CN113387321B - Processing method for realizing high-centering double-sided glass microstructure array - Google Patents
Processing method for realizing high-centering double-sided glass microstructure array Download PDFInfo
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- CN113387321B CN113387321B CN202010169274.9A CN202010169274A CN113387321B CN 113387321 B CN113387321 B CN 113387321B CN 202010169274 A CN202010169274 A CN 202010169274A CN 113387321 B CN113387321 B CN 113387321B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/04—Networks or arrays of similar microstructural devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00031—Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Chemical & Material Sciences (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
The invention discloses a processing method for realizing a high-alignment-degree double-sided glass microstructure array, which comprises the following steps of preparing a high-precision hard alloy sleeve; manufacturing an upper die: preparing a positioning die of a hard alloy material; preparing a die pressing die of the heat-resistant stainless steel material plated with the Ni-P plating layer; connecting and fixing the positioning die and the die pressing die; installing an upper die on a machine tool main shaft, adjusting the level of a positioning plane of the positioning die, and adjusting the centering degree of the excircle center of the positioning die and the center of the machine tool main shaft; carrying out smooth cutting on a nickel phosphide Ni-P coating on the mould pressing mould; processing a microstructure on the surface of the nickel phosphide Ni-P coating after the leveling processing to obtain an upper die; manufacturing a lower die; assembling an upper die, a lower die, a sleeve and glass to be processed, and sending the assembled glass to high-precision glass molding equipment for molding; the invention provides a processing method capable of realizing high shape precision, high position precision, high consistency, high efficiency, low cost and high centering degree double-sided glass microstructure array.
Description
Technical Field
The invention relates to the technical field of microstructure processing, in particular to a processing method for realizing a high-centering double-sided glass microstructure array.
Background
At present, the processing method of the double-sided glass micro-lens array mainly comprises ultra-precise grinding processing, combined processing of ultra-precise grinding and lens splicing and ultra-precise mould pressing forming processing. Ultra-precise grinding: clamping a glass blank on a main shaft of a machine tool, processing a microstructure array on one surface of the glass blank by a grinding wheel through multi-shaft linkage, unloading a workpiece from the machine tool, turning the workpiece for 180 degrees, then re-clamping the workpiece on the main shaft, and processing the microstructure array on the other surface of the glass blank to realize the processing of the double-sided glass microstructure array; ultra-precision grinding and lens splicing combined machining: clamping a glass blank on a machine tool, processing a micro-structure subunit (single micro-structure) on one surface of the glass blank by a grinding wheel through multi-shaft linkage, unloading a workpiece from the machine tool, turning the workpiece for 180 degrees, then clamping the workpiece on a main shaft again, and processing a micro-structure subunit (single micro-structure) on the other surface of the glass blank. Splicing each microstructure subunit together to form a double-sided microstructure array, and processing the double-sided glass micro-lens structure array; ultra-precise die forming: the method is characterized in that heat-resistant stainless steel is used as a substrate, a layer of nickel phosphide Ni-P is plated on the surface of the substrate, and a microstructure array is processed on the nickel phosphide Ni-P plating layer by a single-point diamond cutting technology, so that the processing of an upper die and a lower die of the microstructure array is realized. And then the glass preform blank is placed in an upper die and a lower die for pressing, so that the processing of the double-sided glass micro-lens structure array is realized.
Although the processing of the double-sided glass microstructure array can be completed by the ultra-precise grinding processing, the shape precision of the microlens array is low and the consistency is poor due to the serious abrasion of the grinding wheel in the grinding process, and meanwhile, the centering degree of the processed microlens array is also low, the processing efficiency is low and the processing cost is high due to the fact that a workpiece needs to be detached from a machine tool for secondary clamping in the processing process; the ultra-precision grinding and lens splicing combined machining can ensure that the shape precision of each microstructure subunit is very high, the alignment degree of the microstructure subunits can be smaller than 3 mu m, but a double-sided glass microstructure array can be formed only by splicing each subunit, so that the position error ratio of each microstructure subunit is large, the machining efficiency is low, and the machining cost is high. Meanwhile, each unit is bonded together by glue, so that the high-temperature resistance is poor; although the micro-structure array die-pressing forming technology using heat-resistant stainless steel as the base of the die can realize the processing of a micro-lens array with high shape precision, high position precision, high consistency, high efficiency and low cost, the heat expansion coefficient of the heat-resistant stainless steel material is larger, in order to avoid the difficulty in demoulding caused by the clamping of the die and a sleeve in the die-pressing process, the matching precision of the die and the sleeve needs to be larger than 10 micrometers, so that the centering degree of an upper die and a lower die is larger than 5 micrometers, and the centering degree of the processed double-sided glass micro-structure array is poorer and larger than 5 micrometers.
Therefore, it is highly desirable to provide a method for processing a high-shape-accuracy, high-position-accuracy, high-uniformity, high-efficiency, low-cost, and high-centering double-sided glass microstructure array.
Disclosure of Invention
The invention aims to provide a method for processing a high-centering double-sided glass microstructure array, which aims to solve the problems in the prior art and can realize high shape precision, high position precision, high consistency, high efficiency, low cost and high centering.
In order to achieve the purpose, the invention provides the following scheme:
the invention provides a processing method for realizing a high-centering double-sided glass microstructure array, which comprises the following steps of:
step one, preparing a high-precision hard alloy sleeve;
step two, manufacturing an upper die blank: preparing a positioning die of a hard alloy material; preparing a mould pressing die of a heat-resistant stainless steel material plated with a nickel phosphide Ni-P plating layer; connecting and fixing the positioning die and the die pressing die to obtain an upper die blank, wherein the end face of the die pressing die plated with the nickel phosphide Ni-P coating faces outwards;
mounting the upper die blank on a machine tool main shaft, adjusting the level of a positioning plane of a positioning die, adjusting the centering degree of the excircle center of the positioning die and the center of the machine tool main shaft, and ensuring that the centering error is less than 1 mu m;
step four, carrying out flattening cutting on the nickel phosphide Ni-P coating on the mould pressing mould;
processing a microstructure on the surface of the nickel phosphide Ni-P coating after the leveling processing to obtain an upper die;
sixthly, manufacturing a lower die by repeating the second step and the fifth step;
and step seven, assembling the upper die, the lower die, the sleeve and the glass to be processed, and sending the assembled glass to high-precision glass molding equipment for molding.
Preferably, the dimensional accuracy of the cemented carbide sleeve is less than 1 μm.
Preferably, the dimensional accuracy of the positioning die is less than 1 μm.
Preferably, the positioning die and the pressing die are fixed through bolt connection.
Preferably, the upper die is assembled at the top of the sleeve, the lower die is assembled at the bottom of the sleeve, the surface of the nickel phosphide Ni-P coating with the microstructure of the upper die is opposite to the surface of the nickel phosphide Ni-P coating with the microstructure of the upper die, and the glass to be processed is arranged between the upper die and the lower die.
Compared with the prior art, the invention has the following beneficial technical effects:
1. according to the processing method for realizing the high-centering double-sided glass microstructure array, provided by the invention, the positioning contact surface of the sleeve and the die is made of the hard alloy material, so that the problems of precision reduction and demoulding caused by thermal expansion of the die in the heating process are avoided.
2. According to the processing method for realizing the high-centering-degree double-sided glass microstructure array, provided by the invention, the processing and mould pressing processes of the microstructures on the surfaces of the upper mould and the lower mould are positioned by taking the excircle and the positioning plane of the positioning mould as references, the positioning references are unified, and the centering degree of the double-sided glass microstructure is ensured to be less than 1 mu m.
3. According to the processing method for realizing the high-centering-ratio double-sided glass microstructure array, provided by the invention, the Ni-P coating reduces the processing difficulty of the microstructure array and improves the processing efficiency. Therefore, the method is particularly suitable for the die pressing of the high-centering double-sided glass microstructure array.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic view of a forward structure of the sleeve of the present invention;
FIG. 2 is a schematic side view of the sleeve of the present invention;
FIG. 3 is a schematic view of the structure of the upper mold blank of the present invention;
FIG. 4 is a schematic structural view of an upper mold blank of the present invention assembled on a spindle of a machine tool;
FIG. 5 is a schematic structural view of an upper mold blank for performing the finish-cutting of a nickel phosphide Ni-P plating layer in accordance with the present invention;
FIG. 6 is a schematic structural view of an upper mold of the present invention;
FIG. 7 is a schematic view of the structure of the lower mold of the present invention;
FIG. 8 is a schematic view of the assembly of the upper mold, lower mold, sleeve and glass to be processed according to the present invention;
in the figure: 1-sleeve, 2-positioning die, 3-mould pressing die, 4-nickel phosphide Ni-P coating, 5-machine tool spindle, 6-microstructure, 7-glass to be processed, 8-upper die and 9-lower die.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
The invention aims to provide a method for processing a high-alignment-degree double-sided glass microstructure array, which is used for solving the problems in the prior art.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
The processing method for realizing the high-centering double-sided glass microstructure array provided by the embodiment comprises the following steps of:
step one, as shown in fig. 1 and 2, preparing a high-precision hard alloy sleeve 1, wherein the dimensional precision of the sleeve 1 is less than 1 μm;
step two, as shown in fig. 3, manufacturing an upper die blank: preparing a positioning die 2 made of hard alloy material, wherein the size precision of the positioning die 2 is less than 1 mu m; preparing a mould pressing die 3 made of heat-resistant stainless steel material plated with a nickel phosphide Ni-P plating layer 4; connecting and fixing the positioning die 2 and the die pressing die 3 through bolts to obtain an upper die blank, wherein the end surface of the die pressing die 3 plated with the nickel phosphide Ni-P plating layer 4 faces outwards;
step three, as shown in fig. 4, mounting the blank of the upper die 8 on the main shaft 5 of the machine tool, adjusting the level of the positioning plane of the positioning die 2, adjusting the alignment degree of the excircle center of the positioning die 2 and the center of the main shaft 5 of the machine tool, and ensuring that the alignment error is less than 1 μm;
step four, as shown in fig. 5, carrying out flat cutting on the nickel phosphide Ni-P plating layer 4 on the die 3;
step five, as shown in fig. 6, processing a microstructure 6 on the surface of the nickel phosphide Ni-P plating layer 4 after the leveling processing to obtain an upper die 8;
sixthly, as shown in fig. 7, repeating the second step and the fifth step to manufacture a lower die 9 (the lower die 9 has the same structure as the upper die 8);
seventhly, as shown in fig. 8, assembling the upper die 8, the lower die 9, the sleeve 1 and the glass 7 to be processed, and sending the assembled glass into high-precision glass molding equipment for molding to obtain double-sided glass with a double-sided microstructure array; specifically, an upper die 8 is assembled at the top of the sleeve 1, a lower die 9 is assembled at the bottom of the sleeve 1, the surface of the nickel phosphide Ni-P plating layer 4 with the microstructure 6 of the upper die 8 is opposite to the surface of the nickel phosphide Ni-P plating layer 4 with the microstructure 6 of the upper die 8, and the glass 7 to be processed is arranged between the upper die 8 and the lower die 9.
The principle and the implementation mode of the invention are explained by applying specific examples, and the description of the above examples is only used for helping understanding the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In summary, this summary should not be construed to limit the present invention.
Claims (4)
1. A processing method for realizing a high-alignment-degree double-sided glass microstructure array is characterized by comprising the following steps of:
step one, preparing a high-precision hard alloy sleeve with the dimensional precision smaller than 1 mu m;
step two, manufacturing an upper die blank: preparing a positioning die of a hard alloy material; preparing a mould pressing die of a heat-resistant stainless steel material plated with a nickel phosphide Ni-P plating layer; connecting and fixing the positioning die and the die pressing die to obtain an upper die blank, wherein the end face of the die pressing die plated with the nickel phosphide Ni-P coating faces outwards;
mounting the upper die blank on a machine tool main shaft, adjusting the level of a positioning plane of a positioning die, adjusting the centering degree of the excircle center of the positioning die and the center of the machine tool main shaft, and ensuring that the centering error is less than 1 mu m;
step four, carrying out smooth cutting on the nickel phosphide Ni-P coating on the mould pressing mould;
processing a microstructure on the surface of the nickel phosphide Ni-P coating after the leveling processing to obtain an upper die;
sixthly, manufacturing a lower die by repeating the second step to the fifth step;
and step seven, assembling the upper die, the lower die, the sleeve and the glass to be processed, and sending the assembled glass to high-precision glass molding equipment for molding.
2. The processing method for realizing the high-centering double-sided glass microstructure array according to claim 1, wherein the processing method comprises the following steps: the size precision of the positioning mould is less than 1 mu m.
3. The processing method for realizing the high-centering double-sided glass microstructure array according to claim 1, wherein the processing method comprises the following steps: the positioning die and the die pressing die are fixedly connected through bolts.
4. The processing method for realizing the high-centering double-sided glass microstructure array according to claim 1, wherein the processing method comprises the following steps: the upper die is assembled at the top of the sleeve, the lower die is assembled at the bottom of the sleeve, the surface of the nickel phosphide Ni-P coating with the microstructure of the upper die is opposite to the surface of the nickel phosphide Ni-P coating with the microstructure of the lower die, and the glass to be processed is arranged between the upper die and the lower die.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3729281A1 (en) * | 1987-09-02 | 1989-03-16 | Schott Glaswerke | METHOD FOR PRODUCING PRESSED GLASS MOLDED BODIES FOR PRECISION-OPTICAL PURPOSES |
| CN1167264A (en) * | 1995-07-18 | 1997-12-10 | 松下电器产业株式会社 | Optical element, shaping mould for optical element and shaping method thereof |
| JP2004315867A (en) * | 2003-04-15 | 2004-11-11 | Konica Minolta Holdings Inc | Method of producing die |
| CN101304953A (en) * | 2005-11-14 | 2008-11-12 | 旭硝子株式会社 | Method and apparatus for molding optical element |
| CN102173563A (en) * | 2011-01-19 | 2011-09-07 | 湖南大学 | Ultrasonic vibration-assisted method for precise mould pressing and shaping |
| CN103058501A (en) * | 2013-01-25 | 2013-04-24 | 苏州百纳思光学科技有限公司 | Hot pressing molding method of chalcogenide glass preform |
| CN203356401U (en) * | 2013-07-10 | 2013-12-25 | 中国航空工业集团公司北京航空制造工程研究所 | Wheel hub spinning forming die |
| CN106040325A (en) * | 2016-05-24 | 2016-10-26 | 苏州含光微纳科技有限公司 | Method and device for manufacturing glass microfluidic chip through mould pressing technology |
| CN110304816A (en) * | 2019-01-25 | 2019-10-08 | 北京理工大学 | A kind of glass lens manufacturing method that array formation is cut one by one |
-
2020
- 2020-03-12 CN CN202010169274.9A patent/CN113387321B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3729281A1 (en) * | 1987-09-02 | 1989-03-16 | Schott Glaswerke | METHOD FOR PRODUCING PRESSED GLASS MOLDED BODIES FOR PRECISION-OPTICAL PURPOSES |
| CN1167264A (en) * | 1995-07-18 | 1997-12-10 | 松下电器产业株式会社 | Optical element, shaping mould for optical element and shaping method thereof |
| JP2004315867A (en) * | 2003-04-15 | 2004-11-11 | Konica Minolta Holdings Inc | Method of producing die |
| CN101304953A (en) * | 2005-11-14 | 2008-11-12 | 旭硝子株式会社 | Method and apparatus for molding optical element |
| CN102173563A (en) * | 2011-01-19 | 2011-09-07 | 湖南大学 | Ultrasonic vibration-assisted method for precise mould pressing and shaping |
| CN103058501A (en) * | 2013-01-25 | 2013-04-24 | 苏州百纳思光学科技有限公司 | Hot pressing molding method of chalcogenide glass preform |
| CN203356401U (en) * | 2013-07-10 | 2013-12-25 | 中国航空工业集团公司北京航空制造工程研究所 | Wheel hub spinning forming die |
| CN106040325A (en) * | 2016-05-24 | 2016-10-26 | 苏州含光微纳科技有限公司 | Method and device for manufacturing glass microfluidic chip through mould pressing technology |
| CN110304816A (en) * | 2019-01-25 | 2019-10-08 | 北京理工大学 | A kind of glass lens manufacturing method that array formation is cut one by one |
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