CN113495099B - Image processing method for correcting sample inclination of ultrasonic scanning microscope - Google Patents
Image processing method for correcting sample inclination of ultrasonic scanning microscope Download PDFInfo
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- CN113495099B CN113495099B CN202111050811.9A CN202111050811A CN113495099B CN 113495099 B CN113495099 B CN 113495099B CN 202111050811 A CN202111050811 A CN 202111050811A CN 113495099 B CN113495099 B CN 113495099B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0654—Imaging
- G01N29/0681—Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0654—Imaging
- G01N29/069—Defect imaging, localisation and sizing using, e.g. time of flight diffraction [TOFD], synthetic aperture focusing technique [SAFT], Amplituden-Laufzeit-Ortskurven [ALOK] technique
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
Abstract
The invention discloses an image processing method for correcting the sample inclination of an ultrasonic scanning microscope, which comprises the steps of performing Hilbert transform on ultrasonic echo data, extracting X, Y echo data arrays of each scanning point at a central axis in the direction, calculating the index position of the maximum echo intensity value in the arrays, linearly fitting the slope between the index position and X, Y axis coordinates, correcting the depth coordinates of each scanning point by point according to the slope, and finally drawing a C scanning image according to the corrected depth coordinates. The invention adopts an image processing algorithm to correct the sample inclination, does not need to carry out complex experimental adjustment before actual scanning, and can obtain better C scanning imaging effect when the sample inclination degree is larger.
Description
Technical Field
The invention belongs to the field of image processing of an ultrasonic scanning microscope, and particularly relates to an image processing method for correcting the inclination of an ultrasonic scanning microscope sample.
Background
An ultrasonic scanning microscope is a device for microscopic imaging of a sample using ultrasonic waves. Because the ultrasonic wave can penetrate through the surface of the sample, the ultrasonic scanning microscope can directly image the internal structure of the sample, and therefore, the ultrasonic scanning microscope is widely applied to the field of nondestructive testing, such as chip packaging defect detection, wafer bonding defect detection, composite material detection, welding detection and the like. The ultrasonic microscope focuses pulsed ultrasonic waves inside the sample, and the received pulse echoes contain material properties and height information of the sample. The section morphology and the three-dimensional morphology of the sample in all directions can be obtained by performing point-by-point linear scanning on a horizontal plane.
The C-scan image is one of the most important detection results of the ultrasonic scanning microscope, and a cross-sectional image of a detected sample at a specific depth can be obtained. In a conventional C-scan image, a peak value or a peak-to-peak value of a certain depth interval is extracted from ultrasonic echo data as a pixel gray value of a pixel point of the plane, and after each pixel point in a scan plane is subjected to the processing, the whole C-scan image can be obtained.
However, the existing C-scan image has a high requirement for the horizontal degree of the sample placement, and if the sample inclination angle is too large, the effect of the C-scan image is poor, and the full view of the internal section of the sample cannot be accurately shown. The inclination of the sample is difficult to avoid in the actual test process, the horizontal debugging wastes time and labor, and great challenges are brought to the image processing.
Disclosure of Invention
The invention aims to provide an image processing method for correcting the sample inclination of an ultrasonic scanning microscope, aiming at the defects of the prior art. The invention reduces the influence of the sample inclination of the ultrasonic microscope on the C scanning image.
The purpose of the invention is realized by the following technical scheme: an image processing method for correcting the sample inclination of an ultrasonic scanning microscope comprises the following steps:
step S1, acquiring original ultrasonic echo data of each scanning point, and performing Hilbert transform to obtain transformed ultrasonic echo data;
step S2, according to the transformed ultrasonic echo data obtained in the step S1, the upper surface of the sample at the central axis in the X, Y direction is identified and the slope of the sample is calculated;
step S3, correcting the depth coordinate of each scanning point by point;
in step S4, a C-scan image is rendered based on the corrected depth coordinates.
Further, in step S2, the central axis is defined as: the X-axis coordinate range is [1:xn]and the Y-axis coordinate range is [1:yn]then, thenx=xnA line segment formed by the scanning points at the position/2 is a central axis in the Y direction,y=ynand a line segment formed by the scanning points at the position/2 is a central axis in the X direction.
Further, in step S1, after the original ultrasound echo data is subjected to hilbert transform, an envelope of the original echo data is obtained as transformed ultrasound echo data, and the transformed ultrasound echo data is a non-negative number; the transformed ultrasonic echo data of each scanning point is an array, the array represents the echo intensity of the scanning point in a certain depth interval, and the index positions of elements in the array correspond to different depths; the larger the value of the array element is, the larger the echo intensity of the actual spatial position corresponding to the element is; the more forward the index position of the array element in the array, the closer the actual spatial position corresponding to the element is to the ultrasonic probe.
Further, in step S2, the echo intensity of the upper surface of the sample is maximized in the ultrasonic scanning microscope; and extracting X, Y an array of the transformed ultrasonic echo data of each scanning point at the central axis in the direction, and obtaining the index position of the maximum value of the echo intensity in the array, thereby identifying the upper surface of the sample at the central axis in the direction X, Y.
Further, linearly fitting the relation between the index position corresponding to the upper surface of the sample at the central axis in the X direction and the X-axis coordinate to obtain the slopekxLinearly fitting the relation between the index position corresponding to the upper surface of the sample at the central axis in the Y direction and the Y-axis coordinate to obtain the slopeky。
Further, in step S2, a threshold needs to be set when determining the maximum value of the echo data, and if the maximum value of an element in the echo data array at a certain scanning point is lower than the set threshold, all elements in the array are noise, and it is determined that no sample is recognized at the scanning point and the data at the scanning point does not participate in fitting.
Further, in step S3, the scanning point coordinates are (x,y) Position of (2), its depth coordinatezThe correction is as follows:z+round(kx×x+ky×y) (ii) a Where round is the rounding function.
Further, in step S4, the maximum value of the converted echo data within the specified depth interval is extracted for each scanning point according to the corrected depth coordinate, and the maximum value is used as the pixel gray value of the scanning point in the C-scan image, that is, the corrected C-scan image is obtained.
The invention has the beneficial effects that:
(1) the invention adopts an image processing algorithm to correct the sample inclination, and does not need to carry out experimental adjustment before actual scanning;
(2) when the sample inclination degree is larger, the C scanning imaging effect is better than that of the traditional method.
Drawings
FIG. 1 is a flow chart of an image processing method for correcting the sample tilt of an ultrasonic scanning microscope according to the present invention;
FIG. 2 is a diagram of echo data before and after Hilbert transform performed on a scanning point according to an embodiment of the present invention;
FIG. 3 is a graph of echo data intensity at the central axis in the direction of an embodiment X, Y of the present invention;
FIG. 4 is a schematic diagram illustrating how depth intervals are divided before and after correction according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of C-scan imaging effect before and after correction according to an embodiment of the present invention.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. This application is capable of embodiments in many different forms than those described herein and those skilled in the art will be able to make similar modifications without departing from the spirit of the application and it is therefore not intended to be limited to the embodiments disclosed below.
As shown in fig. 1, the image processing method for correcting the sample tilt of the ultrasonic scanning microscope of the present invention comprises the following steps:
step S1, ultrasound echo data of each scanning point is acquired, and hilbert transform is performed.
Specifically, the original ultrasonic echo data of each scanning point has a positive value, a negative value and a zero value, after hilbert transformation is performed, a processed echo array is obtained and is an envelope of the original echo data, all elements in the array are non-negative numbers, and no negative value exists. The larger the numerical value of the array element after processing is, the larger the echo intensity of the actual space position corresponding to the element is; the more forward the index position of the array element in the array, the closer the actual spatial position corresponding to the element is to the ultrasonic probe. Therefore, the ultrasonic echo data array after the hilbert transform represents the echo intensity of the scanning point in a certain depth interval, and the index positions of all elements in the array correspond to different depths.
At step S2, the sample upper surface at the central axis in the direction X, Y is identified and the slope is calculated.
Specifically, an array of echo data of each scanning point at the central axis in the direction of X, Y is extracted, the index position of the echo intensity maximum in the array is calculated, and the slope between the index position of the maximum and the X, Y axis coordinate is linearly fitted.
Specifically, a linear fitting mode is used for fitting the relation between the index position of the maximum echo intensity value of each scanning point at the central axis in the X direction and the X-axis coordinate, and the slope of the relation is recorded askx(ii) a Fitting the relation between the index position of the maximum echo intensity value of each scanning point at the axle wire in the Y direction and the coordinate of the Y axis in a linear fitting mode, and recording the slope of the relation asky。
The central axis is defined as: when the scanning X-axis coordinate range is [1:xn]and the Y-axis coordinate range is [1:yn]when it is, thenx=xnA line segment formed by the scanning points at the position/2 is a central axis in the Y direction,y=ynand a line segment formed by the scanning points at the position/2 is a central axis in the X direction.
In an ultrasound scanning microscope, the index position of the echo intensity maximum generally corresponds to the depth coordinate of the upper surface of the sample. It should be noted that a threshold needs to be set when determining the maximum value, and if the maximum value of an element in the echo data array of a certain scanning point is lower than the set threshold, all elements in the array are noise, it is determined that no sample is identified at the scanning point, and the data at the scanning point does not participate in data fitting.
In step S3, the depth coordinate of each scanning point is corrected point by point.
Specifically, the coordinate at the scanning point is (x,y) Position of (2), its depth coordinatezThe correction is as follows:z+round(kx×x+ky×y) Where round is the rounding function and the logarithm is rounded.
In step S4, a C-scan image is rendered based on the corrected depth coordinates.
Specifically, according to the corrected depth coordinate, at each scanning point, the maximum value of the echo data in the specific depth interval range is extracted and used as the pixel gray value of the scanning point in the C-scan image, and the corrected C-scan image can be obtained.
In one specific embodiment, the sample is a chip having X-axis and Y-axis coordinate ranges of [1:1800] and depth direction coordinate ranges of [1:400 ].
Referring to fig. 2, in the embodiment, an envelope curve with a positive value is obtained before and after hilbert transform of original echo data of a scanning point with plane coordinates (900), which facilitates subsequent identification of the position of the upper surface of the sample and drawing of a C-scan image.
Referring to fig. 3, an echo intensity map composed of scan points at the central axis in the direction of the example X, Y shows a cross-sectional view of the inside of the sample, where the brightness of a pixel in the map is larger, which indicates that the echo intensity is stronger, and the position with the maximum brightness is the upper surface of the sample. It can be seen that the sample of this example has a large tilt in the X direction. Through the step S2, the slopes of the upper surface of the sample at the central axis in the X, Y direction are obtained askx=-0.076，ky=0。
Referring to fig. 4, the depth coordinates of each scanned point of the sample are corrected, via step S3. In this embodiment, a depth interval [260:400 ] is selected]Drawing a C scan image, thenxThe depth interval at position =1 is corrected before and after [260:400 ]]To do sox=1800 before correction of depth range [260: 400%]The corrected equivalent depth range is [123:263 ]]。
Referring to fig. 5, a C-scan image before and after the tilt correction of the embodiment is obtained through step S4. It can be seen that after the depth coordinate correction, the imaging effect is greatly improved, and the image is clear and complete.
Claims (6)
1. An image processing method for correcting the sample inclination of an ultrasonic scanning microscope is characterized by comprising the following steps:
step S1, acquiring original ultrasonic echo data of each scanning point, and performing Hilbert transform to obtain transformed ultrasonic echo data;
step S2, according to the transformed ultrasonic echo data obtained in the step S1, the upper surface of the sample at the central axis in the X, Y direction is identified and the slope of the sample is calculated; the method specifically comprises the following steps: extracting X, Y an array of the transformed ultrasonic echo data of each scanning point at the central axis in the direction, and obtaining the index position of the maximum echo intensity value in the array, thereby identifying the upper surface of the sample at the central axis in the X, Y direction; linearly fitting the relation between the index position corresponding to the upper surface of the sample at the central axis in the X direction and the X-axis coordinate to obtain the slopekxLinearly fitting the relation between the index position corresponding to the upper surface of the sample at the central axis in the Y direction and the Y-axis coordinate to obtain the slopeky；
Step S3, correcting the depth coordinate of each scanning point by point;
in step S4, a C-scan image is rendered based on the corrected depth coordinates.
2. The image processing method for correcting the tilt of the sample of the scanning ultrasonic microscope as set forth in claim 1, wherein in step S2, the central axis is defined as: the X-axis coordinate range is [1:xn]and the Y-axis coordinate range is [1:yn]then, thenx=xnA line segment formed by the scanning points at the position/2 is a central axis in the Y direction,y=ynand a line segment formed by the scanning points at the position/2 is a central axis in the X direction.
3. The image processing method for correcting the sample tilt of the scanning ultrasonic microscope as claimed in claim 1, wherein in step S1, the original echo data is subjected to hilbert transform to obtain an envelope of the original echo data, which is used as the transformed echo data and is a non-negative number; the transformed ultrasonic echo data of each scanning point is an array, the array represents the echo intensity of the scanning point in a certain depth interval, and the index positions of elements in the array correspond to different depths; the larger the value of the array element is, the larger the echo intensity of the actual spatial position corresponding to the element is; the more forward the index position of the array element in the array, the closer the actual spatial position corresponding to the element is to the ultrasonic probe.
4. The image processing method for correcting the sample tilt of the scanning ultrasound microscope as claimed in claim 1, wherein in step S2, a threshold value is required to be set when determining the maximum value of the echo data, and if the maximum value of the element in the echo data array at a certain scanning point is lower than the set threshold value, all the elements in the array are noise, and it is determined that no sample is recognized at the scanning point, and the data at the scanning point does not participate in the fitting.
5. The image processing method for correcting the sample tilt of the scanning ultrasonic microscope according to claim 1, wherein in step S3, the scanning point coordinates are (d)x,y) Position of (2), its depth coordinatezThe correction is as follows:z+round(kx×x+ky×y) (ii) a Where round is the rounding function.
6. The image processing method for correcting the sample tilt of the scanning ultrasound microscope as claimed in claim 1, wherein in step S4, the maximum value of the transformed echo data within the specified depth interval is extracted at each scanning point according to the corrected depth coordinate, and is used as the gray value of the pixel of the scanning point in the C-scan image, i.e. the corrected C-scan image is obtained.
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