CN113325012B - High-energy charged particle imaging device - Google Patents
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Abstract
The invention relates to a high-energy charged particle imaging device, which belongs to the technical field of charged particle imaging and sequentially comprises a particle source, a beam matching transmission section, a plasma imaging lens group and a detection system which are arranged on a common optical axis.
Description
Technical Field
The invention belongs to the technical field of charged particle imaging, and particularly relates to a high-energy charged particle imaging device.
Background
The high-energy charged particle imaging technology (Charged particle radiography) is invented in the 90 th century, and by utilizing the high penetrating power of high-energy charged particles, the charged particles passing through the sample form a point-to-point sample real space image on a radiation conversion target through the focusing and defocusing effects of a magnetic lens imaging system, so that the internal structural information of an opaque compact object can be visually displayed. Meanwhile, the method can also be used for measuring the transient electromagnetic field due to the characteristic of carrying charges. Therefore, high-energy charged particle imaging technology plays an important role in the fields of high-energy density physical diagnosis, medical imaging, and flash photography.
The magnetic lens imaging system is a core component of a high-energy charged particle imaging apparatus, and is generally composed of a solenoid and a quadrupole magnet group. The solenoid lens has a simple structure and a symmetrical geometric structure, and can realize the simultaneous focusing of charged particles in the x and y directions, such as the active compensation of CN201480007705.4 for a field distortion component in a magnetic resonance imaging system with a rack. However, the focusing power of the solenoid is weak and significantly decreases as the energy of charged particles increases, and thus, the solenoid is often used in an imaging device of low-energy charged particles, such as a transmission electron microscope. Compared with a solenoid, the focusing capability of the quadrupole magnet is strong, for example, a charged particle photographing device with a matching beam current of a parallel beam is disclosed in CN201510331159.6, but a single quadrupole magnet can only focus one direction of charged particles and defocus the other direction, so that a plurality of quadrupole magnets are often required to form an equivalent imaging lens. Charged particle imaging optical systems based on quadrupole magnets are complex in structure, huge in size and high in cost, and limit application scenes and application range.
Accordingly, the prior art is in need of further development and improvement.
Disclosure of Invention
In order to solve the above-mentioned problems, a high-energy charged particle imaging apparatus having a high space-time resolution and a compact structure is proposed.
In order to achieve the above purpose, the present invention provides the following technical solutions:
a high energy charged particle imaging apparatus comprising, in order:
a particle source for generating a high energy pulsed charged particle beam;
the beam matching transmission section is used for transmitting the high-energy pulse charged particle beam to the sample;
the plasma imaging lens group focuses the high-energy pulse charged particle beam carrying the sample information to form a point-to-point image;
and the detection system is used for collecting point-to-point images formed by the sample and converting the point-to-point images into images so as to intuitively display real space information of the sample.
Further, the particle source generates a pulsed charged particle beam having a pulse time structure, which is energized into a high energy pulsed charged particle beam by an accelerator.
Further, the pulse charged particle beam is a pulse electron beam or a pulse proton beam, and the particle source is an electron source or a proton source.
Preferably, the particle source comprises a laser and an emission electron gun, and the emission electron gun in a critical state generates a pulse electron beam under the irradiation of the laser through a photoelectric effect.
Further, the high-energy pulsed charged particle beam is transferred onto the sample through a transverse process of the matching transfer section, and its transverse dimension matches the sample dimension.
Preferably, the matching transmission section adopts a quadrupole magnet to transversely process the high-energy pulse charged particle beam.
Preferably, the lateral treatment includes focusing, defocusing, and diffusion.
Preferably, the matching is such that the transverse dimension of the high energy pulsed charged particle beam is not smaller than the sample dimension, and complete imaging of the sample has been achieved.
Further, the plasma imaging lens group comprises a plurality of stages of plasma imaging lenses which are arranged in sequence, and the object plane of the rear stage plasma imaging lens coincides with the image plane of the front stage plasma imaging lens.
Further, the sample is located at the object plane of the foremost plasma imaging lens, which is the least spaced from the sample.
Further, the overall magnification of the sample is equal to the product of the magnification of each stage of the plasma imaging lens.
Further, the plasma imaging lens comprises a discharge tube and a pulse high-voltage module, wherein the discharge tube is filled with gas, the pulse high-voltage module is used for applying pulse high voltage to the discharge tube, and under the action of the pulse high voltage, the gas in the discharge tube is broken down to form plasma, so that a pulse current is promoted to form an angular pulse strong magnetic field.
Further, when the high energy pulsed charged particle beam passes through the plasma lens, it is subjected to radial focusing forces directed toward the axis in both the x-direction and the y-direction.
Further, when the plasma is uniformly ionized, the radial focusing force to which the high-energy pulsed charged particle beam is subjected is linear with its radial position.
Preferably, the plasma imaging lens group includes at least a primary plasma imaging lens.
Further, under the condition that the object distance, the image distance and the magnification of the plasma imaging lens group are basically kept unchanged, the aim of matching the energy of the high-energy pulse charged particle beam is achieved by adjusting the length or the inner diameter of the plasma imaging lens.
Further, under the condition that the object distance, the image distance, the plasma imaging lens structure and the magnification of the plasma imaging lens group are basically kept unchanged, the aim of matching the energy of the high-energy pulse charged particle beam is achieved by adjusting the intensity of the loading pulse current and the magnetic field gradient of the angular pulse strong magnetic field.
Preferably, the magnitude of the change in value is not greater than 10% and is considered to remain substantially unchanged.
Further, the detection system comprises an imaging screen and an image collector, wherein the imaging screen is positioned on an image plane of the plasma imaging lens group, the high-energy pulse charged particle beam carrying real space information of the sample is transmitted to the imaging screen to generate a fluorescent signal, and the image collector collects the fluorescent signal and converts the fluorescent signal into a digital image so as to visually display the real space information of the sample.
The beneficial effects of the invention are as follows:
1. the high-energy charged particle imaging system is composed of the particle source, the beam matching transmission section, the plasma imaging lens group and the detection system, is simple and compact in structure, improves the applicability of the high-energy charged particles, and enriches the application scenes of the high-energy charged particles.
2. And the high gradient advantage of the plasma imaging lens is utilized, gao Jiecheng image errors are reduced, and the spatial resolution capability of the high-energy charged particle imaging device is improved.
3. The total amplification multiple of the sample is adjusted by adjusting the arrangement level of the plasma imaging lens, so that the operation is convenient.
4. Under the condition that the object distance, the image distance and the magnification of the plasma imaging lens group are basically kept unchanged, the aim of matching the energy of the high-energy pulse charged particle beam is achieved by adjusting the length or the inner diameter of the plasma imaging lens.
5. Under the condition that the object distance, the image distance, the plasma imaging lens structure and the magnification of the plasma imaging lens group are basically unchanged, the aim of matching the energy of the high-energy pulse charged particle beam is achieved by adjusting the intensity of the loading pulse current and the magnetic field gradient of the angular pulse strong magnetic field.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic structural view of a particle source;
FIG. 3 is a schematic diagram of the structure of a plasma imaging lens;
FIG. 4 is a schematic diagram of a plasma imaging lens group configured for a 100MeV high energy pulsed electron beam in embodiment two;
FIG. 5 is a schematic diagram of different off-axis positions and magnetic field strengths for the uniform plasma imaging lens of FIG. 4;
fig. 6 is a schematic diagram of a plasma imaging lens group configured for a 200MeV high-energy pulsed electron beam in the second embodiment;
fig. 7 is a schematic diagram of a two-stage plasma imaging lens according to a fourth embodiment.
In the accompanying drawings: 1-particle source, 101-laser, 102-emission electron gun, 2-beam matching transmission section, 3-sample, 4-plasma imaging lens group, 401-discharge tube, 402-pulse high-voltage module, 403-pulse current, 404-ion body channel, 405-angular pulse strong magnetic field, 5-imaging screen, 6-image collector, 7-linear accelerator.
Detailed Description
In order to make the technical solution of the present invention better understood by those skilled in the art, the technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings, and based on the embodiments in the present application, other similar embodiments obtained by those skilled in the art without making creative efforts should fall within the scope of protection of the present application. In addition, directional words such as "upper", "lower", "left", "right", and the like, as used in the following embodiments are merely directions with reference to the drawings, and thus, the directional words used are intended to illustrate, not to limit, the invention.
Embodiment one:
as shown in fig. 1, a high-energy charged particle imaging device sequentially comprises a particle source 1, a beam matching transmission section 2, a plasma imaging lens group 4 and a detection system, wherein the particle source and the beam matching transmission section are arranged on a common optical axis. The particle source 1 is used for generating a high-energy pulse charged particle beam, the beam matching transmission section 2 is used for transmitting the high-energy pulse charged particle beam to the sample 3, the plasma imaging lens group 4 focuses the high-energy pulse charged particle beam carrying sample information to form a point-to-point image, and the detection system is used for collecting the point-to-point image formed by the sample and converting the point-to-point image into an image so as to visually display real space information of the sample.
Specifically, the particle source 1 generates a pulsed charged particle beam having a pulse time structure, preferably, the pulsed charged particle beam is a pulsed electron beam or a pulsed proton beam, and the particle source 1 is an electron source or a proton source, respectively. The pulsed charged particle beam is energized into a high energy pulsed charged particle beam by an accelerator.
As shown in fig. 2, when the pulsed charged particle beam is a pulsed electron beam, the particle source 1 includes a laser 101 and an electron emission gun 102, and the electron emission gun 102 in a critical state generates a pulsed electron beam by a photoelectric effect under the irradiation of the laser 101, and the pulsed electron beam is led out from an accelerating electric field in the electron emission gun 102, enters into a linear accelerator 7, and is further energized to relativistic energies (MeV to GeV), and finally forms a high-energy pulsed charged particle beam with high energy, large charge amount, low energy dispersion, and short pulses. The structure and working principle of the linear accelerator 7 can refer to the beam transport system and method of the CN200880019581.6 linear accelerator.
The high-energy pulse charged particle beam is transmitted to the sample 3 through the transverse treatment of the matching transmission section 2, and the transverse dimension of the high-energy pulse charged particle beam is matched with that of the sample 3, wherein the transverse dimension of the high-energy pulse charged particle beam is not smaller than that of the sample, and the complete imaging of the sample is realized. Preferably, the matching transmission section 2 adopts a quadrupole magnet to carry out transverse treatment on the high-energy pulse charged particle beam, wherein the structure and the working principle of the matching transmission section 2 can refer to a split focusing type interdigital type longitudinal magnetic mode drift tube linear accelerator of CN 201910078378.6. Preferably, the lateral treatment includes focusing, defocusing, and diffusion.
The plasma imaging lens group 4 includes a single stage or a plurality of stages of plasma imaging lenses, the single stage being one stage of the plasma imaging lenses, that is, the plasma imaging lens group 4 includes at least one stage of the plasma imaging lenses. Each stage of the plasma imaging lens comprises an object plane and an image plane, and when the sample is placed on the object plane in front of the plasma imaging lens, a high-energy pulse charged particle beam passing through the sample is focused by the plasma imaging lens, so that an inverted and amplified point-to-point image of the sample is formed on the image plane behind the plasma imaging lens. When the plasma imaging lens group 4 includes a plurality of stages of plasma imaging lenses, the plurality of stages of plasma imaging lenses are arranged in order, and an object plane of a subsequent stage of plasma imaging lens coincides with an image plane of a preceding stage of plasma imaging lens. Sample 3 is located at the object plane of the foremost plasma imaging lens, which is the least spaced from sample 3. At this time, the forefront stage plasma imaging lens performs primary point-to-point imaging (sample magnification is M1) on the sample 3, and since the image plane of the forefront stage plasma imaging lens coincides with the object plane of the second stage plasma imaging lens, the image of the forefront stage plasma imaging lens is secondarily magnified (sample magnification is M1×m2) as a virtual sample by the second stage plasma imaging lens. And by analogy, the image plane of the front-stage plasma imaging lens is overlapped with the object plane of the rear-stage plasma imaging lens, the front-stage image is amplified again by the rear-stage plasma imaging lens, and finally the multi-stage amplified point-to-point image of the sample is obtained, wherein the overall amplification factor of the sample is equal to the product of the amplification factors of the plasma imaging lenses of all stages. That is, by adjusting the number of arrangement stages of the plasma imaging lens, the total magnification of the sample 3 is adjusted, and the operation is convenient.
As shown in fig. 3, the plasma imaging lens includes a discharge tube 401 and a pulse high voltage module 402, the discharge tube 401 is filled with gas, the pulse high voltage module 402 is used for applying pulse high voltage to the discharge tube 401, under the action of the pulse high voltage, the gas in the discharge tube 401 is broken down to form plasma, so that a pulse current 403 forms an angular pulse strong magnetic field 405, and a plasma channel 404 is formed. When the high energy pulsed charged particle beam passes through the plasma lens, it is subjected to radial focusing forces directed toward the axis in both the x-direction and the y-direction. When the plasma is uniformly ionized, the radial focusing force to which the high-energy pulse charged particle beam is subjected is in a linear relationship with the radial position thereof. Among them, the plasma imaging lens can refer to CN200980113326.2 plasma generator.
The detection system comprises an imaging screen 5 and an image collector 6, wherein the imaging screen 5 is positioned on the image plane of the plasma imaging lens group, namely the imaging screen 5 is positioned on the image plane of the last stage plasma imaging lens, and the distance between the last stage plasma imaging lens and the sample 3 is the largest. The high-energy pulse charged particle beam carrying the real space information of the sample is transmitted to the imaging screen 5 to generate a fluorescent signal, and the fluorescent signal is collected by the image collector 6 and converted into a digital image so as to visually display the real space information of the sample 3.
In summary, the particle source 1, the beam matching transmission section 2, the plasma imaging lens group 4 and the detection system form the high-energy charged particle imaging system, so that the structure is simple and compact, the applicability of the high-energy charged particles is improved, and the application scene of the high-energy charged particles is enriched. Meanwhile, the high gradient advantage of the plasma imaging lens is utilized, gao Jiecheng image errors are reduced, and the spatial resolution capability of the high-energy charged particle imaging device is improved.
Embodiment two:
the same parts as those of the first embodiment are not repeated, and the difference is that:
as shown in fig. 4, a plasma imaging lens with a length of 1cm and an inner diameter of 0.5mm is adopted, a loading pulse current 403 is 1kA, a magnetic field gradient of an angular pulse strong magnetic field 405 reaches 800T/m, a single-stage plasma imaging lens is adopted for a 100MeV high-energy pulse electron beam, an object plane is positioned at a position 4.9cm in front of the plasma imaging lens, and an image plane is positioned at a position 21.8cm behind the plasma imaging lens, so that a point-to-point plasma imaging lens group with an amplification ratio of 4.1 is formed.
Fig. 5 shows the magnetic field strength at different off-axis positions and positions in the uniform plasma imaging lens of fig. 4 with an inner diameter of 0.5mm and a pulse current 403 of 1kA, and the radial focusing force applied to the high-energy pulsed charged particle beam in the axial direction is proportional to the off-axis position. The plasma imaging lens can be regarded as an axisymmetric lens without chromatic aberration, so that the reduction of the spatial resolution caused by chromatic aberration in the conventional quadrupole lens or solenoid lens imaging device can be avoided, and the improvement of the spatial resolution capability of the imaging device is facilitated.
Embodiment III:
the same contents as those of the embodiment are not repeated, and the difference is that:
to match the energy of the high-energy pulsed charged particle beam, the length of the plasma imaging lens can be adjusted, i.e. discharge tubes of different physical lengths are used. For a 200MeV high energy pulsed electron beam, the length of the plasma imaging lens was only increased to 2cm compared to the configuration shown in fig. 4, with the object plane located 4.5cm in front of the plasma imaging lens and the image plane located 22.7cm behind the plasma imaging lens. In the case where the object distance and the image distance are changed little, a point-to-point plasma imaging lens group with a substantially constant magnification ratio is constructed as shown in fig. 6.
In this embodiment, in the case of small changes (the magnitude of the change in the numerical value is not more than 10%) in the object distance, the image distance, and the magnification of the plasma imaging lens group, the length of the plasma imaging lens is increased to achieve the purpose of matching the high energy of the high-energy pulsed charged particle beam. That is, the object distance, the image distance and the magnification of the plasma imaging lens group are kept unchanged or slightly changed (namely kept basically unchanged), and the aim of matching the energy of the high-energy pulse charged particle beam is achieved by adjusting the length of the plasma imaging lens. When the magnitude of the numerical change is not more than 10%, the minute change is considered to be also subordinate to being kept substantially unchanged.
Embodiment four:
the same contents as those of the embodiment are not repeated, and the difference is that:
the inner diameter of the plasma imaging lens can also be adjusted to match the energy of the high-energy pulsed charged particle beam, i.e. discharge tubes of different thickness are used. For a 200MeV high-energy pulsed electron beam, compared with the structure shown in fig. 4, the inner diameter of the plasma imaging lens is reduced to 0.35mm, the magnetic field gradient of the angular pulse strong magnetic field 405 reaches 1600T/m, and the point-to-point plasma imaging lens group with the same amplification ratio is formed under the condition that the object distance, the image distance and the plasma imaging lens structure shown in fig. 4 are the same.
In this embodiment, the gradient of the high-intensity magnetic field of the angular pulse is increased by reducing the inner diameter of the plasma lens under the condition that the object distance, the image distance and the magnification of the plasma imaging lens group are kept unchanged, so as to achieve the purpose of matching the high energy of the high-energy pulse charged particle beam. That is, the object distance, the image distance and the magnification of the plasma imaging lens group are kept unchanged or slightly changed (namely kept basically unchanged), and the purpose of matching the energy of the high-energy pulse charged particle beam is achieved by adjusting the inner diameter of the plasma lens. When the magnitude of the numerical change is not more than 10%, the minute change is considered to be also subordinate to being kept substantially unchanged.
Fifth embodiment:
the same parts as those of the embodiment are not described in detail, except that:
for a 200MeV high-energy pulse electron beam, the loading pulse current 403 of the plasma imaging lens is increased to 2kA, the magnetic field gradient of the angular pulse strong magnetic field 405 reaches 1600T/m, and the point-to-point plasma imaging lens group with the same amplification ratio is formed under the condition that the object distance, the image distance and the plasma imaging lens structure are the same as those shown in fig. 4.
In this embodiment, the object distance, the image distance, the plasma imaging lens structure and the magnification of the plasma imaging lens group are kept unchanged, so as to achieve the purpose of matching the high energy of the high energy pulse charged particle beam by increasing the intensity of the loading pulse current and the magnetic field gradient of the angular pulse strong magnetic field. That is, the object distance, the image distance, the plasma imaging lens structure and the magnification of the plasma imaging lens group are kept unchanged or slightly changed (namely kept basically unchanged), and the aim of matching the energy of the high-energy pulse charged particle beam is achieved by adjusting the intensity of the loading pulse current and the magnetic field gradient of the angular pulse strong magnetic field. When the magnitude of the numerical change is not more than 10%, the minute change is considered to be also subordinate to being kept substantially unchanged.
Example six:
the same parts of the present embodiment as those of the first embodiment and the second embodiment will not be described in detail, except that:
as shown in fig. 1 and 7, for a 100MeV high-energy pulsed electron beam, the two-stage plasma imaging lenses adopt the layout shown in fig. 4, and the sample 3 passes through the first-stage plasma imaging lens (i.e., the plasma imaging lens 1 in fig. 7) to form an inverted point-to-point real image with a magnification of 4.1, and the first-stage imaging is taken as a virtual sample of the second-stage plasma imaging lens (i.e., the plasma imaging lens 2 in fig. 7) and is further magnified by 4.1 times, so that an upright point-to-point real image with a magnification of 16.81 times is finally formed on the imaging screen 5. The fluorescent signals generated by the imaging screen 5 are collected and processed by the image collector 6 through the reflecting mirror, and finally converted into digital images. In order to achieve single pulse imaging, the imaging screen 5 is required to emit light for a shorter time than the particle beam pulse time, while a framing camera or ICCD with a very short shutter time is used.
The foregoing detailed description of the invention has been presented for purposes of illustration and description, but is not intended to limit the scope of the invention, i.e., the invention is not limited to the details shown and described.
Claims (7)
1. A high-energy charged particle imaging apparatus comprising, in order:
a particle source for generating a high energy pulsed charged particle beam;
the beam matching transmission section is used for transmitting the high-energy pulse charged particle beam to the sample;
the plasma imaging lens group focuses the high-energy pulse charged particle beam carrying sample information to form a point-to-point image, the plasma imaging lens group comprises a plurality of stages of plasma imaging lenses which are sequentially arranged, the object plane of the rear stage plasma imaging lens coincides with the image plane of the front stage plasma imaging lens, and the sample is positioned at the object plane of the forefront stage plasma imaging lens;
the detection system is used for collecting point-to-point images formed by the sample and converting the point-to-point images into images so as to intuitively display real space information of the sample;
under the condition that the object distance, the image distance and the magnification of the plasma imaging lens group are basically kept unchanged, the aim of matching the energy of the high-energy pulse charged particle beam is achieved by adjusting the length or the inner diameter of the plasma imaging lens.
2. A high energy charged particle imaging apparatus according to claim 1, wherein said particle source generates a pulsed charged particle beam having a pulse time structure, said pulsed charged particle beam being energized into a high energy pulsed charged particle beam by an accelerator.
3. A high energy charged particle imaging apparatus according to claim 1, wherein said high energy pulsed charged particle beam is transported onto the sample by transverse processing of the matched transport section and has a transverse dimension matched to the sample dimension.
4. A high energy charged particle imaging apparatus according to claim 1, wherein the overall magnification of said sample is equal to the product of the magnifications of the respective stage of the plasma imaging lens.
5. A high energy charged particle imaging apparatus according to any of claims 1-4, wherein said plasma imaging lens comprises a discharge tube filled with a gas and a pulsed high voltage module for applying a pulsed high voltage to the discharge tube, under which pulsed high voltage the gas in the discharge tube is broken down to form a plasma, causing the pulsed current to form an angular pulsed high magnetic field.
6. The apparatus of claim 5, wherein the detection system comprises an imaging screen and an image collector, the imaging screen is located at an image plane of the last stage of the plasma imaging lens, the high-energy pulse charged particle beam carrying real space information of the sample is transmitted to the imaging screen to generate a fluorescent signal, and the image collector collects the fluorescent signal and converts the fluorescent signal into a digital image to visually display the real space information of the sample.
7. The apparatus of claim 6, wherein the energy of the pulsed high-energy charged particle beam is matched by adjusting the intensity of the applied pulse current and the magnetic field gradient of the angularly pulsed high-magnetic field while maintaining the object distance, the image distance, the plasma imaging lens structure, and the magnification of the plasma imaging lens group substantially unchanged.
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