CN112595245B - Detection method, detection system, and non-volatile computer-readable storage medium - Google Patents
Detection method, detection system, and non-volatile computer-readable storage medium Download PDFInfo
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- CN112595245B CN112595245B CN202110248608.6A CN202110248608A CN112595245B CN 112595245 B CN112595245 B CN 112595245B CN 202110248608 A CN202110248608 A CN 202110248608A CN 112595245 B CN112595245 B CN 112595245B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
Abstract
The application discloses a detection method, a detection system and a non-volatile computer-readable storage medium. The detection method comprises the following steps: acquiring height distribution information of different positions of a region to be detected of a workpiece, and placing the workpiece on a bearing device; acquiring a response curve of a driving piece according to the height distribution information, wherein the driving piece is used for driving the bearing device to move along the height direction; on the response curve, the minimum time difference of adjacent nodes with sudden change in the extension direction is greater than or equal to the response period of the driving piece; and controlling the driving piece to drive the bearing device to move according to the response curve. In the detection method, the detection system and the non-volatile computer-readable storage medium according to the embodiments of the present application, the frequency of the driving member driving the carrying device to move is within the bearing range of the driving member, so as to ensure that the driving frequency of the driving member meets the detection requirement of the detection system.
Description
Technical Field
The present application relates to the field of detection technologies, and more particularly, to a detection method, a detection system, and a non-volatile computer-readable storage medium.
Background
When a camera detects a workpiece, such as a display panel, for example, when detecting an edge of the workpiece, the distance between the camera and the workpiece needs to be strictly controlled, so that the edge is located within a depth of field range of the camera, and the edge can be clearly imaged. Since the heights of the different positions of the edge may be different, it is necessary to control the movement of the workpiece in the height direction or control the movement of the camera in the height direction to compensate for the difference in the height of the workpiece itself when the camera is used to photograph the different positions of the edge of the workpiece. Since the camera is a precision element, it is common to control the movement of the workpiece.
In the testing process, the speed that the camera actually shot is very fast, needs the work piece to remove along the direction of height fast, however, when the motor was placing the load bearing device of work piece along the direction of height motion in the drive, the motor still can not accomplish to move along the direction of height with very high frequency drive load bearing device, leads to the unable detection demand that satisfies the work piece.
Disclosure of Invention
The embodiment of the application provides a detection method, a detection system and a non-volatile computer readable storage medium.
The detection method of the embodiment of the application comprises the following steps: acquiring height distribution information of different positions of a region to be detected of a workpiece, wherein the workpiece is placed on a bearing device; acquiring a response curve of a driving piece according to the height distribution information, wherein the driving piece is used for driving the bearing device to move along the height direction; on the response curve, the minimum time difference of adjacent nodes with sudden change in the extension direction is greater than or equal to the response period of the driving piece; and controlling the driving piece to drive the bearing device to move according to the response curve.
In some embodiments, the workpiece is detected by an image capture device, and the response curve satisfies the condition: when the driving piece is controlled to drive the bearing device to move according to the response curve, the workpieces in the field range of the image acquisition device are all located in the field depth range of the image acquisition device.
In some embodiments, the height distribution information includes a height profile, and the obtaining height distribution information of different positions of the region to be measured of the workpiece includes: measuring a plurality of distances of different positions of the region to be measured relative to a reference position by adopting a height-fixing detection device; drawing a fitting point corresponding to each distance according to the same reference; and connecting a plurality of the fitting points to obtain the height curve.
In some embodiments, the height profile information includes a height profile having a plurality of steps, and the obtaining a response profile of the driver based on the height profile information includes: obtaining a plurality of fitting lines according to the height distribution of a plurality of continuous steps along the preset direction on the height curve; and acquiring the response curve according to a plurality of the fitting lines.
In some embodiments, obtaining a plurality of fit lines according to a height distribution of a plurality of steps on the height curve in a predetermined direction includes: a comparison step: comparing whether the vertical distance between any point on each line segment and any step crossed by the line segment in a plurality of line segments is greater than a preset distance, wherein the plurality of line segments are formed by taking a preset point on the ith step as a starting point and respectively taking a preset point on a step behind the ith step as an end point; fitting: when the vertical distance from at least one point on the line segment to any one step from the ith step to the jth step spanned by the line segment is greater than the preset distance, fitting all the preset points on the ith step to the jth-1 step to obtain a fitting line; and taking the preset point on the (j-1) th step as a starting point, and circularly executing the comparison step and the fitting step until the preset points on all the steps are fitted to obtain a plurality of fitted lines.
In some embodiments, the height distribution information includes a set of height values, and the acquiring of the height distribution information of different positions of the region to be measured of the workpiece includes measuring a plurality of distances of the different positions of the region to be measured with respect to a reference position by using a height determination detection device, and using the plurality of distances as a set to obtain the height distribution information.
In some embodiments, the obtaining a response curve of the driving member according to the height distribution information includes: a calculation step: sequentially calculating the difference value between the ith numerical value and other subsequent numerical values in the set; a comparison step: after calculating a difference value every time, comparing whether the absolute value of the difference value is greater than a preset distance or not; fitting: when the absolute value of the difference between the ith numerical value and the jth numerical value is greater than the preset distance, drawing points corresponding to the ith numerical value to the jth-1 numerical value on the same basis, and connecting the drawing points to obtain a fitting line; circularly executing the calculating step, the comparing step and the fitting step on the basis of the j-1 th numerical value as a calculation basis until all the drawing points corresponding to the numerical values in the set are fitted to obtain a plurality of fitting lines; and acquiring the response curve according to a plurality of fitting lines.
In some embodiments, the predetermined distance is a predetermined proportion of a depth of field of an image capture device used to inspect the workpiece.
In certain embodiments, the fit line comprises a fit line segment, and/or a fit curve.
The detection system of the embodiment of the application comprises a bearing device, a driving piece and one or more processors. The bearing device is used for bearing a workpiece. The driving piece is used for driving the bearing device to move along the height direction. One or more processors are used for acquiring height distribution information of different positions of a region to be measured of the workpiece; acquiring a response curve of the driving piece according to the height distribution information, wherein the minimum time difference of adjacent nodes with sudden change in the extension direction on the response curve is larger than or equal to the response period of the driving piece; and controlling the driving piece to drive the bearing device to move according to the response curve.
In some embodiments, the detection system further includes an image capturing device, the image capturing device is configured to detect the workpiece, and the one or more processors are configured to control the workpiece within a field of view of the image capturing device to be within a depth of field of the image capturing device when the driving member drives the carrying device to move according to the response curve.
In some embodiments, the height distribution information comprises a height profile, the detection system further comprising a height determination detection device for measuring a plurality of distances of different positions of the area to be detected from a reference position; the one or more processors are configured to obtain a plurality of the distances, plot a fitted point corresponding to each of the distances on the same basis, and connect the fitted points to obtain the height curve.
In some embodiments, the height distribution information includes a height curve having a plurality of steps, and the one or more processors are further configured to obtain a plurality of fit lines according to the height distribution of a plurality of steps on the height curve in a predetermined direction; and acquiring the response curve according to a plurality of the fitting lines.
In certain embodiments, one or more of the processors are further configured to perform: a comparison step: comparing whether the vertical distance between any point on each line segment and any step crossed by the line segment in a plurality of line segments is greater than a preset distance, wherein the plurality of line segments are formed by taking a preset point on the ith step as a starting point and respectively taking a preset point on a step behind the ith step as an end point; fitting: when the vertical distance from at least one point on the line segment to any one step from the ith step to the jth step spanned by the line segment is greater than the preset distance, fitting all the preset points on the ith step to the jth-1 step to obtain a fitting line; and taking the preset point on the (j-1) th step as a starting point, and circularly executing the comparison step and the fitting step until the preset points on all the steps are fitted to obtain a plurality of fitted lines.
In some embodiments, the altitude distribution information comprises a set of altitude values, the detection system further comprising an altitude-determination detection device for measuring a plurality of distances of different positions of the region-under-test from a reference position; the one or more processors are further configured to obtain a plurality of the distances, and to aggregate the plurality of the distances to obtain the height distribution information.
In certain embodiments, one or more of the processors are further configured to perform: a calculation step: sequentially calculating the difference value between the ith numerical value and other subsequent numerical values in the set; a comparison step: after calculating a difference value every time, comparing whether the absolute value of the difference value is greater than a preset distance or not; fitting: when the absolute value of the difference between the ith numerical value and the jth numerical value is greater than the preset distance, drawing points corresponding to the ith numerical value to the jth-1 numerical value on the same basis, and connecting the drawing points to obtain a fitting line; circularly executing the calculating step, the comparing step and the fitting step on the basis of the j-1 th numerical value as a calculation basis until all the drawing points corresponding to the numerical values in the set are fitted to obtain a plurality of fitting lines; and acquiring the response curve according to a plurality of fitting lines.
In some embodiments, the predetermined distance is a predetermined proportion of a depth of field of an image capture device used to inspect the workpiece.
In certain embodiments, the fit line comprises a fit line segment, and/or a fit curve.
The non-transitory computer-readable storage medium of the embodiments of the present application contains a computer program, which, when executed by one or more processors, causes the processors to perform the detection method of any of the above embodiments.
In the detection method, the detection system and the non-volatile computer-readable storage medium according to the embodiments of the present application, a response curve for controlling the driving member to drive the carrying device to move in the height direction is obtained according to the height distribution information of different positions of the region to be detected of the workpiece, and the driving member is controlled to drive the carrying device to move according to the response curve.
Additional aspects and advantages of embodiments of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of embodiments of the present application.
Drawings
The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic flow diagram of a detection method according to certain embodiments of the present application;
FIG. 2 is a schematic structural view of a detection system according to certain embodiments of the present application;
FIG. 3 is a schematic structural view of a detection system according to certain embodiments of the present application;
FIG. 4 is a schematic flow chart of a detection method according to certain embodiments of the present application;
FIG. 5 is a schematic view of an altimeter device of certain embodiments of the present application measuring the height of a workpiece placed on a carrier;
FIG. 6 is a schematic diagram of acquiring height distribution information of different positions of a region under test of a workpiece according to some embodiments of the present application;
FIGS. 7 and 8 are schematic flow charts of detection methods according to certain embodiments of the present application;
FIG. 9 is a schematic illustration of a height profile of certain embodiments of the present application;
FIG. 10 is a schematic illustration of a fit line for certain embodiments of the present application;
FIGS. 11 and 12 are schematic flow charts of detection methods according to certain embodiments of the present application;
FIG. 13 is a schematic diagram of a connection state of a computer scale storage medium and a processor according to some embodiments of the present application.
Detailed Description
Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below by referring to the drawings are exemplary only for the purpose of explaining the embodiments of the present application, and are not to be construed as limiting the embodiments of the present application.
Referring to fig. 1 and 2, an embodiment of the present application provides a detection method. The detection method comprises the following steps:
01: acquiring height distribution information of different positions of a region 41 to be measured of a workpiece 40, wherein the workpiece 40 is placed on the bearing device 10;
03: acquiring a response curve of the driving part 20 according to the height distribution information, wherein the driving part 20 is used for driving the bearing device 10 to move along the height direction, and the minimum time difference of adjacent nodes with sudden change in the extension direction on the response curve is greater than or equal to the response period of the driving part 20; and
05: the control drive 20 drives the carrier 10 to move according to the response curve.
The embodiment of the application also provides a detection system 100. The detection system 100 includes a carrier 10, a drive 20, and one or more processors 30. The detection method according to the embodiment of the present application can be applied to the detection system 100 according to the embodiment of the present application. The carrier 10 is used for carrying a workpiece 40. The driving member 20 is used for driving the carrying device 10 to move along the height direction. One or more processors 30 are used to execute the methods in 01, 03, and 05. That is, the processor 30 is configured to obtain height distribution information of different positions of the region 41 to be measured of the workpiece 40; acquiring a response curve of the driving member 20 according to the height distribution information; and controlling the driving member 20 to drive the carrying device 10 to move according to the response curve.
More specifically, the inspection system 100 may further include an image capture device 50, the image capture device 50 being positioned over the workpiece 40, the image capture device 50 being configured to detect defects in the workpiece 40.
The height direction is a direction parallel to the extending direction of the central axis of the field of view of the image pickup device 50 when the image pickup device 50 detects a defect of the workpiece 40, and is a Z direction as shown in fig. 2. On the response curve, the minimum time difference between adjacent stages with abrupt changes in the extending direction is greater than or equal to the response period of the driving member 20, that is, when the driving member 20 drives the carriage 10 to move according to the response curve, the driving member 20 drives the carriage 10 to move upward (positive movement of the Z-axis) or downward (negative movement of the Z-axis). On the response curve, the minimum time difference of adjacent nodes with abrupt changes of the extending direction is larger than or equal to the response period of the driving member 20, the driving direction of the driving member 20 does not need to be changed excessively frequently, and the driving rate of the driving member 20 does not need to be changed excessively frequently, so that the frequency of the upward movement or the downward movement of the carrier device 10 driven by the driving member 20 is ensured within the adjusting frequency which can be reached by the driving member 20. The node where the extension direction of the response curve is abrupt may refer to a discontinuous node on the response curve.
The image capturing Device 50 may be a Charge Coupled Device (CCD) camera, a Complementary Metal-Oxide-Semiconductor (CMOS) camera, or other imaging devices capable of converting an optical signal into an electrical signal, and in the embodiment of the present application, the image capturing Device 50 is a CCD camera, for example, it is understood that the image capturing Device 50 is not limited to a CCD camera.
Specifically, when the image capture device 50 detects the workpiece 40, the region 41 to be measured of the workpiece 40 is located on the surface of the workpiece 40 on the side facing the image capture device 50, and the region 41 to be measured may be any position of the surface, such as an edge region, a central region, an edge region of a hole formed in the workpiece 40, and the like.
The response curve also satisfies: when the processor 30 controls the driving member 20 to drive the carrying device 10 to move according to the response curve, the workpieces 40 within the field of view of the image capturing device 50 are all located within the depth of field of the image capturing device 50, i.e. the regions to be measured 41 are all located within the depth of field of the image capturing device 50.
Currently, the height of the region 41 to be measured varies due to its height fluctuation, surface damage, dust attached to the surface, or the workpiece 40 not being horizontally placed on the supporting device 10. In the actual detection process, the detection frequency of the image capturing device 50 is high, and the driving member 20 cannot drive the carrying device 10 to move in the height direction at the high frequency, which may cause that when the image capturing device 50 detects the workpiece 40, a part of the region to be detected 41 is not within the depth of field of the image capturing device 50, thereby affecting the definition of the image and causing inaccuracy of the detection result.
In the detection method and the detection system 100 of the embodiment of the application, a response curve for controlling the driving element 20 to drive the carrying device 10 to move in the height direction is obtained according to the height distribution information of different positions of the region 41 to be detected of the workpiece 40, and the driving element 20 is controlled to drive the carrying device 20 to move according to the response curve, because on the response curve, the minimum time difference of adjacent nodes with sudden change in the extension direction is greater than or equal to the response period of the driving element 20, so that the frequency of the driving element 20 driving the carrying device 10 to move is within the adjustable bearing range of the driving element 20 and the driving frequency of the driving element 20 is ensured to meet the detection requirement of the detection system 100.
Referring to fig. 4, in some embodiments, the height distribution information includes a height curve, 01: acquiring height distribution information of different positions of the region 41 to be measured of the workpiece 40 includes:
011: measuring a plurality of distances of different positions of the region 41 to be measured with respect to the reference position using the height determination detecting device 60;
012: drawing a fitting point corresponding to each distance according to the same reference; and
013: the plurality of fitting points are connected to obtain the height curve M.
Referring to fig. 2, detection system 100 may further include a pitch detection device 60, where pitch detection device 60 is configured to perform the method of 011 and one or more processors 30 are configured to perform the methods of 012 and 013. Namely, the height-determining detecting device 60 is used for measuring a plurality of distances of different positions of the region 41 to be measured relative to the reference position, and the processor 30 is used for acquiring the plurality of distances, drawing a fitting point corresponding to each distance with the same reference, and connecting the plurality of fitting points to obtain the height curve M.
The height-determining detecting device 60 may include a probe 61 and an image-acquiring device 62, and when the height-determining detecting device 60 measures a plurality of distances between different positions of the region 41 to be measured of the workpiece 40 and a reference position, the image-acquiring device 62 acquires a first image of the workpiece 40 to acquire position information of the workpiece 40 on the carrier 10. The position information may include, among other things, an offset and/or a deflection angle of the workpiece 40 relative to a reference position. One or more processors 30 have pre-stored therein reference images of the workpiece 40 placed on the reference position of the carrier 10, and the processor 30 obtains the offset and/or deflection angle of the workpiece 40 relative to the reference position based on the reference images and the first image. Of course, the detection system 100 may also obtain the position information of the workpiece 40 on the carrier 10 according to the first image in other ways, which is not limited herein. After acquiring the position information, the probe 61 detects height information of the workpiece 40 based on the position information, thereby measuring a plurality of distances of different positions of the region 41 to be measured with respect to the reference position.
The height distribution information may be a multi-segment connected height curve M, and the processor 30 can obtain the response curve of the driving member 20 according to the height curve M. The reference position may be a mounting surface 64 of the probe 61 (as shown in fig. 5) or may be a surface of the level detection device 60 facing away from the workpiece 40. The same reference is any reference, for example, the height of the mounting surface 64 is taken as the height of the X coordinate axis (reference surface), and the height distribution of the plurality of fitting points with respect to the X coordinate axis is plotted (as shown in fig. 6).
Specifically, as shown in fig. 5, in one embodiment, taking the reference position as the mounting surface 64 of the probe 61 as an example, when the height determination detecting device 60 measures a plurality of distances from different positions of the region 41 to be measured to the reference position, a plurality of distances h1, h2, h3, h4, h5 and h6 shown in the left diagram of fig. 6 can be obtained, the processor 30 plots the height distribution of the workpiece 40 at the corresponding distances with the height of the mounting surface 64 as the X coordinate axis for the plurality of distances h1, h2, h3, h4, h5 and h6, respectively, a plurality of fitting points shown in the right diagram of fig. 6 can be obtained, the width of the fitting point at each height is the same as the width of the region 41 to be measured at the same height, and the processor 30 connects the plurality of fitting points to obtain the height curve M and can obtain the response curve of the driving element 20 through the height curve M.
Referring to fig. 2 and fig. 3, the image capturing device 50 and the height-fixed detecting device 60 may be mounted on the same stage 70, a track may be disposed on the carrier 70, the image capturing device 50 and the height-fixed detecting device 60 may move along the track (move left and right) on the stage 70, the image capturing device 50 and the height-fixed detecting device 60 are located on two opposite sides of the stage 70, and the carrying device 10 is located below the stage 70. The number of the processors 30 may be plural, in one example, the plural processors 30 are respectively integrated inside the image capturing device 50 and the height determining and detecting device 60; in another example, a part of the processor 30 is integrated inside the image capturing device 50, and another part of the processor 30 is integrated on the stage 70; in another example, a part of the processor 30 is integrated inside the height detection device 60, and another part of the processor 30 is integrated in the stage 70; in yet another example, the processors 30 may also be all integrated into the stage 70.
Referring to fig. 2 and 3 together, in some embodiments, the detection system 100 may include a first running rail 80 and a second running rail 90. The carrying device 10 may be plural, and the plural carrying devices 10 are respectively placed on different running tracks. When the number of the carriers 10 is two, one carrier 10 is placed on the first running rail 80 and the other carrier 10 is placed on the second running rail 90. When the carrier device 10 moves to the lower side of the carrier 70 through the first running track 80 or the second running track 90, the fixed-height detection device 60 first obtains a plurality of distances from different positions of the region 41 to be measured (taking an edge area as an example) of the workpiece 40 on the carrier device 10 on the first running track 80 to the reference position according to the above measurement mode, and then the fixed-height detection device 60 moves from left to right to measure a plurality of distances from different positions of the region 41 to be measured of the workpiece 40 on the carrier device 10 on the second running track 90 to the reference position; the processor 30 may obtain a plurality of distances corresponding to the workpiece 40 on the first operation track 80 from the height-fixing detection device 60, and draw a fitting point corresponding to each distance and connect the plurality of fitting points with the same reference to obtain a first height curve; the processor 30 may further obtain a plurality of distances corresponding to the workpiece 40 on the second moving track 90 from the height-fixing detection device 60, draw a fitting point corresponding to each distance on the same reference, and connect the plurality of fitting points to obtain a second height curve, and then the image capturing device 50 may also detect the defect of the workpiece 40 on the carrier 10 on the first moving track 80 first and then detect the defect of the workpiece 40 on the carrier 10 on the second moving track 80. When the image capturing device 50 detects a defect of the workpiece 40 on the carrying device 10 on the first operation track 80, the processor 30 obtains a first response curve according to the first height curve, and controls the driving member 20 to drive the carrying device 10 to move according to the first response curve, so that the workpiece 40 on the first operation track 80 is within the depth of field range of the image capturing device 50. Similarly, when the image capturing device 50 detects a defect of the workpiece 40 on the carrying device 10 on the second operation track 90, the processor 30 obtains a second response curve according to the second height curve, and controls the driving member 20 to drive the carrying device 10 to move according to the second response curve, so that the workpiece 40 on the second operation track 90 is also within the depth of field of the image capturing device 50. In this way, the starting time of the height-fixing detection device 60 performing distance detection on the workpiece 40 on the second running track 90 is earlier than the ending time of the image acquisition device 50 performing defect detection on the workpiece 40 on the first running track 80, and the height-fixing detection device 60 can perform distance detection on the next workpiece 40 without waiting for the image acquisition device 50 to complete distance detection on the current workpiece 40, so that the detection system 100 can simultaneously detect a plurality of workpieces 40, thereby improving the detection efficiency of the detection system 100.
Referring to fig. 7, in some embodiments, 03: obtaining a response curve of the driving member 20 based on the height distribution information includes:
031: obtaining a plurality of fitting lines according to the height distribution of a plurality of continuous steps along the preset direction on the height curve M; and
032: and acquiring the response curve according to a plurality of fit lines.
Referring to fig. 2, one or more processors 30 are further configured to perform the methods of 031 and 032, that is, the processor 30 is configured to obtain a plurality of fit lines according to the height distribution of a plurality of steps on the height curve M in a predetermined direction; and acquiring the response curve according to a plurality of the fitting lines.
In the detection method and the detection system of the present embodiment, the processor 30 controls the driving element 20 to drive the carrying device 10 to move according to a response curve, where the response curve is obtained by a plurality of fit lines formed by the height distribution of a plurality of steps on the height curve M of the region to be detected 41 of the workpiece 40, that is, the driving element 20 drives the carrying device 10 to move according to the height distribution of the region to be detected 41 of the workpiece 40, so that when the image capturing device 50 detects the region to be detected 41, the region to be detected 41 is always within the depth of field of the image capturing device 50, so as to ensure that the image capturing device 50 images the workpiece 40 clearly, thereby ensuring the accuracy of the detection result.
Specifically, referring to fig. 8, in some embodiments, 031: obtaining a plurality of fitting lines according to the height distribution of a plurality of continuous steps along the preset direction on the height curve M, wherein the fitting lines comprise:
0311: a comparison step: comparing whether the vertical distance between any point on each line segment and any step crossed by the line segment in a plurality of line segments is greater than a preset distance, wherein the plurality of line segments are formed by taking a preset point on the ith step as a starting point and respectively taking a preset point on a step behind the ith step as an end point;
0312: fitting: when the vertical distance from at least one point on the line segment to any one step from the ith step to the jth step spanned by the line segment is greater than the preset distance, fitting all the preset points on the ith step to the jth-1 step to obtain a fitting line; and
0313: and taking the preset points on the (j-1) th step as starting points, and circularly executing the comparison step and the fitting step until the preset points on all the steps are fitted to obtain a plurality of fitting lines.
Correspondingly, referring to fig. 2, one or more processors 30 are configured to perform the methods in 0311, 0312 and 0313, that is, the processors 30 are configured to perform: a comparison step: comparing whether the vertical distance between any point on each line segment and all steps spanned by the line segments in a plurality of line segments is greater than a preset distance, wherein the plurality of line segments are formed by taking a preset point on the ith step as a starting point and respectively taking a preset point on the step behind the ith step as an end point; fitting: when the vertical distance from at least one point on the line segment to the ith step crossed by the line segment to the jth step is greater than the preset distance, fitting all the preset points on the ith step to the jth-1 step to obtain a fitting line; and taking a preset point on the (j-1) th step as a starting point, and circularly executing the comparison step and the fitting step until the preset points on all the steps are fitted to obtain a plurality of fitted lines.
The preset distance is a preset proportion of the depth of field of the image capturing apparatus 50, for example, the preset distance may be one half, one third, one fourth, and the like of the depth of field of the image capturing apparatus 50, and the present application takes the preset distance as one half of the preset proportion of the depth of field of the image capturing apparatus 50 as an example, and it is understood that the preset distance includes but is not limited to one half of the depth of field of the image capturing apparatus 50.
In one example, the predetermined distance is related to a target height to which the drive 20 is to drive the workpiece 40 according to the response curve. As shown in fig. 10 (a), taking the response curve as S0 as an example, it can be seen that the partial step 2 and the partial step 3 are higher than the height of the response curve at the corresponding positions, and therefore, when the driving member 20 drives the workpiece 40 to the target height according to the response curve S0, since the height of the partial step is higher than the height of the response curve, the workpiece corresponding to the partial step will be always higher than the target height, and if the difference between the height of the partial step and the height of the response curve is too large, the actual height of the workpiece 40 may exceed the depth of field of the image capturing device 50. Therefore, in order to ensure that the workpiece 40 is located within the range of the depth of field of the image capturing device 50 at any time during the process of detecting the workpiece 40 by the image capturing device 50, so as to ensure the accuracy of the detection result of the detection system 100, when the driving member 20 is driven to the target height according to the response curve, the preset distance may be set to be a smaller distance from the distance between the target height and the upper and lower limits of the depth of field of the image capturing device 50.
For example, if the target height driven by the driving member 20 according to the response curve is one third of the depth of field of the image capturing device 50, the target height divides the depth of field value of the image capturing device 50 into one third of the depth of field and two thirds of the depth of field, and the preset distance is one third of the depth of field of the image capturing device 50; if the target height driven by the driving member 20 according to the response curve is one-half of the depth of field of the image capturing device 50, the target height divides the image capturing device 50 into two same one-half depths of field, and the preset distance is one-half of the depth of field of the image capturing device 50; if the target height driven by the driving member 20 according to the response curve is three-quarters of the depth of field of the image capturing device 50, the target height divides the depth of field of the image capturing device 50 into three-quarters of the depth of field and one-quarter of the depth of field, and the preset distance is one-quarter of the depth of field of the image capturing device 50.
Specifically, in some embodiments, please refer to fig. 9, taking the example that 6 steps are continuously distributed on the height curve M along the predetermined direction, and the 6 steps are step 1, step 2, step 3, step 4, step 5, and step 6, respectively. Line segment L1, line segment L2, line segment L3, line segment L4, and line segment L5 can be formed, respectively, starting at a predetermined point (e.g., a midpoint) on step 1 and ending at predetermined points (e.g., midpoints) on step 2, step 3, step 4, step 5, and step 6, respectively. The processor 30 performs a comparison step, wherein whether the vertical distance from any point on the line segment L1 to the step 1 or the step 2 is greater than a preset distance, whether the vertical distance from any point on the line segment L2 to the step 1, the step 2 or the step 3 is greater than a preset distance, whether the vertical distance from any point on the line segment L3 to the step 1, the step 2, the step 3 or the step 4 is greater than a preset distance, whether the vertical distance from any point on the line segment L4 to the step 1, the step 2, the step 3, the step 4 or the step 5 is greater than a preset distance, and whether the vertical distance from any point on the line segment L5 to the step 1, the step 2, the step 3, the step 4, the step 5 or the step 6 is greater than a preset distance is performed.
In the process of the comparing step performed by the processor 30, if there is a point on a line segment that crosses over the line segment and the vertical distance between the corresponding steps is greater than the preset distance, the forming of the next line segment that is the same as the starting point of the line segment and the ending point of the next line segment that is formed by the preset point on the next step after the step where the ending point of the line segment is located is stopped. For example, when the processor 30 compares that the vertical distance from any point on the line segment L1 to the step 1 or the step 2 is less than or equal to the preset distance, the processor 30 continues to compare whether the vertical distance from any point on the line segment L2 to the step 1, the step 2, or the step 3 is greater than the preset distance, and if the vertical distance from the point on the line segment L2 to the step 1, the step 2, or the step 3 is greater than the preset distance, the formation of the line segment L3, the line segment L4, the line segment L5, and the line segment L6 is stopped. For another example, when the processor 30 compares that the vertical distance from the existing point on the line segment L4 to the step 1, the step 2, or the step 3 is greater than the preset distance, the formation of the line segment L5 and the line segment L6 is stopped. It is understood that the line segment L1, the line segment L2, the line segment L3, the line segment L4, the line segment L5 and the line segment L6 are not formed at the same time, but when the vertical distance from any point on the current line segment to any step spanned by the line segment is less than or equal to the preset distance, the line segment is formed to be the same as the starting point of the line segment, and the ending point is the next step of the step where the ending point of the line segment is located.
In one embodiment, if the processor 30 determines that the vertical distance from any point on the line segment L1 to step 1 or step 2 is less than or equal to the preset distance, the processor 30 continues to perform the comparing step, i.e., compares whether the vertical distance from any point on the line segment L2 to step 1, step 2, or step 3 is greater than the preset distance.
It is noted that each line segment includes a plurality of segments corresponding to the steps it spans. The vertical distance from any point on the line segment to the step in this application refers to: the vertical distance from any point on each segment of a line segment to the step (corresponding step) that the segment spans. There is no vertical distance between any point on each segment of a line segment to the step that the segment does not span (the non-corresponding step). Specifically, for example, taking step 1, step 2, and line segment L1 as an example, line segment L1 includes a first half corresponding to step 1 (spanning step 1) and a second half corresponding to step 2 (spanning step 2), and the vertical distance from any point on line segment L1 to step 1 or step 2 refers to: the vertical distance from any point on the first half of line segment L1 to step 1, e.g., the vertical distance H1 from point a1 to step 1; and the vertical distance from any point on the second half of line segment L1 to step 2, such as point A2 to step 1, H2. Further, there is no vertical distance to step 1 at any point on the latter half of the line segment L1, and there is no vertical distance to step 2 at any point on the former half of the line segment L1. As another example, the line segment L2 is divided into 3 segments, which are: the front section of step 1, the middle section of step 2, and the rear section of step 3. A vertical distance exists between the front section and the step 1, a vertical distance exists between the middle section and the step 2, and a vertical distance exists between the rear section and the step 3; there is not vertical distance between anterior segment and the step 2, does not have vertical distance between anterior segment and the step 3, does not have vertical distance between middle segment and the step 1, does not have vertical distance between middle segment and the step 3, does not have vertical distance between back end and the step 1, does not have vertical distance between back end and the step 2.
If the processor 30 determines that the vertical distance from any point on the line segment L2 to step 1 or step 2 is less than or equal to the predetermined distance, the processor 30 continues to perform the comparing step, i.e., compares whether the vertical distance from any point on the line segment L3 to step 1, step 2, step 3, or step 4 is greater than the predetermined distance. If the processor 30 determines that the vertical distances from any point on the line segment L3 to the step 1, the step 2, the step 3, or the step 4 are all less than or equal to the preset distance, the processor 30 continues to perform the comparing step, i.e., compares whether the vertical distances from any point on the line segment L4 to the step 1, the step 2, the step 3, the step 4, or the step 5 are greater than the preset distance. If the vertical distance from any point on the line segment L4 to step 1, step 2, step 3, step 4, or step 5 is less than or equal to the preset distance, the processor 30 continues to perform the comparing step, i.e., compares whether the vertical distance from any point on the line segment L5 to step 1, step 2, step 3, step 4, step 5, or step 6 is greater than the preset distance.
Referring to fig. 9, in some embodiments, in the process of performing the comparison step, if the processor 30 determines that the vertical distance from at least one point on the line segment L3 to the step 1, the step 2, the step 3, or the step 4 is greater than the predetermined distance, the subsequent comparison step is not required, for example, the comparison of whether the vertical distance from any point on the line segment L4 to the step 1, the step 2, the step 3, the step 4, or the step 5 is greater than the predetermined distance is stopped, and of course, the comparison of whether the vertical distance from any point on the line segment L5 to the step 1, the step 2, the step 3, the step 4, the step 5, or the step 6 is greater than the predetermined distance is also not required. Then, fitting predetermined points on step 1, step 2, and step 3 results in a fit line, such as fit line S2, S3, or S4 shown in FIG. 10.
In other embodiments, in the process of performing the comparing step, if the processor 30 determines that the vertical distance from at least one point on the line segment L3 to the step 1, the step 2, the step 3, or the step 4 is greater than the preset distance, the subsequent comparing step may not be stopped, for example, all line segments are compared. Alternatively, subsequent comparisons of partial segments, such as comparison of the preceding partial segment, e.g., segment L4, are not compared with segment L5.
In some embodiments, when the vertical distance from at least one point on the line segment to any step from the ith step to the jth step spanned by the line segment is greater than the preset distance, a fitting line is obtained by fitting a predetermined point on the ith step and a predetermined point on the jth-1 st step. For example, if processor 30 determines that the vertical distance from at least one point on line segment L3 to step 1, step 2, step 3, or step 4 is greater than the predetermined distance, then only fitting the predetermined points on step 1 and step 3 yields a fit line, e.g., fit line S0 and fit line S1 as shown in fig. 10.
Then, taking the predetermined point on the step 3 as a starting point, the above comparing step and the above fitting step are executed in a circulating way until the predetermined points on all the steps are fitted, so as to obtain a plurality of fitting lines.
It should be noted that, if the processor 30 determines that the distance from at least one point on the line segment L1 to the step 1 and the step 2 is greater than the preset distance, for example, if the processor 30 determines that the distance H1 from the point a1 on the line segment L1 to the step 1 is greater than the preset distance, and the distance H2 from the point a2 on the line segment L1 to the step 2 is less than or equal to the preset distance, because there is no step before the step 1, it indicates that at this time, the driving element 20 does not need to drive the carrier 10 to move in the height direction (only the first step on the height curve M is this case), the predetermined point on the step 2 is taken as the starting point, the predetermined point on the step after the step 2 is taken as the end point to form the line segment, and the processor 30 continues to perform the comparison step.
In some embodiments, the fit line may be a fit line segment, such as the fit line S1 shown in fig. 10 (a) and the fit line S2 shown in fig. 10 (b). In some embodiments, the fit line may be a fit curve, such as the fit line S0 shown in fig. 10 (a) and the fit line S3 shown in fig. 10 (c). In some embodiments, the fit line may include a fit curve and a fit line segment, such as the fit line S4 shown in fig. 10 (d).
Referring to fig. 11, in some embodiments, 01: acquiring the height distribution information of different positions of the region 41 to be measured of the workpiece 40, may further include:
014: the height detection device 60 is used to measure a plurality of distances from different positions of the region 41 to be detected to the reference position, and the plurality of distances are taken as a set to obtain the height distribution information.
Referring to fig. 2, the height determination detection device 60 measures a plurality of distances between different positions of the region to be detected 41 and the reference position, and the processor 30 is further configured to obtain a plurality of distances between different positions of the region to be detected 41 and the reference position measured by the height determination detection device 60 and obtain the height distribution information by using the plurality of distances as a set.
Specifically, as shown in fig. 6, taking the reference position as the mounting surface 64 of the probe 61 as an example, when the height determination detection device 60 measures different positions of the region to be measured 41, a plurality of distances h1, h2, h3, h4, h5, and h6 from the different positions of the region to be measured 41 by the height determination detection device 60 can be obtained, and the plurality of distances h1, h2, h3, h4, h5, and h6 are taken as a set, so that the height distribution information is obtained. For example, if h1, h2, h3, h4, h5, and h6 are 5, 10, 8, 13, 14, and 20, respectively, the processor 30 may obtain a set P = {5, 10, 8, 13, 14, and 20} by using the measured distances as elements, and use the set P as the height distribution information.
Referring to fig. 12, in some embodiments, 03: obtaining the response curve of the driving member 20 according to the height distribution information further includes:
033: a calculation step: sequentially calculating the difference value between the ith numerical value and other subsequent numerical values in the set;
034: a comparison step: after calculating a difference value every time, comparing whether the absolute value of the difference value is greater than a preset distance or not;
035: fitting: when the absolute value of the difference between the ith numerical value and the jth numerical value is greater than the preset distance, drawing points corresponding to the ith numerical value to the jth-1 numerical value on the same basis, and connecting the plurality of drawing points to obtain a fitting line;
036: circularly executing the calculation step, the comparison step and the fitting step on the basis of the j-1 th numerical value until all the drawing points corresponding to the numerical values in the set are fitted to obtain a plurality of fitting lines; and
037: response curves were obtained according to multiple fitted lines.
Referring to fig. 2, the processor 30 is also configured to perform the methods 033, 034, 035, 036 and 037, i.e., the processor 30 is further configured to perform: a calculation step: sequentially calculating the difference value between the ith numerical value and other subsequent numerical values in the set; a comparison step: after calculating a difference value every time, comparing whether the absolute value of the difference value is greater than a preset distance or not; fitting: when the absolute value of the difference between the ith numerical value and the jth numerical value is greater than the preset distance, drawing points corresponding to the ith numerical value to the jth-1 numerical value on the same basis, and connecting the plurality of drawing points to obtain a fitting line; circularly executing the calculating step, the comparing step and the fitting step on the basis of the j-1 th numerical value until the preset points on all the steps are fitted to obtain a plurality of fitting lines; and acquiring a response curve according to the fit lines.
Specifically, the height distribution information may be a set, for example, if the set P is taken as an example, the processor 30 performs a calculation step to calculate a difference between each value in the set P and all values subsequent to the value, for example, if the first value in the set P is [5], the processor 30 performs a calculation step to sequentially calculate a difference between the value [5] and subsequent values [10], [8], [13], [14] and [20], a difference between the value [10] and subsequent values [8], [13], [14] and [20], a difference between the value [8] and subsequent values [13], [14] and [20], a difference between the value [13] and subsequent values [14] and [20], and a difference between the value [14] and subsequent value [20 ].
After the processor 30 calculates the difference between the value [5] and the value [10], it compares whether the absolute value of the difference is greater than a predetermined distance. That is, the processor 30 obtains, through the calculation steps, that the difference between the 1 st numerical value [5] and the 2 nd numerical value [10] is-5, the absolute value of the difference is 5, and the processor 30 compares whether 5 is greater than the preset distance. Taking the preset distance as 7 as an example, if the absolute value of the difference between the 1 st numerical value [5] and the 2 nd numerical value [10] is smaller than the preset distance, the processor 30 will continue to compare whether the absolute value of the difference between the 1 st numerical value [5] and the 3 rd numerical value [8] is larger than the preset distance. By analogy, it can be seen that the difference between the 1 st value [5] and the 4 th value [13] is-8, and the values [5] and [13] are greater than the preset distance. Next, the processor 30 performs the fitting step, and plots the plotted points corresponding to the 1 st value [5] to the 4-1 th (i.e., the 3 rd) value [8], i.e., 5, 10, 8, on a reference plane, and connects the 1 st plotted point 5, the 2 nd plotted point 10 and the 3 rd plotted point 8, thereby obtaining the 1 st fitted line.
Thereafter, the processor 30 continues to perform the calculating step, the comparing step and the fitting step based on the 3 rd numerical value [8] as the calculation basis until the drawing points corresponding to all the numerical values in the set are fitted. For example, if processor 30 calculates the 3 rd value [8] as the basis of the 3 rd value [8], then it may obtain that the absolute value of the difference between the 3 rd value [8] and the 6 th value [20] is greater than the predetermined distance 7, then the plotted points corresponding to the 3 rd value [8], the 4 th value [13] and the 5 th value [14], i.e., 8, 13 and 14, are fitted, and the 3 rd plotted point, the 4 th plotted point and the 5 th plotted point are connected to obtain the 2 nd fitted line. And repeating the above steps until no drawing point corresponding to the numerical value in the set P is fitted, and obtaining a response curve by the processor 30 according to the first fitting line.
In one embodiment, if the processor 30 determines that the difference between the ith value and the nth value is greater than the preset distance, the processor fits the plotted points corresponding to the ith value and the nth value to obtain a fitted line, and in the same manner as above, the fitting step is stopped until the nth value is the last value, so as to obtain a plurality of fitted lines. The processor then obtains a response curve through a plurality of fit lines.
Similarly, the fit line may be a fit line segment or a fit curve, and the fit line may be formed by combining the fit line segment and the fit curve.
Referring to fig. 13, the present embodiment further provides a non-volatile computer-readable storage medium 200 containing a computer program 201. The computer program 201, when executed by the one or more processors 30, causes the one or more processors 3030 to perform the detection method of any of the embodiments described above.
For example, the computer program 201, when executed by the one or more processors 30, causes the processors 30 to perform the following detection method:
01: acquiring height distribution information of different positions of a region 41 to be measured of a workpiece 40, wherein the workpiece 40 is placed on the bearing device 10;
03: acquiring a response curve of the driving part 20 according to the height distribution information, wherein the driving part 20 is used for driving the bearing device 10 to move along the height direction, and the minimum time difference of adjacent nodes with sudden change in the extension direction on the response curve is greater than or equal to the response period of the driving part 20; and
05: the control drive 20 drives the carrier 10 to move according to the response curve.
As another example, the computer 201 program, when executed by the one or more processors 30, causes the processors 30 to perform the following detection methods:
011: measuring a plurality of distances of different positions of the region 41 to be measured with respect to the reference position using the height determination detecting device 60;
012: drawing a fitting point corresponding to each distance according to the same reference; and
013: the plurality of fitting points are connected to obtain the height curve M.
As another example, the computer 201 program, when executed by the one or more processors 30, causes the processors 30 to perform the following detection methods:
031: obtaining a plurality of fitting lines according to the height distribution of a plurality of continuous steps along the preset direction on the height curve M;
032: and acquiring the response curve according to a plurality of fit lines.
Also for example, the computer 201 program, when executed by the one or more processors 30, causes the processors 30 to perform the following detection method:
0311: a comparison step: comparing whether the distance from any point on each line segment to all steps spanned by the line segment in a plurality of line segments is greater than a preset distance, wherein the plurality of line segments are formed by taking a preset point on the ith step as a starting point and respectively taking a preset point on a step behind the ith step as an end point;
0312: fitting: when the vertical distance from at least one point on the line segment to the ith step crossed by the line segment to the jth step is greater than the preset distance, fitting all the preset points on the ith step to the jth-1 step to obtain a fitting line; and
0313: and taking the preset points on the (j-1) th step as starting points, and circularly executing the comparison step and the fitting step until the preset points on all the steps are fitted to obtain a plurality of fitting lines.
In the description herein, references to the description of the terms "certain embodiments," "one example," "exemplary," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps of the process, and the scope of the preferred embodiments of the present application includes other implementations in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the present application.
Although embodiments of the present application have been shown and described above, it is to be understood that the above embodiments are exemplary and not to be construed as limiting the present application, and that changes, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present application.
Claims (17)
1. A method of detection, comprising:
acquiring height distribution information of different positions of a region to be detected of a workpiece, wherein the workpiece is placed on a bearing device;
acquiring a response curve of the workpiece according to the height distribution information, wherein the driving part is used for driving the bearing device to move along the height direction, the minimum time difference of adjacent nodes with sudden change in the extension direction on the response curve is larger than or equal to the response period of the driving part, and the nodes with sudden change in the extension direction of the response curve refer to discontinuous nodes on the response curve; and
controlling the driving piece to drive the bearing device to move according to the response curve;
the height distribution information includes a height profile having a plurality of steps, and the obtaining a response profile of the driving member based on the height distribution information includes:
obtaining a plurality of fitting lines according to the height distribution of a plurality of continuous steps along the preset direction on the height curve; and
and acquiring the response curve according to a plurality of fit lines.
2. The inspection method according to claim 1, wherein the workpiece is inspected by an image pickup device, and the response curve satisfies a condition:
when the driving piece is controlled to drive the bearing device to move according to the response curve, the workpieces in the field range of the image acquisition device are all located in the field depth range of the image acquisition device.
3. The inspection method according to claim 1, wherein the height distribution information includes a height profile, and the acquiring height distribution information of different positions of the region to be inspected of the workpiece includes:
measuring a plurality of distances of different positions of the region to be measured relative to a reference position by adopting a height-fixing detection device;
drawing a fitting point corresponding to each distance according to the same reference; and
connecting a plurality of the fitting points to obtain the height curve.
4. The detection method according to claim 1, wherein obtaining a plurality of fit lines according to the height distribution of a plurality of steps on the height curve in a predetermined direction comprises:
a comparison step: comparing whether the vertical distance between any point on each line segment and any step spanned by the line segments in a plurality of line segments is greater than a preset distance, wherein the plurality of line segments are formed by taking a preset point on the ith step as a starting point and respectively taking a preset point on the step behind the ith step as an end point, i is greater than or equal to 1, and i is a positive integer;
fitting: when the vertical distance from at least one point on the line segment to any one step from the ith step to the jth step spanned by the line segment is greater than the preset distance, fitting all the preset points on the ith step to the jth-1 step to obtain a fitting line, wherein j is greater than i, and j is a positive integer; and
and circularly executing the comparison step and the fitting step by taking the preset point on the (j-1) th step as a starting point until the preset points on all the steps are fitted to obtain a plurality of fitted lines.
5. The inspection method of claim 1, wherein the height distribution information comprises a set of height values, and wherein the obtaining height distribution information for different positions of the region of the workpiece to be inspected comprises:
and measuring a plurality of distances of different positions of the region to be measured relative to a reference position by adopting a height-fixing detection device, and taking the plurality of distances as a set to obtain the height distribution information.
6. The inspection method of claim 5, wherein said obtaining a response curve of the workpiece based on the height distribution information comprises:
a calculation step: sequentially calculating the difference value between the ith numerical value and other subsequent numerical values in the set;
a comparison step: after calculating a difference value every time, comparing whether the absolute value of the difference value is greater than a preset distance or not;
fitting: when the absolute value of the difference between the ith numerical value and the jth numerical value is greater than the preset distance, drawing points corresponding to the ith numerical value to the jth-1 numerical value on the same basis, and connecting the plurality of drawing points to obtain a fitting line, wherein j is greater than or equal to 1, i is greater than or equal to 1, and i and j are positive integers;
circularly executing the calculating step, the comparing step and the fitting step on the basis of the j-1 th numerical value as a calculation basis until all the drawing points corresponding to the numerical values in the set are fitted to obtain a plurality of fitting lines; and
and acquiring the response curve according to a plurality of fitting lines.
7. The detection method according to claim 4 or 6,
the preset distance is a preset proportion of the depth of field of the image acquisition device, wherein the image acquisition device is used for detecting the workpiece.
8. The detection method according to claim 4 or 6, wherein the fitted line comprises a fitted line segment, and/or a fitted curve.
9. A detection system, comprising:
the bearing device is used for bearing a workpiece;
the driving piece is used for driving the bearing device to move along the height direction; and
one or more processors to:
acquiring height distribution information of different positions of a region to be detected of a workpiece; acquiring a response curve of the workpiece according to the height distribution information, wherein the minimum time difference of adjacent nodes with sudden change in the extension direction on the response curve is larger than or equal to the response period of the driving part, and the nodes with sudden change in the extension direction of the response curve refer to discontinuous nodes on the response curve; controlling the driving piece to drive the bearing device to move according to the response curve;
the height profile information includes a height profile having a plurality of steps, one or more of the processors further configured to:
obtaining a plurality of fitting lines according to the height distribution of a plurality of continuous steps along the preset direction on the height curve; and
and acquiring the response curve according to a plurality of fit lines.
10. The inspection system of claim 9, further comprising an image capture device configured to capture the workpiece, wherein the one or more processors are configured to control the workpiece within a field of view of the image capture device to be within a depth of field of the image capture device when the drive member drives the carrier device to move according to the response curve.
11. The detection system according to claim 9, wherein the height distribution information comprises a height profile, the detection system further comprising a height determination detection device for measuring a plurality of distances of different positions of the region to be detected with respect to a reference position; the one or more processors are configured to obtain a plurality of the distances, plot a fitted point corresponding to each of the distances on the same basis, and connect the fitted points to obtain the height curve.
12. The detection system of claim 9, wherein one or more of the processors are further configured to perform:
a comparison step: comparing whether the vertical distance between any point on each line segment and any step spanned by the line segments in a plurality of line segments is greater than a preset distance, wherein the plurality of line segments are formed by taking a preset point on the ith step as a starting point and respectively taking a preset point on the step behind the ith step as an end point, i is greater than or equal to 1, and i is a positive integer;
fitting: when the vertical distance from at least one point on the line segment to any one step from the ith step to the jth step spanned by the line segment is greater than the preset distance, fitting all the preset points on the ith step to the jth-1 step to obtain a fitting line, wherein j is greater than i, and j is a positive integer; and
and circularly executing the comparison step and the fitting step by taking the preset point on the (j-1) th step as a starting point until the preset points on all the steps are fitted to obtain a plurality of fitted lines.
13. The inspection system of claim 9, wherein the elevation distribution information comprises a set of elevation values, the inspection system further comprising elevation determination means for measuring a plurality of distances of different positions of the area under inspection with respect to a reference position; the one or more processors are further configured to obtain a plurality of the distances, and to aggregate the plurality of the distances to obtain the height distribution information.
14. The detection system of claim 13, wherein one or more of the processors are further configured to perform:
a calculation step: sequentially calculating the difference value between the ith numerical value and other subsequent numerical values in the set;
a comparison step: after calculating a difference value every time, comparing whether the absolute value of the difference value is greater than a preset distance or not;
fitting: when the absolute value of the difference between the ith numerical value and the jth numerical value is greater than the preset distance, drawing points corresponding to the ith numerical value to the jth-1 numerical value on the same basis, and connecting the plurality of drawing points to obtain a fitting line, wherein j is greater than or equal to 1, i is greater than or equal to 1, and i and j are positive integers;
circularly executing the calculating step, the comparing step and the fitting step on the basis of the j-1 th numerical value as a calculation basis until all the drawing points corresponding to the numerical values in the set are fitted to obtain a plurality of fitting lines; and
and acquiring the response curve according to a plurality of fitting lines.
15. Detection system according to claim 12 or 14,
the preset distance is a preset proportion of the depth of field of the image acquisition device, wherein the image acquisition device is used for detecting the workpiece.
16. The detection system according to claim 12 or 14, wherein the fitted line comprises a fitted line segment or a fitted curve.
17. One or more non-transitory computer-readable storage media storing a computer program that, when executed by one or more processors, causes the processors to perform the detection method of any one of claims 1 to 8.
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