CN112762820A - Calibration device and calibration method of confocal three-dimensional measurement system - Google Patents
Calibration device and calibration method of confocal three-dimensional measurement system Download PDFInfo
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- CN112762820A CN112762820A CN202011441953.3A CN202011441953A CN112762820A CN 112762820 A CN112762820 A CN 112762820A CN 202011441953 A CN202011441953 A CN 202011441953A CN 112762820 A CN112762820 A CN 112762820A
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- 238000005259 measurement Methods 0.000 title claims abstract description 31
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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Abstract
The invention discloses a calibration device and a calibration method of a confocal three-dimensional measurement system, wherein the calibration device comprises: at least one transparent or semitransparent medium layer, wherein each medium layer at least has two chromatographic surfaces; and the supporting frame is used for bearing the medium layer. Compared with the traditional mode that the precise depth information is obtained by a traditional precise stepper, the calibration device is easy to process and customize, low in cost, stable in precision and convenient to transport and store. Secondly, the calibration device is small and portable in structure and can be used as a depth calibration module device of a confocal three-dimensional measurement system.
Description
Technical Field
The invention relates to the technical field of three-dimensional measurement, in particular to a calibration device and a calibration method of a confocal three-dimensional measurement system.
Background
With the rapid development of micro-light, mechanical and electrical technologies, the detection of the fine structure of an object with high precision and high efficiency has become a large research hotspot in the global scientific research field, how to more accurately acquire three-dimensional point cloud data of the object is a hotspot in the three-dimensional measurement field, and precisely because the confocal measurement technology has axial chromatography characteristics and very high depth resolution, the three-dimensional imaging capability of the confocal measurement technology has very high precision, and the confocal measurement technology can be widely applied in the fields of medicine, industry and the like. At present, a three-dimensional reconstruction method for confocal measurement generally realizes axial tomography capability and high resolution by introducing a conjugate light source image and detecting, a lens group is moved or a zoom lens is used for carrying out axial scanning to obtain images of a series of focusing surfaces at different spatial positions, then the positions of the focusing surfaces corresponding to a plurality of chromatographic surfaces in a calibration device are obtained by calculation, and then a mapping relation between the positions of the focusing surfaces corresponding to the chromatographic surfaces and the corresponding actual depths of the chromatographic surfaces is established, so that three-dimensional contour information of the surfaces of objects can be obtained by calculation from the focusing images acquired by a series of systems. In the process of calibrating the position of the focus plane and the actual depth mapping model, accurate depth coordinate data corresponding to different chromatographic planes are acquired by a precise calibration device so as to assist in building the position of the focus plane and the actual depth mapping model.
The traditional method usually adopts a scheme of a precise stepper or a translation stage to obtain precise depth information, a user is difficult to calibrate independently after the product is put on the market, or expensive stepper or translation stage equipment needs to be purchased, and the equipment has the defects of inconvenience in storage, large volume, inconvenience in installation and operation and the like.
Disclosure of Invention
The present invention is intended to solve the above-mentioned technical problems.
In view of the above technical problem, the present invention provides a calibration device of a confocal three-dimensional measurement system, the calibration device comprising:
at least one transparent or semitransparent medium layer, wherein each medium layer at least has two chromatographic surfaces;
and the supporting frame is used for bearing the medium layer.
Preferably, the dielectric layers are at least two layers, wherein adjacent dielectric layers are attached to each other.
Preferably, the thickness of each dielectric layer is the same or different.
Preferably, at least one of the medium layers has a plurality of protrusions formed according to a predetermined value to form chromatographic planes with different thicknesses on the medium layer, and another medium layer adjacent to and bonded to the medium layer has a structure corresponding to the protrusions to form chromatographic planes with different thicknesses.
Preferably, the heights of the plurality of protrusions are the same or different.
Preferably, one chromatographic surface of at least one of the medium layers is an inclined surface so as to gradually change the thickness of the medium layer, and the other medium layer adjacent to and attached to the chromatographic surface has a surface corresponding to the inclined surface so as to gradually change the thickness of the medium layer.
Preferably, the chromatographic planes of the medium layer are planes parallel to each other.
The invention also provides a calibration method of the confocal three-dimensional measurement system, which comprises the following steps:
placing a calibration device in the light path direction of the three-dimensional measurement system, wherein the calibration device comprises at least one transparent or semitransparent medium layer and a support frame for bearing the medium layer, and each medium layer is provided with at least two chromatographic surfaces;
emitting light rays through the three-dimensional measuring system to be irradiated on the medium layer of the calibration device;
acquiring position information of focusing planes of different chromatographic planes through the three-dimensional measurement system;
and establishing a mapping model according to the position information and the actual depth information of different chromatographic planes.
Preferably, the number of the dielectric layers is at least two, and two adjacent dielectric layers are attached to each other.
Preferably, at least one of the medium layers has a plurality of protrusions formed according to a predetermined value to form chromatographic planes with different thicknesses on the medium layer, and another medium layer adjacent to and bonded to the medium layer has a structure corresponding to the protrusions to form chromatographic planes with different thicknesses.
Preferably, one chromatographic surface of at least one of the medium layers is an inclined surface so as to gradually change the thickness of the medium layer, and the other medium layer adjacent to and attached to the chromatographic surface has a surface corresponding to the inclined surface so as to gradually change the thickness of the medium layer.
Preferably, the chromatographic planes of the medium layer are planes parallel to each other.
Compared with the prior art, the invention has at least the following beneficial effects: compared with the traditional mode that the precise depth information is obtained by a traditional precise stepper, the calibration device is easy to process and customize, low in cost, stable in precision and convenient to transport and store. Secondly, the calibration device is small and portable in structure and can be used as a depth calibration module device of a confocal three-dimensional measurement system.
Drawings
Fig. 1 is a schematic structural diagram of a calibration method and a calibration apparatus of a three-dimensional measurement system in an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of another calibration apparatus in the embodiment of the present invention.
Fig. 3 is a schematic structural diagram of another calibration apparatus in an embodiment of the present invention.
Fig. 4 is a flowchart of a calibration method according to an embodiment of the present invention.
Detailed Description
The invention is further illustrated with reference to the following figures and examples.
Example one
Fig. 1 is a schematic diagram of a confocal three-dimensional measurement system calibrated by using a calibration device provided in the present invention, wherein the calibration device 1 includes: at least one transparent or semitransparent medium layer 10, wherein each medium layer 10 at least has two chromatographic surfaces; and a support frame (not shown) for carrying the dielectric layer 10.
As a further improvement, the dielectric layers 10 are at least two layers, wherein adjacent dielectric layers 10 are attached to each other. The multilayer medium layer 10 can provide more chromatographic planes, so that more depth information can be provided, and the three-dimensional measurement system can acquire more chromatographic plane position information during measurement, so that a more comprehensive mapping model can be established.
As shown in fig. 1, the present embodiment is described as the calibration apparatus having two medium layers (a first medium layer 11 and a second medium layer 12), each medium layer has two chromatographic planes, and since the first medium layer 11 and the second medium layer 12 are attached and the two chromatographic planes thereof coincide, the first medium layer 11 and the second medium layer 12 are combined to have a first chromatographic plane 21, a second chromatographic plane 22 and a third chromatographic plane 23, as a preferred embodiment, the chromatographic planes are parallel to each other. The position information of each chromatographic surface can be obtained through a three-dimensional measurement system, and a group of mapping models based on different chromatographic surface focusing positions and different chromatographic surface actual depth information in one-to-one correspondence can be established by combining the depth information of each medium layer (the depth information of the medium is the thickness of the medium).
As an alternative embodiment, the thickness of each of the dielectric layers 10 may be the same or may be different.
In this embodiment, the material of each medium may be glass, air, or other transparent or translucent material. The materials of the dielectric layers may be the same or different. The surface of each dielectric layer may be coated or uncoated.
Example two
Unlike the first embodiment, as shown in fig. 2, the calibration device 1a of the present embodiment also has two dielectric layers (the first dielectric layer 11a and the second dielectric layer 12a), and of course, may also have more than two layers. The first medium layer 11a has a plurality of protrusions 13 formed according to a predetermined value to form chromatographic surfaces (not shown) with different thicknesses on the first medium layer 11a, and the second medium layer 12a adjacent to and bonded to the first medium layer 11a has a structure corresponding to the protrusions 13 to form chromatographic surfaces with different thicknesses, that is, the second medium layer 12a has a plurality of recesses matched with the protrusions 13 to form a seamless bonding. Thus, a plurality of projections 13 can form a plurality of tomographic surfaces, and more positional information can be provided.
Referring to the coordinates in fig. 1, in conjunction with fig. 2, the calibration device may have a plurality of protrusions 13 with different depths on the X-Y plane, the heights of the plurality of protrusions 13 may be the same or different, and in different cases, the plurality of protrusions 13 may be arranged in a linear gradient change manner or in a regular gradient change manner according to a certain rule or coding change such as a state similar to a checkerboard layout.
In the present embodiment, the plurality of tomographic surfaces constituted by the plurality of projections 13 are parallel to each other.
Based on the above, the depth information of the chromatographic surface with higher resolution in depth can be obtained by utilizing the thickness conversion conditions of different media, and the position of the ray in the X-Y plane can be tracked and positioned.
EXAMPLE III
Unlike the first embodiment, as shown in fig. 3, the calibration device 1b of the present embodiment also has two dielectric layers (the first dielectric layer 11b and the second dielectric layer 12b), and of course, may have more than two layers. In this embodiment, one chromatographic surface (the 4 th chromatographic surface 24) of the first medium layer 11b is an inclined surface to gradually change the thickness of the first medium layer 11b, and the other second medium layer 12b adjacent to and bonded to the first medium layer 11b has a surface corresponding to the inclined surface to gradually change the thickness of the second medium layer 12b, that is, the surface where the second medium layer 12b is bonded to the first medium layer 11b is an inclined surface, and the thickness of the second medium layer 12b is gradually changed as a whole.
Example four
As shown in fig. 4 in combination with fig. 1, based on the above embodiments, the present invention also provides a calibration method of a confocal three-dimensional measurement system, which includes the steps of:
s1, placing the calibration device 1 in the optical path direction of the three-dimensional measurement system 2, where the calibration device 1 includes at least one transparent or translucent medium layer 10 and a support frame for supporting the medium layer 10, and each medium layer 10 has at least two chromatographic surfaces;
s2, emitting light through the three-dimensional measurement system 2 to be irradiated on a medium layer of the calibration device 1;
s3, acquiring the position information of the focusing planes of different chromatographic planes through the three-dimensional measuring system 2;
and S4, establishing a mapping model according to the position information and the actual depth information of different chromatographic planes.
In this embodiment, the number of the dielectric layers is at least two, and two adjacent dielectric layers are attached to each other.
In this embodiment, at least one of the medium layers has a plurality of protrusions formed according to a predetermined value to form chromatographic planes with different thicknesses on the medium layer, and another medium layer adjacent to and bonded to the medium layer has a structure corresponding to the protrusions to form chromatographic planes with different thicknesses.
In this embodiment, one chromatographic surface of the at least one medium layer is an inclined surface to gradually change the thickness of the medium layer, and another medium layer adjacent to and bonded to the chromatographic surface has a surface corresponding to the inclined surface to gradually change the thickness of the medium layer.
The above examples are intended only to illustrate specific embodiments of the present invention. It should be noted that those skilled in the art should also realize that they fall within the scope of the present invention without departing from the spirit of the invention.
Claims (10)
1. A calibration device of a confocal three-dimensional measurement system, the calibration device comprising:
at least one transparent or semitransparent medium layer, wherein each medium layer at least has two chromatographic surfaces;
and the supporting frame is used for bearing the medium layer.
2. The calibrating device according to claim 1, wherein the dielectric layers are at least two layers, and adjacent dielectric layers are attached to each other.
3. Calibration arrangement according to claim 2, characterized in that the thickness of each of said dielectric layers is the same or different.
4. The calibration device according to claim 2, wherein at least one of the medium layers has a plurality of protrusions formed according to a predetermined value to form chromatographic planes having different thicknesses on the medium layer, and another medium layer adjacent to and bonded to the medium layer has a structure corresponding to the protrusions to form chromatographic planes having different thicknesses.
5. The calibration device according to claim 4, wherein the heights of the plurality of protrusions are the same or different.
6. The calibration device according to claim 2, wherein one of the chromatographic surfaces of at least one of the medium layers is beveled to gradually change the thickness of the medium layer, and the other medium layer adjacent to and bonded to the other medium layer has a surface corresponding to the beveled surface to gradually change the thickness of the medium layer.
7. A calibration method of a confocal three-dimensional measurement system is characterized by comprising the following steps:
placing a calibration device in the light path direction of the three-dimensional measurement system, wherein the calibration device comprises at least one transparent or semitransparent medium layer and a support frame for bearing the medium layer, and each medium layer is provided with at least two chromatographic surfaces;
emitting light rays through the three-dimensional measuring system to be irradiated on the medium layer of the calibration device;
acquiring position information of focusing planes of different chromatographic planes through the three-dimensional measurement system;
and establishing a mapping model according to the position information and the actual depth information of different chromatographic planes.
8. The method for calibrating the confocal three-dimensional measurement system according to claim 7, wherein the number of the dielectric layers is at least two, and two adjacent dielectric layers are attached to each other.
9. The method for calibrating a confocal three-dimensional measurement system according to claim 7, wherein at least one of the medium layers has a plurality of protrusions formed according to a predetermined value to form chromatographic planes with different thicknesses on the medium layer, and another medium layer adjacent to and bonded to the medium layer has a structure corresponding to the protrusions to form chromatographic planes with different thicknesses.
10. The method for calibrating a confocal three-dimensional measurement system according to claim 7, wherein one tomographic surface of at least one of the medium layers is a slant surface so as to gradually change the thickness of the medium layer, and another medium layer adjacent to and bonded to the slant surface has a surface corresponding to the slant surface so as to gradually change the thickness of the medium layer.
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Application publication date: 20210507 |