CN112544123B - Electrostatic charge reduction system using wet gas - Google Patents
Electrostatic charge reduction system using wet gas Download PDFInfo
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- CN112544123B CN112544123B CN201980051498.5A CN201980051498A CN112544123B CN 112544123 B CN112544123 B CN 112544123B CN 201980051498 A CN201980051498 A CN 201980051498A CN 112544123 B CN112544123 B CN 112544123B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/02—Carrying-off electrostatic charges by means of earthing connections
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
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Abstract
The present invention relates to an electrostatic charge reduction system using a wet gas, comprising a conductor connected to a low voltage power supply, an electrostatic charge reduction member having at least a first surface, and a wet gas supply for continuously supplying a wet gas having a relative humidity of more than 60% to the first surface of the electrostatic charge reduction member and/or a discharge surface of an electrostatic latent object having an electrostatic charge. The electrostatic charge on the electrostatic latent object is at least drastically reduced to at least half or less of the original by momentarily contacting and separating the first surface of the electrostatic charge reduction member with the discharge surface of the electrostatic latent object.
Description
Technical Field
The present invention relates to an electrostatic charge reduction technique, and more particularly, to an electrostatic charge reduction system using a wet gas.
Background
It is well known in the global electronics industry that damage to chips from electrostatic discharge (ESD, electrostatic discharge) can cause billions of losses each year. In today's high-speed, high-throughput automated production environments, there is an increasing risk that microchips will be susceptible to damage due to the presence of electrostatic discharge events. The use of gas ionizers to control electrostatic charge has long been a widely used method in the electronics industry. One of the biggest natural disadvantages of gas ionizer is that it cannot neutralize numerous electrostatic charges on the chip fast enough, since a certain time of extinction (decay time) is required to reduce the electrostatic charge to safe and comfortable levels. Thus, in today's highly competitive manufacturing industry, research into a method of rapidly and economically mitigating static electricity in an increasingly high-speed automated manufacturing environment to cope with rapid pace and high speed changes is a global urgent need to solve.
In the prior art, wet gas is considered as one of effective methods for reducing static electricity. While the prior art cited the benefits of using such a wet gas to mitigate electrostatic charge, it is appreciated that this effectiveness is more suitable for assembling Printed Circuit Boards (PCBA) and microchips, where the wet gas exhibits good results on such small-sized and highly compact electrostatic sensitive components.
However, these prior art techniques will not address these electrostatic charge problems faced by the manufacturing industry when dealing with objects having large insulating surface areas or materials of high purity or high insulating properties (e.g., polymeric films, sheets or broadnets, etc.). Accordingly, further research and development is needed to adequately overcome these problems.
Disclosure of Invention
According to one aspect, there is provided an electrostatic charge reduction system using a wet gas, comprising a conductor connected to a low voltage power supply, an electrostatic charge reduction component having at least a first surface, and a wet gas supply for continuously supplying wet gas having a relative humidity of greater than 60% to the first surface of the electrostatic charge reduction component and/or a discharge surface of an electrostatic latent object (static latent object) having an electrostatic charge; wherein the electrostatic charge on the electrostatic latent object is at least drastically reduced to at least half or less of the original by instantaneously contacting and separating the first surface of the electrostatic charge reducing member with the discharge surface of the electrostatic latent object.
Preferably, the first surface of the electrostatic charge reduction means and/or the discharge surface of the electrostatic latent is wetted (soak) with a wet gas having a relative humidity in the range of 70% -99%, the electrostatic charge on the electrostatic latent dropping at least sharply below one tenth to zero.
Preferably, the wet gas supply includes a wet gas generator and an input pipe for transmitting the wet gas generated by the wet gas generator to the electrostatic charge reducing part.
Preferably, the first surface of the electrostatic charge reduction component is a ventilation mesh (air networking) into and out of which the wet gas readily enters and exits through a non-obstructive gas flow path in the ventilation mesh.
Preferably, the electrostatic charge reducing part includes a roller (roller) disposed in a first direction, the electrostatic latent being an electrostatic latent moving in a second direction different from the first direction, the first surface of the roller and the discharge surface of the flexible electrostatic latent moving in the same direction when the first surface of the roller is instantaneously contacted with and then separated from the discharge surface of the flexible electrostatic latent.
Preferably, the rollers comprise at least one first roller comprising a roller body having a cylindrical surface and a roller shaft connecting the conductors, wherein the discharge surface of the flexible electrostatic latent is momentarily contacted and then separated from the cylindrical surface of the roller body.
Preferably, one of the first rollers is provided, the first roller rotating in a counter-clockwise direction and the flexible electrostatic latent rotating in the same counter-clockwise direction to pass the first roller.
Preferably, more than one of said first rollers is provided, the roller body of each of said first rollers rotating about its roller axis, the movement of said flexible electrostatic latent passing through said first rollers such that the discharge surface of said flexible electrostatic latent is brought into instantaneous contact with and then separated from said cylindrical surface of said roller body of at least one of said first rollers.
Preferably, an input pipe is provided comprising at least two branches for conveying the wet gas generated by the wet gas generator to at least two of the first rollers.
Preferably, the roller includes at least one second roller including a shaft electrically connected to the conductor and a roller surface surrounding the shaft, the flexible electrostatic latent moving in a horizontal direction, and the shaft being disposed above the flexible electrostatic latent such that the roller surface of the second roller is instantaneously contacted with and then separated from a discharge surface of the flexible electrostatic latent.
Preferably, the lever shaft is disposed in a horizontal direction, and the roller surface is rotatable about the lever shaft.
Preferably, the input tube is arranged parallel to the second roller and has a plurality of holes for guiding the wet gas on a surface facing the roller surface.
Preferably, the roller comprises a dispenser formed by a plate having a plurality of dispensing bars, the dispensing bars being rotatably disposed relative to each other, the discharge surface of the flexible electrostatic latent being in instantaneous contact with the outer surface of at least one of the plurality of dispensing bars and then separated.
Preferably, the plurality of dispensing bars are disposed on the plate in a ring pattern and the plate has a sidewall cover attached around its edge to form a housing having an opening through which the flexible electrostatic latent is rolled into the dispenser and through the plurality of dispensing bars.
Preferably, the plate has attached to its middle a core rod, the flexible electrostatic latent being rolled into and through the plurality of dispensing rods and eventually rolled onto the core rod or out of the dispenser at the opening of the housing.
Preferably, the input pipe includes at least two branch pipes for delivering the wet gas generated by the wet gas generator to the dispenser; the two branch pipes are arranged at positions close to the opening, one branch pipe is positioned above the flexible electrostatic latent object, and the other branch pipe is positioned below the flexible electrostatic latent object.
Preferably, the electrostatic charge reducing part is an adhesive film removing mechanical mechanism including at least two side structures each having one groove facing each other, a pair of slidable rotating rods held in the two grooves to allow the slidable rotating rods to freely and easily slidably move, the flexible electrostatic latent being inserted into a gap between the slidable rotating rods such that a discharge surface of the flexible electrostatic latent is instantaneously contacted with and then separated from an outer surface of the slidable rotating rods.
Preferably, the slidable rotary rod is electrically connected to at least one of the two side structures, which are further electrically connected to the conductor.
Preferably, the input pipe includes at least two branch pipes for conveying the wet gas generated by the wet gas generator to the adhesive film removing mechanical mechanism; the two branch pipes are arranged on opposite sides of the slidable rotating rod.
Preferably, the electrostatic charge reduction means comprises at least first and second rollers spaced apart along a first direction, and a roller bracket for securing the first, second and input tubes, the input tubes being disposed above the flexible electrostatic latent.
Preferably, the roller bracket has a triangular shape and is movable in the second direction, the first roller and the second roller are disposed in parallel at a lower portion of the triangular shape, and the input tube is disposed at an upper portion of the triangular shape.
Preferably, the roller bracket has a rectangular shape and is movable in the second direction, the first roller and the second roller are disposed in parallel at a lower portion of the rectangular shape, and two or more input pipes are disposed at an upper portion of the rectangular shape.
Preferably, the wet gas supply device comprises a wet gas generator, a hollow chamber structure formed by an outer wall and an inner wall, and a wet gas transmitting member for transmitting the wet gas generated by the wet gas generator to the hollow chamber structure, the inner wall having pores distributed throughout, and the electrostatic charge reducing member comprises a roller disposed along a central axis of the hollow chamber structure.
Preferably, the rollers are surrounded by a static dissipative or conductive layer of resilient foam sheets or by protruding studs.
Preferably, the resistor has a resistance value of less than 10e7 ohms and is grounded or connected in series to the low voltage power supply.
Preferably, the flexible electrostatic latent comprises a polymeric or insulating film, a polymeric or insulating block, a polymeric or insulating sheet, a polymeric or insulating tape, or a polymeric or insulating mesh, and the electrostatic charge reducing member is made of plastic, metal, wood, rubber, or a combination thereof.
It is known to those skilled in the art that when wet gas having a relative humidity of less than 60% (e.g., 40% or 50%) wets and separates and is electrically connected to the electrostatic charge reducing component of the conductor, the static electricity on the electrostatic latent object does not show any significant drop, but when the relative humidity increases, e.g., to 60% or more, the electrostatic charge on the electrostatic latent object surprisingly drops sharply to at least half or even to less than one tenth to zero.
Drawings
The invention will be further described with reference to the accompanying drawings and examples, in which:
FIG. 1 is a schematic diagram of an electrostatic charge reduction system according to a first embodiment of the present application;
FIG. 2A is a schematic illustration of a first surface of an electrostatic charge reduction component of an electrostatic charge reduction system placed on a discharge surface of an electrostatic latent object;
FIG. 2B is a schematic illustration of a first surface of an electrostatic charge reduction component contacting a discharge surface of an electrostatic latent object;
FIG. 2C is a schematic diagram of the first surface of the electrostatic charge reduction component separated from the discharge surface of the electrostatic latent object;
FIG. 3 is a schematic diagram of an electrostatic charge reduction system according to a second embodiment of the present application;
FIG. 4 is a schematic diagram of an electrostatic charge reduction system according to a third embodiment of the present application;
FIG. 5A is a schematic diagram of a first variation of an electrostatic charge reduction system according to a third embodiment of the present application;
FIG. 5B is a schematic diagram of a second variation of an electrostatic charge reduction system according to a third embodiment of the present application;
FIG. 5C is a schematic diagram of a third variation of an electrostatic charge reduction system according to a third embodiment of the present application;
FIG. 5D is a schematic diagram of a fourth variation of an electrostatic charge reduction system according to a third embodiment of the present application;
FIG. 5E is a schematic diagram of a fifth variation of an electrostatic charge reduction system according to a third embodiment of the present application;
FIG. 6 is a schematic diagram of an electrostatic charge reduction system according to a fourth embodiment of the present application;
FIG. 7A is a schematic diagram of an electrostatic charge reduction system according to a fifth embodiment of the present application;
fig. 7B is an internal schematic view of an electrostatic charge reduction component of an electrostatic charge reduction system according to a fifth embodiment of the present application;
Fig. 7C is an external schematic view of an electrostatic charge reduction component of an electrostatic charge reduction system according to a fifth embodiment of the present application;
fig. 7D is a schematic diagram of a first variation of an electrostatic charge reduction system according to a fifth embodiment of the present application;
FIG. 8 is a schematic diagram of an electrostatic charge reduction system according to a sixth embodiment of the present application;
9A-9D are schematic diagrams of another variation of an electrostatic charge reduction system according to a seventh embodiment of the present application;
FIG. 10 is a schematic diagram of another electrostatic charge reduction system according to an eighth embodiment of the present application;
FIGS. 11A-11B are schematic views of preferred embodiments of rollers;
fig. 12 shows the residual charge after the first surface of the electrostatic charge reduction component of the electrostatic charge reduction system contacts the discharge surface of the electrostatic latent object.
Detailed Description
In order to make the novel features, aspects and advantages of the present invention more apparent, the present invention will be described in more detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Fig. 1 is a schematic diagram of an electrostatic charge reduction system according to a first embodiment of the present application. Figures 2A-2C illustrate the contact and separation of the electrostatic charge reduction components of the electrostatic charge reduction system with the discharge surface of the electrostatic latent object.
As shown in fig. 1, the electrostatic charge reduction system includes a conductor 20 connected to a low voltage power supply 40, an electrostatic charge reduction part 10 electrically connected to the conductor 20, and a wet gas supply 70 continuously supplying a wet gas having a relative humidity of more than 60%.
Preferably, the conductor 20 may have a resistance of less than 10e7 ohms. Preferably, the conductor 20 may be grounded or connected to a low voltage power supply 40 of 1.5V, 3V, 6V, 12V and 24V. It should be noted that the listed or tested low voltage power supply 40 is only an example, and those skilled in the art will recognize that any voltage source below the voltage of the electrostatic latent object 30 is permissible.
The electrostatic charge reduction system may be adapted for an electrostatic latent object 30 having a high electrostatic charge 32. For example, the electrostatic latent object 30 may be an object having a large insulating surface area or a material having high purity or high insulating properties, such as a polymer film, sheet, or wide mesh.
As shown in fig. 2A-2C, the first surface 11 of the electrostatic charge reduction component 10 and the discharge surface 31 of the electrostatic latent object 30 contact each other and then separate immediately and instantaneously (e.g., after 1-2 seconds, or at most after 5 seconds). Of course, other possible contact times may be selected by those skilled in the art. Meanwhile, the wet gas supplier 70 continuously supplies the wet gas having a relative humidity of more than 60%, preferably in the range of 70% -99%, to the discharge surface 1 of the electrostatic latent object 30 or the first surface 11 of the electrostatic charge reducing part 10. In a preferred embodiment, the wet gas supply 70 continuously supplies wet gas having a relative humidity in the range of 70% -99% to the contact point of the discharge surface 31 and the first surface 11. Of course, in another embodiment, the wet gas supply 70 continuously supplies only wet gas having a relative humidity in the range of 70% -99% to the discharge surface 31 or some other point of the first surface 11, and allows the discharge surface 31 and/or the first surface 11 to be wetted with the wet gas.
It has surprisingly been found that when the first surface 11 of the electrostatic charge reduction member 10 and the discharge surface 31 of the electrostatic latent object 30 are momentarily brought into contact and separated, the electrostatic charge on the electrostatic latent object 30 drops at least sharply below at least half of the original. Preferably, the electrostatic charge on the electrostatic latent object 30 drops sharply to less than a small fraction, e.g., less than one tenth, of the original high electrostatic charge level. This is related to factors such as contact time, duration and relative humidity of the humid gas.
Those skilled in the art will appreciate that in normal environments where the relative humidity is between 40% RH and 50% RH, a significant visible reduction in electrostatic charge is never obtained. Furthermore, when the first surface 11 of the wet gas-wetted electrostatic charge reduction member 10, which is electrically connected to the conductor 20, has a relative humidity of less than 60% (e.g., 40% or 50%), is momentarily contacted and separated, the electrostatic charge on the electrostatic latent object 30 does not drop, which is not surprising to those skilled in the art. However, when the RH (Relative humidity) of the wet gas wetted by the electrostatic charge reduction member 10 increases (e.g., to 60% or more), the electrostatic charge on the electrostatic latent object drops sharply to at least less than half, even to at least one tenth to zero. This is unexpected in that unexpectedly good results can be obtained in which the electrostatic charge is permanently reduced.
Table 1 shown in fig. 12 shows the remaining electrostatic charges of the electrostatic latent object 30 after the first surface 11 of the electrostatic charge reducing member 10 is separated from the electrostatic contact of the electrostatic latent object 30. Tests were performed on different voltages of the power supply, with similar results obtained at the same relative humidity and the same contact time.
The inventors are unaware of why the electrostatic charge is so surprisingly and significantly reduced at high relative humidity conditions, where the relative humidity is greater than 60%, while the electrostatic charge does not produce any significant reduction at normal dry standard production environments, where the relative humidity is between 40% rh and 50% rh.
It is possible that when the moisture gas of the contact surface reaches a certain concentration, it accidentally achieves an insulation breakdown, thereby making the contact point conductive and creating an advantageous condition for rapidly discharging the electrostatic charge to ground.
This finding would bring a new approach to static mitigation, overcoming the common problem of slow neutralization of electrostatic charges in gas ionizers. The current application will open up many new ways to mitigate the occurrence of notoriously static charges in various processes of equipment sensitive manufacturing plants.
Fig. 3 is a schematic diagram of an electrostatic charge reduction system according to a second embodiment of the present application. As shown in fig. 3, the electrostatic charge reduction system includes a grounded conductor 21, an electrostatic charge reduction part 10 electrically connected to the conductor 21, and a wet gas supply that continuously supplies a wet gas having a relative humidity higher than 60%. Preferably, the wet gas supply continuously supplies the wet gas having a humidity (relative humidity) in the range of 70% -99%. Preferably, the conductor 20 may have a resistance of less than 10e7 ohms. Preferably, the conductor 20 may be grounded or connected to a low voltage power supply 40 of 1.5V, 3V, 6V, 12V and 24V.
The electrostatic charge reduction system may be adapted for use with an electrostatic latent object 30 having a high electrostatic charge 32. In the present embodiment, the electrostatic latent matter 30 is a rectangular block filled with electrostatic charges, and the electrostatic charge reducing member 10 has a similar structure to the electrostatic latent matter 30, but more preferably has a slightly larger size. Of course, in other embodiments, the electrostatic charge reduction component 10 and the electrostatic latent object 30 may have other sizes or configurations. In the present embodiment, the electrostatic charge reducing part 10 and the electrostatic latent object 30 may have other structures, such as square, hemispherical, or other structures, as long as there is a contact surface therebetween.
As shown in fig. 3, the wet gas supply continuously supplies wet gas having a relative humidity of more than 60% to the contact point of the first surface 11 of the electrostatic charge reducing part 10 and the discharge surface (not shown) of the electrostatic latent object 30. Of course, in another embodiment, the wet gas supply continuously supplies only wet gas having a relative humidity in the range of 70% -99% to the discharge surface 31 or some other point of the first surface 11, and makes the discharge surface 31 and/or the first surface 11 wettable by the wet gas.
When the first surface 11 of the electrostatic charge reduction part 10 and the discharge surface of the electrostatic latent object 30 are in contact with each other and then instantaneously separated within at most 5 seconds, it has surprisingly been found that the electrostatic charge on the electrostatic latent object 30 drops sharply to less than half when the first surface 11 of the electrostatic charge reduction part 10 and the discharge surface of the electrostatic latent object 30 are instantaneously in contact and separated. Preferably, the electrostatic charge on the electrostatic latent object 30 drops sharply to less than a small fraction, e.g., less than one tenth, of the original high electrostatic charge level. This is related to factors such as contact time of the humid gas, relative humidity, etc.
In the present embodiment, the wet gas supplier includes a wet gas generator 50 and an input pipe 60 for conveying the wet gas having a high relative humidity generated by the wet gas generator 50 to the electrostatic charge reducing part 10. The input pipe 60 is provided along the longitudinal direction of the electrostatic charge reduction member 10, and provides a plurality of holes 61 for guiding the wet gas to the electrostatic charge reduction member 10. Preferably, the wet gas generator 50 may be a humidifier, or a device that generates wet gas by a jet of wet gas, evaporation of water vapor from a wet surface coating, capillary action, dipping, printing, heating water, or any other method known in the industry.
In the present embodiment, as shown in fig. 3, the first surface 11 of the electrostatic charge reducing part 10 may have a ventilation mesh structure in which wet gas easily enters and exits the ventilation mesh structure through a non-blocking gas flow path in the ventilation mesh structure.
In this embodiment, the use of a grounded electrostatic charge reduction member wetted with a wet gas column to reduce the electrostatic charge on the insulating material creates a new and economical method of eliminating the use of an air ionizer.
Fig. 4 is a schematic diagram of an electrostatic charge reduction system according to a third embodiment of the present application. As shown in fig. 4, the electrostatic charge reduction system includes a grounded conductor, an electrostatic charge reduction component electrically connected to the conductor, and a wet gas supply that is associated with a wet gas supply having a relative humidity of greater than 60%. Preferably, the wet gas supply continuously supplies the wet gas having a humidity (relative humidity) in the range of 70% -99%.
As shown in fig. 4, the conductor may be a ground line 200 having a resistance value less than 10e7 ohms. The electrostatic charge reduction feature may be a first roller 100 that rotates in a first direction (e.g., counter-clockwise or clockwise). The first roller 100 may include a roller body 102 having a cylindrical surface 101 and a roller bar 103 provided as a rotation shaft at the center of the roller body 102. The electrostatic latent substance may be the insulating film 300 freely rotatable in the same direction (for example, counterclockwise or clockwise). The wet gas supplier continuously supplies wet gas having a relative humidity of more than 60% to the contact point of the discharge surface 301 of the insulating film 300 and the cylindrical surface 101 of the roller body 102. Of course, in another embodiment, the wet gas supply continuously supplies only wet gas having a relative humidity in the range of 70% -99% to the discharge surface 301 or some other point of the cylindrical surface 101, and allows the discharge surface 301 and the cylindrical surface 101 to be wetted with the wet gas. The discharge surface 301 of the insulating film 300 is separated after instantaneous contact with the cylindrical surface 101 of the roller body 102. In this way, the high electrostatic charge on the discharge surface 301 of the insulating film 300 is unexpectedly reduced to an unexpectedly very low level, for example, less than one tenth of the initial electrostatic charge level. Of course, when the discharge surface 301 of the insulating film 300 is separated after being instantaneously contacted with the cylindrical surface 101 of the roller body 102, the insulating film 300 and the roller 100 may be disposed in other directions, and the discharge surface 301 of the insulating film 300 and the cylindrical surface 101 of the roller body 102 are moved in the same direction. In another preferred embodiment, for example, the insulating film 300 may be moved in a horizontal direction, and the roller body 103 is disposed at the center of the roller body 102, and the roller body 102 rotates around the roller body 103, for example, in a counterclockwise direction or a clockwise direction. Thus, during rotation of the roller body 102 and transfer of the insulating film 300, the discharge surface 301 of the insulating film 300 is instantaneously contacted with and then separated from the cylindrical surface 101 of the roller body 102. In a simplified embodiment, the roller post 103 and the roller body 102 may be integrally formed. In other preferred embodiments, a plurality of first rollers 110 may be provided, which embodiments will be discussed later.
Preferably, the cylindrical surface 101 of the roller body 102 may be made of plastic, metal, wood, rubber, or any combination of these materials. Preferably, the cylindrical surface 101 of the roller body 102 may be a ventilated mesh structure into which the wet gas easily enters and exits through a non-obstructive air flow path in the ventilated mesh structure.
In the embodiment shown in fig. 4, the wet gas supplier includes a wet gas generator 500 and an input pipe 600 for transmitting the wet gas having a high relative humidity generated by the wet gas generator 500 to the first roller 100. The input tube 600 is arranged in the axial direction of the first roller and provides a plurality of holes 601 for guiding moisture to the cylindrical surface 101 of the roller body 102. Preferably, the wet gas generator 50 may be a humidifier, or a device that generates wet gas by a jet of wet gas, evaporation of water vapor from a wet surface coating, capillary action, dipping, printing, heating water, or any other method known in the industry. It should be noted that the insulating film 300 may be replaced by any other flexible material (e.g., tape or board or mesh).
Fig. 5A-5D are schematic illustrations of variations of an electrostatic charge reduction system according to a third embodiment of the present application that can accommodate different insulating film access directions to achieve various film processing modes, thereby providing greater flexibility under the conditions of use of the present application.
As shown in fig. 5A, two first rollers 100 electrically connected to the ground conductor are disposed adjacent to each other in the longitudinal direction. Preferably, two first rollers 100 may be constructed according to any of the embodiments discussed in fig. 4. In the present embodiment, the input pipe 620 connected to the humid gas generator 500 has a specific configuration. As shown in fig. 5A, the input pipe 620 has one main pipe connecting the wet gas generator 500 and two branch pipes 621 and 624 parallel to the axes of the two first rollers 100, respectively. The insulating film 300 is first moved in the horizontal direction so that its discharge surface is in contact with the cylindrical surface of the first roller 100 disposed at the bottom and then instantaneously separated from the cylindrical surface. Then, the insulating film 300 is rotated upward together with the first roller 100 disposed at the bottom, thereby transferring the insulating film 300 to pass through the first roller 100 disposed at the top. After that, the discharge surface of the insulating film 300 is in contact with the cylindrical surface of the first roller 100 disposed at the top and then instantaneously separated from the cylindrical surface. After that, the insulating film 300 passes through the first roller 100 provided at the top and moves again in the horizontal direction.
As shown in fig. 5A, the branch pipes 621 and 624 are provided on opposite sides of the two first rollers 100, and a plurality of holes 622 and 623 for guiding the wet gas to them are further provided on the surface facing the cylindrical surfaces of the two first rollers. Alternatively, the plurality of holes may be replaced by long slits of thin air gap.
Of course, in another embodiment, two first rollers 100 may be disposed adjacent to each other in the horizontal direction. In this embodiment, the input pipe 620 may be located in a horizontal direction or a longitudinal direction for guiding the wet gas to cylindrical surfaces of the two first rollers, which are in contact with the discharge surface of the insulating film 300 and then instantaneously separated. Of course, the two rollers 100 may be disposed adjacent to each other in other directions, such as at an angle relative to the longitudinal direction, as shown in fig. 5B. In this embodiment, the input tubes 620 may each be positioned at a corresponding angle.
Fig. 5C shows another variant in which four first rollers 100 are provided. In the present embodiment, four first rollers 100 are disposed in parallel in the horizontal direction. As discussed above, the insulating film 300 moves in the horizontal direction to pass through the four first rollers 100, thereby coming into contact with the cylindrical surface of each of the first rollers 100 through the discharge surface thereof and then instantaneously separating. As shown in fig. 5C, the input pipe 620 has one main pipe connected to the wet gas generator 500 and two branch pipes having a plurality of holes for guiding the wet gas to the cylindrical surfaces of any two of the first rollers 100. Of course, in another embodiment, the input tube 620 may have more or fewer branches with multiple holes for directing the flow of moisture to the cylindrical surface of the first roller 100.
Fig. 5D and 5E show a further variant in which four first rollers 100 are provided. In the embodiment shown in fig. 5D, four first rollers 100 are arranged in two groups in parallel in the horizontal direction. In each set, two first rollers 100 are disposed parallel to each other in the longitudinal direction. The insulating film 300 first moves in the horizontal direction and then moves in the longitudinal direction to pass through the four first rollers 100.
As shown in fig. 5D, the input pipe 620 has one main pipe connected to the wet gas generator 500 and two branch pipes having a plurality of holes for guiding the wet gas to the cylindrical surfaces of any two of the first rollers 100. Of course, in another embodiment, the input tube 620 may have more or fewer branches with multiple holes for directing the flow of moisture to the cylindrical surface of the first roller 100. Of course, the manifold may be adjusted to any position in order to direct the wet gas to the cylindrical surface.
In the embodiment shown in fig. 5E, four first rollers 100 are arranged in two sets in parallel in the horizontal direction. In each set, three first rollers 100 are disposed longitudinally parallel to each other. The other first roller and the lowermost one of the three first rollers are disposed parallel to each other. In another embodiment, the other first roller 100 may be disposed parallel to the uppermost one of the three first rollers. The insulating film 300 first moves in the horizontal direction and then moves in the longitudinal direction to pass through the four first rollers 100.
Of course, in other embodiments, the first rollers may be provided in a different manner as long as the discharge surface of the insulating film 300 can be moved to contact with and then instantaneously separate from at least one cylindrical surface of at least one of the first rollers 100. Preferably, the insulating film 300 is movable to contact each cylindrical surface of all the first rollers 100 through the discharge surface thereof and then instantaneously separate therefrom.
As shown in fig. 5E, the input pipe 620 has one main pipe connected to the wet gas generator 500 and two branch pipes having a plurality of holes for guiding the wet gas to the cylindrical surfaces of any two of the first rollers 100. Of course, in another embodiment, the input tube 620 may have more or fewer branches with multiple holes for directing the flow of moisture to the cylindrical surface of the first roller 100.
Fig. 6 is a schematic diagram of an electrostatic charge reduction system according to a fourth embodiment of the present application. As shown in fig. 6, the electrostatic charge reduction system includes a ground conductor, an electrostatic charge reduction component electrically connected to the conductor, and a wet gas supply that continuously supplies a wet gas having a relative humidity of greater than 60%. Preferably, the wet gas supply continuously supplies the wet gas having a humidity (relative humidity) in the range of 70% -99%.
As shown in fig. 6, the conductor may be a ground line 200 having a resistance of less than 10e7 ohms. The electrostatic charge reducing feature may be a second roller 110, the second roller 110 comprising a shaft 112 electrically connected to the ground wire 200 and a roller surface 111 surrounding the shaft 112. Preferably, the roller surface 111 may be a ventilated mesh structure into and out of which the wet gas easily enters and exits through a non-obstructive gas flow path in the ventilated mesh structure. Preferably, the roller surface 111 is rotatable about the axle 112. Preferably, the roller surface 111 and the lever shaft 112 may also be integral or merely separate. Preferably, the roller surface 111 and the axle 112 may also be made of plastic, metal, wood, rubber, or any combination of these materials.
In the embodiment shown in fig. 6, the wet gas supplier includes a wet gas generator 500 and an input pipe 610 for conveying the wet gas having a high relative humidity generated by the wet gas generator 500 to the second roller 110. The input pipe 610 is disposed above the insulating film 310 and parallel to the lever shaft 112. The surface of the input tube 610 facing the lever shaft 112 is provided with a plurality of holes 611 for guiding the wet gas to the roller surface 111 of the second roller 110. Preferably, the wet gas generator 50 may be a humidifier, or a device that generates wet gas by a jet of wet gas, evaporation of water vapor from a wet surface coating, capillary action, dipping, printing, heating water, or any other method known in the industry. It should be noted that the insulating film 300 may be replaced by any other flexible material (e.g., tape or board or mesh).
As shown in fig. 6, the electrostatic latent object may be an insulating film 310 that moves in a first direction (e.g., a horizontal direction). The lever shaft 112 is disposed above the insulating film 310 such that the roller surface 111 of the second roller 110 is instantaneously contacted with and then separated from the discharge surface 311 of the insulating film 310. In this way, the electrostatic charge on the insulating film 310 drops sharply to less than a small fraction, e.g., less than one tenth, of the original high electrostatic charge level. In a preferred embodiment, the insulating film 310 may be wound in the rotation shaft and the insulating film 310 may be moved in a horizontal direction during rotation of the rotation shaft.
Fig. 7A-C are schematic diagrams of an electrostatic charge reduction system according to a fifth embodiment of the present application. As shown in fig. 7A-7C, the electrostatic charge reduction system includes a grounded conductor, an electrostatic charge reduction component electrically connected to the conductor, and a wet gas supply that continuously supplies a wet gas having a relative humidity greater than 60%.
For simplicity of illustration, in this embodiment, conductors and grounds are not shown in the drawings, and those skilled in the art will appreciate that conductors and grounds may be placed in any location in light of the above discussion.
As shown in fig. 7A-7C, the electrostatic charge reduction feature may be a dispenser 120 formed from a plate 122 having a plurality of dispensing bars 124, the dispensing bars 124 being arranged in a circular pattern, such as in one or more circular rings.
The plurality of dispensing bars 124 and the plate 122 are rotatably disposed relative to one another. For example, the plate 122 may be a rotatable circular plate and the plurality of distribution bars 124 may be fixed to the plate 122 or rotatably disposed on the plate 122. Further, for example, the plate 122 may be fixed while a plurality of dispensing bars 124 are rotatably disposed on the plate 122. In a preferred embodiment, the plate 122 may be a circular plate and made of plastic, metal, wood, rubber, or any combination of these materials.
As shown in fig. 7A-7C, the plate 122 has a sidewall cap attached around its edge to form a housing 123 having an opening 121 and a stem 125 in its middle. In a preferred embodiment, housing 123 is separable from plate 122. In this embodiment, the electrostatic latent may be an adhesive tape 320, which tape 320 is rolled into the dispenser 120 at the opening 121 and then passed through the plurality of dispensing bars 124 and finally wound onto the stem 125, or rolled out of the dispenser 120 at the opening 121 with or without passing through the stem 125. Thus, in a simplified embodiment, the plate 122 may be provided without such a core pin 125.
In one embodiment of the present application, at least one, and preferably all, of the plurality of dispensing stems 124 are wetted with a wet gas having an RH (relative humidity) of greater than 60% via a wet gas supply. In another embodiment of the present application, the core rod 125 is wetted with a wet gas having a relative humidity greater than 60%. In another embodiment, the plurality of dispensing stems 124 and core bar 125 are wetted with a wet gas having an RH (relative humidity) of greater than 60%. In another embodiment, the entire dispenser 120 is wetted with wet gas with RH (relative humidity) higher than 60% provided via a continuous supply of said wet gas.
As shown in fig. 7A-7C, when the tape 320 is wound into the dispenser 120 at the opening 121, the discharge surface of the tape 320 contacts at least one outer surface of at least one of the plurality of dispensing stems 124 or stems 125 (preferably all outer surfaces of the dispensing stems 124 and stems) and then instantaneously separates. In this way, the high electrostatic charge on the discharge surface of the tape 320 will be unexpectedly reduced to an exceptionally low level, for example, less than one tenth of the initial electrostatic charge level.
In a preferred embodiment as shown in fig. 7A, the wet gas supply includes a wet gas generator and an input pipe for conveying the wet gas generated by the wet gas generator to the electrostatic charge reducing part. In this embodiment, the input pipe 630 connected to the humid gas generator is specially constructed. As shown in fig. 7A, the input pipe 630 has one main pipe connecting the wet gas generator and two branch pipes 631 each parallel to the conveying direction of the adhesive tape 320 and close to the opening 121. The two branch pipes 631 have a plurality of holes 61 for introducing the humid gas into the distributor 120. Preferably, only a small opening 121 is provided to allow a minimum volume of wet gas to enter and exit the dispenser 120 to achieve an economical and efficient electrostatic charge reduction goal.
Preferably, the plate 122 may have a larger outer ring formed by a plurality of dispensing stems 124 disposed over a larger circumference to allow the tape 320 to form a larger wrap around the outer ring, thereby achieving a longer delivery distance, thereby providing more time for static charge on the tape 320 to steadily discharge before being dispensed. This design will further increase the static suppression efficiency, especially for very sensitive microchips or assembled PCBs (printed circuit boards). In a preferred embodiment, a plurality of dispensing bars 124 are provided at regular intervals. Of course, in another embodiment, the plurality of dispensing bars 124 may be arranged in a different manner, such as at irregular intervals.
However, in a first variation shown in fig. 7D, more dispensing stems 124 are provided to form a double circle pattern. In other variations, more dispensing stems 124 may be provided to form more circles to achieve a greater distance of travel, providing more time for static charge on the tape 320 to steadily discharge before being dispensed. These designs are particularly useful for ultra-sensitive devices where a minimum amount of electrostatic charge would pose a significant threat and risk of damage to the highly complex large scale integrated circuits.
Fig. 8 is a schematic diagram of an electrostatic charge reduction system according to a sixth embodiment of the present application. As shown in fig. 8, the electrostatic charge reduction system includes a ground conductor, an electrostatic charge reduction component electrically connected to the conductor, and a wet gas supply that continuously supplies a wet gas having a relative humidity of greater than 60%.
In this application, the electrostatic charge reducing member may be an adhesive film removing mechanism 130 including at least two side structures 131, each side structure 131 having one groove 132 facing each other. A pair of slidable rotating rods 133 are held in the two grooves 132 by insertion of both end portions into the grooves 132 to allow the slidable rotating rods 133 to freely and easily slide. Preferably, the adhesive film removing mechanism 130 has a square or rectangular structure of low height to allow the groove 132 to have an elongated shape. The two slidable rotary rods 133 are electrically connected to at least one of the two side structures 131, said side structure 131 being further electrically connected to the ground wire 200 by means of a further conductor 134.
In the present embodiment, the wet gas supplier includes a wet gas generator 500 and an input pipe 640 for transmitting the wet gas having a high relative humidity generated by the wet gas generator 500 to the adhesive film removing mechanical mechanism 130. The input pipe 640 may have a main pipe passing through a hole provided on a rod support on one side structure 131 and at least two branch pipes 641 having a plurality of holes 642 for guiding the wet gas to the slidable rotating rod 133. As shown in fig. 8, two branch pipes 641 may be provided at opposite sides of the slidable rotating rod 133.
In this application, the electrostatic latent may be an adhesive film 330 on a semiconductor wafer or other carrier. During the act of removing the adhesive film from the semiconductor wafer, an initial small portion of the adhesive film 330 is peeled off the wafer and inserted into the gap of the two slidable rotating rods 133, and then passes through the gap and is pulled upward from the gap. When the discharge surface of the adhesive film 330 is instantaneously contacted with the outside of the slidable rotating rod 133 and then separated, the electrostatic charge on the adhesive film 330 is drastically reduced to less than half of the original one. Preferably, the electrostatic charge on the adhesive film 330 drops sharply to less than a small fraction, e.g., less than one tenth, of the original high electrostatic charge level. This is related to the contact time and the relative humidity of the humid gas
Fig. 9A-9D are variations from the embodiment shown in fig. 4 and 5A-5D. For brevity, only the specific arrangement thereof will be described clearly. As shown in fig. 9A and 9B, the electrostatic charge reducing portion includes at least a first roller 710, a second roller 720, and a bracket 730 for supporting the first roller 710 and the second roller 720. In the present embodiment, the first roller 710 and the second roller 720 are electrically connected to each other and placed in parallel by the bracket 730. An input tube 740 connected to the wet gas generator is also supported by the holder 730. In this embodiment, the input tube 740 is disposed above the first roller 710 and the second roller 720 such that the bracket 730 holds the input tube 740 and the two first and second rollers 710, 720 together, forming a triangular structure to allow free movement in any plane. For example, the stent 730 may be formed in an isosceles triangle or a right triangle. The first roller 710 and the second roller 720 are disposed in parallel at a lower portion of the triangle shape, and the input tube 740 is disposed at an upper portion of the triangle shape (see fig. 9A-9B). It should be noted that the stent may also have other shapes, such as square, rectangular, or other regular or irregular shapes. The portable structure can be used alone, mounted on a frame, suspended in the air, integrated inside or outside the machine, etc. Those skilled in the art will appreciate that additional input tubes 740 or rollers may be added to create more design variations to achieve greater flexibility in the application of the present invention. As shown in fig. 9C and 9D, the rack 730 is a rectangular rack, two rollers are disposed in parallel at the lower portion of the rectangular rack, and two input pipes or three input pipes are disposed in parallel at the upper portion of the rectangular rack.
Fig. 10 is a schematic diagram of another electrostatic charge reduction system according to an eighth embodiment of the present application. As shown in fig. 10, the electrostatic charge reduction system includes a wet gas generator, a hollow chamber structure 800, and a wet gas transfer member 900 for transferring the wet gas generated by the wet gas generator to the hollow chamber structure 800, and a roller 700. In this embodiment, the wet gas generator may be constructed as described above, and the wet gas transfer member 900 may include an input pipe as described above, and an air inlet 910 communicating the input pipe with the hollow chamber structure 800, thereby transferring the wet gas having high relative humidity generated by the wet gas generator to the hollow chamber structure 800. As shown in fig. 10, the hollow chamber structure 800 may be a semi-cylindrical hollow chamber structure composed of a semi-cylindrical inner wall 820 and a semi-cylindrical outer wall 810, wherein the air holes 830 are distributed over the entire surface of the semi-cylindrical inner wall 820. The air inlet 910 is preferably disposed between the semi-cylindrical inner wall 820 and the semi-cylindrical outer wall 810. The roller 700 is placed along the central axis of the hollow chamber structure 800 by two side brackets provided at the ends of the hollow chamber structure 800.
In this embodiment, the wet gas fed into the semi-cylindrical hollow chamber structure 800 passes through the gas holes 830 and directly reaches the surface of the electrostatic latent object, such as the insulating film on the cylindrical surface of the roller 300, and finally flows out through the opening gap at the bottom of the semi-cylindrical hollow chamber structure 800. Surprisingly, the static reduction capability using this method performs equally well in terms of static reduction. It should be noted that the semi-cylindrical hollow chamber structure 800 may be configured in any shape, such as a hollow cylinder, a hollow cube shape, etc.
Fig. 11A-11B are diagrams of preferred embodiments of rollers. As shown in fig. 11A, the roller 700 may be wrapped with a static dissipative or conductive layer of flexible foam sheet 760 to form a soft surface conductive roller. Surprisingly, such an additional wrapped conductive roller achieves very similar results as a conductive roller without any wrapping. The conductive foam is added to provide a soft surface to improve the interface between the film and the roller to achieve optimal static charge reduction performance. As shown in fig. 11B, the roller 700 may be wrapped with a static dissipative or conductive layer of protruding studs 770 covering the entire surface of the roller, forming an even distribution of protruding static dissipative or conductive stud surfaces. It is also surprising that while not as soft as the soft surface design surrounding the soft conductive foam sheet, this design can still achieve a reduction in electrostatic charge down to very low electrostatic charge levels, the evenly distributed protruding electrostatic dissipation or conductive stud surface design will minimize contact surface area to reduce the risk of contact contamination in certain specific applications.
The electrostatic charge reduction system using a wet gas of the present invention provides for achieving a consistent optimal electrostatic charge reduction in a consistent direction of the adhesive film removal process.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.
While the invention has been described with reference to specific embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from its scope. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.
Claims (12)
1. An electrostatic charge reduction system using a wet gas, comprising a conductor connected to a low voltage power supply, an electrostatic charge reduction component having at least a first surface, and a wet gas supply for continuously supplying wet gas having a relative humidity greater than 60% to the first surface of the electrostatic charge reduction component and/or a discharge surface of a flexible electrostatic latent object having an electrostatic charge; wherein the electrostatic charge on the flexible electrostatic latent object is at least drastically reduced to at least half or less of the original by momentarily contacting and separating the first surface of the electrostatic charge reduction component with the discharge surface of the flexible electrostatic latent object; the wet gas supply includes a wet gas generator and an input pipe for transmitting the wet gas generated by the wet gas generator to the electrostatic charge reducing part;
The electrostatic charge reducing member includes a roller disposed in a first direction, the flexible electrostatic latent being a flexible electrostatic latent moving in a second direction different from the first direction, the first surface of the roller and the discharge surface of the flexible electrostatic latent moving in the same direction when the first surface of the roller is instantaneously contacted with and then separated from the discharge surface of the flexible electrostatic latent;
the rollers comprise at least two first rollers, each first roller comprising a roller body having a cylindrical surface and a roller bar connecting the conductors, the roller body of each first roller rotating about its roller axis; the discharge surface of the flexible electrostatic latent is instantaneously contacted with the cylindrical surface of the roller body and then separated; the input pipe includes at least two branch pipes for conveying the wet gas generated by the wet gas generator to at least two of the first rollers.
2. An electrostatic charge reduction system using a humid gas according to claim 1, wherein the first surface of the electrostatic charge reduction member and the discharge surface of the flexible electrostatic latent object are wetted with a humid gas having a relative humidity in the range of 70% -99%, the electrostatic charge on the flexible electrostatic latent object dropping at least sharply below one tenth to zero.
3. The electrostatic charge reduction system using a humid gas according to claim 1, wherein the first surface of the electrostatic charge reduction member is a ventilated mesh structure into and out of which the humid gas easily enters and exits through a non-blocking gas flow path in the ventilated mesh structure.
4. An electrostatic charge reduction system using a wet gas, comprising a conductor connected to a low voltage power supply, an electrostatic charge reduction component having at least a first surface, and a wet gas supply for continuously supplying wet gas having a relative humidity greater than 60% to the first surface of the electrostatic charge reduction component and/or a discharge surface of a flexible electrostatic latent object having an electrostatic charge; wherein the electrostatic charge on the flexible electrostatic latent object is at least drastically reduced to at least half or less of the original by momentarily contacting and separating the first surface of the electrostatic charge reduction component with the discharge surface of the flexible electrostatic latent object; the wet gas supply includes a wet gas generator and an input pipe for transmitting the wet gas generated by the wet gas generator to the electrostatic charge reducing part;
The electrostatic charge reducing member includes a roller disposed in a first direction, the flexible electrostatic latent being a flexible electrostatic latent moving in a second direction different from the first direction, the first surface of the roller and the discharge surface of the flexible electrostatic latent moving in the same direction when the first surface of the roller is instantaneously contacted with and then separated from the discharge surface of the flexible electrostatic latent;
the roller comprises a dispenser formed by a plate having a plurality of dispensing bars, the dispensing bars being rotatably disposed relative to each other, the discharge surface of the flexible electrostatic latent being in momentary contact with the outer surface of at least one of the plurality of dispensing bars and then separated; the plurality of dispensing bars are disposed on the plate in a ring pattern and the plate has a sidewall cover attached around its edge to form a housing having an opening through which the flexible electrostatic latent is rolled into the dispenser and through the plurality of dispensing bars.
5. The electrostatic charge reduction system using humid gas according to claim 4, wherein the plate has a core attached at its middle, the flexible electrostatic latent is rolled into and through the plurality of dispensing rods and finally rolled onto the core or out of the dispenser at the opening of the housing.
6. An electrostatic charge reduction system using a wet gas according to claim 5, wherein the input pipe includes at least two branch pipes for conveying the wet gas generated by the wet gas generator to the distributor; the two branch pipes are arranged at positions close to the opening, one branch pipe is positioned above the flexible electrostatic latent object, and the other branch pipe is positioned below the flexible electrostatic latent object.
7. An electrostatic charge reduction system using a wet gas, comprising a conductor connected to a low voltage power supply, an electrostatic charge reduction component having at least a first surface, and a wet gas supply for continuously supplying wet gas having a relative humidity greater than 60% to the first surface of the electrostatic charge reduction component and/or a discharge surface of a flexible electrostatic latent object having an electrostatic charge; wherein the electrostatic charge on the flexible electrostatic latent object is at least drastically reduced to at least half or less of the original by momentarily contacting and separating the first surface of the electrostatic charge reduction component with the discharge surface of the flexible electrostatic latent object; the wet gas supply includes a wet gas generator and an input pipe for transmitting the wet gas generated by the wet gas generator to the electrostatic charge reducing part; the electrostatic charge reducing part is an adhesive film removing mechanical mechanism including at least two side structures each having one groove facing each other, a pair of slidable rotating rods held in the two grooves to allow the slidable rotating rods to freely and easily slidably move, the flexible electrostatic latent being inserted into a gap between the slidable rotating rods such that a discharge surface of the flexible electrostatic latent is instantaneously contacted with and then separated from an outer surface of the slidable rotating rods; the slidable rotary rod is electrically connected to at least one of the two side structures, which are further electrically connected to the conductor; the input pipe includes at least two branch pipes for delivering the wet gas generated by the wet gas generator to the adhesive film removing mechanical mechanism; the two branch pipes are arranged on opposite sides of the slidable rotating rod.
8. An electrostatic charge reduction system using a wet gas, comprising a conductor connected to a low voltage power supply, an electrostatic charge reduction component having at least a first surface, and a wet gas supply for continuously supplying wet gas having a relative humidity greater than 60% to the first surface of the electrostatic charge reduction component and/or a discharge surface of a flexible electrostatic latent object having an electrostatic charge; wherein the electrostatic charge on the flexible electrostatic latent object is at least drastically reduced to at least half or less of the original by momentarily contacting and separating the first surface of the electrostatic charge reduction component with the discharge surface of the flexible electrostatic latent object; the wet gas supply includes a wet gas generator and an input pipe for transmitting the wet gas generated by the wet gas generator to the electrostatic charge reducing part;
the electrostatic charge reducing member includes a roller disposed in a first direction, the flexible electrostatic latent being a flexible electrostatic latent moving in a second direction different from the first direction, the first surface of the roller and the discharge surface of the flexible electrostatic latent moving in the same direction when the first surface of the roller is instantaneously contacted with and then separated from the discharge surface of the flexible electrostatic latent; the electrostatic charge reduction component comprises at least a first roller and a second roller arranged at intervals along a first direction, and a roller bracket for fixing the first roller, the second roller and the input tube, wherein the input tube is arranged above the flexible electrostatic latent object; the roller bracket has a triangular shape and is movable in the second direction, the first roller and the second roller are disposed in parallel at a lower portion of the triangular shape, and the input tube is disposed at an upper portion of the triangular shape; or the roller support has a rectangular shape and is movable in the second direction, the first roller and the second roller are disposed in parallel at a lower portion of the rectangular shape, and two or more input pipes are disposed at an upper portion of the rectangular shape.
9. An electrostatic charge reduction system using a wet gas according to any one of claims 1 to 8, wherein the wet gas supply means comprises a wet gas generator, a hollow chamber structure constituted by an outer wall and an inner wall, and a wet gas transmitting member for transmitting the wet gas generated by the wet gas generator to the hollow chamber structure, the inner wall having pores distributed throughout, and the electrostatic charge reduction member comprises rollers disposed along a central axis of the hollow chamber structure.
10. An electrostatic charge reduction system using a humid gas according to any one of claims 1-8, wherein the rollers are surrounded by a static dissipative or conductive layer of resilient foam sheets or by a static dissipative or conductive layer of protruding studs.
11. An electrostatic charge reduction system using a humid gas according to any one of claims 1-8, wherein the conductor is a resistor having a resistance value less than 10e7 ohms and is grounded or connected in series to the low voltage power supply.
12. An electrostatic charge reduction system using a humid gas according to any one of claims 1-8, wherein the flexible electrostatic latent comprises a polymeric or insulating film, a polymeric or insulating block, a polymeric or insulating sheet, a polymeric or insulating tape or a polymeric or insulating mesh, the electrostatic charge reduction member being made of plastic, metal, wood, rubber or a combination thereof.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNPCT/CN2018/099858 | 2018-08-10 | ||
| CN2018099858 | 2018-08-10 | ||
| PCT/CN2019/099920 WO2020030082A1 (en) | 2018-08-10 | 2019-08-09 | Static charge reduction system using humid air |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112544123A CN112544123A (en) | 2021-03-23 |
| CN112544123B true CN112544123B (en) | 2024-01-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201980051498.5A Active CN112544123B (en) | 2018-08-10 | 2019-08-09 | Electrostatic charge reduction system using wet gas |
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| Country | Link |
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| CN (1) | CN112544123B (en) |
| WO (1) | WO2020030082A1 (en) |
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| WO2020030082A1 (en) | 2020-02-13 |
| CN112544123A (en) | 2021-03-23 |
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