CN113092075B - Variable-angle high-precision calibration light source system - Google Patents
Variable-angle high-precision calibration light source system Download PDFInfo
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- CN113092075B CN113092075B CN202110384631.8A CN202110384631A CN113092075B CN 113092075 B CN113092075 B CN 113092075B CN 202110384631 A CN202110384631 A CN 202110384631A CN 113092075 B CN113092075 B CN 113092075B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0994—Fibers, light pipes
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- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optical Couplings Of Light Guides (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a variable-angle high-precision calibration light source system which comprises a light source system, a pitching deflection control system and a pitching deflection detection system. The light source system comprises a controller, a laser, an aspheric coupling lens, a single-mode fiber, an FCPC fiber coupler and an adjustable attenuator. The pitching deflection control system comprises a pitching deflection platform, a deflection adjusting shaft and a pitching adjusting shaft. The pitching deflection detection system comprises an optical fiber collimating lens, a beam splitter, a reflector, a focusing lens, an area array detector and a beam expander. Light emitted by the laser is coupled to the single-mode fiber through the aspheric coupling lens, a Gaussian beam output finally is collimated by the fiber collimating lens and then enters the beam splitter to be divided into two paths, transmitted light is focused and imaged on the target surface of the area array detector through the lens, and the light spot is a reference light spot. The variable-angle high-precision calibration light source system is used for calibrating a large-view-field light source system, and can improve the detection precision.
Description
Technical Field
The invention relates to the technical field of large-view-field optical system detection, in particular to a variable-angle high-precision calibration light source system.
Background
The optical system is a core part in the imaging system. With the development of scientific technology, the requirements of optical measurement equipment on imaging are higher and higher, the field of view is larger and larger, and the detection of an optical system is more and more difficult. The large-field optical system has a complex structure, and the imaging focal plane of an on-axis point is possibly inconsistent with that of an off-axis point during product processing, so that the imaging quality is influenced, and the detection of the imaging focal plane is particularly important.
However, most of the existing large-field optical systems still rely on the traditional method for detection, the result is often inaccurate, the repeatability is poor, and an efficient detection scheme is not provided. Aiming at the problems of the detection technology of the large-view-field optical system, the invention provides a variable-angle high-precision calibration light source system which can perform high-precision calibration detection on the optical system in a certain view field range.
Disclosure of Invention
The invention aims to overcome the defects in the detection technology of the existing large-view-field optical system, and provides a variable-angle high-precision calibration light source system to improve the detection precision of the large-view-field optical system.
In order to achieve the above object, the embodiments of the present invention provide the following technical solutions: a variable-angle high-precision calibration light source system comprises a light source system, wherein the light source system comprises a semiconductor Laser (LD) controller, a 650nm semiconductor Laser (LD), an aspheric coupling lens, a first single mode fiber, an FCPC fiber coupler, an adjustable attenuator and a second single mode fiber which are sequentially connected, the semiconductor Laser (LD) controller and the 650nm semiconductor Laser (LD) are used for generating a laser light source with stable output, the aspheric coupling lens, the first single mode fiber, the second single mode fiber and the FCPC fiber coupler are used for shaping a laser beam into a Gaussian beam to be output, and the adjustable attenuator is used for finely adjusting the intensity of a collimated light beam so as to match the optimal receiving light power on a surface array detector;
the variable-angle high-precision calibration light source system further comprises a pitching deflection control system, the pitching deflection control system comprises a pitching deflection platform, a deflection adjusting shaft and a pitching adjusting shaft, an optical fiber collimating lens, a beam splitter, a reflecting mirror and a beam expander are placed on the pitching deflection platform, and the deflection adjusting shaft and the pitching adjusting shaft control the angle of the pitching deflection platform so as to control the movement of light spots incident on the area array detector; the axes of the deflection adjusting shaft and the pitching adjusting shaft are consistent with the center of the focusing lens;
but variable angle high accuracy calibration light source system still includes every single move beat detecting system, every single move beat detecting system includes fiber collimating lens the beam splitter, speculum, focusing lens, area array detector and beam expander, fiber collimating lens are arranged in exporting the beam collimation of the outgoing beam among the second single mode fiber to the beam splitter, the beam splitter will the beam splitting that fiber collimating lens jetted out is transmission light and reverberation, the speculum is used for reflecting external equipment's incident beam warp transmission light behind the beam splitter makes external light incide on the area array detector, specifically be:
collimated light beams emitted by the light source system are incident on the beam splitter and divided into two paths, transmitted light is focused by the focusing lens and imaged on the target surface of the area array detector, reflected light of the beam splitter is expanded by the beam expander and emitted, the focusing light spots on the area array detector move due to the pitching and the deflection of the pitching deflection platform, and the moving amount of the focusing light spots on the X, Y position and the focusing lens focal length can be accurately calculated through a mass center algorithm;
the light beam emitted by the external equipment is received by the variable-angle high-precision calibration light source system, and the center of the external light beam focusing light spot is superposed with the center of the internal light beam focusing light spot on the area array detector by adjusting the pitching and the deflection of the external equipment, so that the field angle of the external equipment can be determined.
Wherein three devices adjacent to the beam splitter: the optical fiber collimating lens, the reflector and the beam expander are all fixed on the same platform, the pitching adjusting shaft and the deflection adjusting shaft are used for adjusting the angle of the platform, and the area array detector and the focusing lens are arranged outside the pitching deflection platform, so that the angle of the pitching deflection platform can be calculated through the movement amount of light spots on the area array detector.
Compared with the prior art, the invention has the advantages that:
(1) the invention solves the problem that the existing large-field-of-view optical system does not have special measuring equipment for measuring the field angle of the optical system.
(2) The invention is relative to angle measuring devices such as theodolite and the like, and has a collimation variable-caliber thick light beam and a collimation thin light beam, wherein the thick light beam can find the focal plane of the optical system with high precision, and can accurately measure the field angle of the large-field optical system.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic diagram of a system scheme of a variable-angle high-precision calibration light source system according to an embodiment of the present invention.
Description of the main element symbols:
the device comprises a semiconductor Laser (LD) controller 1, a 650nm semiconductor Laser (LD)2, an aspheric coupling lens 3, a first single-mode fiber 4, an FCPC fiber coupler 5, an adjustable attenuator 6, a second single-mode fiber 7, a fiber collimating lens 8, a beam splitter 9, a reflector 10, a focusing lens 11, a plane array detector 12, a beam expander 13, a pitching deflection platform 14, a deflection adjusting shaft 15, a pitching adjusting shaft 16, a collimated light beam emitted 17 and a collimated light beam emitted 18.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
The utility model provides a variable angle high accuracy demarcation light source system, includes light source system, light source system includes semiconductor Laser (LD) controller 1, 650nm semiconductor Laser (LD)2, aspheric surface coupling lens 3, first single mode fiber 4, second single mode fiber 7, FCPC fiber coupler 5, adjustable attenuator 6.
Semiconductor Laser (LD) controller 1 with 650nm semiconductor Laser (LD)2 is used for producing the laser light source of stable output, aspheric surface coupling lens 3 first single mode fiber 4, second single mode fiber 7 FCPC fiber coupler 5 is responsible for the laser beam shaping for gauss beam output, adjustable attenuator 6 is used for the intensity of meticulous adjustment collimated light beam to best received optical power on the matching area array detector.
Furthermore, the system also comprises a pitching and yawing control system. The pitch and yaw control system comprises a pitch and yaw platform 14, a yaw adjusting shaft 15 and a pitch adjusting shaft 16. And an optical fiber collimating lens 8, a beam splitter 9, a reflector 10 and a beam expander 13 are arranged on the pitching deflection platform 14. The yaw adjustment axis 15 and the pitch adjustment axis 16 control the angle of the pitch yaw platform 14, thereby controlling the movement of the spot incident on the area array detector 12.
Further, the axial centers of the yaw adjustment shaft 15 and the pitch adjustment shaft 16 should coincide with the center of the focus lens.
Further, the system also comprises a pitching deflection detection system. The pitching deflection detection system comprises the optical fiber collimating lens 8, the beam splitter 9, the reflecting mirror 10, a focusing lens 11, an area array detector 12 and the beam expander 13.
The fiber collimating lens 8 is configured to collimate an outgoing light beam in the second single-mode fiber 7 and output the collimated outgoing light beam to the beam splitter 9, the beam splitter 9 splits light emitted by the fiber collimating lens 8 into transmission light and reflection light, and the mirror 10 is configured to reflect transmission light of an incident light beam of an external device after passing through the beam splitter 9, so that an external light beam is incident on the area array detector 12, specifically:
collimated light beams emitted by the light source system are incident to the beam splitter 9 and divided into two paths, transmitted light is focused by the lens to form an image on the target surface of the area array detector 12, reflected light of the beam splitter 9 is expanded by the beam expander 13 and emitted, the focusing light spots on the area array detector 12 are moved due to the pitching and the deflection of the pitching deflection platform 14, and the moving amount of the focusing light spots at the position X, Y and the pitching and the deflection amount pointed by the light beams can be accurately calculated by calculating the moving amount of the focusing light spots through a centroid algorithm and the focal length of the focusing lens 11.
The light beam emitted by the external device is received by the system, and the external light beam focusing light spot center is superposed with the internal light beam focusing light spot center on the area array detector 12 by adjusting the pitching and the deflection of the external device, so that the field angle of the external device can be determined.
Further, three devices adjacent to the beam splitter 9: the fiber collimating lens 8, the reflector 10 and the beam expander 13 are all fixed on the same platform, the elevation yaw axis 15 is used to adjust the angle of the platform, and the area array detector 12 and the focusing lens 11 are outside the adjusting table, so the angle of the elevation yaw platform 14 can be calculated by the movement amount of the light spot on the area array detector 12.
For the present embodiment, three devices adjacent to the beam splitter 9: the optical fiber collimating lens 8, the reflecting mirror 10 and the beam expanding lens 13 are all fixed on the same platform, the platform is subjected to angle adjustment by utilizing a pitching yaw axis, and the area array detector 12 and the focusing lens 11 are arranged outside the adjusting platform, so that the angle of the rotary table can be calculated through the movement amount of light spots on the CCD.
The variable angle referred to in the present embodiment means that the angle of the reference beam in the system is variable, and the direction of the angle change is controlled by the pitch adjustment axis 16 and the yaw adjustment axis 15. Since the focal length of the focus lens 11 is short and the angle should be changed at the center of the focus lens 11 in consideration of the diffraction limit, the axial centers of the pitch adjustment shaft 16 and the yaw adjustment shaft 15 coincide with the center of the focus lens 11.
It should be noted that, in this embodiment, when the angle is changed with respect to the center of the focusing lens 11, the collimated light beam emitted from the beam expander 13 will also tilt or sway with respect to the center of the focusing lens 11. Therefore, translation of light beams can be introduced, and translation alignment needs to be carried out on light paths in the equipment so as to ensure that the optical axis of an external incident light beam is parallel to and coincident with the optical axis of the beam expanding lens 13.
Referring to fig. 1, the variable-angle high-precision calibration light source system provided in this embodiment includes a light source system output by an LD single-mode coupling fiber, and the light source system includes a semiconductor Laser (LD) controller 1, a 650nm semiconductor Laser (LD)2, an aspheric coupling lens 3, a first single-mode fiber 4, an FCPC fiber coupler 5, an adjustable attenuator 6, and a second single-mode fiber 7. The semiconductor Laser (LD) controller 1 and the 650nm semiconductor Laser (LD)2 provide light source output with stable quality, the output light beam of the 650nm semiconductor Laser (LD)2 is shaped into a Gaussian beam by the aspheric coupling lens 3, the first single-mode fiber 4, the second single-mode fiber 7 and the FCPC fiber coupler 5, and the adjustable attenuator 6 is responsible for finely adjusting the intensity of the collimated light beam of the LD so as to match the optimal receiving light power on the area array detector.
The variable-angle high-precision calibration light source system further comprises a pitching deflection control system, and the system comprises a pitching deflection platform 14, a deflection adjusting shaft 15 and a pitching adjusting shaft 16. The pitching and yawing platform 14 is provided with an optical fiber collimating lens 8, a beam splitter 9, a reflector 10 and a beam expander 13. The yaw adjustment axis 15 and the pitch adjustment axis 16 are used to adjust the angle of the yaw platform, thereby controlling the yaw and pitch of the beam.
The variable-angle high-precision calibration light source system further comprises a pitching deflection detection system, and the system comprises an optical fiber collimating lens 8, a beam splitter 9, a reflector 10, a focusing lens 11, an area array detector 12 and a beam expander 13. Emergent light beams in the second single-mode fibers 7 are collimated by the fiber collimating lens 8 and then reach the beam splitter 9, the beam splitter 9 splits the light beams into transmitted light and reflected light, the transmitted light is focused by the lens and imaged on the area array detector 12, the light spot is a reference light spot, and the reflected light of the beam splitter is expanded by the beam expanding lens 13 and emitted.
In the variable-angle high-precision calibration light source system, if the LD collimated light source tilts and swings, the focusing light spot moves on the area array detector 12, and the moving amount of the focusing light spot at the X, Y position and the focal length of the focusing lens are calculated based on the centroid algorithm, so that the tilting and swinging amount of the light beam pointing direction can be accurately calculated, and the tilting and swinging of the light beam direction after passing through the beam expander 13 can be determined. Because the light beam emitted by the external device is received by the system, the center of the external light beam focusing light spot is superposed with the center of the internal light beam focusing light spot on the area array detector 12 by adjusting the pitching and the yawing of the external device, so that the field angle of the external device can be determined.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (2)
1. The variable-angle high-precision calibration light source system is characterized by comprising a light source system, wherein the light source system comprises a semiconductor Laser (LD) controller (1), a 650nm semiconductor Laser (LD) (2), an aspheric coupling lens (3), a first single-mode fiber (4), an FCPC fiber coupler (5), an adjustable attenuator (6) and a second single-mode fiber (7) which are sequentially connected, the semiconductor Laser (LD) controller (1) and the 650nm semiconductor Laser (LD) (2) are used for generating a laser source with stable output, the aspheric coupling lens (3), the first single-mode fiber (4), the second single-mode fiber (7) and the FCPC fiber coupler (5) are used for shaping a laser beam into Gaussian beam output, and the adjustable attenuator (6) is used for finely adjusting the intensity of a collimated beam, to match the optimum received optical power on the area array detector (12);
the variable-angle high-precision calibration light source system further comprises a pitching deflection control system, the pitching deflection control system comprises a pitching deflection platform (14), a deflection adjusting shaft (15) and a pitching adjusting shaft (16), an optical fiber collimating lens (8), a beam splitter (9), a reflecting mirror (10) and a beam expanding mirror (13) are placed on the pitching deflection platform (14), and the deflection adjusting shaft (15) and the pitching adjusting shaft (16) control the angle of the pitching deflection platform (14), so that the movement of light spots incident on the area array detector (12) is controlled; the axes of the deflection adjusting shaft and the pitching adjusting shaft are consistent with the center of the focusing lens;
variable angle high accuracy calibration light source system still includes every single move beat detecting system, every single move beat detecting system includes fiber collimating lens (8), beam splitter (9), speculum (10), focusing lens (11), area array detector (12) and beam expander (13), fiber collimating lens (8) are arranged in will the emergent beam collimation output in second single mode fiber (7) to beam splitter (9), beam splitter (9) will the light beam splitting that fiber collimating lens (8) jetted out is transmission light and reverberation, speculum (10) are used for reflecting the incident beam of external equipment and pass through the transmission light behind beam splitter (9), make external light incide on area array detector (12), specifically do:
collimated light beams emitted by the light source system are incident on the beam splitter (9) and divided into two paths, transmitted light is focused by the focusing lens (11) and imaged on a target surface of the area array detector (12), reflected light of the beam splitter (9) is expanded by the beam expander (13) and emitted, a focusing light spot on the area array detector (12) moves due to pitching and deflection of the pitching deflection platform (14), and the pitching and deflection amount pointed by the light beams can be accurately calculated through the moving amount of the focusing light spot at the X, Y position calculated by a centroid algorithm and the focal length of the focusing lens (11);
the light beam emitted by the external equipment is received by the variable-angle high-precision calibration light source system, and the center of the external light beam focusing light spot is superposed with the center of the internal light beam focusing light spot on the area array detector (12) by adjusting the pitching and the deflection of the external equipment, so that the field angle of the external equipment can be determined.
2. The variable-angle high-precision calibration light source system according to claim 1, characterized in that three devices adjacent to the beam splitter (9): the optical fiber collimating lens (8), the reflecting mirror (10) and the beam expanding mirror (13) are all fixed on the same platform, the platform is subjected to angle adjustment by utilizing the pitch adjustment shaft (16) and the deflection adjustment shaft (15), and the plane array detector (12) and the focusing lens (11) are arranged outside the pitch deflection platform (14), so that the angle of the pitch deflection platform (14) can be calculated through the movement amount of light spots on the plane array detector (12).
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102385170A (en) * | 2011-08-03 | 2012-03-21 | 中国科学院长春光学精密机械与物理研究所 | Optical system for measuring and regulating center deviation of optics lens at high precision |
| CN105784335A (en) * | 2016-04-15 | 2016-07-20 | 中国科学院上海技术物理研究所 | Auxiliary light correction device and method for calibrating normal direction of reference mirror |
| CN107063092A (en) * | 2017-06-05 | 2017-08-18 | 北京理工大学 | The coaxial calibration system of double light sources and method of adjustment that a kind of big visual field is quickly scanned |
| CN110793756A (en) * | 2019-11-11 | 2020-02-14 | 中国科学院上海技术物理研究所 | Optical correction device for monitoring optical axis of reflecting telescope based on polarization beam splitting |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6271923B1 (en) * | 1999-05-05 | 2001-08-07 | Zygo Corporation | Interferometry system having a dynamic beam steering assembly for measuring angle and distance |
| CN2442282Y (en) * | 2000-09-22 | 2001-08-08 | 中国科学院上海光学精密机械研究所 | Auxiliary regulator for real time viewing optical fiber coupling |
| US6525816B2 (en) * | 2000-12-28 | 2003-02-25 | 3M Innovative Properties Company | Method for measuring the absolute light throughput of reflective-mode displays in an optical system |
| JP2003114148A (en) * | 2001-10-03 | 2003-04-18 | Victor Co Of Japan Ltd | Light-detecting apparatus |
| US7689022B2 (en) * | 2002-03-15 | 2010-03-30 | Affymetrix, Inc. | System, method, and product for scanning of biological materials |
| US7151596B2 (en) * | 2002-07-05 | 2006-12-19 | Olympus Optical Co., Ltd. | Deflection angle detecting device |
| CN101509760B (en) * | 2009-03-27 | 2010-12-29 | 中国科学院上海光学精密机械研究所 | Apparatus and method for detecting gauss light beam waist position and dimension |
| CN101694414B (en) * | 2009-10-20 | 2011-06-29 | 中国科学院光电技术研究所 | Annulus splicing detection system based on Hartmann sensor |
| CN101866031B (en) * | 2010-06-03 | 2013-12-25 | 北京理工大学 | Optical readout method utilizing fiber optics bundle to carry out modulation |
| JP5857887B2 (en) * | 2012-06-13 | 2016-02-10 | 三菱電機株式会社 | Wavefront measuring device |
| CN204008068U (en) * | 2014-06-30 | 2014-12-10 | 中国科学院西安光学精密机械研究所 | The device that a kind of corner reflector light echo characteristic is demarcated |
| CN105590639A (en) * | 2014-10-23 | 2016-05-18 | 苏州研迪智能科技有限公司 | Holographic optical system memory |
| CN104483099B (en) * | 2014-12-19 | 2017-07-25 | 中国科学院长春光学精密机械与物理研究所 | A kind of detection method of large visual field optical system image planes uniformity |
| CN104551387B (en) * | 2014-12-23 | 2016-08-24 | 中国科学院力学研究所 | Multi-beam synthetic focusing device |
| US9921299B2 (en) * | 2015-02-20 | 2018-03-20 | Apple Inc. | Dynamic beam spot size for light beam scanning device |
| TWI550982B (en) * | 2015-03-06 | 2016-09-21 | 智泰科技股份有限公司 | Real-time wavelength correction system for visible light |
| CN108458856A (en) * | 2018-01-04 | 2018-08-28 | 中国科学院国家天文台南京天文光学技术研究所 | The detection device and its method of segmentation detection dome seeing based on laser light source |
| CN111010231B (en) * | 2019-12-23 | 2022-05-03 | 网络通信与安全紫金山实验室 | Free space optical communication method and system |
| CN111122120B (en) * | 2019-12-31 | 2021-09-17 | 深圳市杰普特光电股份有限公司 | Adjusting device and method for fast and efficient coupling of space light |
| CN112485232B (en) * | 2020-10-21 | 2022-04-19 | 浙江大学 | Sub-ten-nanometer positioning direction-finding method and device based on one-dimensional dark spot time-sharing illumination |
-
2021
- 2021-04-09 CN CN202110384631.8A patent/CN113092075B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102385170A (en) * | 2011-08-03 | 2012-03-21 | 中国科学院长春光学精密机械与物理研究所 | Optical system for measuring and regulating center deviation of optics lens at high precision |
| CN105784335A (en) * | 2016-04-15 | 2016-07-20 | 中国科学院上海技术物理研究所 | Auxiliary light correction device and method for calibrating normal direction of reference mirror |
| CN107063092A (en) * | 2017-06-05 | 2017-08-18 | 北京理工大学 | The coaxial calibration system of double light sources and method of adjustment that a kind of big visual field is quickly scanned |
| CN110793756A (en) * | 2019-11-11 | 2020-02-14 | 中国科学院上海技术物理研究所 | Optical correction device for monitoring optical axis of reflecting telescope based on polarization beam splitting |
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