CN113009609A - Volume grating calibration assembly, volume grating preparation device, calibration method and exposure method - Google Patents
Volume grating calibration assembly, volume grating preparation device, calibration method and exposure method Download PDFInfo
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Abstract
The invention relates to a volume grating calibration component, a volume grating preparation device, a calibration method and an exposure method, wherein the calibration device comprises a first laser and a first reflector, the first laser is positioned on the positive side of a sample on an exposure platform, and the first reflector is positioned on the other side of the sample on the exposure platform; the first laser emits a calibration beam to irradiate an exposure area of the exposure platform, light transmitted from the exposure platform is reflected by the first reflector to obtain a reflected beam, and the angle of the first reflector is adjusted to enable the reflected beam to form a Newton ring at the output end of the first laser. The angle of the grating line of the volume grating can be accurately controlled by using a calibration method, and the stability is good.
Description
Technical Field
The invention relates to the technical field of gratings, in particular to a volume grating calibration component, a volume grating preparation device, a calibration method and an exposure method.
Background
Bulk Bragg gratings (Volume Bragg gratings) prepared based on Photo-thermal-birefringence (PTR) glass have both angle selectivity and spectrum selectivity, high diffraction efficiency, good thermal stability, wide applicable spectrum and strong laser damage resistance, and are widely applied to the field of strong lasers. Researchers in China also publicly apply a series of patents about volume Bragg gratings, for example, Jinyunxian of Shanghai optical precision machinery institute of Chinese academy of sciences proposes a method for preparing a reflection-type volume grating based on photothermal conversion glass (Chinese patent CN201911167157), Linanying, Chenzhen and the like propose a method for manufacturing a multi-wavelength volume Bragg grating (Chinese patent CN201410405773), Liu Chong and the like of Zhejiang university propose a method for ultraviolet exposure of a reflection-type volume holographic Bragg grating (Chinese patent CN 201210360192).
The transmission type volume Bragg grating is widely applied to spatial filtering with excellent angle selectivity, and is characterized in that required spatial angular spectrum components can be directly selected without focusing incident beams, so that the disadvantages that the light intensity at a focal plane is too high and materials around a pinhole are easy to break down in the widely-used pinhole filtering mode at the present stage are successfully overcome, and the transmission type volume Bragg grating is used for replacing a large-size pinhole spatial filter in a high-power laser system. The realization of the purpose needs to accurately control various parameters of the volume Bragg grating, including the thickness of the grating, the period of the grating line, the vector of the grating and the inclination angle of the grating. The holographic method is generally adopted for preparing the volume Bragg grating, and the required grating period and inclination angle can be changed by the included angle between two beams of ultraviolet interference light and the included angle between the normal line of the surface of the record carrier and incident light and reference light. Meanwhile, in many systems, plug-and-play is generally required without changing the direction of an output light beam, and the change of the grating inclination angle caused by the error during writing causes the change of the diffraction efficiency and the angle selectivity of the bulk Bragg grating, thereby affecting the performance of the bulk Bragg grating device. Aiming at the problem, the invention provides a method for accurately controlling the grid line angle of a bulk Bragg grating by using red light calibration.
Disclosure of Invention
Therefore, the invention aims to provide a volume grating calibration component, a volume grating preparation device, a calibration method and an exposure method, which are convenient for calibration of gratings, and have high accuracy and good stability.
In order to solve the technical problem, the invention provides a volume grating calibration assembly, wherein the calibration device comprises a first laser and a first reflector, the first laser is positioned on the positive side of a sample on an exposure platform, and the first reflector is positioned on the other side of the sample on the exposure platform;
the first laser emits a calibration beam to irradiate an exposure area of the exposure platform, light transmitted from the exposure platform is reflected by the first reflector to obtain a reflected beam, and the angle of the first reflector is adjusted to enable the reflected beam to form a Newton ring at the output end of the first laser.
The invention discloses a device for preparing a volume grating, which comprises the volume grating calibration assembly.
Preferably, the device further comprises a second laser, a beam splitter, a second reflecting mirror and a third reflecting mirror, wherein the second laser emits an exposure light beam, and the exposure light beam is decomposed into two sub-light beams by the beam splitter; and the two sub beams are respectively reflected by the second reflector and the third reflector to interfere in an exposure area of the exposure platform.
Preferably, the second laser is a violet laser.
Preferably, the device further comprises an aperture diaphragm, and the sub-beams are collimated by the aperture diaphragm and fixed to the axis and then irradiate an exposure area of the exposure platform.
Preferably, the laser further comprises a collimation and beam expansion assembly, and the collimation and beam expansion assembly is positioned at the output end of the second laser.
The invention discloses a calibration method of a volume grating, which comprises the following steps:
s1, arranging a first laser on the positive side of the sample on the exposure platform, and arranging a first reflector on the other side of the sample on the exposure platform;
and S2, the first laser emits a calibration light beam towards the exposure area of the exposure platform, the calibration light beam passes through the exposure area on the exposure platform and is reflected by a first reflecting mirror to obtain a reflected light beam, and the angle of the first reflecting mirror is adjusted to enable the reflected light beam to form a Newton' S ring at the output end of the first laser.
The invention discloses an exposure method of a volume grating, which comprises the following steps:
s1, arranging a first laser on the positive side of the sample on the exposure platform, and arranging a first reflector on the other side of the sample on the exposure platform;
s2, the first laser emits a calibration light beam towards an exposure area of the exposure platform, the calibration light beam passes through the exposure area on the exposure platform and is reflected by a first reflector to obtain a reflected light beam, and the angle of the first reflector is adjusted to enable the reflected light beam to form a Newton ring at the output end of the first laser;
s3, placing a sample on the exposure platform, and adjusting the angle of the exposure platform to enable the reflected beam of the first reflector to form a Newton ring at the output end of the first laser;
and S4, turning off the first laser, and exposing the sample on the exposure platform by using the interference light.
Preferably, in S4, during the sample exposure process, the exposure platform is rotated to realize multi-angle raster writing.
Preferably, the exposure method is applied to the preparation of the volume Bragg grating.
The invention has the following beneficial effects:
1. according to the invention, the first laser and the first reflector are arranged, and the first laser is matched with the first reflector, so that the angle of the first reflector is adjusted to enable the reflected light beam to form a Newton ring at the output end of the first laser, and the calibration of the grating preparation is facilitated.
2. The invention adopts the method of the first laser to emit the calibration light beam to control the grid line of the volume grating, and compared with the traditional exposure method, the invention accurately controls the forming angle of the grid line of the volume grating.
4. The invention can realize calibration only by adjusting the exposure platform without adjusting the exposure light path.
5. The invention is beneficial to improving the diffraction efficiency and the angle selectivity of the volume grating and improving the performance of the volume grating.
Drawings
FIG. 1 is a light path diagram of the present invention;
FIG. 2 is a schematic diagram of two ultraviolet interference beams forming vertical interference fringes on a PTR glass sample;
FIG. 3 is a VBG diffraction efficiency measurement optical path diagram;
fig. 4 is a graph of diffraction efficiency versus off Bragg angle for a transmissive bulk Bragg grating at normal incidence for a particular wavelength.
The specification reference numbers indicate: 10. a first laser; 11. a first reflector; 20. a second laser; 21. a beam splitter; 22. a second reflector; 23. a third reflector; 24. an exposure stage; 25. and (3) sampling.
Detailed Description
The present invention is further described below in conjunction with the following figures and specific examples so that those skilled in the art may better understand the present invention and practice it, but the examples are not intended to limit the present invention.
Referring to fig. 1, the invention discloses a volume grating calibration assembly, the calibration device includes a first laser 10 and a first reflector 11, the first laser 10 is located on the front side of a sample on an exposure platform 24, and the first reflector 11 is located on the other side of the sample on the exposure platform 24.
The first laser 10 emits a calibration beam to irradiate on an exposure area of the exposure platform 24, light transmitted from the exposure platform 24 is reflected by the first reflecting mirror 11 to obtain a reflected beam, and the angle of the first reflecting mirror 11 is adjusted so that the reflected beam forms a Newton ring at the output end of the first laser 10. The first laser 10 and the first reflector 11 are matched, so that the calibration of grating writing can be realized. The first laser 10 may be a He-Ne laser emitting 632.8nm red light with a power of 1mW, a spot divergence angle <1.4mrad, and a spot diameter <1.4 mrad. The red light facilitates observation of whether the output of the first laser 10 forms newton's rings. The newly added red light path does not interfere with the original exposure light path.
The invention also discloses a device for preparing the volume grating, which comprises the volume grating calibration component. The device for preparing the volume grating further comprises a second laser 20, a beam splitter 21, a second reflecting mirror 22 and a third reflecting mirror 23, wherein the second laser 20 emits exposure light beams, and the exposure light beams are decomposed into two sub-light beams by the beam splitter 21. The two sub-beams are reflected by the second mirror 22 and the third mirror 23, respectively, to interfere with each other at the exposure area of the exposure stage 24. The device for preparing the volume grating comprises a volume grating calibration component, and the calibration of the prepared grating can be realized through the volume grating calibration component. The first laser 10 may be placed on the midperpendicular of the two interfering lights. The device for preparing the volume grating uses a red light calibration method, an exposure light path is not required to be adjusted, and the purpose of accurately controlling the grid line angle of the volume grating can be achieved by adjusting a photosensitive thermal deformation (PTR) glass sample 25 to be exposed.
Fig. 2 is a schematic diagram of a grating line structure of a bulk Bragg grating, and the distance between light and dark fringes can be changed by adjusting the included angle between two beams of interference light by adjusting the second reflecting mirror 22 and the third reflecting mirror 23, so as to change the grating period of the bulk Bragg grating.
In the present invention, the exposure stage 24 is rotatable, and the grating line angle of the grating can be adjusted on the sample 25 by rotating the exposure stage 24.
For sample 25, a photothermal reduction (PTR) glass sample 25 can be used, the raw material composition and mole percent of the photothermal reduction (PTR) glass being: SiO 270%, Na2O 15%, ZnO 5%, Al2O 34%, KBr 1%, Ag2O 0.01%, CeO20.01% and small amounts of Sn and Sb. The exposure device can be applied to the preparation of the transmission type volume Bragg grating.
The second laser 20 is a He-Cd laser, which emits a 325nm violet light. The writing optical power is 50mW, the divergence angle of a light spot is less than 0.5mrad, and the diameter of the light spot is less than 1.2 nm. The 325nm ultraviolet laser output beam is collimated and expanded, and then split into two beams of interference light, and finally interference fringes perpendicular to the PTR glass sample 25 are formed.
The volume grating preparation device also comprises an aperture diaphragm, and the split beams are collimated by the aperture diaphragm and fixed to the axis and then irradiate an exposure area of the exposure platform 24. The adjustment of the split beams can be realized by adjusting the aperture diaphragm.
In another embodiment, the apparatus for manufacturing a volume grating of the present invention further includes a collimation and beam expansion assembly, and the collimation and beam expansion assembly is located at the output end of the second laser 20. The collimated beam expanding assembly facilitates collimating and expanding the laser beam output by the second laser 20.
The invention discloses a calibration method of a volume grating, which comprises the following steps:
step one, a first laser 10 is arranged on the front side of a sample on an exposure platform 24, and a first reflecting mirror 11 is arranged on the other side of the sample on the exposure platform 24.
Step two, the first laser 10 emits a calibration beam towards the exposure area of the exposure platform 24, the calibration beam passes through the exposure area of the exposure platform 24 and is reflected by the first reflecting mirror 11 to obtain a reflected beam, and the angle of the first reflecting mirror 11 is adjusted to enable the reflected beam to form a Newton ring at the output end of the first laser 10.
The invention discloses an exposure method of a volume grating, which comprises the following steps:
step one, a first laser 10 is arranged on the front side of a sample on an exposure platform 24, and a first reflecting mirror 11 is arranged on the other side of the sample on the exposure platform 24.
Step two, the first laser 10 emits a calibration beam towards the exposure area of the exposure platform 24, the calibration beam passes through the exposure area on the exposure platform 24 and is reflected by the first reflecting mirror 11 to obtain a reflected beam, and the angle of the first reflecting mirror 11 is adjusted to enable the reflected beam to form a Newton ring at the output end of the first laser 10.
And step three, placing a sample 25 on the exposure platform 24, and adjusting the angle of the exposure platform 24 to enable the reflected beam of the first reflecting mirror 11 to form a Newton ring at the output end of the first laser 10.
And step four, turning off the first laser 10, and exposing the sample 25 on the exposure platform 24 by using the interference light.
In step four, multi-angle raster writing is achieved by rotating the exposure stage 24 during exposure of the sample 25.
The exposure method can be applied to the preparation of the volume Bragg grating.
The working principle of the invention is as follows: ultraviolet light output by a 325nm He-Cd laser is collimated and expanded to split beams to form two beams of interference light, and the two beams of interference light are overlapped by a second reflector 22 and a third reflector 23 to form interference fringes. A632.8 nm He-Ne laser (namely a first laser 10) is placed on the perpendicular bisector of two beams of interference light, the red light output by the first laser 10 plays a calibration role, two beams of ultraviolet interference light are collimated and fixed by two aperture diaphragms, a second reflecting mirror 22 and a third reflecting mirror 23 are adjusted to enable the two beams of ultraviolet interference light and red light spots to coincide on an exposure plane, and then the aperture diaphragms are closed. When the red light passes through the PTR glass sample 25 and reflects back to the output port through the reflector after passing through the sample 25, Newton rings are generated, which shows that the interference fringes are normally incident at the moment, the He-Ne laser is closed, and the aperture diaphragm is opened to start exposure treatment.
Fig. 3 is a light path diagram for measuring diffraction efficiency of a volume grating, wherein a 1064nm infrared laser is normally incident on a prepared volume grating device, an exposure platform on which the volume grating is placed is rotatable, and an optical power meter is used for measuring the optical power of transmitted light and the optical power of diffracted light after the light transmits through the volume grating, so that the diffraction efficiency at different angles is calculated. The power meter records the intensity of incident light as I1Transmitted light intensity of ITThe intensity of the diffracted light is IDThe relative diffraction efficiency of the grating is calculated by the formula, and the absolute diffraction efficiency is calculated by the formula, eta is equal to ID/ID+IT(ii) a The absolute diffraction efficiency formula is eta ═ ID/IT。
Fig. 4 shows the theoretical diffraction efficiency and the actually measured diffraction efficiency of the volume Bragg grating after 1064nm infrared light normal incidence is prepared by using the red light calibration method and the volume Bragg grating without using the red light calibration method, respectively, and the results show that the volume Bragg grating written by using the red light calibration method has improved angle selectivity, increased diffraction efficiency and enhanced filtering performance.
The volume bragg grating based on the photo-thermo-responsive refraction (PTR) glass has excellent angle, wavelength selectivity and high diffraction efficiency, is considered as an ideal wavelength and angle selection device, is widely applied to the field of advanced lasers, and has high adjustability. The parameters such as an incident angle, a diffraction angle, a central wavelength, angle (spectrum) selectivity and the like can be adjusted by changing grating structure parameters such as grating thickness, a refractive index modulation degree, a grating period, a grating vector inclination angle and the like. The transmission type volume Bragg grating is widely applied to spatial filtering, and by means of a reasonably designed grating structure, the angle selectivity and diffraction efficiency of the transmission type volume Bragg grating can be well enhanced through a red light calibration method, and the filtering performance is improved.
The method for calibrating the grid line of the accurate control body Bragg grating by using the red light has the following advantages:
(1) the body Bragg grating grid line is controlled by adding a red light calibration method, and compared with the traditional exposure method, the forming angle of the body Bragg grating grid line is accurately controlled.
(2) The newly added red light path does not interfere with the original exposure light path.
(3) The method has simple structure and is easy to realize.
(4) The exposure light path is not required to be adjusted, and only the PTR glass sample on the exposure platform is required to be adjusted.
(5) The diffraction efficiency and the angle selectivity of the bulk Bragg grating can be improved, and the performance of the bulk Bragg grating can be improved.
As will be appreciated by one skilled in the art, embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the application. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (10)
1. A volume grating calibration assembly is characterized in that the calibration device comprises a first laser and a first reflector, the first laser is positioned on the positive side of a sample on an exposure platform, and the first reflector is positioned on the other side of the sample on the exposure platform;
the first laser emits a calibration beam to irradiate an exposure area of the exposure platform, light transmitted from the exposure platform is reflected by the first reflector to obtain a reflected beam, and the angle of the first reflector is adjusted to enable the reflected beam to form a Newton ring at the output end of the first laser.
2. A device for preparing a volume grating, comprising the volume grating calibration assembly of claim 1.
3. The apparatus for manufacturing a volume grating according to claim 2, further comprising a second laser, a beam splitter, a second reflecting mirror, and a third reflecting mirror, wherein the second laser emits an exposure beam, and the exposure beam is split into two sub-beams by the beam splitter; and the two sub beams are respectively reflected by the second reflector and the third reflector to interfere in an exposure area of the exposure platform.
4. The apparatus of claim 3, wherein the second laser is a violet laser.
5. The apparatus according to claim 3, further comprising an aperture stop, wherein the sub-beams are collimated and fixed to the exposure area of the exposure stage.
6. The apparatus according to claim 3, further comprising a collimated beam expanding assembly at an output of the second laser.
7. A calibration method of a volume grating is characterized by comprising the following steps:
s1, arranging a first laser on the positive side of the sample on the exposure platform, and arranging a first reflector on the other side of the sample on the exposure platform;
and S2, the first laser emits a calibration light beam towards the exposure area of the exposure platform, the calibration light beam passes through the exposure area on the exposure platform and is reflected by a first reflecting mirror to obtain a reflected light beam, and the angle of the first reflecting mirror is adjusted to enable the reflected light beam to form a Newton' S ring at the output end of the first laser.
8. An exposure method of a volume grating is characterized by comprising the following steps:
s1, arranging a first laser on the positive side of the sample on the exposure platform, and arranging a first reflector on the other side of the sample on the exposure platform;
s2, the first laser emits a calibration light beam towards an exposure area of the exposure platform, the calibration light beam passes through the exposure area on the exposure platform and is reflected by a first reflector to obtain a reflected light beam, and the angle of the first reflector is adjusted to enable the reflected light beam to form a Newton ring at the output end of the first laser;
s3, placing a sample on the exposure platform, and adjusting the angle of the exposure platform to enable the reflected beam of the first reflector to form a Newton ring at the output end of the first laser;
and S4, turning off the first laser, and exposing the sample on the exposure platform by using the interference light.
9. The method for exposing a volume grating as claimed in claim 8, wherein in S4, the exposure platform is rotated to realize multi-angle grating writing during the sample exposure process.
10. The method for exposing a volume grating as claimed in claim 8, wherein the method is applied to the preparation of a volume bragg grating.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113899533A (en) * | 2021-12-08 | 2022-01-07 | 杭州拓致光电科技有限公司 | Device and method for measuring performance of reflective volume grating |
| CN114236971A (en) * | 2021-11-30 | 2022-03-25 | 歌尔股份有限公司 | Exposure system and exposure method of polarization holographic grating |
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