CN112763652B - Automatic positioning puncture clamp, internal atmosphere content analyzer and testing method thereof - Google Patents
Automatic positioning puncture clamp, internal atmosphere content analyzer and testing method thereof Download PDFInfo
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- CN112763652B CN112763652B CN202011423642.4A CN202011423642A CN112763652B CN 112763652 B CN112763652 B CN 112763652B CN 202011423642 A CN202011423642 A CN 202011423642A CN 112763652 B CN112763652 B CN 112763652B
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention relates to an automatic positioning puncture clamp, an internal atmosphere content analyzer and a test method thereof, wherein the automatic positioning puncture clamp is used for puncturing a sealed component and comprises a carrying clamping assembly, the sealed component is arranged on the carrying clamping assembly, the carrying clamping assembly comprises a moving module and a clamping piece, the moving module comprises an electric shifter, the electric shifter pushes the sealed component to move to a puncture point along the plane where the sealed component is located and clamps the sealed component, and the clamping piece clamps the sealed component along the direction vertical to the plane; the puncture assembly is arranged on one side, away from the clamping piece, of the sealing component and comprises a puncture needle, and the puncture needle penetrates into the sealing component through a puncture point; and the control system controls the movement of the electric shifter. The application provides an automatic positioning puncture anchor clamps has the advantage that the components and parts puncture position that awaits measuring of automatic accurate positioning can realize accurate puncture to small-size components and parts of awaiting measuring, can not destroy its inner structure during just the puncture.
Description
Technical Field
The invention relates to the technical field of integrated circuit packaging, in particular to an automatic positioning puncture clamp, an internal atmosphere content analyzer and a testing method thereof.
Background
The internal atmosphere content analyzer can effectively detect the internal gas components of the sealed components, has important application in the field of electronic component packaging airtightness detection, and is important equipment for realizing the detection of the sealing reliability of the electronic components by utilizing a destructive physical experiment method. When the existing internal atmosphere content analyzer is used for measuring the air tightness of a sealed component and an integrated circuit, the internal gas of the sealed component needs to be released by a method of puncturing the component by a probe under a vacuum environment, and the internal atmosphere content analysis is completed by analyzing the components of the released gas.
In practical operation, because the relative position between the specimen holder and the puncture probe of the existing internal atmosphere content analyzer is fixed, the puncture needle can only be punctured to a required position by placing a specimen on different positions of the specimen stage by an operator. When the external airtight package is punctured, because the internal structure of the component is not clear and the size of the sealed component is small, the puncture position is not aligned with the cavity body but only punctures the side shell of the component possibly because of the deviation of the needle dropping position during the puncture package operation; or the puncture needle is mistakenly punctured into the internal integrated chip due to the internal complex structure of the uncertain component, the internal chip package is damaged, redundant atmosphere is introduced, and finally component analysis and measurement errors are caused.
The traditional method cannot accurately position the position to be punctured, only can rely on visual experience and experience judgment of an operator, easily causes the conditions of deviation, wrong puncturing and the like in the process of puncturing the component, cannot puncture the component to be punctured or puncture other sealed chips to leak out of redundant atmosphere, and causes measurement errors.
Disclosure of Invention
Based on this, it is necessary to provide an automatic positioning puncturing fixture for solving the problem of atmosphere measurement error caused by inaccurate puncturing position positioning in the detection package chip of the current internal atmosphere content analyzer.
An automatic positioning puncture clamp is used for puncturing a sealed component and comprises a carrying clamping assembly, the sealed component is arranged on the carrying clamping assembly, the carrying clamping assembly comprises a moving module and a clamping piece, the moving module comprises an electric shifter, the electric shifter pushes the sealed component to move to a puncture point along a plane where the sealed component is located and clamps the sealed component, and the clamping piece clamps the sealed component along a direction perpendicular to the plane; the puncture assembly is arranged on one side, away from the clamping piece, of the sealing component, and comprises a puncture needle, and the puncture needle penetrates into the sealing component through the puncture point; a control system that controls movement of the motorized displacer.
Further, still include the closing plate, the closing plate sets up carry thing clamping component with between the puncture component, set up on the closing plate the puncture point, carry thing clamping component with the closing plate forms sealed cavity.
Further, the object holding assembly further comprises an object carrier, the moving module is arranged on the object carrier, the moving module further comprises a stopper, the electric displacer and the stopper are arranged in pair, and the sealing element is held between the stopper and the electric displacer.
Furthermore, the stopper comprises a limiting baffle and a limiting elastic body, the limiting elastic body is connected with the limiting baffle and the object carrier, and the sealing element is clamped between the electric shifter and the limiting baffle.
Furthermore, the object carrier is provided with a positioning point, and the positioning point is a base point for determining the moving distance of the electric shifter.
Further, the object holding assembly further comprises an upper cover plate, the upper cover plate is connected with the object carrier, and the clamping piece penetrates through the upper cover plate to move close to the sealing component.
Furthermore, the puncture assembly further comprises a lower cover plate and an adjusting rod, one end of the adjusting rod is connected with the puncture needle, the other end of the adjusting rod penetrates through the lower cover plate, and the adjusting rod is used for controlling the puncture needle to penetrate into the sealing component.
Further, the device comprises a connecting rod, wherein the connecting rod is sequentially connected with the object carrying clamping assembly, the sealing plate and the puncture assembly, and the connecting rod is used for adjusting the distance between the object carrying clamping assembly, the sealing plate and the puncture assembly.
According to the automatic positioning puncture clamp, the object carrying clamping assembly and the puncture assembly are integrated together, the sealing component is arranged on the object carrying clamping assembly, and the electric shifter on the object carrying clamping assembly can automatically adjust the position of the sealing component, so that the position to be punctured on the electric shifter can be moved to a puncture point on the object carrying clamping assembly, and meanwhile, the sealing component can be clamped along the circumferential direction of the sealing component; in addition, the clamping piece on the loading clamping assembly can compress the sealing component along the direction perpendicular to the sealing component, the three-dimensional positioning clamping of the sealing component is realized through the moving module and the clamping piece, and finally, the puncture needle on the other side of the sealing component penetrates through a puncture point to penetrate into the sealing component, so that the automatic positioning and puncturing of the sealing component are realized. The application provides an automatic positioning puncture anchor clamps has the advantage that can the accurate positioning await measuring components and parts puncture position, especially treats the puncture components and parts to the microminiature and can realize accurate puncture, and the puncture position of the components and parts that await measuring can remove, under the condition of not destroying other packaging structure of the inside components and parts that await measuring, can treat the puncture components and parts to have little cavity structure and realize accurate puncture, and then improve the detection efficiency of the components and parts that await measuring, have better market using value.
Further, an inside atmosphere content analyzer is provided, including above automatic positioning puncture anchor clamps, still include X-ray scanner, X-ray scanner is used for confirming the position of waiting to puncture of sealed components and parts.
The application provides an inside atmosphere content analysis appearance scans the sealed components and parts that need puncture through X-ray scanner, obtains by X-ray machine scanner and treats puncture sealed components and parts inside structure picture to denoising, sharpening, promoting basic processing such as contrast to the image, carry out digital coordinate to the inside structure picture pixel after handling, confirm every part and treat the coordinate that the puncture position corresponds. Through frame extraction and pixel coordinate location, the calibration of the coordinates of the position to be punctured is realized, and the automatic positioning puncturing clamp is guided by an own upper computer of the atmosphere content analyzer to move the position to be punctured to the position right above the puncture needle, so that accurate positioning and puncturing are realized, and further the detection of the atmosphere content in the sealed component is facilitated. The problem of current inside atmosphere content analysis appearance can only rely on experience or producer legend to confirm roughly that treat the puncture position, arouse puncture position deviation easily, release other built-in chip encapsulated gases and arouse measuring error is solved, the irreversible loss that sealed components and parts inner structure is destroyed and arouse because of the puncture position is inaccurate has been avoided.
Further, there is provided an internal atmosphere content testing method including the above-described internal atmosphere content analyzer, including the steps of:
placing a sealing component in a carrier of an automatic positioning puncture clamp, wherein an electric shifter is arranged on the carrier;
scanning the sealed component by using an X-ray scanner, and calibrating the coordinate of the position to be punctured on the sealed component;
scanning the automatic positioning puncture clamp by using an X-ray scanner, and calibrating the coordinates of a puncture point on the automatic positioning puncture clamp;
judging whether the coordinates of the position to be punctured are consistent with the coordinates of the puncture point or not;
controlling the electric shifter to push the sealing component along the plane of the sealing component, so that the coordinate of the position to be punctured is superposed with the coordinate of the puncture point;
and clamping the sealing component, and adjusting a puncture needle to penetrate through the puncture point to the position to be punctured.
The application provides an inside atmosphere content test method, to having inside atmosphere content analysis appearance can not obtain sealed components and parts integrated circuit inner structure, easily cause the problem that puncture position error arouses atmosphere measuring error, through portable accurate positioning's inside atmosphere content analysis appearance, and utilize inside atmosphere content analysis appearance host computer to carry out frame extraction, pixel coordinated location to the sealed components and parts inner structure of treating that obtains by X-ray scanner, make the position of treating puncture on the sealed components and parts of treating puncture coincide with the puncture point, the accurate positioning puncture is realized to final cooperation pjncture needle. The internal atmosphere content testing method provided by the application can realize accurate puncture especially for a micro component to be punctured, improves the internal atmosphere detection effect, and simultaneously avoids the damage to the structure of the component to be punctured in the puncturing process.
Drawings
FIG. 1 is a schematic view of an automatically positioning piercing fixture according to an embodiment of the present application;
FIG. 2 is an exploded view of an automatically positioning piercing fixture according to one embodiment of the present application;
FIG. 3 is a perspective view of a carrier platform of an automated positioning piercing fixture according to an embodiment of the present application;
FIG. 4 is a perspective view of a clamping assembly of the self-positioning piercing fixture according to one embodiment of the present application;
FIG. 5 is a perspective view of a piercing assembly of an automatically positioning piercing fixture according to one embodiment of the present application;
FIG. 6 is a diagram illustrating an exemplary use of the self-positioning lancing fixture according to the present application;
FIG. 7 is a flow chart of a method for automated internal atmosphere content testing according to an embodiment of the present application.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, embodiments accompanying figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.
Referring to fig. 1, fig. 1 shows a schematic diagram of an automatic positioning puncture fixture according to an embodiment of the present application, the automatic positioning puncture fixture provided in the present application needs to be used in cooperation with an X-ray scanner, a sealed component to be punctured is processed by the X-ray scanner to obtain an X-ray picture of the component to be punctured, the X-ray picture is input to an upper computer, a worker determines a position to be punctured thereon, the position to be punctured is subjected to image coordinate processing, and the coordinate of the position to be punctured is determined as (X-ray position) 0 ,Y 0 ) The coordinate of the puncture point on the automatic positioning puncture clamp is input into the upper computer as (X) 1 ,Y 1 ) Judging the coordinates (X) of the position to be punctured 0 ,Y 0 ) And puncture point coordinates (X) 1 ,Y 1 ) And if the positions are not consistent, the positions need to be moved to the positions to be punctured. The automatic positioning puncture clamp is provided with an electric shifter, the electric shifter can push the sealing component to move along the plane where the sealing component is located, and the electric shifter is arranged along the image coordinate, so that the electric shifter can push the sealing component to move along the X direction and the Y direction respectively.
Specifically, the upper computer firstly judges X in the X direction 0 And X 1 If they are equal, then continue to judge Y 0 And Y 1 Whether the positions are equal or not, if the positions are still equal, the positions to be punctured are superposed with the puncturing points; e.g. X in the X direction 0 And X 1 When the positions are unequal, the control system controls the electric shifter to push the sealing element along the X-axis direction, so that the coordinate X of the position to be punctured on the sealing element on the X-axis direction 0 Move to and with X 1 The electric shifter controls the distance of the sealing component moving along the X axis to be X at the overlapping position 1 -X 0 (ii) a Judgment of Y 0 And Y 1 Whether they are equal, if so, the positioning is ended, e.g. Y 0 And Y 1 When the positions are unequal, the control system controls the electric shifter to push the sealing element along the Y-axis direction to ensure that the coordinate Y of the position to be punctured on the sealing element on the Y-axis direction 0 Move to and with Y 1 The electric shifter controls the distance of the seal component moving along the Y axis to be Y at the overlapping position 1 -Y 0 And finally, the position to be punctured is coincided with the puncture point. At the moment, the position to be punctured on the sealing component coincides with the puncture point, the sealing component is clamped, and then the puncture needle penetrates into the position to be punctured through the puncture point, so that accurate positioning puncture processing on the sealing component is completed.
It should be noted that the above is only a preferred embodiment, and does not mean that the sealing component must be aligned in the X-axis before alignment in the Y-axis. In practical applications, the alignment sequence of the sealing components in the X axis and the Y axis is not specifically required, and a skilled person can set an appropriate alignment step according to actual needs.
Fig. 2 shows an exploded view of an automatic positioning puncture clamp according to an embodiment of the present application, which comprises a carrier holding assembly (not shown), a sealing plate 4, a puncture assembly 30 and a connecting rod 5 in sequence from top to bottom, wherein the carrier holding assembly is preferably composed of detachable components, including a clamping assembly 10 and a carrier platform 20. Wherein, the connecting rod 5 is used for connecting the clamping component 10, the loading platform 20, the sealing plate 4 and the puncture component 30, and adjusting the distance between the other components through the connecting rod 5, and preferably, the connecting rod 5 is a long screw rod. The carrier platform 20 includes a moving module (not shown) and a carrier rack 23, and the moving module includes a plurality of sets of electric displacers 21 and stoppers 22 disposed opposite to each other. The control system controls the electric shifter 21 to push the sealing component to be detected to move in the object platform 20, so that the position to be punctured on the sealing component moves to the position of the puncture point 41, and meanwhile, the circumferential direction of the sealing component is clamped by the electric shifter 21 and the limiting stopper 22, so that the puncture needle 33 is guaranteed to be punctured into the position to be punctured accurately.
Furthermore, the clamping assembly 10 is provided with a clamping member 11 and an upper cover plate 12, the upper cover plate 12 is connected above the object carrier 23, the axial direction of the clamping member 11 is perpendicular to the plane of the object carrying platform 10, and the clamping member 11 penetrates through the upper cover plate 12 and moves close to or away from the object carrying platform 20, so as to press the sealing component in the direction perpendicular to the object carrying platform 20. The sealing plate 4 is connected below the object carrier 23, and the upper cover plate 12 and the sealing plate 4 are arranged on two sides of the object carrier 23, and the distance between the upper cover plate and the sealing plate 4 is adjusted by the connecting rod 5, so that a sealed cavity is formed among the clamping assembly 10, the object carrying platform 20 and the sealing plate 4, and a sealed component to be detected is placed in the sealed cavity. Because carry out sealed components and parts atmosphere and detect and need go on in the closed environment, the location puncture anchor clamps that this application provided can satisfy the tight and puncture of clamp to sealed components and parts promptly, can provide the sealed environment of detecting usefulness again.
This application an preferred embodiment, closing plate and cargo platform integrated design set up the bottom plate promptly on the cargo platform, and sealing element places on the bottom plate, and the pjncture needle can penetrate sealing element through cargo platform's bottom plate. A sealed cavity for placing a sealed component is formed between the carrying platform and the clamping assembly.
Preferably, the carrying platform 20 is horizontally arranged, the electric displacer 21 on the carrying platform can push the sealing component to move along the horizontal plane, and the sealing component is clamped by the electric displacer 21 and the limiter 22, so that the horizontal positioning of the sealing component is realized; the clamping member 11 of the clamping assembly 10 is arranged with its axial direction perpendicular to the horizontal plane, the clamping member 11 can pass through the upper cover plate 12 to approach or depart from the sealing element, preferably, the clamping member 11 is screwed with the upper cover plate 12, and the clamping member 11 can move longitudinally by adjusting the feeding amount of the clamping member 11. Finally, the sealing element is clamped longitudinally by the clamping element 11 located above it and by the base plate of the sealing plate 4 or carrier platform 20 located below it.
It should be noted that, in the automatic positioning puncture clamp shown in fig. 2, for convenience of description of various parts therein, the loading platform 20 is set to be horizontally arranged, the circumferential horizontal fixation of the sealing component is realized through the loading platform 20, and meanwhile, the clamping member 11 is vertically arranged, and the vertical positioning of the sealing component is realized through the clamping member 11. However, this embodiment is only a preferred embodiment, and the horizontal and vertical directions are only relative to fig. 2, and three-dimensional positioning of the sealing component is performed through three directions, which does not mean that the positioning puncture clamp provided by the present application must be arranged in this direction during installation, and installation in other directions can also meet the technical requirements of the present application.
Further, the puncture assembly 30 is disposed at the bottom of the sealing plate 4, the puncture assembly 30 includes an adjusting rod 31, a lower cover plate 32 and a puncture needle 33, the adjusting rod 31 is telescopically movable with respect to the lower cover plate 32, the end of the adjusting rod 31 is connected to the puncture needle 33, the sealing plate 4 is provided with a puncture point 41, and preferably, the puncture point 41 is in a hole shape. Puncture needle 33 is located directly below puncture point 41. In combination with the above, the moving module pushes the sealing component to move along the plane where the object platform 20 is located, so that the position to be punctured on the sealing component moves to the position where the puncturing point 41 is located, and the adjusting rod 31 can enable the puncturing needle 33 to penetrate through the puncturing point 41 and penetrate into the sealing component, thereby achieving puncturing of the sealing component.
According to another embodiment of the application, the puncture point is arranged on the bottom plate of the loading platform, and the puncture needle 33 penetrates through the puncture point on the bottom plate of the loading platform through the adjusting rod 31 to pierce into the sealing component, so that the sealing component is punctured.
According to another embodiment of the application, based on the above invention thought, on one hand, the sealing component needs to be punctured, and on the other hand, the punctured sealing component is required to be in a sealed environment during subsequent detection, the puncture needle can be conveniently penetrated by arranging the elastic material on the bottom plate of the sealing plate or the loading platform, and meanwhile, after the puncture needle is withdrawn, the puncture point is healed due to the resilience of the elastic material, a sealed space can be formed around the sealing component.
Further, above a seal chamber for placing and testing sealed components is formed by clamping component 10, cargo platform 20 and closing plate 4, through adjusting the distance between the three, is convenient for on the one hand get and put sealed components, and on the other hand makes its inseparable laminating in order to form seal chamber, and then is favorable to follow-up to sealed components business turn over puncture detection, in order to promote sealed effect, preferably, sets up the sealing washer between clamping component 10, cargo platform 20 and the closing plate 4.
It should be noted that, the above method, which integrates the test environment for performing the atmosphere detection on the sealed component and the piercing station, is only one preferred embodiment of the present application. This application another kind of embodiment is about to whole location puncture anchor clamps place in vacuum environment, need not to require between clamping component 10, cargo platform 20 and the closing plate 4 closely to laminate in order to form sealed cavity, and the test environment that sealed components and parts atmosphere detected is provided by outside vacuum environment, can realize above technical purpose equally to can reduce the machining precision and the sealed requirement of each part of location puncture anchor clamps, reduction in production cost.
Fig. 3 is a perspective view of a carrier platform of an automatic positioning and puncturing fixture according to an embodiment of the present application, in which the carrier platform 20 includes a plurality of moving modules (not shown) and a carrier rack 23, and a sealing component is disposed between the moving modules, and the sealing component is adjusted on the carrier platform 20 by the moving modules and clamped in a circumferential direction. The moving module is composed of an electric displacer 21 and a stopper 22 which are oppositely arranged, the electric displacer 21 comprises a propelling controller 211 and a push rod 212, and preferably, the propelling controller 211 comprises but is not limited to a stepping motor. The stopper 22 comprises a stopper elastic body 221 and a stopper 222, preferably, the stopper elastic body 221 is a stopper spring, one end of the stopper spring 221 is connected to the article carrier 23, and the other end is connected to the stopper 222. By adopting the structure mode, on one hand, the limit baffle 222 can be matched with the electric displacer 21 to clamp the sealed components, and on the other hand, when the electric displacer 21 pushes the sealed components to move, the limit baffle 222 can not limit the movement of the sealed components. Finally, the push rod 212 is adjusted by the push controller 211 to be close to or far from the limit baffle 222, so that the position to be punctured on the sealing component is moved to the position above the puncture needle 33, and meanwhile, clamping is realized in the circumferential direction of the sealing component.
Preferably, the object stage 20 provided by the present application includes two pairs of moving modules, the two pairs of moving modules are respectively disposed along an X-X direction and a Y-Y direction, the X-X direction is perpendicular to the Y-Y direction, a sealing component to be detected is placed between the electric displacer 21 and the stopper 22, the propulsion controller 211 on the electric displacer 21 is adjusted to push the push rod 212 to move along the X-X or Y-Y direction, and push the sealing component to gradually approach the limiting baffles 222 on both sides, and finally the sealing component is in a fixed state under the clamping of the limiting baffles 222 and the push rod 212, so as to achieve the positioning of the sealing component on the plane of the object stage 20. Furthermore, the push rod 212 can be extended and retracted by adjusting the push controller 211, so as to push the sealing component to move along the X-X direction and the Y-Y direction, and finally, the position to be punctured on the sealing component is moved to the position of the puncture needle 33.
Further, preferably, the object carrier 23 is a frame-shaped structure, the upper and lower parts of which are closed by the upper cover plate 12 and the sealing plate 4 of the clamping assembly 10, the two pairs of moving modules are respectively disposed on the mutually perpendicular side plates of the object carrier 23, a plurality of mounting holes 231 are circumferentially disposed on the outer part of the object carrier 23, and the connecting rod 5 connects the object platform 20 with other parts through the mounting holes 231. In addition, the carrier rack 23 is provided with a positioning point 232, the positioning point 232 is a coordinate base point of two vertical directions X-X and Y-Y, preferably, the positioning point 232 is an inner right angle of the carrier rack 23, and the electric shifter 21 can be assisted by the positioning point 232 to determine the moving distance thereof, so as to realize accurate positioning of the sealed component.
Fig. 4 is a perspective view of a clamping assembly of an automatic positioning puncture clamp according to an embodiment of the present application, and referring to fig. 2-4, a clamping assembly 10 includes a clamping member 11 and an upper cover plate 12, the clamping member 11 penetrates the upper cover plate 12 and can move toward or away from a carrier platform 20 along a Z-Z direction, which is perpendicular to a plane formed by the X-X direction and the Y-Y direction. Preferably, the clamping member 11 is a bolt, the clamping member 11 is in threaded connection with the upper cover plate 12, and the clamping member 11 is close to or far from the loading platform 20 by adjusting the thread pitch, so that the clamping of the sealing component along the Z-Z direction is realized. The outer circumference of the upper cover plate 12 is also provided with a mounting hole 121, and the connecting rod 5 passes through the mounting hole 121 to connect the clamping assembly 10 with other assemblies. Further, in order to facilitate clamping and puncturing of the sealing component, and to make the upper and lower clamping of the sealing component more stable, the clamping member 11 is preferably disposed coaxially with the puncture needle 33.
Fig. 5 is a perspective view illustrating a puncture assembly of an automatic positioning puncture clamp according to an embodiment of the present application, wherein the puncture assembly 30 includes an adjusting rod 31, a lower cover plate 32 and a puncture needle 33, the puncture needle 33 is disposed at an end of the adjusting rod 31, the adjusting rod 31 penetrates the lower cover plate 32 and drives the puncture needle 33 to move closer to or away from the carrier platform 20, preferably, the adjusting rod 31 is in threaded connection with the lower cover plate 32, and the puncture needle 33 is moved by adjusting a thread pitch of the adjusting rod 31. The outer circumference of the lower cover plate 32 is provided with a mounting hole 321, and the connecting rod 5 connects the puncture assembly 30 with other assemblies through the mounting hole 321. The sealing plate 4 is arranged between the loading platform 20 and the puncture assembly 30, a puncture point 41 is arranged on the sealing plate 4, and the puncture needle 33 can penetrate through the puncture point 41 into the sealed cavity and further penetrate into the sealed component therein. Further, a mounting hole 42 is provided in the outer circumferential direction of the seal plate 4, and the connecting rod 5 connects the seal plate 4 to other components and the like through the mounting hole 42.
Fig. 6 shows a using state diagram of an automatic positioning puncture fixture according to an embodiment of the present application, and referring to fig. 1-6, a loading platform 20 includes a rack 23, electric displacers 21 respectively disposed in an X direction and a Y direction, and stoppers 22 respectively disposed in the X direction and the Y direction, wherein the Y direction electric displacers 21 and the Y direction stoppers 22 constitute a Y direction moving module for a sample to be punctured, and the X direction sample electric displacers 21 and the X direction stoppers 22 constitute an X direction moving module for the sample to be punctured. The utility model provides an automatic location puncture anchor clamps that improve still includes control system, and control system and electronic shifter 21 intercommunication make it to promote sealed components and parts and remove along X, Y direction through the motion of control system control electronic shifter 21, and when treating puncture position on the sealed components and parts and being in puncture needle 33 directly over, stop electronic shifter 21's motion, finally realize the purpose of the high precision puncture of fixed point.
Further, the gap among the upper cover plate 12, the loading platform 20 and the sealing plate 4 is adjusted through the connecting rod 5 to form a vacuum operation environment for the sealed component to be punctured; the loading platform 20 can change the position of the sample to be punctured relative to the puncture needle 33 by rotating the moving modules in the X direction and the Y direction according to the coordinates of the position to be punctured, so that the position to be punctured is right above the puncture needle 33; after the position of waiting to puncture of sealing components and parts moves directly over pjncture needle 33, move clamping piece 11 downwards along the Z direction in order to compress tightly sealing components and parts for sealing components and parts can be fixed in three dimension directions, and the pjncture needle 33 that cooperates the liftable at last punctures, realizes the purpose to the accurate location of sealing components and parts and puncture.
According to the automatic positioning puncture clamp, the object carrying clamping assembly and the puncture assembly are integrated together, the sealing component is arranged on the object carrying clamping assembly, and the electric shifter on the object carrying clamping assembly can automatically adjust the position of the sealing component, so that the position to be punctured on the electric shifter can be moved to a puncture point on the object carrying clamping assembly, and meanwhile, the sealing component can be clamped along the circumferential direction of the sealing component; in addition, the clamping piece on the loading clamping assembly can compress the sealing component along the direction perpendicular to the sealing component, the three-dimensional positioning clamping of the sealing component is realized through the moving module and the clamping piece, and finally, the puncture needle on the other side of the sealing component penetrates through a puncture point to penetrate into the sealing component, so that the automatic positioning and puncturing of the sealing component are realized. The application provides an automatic positioning puncture anchor clamps has the advantage that can the accurate positioning components and parts puncture position that awaits measuring, treats especially that puncture components and parts can realize accurate puncture to the microminiature, and the puncture position of components and parts that await measuring can remove, under the condition of not destroying the inside other packaging structure of components and parts that await measuring, can treat puncture components and parts to have little cavity structure and realize accurate puncture, and then improve the detection efficiency of components and parts that await measuring, has better market using value.
Further, this application provides an inside atmosphere content analysis appearance, including above automatic positioning puncture anchor clamps still include X-ray scanner, X-ray scanner is used for confirming the position of waiting to puncture of sealed components and parts. The component to be punctured is processed through an X-ray scanner, an internal structure diagram of the component to be punctured is obtained, the structure diagram is input into an internal atmosphere content analyzer and is arranged in an upper computer, the internal structure diagram of the component to be punctured is denoised, sharpened, the image processing operations such as contrast improvement and the like are carried out, the internal structure frame of the component to be punctured is extracted, then discretization and pixel coordinatization processing are carried out on the extraction result of the internal frame, the coordinate fineness of pixel points is determined according to the size of a puncture probe, the coordinate of each pixel point is established, the position to be punctured determined by scanning is moved to the puncture point on an object carrying platform, and the accurate positioning puncture of the sealing component is realized by matching a positioning puncture clamp.
It should be noted that, in order to ensure that the image edge is clear, the structure division is obvious, and the microstructure is accurately positioned, the upper computer needs to perform image processing such as denoising, sharpening, and contrast improvement on the image and frame extraction to obtain a fine structure of the internal structure of the component to be punctured. The upper computer of the internal atmosphere content analyzer with the frame extraction, the structure discretization and the coordinated positioning is an auxiliary structure of the positioning puncture clamp, the upper computer can adopt a common commercial computer, and the software or algorithm used for image processing is commercially available image processing software, self-editing development software and the like.
The application provides an inside atmosphere content analysis appearance scans the sealed components and parts that need puncture through X-ray scanner, obtains by X-ray machine scanner and treats puncture sealed components and parts inside structure picture to denoising, sharpening, promoting basic processing such as contrast to the image, carry out digital coordinate to the inside structure picture pixel after handling, confirm every part and treat the coordinate that the puncture position corresponds. Through frame extraction and pixel coordinate location, the calibration of the coordinates of the position to be punctured is realized, and the automatic positioning puncturing clamp is guided by an own upper computer of the atmosphere content analyzer to move the position to be punctured to the position right above the puncture needle, so that accurate positioning and puncturing are realized, and further the detection of the atmosphere content in the sealed component is facilitated. The problem of current inside atmosphere content analysis appearance can only rely on experience or producer legend to confirm roughly that treat the puncture position, arouse puncture position deviation easily, release other built-in chip encapsulation gas and arouse measuring error is solved, the irreversible loss of having avoided causing because of puncture position is inaccurate that sealed components and parts inner structure is destroyed and arouse.
Further, the application relates to an internal atmosphere content testing method, which adopts the internal atmosphere content analyzer and comprises the following steps:
s111: placing a sealing component in a carrier of an automatic positioning puncture clamp, wherein an electric shifter is arranged on the carrier;
referring to fig. 2-6, the automatic positioning puncturing fixture comprises, from top to bottom, a clamping assembly 10, a loading platform 20, a sealing plate 4, a puncturing assembly 30, and a connecting rod 5, wherein the connecting rod 5 is used for connecting the clamping assembly 10, the loading platform 20, the sealing plate 4, and the puncturing assembly 30, and adjusting the distance between the other assemblies through the connecting rod 5, and preferably, the connecting rod 5 is a long screw rod. The carrying platform 20 comprises a moving module 21 and a carrying frame 23, the moving module 21 comprises a plurality of sets of electric displacers 21 and stoppers 22 which are arranged oppositely, the sealed component to be detected moves in the carrying platform 20 by adjusting the electric displacers 21, and the sealed component can be clamped between the electric displacers 21 and the stoppers 22.
S112: scanning the sealed component by using an X-ray scanner, and calibrating the coordinate of the position to be punctured on the sealed component;
since the component to be punctured is asymmetric, the initial position point of the coordinate of the component to be punctured (0,0) needs to be set before the X-ray scanner scans the internal structure, any end point on the component to be punctured can be set as the initial position point of (0,0), and the initial position point of (0,0) is set and then the original position is not changed. And scanning the component to be punctured by an X-ray scanner to obtain an internal structure diagram, and inputting the internal structure diagram into an upper computer of the internal atmosphere content analyzer through a data transmission medium (a mobile hard disk, a U disk or a transmission line). The existing conventional digital image processing technology is utilized to perform operations such as denoising, sharpening, contrast improvement and the like on the scanning image of the internal structure, so that the internal structure is clearer, and the determination of the position to be punctured of the sealed component is facilitated. And carrying out pixel discretization on the processed internal structure scanning image, determining the diameter of a pixel point according to the size of the puncture needle, and converting the internal structure scanning image into a pixel discretization image. Setting coordinates for each pixel point according to the determined origin position, converting the internal structure scanning image into a two-dimensional coordinate image, and marking the position to be puncturedThe coordinate is (X) 0 ,Y 0 )。
S113: scanning the automatic positioning puncture clamp by using an X-ray scanner, and calibrating the coordinates of a puncture point on the automatic positioning puncture clamp;
referring to fig. 3, the positioning point 232 is disposed on the carrier rack 23, and the positioning point 232 is two coordinate base points perpendicular to the X-X direction and the Y-Y direction, that is, the positioning point 232 on the carrier rack 23 is also an initial position point with coordinates of (0,0). Preferably, the positioning point 232 is an inner right angle of the carrier rack 23, and the electric shifter 21 can be assisted by the positioning point 232 to determine the moving distance thereof, so as to achieve accurate positioning of the sealing component. Referring to step S112, the X-ray scanner identifies the coordinates of the puncture point 41, and the coordinates of the puncture point 41 are identified as (X) 1 ,Y 1 )。
S114: judging whether the coordinates of the position to be punctured are consistent with the coordinates of the puncture point or not;
the coordinate (X) of the position to be punctured is judged by utilizing an internal atmosphere content analyzer with an upper computer 0 ,Y 0 ) And puncture point coordinates (X) 1 ,Y 1 ) And if the positions are not consistent, the positions need to be moved to the positions to be punctured. The automatic positioning puncture clamp is provided with an electric shifter 21, the electric shifter 21 can push the sealing component to move along the plane where the sealing component is located, and the electric shifter is arranged along the image coordinate, so that the electric shifter can push the sealing component to move along the X direction and the Y direction respectively.
S115: controlling the electric shifter to push the sealing component along the plane of the sealing component, so that the coordinate of the position to be punctured is superposed with the coordinate of the puncture point;
in order to realize coordinated and accurate puncture of a position to be punctured, the automatic positioning puncture clamp with the controllable X, Y direction is designed, the clamp can automatically move a sealing component in a certain range according to the coordinate of the calibrated position to be punctured, and the position to be punctured on the clamp is right above a puncture needle. Specifically, according to the digital coordinates of discrete pixel points of the position to be punctured, the pushing controller 211 in the X direction and the Y direction is adjusted, so that the sample to be punctured is carriedThe carriage 23 moves until the coordinates (X) of the position to be punctured 0 ,Y 0 ) And the puncture point 41 has the coordinate (X) 1 ,Y 1 ) And the superposition is carried out, and at the moment, the position to be punctured of the sample to be punctured is positioned right above the puncture needle 33.
By adopting the mode, when the sample to be punctured is moved, the coordinate (X) of the position to be punctured can be calculated 0 ,Y 0 ) And the coordinates of the puncture point 41 are (X) 1 ,Y 1 ) The distance between the two parts is controlled by the control system to control the displacement of the propulsion controller 211, and finally the coordinate (X) of the position to be punctured is pushed 0 ,Y 0 ) Moves directly above the puncture site 41.
And S116, clamping the sealing component, and adjusting a puncture needle to penetrate through the puncture point to the position to be punctured.
When the position to be punctured is right above the puncturing point 41, the circumferential direction of the sample to be punctured is clamped by the moving module 21, and at this time, the clamping assembly 10 is adjusted to enable the clamping member 11 to press the sealing element along the direction perpendicular to the loading platform 20, so that the sample to be punctured is clamped in the three-dimensional direction. The puncture needle 33 is located at the bottom of the object carrying platform 20, at the moment, the sealing component is clamped by the object carrying platform 20 in the circumferential direction, the top of the sealing component is tightly pressed by the clamping component 10, the puncture needle 33 is arranged at the bottom of the sealing component, and the puncture needle 33 is adjusted to penetrate through the puncture point 41 and penetrate into a position to be punctured, so that the internal atmosphere of a sample to be punctured is released, and the detection of the sample to be punctured is facilitated.
The application provides an internal atmosphere content testing method, can not obtain sealed components and parts integrated circuit inner structure to having internal atmosphere content analysis appearance, easily cause the problem that puncture position mistake arouses atmosphere measuring error, through portable accurate positioning's internal atmosphere content analysis appearance, and utilize internal atmosphere content analysis appearance host computer to carry out the frame extraction to the sealed components and parts inner structure of treating the puncture that obtains by X-ray scanner, pixel coordinate location, make treat puncture position and puncture point coincidence on the sealed components and parts of treating the puncture, finally cooperate the pjncture needle to realize the accurate positioning puncture. The internal atmosphere content testing method provided by the application can realize accurate puncture especially for a micro component to be punctured, improves the internal atmosphere detection effect, and simultaneously avoids the damage to the structure of the component to be punctured in the puncturing process.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. The utility model provides an automatic location puncture anchor clamps for puncture sealing element spare, its characterized in that includes:
the sealing component is arranged on the object carrying clamping assembly, the object carrying clamping assembly comprises a moving module and a clamping piece, the moving module comprises an electric shifter, the electric shifter pushes the sealing component along the plane where the sealing component is located and clamps the sealing component, so that the position to be punctured on the sealing component is moved to a puncture point, and the clamping piece clamps the sealing component along the direction perpendicular to the plane;
the puncture assembly is arranged on one side, away from the clamping piece, of the sealing component, and comprises a puncture needle, and the puncture needle penetrates into the sealing component through the puncture point;
a control system that controls movement of the motorized displacer.
2. The automatically positioning puncture clamp of claim 1, further comprising a sealing plate disposed between the object holding assembly and the puncture assembly, the sealing plate having the puncture point disposed thereon, the object holding assembly and the sealing plate forming a sealed cavity.
3. The automated positioning piercing fixture of claim 1, wherein the carrier holding assembly further comprises a carrier frame, the moving module is disposed on the carrier frame, the moving module further comprises a stopper, the motorized displacer and the stopper are disposed in pairs, and the sealing element is held between the stopper and the motorized displacer.
4. The automatic positioning and piercing fixture of claim 3, wherein the retainer includes a retainer stop and a retainer elastomer, the retainer elastomer couples the retainer stop and the carrier, and the sealing element is captured between the motorized shifter and the retainer stop.
5. The automatic positioning and piercing fixture of claim 3, wherein the carrier has a positioning point, the positioning point being a base point for determining a moving distance of the electric shifter.
6. The self-positioning piercing clamp of claim 3, wherein the carrier holding assembly further includes an upper cover plate coupled to the carrier frame, the clamp member moving through the upper cover plate adjacent to the sealing element.
7. The automatic positioning and puncturing clamp of claim 1, wherein the puncturing assembly further comprises a lower cover plate and an adjusting rod, one end of the adjusting rod is connected with the puncturing needle, the other end of the adjusting rod penetrates through the lower cover plate, and the adjusting rod is used for controlling the puncturing needle to penetrate into the sealing component.
8. The automatic positioning puncture clamp of claim 2, further comprising a connecting rod, wherein the connecting rod is sequentially connected with the object carrying clamping assembly, the sealing plate and the puncture assembly, and the connecting rod is used for adjusting the distance between the object carrying clamping assembly, the sealing plate and the puncture assembly.
9. An internal atmosphere content analyzer comprising the automatic positioning and puncturing fixture as claimed in any one of claims 1 to 8, further comprising an X-ray scanner for determining a position to be punctured of the sealed component.
10. A method for measuring an internal atmosphere content, comprising the internal atmosphere content analyzer according to claim 9, characterized by comprising the steps of:
placing a sealing component in a carrier of an automatic positioning puncture clamp, wherein an electric shifter is arranged on the carrier;
scanning the sealed component by using an X-ray scanner, and calibrating the coordinate of the position to be punctured on the sealed component;
scanning the automatic positioning puncture clamp by using an X-ray scanner, and calibrating the coordinates of a puncture point on the automatic positioning puncture clamp;
judging whether the coordinates of the position to be punctured are consistent with the coordinates of the puncture point or not;
controlling the electric shifter to push the sealing component along the plane of the sealing component, so that the coordinate of the position to be punctured is superposed with the coordinate of the puncture point;
and clamping the sealing component, and adjusting a puncture needle to penetrate through the puncture point to the position to be punctured.
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| US4445390A (en) * | 1982-12-02 | 1984-05-01 | Leco Corporation | Sampling tube and apparatus |
| DE19809460C1 (en) * | 1998-03-06 | 1999-09-30 | Siemens Ag | Medical target device for breathing-compensated punction |
| US7470140B1 (en) * | 2007-06-18 | 2008-12-30 | David Eldridge | Integrated chip clamp adjustment assembly and method |
| US7626405B2 (en) * | 2007-06-18 | 2009-12-01 | David Eldridge | Suspension system and adjustment mechanism for an integrated chip and method |
| CN201262602Y (en) * | 2008-09-12 | 2009-06-24 | 北京圣涛平试验工程技术研究院有限责任公司 | Apparatus for sampling mass spectrometer gas |
| CN102194731B (en) * | 2010-03-12 | 2013-03-27 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Position calibration system and plasma processing device |
| DE102016111647B4 (en) * | 2016-06-24 | 2022-05-12 | Otto-Von-Guericke-Universität Magdeburg | puncture catheter |
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| CN107351012B (en) * | 2017-07-04 | 2020-04-24 | 京东方科技集团股份有限公司 | Positioning device and positioning method using same |
| CN107576760A (en) * | 2017-09-07 | 2018-01-12 | 中国电子产品可靠性与环境试验研究所 | Hermetic seal device inside atmosphere content test fixture and method |
| CN207807229U (en) * | 2017-12-29 | 2018-09-04 | 珠海格力电器股份有限公司 | Positioning fixture and automatic loading and unloading device with it |
| CN108844787B (en) * | 2018-07-10 | 2024-02-13 | 中国工程物理研究院化工材料研究所 | Self-feedback sealed cavity gas sampling device and application thereof |
| CN208637616U (en) * | 2018-09-29 | 2019-03-22 | 哈尔滨市市政工程设计院 | A kind of outdoor cable penetrating cable clamp |
| CN211012827U (en) * | 2019-12-23 | 2020-07-14 | 三英精控（天津）仪器设备有限公司 | High-efficient fixture is used in test of nanometer displacement capacitance sensor |
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