic ingot pulling system and method of an EB (Electron beam) furnace, which realize full-automatic ingot pulling in the production process, wherein a hydraulic station provides power for a five-stage oil cylinder, the five-stage oil cylinder is used as an execution mechanism of automatic ingot pulling, and a displacement sensor is used for detecting the position of an ingot pulling rod and determining the length of the ingot pulling; the central processing unit is responsible for controlling the whole automatic ingot pulling; the HMI unit displays the automatic ingot pulling operation condition; convenient to use, easily popularizes and applies.
Compared with the traditional manual ingot pulling method, the manual ingot pulling method has the advantages that the manual ingot pulling method cannot be started, stopped and reversed frequently, so that the ingot pulling process has no back-and-forth shaking function, the ingot pulling has component separation and layering, and the ingot pulling quality is seriously influenced. The ingot pulled by the five-stage oil cylinder can shake within the process range according to the requirement, so that the ingot pulling components are more uniform, the ingot pulling quality is effectively improved, and the ingot pulling quality is improved by about 5%.
Drawings
In order to more clearly illustrate the technical solution of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious to those skilled in the art that other drawings can be obtained according to the drawings without any inventive exercise.
FIG. 1 is a schematic structural diagram of an automatic ingot pulling system of an EB furnace of the invention;
wherein, 1, a five-stage oil cylinder; 2. a hydraulic station; 3. pulling a ingot rod; 4. a displacement sensor; 5. an operation table; 6. a central processing unit; 7. an HMI unit;
FIG. 2 is a schematic view of an automatic ingot pulling control according to the present invention;
fig. 3 is a drawing control graph.
Detailed Description
The present invention will be described in further detail with reference to examples.
It will be appreciated by those skilled in the art that the following examples are illustrative of the invention only and should not be taken as limiting the scope of the invention. The specific techniques, connections, conditions, or the like, which are not specified in the examples, are performed according to the techniques, connections, conditions, or the like described in the literature in the art or according to the product specification. The materials, instruments or equipment are not indicated by manufacturers, and all the materials, instruments or equipment are conventional products which can be obtained by purchasing.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. Further, "connected" as used herein may include wirelessly connected. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
In the description of the present invention, "a plurality" means two or more unless otherwise specified. The terms "inner," "upper," "lower," and the like, refer to an orientation or a state relationship based on that shown in the drawings, which is for convenience in describing and simplifying the description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "provided" are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. To those of ordinary skill in the art, the specific meanings of the above terms in the present invention are understood according to specific situations.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
As shown in fig. 1-2, an automatic ingot pulling system of an EB furnace comprises a five-stage oil cylinder 1, a hydraulic station 2, an ingot pulling rod 3, a displacement sensor 4, an operation platform 5, a central processing unit 6 and an HMI unit 7;
the hydraulic station 2 is connected with the five-stage oil cylinder 1 and provides power for the five-stage oil cylinder 1;
the five-stage oil cylinder 1 is connected with the ingot pulling rod 3;
the displacement sensor 4 is used for detecting the position of the pulling ingot rod 3 so as to determine the length of the pulling ingot;
the central processing unit 6 is respectively connected with the hydraulic station 2, the displacement sensor 4, the operating platform 5 and the HMI unit 7;
the operating platform 5 is used for switching between manual ingot pulling and automatic ingot pulling, selecting the speed of automatic ingot pulling and the gear of manual ingot pulling, and sending switching and selecting information to the central processing unit 6;
the central processing unit 6 is used for receiving information transmitted from the operating platform 5, and controlling the hydraulic station 2 to work by acquiring information transmitted from the displacement sensor 4, so as to control the ingot pulling process; meanwhile, the information transmitted from the operation table 5, the information transmitted from the displacement sensor 4 and the corresponding ingot pulling condition are transmitted to the HMI unit 7 for displaying.
Preferably, the central processing unit 6 is pre-stored with algorithm models of manual ingot pulling and automatic ingot pulling.
Preferably, the HMI unit 7 displays the ingot pulling operation curve, and can view the operation condition of the whole automatic ingot pulling.
The central processing unit 6 is responsible for controlling the whole ingot pulling process in the invention.
The displacement sensor 4 is a high-precision long-stroke (preferably, the stroke is more than or equal to 12 meters, and the precision is 1mm) sensor, and is a key sensor for realizing automatic ingot pulling.
The operation table 5 is responsible for the operation of the whole automatic ingot pulling system, and comprises manual and automatic ingot pulling switching, automatic ingot pulling speed selection and manual ingot pulling gear selection.
The HMI unit 7 provides management and operation authority of the automatic ingot pulling control system, and performs operation authorization, maintenance authorization, modification authorization and the like on different users according to different authorities. If an operator user has daily operation authority, the device can be started and stopped; the engineer authority can modify the length of the pulled ingot, the size of the pulled ingot and the shutdown upper limit temperature, and can maintain the program.
Preferably, the HMI unit 7 is further configured to provide an automatic ingot pulling report function, and provide various types of automatic ingot pulling data.
An EB furnace automatic ingot pulling method adopts the EB furnace automatic ingot pulling system according to any one of claims 1-3, and is characterized by comprising the following steps:
step (1), a central processing unit determines whether PID control is started or not according to manual ingot pulling and automatic ingot pulling selection information given by an operation console;
when the selection switch is manually operated, the central processing unit directly gives an ascending or descending command to the five-stage oil cylinder according to the ascending or descending command of the operating platform;
step (3), when the selection switch is set to be automatic, the central processing unit adjusts the parameters of the PID control model according to the data transmitted by the PID control model and the displacement sensor prestored in the central processing unit, and limits the PID control output value to be between 20% and 30% of the full range; thereby controlling the five-stage oil cylinder to work and realizing automatic ingot pulling;
and (4) the central processing unit sends all the operation data to the HMI unit for display.
The parameters of the PID control model are as close to a control target as possible when being adjusted, and the control target is as follows: control value E-PV-SP, Kp-400, Ki-6, Kd-0, where PV is the course signal power, SP is the set value, K is the set valueP、KI、KDFor the PID control model to be adjusted, Kp is a proportional parameter, Ki is an integral parameter, and Kd is a differential parameter.
When the central processing unit acquires an unexpected stop signal of a hydraulic motor of the hydraulic station and an out-of-range jumping signal of a displacement sensor value, the central processing unit directly cuts off a control signal of the PID control model to the five-stage oil cylinder, and the control signal of the five-stage oil cylinder is set to zero and locked.
The HMI unit displays and automatically stores ingot pulling data, and simultaneously forms ingot pulling curves and reports from the ingot pulling process data.
As shown in FIG. 1, the system of the present invention is a typical closed-loop control system, and in order to obtain a very ideal control curve, it is desirable to make the automatic ingot pulling system obtain a standard second-order response function through the adjustment of the PID control model, so as to meet the requirement of stable ingot pulling.
We set five-stage oil cylinder transmissionThe function is G (S), and the transfer function of PID:
Figure BDA0003229622550000061
Figure BDA0003229622550000062
so that the closed loop transfer function is
Figure BDA0003229622550000063
When 0 < tau < 1, pole
Figure BDA0003229622550000064
When input to a step function
Figure BDA0003229622550000065
Time, get the transfer function sound
Figure BDA0003229622550000066
Wherein
Figure BDA0003229622550000067
Called damping vibration coefficient. Kp: ratio, Ti: integration time, TD: a differential time; s is a Laplace operator; τ: damping ratio, t: time value, omegan: the natural frequency.
Although the transfer function of the five-stage oil cylinder cannot be accurately represented, the control target is relatively clear, so that the output curve is infinitely close to the target curve by continuously adjusting PID parameters, and the transfer function of the whole system is a standard second-order function. For good control, the control curve of the template is shown in FIG. 3. When the step change given 1, the target is stabilized at 1 in a natural period.
Firstly, a PID control model is built in a central processing unit, and for the sake of safety, a PID proportion parameter is adjusted firstly, an integral parameter is adjusted later, and a differential parameter is adjusted finally during debugging. Setting the proportional parameter and the differential parameter from small to large, debugging the integral parameter from large to small, and not adjusting the differential parameter when the parameter is adjusted for the first time, wherein Kp: ratio parameter, Ki: integral parameter, Kd: a differential parameter;
and a second step of opening a displacement sensor position curve graph according to the approximate parameters determined in the first step, adjusting PID parameters step by step according to the curve graph, and continuously adjusting the PID parameters to obtain the parameters with the best control effect when the control value E is PV-SP, Kp is 400, Ki is 6 and Kd is 0.
And thirdly, limiting the PID control output value between 20% and 30% of the full range of the five-stage oil cylinder in order to prevent the five-stage oil cylinder from jumping in a large range.
Fourthly, the central processing unit determines whether the PID control is started or not according to the manual and automatic ingot pulling selection information given by the operating console. When the selection switch is manually operated, the central processing unit directly gives an ascending or descending command to the five-stage oil cylinder according to the ascending or descending command of the operation table, and the PID control model does not participate in control at the moment. When the selection switch is set to be automatic, the manual ascending or descending button is invalid, and the PID control model realizes full-automatic adjustment.
And fifthly, the central processing unit carries out self-protection on the PID control model according to the emergency stop, the hydraulic station stop and the automatic switching to manual safety signals, and when the hydraulic station is stopped accidentally and the value of the displacement sensor jumps beyond the range, the central processing unit directly cuts off the PID control model, and the control signal of the five-stage oil cylinder is set to zero and locked to ensure safety.
And sixthly, the central processing unit sends all the operation data to the HMI unit, so that an operator can know the automatic ingot pulling condition in real time.
And seventhly, displaying the automatic ingot pulling data by the HMI unit, recording ingot pulling process data, forming an automatic ingot pulling curve and a report, storing the automatic ingot pulling data in a safety area, and restoring various operation data when the automatic ingot pulling fails.
The invention has been successfully applied in the double ingot pulling device in the Yunnan titanium industry, the operation stability and safety are verified from the time of putting into operation, the ingot pulling is fully automatic, the workload of operators is effectively reduced, and the stability of the product quality is ensured. Currently, the method is effectively applied to the research and development of alloy titanium production.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (7)

1. An automatic ingot pulling system of an EB (Electron beam) furnace is characterized by comprising a five-stage oil cylinder (1), a hydraulic station (2), an ingot pulling rod (3), a displacement sensor (4), an operating platform (5), a central processing unit (6) and an HMI (human machine interface) unit (7);
the hydraulic station (2) is connected with the five-stage oil cylinder (1) and provides power for the five-stage oil cylinder (1);
the five-stage oil cylinder (1) is connected with the ingot pulling rod (3);
the displacement sensor (4) is used for detecting the position of the ingot pulling rod (3) so as to determine the ingot pulling length;
the central processing unit (6) is respectively connected with the hydraulic station (2), the displacement sensor (4), the operating platform (5) and the HMI unit (7);
the operating platform (5) is used for switching between manual ingot pulling and automatic ingot pulling, selecting the speed of automatic ingot pulling and the gear of the manual ingot pulling, and sending switching and selecting information to the central processing unit (6);
the central processing unit (6) is used for receiving information transmitted from the operating platform (5), and controlling the hydraulic station (2) to work by acquiring information transmitted from the displacement sensor (4), so as to control the ingot pulling process; meanwhile, the information transmitted by the operating platform (5), the information transmitted by the displacement sensor (4) and the corresponding ingot pulling condition are transmitted to the HMI unit (7) for displaying.
2. The automatic ingot pulling system of the EB furnace according to claim 1, characterized in that an algorithm model of manual ingot pulling and automatic ingot pulling is prestored in the central processing unit (6).
3. The automatic ingot pulling system of the EB furnace as claimed in claim 1, wherein an ingot pulling operation curve is displayed on the HMI unit (7).
4. An EB furnace automatic ingot pulling method adopts the EB furnace automatic ingot pulling system according to any one of claims 1-3, and is characterized by comprising the following steps:
step (1), a central processing unit determines whether PID control is started or not according to manual ingot pulling and automatic ingot pulling selection information given by an operation console;
when the selection switch is manually operated, the central processing unit directly gives an ascending or descending command to the five-stage oil cylinder according to the ascending or descending command of the operating platform;
step (3), when the selection switch is set to be automatic, the central processing unit adjusts the parameters of the PID control model according to the data transmitted by the PID control model and the displacement sensor prestored in the central processing unit, and limits the PID control output value to be between 20% and 30% of the full range; thereby controlling the five-stage oil cylinder to work and realizing automatic ingot pulling;
and (4) the central processing unit sends all the operation data to the HMI unit for display.
5. The automatic ingot pulling method for the EB furnace as claimed in claim 4, wherein parameters of the PID control model are adjusted to be as close to a control target as possible, and the control target is as follows: control values E = PV-SP, Kp =400, Ki =6, Kd =0, where PV is the process value, SP is the set value, K is the set valueP、KI、KDFor the PID control model to be adjusted, Kp is a proportional parameter, Ki is an integral parameter, and Kd is a differential parameter.
6. The automatic ingot pulling method for the EB furnace as claimed in claim 4, wherein when the central processing unit collects an unexpected stop signal of a hydraulic motor of the hydraulic station and an out-of-range jumping signal of a value of a displacement sensor, the central processing unit directly cuts off a control signal of the PID control model to the five-stage oil cylinder, and the control signal of the five-stage oil cylinder is set to zero and locked.
7. The automatic ingot pulling method for the EB furnace as claimed in claim 4, wherein the HMI unit displays and automatically stores ingot pulling data, and forms ingot pulling process data into ingot pulling curves and reports.
CN202110983115.7A 2021-08-25 2021-08-25 Automatic ingot pulling system and method for EB (Electron Beam) furnace Pending CN113655710A (en)

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Publication number Priority date Publication date Assignee Title
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JP2000281478A (en) * 1999-04-01 2000-10-10 Komatsu Electronic Metals Co Ltd Single crystal ingot production apparatus and method
JP2004018324A (en) * 2002-06-18 2004-01-22 Sumitomo Mitsubishi Silicon Corp Method of predicting pulling condition of pure silicon single crystal
KR20150070826A (en) * 2013-12-17 2015-06-25 주식회사 엘지실트론 Apparatus for controlling diameter of single crystal ingot and Ingot growing apparatus having the same and method thereof
CN109609782A (en) * 2019-01-07 2019-04-12 云南钛业股份有限公司 A kind of drawing ingot control method of EB furnace melting titanium/titanium alloy ingot
CN109954855A (en) * 2017-12-26 2019-07-02 北京有色金属研究总院 Vacuum electron beam furnace automatic ingot casting control system and its control method
CN110016714A (en) * 2018-01-09 2019-07-16 爱思开矽得荣株式会社 For the temperature control equipment of single crystal rod growth and its temprature control method of application
CN112708774A (en) * 2020-12-17 2021-04-27 云南昆钢电子信息科技有限公司 Large-scale electron beam cold bed furnace double ingot pulling device and control method
CN213540877U (en) * 2020-04-21 2021-06-25 云南昆钢电子信息科技有限公司 EB stove hydraulic system voltage regulator device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1036085A (en) * 1988-03-18 1989-10-04 东芝株式会社 Process control system
JP2000281478A (en) * 1999-04-01 2000-10-10 Komatsu Electronic Metals Co Ltd Single crystal ingot production apparatus and method
JP2004018324A (en) * 2002-06-18 2004-01-22 Sumitomo Mitsubishi Silicon Corp Method of predicting pulling condition of pure silicon single crystal
KR20150070826A (en) * 2013-12-17 2015-06-25 주식회사 엘지실트론 Apparatus for controlling diameter of single crystal ingot and Ingot growing apparatus having the same and method thereof
CN109954855A (en) * 2017-12-26 2019-07-02 北京有色金属研究总院 Vacuum electron beam furnace automatic ingot casting control system and its control method
CN110016714A (en) * 2018-01-09 2019-07-16 爱思开矽得荣株式会社 For the temperature control equipment of single crystal rod growth and its temprature control method of application
CN109609782A (en) * 2019-01-07 2019-04-12 云南钛业股份有限公司 A kind of drawing ingot control method of EB furnace melting titanium/titanium alloy ingot
CN213540877U (en) * 2020-04-21 2021-06-25 云南昆钢电子信息科技有限公司 EB stove hydraulic system voltage regulator device
CN112708774A (en) * 2020-12-17 2021-04-27 云南昆钢电子信息科技有限公司 Large-scale electron beam cold bed furnace double ingot pulling device and control method

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