CN113008365A - Reflected light detection module - Google Patents

Reflected light detection module Download PDF

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Publication number
CN113008365A
CN113008365A CN201911391434.8A CN201911391434A CN113008365A CN 113008365 A CN113008365 A CN 113008365A CN 201911391434 A CN201911391434 A CN 201911391434A CN 113008365 A CN113008365 A CN 113008365A
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CN
China
Prior art keywords
groove
thickness
opening
light detection
detection module
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CN201911391434.8A
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Chinese (zh)
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CN113008365B (en
Inventor
卢建宏
苏信嘉
王嘉右
何淙润
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Industrial Technology Research Institute ITRI
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Industrial Technology Research Institute ITRI
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/04Optical or mechanical part supplementary adjustable parts
    • G01J1/0407Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0425Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using optical fibers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/0214Constructional arrangements for removing stray light

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

The invention discloses a reflected light detection module which comprises an optical fiber, an optical layer and a light detection device. The optical fiber has a core, a shell and a protective layer from inside to outside. The optical fiber includes a light input end, a light output end, an opening, and a groove. The opening is arranged between the light input end and the light output end, and the opening is formed in the protective layer and used for exposing the fiber shell. The groove is arranged between the opening and the light output end. At the groove, the thickness of the fiber shell and the thickness of the protective layer are first reduced and then increased from the vicinity of the open end. The optical layer is arranged in the opening, and the refractive index of the optical layer is higher than that of the fiber shell. The light detection device is disposed outside the optical fiber and adjacent to the groove.

Description

Reflected light detection module
Technical Field
The present invention relates to an optical module, and more particularly, to a reflected light detection module.
Background
In recent years, high power laser is widely used for processing (such as cutting, splitting, drilling, etc.) large-sized sheet metal and metal plates with different thicknesses. During the machining process, the state of the high-power laser beam may change depending on human operation, machining environment, shape or material of the object to be machined, and the like. If can in time know the state variation of high power laser when processing, will help the user to carry out adjustment correspondingly, and then protect the component in the high power laser to promote the stability and the life of high power laser.
Disclosure of Invention
Embodiments of the present invention provide a reflected light detection module that can evaluate the state of a processing light source by monitoring a reflected light beam of a processing object.
A reflected light detection module of an embodiment of the present invention includes an optical fiber, an optical layer, and a light detection device. The optical fiber has a core, a shell and a protective layer from inside to outside. The optical fiber includes a light input end, a light output end, an opening, and a groove. The opening is arranged between the light input end and the light output end, and the opening is formed in the protective layer and used for exposing the fiber shell. The groove is arranged between the opening and the light output end. At the groove, the thickness of the fiber shell and the thickness of the protective layer are first reduced and then increased from the vicinity of the open end. The optical layer is arranged in the opening, and the refractive index of the optical layer is higher than that of the fiber shell. The light detection device is disposed outside the optical fiber and adjacent to the groove.
In order to make the aforementioned and other features and advantages of the invention more comprehensible, embodiments accompanied with figures are described in detail below.
Drawings
Fig. 1 is a schematic view of a processing apparatus to which a reflected light detection module according to an embodiment of the present invention is applied;
fig. 2 is a schematic diagram of a reflected light detection module according to an embodiment of the invention.
Description of the symbols
1: a processing device;
10: processing a light source;
12: a reflected light detection module;
120: an optical fiber;
1200: fiber core;
1202: fiber shell;
1204: a protective layer;
122: an optical layer;
124: a light detection device;
14: a machining head;
16. 18: a light transmitting element;
a: an opening;
b: processing the light beam;
b1: stray light;
b': reflecting the light beam;
b1': a light beam;
d: a direction of extension;
g: a groove;
i: a central shaft;
l1, L2: a length;
o: a processing object;
SB: a bottom surface;
SS 1: a first sidewall surface;
SS 2: a second sidewall surface;
ST: a top surface;
t1: a first thickness;
t2: a second thickness;
t1200, T1202, T1204: thickness;
x1: a light input end;
x2: a light output end;
θ 1: a first included angle;
θ 2: and a second included angle.
Detailed Description
Directional phrases used in connection with embodiments, such as: the upper, lower, front, rear, left, right, etc. are only referred to the direction of the drawing. Accordingly, the directional terminology is used for purposes of illustration and is in no way limiting.
In the drawings, each drawing illustrates a general feature of a method, structure, or material used in certain exemplary embodiments. These drawings, however, should not be construed as limiting or restricting the scope or nature covered by these exemplary embodiments. For example, the relative sizes, thicknesses, and locations of various layers, regions, or structures may be reduced or exaggerated for clarity.
The terms "first", "second", and the like in the description and in the claims are used for naming discrete (discrete) elements or distinguishing different embodiments or ranges, and are not used for limiting the upper limit or the lower limit of the number of elements, nor the manufacturing order or the arrangement order of the elements. Further, an element/layer disposed on (or over) another element/layer may include the presence or absence of additional elements/layers between two elements/layers, in other words, the element/layer may be disposed directly or indirectly on (or over) the other element/layer. On the other hand, an element/film layer being disposed directly on (or over) another element/film layer means that the two element/film layers are in contact with each other and there are no additional elements/film layers between the two element/film layers.
Fig. 1 is a schematic view of a processing apparatus 1 to which a reflected light detection module 12 according to an embodiment of the present invention is applied. FIG. 2 is a schematic diagram of the reflected light detection module 12 according to an embodiment of the invention. In fig. 1, the reflected light detection module 12 is schematically indicated by a block, and the machining object O is schematically illustrated so as to facilitate understanding of the relative arrangement relationship between each element and the machining object O in the machining apparatus 1. Please refer to fig. 2 for a detailed structure of the reflected light detecting module 12. It should be understood that the reflected light detection module 12 of FIG. 2 is only one exemplary embodiment of the reflected light detection module of the present invention, and simple equivalent changes and modifications made in the specification or claims are still within the scope of the present patent.
Referring to fig. 1, a machining apparatus 1 may be used to machine an object to be machined O. The processing may include, but is not limited to, cutting, splitting, drilling, or welding. The material of the object O may include, but is not limited to, a metal, an alloy, any material that reflects light, or a combination of at least two of the above materials. The machining-target O surface may include a plane surface, an inclined surface, a curved surface, or any other shape surface.
The processing apparatus 1 includes a processing light source 10, a reflected light detection module 12, a processing head 14, a light transmission element 16, and a light transmission element 18. The processing light source 10 and the processing head 14 are respectively located at two opposite ends of the processing device 1, wherein the processing light source 10 is adapted to provide a processing light beam B, and the processing light beam B is output from the processing head 14 to the processing object O. For example, the processing light source 10 may be a laser light source, and the laser light source may include a laser resonator or a multi-stage laser amplifier, but is not limited thereto. Correspondingly, the processing beam B may be a laser beam, and the processing head 14 is a laser head that outputs the laser beam. The output time waveform of the laser beam may include a continuous wave or a pulse wave.
The reflected light detection module 12 is located between the processing light source 10 and the processing head 14, and the reflected light detection module 12 is connected to the processing light source 10 and the processing head 14 through a light transmission element 16 and a light transmission element 18, respectively. The light transmitting element 16 and the light transmitting element 18 are adapted to transmit the processing light beam B, such that the processing light beam B from the processing light source 10 can be sequentially output to the processing object O through the light transmitting element 16, the reflected light detecting module 12, the light transmitting element 18 and the processing head 14, and the reflected light beam B' reflected by the processing object O can be sequentially transmitted back to the reflected light detecting module 12 through the processing head 14 and the light transmitting element 18. For example, each of the light transfer elements 16 and 18 may include an optical fiber. In one embodiment, at least one of the light transmissive element 16 and the light transmissive element 18 may share an optical fiber with the reflected light detection module 12; alternatively, the reflective light detection module 12, the light transmission element 16, and the light transmission element 18 may each include one optical fiber, and the optical fibers may be connected together by a connection mechanism, fusion, or the like.
Referring to fig. 1 and 2, the reflected light detection module 12 includes an optical fiber 120, an optical layer 122, and a light detection device 124. The optical fiber 120 has, from the inside to the outside, a core 1200, a shell 1202, and a protective layer 1204. In detail, the core 1200, the shell 1202 and the protective layer 1204 have the same central axis I. A fiber shell 1202 surrounds and encapsulates the fiber core 1200, and a protective layer 1204 surrounds and encapsulates the fiber shell 1202. In other words, the core 1200, the shell 1202, and the protective layer 1204 are sequentially disposed outward in the radial direction of the optical fiber 120. In addition, the refractive index of the core 1200 is higher than the refractive index of the shell 1202, and the refractive index of the shell 1202 is higher than the refractive index of the protective layer 1204, so that the processing beam B is transmitted towards the processing object O in the core 1200 by Total Internal Reflection (TIR).
The fiber 120 also includes a light input end X1, a light output end X2, an opening a, and a groove G. The light input end X1 and the light output end X2 are two opposite ends of the optical fiber 120, respectively, wherein the light input end X1 is the end of the optical fiber 120 close to the processing light source 10, and the light output end X2 is the end of the optical fiber 120 close to the processing head 14.
The opening a is disposed between the light input end X1 and the light output end X2, and is formed in the protection layer 1204 to expose the fiber case 1202. In one embodiment, the opening a may extend along a circumferential direction of the optical fiber 120 and surround the central axis I of the optical fiber 120 to form a continuous or discontinuous annular groove, and the total length of the annular groove in the circumferential direction may be less than or equal to the circumference of the optical fiber 120.
The groove G is disposed between the opening a and the light output end X2. Similar to the opening a, the groove G may extend in the circumferential direction of the optical fiber 120 and surround the central axis I of the optical fiber 120 to form a continuous or discontinuous annular groove, and the total length of the annular groove in the circumferential direction may be less than or equal to the circumference of the optical fiber 120.
In an embodiment, the groove G can be formed by a method of swinging a tapered cone, but not limited thereto. Forming the groove G using the rocking-tapering method can thin the thickness T1202 of the core fiber 1202 and the thickness T1204 of the protective layer 1204 without changing the thickness T1200 of the core fiber 1200 (or the diameter of the core fiber 1200), thereby forming the groove G.
As shown in fig. 2, the thickness T1200 of the core 1200 is a constant value in the optical fiber 120. In other words, the thickness T1200 of the core 1200 at the overlap with the groove G, the thickness T1200 of the core 1200 at the overlap with the opening a, and the thickness T1200 of the core 1200 at other positions are the same. It should be understood that references herein to thickness refer to the maximum thickness in the cross-section, and that the same thickness encompasses a margin of error within 10%.
At the groove G, the thickness T1202 of the fiber housing 1202 and the thickness T1204 of the protection layer 1204 decrease and then increase from the end adjacent to the opening A. For example, the thickness T1202 of the fiber housing 1202 at the groove G gradually decreases from the first thickness T1 along the extending direction D of the optical fiber 120 and returns to the first thickness T1. Similarly, the thickness T1204 of the protective layer 1204 at the groove G gradually decreases from the second thickness T2 along the extending direction D of the optical fiber 120 and returns to the second thickness T2.
In this embodiment, the thickness T1202 of the fiber housing 1202 is constant outside the groove G, and the thickness T1204 of the protective layer 1204 is constant outside the opening A and the groove G. For example, the thickness T1202 of the fiber housing 1202 outside the groove G is equal to the first thickness T1, and the thickness T1204 of the protection layer 1204 outside the opening A and the groove G is equal to the second thickness T2.
The groove G has a first sidewall surface SS1, a second sidewall surface SS2, a top surface ST, and a bottom surface SB. The second sidewall SS2 is located between the first sidewall SS1 and the opening a, and the bottom SB connects the first sidewall SS1 and the second sidewall SS 2. The top surface ST of the groove G is the outer surface of the protective layer 1204.
The slopes of the first and second sidewalls SS1 and SS2 may be adjusted according to manufacturing process parameters. In the present embodiment, a first included angle θ 1 between the top surface ST of the groove G and the first sidewall surface SS1 is greater than 90 degrees and less than 180 degrees. In addition, the second included angle θ 2 between the top surface ST of the groove G and the second sidewall SS2 may be equal to the first included angle θ 1, but is not limited thereto. According to different manufacturing process parameters or manufacturing modes, the second included angle θ 2 may not be equal to the first included angle θ 1. In one embodiment, the length L1 of the bottom surface SB of the groove G falls within a range of 50 μm to 100 μm, and the length L2 of the groove G falls within a range of 550 μm to 610 μm. However, the shape, length, depth, etc. of the groove G can be adjusted according to actual requirements.
The optical layer 122 is disposed in the opening a, and the refractive index of the optical layer 122 is higher than the refractive index of the fiber housing 1202. In one embodiment, the optical layer 122 may be transparent. For example, the optical layer 122 may be formed by curing a transparent colloid with a high refractive index, but not limited thereto. In one embodiment, the optical layer 122 may be formed of a light absorbing material. In an embodiment, the optical layer 122 may be a stack of layers of a composite material, and the composite material may include a light transmissive material, a light absorbing material, or a combination thereof.
The light detecting device 124 is disposed outside the optical fiber 120 and adjacent to the groove G, and the light detecting device 124 is adapted to detect the light beam B1' emitted from the groove G. For example, the light detecting device 124 may be a photo sensor, but is not limited thereto. In addition, the measurable wavelength range of the optical detection device 124 can be selected according to the processing light beam B outputted by the processing light source 10.
The reflected beam B' reflected by the object O can be transmitted to the reflected light detection module 12 through the processing head 14 and the light transmission element 18 in sequence. In the reflective light detection module 12, the thickness variation of the fiber housing 1202 and the protective layer 1204 in the groove G may break the total internal reflection, so that the light beam (e.g., light beam B1') transmitted in the fiber housing 1202 (or the protective layer 1204) exits the groove G. By receiving the light beam B1 'emitted from the groove G by the light detecting device 124, and estimating the state (such as stability and power) of the processing light source 10 according to the detected optical power variation and deducing the amount of the reflected light beam B' transmitted back to the processing light source 10 through the optical fiber 120, the user can adjust the processing light source 10 accordingly according to the detected result. For example, when the optical power received by the optical detection device 124 is greater than a threshold value, the processing light source 10 is turned off to avoid the processing light source 10 from being damaged by the reflected light beam B'. Thus, the elements in the processing light source 10 can be protected, and the stability and the service life of the processing light source 10 can be improved.
Further, by forming an opening a between the groove G and the processing light source 10 and forming the optical layer 122 having a higher refractive index than the fiber package 1202 in the opening a, stray light B1 (e.g., originating from the processing light beam B entering the fiber package 1202) passing in the fiber package 1202 toward the groove G can exit the optical fiber 120 through the opening a. In other words, by forming the opening a between the groove G and the processing light source 10 and forming the optical layer 122 having a refractive index higher than that of the fiber housing 1202 in the opening a, it is facilitated to discharge the stray light B1 transmitted toward the groove G in the fiber housing 1202, thereby reducing the interference of the stray light B1 and improving the accuracy of the detection result.
In summary, in the embodiments of the present invention, the optical power detection and the noise filtering effect can be achieved by the design of the single optical fiber. The structure of the reflected light detection module is simple and uncomplicated, so the reflected light detection module is easy to maintain and assemble, and the whole cost of a processing device applying the reflected light detection module is saved. In addition, since the state of the processing light source and the amount of reflected light transmitted to the processing light source are estimated by using a part of the reflected light beam (the light beam emitted from the groove), the position of the reflected light detection module (e.g., the light detection device) in the processing device may not be limited by the power of the reflected light beam. In one embodiment, the reflected light detection module may be disposed at a back end of the processing device, for example, the reflected light detection module may be disposed proximate to the processing head.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. A reflected light detection module, comprising:
an optical fiber having, from inside to outside, a core, a shell, and a protective layer, the optical fiber comprising:
a light input end and an opposite light output end;
an opening disposed between the light input end and the light output end and formed in the protective layer to expose the fiber shell; and
a groove disposed between the opening and the light output end, wherein at the groove, the thickness of the fiber shell and the thickness of the protective layer decrease from the vicinity of the opening end and then increase;
the optical layer is arranged in the opening, and the refractive index of the optical layer is higher than that of the fiber shell; and
and the light detection device is arranged outside the optical fiber and is adjacent to the groove.
2. The reflective light detection module of claim 1, wherein the optical layer fills the opening.
3. The reflected light detection module of claim 1, wherein the fiber housing tapers from a first thickness at the groove back to the first thickness, and the protective layer tapers from a second thickness at the groove back to the second thickness.
4. The reflected light detection module of claim 1, wherein the thickness of the fiber housing is constant outside the recess.
5. The reflective light detecting module according to claim 1, wherein the thickness of the protective layer is constant outside the opening and the groove.
6. The reflective light detecting module according to claim 1, wherein the recess has a first sidewall surface and a second sidewall surface between the first sidewall surface and the opening, and a first angle between a top surface of the recess and the first sidewall surface is greater than 90 degrees and less than 180 degrees.
7. The reflected light detecting module of claim 6, wherein a second included angle between the top surface of the groove and the second sidewall surface is equal to the first included angle.
8. The reflected light detection module according to claim 1, wherein a length of a bottom surface of the groove falls within a range of 50 μm to 100 μm, and a length of the groove falls within a range of 550 μm to 610 μm.
9. A reflected light detection module according to claim 1, wherein the optical layer is transparent.
10. A reflected light detection module according to claim 1, wherein the light detection means is a photosensor.
CN201911391434.8A 2019-12-20 2019-12-30 Reflected light detection module Active CN113008365B (en)

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JP6334952B2 (en) * 2014-02-24 2018-05-30 株式会社フジクラ Optical power monitoring device, fiber laser, and optical power monitoring method
JP6464647B2 (en) * 2014-10-01 2019-02-06 株式会社ソシオネクスト Moving image processing method, moving image transmission apparatus, moving image processing system, and moving image processing program
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JP3159763U (en) * 2007-10-22 2010-06-03 フォワード エレクトロニクス カンパニー リミテッド Surface plasmon resonance fiber sensor
US20140313513A1 (en) * 2013-04-23 2014-10-23 Kai-Hsiu Liao Power monitor for optical fiber using background scattering
US20170038514A1 (en) * 2014-04-25 2017-02-09 Olympus Corporation Light source apparatus and endoscope apparatus with the light source apparatus
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