CN113101846B - Active-passive combined piezoelectric gas micro mixer - Google Patents
Active-passive combined piezoelectric gas micro mixer Download PDFInfo
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- CN113101846B CN113101846B CN202110507417.7A CN202110507417A CN113101846B CN 113101846 B CN113101846 B CN 113101846B CN 202110507417 A CN202110507417 A CN 202110507417A CN 113101846 B CN113101846 B CN 113101846B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
- B01F33/3031—Micromixers using electro-hydrodynamic [EHD] or electro-kinetic [EKI] phenomena to mix or move the fluids
Abstract
The invention belongs to the technical field of microfluid mixing, and particularly relates to a driving-passive combined piezoelectric gas micromixer. The upper plate, the upper middle plate, the lower middle plate and the lower plate are sequentially connected from top to bottom; an upper baffle is arranged between the upper plate and the upper middle plate; an inlet cavity is arranged between the upper plate and the upper baffle plate; the lower end surface of the upper baffle is concentrically provided with a cylindrical wall; a piezoelectric vibrator is arranged between the upper middle plate and the lower middle plate; a mixing inner cavity and a mixing outer cavity are arranged among the piezoelectric vibrator, the cylindrical wall and the upper baffle; a plurality of small balls are placed in the mixing inner cavity; a lower baffle plate is arranged between the lower middle plate and the lower plate; a middle cavity is arranged between the lower middle plate and the lower baffle plate; an outlet cavity is formed between the lower plate and the lower baffle plate; the end surface of the upper plate is respectively provided with a first air inlet and a second air inlet; the upper baffle, the cylindrical wall, the metal substrate and the lower baffle are all uniformly provided with 6 through holes; the center of the lower plate is provided with an air outlet. Features and advantages: the mixing efficiency and mixing intensity are high, the structure is simple, and the integration is easy.
Description
Technical Field
The invention belongs to the technical field of microfluid mixing, and particularly relates to a driving-passive combined piezoelectric gas micromixer.
Background
In the field of microfluidics, micromixers are widely used in the fields of chemistry, biology and new energy. Currently, micromixers are classified into passive micromixers and active micromixers according to the presence or absence of a driving element. The passive micro mixer usually adopts a complex flow channel structure, and increases the fluid contact area as much as possible to improve the mixing efficiency, and has the disadvantages of complex structure and poor mixing effect and controllability. The active micromixer needs an external driving element to drive for mixing, and mainly comprises the following components: the device has the advantages of good mixing effect and controllable mixing process, but also has the problems of complex processing technology, high processing cost, difficulty in integration and the like. As an active micro mixer, a piezoelectric micro mixer has the characteristics of simple structure, controllable mixing process and the like, and is widely applied to mixing of microfluids, for example, chinese patent 201310756812.4 proposes a piezoelectric driven microfluid mixer, which structurally realizes the combination of the main mixing function and the pumping function of fluid, and the pumping process of microfluid can realize the mixing of liquid at the same time. However, the conventional piezoelectric micro-mixer mainly adopts a piezoelectric vibrator to directly disturb liquid, and the problem of poor mixing strength still exists due to the small amplitude of the piezoelectric vibrator.
Disclosure of Invention
Aiming at the defects of the existing piezoelectric micro-mixer, the invention provides a driving-driven combined piezoelectric gas micro-mixer, which adopts the following technical scheme: comprises an upper plate, an upper middle plate, a lower plate, a piezoelectric vibrator, an upper baffle, a lower baffle and a small ball; the upper plate, the upper middle plate, the lower middle plate and the lower plate are sequentially connected from top to bottom; an upper baffle is arranged between the upper plate and the upper middle plate; an inlet cavity is arranged between the upper plate and the upper baffle plate; the lower end surface of the upper baffle is concentrically provided with a cylindrical wall; a piezoelectric vibrator is arranged between the upper middle plate and the lower middle plate; a certain gap is formed between the cylindrical wall and the piezoelectric vibrator, so that the piezoelectric vibrator can be prevented from colliding with the cylindrical wall in the working process; a mixing inner cavity and a mixing outer cavity are arranged between the piezoelectric vibrator and the upper baffle; the mixing inner cavity is positioned inside the cylindrical wall; the mixing outer cavity is positioned outside the cylindrical wall; a plurality of small balls are placed inside the cylindrical wall; a lower baffle plate is arranged between the lower middle plate and the lower plate; a middle cavity is arranged between the lower middle plate and the lower baffle plate; an outlet cavity is arranged between the lower plate and the lower baffle plate; the upper plate is provided with a first air inlet hole and a second air inlet hole; the first air inlet hole and the second air inlet hole are communicated with the inlet cavity; a plurality of first through holes are uniformly distributed in a circular shape on the upper baffle; the first through hole is communicated with the inlet cavity and the mixing inner cavity; a plurality of second through holes are uniformly distributed on the wall surface of the cylindrical wall; the second through hole is communicated with the mixing inner cavity and the mixing outer cavity; a plurality of third through holes are uniformly distributed in the piezoelectric vibrators; the third through hole is communicated with the mixed outer cavity and the middle cavity; a plurality of fourth through holes are uniformly distributed in a circular shape on the lower baffle; the fourth through hole is communicated with the middle cavity and the outlet cavity; and an air outlet hole is formed in the center of the lower plate.
Furthermore, the piezoelectric vibrator is formed by concentrically bonding a metal substrate and a piezoelectric ceramic piece.
Furthermore, the density of the small balls is greater than that of the mixed gas, and when the piezoelectric vibrator does not work, the small balls are gathered on the upper surface of the metal substrate due to the self gravity.
Density of said pellets
Slightly greater than the density of the mixed gas
(ii) a The small balls are gathered on the upper surface of the piezoelectric vibrator when not working; the piezoelectric vibrator deforms under the action of driving voltage and drives the small balls to move in the mixing inner cavity and collide with each other, so that the disturbance effect on mixed gas is enhanced, and efficient active mixing is realized.
Further, in the above-mentioned case,
。
furthermore, in order to avoid the damage of the movement of the small balls to the piezoelectric ceramic piece, the side of the metal substrate, which is not bonded with the piezoelectric ceramic piece, should face the mixing cavity when the piezoelectric vibrator is installed.
Further, in order to prevent the small balls from running out of the mixing cavity, the maximum gap s between the upper surface of the metal substrate and the lower surface of the cylindrical wall is smaller than the diameter d of the small balls when the piezoelectric vibrator vibrates downwards to reach the maximum deformation; the aperture D of the first through hole and the second through hole is smaller than the diameter D of the small ball, so that the small ball can be prevented from running out of the mixing cavity.
Furthermore, the two gases introduced into the first air inlet hole and the second air inlet hole are continuously and quantitatively input by an external power source.
Further, the flow direction of the gas in the mixer is as follows: two gases firstly enter an inlet cavity through a first air inlet hole and a second air inlet hole; the passive mixing of the first gas is realized in the inlet cavity; the two gases in the oral cavity enter the mixing inner cavity through the first through hole; the gas effectively mixed by the mixing inner cavity enters the mixing outer cavity through the second through hole; the mixed gas enters the middle cavity through the third through hole in the mixed outer cavity; the gas in the middle cavity enters the outlet cavity through the fourth through hole; the gas in the outlet cavity is discharged out of the cavity through the gas outlet.
Further, the distance between the axle centers of the first air inlet hole and the second air inlet hole is larger than the diameter of a circle formed by the circle centers of the plurality of first through holes; the diameter of a circle formed by the centers of the first through holes is smaller than that of a circle formed by the centers of the third through holes; the diameter of a circle formed by the centers of the third through holes is larger than that of a circle formed by the centers of the fourth through holes; the diameters of circles where the centers of the uniformly distributed holes between the adjacent plates are different can ensure that the two gases are fully mixed when flowing through the plates.
Furthermore, the first air inlet is connected with one gas source through a first air inlet pipe, and the second air inlet is connected with the other gas source through a second air inlet pipe; a heating pipe is wound on the first air inlet pipe, a refrigerating pipeline is wound on the second air inlet pipe, and the heating pipe and the refrigerating pipeline are respectively connected with a heating device and a refrigerating device; the first air inlet pipe and the heating pipe are sealed in one sealing cavity through the heat-insulating layer, and the second air inlet pipe and the refrigeration pipeline are sealed in the other sealing cavity through the heat-insulating layer.
Furthermore, a mixing cover is arranged above the first through hole, the mixing cover comprises an inner concave cylindrical upper cover and a hollow cylindrical lower wall, the bottom of the upper cover and the side wall are arranged at a right angle, the lower part of the bottom of the inner concave side of the mixing cover is fixedly connected with the lower wall, and a plurality of vent holes are uniformly distributed on the circumferential surface of the joint of the upper cover and the lower wall; the lower wall closes the first through hole and is fixedly connected with the upper baffle, an annular air inlet groove is arranged between the side wall of the upper cover and the upper baffle, the vertical height of the preferred annular air inlet groove is smaller than 1/5 of the lower wall, and the vertical height of the vent hole is smaller than 1/5 of the lower wall.
Further, the temperature of the medium in the first air inlet pipe is T1, the temperature of the medium in the second air inlet pipe is T2, T1-T2 is more than 20 ℃, and preferably 30-50 ℃.
The ideal working process of the embodiment can be divided into a first working state and a second working state.
The first working state: the piezoelectric vibrator applies voltage opposite to the polarization direction of the piezoelectric ceramic piece, and the piezoelectric vibrator vibrates downwards;
the second working state: the piezoelectric vibrator applies a voltage in the same polarization direction as the piezoelectric ceramic sheet 52, and vibrates upward.
Under the drive of an alternating voltage signal, the piezoelectric vibrator continuously vibrates up and down, and the upper baffle and the lower baffle are driven to vibrate up and down under the action of pressure difference; the self-vibration of the piezoelectric vibrator enables the two gases to obtain a primary mixing effect; the vibration of the piezoelectric vibrator drives the small balls to move, so that the gas disturbance effect in the mixing inner cavity is intensified; meanwhile, due to the hysteresis of the small balls, the small balls can collide with each other, and the collision enhances the active mixing effect again.
The invention has the characteristics and advantages that: 1. the mixing intensity and the mixing efficiency are high: the mode of combining piezoelectric vibrator vibration with medium balls is adopted for active fluid mixing, so that the disturbance intensity of mixed fluid in a mixing cavity is enhanced, meanwhile, a cross through hole structure is adopted for passive mixing, and the mixing efficiency of a micro mixer is greatly improved by combining active mixing and passive mixing; 2. simple structure, easily integration: through piezoelectric driving, the micro mixer only needs to add a medium ball into the mixing cavity, and the fluid mixing effect can be greatly improved, so the micro mixer is simple in structure and easy to integrate; 3. this application carries out preliminary collision through the gaseous medium that sets up different temperatures and mixes, utilizes the difference in temperature to make gaseous group realize automatic convection disturbance, and then realizes gaseous spontaneous mixing to owing to set up mixed lid, make gaseous bottom of pressing close to the overhead gage get into in the upper cover, reserved time and space for the abundant convection current of two kinds of gases mixes, compare with current mechanical power hybrid, not only simplified the structure and practiced thrift the cost, mix the effect better moreover.
Description of the drawings:
FIG. 1 is a cross-sectional view of a preferred embodiment of the present invention;
FIG. 2 is a cross-sectional view of the structure in a first operating state in accordance with a preferred embodiment of the present invention;
FIG. 3 is a cross-sectional view of the structure in a second operational state in accordance with a preferred embodiment of the present invention;
FIG. 4 is a partial view of a hybrid cover in accordance with a preferred embodiment of the present invention;
wherein: 1-upper plate; 11-a first air intake; 111-a first inlet pipe; 112-a heating tube; 100-an insulating layer; 12-a second air intake; 121-a second intake pipe; 122-a refrigeration circuit; 13-the inlet chamber; 2-middle plate up; 3-lower middle plate; 31-an intermediate chamber; 4-lower plate; 41-air outlet holes; 42-an outlet chamber; 5-a piezoelectric vibrator; 51-a metal substrate; 52-piezoelectric ceramic plate; 53-third via; 6-an upper baffle plate; 61-a first via; 62-cylindrical wall; 63-a second via; 64-a mixing lumen; 65-a mixed outer chamber; 7-lower baffle plate; 71-fourth via; 8-a pellet; 9-a mixing lid; 91-upper cover; 92-lower wall; 93-a vent hole; 94-annular inlet duct.
The specific implementation mode is as follows:
the technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate the orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
Referring to fig. 1, fig. 2, fig. 3 and fig. 4, the present invention provides a piezoelectric gas micromixer of active-passive combination type, comprising: the piezoelectric vibrating screen comprises an upper plate 1, an upper middle plate 2, a lower middle plate 3, a lower plate 4, a piezoelectric vibrator 5, an upper baffle 6, a lower baffle 7 and a small ball 8; the upper plate 1, the upper middle plate 2, the lower middle plate 3 and the lower plate 4 are sequentially connected from top to bottom; an upper baffle 6 is arranged between the upper plate 1 and the upper middle plate 2; an inlet cavity 13 is arranged between the upper plate 1 and the upper baffle 6; the lower end surface of the upper baffle 6 is concentrically provided with a cylindrical wall 62; a piezoelectric vibrator 5 is arranged between the upper middle plate 2 and the lower middle plate 3; a certain gap is formed between the cylindrical wall 62 and the piezoelectric vibrator 5, so that the piezoelectric vibrator 5 can be prevented from colliding with the cylindrical wall 62 in the working process; a mixing inner cavity 64 and a mixing outer cavity 65 are arranged between the piezoelectric vibrator 5 and the upper baffle 6; the mixing chamber 64 is located inside the cylindrical wall 62; the mixing outer chamber 65 is located outside the cylindrical wall 62; a plurality of small balls 8 are placed inside the cylindrical wall 62; a lower baffle 7 is arranged between the lower middle plate 3 and the lower plate 4; a middle cavity 31 is arranged between the lower middle plate 3 and the lower baffle plate 7; an outlet cavity 42 is arranged between the lower plate 4 and the lower baffle plate 7; the upper plate 1 is provided with a first air inlet hole 11 and a second air inlet hole 12; the first air inlet hole 11 and the second air inlet hole 12 are communicated with an inlet cavity 13; a plurality of first through holes 61 are uniformly distributed in a circular shape on the upper baffle 6; the first through hole 61 communicates the inlet chamber 13 and the mixing inner chamber 64; a plurality of second through holes 63 are uniformly distributed on the wall surface of the cylindrical wall 62; the second through hole 63 is communicated with a mixing inner cavity 64 and a mixing outer cavity 65; a plurality of third through holes 53 are uniformly distributed on the piezoelectric vibrator 5; the third through hole 53 communicates the mixing outer chamber 65 with the intermediate chamber 31; a plurality of fourth through holes 71 are uniformly distributed in a circular shape on the lower baffle 7; the fourth through hole 71 is communicated with the middle cavity 31 and the outlet cavity 42; the center of the lower plate 4 is provided with an air outlet 41.
Further, the piezoelectric vibrator 5 is formed by concentrically bonding a metal substrate 51 and a piezoelectric ceramic sheet 52.
Further, the density of the small balls 8 is greater than that of the mixed gas, and when the piezoelectric vibrator 5 does not operate, the small balls 8 are gathered on the upper surface of the metal substrate 51 due to their own weight.
Density of said pellets 8
Slightly greater than the density of the mixed gas
(ii) a The small balls 8 are gathered on the upper surface of the piezoelectric vibrator 5 when not working; the piezoelectric vibrator 5 deforms under the action of driving voltage and drives the small balls 8 to move in the mixing inner cavity 64 and collide with each other, so that the disturbance effect on the mixed gas is enhanced, and high-efficiency active mixing is realized.
Further, in the above-mentioned case,
。
further, in order to avoid damage to the piezoelectric ceramic sheet 52 by the movement of the plurality of small balls 8, the side of the metal substrate 51 to which the piezoelectric ceramic sheet 52 is not bonded should be directed toward the mixing chamber 64 when the piezoelectric vibrator 5 is mounted.
Further, in order to prevent the small balls 8 from escaping out of the mixing cavity 64, the maximum gap s between the upper surface of the metal substrate 51 and the lower surface of the cylindrical wall 62 when the piezoelectric vibrator 5 vibrates downwards to reach the maximum deformation amount is smaller than the diameter d of the small balls 8; the first and second through holes 61, 63 have a diameter D smaller than the diameter D of the ball 8, which prevents the ball 8 from escaping the mixing chamber 64.
Furthermore, two kinds of gas introduced into the first air inlet hole 11 and the second air inlet hole 12 are continuously and quantitatively input by an external power source.
Further, the flow direction of the gas in the mixer is as follows: the two gases firstly enter the inlet cavity 13 through the first air inlet hole 11 and the second air inlet hole 12; passive mixing of the first gas is achieved in the inlet chamber 13; the two gases in the inlet chamber 13 enter the mixing inner chamber 64 through the first through hole 61; the gas effectively mixed by the mixing inner cavity 64 enters the mixing outer cavity 65 through the second through hole 63; the mixed gas enters the intermediate chamber 31 through the third through holes 53 in the mixing outer chamber 65; the gas in the middle chamber 31 enters the outlet chamber 42 through the fourth through hole 71; the gas in the outlet chamber 42 exits the chamber through the gas outlet 41.
Further, the axial distance between the first air inlet hole 11 and the second air inlet hole 12 is larger than the diameter of a circle formed by the centers of the plurality of first through holes 61; the diameter of a circle composed of the centers of the plurality of first through holes 61 is smaller than the diameter of a circle composed of the centers of the plurality of third through holes 53; the diameter of a circle formed by the centers of the third through holes 53 is larger than that of a circle formed by the centers of the fourth through holes 71; the diameters of circles where the centers of the uniformly distributed holes between the adjacent plates are different can ensure that the two gases are fully mixed when flowing through the plates.
Further, the first air inlet hole 11 is connected with one air source through a first air inlet pipe 111, and the second air inlet hole 12 is connected with the other air source through a second air inlet pipe 121; a heating pipe 112 is wound on the first air inlet pipe 111, a refrigerating pipeline 122 is wound on the second air inlet pipe 121, and the heating pipe 112 and the refrigerating pipeline 122 are respectively connected with a heating device and a refrigerating device; the first air inlet pipe 111 and the heating pipe 112 are sealed in one sealed cavity through the insulating layer 100, and the second air inlet pipe 121 and the refrigeration pipeline 122 are sealed in the other sealed cavity through the insulating layer 100.
Further, a mixing cover 9 is arranged above the first through hole 61, the mixing cover 9 comprises an inner concave cylindrical upper cover 91 and a hollow cylindrical lower wall 92, the bottom and the side wall of the upper cover 91 are arranged at a right angle, the lower part of the bottom of the inner concave side of the upper cover is fixedly connected with the lower wall 92, and a plurality of vent holes 93 are uniformly distributed on the circumferential surface of the joint of the upper cover and the lower wall; the lower wall 92 encloses the first through hole 61 and is fixedly connected with the upper baffle 6, an annular air inlet groove 94 is arranged between the side wall of the upper cover 91 and the upper baffle 6, the vertical height of the annular air inlet groove 94 is preferably smaller than 1/5 of the lower wall 92, and the vertical height of the vent hole 93 is smaller than 1/5 of the lower wall 92.
Further, the temperature of the medium in the first inlet line 111 is T1, the temperature of the medium in the second inlet line 121 is T2, T1-T2>20 ℃, preferably 30-50 ℃.
The ideal working process of the embodiment can be divided into a first working state and a second working state.
The first working state: as shown in fig. 2, a voltage opposite to the polarization direction of the piezoelectric ceramic sheet 52 is applied to the piezoelectric vibrator 5, and the piezoelectric vibrator 5 vibrates downward;
the second working state: as shown in fig. 3, when a voltage having the same polarization direction as that of the piezoelectric ceramic sheet 52 is applied to the piezoelectric vibrator 5, the piezoelectric vibrator 5 vibrates upward.
Under the drive of an alternating voltage signal, the piezoelectric vibrator 5 continuously vibrates up and down, and the upper baffle 6 and the lower baffle 7 are driven to vibrate up and down under the action of pressure difference; the self-vibration of the piezoelectric vibrator 5 enables the two gases to obtain a primary mixing effect; the vibration of the piezoelectric vibrator 5 drives the small ball 8 to move, so that the gas disturbance effect in the mixing inner cavity 64 is intensified; at the same time, due to the hysteresis of the small balls 8, the small balls 8 collide with each other, which again enhances the active mixing effect.
The above embodiments are provided for understanding the present invention, and are not intended to limit the present invention, and those skilled in the art may make various changes and modifications according to the present invention without departing from the principle of the present invention, and those changes and modifications are intended to fall within the scope of the appended claims.
Claims (4)
1. A kind of initiative-passive combined piezoelectric gas micromixer, characterized by: the piezoelectric vibrator is composed of an upper plate, an upper middle plate, a lower plate, a piezoelectric vibrator, an upper baffle, a lower baffle and a small ball; the upper plate, the upper middle plate, the lower middle plate and the lower plate are sequentially connected from top to bottom; an upper baffle is arranged between the upper plate and the upper middle plate; an inlet cavity is arranged between the upper plate and the upper baffle plate; the lower end surface of the upper baffle is concentrically provided with a cylindrical wall; a piezoelectric vibrator is arranged between the upper middle plate and the lower middle plate; a certain gap is formed between the cylindrical wall and the piezoelectric vibrator; a mixing inner cavity and a mixing outer cavity are arranged between the piezoelectric vibrator and the upper baffle; the mixing inner cavity is positioned inside the cylindrical wall; the mixing outer cavity is positioned outside the cylindrical wall; a plurality of small balls are placed inside the cylindrical wall; a lower baffle plate is arranged between the lower middle plate and the lower plate; a middle cavity is arranged between the lower middle plate and the lower baffle plate; an outlet cavity is arranged between the lower plate and the lower baffle plate; the upper plate is provided with a first air inlet and a second air inletAn air inlet; the first air inlet hole and the second air inlet hole are communicated with the inlet cavity; the upper baffle is uniformly provided with a plurality of first through holes in a circumferential shape; the first through hole is communicated with the inlet cavity and the mixing inner cavity; a plurality of second through holes are uniformly distributed on the wall surface of the cylindrical wall; the second through hole is communicated with the mixing inner cavity and the mixing outer cavity; a plurality of third through holes are uniformly distributed in the piezoelectric vibrators; the third through hole is communicated with the mixed outer cavity and the middle cavity; the lower baffle plate is uniformly provided with a plurality of fourth through holes according to the circumference shape; the fourth through hole is communicated with the middle cavity and the outlet cavity; an air outlet hole is formed in the center of the lower plate; the piezoelectric vibrator is formed by concentrically bonding a metal substrate and a piezoelectric ceramic piece; density ρ of the pellet1Slightly greater than density ρ of the mixed gas2And 0 is<ρ1-ρ2≤0.5g/cm3(ii) a The small balls are gathered on the upper surface of the piezoelectric vibrator when not working; the piezoelectric vibrator deforms under the action of driving voltage and drives the small balls to move in the mixing inner cavity and collide with each other; one side of the piezoelectric vibrator, which is not bonded with the piezoelectric ceramic piece, faces the mixing inner cavity; when the piezoelectric vibrator vibrates downwards to reach the maximum deformation, the maximum gap s between the upper surface of the metal substrate and the lower surface of the cylindrical wall is smaller than the diameter d of the small ball; the aperture D of the first through hole and the second through hole is smaller than the diameter D of the small ball; two kinds of gas introduced into the first air inlet hole and the second air inlet hole are continuously and quantitatively input by an external power source; the distance between the axle centers of the first air inlet hole and the second air inlet hole is larger than the diameter of a circle formed by the circle centers of the first through holes; the diameter of a circle formed by the centers of the first through holes is smaller than that of a circle formed by the centers of the third through holes; the diameter of a circle formed by the centers of the third through holes is larger than that of a circle formed by the centers of the fourth through holes.
2. The active-passive combination piezoelectric gas micromixer according to claim 1, wherein: the first air inlet is connected with one gas source through a first air inlet pipe, and the second air inlet is connected with the other gas source through a second air inlet pipe; a heating pipe is wound on the first air inlet pipe, a refrigerating pipeline is wound on the second air inlet pipe, and the heating pipe and the refrigerating pipeline are respectively connected with a heating device and a refrigerating device; the first air inlet pipe and the heating pipe are sealed in one sealing cavity through the heat-insulating layer, and the second air inlet pipe and the refrigeration pipeline are sealed in the other sealing cavity through the heat-insulating layer.
3. The active-passive combination piezoelectric gas micromixer according to claim 2, wherein: a mixing cover is arranged above the first through hole; the mixing cover comprises an upper cover with an inner concave cylindrical shape and a hollow cylindrical lower wall; the bottom of the upper cover and the side wall are arranged at a right angle, the lower part of the bottom of the inner concave side of the upper cover is fixedly connected with the lower wall, and a plurality of vent holes are uniformly distributed on the circumferential surface of the joint of the upper cover and the lower wall; the lower wall closes the first through hole and is fixedly connected with the upper baffle; an annular air inlet groove is formed between the side wall of the upper cover and the upper baffle plate.
4. The active-passive combination piezoelectric gas micromixer according to claim 3, wherein: the medium temperature in the first air inlet pipe is T1, the medium temperature in the second air inlet pipe is T2, and T1-T2 is more than 20 ℃.
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| SU1326326A1 (en) * | 1985-10-01 | 1987-07-30 | Ивано-Франковский Институт Нефти И Газа | Vortex mixer |
| US9943847B2 (en) * | 2002-04-17 | 2018-04-17 | Cytonome/St, Llc | Microfluidic system including a bubble valve for regulating fluid flow through a microchannel |
| AU2003287509A1 (en) * | 2002-11-04 | 2004-06-07 | Transform Pharmaceuticals, Inc. | Methods of manipulating small amounts of solids |
| JP5180975B2 (en) * | 2008-02-18 | 2013-04-10 | セイコーインスツル株式会社 | Piezoelectric vibrator manufacturing method and piezoelectric vibrator |
| CN111774105B (en) * | 2020-06-09 | 2021-06-15 | 南京航空航天大学 | Ultrasonic precise micro-fluidic chip based on nano motor array and implementation method thereof |
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