CN1133080A

CN1133080A - Micromachined valve apparatus

Info

Publication number: CN1133080A
Application number: CN 94193475
Authority: CN
Inventors: 辛西亚·R·内尔森; 弗莱德·C·希特勒; 格雷戈里·A·博舍
Original assignee: Rosemount Analytical Inc
Current assignee: Rosemount Inc
Priority date: 1993-09-24
Filing date: 1994-08-18
Publication date: 1996-10-09
Also published as: CA2169826A1; WO1995008716A2; JPH09505130A; WO1995008716A3

Abstract

A valve controlling fluid flow includes a brittle layer (12) of material having a port opening (30, 32) therein and a valve seat (24A-24F) disposed about a perimeter of the port opening (30, 32). The valve seat (24A-24F) is selectively covered to control fluid flow through the port opening. A second layer of material (20) is spaced apart from the brittle layer and has a surface facing the valve seat (24A-24F). A flexible sheet of material (18) sandwiched between the brittle layer of material (12) and the second layer of material (18) includes a diaphragm (22A-22F) actuated by a control force to selectively cover the valve seat (24A-24F) to thereby control fluid flow through the port opening (30, 32). The flexible sheet of material (18) includes a moldable material (64) a portion of which conforms to a contour of the valve seat (24A-24F). The moldable material (64) is preferably joined to a flexible organic material.

Description

The valving of micro machining

The present invention relates to the miniature valve of micro machining.Feature of the present invention is that especially improved valve seat has helium leak test level tightness, and in addition, valve member can accurately produce the small volume gas sample.

At present existing multiple improvement about the miniature valve of micro machining.At U. S. Patent 4,869, in 282, the fine machining method of valve is to adopt micro fabrications such as existing photoetching, etch in the batch process process, makes valve passage and valve port on one deck silicon thin film.If adopt glass-film, pipeline or passage just can form with molded.With the organic barrier film of one deck (Kapton preferably, the kapton (Kapton that produces as E.I.Du Pont Company ^R)) along cavity periphery and silicon thin film welding.As the valve barrier film, the effect of the organic barrier film of this layer is a seal valve seat and prevent that gas from flowing through from valve port selectively.

Valving with the above (comprise U. S. Patent 4,869,282 is described) structural type has a significant disadvantages, promptly still has a spot of leakage when valve is in closed state.In many applications, a spot of leakage contribution is little, and the valve of this structure is in gratifying working state.Yet in some application, the valve of this form can not satisfy seal request, the occasion that links to each other with the mass spectrometer input end at the sample control valve for example, and an end of valve must be kept high vacuum, thereby valve must have less than 10 ^-10The helium leak test level leak rate of atmccHe/sec.

This valving is used for controlling fluid flow, and it comprises that one deck has the brittle material of valve port and the valve seat that forms along this valve port periphery.Valve seat is covered selectively with the fluid flow of control by valve port.One deck flexible material attached on the brittle material layer to form barrier film, barrier film covers valve seat selectively with the fluid flow of control by valve port under the control force effect.Comprise plastic material in the flexible material layer, wherein have at least a part to form by the profile of valve seat is molded.Plastic material preferably is connected with flexible organic material.

Flexible organic material preferably is made up of Kapton foil, also can select for use multiple thermoplasticity and thermosetting polymer as plastic material simultaneously.For example, teflon FEP and teflon PFA that E.I.Du Pont Company produces are more suitable thermoplastic polymers, they are fine in suitable temperature and pressure condition lower mould, in addition, being used for some of molded valve seat aborning " can cast " thermosetting polymer (as high flatness spinning polyimide (high-planarity spin-on polyimides)) and also show good working performance.In a production technology, a kind of clutch material (for example gold) profile mould (is not used adhesive layer) on the valve seat diaphragm, and in molding process with this clutch material adhesive on the surface of above-mentioned polymer, its objective is to stop polymer and valve seat adhesion.

The present invention also provides a kind of micro machining valve member that produces small capacity gas, the existing technology this point that still is unrealized.In first preferred embodiment, comprise the brittle material layer in the valve member, have first and second valve ports on this brittle layer, and around each valve port, form corresponding valve seat.Be spaced from each other between second layer material and the brittle layer, and one deck flexible material is clipped between it and the brittle layer.Flexible material layer comprises first and second diaphragm cells, and they cover first and second valve seats selectively.Flexible layer also comprises a passage (can preferentially open on the flexible layer body), and this passage and first and second valve ports keep pipeline connection.

In a preferred embodiment, passage also keeps pipeline connection with the 3rd valve port, and this valve port is positioned at the surface of brittle layer, and the 3rd valve seat forms around it.In addition, by covering the 3rd valve seat selectively, the 3rd diaphragm cell on the flexible layer controlled the fluid flow by the 3rd valve port.This valve member can produce the gas sample of small volume, its operating method is to open and under the condition that the 3rd valve port is closed at first and second valve seats, the tested gas of a part is branched to passage in the flexible layer, then after closing first and second valve ports, open the 3rd valve port again, like this, the gas sample that is trapped in the passage just has a certain predetermined volume, and gas sample can offer the surveying instrument or the device of preliminary election.

Fig. 1 is the exploded view of valve member in the gas chromatographic analysis instrument.

Fig. 2 A to Fig. 2 C has described the method for manufacturing improved micro machining valving according to the present invention with diagrammatic series of views;

Fig. 3 A to Fig. 3 F has described the second method of manufacturing improved micro machining valving according to the present invention with diagrammatic series of views;

Fig. 4 A to Fig. 4 D has described the third method of manufacturing improved micro machining valving according to the present invention with diagrammatic series of views;

Fig. 5 A to Fig. 5 E has described the 4th kind of method manufacturing improved micro machining valving according to the present invention with diagrammatic series of views;

Fig. 6 is according to the exploded view of a kind of valve member of the present invention's proposition, can produce predetermined tested gas sample volume by this valve member.This figure has also described the 5th kind of method manufacturing improved micro machining valving according to the present invention;

Fig. 7 is the valve member sectional drawing of being done along 7-7 line among Fig. 6, has also comprised the stop diaphragm among this figure; And

Fig. 8 is the principle schematic of valve member shown in Figure 6.

Embodiment

Fig. 1 has described the valve member 10 of the micro machining that is used for gas chromatographic analysis instrument (summary).Valve member 10 has the stratiform structure that is bonded together by which floor different thin layer usually, comprising the valve seat plate with upper valve base surface 14 or valve seat layer 12, flexible layer 18 and stopper layer 20.Stopper layer 20 can be carried out control to the displacement of

variant diaphragm cell

22A, 22B, 22C, 22D, 22E and 22F in the flexible layer 18.

Each diaphragm cell 22A-22D all with valve seat upper surface 14 on respective valve seat 24A, the 24B, 24C, 24D, 24E and the 24F that form realize aiming at.Each diaphragm cell 22A-22F carries out sealing to two

valve ports

30 and 32 that illustrate on each valve seat 24A-24F respectively.Valve

port

30 and 32 and the pipeline layer 34 of below realize pipeline connections.Pipeline layer 34 makes each valve unit be interconnected in the mode shown in the arrow in scheming 38.

Working gas is controlled by

valve port

40A, 40B, 40C, 40D, 40E and 40F by the flow of valve member 10, and its controlling method is to control the displacement of each diaphragm cell 22A-22F by apply suitable pressure difference on

diaphragm cell.Pipeline

50,51,52,53,54 and 55 at stopper layer 20 internal shapings has the function of working fluid to control valve port 40A-40F guiding together with the pipeline that is shaped in top layer 56.

When manufacturing valve member 10, each thin layer is made by fine machining method, for example can adopt the various photetchs that comprise the etch method, also can adopt static discharge processing method (EDM), in addition, if select for use glass, and need to be provided with necessary pipeline in the glassy layer, adopt mechanography or laser processing technology that pipeline is shaped as sheet material.

Selected materials can be the brittle material that any efficient semiconductor material or other and working gas do not react.Silicon is very suitable material concerning valve seat layer 12, stopper layer 20, pipeline layer 34 and top layer 56.Some other material also can be used to manufacture one or more retes wherein, for example glass or sapphire.Each rete is not to select a kind of material only for use.

Although the valve seat of manufacturing according to prior art is the control gaseous flow effectively, it does not have helium leak test level tightness (10 ^-10The sealing characteristics of atmcc He/sec level).In the past, diaphragm material is selected for use exposed and is had the flexible organic material of metal surface, kapton as E.I.Du Pont Company's production, and will be tightly connected between the redundance of flexible layer and the silicon layer with the glass sintering thing that forms at a lower temperature, but this structure can not form helium leak test level tightness.The present invention realizes that the bubble-tight conventional method of helium leak test level is to use the plastic material that can keep its plastic deformation shape when valve event.This plastic material (as thermosetting property or thermoplastic polymer) is attached to or is bonded on the flexible organic material.Be attached to clutch stratum boundary on the plastic material make flexible organic/plastic membrane portions of pulling on the condensation material, and when valve closing and valve seat keep in touch.The clutch layer keeps apart plastic material and valve seat to prevent plastic material and valve seat adhesion.

Contain the material that technique for sticking provided by the present invention and rete 18 are adopted in the valve member 10, this point will be passed through with reference to serial Fig. 2 A-2C, 3A-3F, 4A-4D and 5A-5E hereinafter, or exploded view 6 is for being described.For the needs of explaining, valve member 10 is used as an example here and is introduced, but it is not unique embodiment.U. S. Patent 4,869,282 have described the working method and the structure thereof of valve member 10, and this patent is introduced as a reference at this.

Can leave valve port 30 and 32 (referring to Fig. 2 A) by the etch method on the valve seat layer 12.For improving sealing characteristics, also can further on

valve port

30 and 32, make crisperding 60; But crisperding 60 is not to have.Clutch layer 62 can be formed by materials such as gold, it is by technological method deposition formations on valve seat 24 such as sputter, evaporation or electroless platings, its effect be stop to the adhesion of valve seat layer 12 and with plastic material 64 adhesions, the thermoplastic polytetrafluoroethylene FEP film that plastic material 64 can select for use E.I.Du Pont Company to produce.The plastic material 64 that is shaped combines the kapton that this flexible organic material can select for use E.I.Du Pont Company to produce with flexible organic material 66 (full amination) usually.So the flexible layer 18 of shaping is just on the surface 14 attached to valve seat layer 12.Except full amination film, E.I.Du Pont Company also produces teflon FEP and Kapton foil respectively, and these materials all can use.

The organic material that is shaped/plastic material composite bed 18 and stopper layer 20 join (shown in Fig. 2 B).If desired, can add static connection layer 61 between organic material 66 and stopper layer 20, the material of static connection layer 61 can be selected teflon FEP film etc. for use.Comprise control valve port 40 in the stopper layer 20, the diaphragm cell displacement when this valve port is used for the control valve action.The final stratiform structure that forms is cut into small pieces, with these matrixs with suitable connection material adhesion in the valve casing (not shown), promptly form each valve unit.

For realizing helium leak test level gas, plastic material 64 is molded on the valve seat 24 shown in figure F2B, and the manufacturing technology that is adopted is " thermoforming " technology that hereinafter described valve is heated and exerts pressure.If adopt teflon FEP film, then this manufacturing technology requires valve unit is heated to 215 °-350 ° Celsius, and requires to apply 20-100 pound/inch by 40 pairs of diaphragm cells 22 of control valve port ²Pressure.The profile that the thermoforming manufacturing technology makes diaphragm cell 22 press valve seat 24 is shaped.The clutch layer 62 of profiling has stoped the adhesion of 64 pairs of valve seats 24 of plastic material and crisperding 60 when valve event.

Observation result demonstrates: at about 80 ° degrees centigrade up and down repeatedly after the circular heating, adopt teflon FEP film to keep helium leak test level tightness as the valve template of plastic layer.This operating temperature also can improve, and its measure is to manufacture plastic layer 64 with other suitable thermoplasticity plastic material, the teflon PFA film that for example can adopt E.I.Du Pont Company to produce.If adopt teflon PFA film, in the thermoforming manufacturing technology, need to increase required pressure and temperature so that barrier film can be on valve seat correct pressing mold.

Fig. 3 A to 3F has described the another kind of mould-forming method of valve member of the present invention.At first as shown in Figure 3A, on valve seat layer 12, leave required

valve port

30 and 32 with the etch method, clutch layer 62 profiling on the surface of valve seat layer 12 and crisperding 60 is come out, and wherein, the 12 lip-deep profiling of valve seat layer define the position of valve seat 24 in diaphragm area.Thereafter, shown in Fig. 3 C, flexible organic material mentioned above/plastic material composite bed 18 is coated over the upper surface of clutch layer 62, and fits at the peripheral edge portion of valve seat 24 and the upper surface of valve seat layer 12.In Fig. 3 D, stopper layer 20 is bonded on flexible organic material/plastic material composite bed, and if desired, and available static adhesive layer 61 is bonding.According to the requirement of thermoforming manufacturing technology, make plastic material 64 in valve seat 24 and crisperding 60 places shapings (shown in Fig. 3 E) by applying above described temperature and gas pressure.After the desired temperature and pressure of thermoforming manufacturing technology is removed, apply suitable pressure so that barrier film 22 rises from valve seat 24 at

valve port

30 and 32, shown in Fig. 3 F.Because it is tighter that plastic material 64 and clutch layer 62 are fitted, and loose because of not existing adhering layer to fit between clutch layer 62 and the valve seat layer 12, so clutch layer 12 is transferred on the plastic layer 64 from valve seat layer 12, and may stay residual limit 65 at crisperding 60 places.

Compare with the technology shown in Fig. 2 A-2C, the technology shown in above-mentioned Fig. 3 A-3F can be made more level and smooth clutch layer, and can duplicate the profile of valve seat 24 more accurately.

Fig. 4 A to 4D has described another method for production of valve member of the present invention.Each

valve port

30 and 32 places etch the thin connecting band 70 (shown in Fig. 4 A) of one 25 micron thickness on valve seat layer 12.If desired, this thin connecting band 70 can be had a special style, for example can adopt the method that all etches recessed portion on the two sides of silicon layer for forming crisperding 60.Perhaps, can will can not form crisperding so only in the etching of the bottom side of valve seat layer 12.Clutch layer 62 profiling that are used for defining valve seat 24 scopes cover on the valve seat layer 12 that comprises connecting band 70.Above-mentioned flexible organic material/plastic material composite diaphragm covers the upper surface of clutch layer 62, and is shaped under vacuum state and is bonded in the upper surface of valve seat layer 12 and clutch layer 62, and at this moment, plastic material layer 64 also is molded in the outer rim position of valve seat 24.In Fig. 4 C, stopper layer 20 is bonded on flexible organic material/plastic material composite diaphragm 18 by adopting suitable adhesive material 61 (can be poly tetrafluoroethylene or spin polyimide adhesive).With plasma close etching method connecting band 70 is removed subsequently.At valve port 30 with 32 places apply suitable pressure difference so that diaphragm cell 22 breaks away from valve seat layer 12 shown in Fig. 4 D.Diaphragm cell 22 by craftwork manufacture shown in Fig. 4 A to 4D has a plug shape part 73 that meshes with valve seat 24, this plug shape part is covered or encapsulates by the clutch layer fully, thereby make the surface of diaphragm cell have more durability, in addition since plastic material 64 by local restriction, therefore the plastic deformation of barrier film under higher temperature also reduces.Clutch layer 62 has formed metal retarded layer or the blocking layer to working air current.

Fig. 5 A-5E has described another method for production of valve member of the present invention.Each

valve port

30 and 32 places etch the thin connecting band 70 (shown in Fig. 4 A) of one 25 micron thickness on valve seat layer 12.If desired, this thin connecting band 70 can be a special style, for example can adopt the method that all etches recessed portion on the two sides of silicon layer for forming crisperding 60.Clutch layer 62 profiling that are used for defining valve seat 24 scopes cover on the valve seat layer 12 that comprises connecting band 70.In this method, it is the polymer 72 of basic composition that plastic material 64 contains with the thermosetting property solvent, and as high flatness spinning polyimide, this base polymer has the spin properties of fluid, can casting (curing) and shaping on the valve seat 24 of profiling.Poly-epoxy imines and other similar polymer spinning, atomizing or casting also may be utilized.Another kind of available thermosetting polymer contains the benzocyclobutane that Dow chemical company produces.Further, can add bonding catalyst (as aluminum oxide) between clutch layer 62 and polyimide layer 72, this is because polyimide is equally very weak usually to the Adhesion force of clutch layer 62 (as gold) with benzocyclobutane.

Through 300-350 ℃ degree centigrade curing baking (its objective is and strengthen thermosetting or crosslinked polymer degree), thermoplastic polymer (long Pu Dun-teflon PFA) is in bonding and shaping on polyimide under the vacuum state, shown in Fig. 5 C.If adopt spinning, binder atomizing or casting, as polyimide or poly-epoxy imines, so just can not use the thermoplastic adhesive, will make diaphragm cell 22 harder like this, the material plastic deformation is littler under high temperature condition, durability is also better simultaneously.

Among Fig. 5 D, the static adhesive layer 61 of stopper layer 20 usefulness is bonded on flexible organic material/plastic material composite diaphragm, the adhesive layer 61 that is adopted can be a thermoplastic polytetrafluoroethylene FEP film, also can be the poly-epoxy imines binder of teflon PFA film or thermosetting property.Make flexible partition unit 22 be separated from valve seat layer 12 by apply suitable pressure at

valve port

30 and 32, shown in Fig. 5 E.Method shown in Fig. 5 A-5E also can form the plug shape part 73 that is covered fully by clutch layer 62.

Fig. 6 has described the another kind of method of manufacturing valve member of the present invention, and this method is particularly suitable for manufacturing the valve member 100 that can produce millimicro upgrading gas or fluid sample volume.Contain silicon layer 101 in this notes sample valve 100, made three

valve seat

102A, 102B, 102C and corresponding valve port 113,119 and 125 thereof with fine machining method on the silicon layer.The path 10 made from etching on another silicon layer 104 6 is communicated with the valve port in the silicon layer 101 113 and 119.The part 108 that one section reduced cross-sectional area is arranged in the path 10 6, when superheated steam when the pipeline 102, neck down portions 108 can make the enough big pressure difference of formation between in the pipeline 102 110 sections and 113 sections.Branch road 111 makes between the valve port 113 on pipeline 110 and the valve seat 102A and realizes that gas circuit is communicated with, another kind of like branch road 115 make that the realization gas circuit is communicated with between the valve port 119 on pipeline 112 and the valve seat 102C.

Clutch layer 114 (as gold) is deposited on each valve seat 102A-102C and goes up to define the scope of membrane portions on the respective valve seat.Each valve seat 102A-102C leaves a connecting band (being similar to connecting band 70 shown in Fig. 5 C) when preliminary working.

To contain the polyimide of solvent basis composition or poly-epoxy imines binder (as French Cemota with spinning, spraying or casting method, the IP542 binder that 69390 Vernaison produce) covers valve seat 102A-102C surface and corresponding connecting band surface on the silicon layer 101, toast one suitable period then and desolvate to remove.Because originally polyimide is liquid, so can be molded into the profile of valve seat.The polyimide film 116 that toasted is stayed silicon layer 101 surfaces, with method for plasma etching and nichrome mask the redundance of its continuous part 103 is removed, thereby make it to be configured as a small channel 118, this passage runs through each valve seat 102A-102C, when corresponding valve barrier film is opened, this passage will select corresponding valve port to realize that gas circuit is communicated with in valve port 125 threes of valve port 113,119 and valve seat 102B.Passage 118 has determined the sample volume that introduction valve produced.In described embodiment, manufacturing passage 118 with mask means or etching is in order to produce small volume gas sample (as 1 millilambda).

After this, flexible organic layer 121 (as kapton) is deployed on a certain particular jig (not shown), then, be that the polyimide adhesive 123 of basic composition is spun on flexible organic layer 121 and is toasted with solvent, so just formed the roughly composite membrane shown among the figure 120.Then, composite membrane 120 is bonded in (simultaneously to flexible organic film 121 heating and pressurization) on the polyimide layer 116 of etching and processing, to form rete 117.Because the fitting surface of

rete

116 and 120 is all polyimide material, thereby has formed homogeneous rete 117, passage 118 does not wherein make its etching part be filled after sealing-in.Polymer material 123 has following performance: its certain part can be removed after molded by profiling, and again with another kind of suitable polymers come bonding it the time can not fill the part that is removed.

After this, with method for plasma etching the connecting band among each valve seat 102A-102C is removed and specific stopper layer 140 (shown in Figure 7, as to be similar to Fig. 2 C, 3F, the stopper layer 20 among 4D and the 5E) is bonded on kapton-binder composite bed.The effect of stopper layer 140 is restriction

flexible partition unit

117A, 117B and 117C displacements with respect to valve seat 102A-102C.Also have control valve port (as valve port 142) in the stopper layer 140, its effect is to produce control force to form the displacement of diaphragm cell 117B.

Fig. 8 is the work schematic representation of valve member 100.Source of the gas 130 communicates at port one 32 places with path 10 6.Gas passes 134 places, another port that path 10 6 flows to path 10 6.When needing to gather the gas sample, diaphragm cell 117A and 117C on valve seat 102A and the 102C are shifted, thereby a part of gas is flow through along etched channels in the rete 117 118 and valve port 113 and 119.Because there is pressure difference in the two ends of the necking section 108 of main passage 106, so gas sample is able to inlet passage 118.Then, diaphragm cell 117A on valve seat 102A and the 102C and 117C begin action to close

corresponding valve port

113 and 119, and gas sample is trapped in the passage 118.Thereafter, the diaphragm cell 117B on the valve seat 102B is shifted, thereby the valve port 125 that gas sample is passed on the valve seat 102B leaves passage 118.

In described embodiment, the control force that

valve seat

102A and 102C go up diaphragm cell acts on the surface of flexible organic material 121, and this control force is less.Formed pressure difference between the elevated pressures in pressure that this is less and the path 10 6, thereby made barrier film 117 break away from its valve seat.Valve member 100 is particularly useful for ion mass-spectrometer, because this quasi-instrument requires tested gas sample to have small volume (as less than 100 millilambdas).Valve member 100 has been realized helium leak test level tightness under big pressure difference condition, so just eliminated the complexity that multistage step-down measure is had.

When being used for ion mass-spectrometer 143,123 pairs of ion mass-spectrometer assemblies 143 of valve port are opened.Because the working pressure very low (10 of ion mass-spectrometer ^-6Atm), therefore be difficult to displacement with pressure official post barrier film 117B.In the case, the displacement of barrier film should realize that such as adopting actuator 144, the working method of this actuator can be that flexible partition 117 is applied pulling force, also can be to carry out hydraulic driving with piston with other method.

Should be able to recognize although the description of this invention, is proficient in the colleague in this field based on preferred embodiment: the variation on form and the details does not deviate from thought of the present invention and scope.

Claims

1. a basis that forms through micro machining comprises the fluid treating device of the response of control force:

Base layer with a surface; With

Removable rete with recessed portion, its recessed portion is used for process fluid and to the base layer opening, removable rete has the periphery that defines the recessed portion scope, displaceable layers is attached on the base layer, thereby periphery has at least a part of and the base layer surface realizes that pine contacts, thereby become the function of control force.

2. according to the micro machining fluid treating device of claim 1, it is characterized in that base layer comprises:

First valve port and at first valve seat of first valve port arranged around; With

Second valve port and at second valve seat of second valve port arranged around; And its feature is that also displaceable layers comprises:

Be used to regulate first diaphragm cell that passes the first valve port fluid flow; With

Be used to regulate second diaphragm cell that passes the second valve port fluid flow; And its feature is that also recessed portion includes a passage, and this passage makes first and second valve ports realize pipeline connection.

3. according to the micro machining fluid treating device of claim 2, it is characterized in that base layer also can include the 3rd valve port and at the 3rd valve seat of the 3rd valve port arranged around, its feature is that also displaceable layers includes in order to regulate the 3rd diaphragm cell of the 3rd valve port fluid flow.

4. according to the micro machining fluid treating device of claim 2, further comprise the channel design that makes first and second valve ports realize pipeline connection, one section of this channel design has less sectional area, and its effect is that build-up pressure is poor between first and second valve ports.

5. according to the micro machining fluid treating device of claim 4, comprise that further channel design comprises the second channel of trilaminate material internal shaping attached to the trilaminate material that is positioned at a side opposite with displaceable layers on the base layer.

6. according to the micro machining fluid treating device of claim 2, it is characterized in that base layer made by brittle material.

7. according to the micro machining fluid treating device of claim 1, it is characterized in that displaceable layers includes the flexible organic material bonding with plastic material, wherein plastic material is attached to the base layer surface and has recessed portion.

8. according to the micro machining fluid treating device of claim 7, it is characterized in that plastic material comprises polymer.

9. according to the micro machining fluid treating device of claim 1, it is characterized in that base layer contains the valve port that is communicated with recessed portion realization fluid, and valve seat is in the valve port arranged around, its feature is that also displaceable layers contains diaphragm cell, with control force diaphragm cell is shifted to regulate the fluid flow from the valve port to the recessed portion with respect to valve seat.

10. according to the micro machining fluid treating device of claim 9, it is characterized in that displaceable layers comprises the clutch material, this material adhesive is on the displaceable layers surface, and towards valve seat, clutch material and valve seat have releasable meshing relation.

11., it is characterized in that displaceable layers comprises the plug shape part that meshes with valve seat according to the micro machining fluid treating device of claim 9.

12. according to the valve to the response regulation fluid flow of control force, it comprises:

Have valve port and at the brittle material layer of valve port arranged around valve seat; With

Attached to the organic material layer on the brittle material layer, this organic material layer comprises diaphragm cell, and diaphragm cell covers valve seat selectively with the fluid flow of control by valve port under the control force effect, and flexible material layer also comprises the plastic material adjacent with valve seat.

13., it is characterized in that flexible material layer comprises the flexible organic material that is connected with plastic material according to the valve of claim 12.

14. according to the valve of claim 12, it is characterized in that flexible material layer comprises the clutch material bonding with plastic material, this clutch material and valve seat have releasable meshing relation.

15., it is characterized in that flexible material layer comprises and the plug shape part of valve seat engagement that the adhesion of clutch layer also is covered with plug shape part according to the valve of claim 14.