CN113572368B

CN113572368B - Medium-high power frequency-adjustable digital power supply system

Info

Publication number: CN113572368B
Application number: CN202010347304.0A
Authority: CN
Inventors: 聶詺翰
Original assignee: Elementech International Co Ltd
Current assignee: Elementech International Co Ltd
Priority date: 2020-04-28
Filing date: 2020-04-28
Publication date: 2022-10-21
Anticipated expiration: 2040-04-28
Also published as: CN113572368A

Abstract

A medium-high power frequency-adjustable digital power supply system comprises a switch switching circuit, an output sampling circuit and a microcontroller. The switch switching circuit is provided with a plurality of switches, receives an alternating current input power supply and converts the alternating current input power supply into an output power supply. The output sampling circuit receives the output voltage and the output current of the output power supply. The microcontroller receives the output voltage and the output current, and generates a plurality of control signals according to power information calculated by the output voltage and the output current so as to correspondingly control the on-off switching of the plurality of switches.

Description

Medium-high power frequency-adjustable digital power supply system

Technical Field

The application relates to the technical field of digital power supplies, in particular to a medium and high power frequency-adjustable digital power supply system.

Background

The plasma is composed of neutral gas molecules and free radicals with electrons, positive and negative charges, and is another material state (or called as a fourth state) following the material triplet theory (solid, gas, liquid). The plasma is normally electrically neutral, also called "plasma", in the sense that the number of positively charged ions is equal to the number of negatively charged electrons. For a long time, plasma has been widely used in the electronic information industry such as semiconductor and photoelectric industry, and is widely applied to the manufacture of various devices, such as computer chips, memories, hard disks, transistors, optical disks, liquid crystal displays, plasma displays, etc., for example, the application of plasma technology to modification, epitaxy, etching, sputtering, and chemical vapor deposition assisted coating, etc., especially the surface treatment of precision optics, important sensing elements, and biomedical materials, etc., is required to rely on plasma technology, so the development of plasma technology has a great influence on the development of these industries.

In a plasma process, a low pressure gas is injected into a chamber close to vacuum, a voltage is applied to the gas, and the gas molecules are formed into a plasma state by properly matching the gas pressure, the voltage and the current.

However, for the semiconductor process, it is important to maintain the stability of the power supply of the plasma as well as the control of the gas, and the general plasma reaction apparatus has high construction cost and large occupied volume because the power supply module, the control interface, the motor and the gas control part are respectively configured and have independent wiring and independent power supply.

Therefore, how to design a medium-high power frequency-tunable digital power system is an important subject of the present inventors.

Disclosure of Invention

The present application is directed to a medium-high power frequency-tunable digital power system, which provides a high voltage output that can be used as a high voltage for a plasma power supply.

To achieve the above object, the present invention provides a medium-high power frequency-tunable digital power system, which includes a switch switching circuit, an output sampling circuit, and a microcontroller; the switch switching circuit is provided with a plurality of switches and is used for receiving an alternating current input power supply and converting the alternating current input power supply into an output power supply; the output sampling circuit is used for receiving the output voltage and the output current of the output power supply; the microcontroller is used for receiving the output voltage and the output current and generating a plurality of control signals according to power information calculated by the output voltage and the output current so as to correspondingly control the on-off switching of the plurality of switches.

In one embodiment, the microcontroller comprises an analog-to-digital conversion unit, a power operation unit and a control signal generation unit; the analog-to-digital conversion unit is used for receiving the output voltage and the output current and converting the output voltage and the output current into a digital voltage signal and a digital current signal; the power operation unit is coupled with the analog-to-digital conversion unit and used for receiving the digital voltage signal and the digital current signal and calculating the power information according to the digital voltage signal and the digital current signal; the control signal generating unit is coupled to the power computing unit, and is configured to receive the power information and generate the control signals according to the power information.

In one embodiment, the medium-high power frequency-tunable digital power supply system further comprises a step-up transformer; the step-up transformer is electrically coupled with the switch switching circuit and used for receiving the output power supply and boosting the output power supply to provide an alternating current output power supply.

In one embodiment, the medium-high power frequency-tunable digital power supply system further comprises a driving circuit; the driving circuit is electrically coupled to the microcontroller and the switch switching circuit, and is configured to receive the plurality of control signals, convert the plurality of control signals into a plurality of driving signals, and drive the switches correspondingly.

In one embodiment, the medium-high power frequency-tunable digital power supply system further comprises an input sampling circuit; the input sampling circuit is used for receiving the input voltage of the alternating current input power supply.

In one embodiment, the microcontroller is configured to control the switching of the plurality of switches on and off in a phase-shifted full-bridge manner.

In one embodiment, the microcontroller provides input over-voltage protection or input under-voltage protection depending on the magnitude of the input voltage.

In one embodiment, the microcontroller is configured to provide output over-voltage protection or output under-voltage protection depending on the magnitude of the output voltage.

In one embodiment, the microcontroller is configured to provide output overcurrent protection based on the magnitude of the output current.

In one embodiment, the AC output power is used as a high voltage for a plasma power supply.

In one embodiment, the output power of the digital power supply system is 1200 watts.

By the medium-high power frequency-adjustable digital power supply system provided by the embodiment of the application, the provided high-voltage output can be used as the high voltage of the plasma power supply.

For a further understanding of the technical solutions and advantages adopted by the present application to achieve the intended purpose, reference is made to the following detailed description and accompanying drawings, which are believed to provide a further understanding of the objects, features and characteristics of the present application, and to which are, however, intended to be a reference and an illustration only, and not intended to limit the embodiments of the present application.

Drawings

Fig. 1 is a block diagram of a high-power frequency-tunable digital power supply system in an embodiment of the present application.

Fig. 2 is a circuit diagram of a high-power frequency-tunable digital power supply system in an embodiment of the present application.

Fig. 3 is a circuit diagram of an input sampling circuit and an output sampling circuit of a high-power frequency-tunable digital power system according to an embodiment of the present invention.

Fig. 4 is a circuit diagram of a first part of a microcontroller of a high-power frequency-tunable digital power supply system in an embodiment of the present application.

Fig. 5 is a circuit diagram of a second part of a microcontroller of a high-power frequency-tunable digital power supply system in an embodiment of the present application.

Description of reference numerals:

AC _ IN-AC input power AC _ OUT-AC output power

10-electromagnetic interference filter 20-rectification filter circuit

30-switch switching circuit 40-step-up transformer

50-input sampling circuit 60-output sampling circuit

70-microcontroller 71-analog-to-digital conversion unit

72-power operation unit 73-control signal generation unit

80-drive circuit

Detailed Description

The technical contents and detailed description of the present application are described below with reference to the accompanying drawings.

Fig. 1 is a block diagram of a high-power frequency-tunable digital power supply system according to an embodiment of the present invention. The medium-high power frequency-adjustable digital power supply system is used for receiving an alternating current input power supply AC _ IN and outputting an alternating current output power supply AC _ OUT by converting the alternating current input power supply AC _ IN. The medium-high power frequency-adjustable digital power supply system comprises an electromagnetic interference filter 10, a rectifying filter circuit 20, a switch switching circuit 30, a boosting transformer 40, an input sampling circuit 50, an output sampling circuit 60, a microcontroller 70 and a driving circuit 80.

Referring to fig. 2, a circuit diagram of a high-power frequency-tunable digital power supply system in an embodiment of the present application is shown. The electromagnetic interference filter (EMI filter) 10 receives the AC input power AC _ IN, and suppresses (filters) external electromagnetic interference introduced from the AC power into the AC input power AC _ IN online. As shown in fig. 2, the emi filter 10 may be composed of an inductor (L1) and capacitors (C1, CY1, and CY 2). The rectifying-filtering circuit 20 is electrically coupled to the emi filter 10, and has rectifying and filtering functions, and is configured to perform full-wave rectification on the AC input power AC _ IN output from the emi filter 10 through the diode bridge (BD 1) shown IN fig. 2, and filter the rectified AC input power AC _ IN through the inductor (L5) and the capacitor (C75) shown IN fig. 2.

The switch switching circuit 30 is electrically coupled to the rectifying and filtering circuit 20, and as shown in fig. 2, includes a first switch (Q1), a second switch (Q2), a third switch (Q3) and a fourth switch (Q4), and controls the first switch (Q1) to the fourth switch (Q4), for example, a phase-shifted full bridge (PSFB) control architecture to control the on/off switching of the first switch (Q1) to the fourth switch (Q4), so that the switch switching circuit 30 outputs an output voltage and an output current to be controlled. Specifically, as shown in fig. 2, taking the first to fourth switches (Q1 to Q4) as Metal Oxide Semiconductor Field Effect Transistors (MOSFETs) as an example, the driving circuit 80 includes two gate driver ICs, namely a first gate driver IC (U1) and a second gate driver IC (U2). Each gate driver chip has internal electrical isolation, and taking the first gate driver chip (U1) as an example, the input side (left side) is a non-isolated side and is supplied with power through VCC _5V, and the output side (right side) is an isolated side and is supplied with power through VDD _ ISO _ 12V. The input side receives a pulse width modulation signal (PWMA, PWMB) provided by the microcontroller 70, and the first Gate driving chip (U1) generates a first Gate driving signal (Q1 _ Gate) and a second Gate driving signal (Q2 _ Gate) according to the pulse width modulation signal (PWMA, PWMB), thereby respectively controlling the on/off switching of the first switch (Q1) and the second switch (Q2). Similarly, the input side of the second Gate driving chip (U2) receives the pwm signal (PWMC, PWMD) provided by the microcontroller 70, and the second Gate driving chip (U2) generates a third Gate driving signal (Q3 _ Gate) and a fourth Gate driving signal (Q4 _ Gate) according to the pwm signal (PWMC, PWMD), so as to control the on/off switching of the third switch (Q3) and the fourth switch (Q4), respectively.

The transformer (T1) is electrically coupled to the switch switching circuit 30 and boosts the output voltage generated by the switch switching circuit 30, for example, the output voltage is about 300 volts when the AC input power AC _ IN is 220 volts, and the transformer can boost the voltage of 300 volts to the AC output power AC _ OUT of 10 kilovolts by designing the winding ratio of the primary side and the secondary side of the step-up transformer 40, so as to provide a proper power requirement, for example, the transformer can be used as a high voltage of a plasma power supply (plasma power supply).

The input sampling circuit 50 is electrically coupled to the rectifying and filtering circuit 20 for measuring the voltage level of the AC input power AC _ IN. As shown in fig. 3, the input sampling circuit 50 has an internal electrically isolated third integrated circuit (U3), the input side (left side) of which is the isolated side and is powered by VCC _ ISO1_ 5V; the output side (right side) is a non-isolated side and is supplied with power through VCC _ 5V. The input side of the input sampling circuit 50 receives the AC input power AC _ IN through a pin (Vin), measures the magnitude of the AC input power AC _ IN, for example, 220 volts, further converts the AC input power AC _ IN into a measurement voltage (M _ Vin) between 0 and 5 volts through a gain circuit (mainly U4 resistor, capacitor network) at the output side thereof, and transmits the measurement voltage to the microcontroller 70.

The output sampling circuit 60 is electrically coupled to the switch switching circuit 30 for measuring the output voltage and the output current. As shown in fig. 3, the output sampling circuit 60 has an internal electrically isolated fifth integrated circuit (U5), whose input side (left side) is the isolated side, supplied with power through VCC _ ISO _ 5V; the output side (right side) is a non-isolated side and is supplied with power through VCC _ 5V. The input side of the output sampling circuit 60 receives the output voltage through a pin (Vout) and measures the magnitude of the output voltage, for example, 300 volts, and further converts the output voltage into a measurement voltage (M _ Vout) between 0 and 5 volts through a gain circuit (a resistor and a capacitor network mainly including U6) on the output side thereof, and then transmits the measurement voltage to the microcontroller 70.

Further, for the measurement of the output current, in the present embodiment, the output current can be measured by a Hall sensor (Hall sensor), and the measured output current is converted into a measurement current (M _ Iin) between 0 and 5 volts and then transmitted to the microcontroller 70. In addition, as shown in fig. 3, the resistor and capacitor network with U7 as the main body receives the measurement current (M _ Iin) provided from the hall sensor, and converts the measurement current (M _ Iin) to generate a signal (NMI _ DET), which can be used as a hardware protection for Over Current Protection (OCP) interruption, in other words, if the output current is too large, the overcurrent protection can be provided according to the signal (NMI _ DET) obtained by converting the corresponding measurement current (M _ Iin), thereby providing the overcurrent protection by monitoring the output current.

As shown in fig. 1, the microcontroller 70 may include an analog-to-digital conversion unit 71, a power operation unit 72, and a control signal generation unit 73. In the embodiment, the microcontroller 70 may be a 32-bit microcontroller RX62T _ LQFP100 with 100 pins, but the embodiment of the present application is not limited thereto. The microcontroller (RX 62T _ LQFP 100) is represented by U11A and U11B of fig. 4 and 5. The ADC unit 71 of the microcontroller 70 receives a measurement voltage (M _ Vin) between 0-5 volts as received at pin 90 of FIG. 4, the ADC unit 71 receives a measurement voltage (M _ Vout) between 0-5 volts as received at pin 89 of FIG. 4, and the ADC unit 71 receives a measurement current (M _ Iin) between 0-5 volts as received at pin 91 of FIG. 4. Taking the input voltage (i.e., the measurement voltage (M _ Vin)) as an example, the analog-to-digital conversion unit 71 converts the measurement voltage (M _ Vin) of 0 to 5 volts into a binary digital signal of 16 bits. Similarly, the analog-to-digital conversion unit 71 converts the measurement voltage (M _ Vout) of 0 to 5 volts and the measurement current (M _ Iin) of 0 to 5 volts into binary digital signals of 16 bits, respectively.

The power operation unit 72 is coupled to the analog-to-digital conversion unit 71, and receives the 16-bit binary digital signal corresponding to the output voltage and the 16-bit binary digital signal corresponding to the output current, which are output by the analog-to-digital conversion unit 71, respectively. The power operation unit 72 calculates the output power of the power supply system according to the output voltage (represented by a 16-bit digital signal) and the output current (represented by a 16-bit digital signal). Since the output voltage is substantially constant (e.g. 300 v), the output power of the power system is positively correlated with the output current, i.e. the larger the output current is, the larger the output power is, and vice versa. In this embodiment, the output power of the power system is about 1200 watts, which can be called a medium-high power system.

The control signal generating unit 73 is coupled to the power calculating unit 72, and receives the output power information calculated by the power calculating unit 72. In this embodiment, the control signal generating unit 73 may be a pulse width modulation signal generator (PWM generator). The control signal generating unit 73 outputs a corresponding pulse width modulation signal (PWMA) according to the output power information provided by the power operation unit 72, as output by the pin 56 of fig. 5, the control signal generating unit 73 outputs a corresponding pulse width modulation signal (PWMB), as output by the pin 53 of fig. 5, the control signal generating unit 73 outputs a corresponding pulse width modulation signal (PWMC), as output by the pin 55 of fig. 5, and the control signal generating unit 73 outputs a corresponding pulse width modulation signal (PWMD), as output by the pin 52 of fig. 5. As shown in fig. 2, the pwm signals (PWMA, PWMB) can be provided to the first Gate driver chip (U1), and the pwm signals (PWMC, PWMD) can be provided to the second Gate driver chip (U2), so that the first Gate driver chip (U1) generates the first Gate driver signal (Q1 _ Gate) and the second Gate driver signal (Q2 _ Gate) according to the pwm signals (PWMA, PWMB), thereby controlling the on/off switching of the first switch (Q1) and the second switch (Q2) respectively; and the second Gate driving chip (U2) generates the third Gate driving signal (Q3 _ Gate) and the fourth Gate driving signal (Q4 _ Gate) according to the pwm signal (PWMC, PWMD), so as to control the on/off switching of the third switch (Q3) and the fourth switch (Q4), respectively, thereby controlling (adjusting) the output power of the power system.

Furthermore, the microcontroller 70 may provide Over Voltage Protection (OVP) or Under Voltage Protection (UVP) for the input voltage according to the magnitude of the measured voltage (M _ Vin) received corresponding to the AC input power AC _ IN. Similarly, the microcontroller 70 may provide Over Voltage Protection (OVP) or Under Voltage Protection (UVP) for the output voltage according to the magnitude of the received measurement voltage (M _ Vout) corresponding to the output voltage.

In summary, the embodiments of the present application have the following beneficial effects:

1. the AC output power with the voltage increased to 10 kilovolt by the step-up transformer can be used as the high voltage of the plasma power supply.

2. By utilizing the digital processing of the microcontroller, the arrangement of an analog circuit can be greatly reduced, and the occupied area and the required cost can be reduced.

3. The microcontroller can provide input overvoltage protection or input undervoltage protection according to the magnitude of the input voltage; the microcontroller can provide output overvoltage protection or output undervoltage protection according to the output voltage; the microcontroller provides output overcurrent protection according to the magnitude of the output current.

4. The frequency-adjustable function can be achieved through external frequency control, for example, through control of a knob or a key on a panel.

The above description is only for the detailed description and drawings of the preferred embodiments of the present application, and the scope of the present invention is not limited thereto, and the scope of the present invention should be determined by the scope of the claims. Embodiments similar to the inventive concept within the scope of the present invention should be included in the technical scope of the present invention, and technical solutions that can be easily changed or modified by those skilled in the art within the technical scope of the present invention should be covered within the technical scope of the present invention.

Claims

1. A medium-high power frequency-tunable digital power supply system, comprising:

the switch switching circuit is provided with a plurality of switches and is used for receiving an alternating current input power supply and converting the alternating current input power supply into an output power supply;

the output sampling circuit is used for receiving the output voltage and the output current of the output power supply;

the microcontroller is used for receiving the output voltage and the output current and generating a plurality of control signals according to power information calculated by the output voltage and the output current so as to correspondingly control the on-off switching of the plurality of switches; and

the driving circuit is electrically coupled with the microcontroller and the switch switching circuit and is used for receiving the control signals and converting the control signals into driving signals so as to correspondingly drive the switches of the switch switching circuit; the driving circuit comprises two gate driving chips, each gate driving chip is provided with internal electrical isolation, the input side powered by a first direct-current voltage is a non-isolation side, and the output side powered by a second direct-current voltage is an isolation side; wherein the second DC voltage is greater than the first DC voltage.

2. The medium high power, frequency modulated digital power supply system according to claim 1, wherein said microcontroller comprises:

the analog-to-digital conversion unit is used for receiving the output voltage and the output current and converting the output voltage and the output current into a digital voltage signal and a digital current signal;

the power operation unit is coupled with the analog-to-digital conversion unit and used for receiving the digital voltage signal and the digital current signal and calculating the power information according to the digital voltage signal and the digital current signal; and

and the control signal generating unit is coupled with the power computing unit and used for receiving the power information and generating a plurality of control signals according to the power information.

3. The medium high power, frequency modulated digital power supply system according to claim 1, further comprising:

and the boosting transformer is electrically coupled with the switch switching circuit and used for receiving the output power supply and boosting the output power supply to provide an alternating current output power supply.

4. The medium high power, frequency tunable digital power supply system according to claim 1, further comprising:

and the input sampling circuit is used for receiving the input voltage of the alternating current input power supply.

5. The medium high power frequency-modulated digital power supply system according to claim 1, wherein said microcontroller controls the on and off switching of said plurality of switches in a phase-shifted full-bridge manner.

6. The medium high power, frequency modulated digital power supply system according to claim 4, wherein said microcontroller is adapted to provide input over-voltage protection or input under-voltage protection depending on the magnitude of said input voltage.

7. The medium high power, frequency modulated digital power supply system according to claim 1, wherein said microcontroller is configured to provide output over-voltage protection or output under-voltage protection depending on the magnitude of said output voltage.

8. The medium high power, frequency modulated digital power supply system according to claim 1, wherein said microcontroller is configured to provide output overcurrent protection based on the magnitude of said output current.

9. The medium to high power, frequency modulated digital power supply system according to claim 3, wherein said AC output power is used as a high voltage for a plasma power supply.

10. The medium high power, frequency tunable digital power supply system according to claim 1, wherein the output power of said digital power supply system is 1200 watts.