CN113495355A - Electrowetting liquid lens based on composite dielectric layer with infiltrated surface and manufacturing method - Google Patents
Electrowetting liquid lens based on composite dielectric layer with infiltrated surface and manufacturing method Download PDFInfo
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- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
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Abstract
The invention provides an electrowetting liquid lens based on an immersed surface composite dielectric layer and a manufacturing method thereof, the electrowetting liquid lens comprises a substrate with a cavity, polar liquid and non-polar liquid, the polar liquid and the non-polar liquid are contained in the cavity and can form an interface in the cavity, a conducting layer is arranged on the substrate, voltage can be applied to the polar liquid after the conducting layer is electrified so as to change the shape of the interface, wherein the immersed surface composite dielectric layer which is directly contacted with the polar liquid covers the inner wall of the substrate, the immersed surface composite dielectric layer comprises a porous insulating layer and a super-slippery liquid film layer formed on the surface of the porous insulating layer, and the porous insulating layer covers an electrode and can absorb the super-slippery liquid. The invention has the advantages of high reaction speed and strong recoverability.
Description
Technical Field
The invention relates to the technical field of lenses, in particular to an electrowetting liquid lens based on an immersed surface composite dielectric layer and a manufacturing method of the electrowetting liquid lens based on the immersed surface composite dielectric layer.
Background
Electrowetting (EW) refers to a phenomenon in which the wettability of a liquid droplet on a substrate, that is, a contact angle is changed by changing a voltage between the liquid droplet and an insulating substrate, so that the liquid droplet is deformed and displaced. Electrowetting technology has begun to be widely used as a drive mechanism for various fluid and electro-optic devices. The liquid lens utilizing the electrowetting phenomenon can automatically adapt to an aimed object like the human eye without the assistance of a mechanical device, and the aim of focusing and zooming can be achieved only by changing the voltage of two poles to modify the shape of the liquid.
Compared with the traditional lens, the electrowetting lens has the advantages of non-polarization dependence, low cost, low power consumption, high zooming speed, long service life, good imaging quality and the like. In addition, a display device can also be manufactured by utilizing the electrowetting phenomenon.
Most of the existing electrowetting lenses rely on a solid hydrophobic layer, and due to the difference of physical properties of liquid and solid, the electrowetting lenses based on solid dielectrics have the following two problems in work:
1) it is still challenging to achieve liquid contact angle control over large angular ranges due to the large contact angle hysteresis caused by the solid surface contact line pinning effect and the contact angle saturation effect at large voltages. Current solid dielectric based electrowetting lenses can only achieve shape control, i.e. limited recoverability, over a limited range of angular variation and a limited number of manipulations.
2) When voltage is applied, due to the instant action of an external excitation electric field, the polar liquid in the electrowetting lens based on the solid dielectric substance inevitably generates oscillation phenomenon, so that the time interval from the beginning of voltage application to the time when the lens presents a clear image is prolonged, and the response time of the electrowetting lens is overlong.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides an electrowetting liquid lens based on a composite dielectric layer with a wetting surface and a manufacturing method thereof, and the electrowetting liquid lens has the advantages of high reaction speed and strong restorability.
In order to achieve the above object, in one aspect, the present invention provides an electrowetting liquid lens based on an immersed surface composite dielectric layer, including a substrate having a cavity, a polar liquid and a non-polar liquid, the polar liquid and the non-polar liquid being contained in the cavity and capable of forming an interface in the cavity, a conductive layer being disposed on the substrate, and capable of applying a voltage to the polar liquid to change a shape of the interface after the conductive layer is energized, wherein the immersed surface composite dielectric layer directly contacting with the polar liquid covers an inner wall of the substrate, the immersed surface composite dielectric layer includes a porous insulating layer and a super-slip liquid film layer formed on a surface of the porous insulating layer, and the porous insulating layer covers an electrode and is capable of absorbing the super-slip liquid.
According to another embodiment of the present invention, the porous insulating layer is a porous structure formed of a nano-scale material.
According to another embodiment of the present invention, the super-slip liquid forming the super-slip liquid film layer is an oil having a low surface tension which can be absorbed by the porous insulating layer.
According to another embodiment of the invention, the substrate comprises a bottom substrate, a plurality of side substrates and a top substrate, wherein a hydrophobic layer is arranged at the bottom of the top substrate, the non-polar liquid in the cavity is close to the hydrophobic layer, and the polar liquid in the cavity is far away from the hydrophobic layer.
According to another embodiment of the present invention, the wetted surface composite dielectric layer is disposed on two symmetrical side substrates.
According to another embodiment of the present invention, the conductive layer comprises at least two electrodes, and the two electrodes are respectively electrically connected to the wetting surface composite dielectric layer.
According to another embodiment of the present invention, the substrate is made of a transparent material, the conductive layer is made of a transparent conductive material, the polar liquid is a transparent liquid selected from at least one of water, an aqueous solution of sodium chloride, and an aqueous solution of potassium chloride, and the non-polar liquid is a transparent liquid selected from at least one of silicone oil, decane, dodecane, and tetradecane.
In another aspect, the present invention provides a method for manufacturing an electrowetting liquid lens based on a composite dielectric layer with a wetted surface, comprising:
providing an underlying substrate;
providing a side substrate, wherein a conductive layer and a wetting surface composite dielectric layer are arranged on the side substrate, an open-circuit voltage can be formed between the conductive layer and the wetting surface composite dielectric layer, and the polar liquid changes the shape under the influence of an electric field;
the forming process of the composite dielectric layer on the wetting surface comprises the following steps:
1) forming a porous material layer on the surface of the side electrode;
2) injecting the super-slippery liquid into the porous material layer and forming a liquid film on the surface of the porous material layer;
3) after the porous material layer fully absorbs the super-slippery liquid and is stable, a super-slippery liquid film layer is formed;
providing a top substrate, wherein the bottom substrate, the side substrate and the top substrate enclose to form a sealed cavity, polar liquid and non-polar liquid are contained in the cavity, the contained polar liquid and the contained non-polar liquid can form an interface in the cavity, and different voltages are applied to the conductive layer to change the shape of the interface.
According to another embodiment of the invention, a hydrophobic layer is formed on the bottom of the top substrate, the non-polar liquid in the cavity is close to the hydrophobic layer, and the polar liquid is far from the hydrophobic layer.
According to another embodiment of the present invention, the polar liquid and the non-polar liquid are instilled into the cavity by a drip method, and the cavity is covered and sealed with the top substrate.
The invention has the following beneficial effects:
the invention can eliminate the contact line pinning effect on the liquid-liquid surface, and can realize complete recoverability when performing electrowetting operation; meanwhile, the viscous energy dissipation of the lens can be accelerated by a liquid-liquid interface formed by the composite dielectric layer on the wetting surface formed by the ultra-smooth liquid film, so that the under-damped oscillation generated by the polar liquid subjected to transient excitation of an electric field is converted into critical damped oscillation, the reaction speed of the electrowetting lens is accelerated, and the response time is shortened so as to achieve the purpose of quick imaging.
The present invention will be described in further detail with reference to the accompanying drawings.
Drawings
FIG. 1 is a schematic cross-sectional view of a wetted liquid lens of the present invention;
FIG. 2 is a schematic representation of an immersion surface composite dielectric layer in a wetting liquid lens according to the present invention;
FIG. 3 is a schematic cross-sectional view of a wetted liquid lens of the present invention after application of a voltage;
FIG. 4 is a flow chart of the manufacturing method of the present invention.
Detailed Description
In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited to the specific embodiments disclosed below.
Example 1
Fig. 1 shows a schematic cross-sectional view of an electrowetting liquid lens based on an immersed surface composite dielectric layer, comprising a bottom substrate 104, a left side substrate 102 and a right side substrate 103 standing on both sides of the bottom substrate 104, a top substrate 101, a first bottom electrode 202 and a second bottom electrode 204 arranged on the bottom substrate 104 and partially occupying the upper surface of the bottom substrate 104, a left side electrode 201 arranged on the left side substrate 102, a right side electrode 203 arranged on the right side substrate 103, and an immersed surface composite dielectric layer 401(402) covering the left side electrode 201 and the right side electrode 203 respectively.
The substrate in this embodiment also has other side substrates, and the bottom substrate 104, the left side substrate 102, the right side substrate 103, the top substrate 101 and the other side substrates enclose a cavity, and the polar liquid 601 and the non-polar liquid 602 are contained in the cavity.
Further, the bottom of the top substrate 101 is distributed with a hydrophobic layer 501.
The hydrophobic layer 501 and the non-polar liquid 602 are always tightly connected due to the action of free energy of the surfaces of the two parts, so that the polar liquid 601 and the non-polar liquid 602 in the same space are divided into an upper layer and a lower layer, the non-polar liquid 602 is close to the hydrophobic layer 501, the polar liquid 601 is far from the hydrophobic layer 501, as shown in fig. 1, the non-polar liquid 602 is close to the hydrophobic layer 501 and is located above the cavity, the polar liquid 601 is far from the hydrophobic layer 501 and is located below the cavity, and an interface is formed between the polar liquid 601 and the non-polar liquid 602.
In this embodiment, the polar liquid 601 and the non-polar liquid 602 are both transparent liquids, the material of the polar liquid 601 may be selected from water, sodium chloride aqueous solution, potassium chloride aqueous solution, and the like, and the material of the non-polar liquid 602 may be selected from silicone oil, decane, dodecane, tetradecane, and the like.
The first bottom electrode 202 and the left side electrode 201 form a conductive layer, the second bottom electrode 204 and the right side electrode 203 form a conductive layer, and the first bottom electrode 202, the left side electrode 201, the second bottom electrode 204 and the right side electrode 203 may be formed of ITO (Indium Tin Oxide), IZO (Indium Zinc Oxide) or other transparent conductive materials.
The substrates (including the bottom substrate 104, the left side substrate 102 and the top substrate 101) in this embodiment are all transparent materials, which may be glass or polymer transparent materials, and the hydrophobic layer 501 may be a hydrophobic polymer material containing fluorine or chlorine, or a self-polymerizable molecular membrane containing fluorine or chlorine (such as perfluorooctyl-trichlorosilane).
The wetting surface composite dielectric layer 401 comprises a porous material layer 301 and a super-slip film layer 303 (the wetting surface composite dielectric layer 402 comprises a porous material layer 302 and a super-slip film layer 304);
the porous material layer 301 is a porous structure formed by nano-scale materials, such as a porous PTFE membrane or a porous structure formed by nano-spheres of silica.
The super-slip liquid forming the super-slip liquid film layer 303 is oil with low surface tension, which can be absorbed by the porous insulating layer, such as fluorinate liquid of Fluorinert of 3M company, lubricant oil of GPL series of Krytox of dupont, or silicone oil.
The fabrication process is described in detail by taking the wetting-surface composite dielectric layer 401 on the left side as an example:
during manufacturing, a porous PTFE film is prepared on the left side electrode 201 (left side substrate 102) to serve as the porous material layer 301, then the super-slip liquid is slowly injected onto the PTFE film, so that the porous PTFE film can fully absorb the super-slip liquid, and finally a super-slip liquid film layer 303 is formed on the PTFE film, and the left side wetting surface composite dielectric layer 401 is formed by compounding the porous PTFE film and the super-slip liquid film.
The microstructure of the wetted-surface composite dielectric layer 401 is shown in fig. 2, which is a microstructure of the wetted-surface composite dielectric layer, but other methods can be used to form a similar porous structure, and the wetted-surface composite dielectric layer can be formed by injecting a super-slip liquid into the porous structure. As shown in fig. 2, a porous material layer 301 is first prepared, for example, a multi-layer silica nanosphere porous structure is formed on a planar dielectric substrate a by self-assembly, and then a super-slip liquid is slowly injected into the porous material layer after the porous material layer is subjected to silanization hydrophobic treatment, and the super-slip liquid spreads spontaneously and infiltrates porous regions between the silica nanospheres under the action of capillary force, and finally a super-slip liquid film layer 303 is formed on the porous insulating material layer.
As shown in fig. 1, when no voltage is applied between the first bottom electrode 202 and the left side electrode 201, and between the second bottom electrode 204 and the right side electrode 203, the wetting surface composite dielectric layer 401(402) has hydrophobicity, and the wetting surface composite dielectric layer 401 on the left side in the figure is exemplified as follows:
since the polar liquid 601 and the nonpolar liquid 602 have different wetting angles with the wetted surface composite dielectric layer 401 having hydrophobicity, the polar liquid 601 in contact with the wetted surface composite dielectric layer 401 has a larger contact angle than the nonpolar liquid 602, and therefore, in an equilibrium state, the surface between the polar liquid 601 and the nonpolar liquid 602 has a convex shape protruding toward the nonpolar liquid 602 side as shown in the drawing.
The shape of the surface between the polar liquid 601 and the nonpolar liquid 602 changes based on a change in the magnitude of the electric field intensity between the left side electrode 201 and the first bottom electrode 202, and the magnitude of the electric field intensity between the right side electrode 203 and the second bottom electrode 204.
According to Young's Equation, the electric field can change the size of the contact angle between the liquid and the interface, thereby changing the shape of the liquid, as shown in fig. 3, taking the left side as an example, when a certain voltage is applied between the left side electrode 201 and the first bottom electrode 202, an electric field is formed between the left side electrode 201 and the first bottom electrode 202, the wetting property of the polar liquid 601 on the composite dielectric layer 401 will change due to the action of the electric field force in the electric field, the stronger the electric field applied thereto, the smaller the contact angle with the wetting surface composite dielectric layer 401 will also decrease, and therefore the surface shape change will be generated on the left side at the junction of the polar liquid 601 and the non-polar liquid 602, and the same effect will be generated when the electric field with the same strength is applied on the right side.
The surface between the polar liquid 601 and the non-polar liquid 602 may have different shapes according to the strength of the electric field applied thereto, for example, the surface between the polar liquid 601 and the non-polar liquid 602 may exhibit a concave shape recessed toward the polar liquid 601 side as shown in fig. 3.
Depending on the magnitude of the voltage applied between the left lateral electrode 201 and the first bottom layer electrode 202, and the right lateral electrode 203 and the second bottom layer electrode 204, the surface between the polar liquid 601 and the nonpolar liquid 602 may take different shapes such as a convex surface protruding toward the nonpolar liquid 602 side, a flat surface, or a concave surface recessed toward the polar liquid 601 side.
In this embodiment, the thickness of the polar liquid 601 and the non-polar liquid 602 is in the range of 10-20000 μm, and the specific thickness is determined by the practical application scenario, so that the electrowetting lens has a large transmittance, and at the same time, the interface between the polar liquid 601 and the non-polar liquid 602 can be freely and rapidly formed into a desired shape.
The electrowetting lens of the present embodiment changes the surface shape between the polar liquid 601 and the non-polar liquid 602 in the cavity according to the magnitude of the electric field intensity applied between the left side electrode 201 and the first bottom layer electrode 202, the right side electrode 203 and the second bottom layer electrode 204, so that the electrowetting lens in the present embodiment can respectively exhibit the characteristics of a convex lens, a flat lens, or a concave lens, and according to the different optical characteristics of the three optical lenses of the convex lens, the flat lens, and the concave lens exhibited by the electrowetting lens of the present embodiment, the electrowetting lens of the present embodiment can be applied to stereoscopic (3D) display, display in which 2D and 3D are switched with each other, or other display fields.
The present embodiment is described by taking an example in which the left side electrode 201 and the right side electrode 203 have an electrode structure of the whole surface, and the first bottom layer electrode 202 and the second bottom layer electrode 204 have a partial surface electrode structure, however, the electrode structure of the present invention is not limited thereto, and may be adaptively changed according to design requirements in other examples of the present invention,
for example: the left side electrode 201 and the first bottom electrode 202 are both disposed on the first side substrate, the right side electrode 203 and the second bottom electrode 204 are both disposed on the second side substrate, and the shapes of the polar liquid 601 and the non-polar liquid 602 are changed after voltage is applied.
For another example: the left side electrode 201 and the first bottom electrode 202 are placed in parallel up and down, the right side electrode 203 and the second bottom electrode 204 are placed in parallel up and down, and the shapes of the polar liquid 601 and the non-polar liquid 602 are changed after voltage is applied.
In summary, the specific shapes and positions of the left side electrode 201, the right side electrode 203, the first bottom electrode 202 and the second bottom electrode 204 of the present invention can be varied, and all the structural designs and their equivalent transformations capable of generating the required electric field, so as to change the surface shape between the polar liquid 601 and the non-polar liquid 602 to realize the electrowetting liquid lens function are within the protection of the present invention.
Example 2
A method for manufacturing an electrowetting liquid lens based on an immersed surface composite dielectric layer, capable of manufacturing the electrowetting liquid lens of embodiment 1, with reference to fig. 4 in combination with fig. 1-3, comprising:
step S10, providing the bottom substrate 104;
step S11, forming a first bottom electrode 202 and a second bottom electrode 204 on the bottom substrate 104;
step S20, providing a left lateral substrate 102 and a right lateral substrate 103 that are symmetrical;
step S21, forming the left lateral electrode 201 on the left lateral substrate 102 and the right lateral electrode 203 on the right lateral substrate 103;
step S22, forming a wetting surface composite dielectric layer on the left side electrode 201 and the right side electrode 203, wherein the forming process of the wetting surface composite dielectric layer is as follows:
1) forming a porous material layer 301 on the side electrode surface;
2) injecting a super-slippery liquid into the porous material layer 301 and forming a liquid film on the surface of the porous material layer 301;
3) after the porous material layer 301 fully absorbs the super-slippery liquid and is stable, a super-slippery liquid film layer 303 is formed;
step S30, providing a top layer substrate 101;
step S31, forming a hydrophobic layer 501 under the top substrate 101.
Step S40, the bottom substrate 104 and the side and top substrates 101 forming a cavity;
step S50, injecting polar liquid 601 and nonpolar liquid 602 into the cavity by a drip method, wherein the polar liquid 601 is at the lower part, the nonpolar liquid 602 is at the upper part, and the polar liquid 601 and the nonpolar liquid 602 can form an interface in the cavity;
step S60, the top substrate 101 is covered with a sealed cavity to obtain an electrowetting liquid lens based on the wetted surface composite dielectric layer, and the shape of the interface is changed by applying the same voltage to the first bottom electrode 202 and the left side electrode 201, and the second bottom electrode 204 and the right side electrode 203.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the scope of the invention. It will be appreciated by those skilled in the art that changes may be made without departing from the scope of the invention, and it is intended that all matter contained in the above description or shown in the accompanying drawings shall be interpreted as illustrative and not in a limiting sense.
Claims (10)
1. An electrowetting liquid lens based on an immersed surface composite dielectric layer comprises a substrate with a cavity, polar liquid and non-polar liquid, wherein the polar liquid and the non-polar liquid are contained in the cavity and can form an interface in the cavity, a conducting layer is arranged on the substrate, voltage can be applied to the polar liquid after the conducting layer is electrified so as to change the shape of the interface, an immersed surface composite dielectric layer directly contacted with the polar liquid covers the inner wall of the substrate, the immersed surface composite dielectric layer comprises a porous insulating layer and a super-lubricating liquid film layer formed on the surface of the porous insulating layer, and the porous insulating layer covers the electrode and can absorb the super-lubricating liquid.
2. The electrowetting liquid lens based on a wetted surface composite dielectric layer of claim 1, wherein the porous insulating layer is a porous structure formed of a nano-scale material.
3. The electrowetting liquid lens based on a wetted surface composite dielectric layer of claim 2, wherein the super-slip liquid forming the super-slip liquid film layer is a low surface tension oil that is absorbable by the porous insulating layer.
4. The electrowetting liquid lens based on an immersed-surface composite dielectric layer according to claim 1, wherein the substrate comprises a bottom substrate, a plurality of side substrates, and a top substrate, a hydrophobic layer is arranged at the bottom of the top substrate, the non-polar liquid in the cavity is close to the hydrophobic layer, and the polar liquid in the cavity is far away from the hydrophobic layer.
5. The electrowetting liquid lens based on an wetted-surface composite dielectric layer according to claim 4, wherein the wetted-surface composite dielectric layer is distributed on two symmetrical side substrates.
6. The electrowetting liquid lens based on an wetted surface composite dielectric layer of claim 5, wherein the conductive layer comprises at least two electrodes, and the two electrodes are respectively electrically connected with the wetted surface composite dielectric layer.
7. The electrowetting-based liquid lens with the wetted surface composite dielectric layer of claim 1, wherein the substrate is made of a transparent material, the conductive layer is made of a transparent conductive material, the polar liquid is a transparent liquid and is at least one selected from water, an aqueous solution of sodium chloride and an aqueous solution of potassium chloride, and the non-polar liquid is a transparent liquid and is at least one selected from silicone oil, decane, dodecane and tetradecane.
8. A method for manufacturing an electrowetting liquid lens based on a composite dielectric layer with a wetting surface comprises the following steps:
providing an underlying substrate;
providing a side substrate, wherein a conductive layer and a wetting surface composite dielectric layer are arranged on the side substrate, an open-circuit voltage can be formed between the conductive layer and the wetting surface composite dielectric layer, and the polar liquid changes the shape under the influence of an electric field;
the forming process of the composite dielectric layer on the wetting surface comprises the following steps:
1) forming a porous material layer on the surface of the side electrode;
2) injecting the super-slippery liquid into the porous material layer and forming a liquid film on the surface of the porous material layer;
3) after the porous material layer fully absorbs the super-slippery liquid and is stable, a super-slippery liquid film layer is formed;
providing a top substrate, wherein the bottom substrate, the side substrate and the top substrate enclose to form a sealed cavity, polar liquid and non-polar liquid are contained in the cavity, the contained polar liquid and the contained non-polar liquid can form an interface in the cavity, and different voltages are applied to the conductive layer to change the shape of the interface.
9. The method of claim 8, wherein a hydrophobic layer is formed on the bottom of the top substrate, the non-polar liquid in the cavity is close to the hydrophobic layer, and the polar liquid is far from the hydrophobic layer.
10. The method of claim 8, wherein the polar liquid and the non-polar liquid are dripped into the cavity by a dripping method, and the top substrate is covered and sealed.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116243473A (en) * | 2023-05-08 | 2023-06-09 | 季华实验室 | Electrowetting liquid lens and conversion method thereof |
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| US7167156B1 (en) * | 1999-02-26 | 2007-01-23 | Micron Technology, Inc. | Electrowetting display |
| CN1938631A (en) * | 2004-04-02 | 2007-03-28 | 伊斯曼柯达公司 | Electrowetting display element |
| JP2008197296A (en) * | 2007-02-13 | 2008-08-28 | Sony Corp | Electrowetting device and its manufacturing method |
| CN103470852A (en) * | 2013-09-12 | 2013-12-25 | 东南大学 | Microfluid valve gear based on electrowetting technology |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7167156B1 (en) * | 1999-02-26 | 2007-01-23 | Micron Technology, Inc. | Electrowetting display |
| CN1938631A (en) * | 2004-04-02 | 2007-03-28 | 伊斯曼柯达公司 | Electrowetting display element |
| JP2008197296A (en) * | 2007-02-13 | 2008-08-28 | Sony Corp | Electrowetting device and its manufacturing method |
| CN103470852A (en) * | 2013-09-12 | 2013-12-25 | 东南大学 | Microfluid valve gear based on electrowetting technology |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116243473A (en) * | 2023-05-08 | 2023-06-09 | 季华实验室 | Electrowetting liquid lens and conversion method thereof |
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