CN112892619B - PDMS (polydimethylsiloxane) master mold with arc-shaped edge section, micro-fluidic valve and chip and preparation thereof - Google Patents
PDMS (polydimethylsiloxane) master mold with arc-shaped edge section, micro-fluidic valve and chip and preparation thereof Download PDFInfo
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- 239000004205 dimethyl polysiloxane Substances 0.000 title claims abstract description 145
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 title claims abstract description 145
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- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims abstract 24
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
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- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 claims description 4
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- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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Abstract
The invention discloses a PDMS master model with an arc-shaped edge section, a micro-fluidic valve, a chip and preparation thereof. The method for manufacturing the PDMS master model with the arc-shaped edge section structure by combining the isotropic etching of the printed circuit board with the surface modification of PDMS is simple, low in cost and effective. Microfluidic chips with channels of curved edge cross-section can be created by using a prepared PDMS master. The invention further demonstrates that AC can make microfluidic pneumatic valves, called arc edge cross section microfluidic valves, that can be used for multi-way control, compatible large scale integration, liquid control, single cell manipulation and detection.
Description
Technical Field
The invention relates to the technical field of microfluidic chips, in particular to a PDMS master model with an arc-shaped edge section, a microfluidic valve, a chip and preparation thereof.
Background
The rapid development of microfluidic technology makes important contributions to the development of the fields of chemistry, biology, clinical medicine, bioengineering and the like. The fabrication of microfluidic devices can be achieved by a variety of methods, such as soft lithography, micro milling, Printed Circuit Board (PCB) etching, and 3D printing. Various substrate materials, such as glass, silicone polymers, plastics, and even paper, have been adopted for microfluidic applications. The development of different manufacturing techniques and matrix materials has enabled microfluidic technology to serve multiple functions and to become more and more readily available in both academic and industrial circles. Low cost and mass production manufacturing processes are very important for mass production.
Direct fabrication of microfluidic chips includes 3D printing, laser micromachining and stereolithography, and molding, which is certainly the most suitable and economical method in mass production.
In the mold manufacturing method, Printed Circuit Board (PCB) technology has several advantages: (1) the precision machining process is efficient, low in cost and easy to achieve without clean room equipment; (2) the copper master mold is robust and can be used to fabricate microfluidic structures with heights from a few hundred microns to a hundred microns by a single step etch; (3) PDMS microfluidic chips prepared from PCB master molds have been proven to have biocompatibility; (4) typically with a photoresist pre-coat film and can be prepared by commercial service.
Microfluidic valves are becoming increasingly indispensable as a key component in microfluidic systems, as it is a key component for continuous sample processing, highly parallel analysis, automated fluid and particle manipulation. Therefore, much effort has been focused on the fabrication of microfluidic valves using new materials of different technologies, such as monolithic PDMS valves, clapper diaphragm valves, microvalves in wax microfluidics, 3D printed microfluidic valves, etc. It is reasonable to believe that these valves can make PDMS, valve flaps and paper chips more robust. However, other techniques than multiple soft lithography cannot be used for large-scale production, depending on the molding method. Furthermore, monolithic PDMS valves have significant advantages over other types of valves: (1) functional diversity: solenoid valves, peristaltic pumps, mixers and traps (sieve valves); (2) feasible large-scale integration; (3) durable and long-lasting driving. Therefore, they are the microvalves most widely adopted and reported in microfluidics.
The invention provides a method for preparing a PDMS master mold with an arc-shaped cross-sectional structure by a simple, low-cost, effective and easily-obtained method based on the combination of PCB isotropic etching and PDMS surface modification. Using the PDMS master, microfluidic chips containing channels (ACs) with arc-shaped cross-sections can be generated. The present invention further demonstrates that ACs can make monolithic pneumatic valves, referred to as curved section monolithic valves (AMVs). AMVs chip can be used for multiplex control, compatible large scale integration, and used for liquid control, single cell operation and detection. This method of making PDMS molds has 6 advantages: (1) low cost (PCB is much cheaper than SU 8); (2) accessibility (ultraviolet light, even sunlight can be used for exposure); (3) efficiency (microchannel height ranges from a few microns to a hundred microns by one step etching); (4) simple (PCB etch is very easy to learn); (5) expanding production (the PDMS mold can be further expanded through a PCB master mold); 6) functionality (AMVs chips for liquid and particle handling can be fabricated using a one-step PCB etching process).
Disclosure of Invention
A first object of the present invention is to provide a method of manufacturing a PDMS master mold having an arc-shaped edge section by combining Printed Circuit Board (PCB) isotropic etching with PDMS (polydimethylsiloxane) surface modification, which is simple, low-cost, and efficient.
A second object of the present invention is to provide a PDMS master mold having an arc-shaped edge section obtained by the above preparation method of the first object.
The third purpose of the invention is to provide a preparation method of the arc-shaped edge section micro-fluidic valve; the preparation method uses the PDMS master mold of the second purpose above to generate a fluid layer with a channel with an arc-shaped edge cross section, and then aligns with the control layer to prepare an arc section microfluidic valve (AMV).
A fourth object of the present invention is to provide a microfluidic valve with an arc-shaped edge cross section obtained by the preparation method in the third object above; the valve can be used for multi-path control, compatible large-scale integration, liquid control, single cell operation and detection.
A fifth object of the present invention is to provide a microfluidic chip comprising the above microfluidic valve with an arc-shaped edge cross section.
In order to achieve the first object, the invention adopts the following technical scheme:
the first aspect of the present invention provides a method for preparing a PDMS master mold having an arc-shaped edge section, comprising the steps of:
s100, forming a groove with an arc-shaped edge section on a Printed Circuit Board (PCB) with photoresist through patterning to obtain a PCB female die;
and S200, pouring the PDMS prepolymer on the PCB master model and polymerizing to obtain the PDMS master model with the arc-shaped edge section.
The preparation method combines Printed Circuit Board (PCB) isotropic etching and PDMS (polydimethylsiloxane) surface modification, and casts and cures PDMS prepolymer on the PCB, and the PDMS copies are used as PDMS master molds.
The printed circuit board PCB in this manufacturing method is commercially available directly, usually with a photoresist pre-coat film.
In the preparation method of the PDMS master model with the arc-shaped edge section, the selection and the proportion of the base material and the curing agent in the PDMS prepolymer are adjusted according to needs, and the base material and the curing agent can be purchased directly or configured after being purchased; preferably, the mass ratio of the binder and the curing agent in the PDMS prepolymer is 5: 1.
In a preferred embodiment of the present invention, in the above method for preparing a PDMS master mold having an arc-shaped edge section, the patterning process includes the steps of:
s110, covering a photomask on the printed circuit board with the photoresist, and exposing;
s120, developing, and transferring the pattern to the photoresist;
s130, etching by using a ferric trichloride solution to form a groove on a copper plate in the printed circuit board; the groove is formed by etching, the edge of the groove is arc-shaped, and the cross section of the groove is an arc-shaped edge cross section;
and S140, removing the photoresist by using acetone to obtain the PCB master mold.
In this preferred embodiment, the exposure may be with UV light, but also with other light sources, such as sunlight; preferably, the exposure employs UV light.
As will be readily understood by those skilled in the art, the above patterning process is a conventional technique in the art, and the above patterning to form the grooves can be achieved by using a positive photoresist or a negative photoresist, which is not listed herein.
In a preferred embodiment of the present invention, in the above method for preparing a PDMS master mold having an arc-shaped edge section, the step of S200 specifically includes:
s210, pouring the PDMS prepolymer on the PCB master model,
s220, polymerizing the PDMS prepolymer on the PCB master model;
and S230, peeling the polymerized PDMS, and treating the PDMS by using poloxamer 407 to obtain a PDMS master model with an arc-shaped edge section.
In S230, regarding the process of treating the polymerized PDMS by using poloxamer 407, in one embodiment of the present invention, poloxamer 407 (i.e., PF127) is directly soaked for 3 hours.
In order to achieve the second object, the invention adopts the following technical scheme:
the invention provides a PDMS master model with an arc-shaped edge section, which is prepared by the preparation method of the PDMS master model with the arc-shaped edge section provided by the first aspect.
The PDMS master mold with the arc-shaped edge section has the bulge corresponding to the groove on the PCB master mold, and the arc-shaped edge is arranged on the cross section of the bulge. The PDMS master can be used for preparing a fluid layer with an arc-shaped edge section channel, and further can be used for preparing an arc-shaped edge section micro-fluidic valve (AMV) and a micro-fluidic chip comprising the arc-shaped edge section micro-fluidic valve together with a control layer.
The size of the protrusion in the PDMS master mold having the arc-shaped edge section may be controlled by adjusting the size of the pattern in the photomask and the etching time. The size of the protrusion corresponds to the size of a channel with an arc-shaped edge cross section prepared by using the PDMS master mold, and the size of the pattern in the photomask and the etching time can be specifically adjusted according to the size requirement of the channel, which is not limited in the present invention.
In order to achieve the third object, the invention adopts the following technical scheme:
the invention provides a preparation method of a micro-fluidic valve with an arc-shaped edge section, which comprises the following steps:
s300, forming a bulge with an arc-shaped edge section on a Printed Circuit Board (PCB) with photoresist through patterning to obtain a PCB control layer female die;
s400, rotationally coating PDMS prepolymer on the PCB control layer female die, and polymerizing to obtain a control layer with a control channel;
s500, preparing a fluid layer having an arc-shaped edge cross-section channel using the PDMS master mold having an arc-shaped edge cross-section of the above second aspect;
s600, aligning the control layer and the fluid layer, and sealing by using a flat PDMS layer to obtain the micro-fluidic valve with the arc-shaped edge section.
The arc-shaped edge section microfluidic valve comprises a fluid layer and a control layer, and correspondingly comprises an arc-shaped edge section channel and a control channel.
The printed circuit board PCB in this manufacturing method is directly commercially available, as is the printed circuit board PCB in the manufacturing method of the first aspect of the invention, typically with a photoresist pre-coat film.
In the preparation method of the PDMS master model with the arc-shaped edge section, the proportion of the base material and the curing agent in the PDMS prepolymer is adjusted according to needs, and the base material and the curing agent can be purchased directly or configured after being purchased; preferably, the mass ratio of the binder and the curing agent in the PDMS prepolymer is 20: 1.
In a preferred embodiment of the present invention, in the above method for manufacturing a microfluidic valve with an arc-shaped edge cross-section, the patterning process in S300 includes the steps of:
s310, covering a photomask on the printed circuit board with the photoresist, and exposing;
s320, developing, and transferring the pattern to the photoresist;
s330, etching by using a ferric trichloride solution to form a bulge on a copper plate in the printed circuit board; the bulge is formed by etching, the edge of the bulge is an inwards-concave arc shape, and the cross section of the bulge is an inwards-concave arc edge section;
and S340, removing the photoresist by using acetone to obtain a PCB control layer female die.
In this preferred embodiment, the exposure may be with UV light, but also with other light sources, such as sunlight; preferably, the exposure is with UV light.
As will be readily understood by those skilled in the art, the above patterning process is a conventional technique in the art, and the purpose of forming the protrusions by patterning can be achieved by using either a positive photoresist or a negative photoresist, which is not listed herein.
In the above method for manufacturing a microfluidic valve with an arc-shaped edge cross section, the process for manufacturing the fluid layer in S500 specifically includes: and pouring the PDMS prepolymer onto the PDMS master model provided by the second aspect of the present invention, curing, and peeling off to obtain the fluid layer.
In the preparation process of the fluid layer, the proportion of the base material and the curing agent in the PDMS prepolymer is adjusted according to the needs, and the PDMS prepolymer can be directly purchased or configured after being purchased; preferably, the mass ratio of the binder and the curing agent in the PDMS prepolymer is 5: 1. In one embodiment of the present invention, the fluid layer is in accordance with the PDMS prepolymer used for the PDMS master.
In the above method for manufacturing the microfluidic valve with the arc-shaped edge section, the flat PDMS layer in S600 is partially cured, and cured after sealing.
In the above, the specific conditions of polymerization, curing, partial curing, etc. mentioned in the preparation method of the present invention can be optimally selected by those skilled in the art according to the specific kinds and proportions of the base material and the curing agent in the specific prepolymer; the invention is not limited thereto.
In order to achieve the fourth object, the invention adopts the following technical scheme:
the invention provides a microfluidic valve with an arc-shaped edge section, which is prepared by the preparation method of the microfluidic valve with the arc-shaped edge section provided by the third aspect.
The size of a control channel in the microfluidic valve with the arc-shaped edge section corresponds to the size of a bulge in a female die of a PCB control layer, and the control can be performed by adjusting the size of a pattern in a photomask and the etching time; those skilled in the art can adjust the size of the pattern in the photomask and the etching time according to the size requirement of the control channel, which is not limited by the present invention.
In order to achieve the fifth object, the invention adopts the following technical scheme:
a fifth aspect of the invention provides a microfluidic chip comprising the arc-shaped edge cross-section microfluidic valve provided in the fourth aspect above.
Further, the microfluidic chip comprises a self-made controller, and the self-made controller comprises 8 electromagnetic valves for driving the control channels.
The present invention provides a method for manufacturing a PDMS master mold having an arc-shaped edge cross-sectional structure by combining Printed Circuit Board (PCB) isotropic etching with PDMS (polydimethylsiloxane) surface modification, which is simple, low-cost, and effective. A microfluidic chip with an arc section microchannel (AC) may be generated by using a prepared PDMS master. The present invention further demonstrates that AC can make microfluidic pneumatic valves, called arc edge cross section microfluidic valves (AMV), which can be used for multi-path control, compatible large scale integration, liquid control, single cell manipulation and detection.
The invention has the following beneficial effects:
1) the cost is low: PCB is much cheaper than SU 8;
2) ease of use: ultraviolet light, even sunlight, can be used for exposure;
3) efficiency: etching in one step, wherein the height of the micro-channel ranges from several micrometers to 100 micrometers;
4) the method is simple: PCB etching is very easy to learn;
5) expanding production: the PDMS mold can be further manufactured through a PCB master mold;
6) the functions are as follows: AMV chips for liquid and particle operations can be manufactured by a one-step PCB etching method.
Drawings
Fig. 1 is a schematic view of S110 in the method of preparing the PDMS master model in example 1.
Fig. 2 is a schematic view of S120 in the method of preparing the PDMS master model in example 1.
Fig. 3 is a schematic view of S130 in the method of preparing the PDMS master model in example 1.
Fig. 4 is a schematic view of S140 in the method of preparing the PDMS master model in example 1.
Fig. 5 is a schematic view of S210 in the method of preparing the PDMS master model in example 1.
Fig. 6 is a schematic view of S220 in the method of preparing the PDMS master model in example 1.
Fig. 7 is a schematic view of S230 in the method of preparing the PDMS master model in example 1.
Fig. 8 is a schematic view of S240 in the method of preparing the PDMS master model in example 1.
FIG. 9a is a PDMS master, obtained after etching for 25 minutes, using a photomask having a pattern with a width of 35 μm in example 2.
FIG. 9b is a schematic view of a PDMS master, obtained after etching for 25 minutes, using a photomask having a 70 μm wide pattern in example 2.
Fig. 9c is a PDMS master model obtained after etching for 25 minutes using a photomask having a 140 μm wide pattern in example 2.
Fig. 9d is an arc-shaped edge cross-sectional channel (AC) prepared using the PDMS master in fig. 9 a.
Fig. 9e is an arc-shaped edge cross-sectional channel (AC) prepared using the PDMS master in fig. 9 b.
Fig. 9f is an arc-shaped edge cross-sectional channel (AC) prepared using the PDMS master in fig. 9 c.
FIG. 10a is a PDMS master after 10min of etching using a 35 μm wide patterned photomask in example 3.
FIG. 10b is the PDMS master after 25min of etching using a 35 μm wide pattern of the photomask of example 3.
FIG. 10c is the PDMS master after being etched for 50min using a 35 μm wide pattern photomask in example 3.
FIG. 10d is the PDMS master after being etched for 75min using a 35 μm wide patterned photomask in example 3.
Fig. 10e is an arc-shaped edge cross-sectional channel (AC) prepared using the PDMS master in fig. 10 a.
Fig. 10f is an arc-shaped edge cross-sectional channel (AC) prepared using the PDMS master in fig. 10 b.
Fig. 10g is an arc-shaped edge cross-sectional channel (AC) prepared using the PDMS master in fig. 10 c.
Fig. 10h is an arc-shaped edge cross-sectional channel (AC) prepared using the PDMS master in fig. 10 d.
Fig. 11 is a graph of 40 μm deep grooves made using the PDMS master in example 4, scale bar: 20 μm.
Fig. 12 is a graph showing 100 μm deep grooves formed using the PDMS master in example 4, scale bar: 20 μm.
Fig. 13 is a schematic diagram of S310 in the method for manufacturing the micro fluidic valve with the arc-shaped edge section in example 5.
Fig. 14 is a schematic diagram of S320 in the method for manufacturing the micro fluidic valve with the arc-shaped edge section in example 5.
Fig. 15 is a schematic diagram of S330 in the method for manufacturing the micro fluidic valve with the arc-shaped edge section in example 5.
Fig. 16 is a schematic diagram of S340 and S400 in the method of manufacturing the arc-shaped edge cross-section microfluidic valve in example 5.
Fig. 17 is one of the schematic diagrams of S600 in the method for manufacturing the micro fluidic valve with the arc-shaped edge section in example 5.
Fig. 18 is a second schematic diagram of S600 in the method for manufacturing the microfluidic valve with the arc-shaped edge cross-section according to example 5.
Fig. 19a is an arc-shaped edge cross-section microfluidic valve (AMV) of a control layer fabricated in example 6, scale bar: 50 μm.
FIG. 19b is a view of the fluid flow through an arcuate edge cross section single piece valve (AMV) when not closed.
FIG. 19c shows that the arcuate edge cross section single piece valve (AMV) fabricated in example 6 using 2000rpm spin coating of PDMS prepolymer onto the control layer master mold is not completely closed.
FIG. 19d is a graph of the complete closure of the curved edge cross section monolithic valve (AMV) made in example 6 using 3000rpm spin coating of PDMS prepolymer onto the control layer master mold.
FIG. 20a is an arcuate edge cross-sectional channel (AC) produced using a 25min etch in example 7.
FIG. 20b is an arcuate edge cross-sectional channel (AC) produced using a 50min etch in example 7.
FIG. 20c is a fluorescent image of a 110 μm wide control channel produced by 3000rpm (20 μm thick) spin coating in example 7.
FIG. 20d is a fluorescent image of a 110 μm wide control channel produced by spin coating at 4000rpm (20 μm thick) in example 7.
Description of the reference numerals:
10-printed circuit board, 11-substrate, 12-copper plate, 13-photoresist, 20-photomask, 30-UV illumination, 40-pattern, 50-groove, 51-groove edge, 60-PDMS master mold, 61-Pluronic F-127, 62-polymerized PDMS, 70-arc edge cross section channel (AC);
100-fluid layer, 200-control layer, 300-partially cured planar PDMS.
Detailed Description
In order to more clearly illustrate the present invention, the present invention is further described below in conjunction with preferred embodiments. It is to be understood by persons skilled in the art that the following detailed description is illustrative and not restrictive, and is not to be taken as limiting the scope of the invention.
Example 1
This example provides a typical method for preparing a PDMS master model:
s110, as shown in fig. 1, the printed circuit board 10 with the photoresist 13 is covered with a photomask 20 and exposed by UV light 30. The printed circuit board 10 is commercially available and includes a substrate 11, a copper plate 12 and a photoresist 13.
S120, developing is carried out, and the pattern 40 is transferred to the photoresist 13; as shown in fig. 2.
S130, using FeCl3Solution etching to form a groove 50 in the copper plate 12 in the printed circuit board; the groove 50 is formed by etching, the edge 51 of the groove is arc-shaped, and the cross section of the groove is an arc-shaped edge section; as shown in fig. 3.
And S140, removing the photoresist 13 by using acetone to obtain a PCB master mold, as shown in FIG. 4.
S210, a PDMS prepolymer (base: curing agent: 5:1, w.t.; Sylgard 184, Dow Corning, Midland, MI) was poured onto the PCB master, as shown in fig. 5.
S220, polymerizing the PDMS prepolymer on the PCB master model; as shown in fig. 6. Illustratively, cure is for 30 minutes at 65 ℃.
S230, the polymerized PDMS 62 was peeled off and surface-treated with 2% Pluronic F-127(PF127)61 for 3 hours. After drying the surface (about 30 minutes), these PDMS replicas served as the PDMS master 60; as shown in fig. 7.
S240, pouring a PDMS prepolymer (base material: curing agent: 5:1, w.t.) onto the PDMS master mold 60, curing, and peeling to obtain an arc-shaped edge cross-sectional channel (AC) 70; as shown in fig. 8. The polymeric PDMS replica with AC features was easily peeled off from the PDMS master.
Example 2
Using the typical preparation process in example 1, a PDMS master was prepared after etching for 25 minutes using photomasks having patterns of widths of 35 μm, 70 μm, and 140 μm, respectively. The resulting PDMS master was shown in fig. 9 a-9 c.
Accordingly, arc-shaped edge cross-sectional channels (AC) prepared using the resulting PDMS master were as shown in fig. 9d to 9 f.
The width of the protrusions in the PDMS master mold having the arc-shaped edge section can be controlled by adjusting the width of the pattern in the photomask under the condition that the etching time is constant. The width of the protrusions corresponds to the width of the channel AC having an arc-shaped edge cross-section prepared using the PDMS master, and the width of the pattern in the photomask may be adjusted particularly according to the width requirement for the channel.
Example 3
The PDMS master was fabricated after etching for 10min, 25min, 50min, and 75min using a photomask having a pattern of 35 μm width using the typical fabrication process in example 1, respectively. The resulting PDMS master was shown in fig. 10 a-10 d.
Accordingly, an arc-shaped edge cross-sectional channel (AC) prepared using the resulting PDMS master is shown in fig. 10e to 10 h.
The size of the protrusion in the PDMS master mold having the arc-shaped edge section can be controlled by adjusting the etching time under the condition that the pattern width is constant. The size of the protrusion corresponds to the size of the channel AC having an arc-shaped edge cross-section prepared using the PDMS master, and the etching time may be adjusted particularly according to the size requirement for the channel.
Example 4
Using the typical preparation procedure in example 1, a PDMS master was prepared using different PCBs; and the protrusions in the PDMS master model are a plurality of protrusions which are arranged in parallel. Wherein the copper plate thickness is different in different PCBs, 40 μm and 100 μm, respectively.
Then, PDMS replicas having a plurality of grooves were respectively prepared using the prepared PDMS master molds. As shown in fig. 11 and 12, respectively.
As can be seen, the depth of the recess depends on the thickness of the copper layer.
Example 5
This example provides a typical method for preparing a PDMS master mold:
s310, covering the printed circuit board with the photoresist with the photomask 20, and exposing through UV; as shown in fig. 13.
S320, developing, and transferring the pattern to the photoresist; as shown in fig. 14.
S330, using FeCl3Etching the solution to form a bump on a copper plate in the printed circuit board; the bulge is formed by etching, the edge of the bulge is an inwards-concave arc shape, and the cross section of the bulge is an inwards-concave arc edge section; as shown in fig. 15.
And S340, removing the photoresist by using acetone to obtain a PCB control layer female die.
S400, spin-coating a PDMS prepolymer (matrix: curing agent: 20:1, w.t.) on the obtained PCB control layer master mold by using a spin coater (KW-4A, institute of microelectronics of chinese academy of sciences, beijing, china), and polymerizing to obtain a control layer 200 with a control channel; as shown in fig. 16. Illustratively, the polymerization cure conditions herein are partial cure at 65 ℃ for 40 minutes.
S600, aligning the control layer 200 and the fluidic layer 100, as shown in fig. 17, and curing the fluidic layer and the control layer in an oven at 65 ℃ for 50 minutes. The assembly was sealed on glass with partially cured flat PDMS 300, as shown in fig. 18. Finally, the microfluidic device was incubated overnight at 65 ℃; and obtaining the micro-fluidic valve with the arc-shaped edge section.
Example 6
The control layers obtained by spin coating using different etching times and different rotation speeds (3000rpm and 2000rpm) were sealed using the typical preparation process in example 5, and subjected to fluorescent irradiation to check the sealability.
Fig. 19a is an arc edge cross section microfluidic valve (AMV) of the control layer fabricated in example 6, scale bar: 50 μm.
FIG. 19b is a view of the fluid flow through an arcuate edge cross section single piece valve (AMV) when not closed.
FIG. 19c shows that in example 6, the PDMS prepolymer was spin coated onto the control layer master mold using 2000rpm, and the resulting curved edge cross-section single piece valve (AMV) was not completely closed.
FIG. 19d shows the complete closure of the curved edge cross section single piece valve (AMV) made in example 6 using 3000rpm spin coating of PDMS prepolymer onto the control layer master mold.
As shown in fig. 20a, is an arc-shaped edge cross-sectional channel (AC) created using a 25min etch. Scale bar: 50 μm.
As shown in fig. 20b, is an arc-shaped edge cross-sectional channel (AC) created using a 50min etch. Scale bar: 50 μm.
As shown in FIG. 20c, a fluorescence image of a 110 μm wide control channel generated for 3000rpm (20 μm thick) spin coating. As can be seen from the image, a small amount of liquid penetrated the channel. Scale bar: 50 μm.
As shown in FIG. 20d, a fluorescence image of a 110 μm wide control channel produced for 4000rpm (20 μm thick) spin coating. From the image, it is seen that there is no liquid inflow channel at all. Scale bar: 50 μm.
The photoresists in the PCB used in the above embodiments of the present invention are all positive photoresists, and those skilled in the art will readily understand that the negative photoresists can be used for the same purpose, and the photomask may be adjusted accordingly. The above PCB patterning process is a conventional technical means in the art, and only one of the processes is used in the present invention, and is not described herein.
It should be understood that the above-described embodiments of the present invention are examples for clearly illustrating the invention, and are not to be construed as limiting the embodiments of the present invention, and it will be obvious to those skilled in the art that various changes and modifications can be made on the basis of the above description, and it is not intended to exhaust all embodiments, and obvious changes and modifications can be made on the basis of the technical solutions of the present invention.
Claims (11)
1. A preparation method of a PDMS master model with an arc-shaped edge section is characterized by comprising the following steps:
s100, forming a groove with an arc-shaped edge section on the printed circuit board with the photoresist through patterning to obtain a PCB female die;
s200, pouring the PDMS prepolymer on the PCB master model and polymerizing to obtain the PDMS master model with the arc-shaped edge section;
wherein the patterning process in S100 includes the steps of:
s110, covering a photomask on the printed circuit board with the photoresist, and exposing;
s120, developing is carried out, and the pattern is transferred to the photoresist;
s130, etching by using a ferric trichloride solution to form a groove on a copper plate in the printed circuit board; the groove is formed by etching, the edge of the groove is arc-shaped, and the cross section of the groove is an arc-shaped edge section;
s140, removing the photoresist by using acetone to obtain a PCB female die;
the step S200 specifically includes:
s210, pouring the PDMS prepolymer on the PCB master model,
s220, polymerizing the PDMS prepolymer on the PCB master model;
and S230, peeling the polymerized PDMS, and treating the PDMS by using poloxamer 407 to obtain a PDMS master model with an arc-shaped edge section.
2. The method of preparing a PDMS master mold having an arc-shaped edge section according to claim 1, wherein the mass ratio of the binder and the curing agent in the PDMS prepolymer is 5: 1.
3. A PDMS master model having an arc-shaped edge section, which is prepared by the method of preparing the PDMS master model having an arc-shaped edge section of claim 1 or 2.
4. A preparation method of a micro-fluidic valve with an arc-shaped edge section is characterized by comprising the following steps:
s300, forming bulges with arc-shaped edge sections on the printed circuit board with the photoresist through patterning to obtain a PCB control layer female die;
s400, rotationally coating PDMS prepolymer on the PCB control layer female die, and polymerizing to obtain a control layer with a control channel;
s500, preparing a fluid layer with an arc-shaped edge section channel by using the PDMS master model with the arc-shaped edge section, which is disclosed in claim 3;
s600, aligning the control layer and the fluid layer, and sealing by using a flat PDMS layer to obtain the micro-fluidic valve with the arc-shaped edge section;
wherein, the patterning process in S300 includes the steps of:
s310, covering a photomask on the printed circuit board with the photoresist, and exposing;
s320, developing, and transferring the pattern to the photoresist;
s330, etching by using a ferric trichloride solution to form a bulge on a copper plate in the printed circuit board; the bulge is formed by etching, the edge of the bulge is an inwards-concave arc shape, and the cross section of the bulge is an inwards-concave arc edge section;
and S340, removing the photoresist by using acetone to obtain a PCB control layer female die.
5. The method for preparing the microfluidic valve with the arc-shaped edge section according to claim 4, wherein the mass ratio of the base material to the curing agent in the PDMS prepolymer is 20: 1.
6. The method for preparing a microfluidic valve with an arc-shaped edge section according to claim 4, wherein the step S500 of preparing the fluid layer specifically comprises the steps of: pouring a PDMS prepolymer onto the PDMS master model with the arc-shaped edge cross section of claim 3, and peeling off after curing to obtain the fluid layer.
7. The method for preparing a microfluidic valve with an arc-shaped edge section according to claim 6, wherein the ratio of the base material to the curing agent in the PDMS prepolymer used in S500 is 5: 1.
8. The method for preparing a microfluidic valve with an arc-shaped edge section according to claim 4, wherein the flat PDMS layer in S600 is partially cured and then cured after sealing.
9. An arc-shaped edge cross-section microfluidic valve, characterized by being prepared by the method for preparing the arc-shaped edge cross-section microfluidic valve as claimed in any one of the preceding claims 4 to 8.
10. A microfluidic chip comprising the arc-shaped edge cross-section microfluidic valve of claim 9.
11. The microfluidic chip according to claim 10, wherein the microfluidic chip comprises a home-made controller, and the home-made controller comprises 8 electromagnetic valves.
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