CN112467050A - OLED device and preparation method thereof - Google Patents

OLED device and preparation method thereof Download PDF

Info

Publication number
CN112467050A
CN112467050A CN202011308502.2A CN202011308502A CN112467050A CN 112467050 A CN112467050 A CN 112467050A CN 202011308502 A CN202011308502 A CN 202011308502A CN 112467050 A CN112467050 A CN 112467050A
Authority
CN
China
Prior art keywords
film
oled device
layer
encapsulation layer
preparing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011308502.2A
Other languages
Chinese (zh)
Inventor
程家有
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Integrated Display Technology Co Ltd
Original Assignee
Semiconductor Integrated Display Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Integrated Display Technology Co Ltd filed Critical Semiconductor Integrated Display Technology Co Ltd
Priority to CN202011308502.2A priority Critical patent/CN112467050A/en
Publication of CN112467050A publication Critical patent/CN112467050A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/842Containers
    • H10K50/8426Peripheral sealing arrangements, e.g. adhesives, sealants
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The invention relates to the field of micro display, and discloses an OLED device and a preparation method thereof, wherein the preparation method of the OLED device comprises the following steps: providing a silicon wafer substrate, and preparing a CMOS (complementary metal oxide semiconductor) driving circuit on the silicon wafer substrate; preparing an AMOLED light emitting layer according to the pixel arrangement structure; preparing an encapsulation layer on the AMOLED light emitting layer; attaching a protective film to the outer side of the packaging layer to coat the whole packaging layer to obtain a semi-finished product; and tearing off the adhesive film after the semi-finished product is transported, and finishing the subsequent module process to obtain the OLED device. The OLED device and the preparation method thereof overcome the problem that an encapsulation film layer in the prior art is easy to damage, and the semi-finished product is effectively protected.

Description

OLED device and preparation method thereof
Technical Field
The invention relates to the field of OLED (organic light emitting diode) packaging, in particular to an OLED device and a preparation method thereof.
Background
The silicon-based OLED display is a novel display technology combining a semiconductor and an OLED, and is a main scheme of VR/AR and other next-generation intelligent wearable display. With the continued advancement of 5G and AI technologies, more and more wearable display products will become more attractive. The silicon-based OLED micro display device has the advantages of high resolution, low power consumption, small size, light weight and the like, is widely applied to high-resolution near-to-eye display industries such as AR, VR, wearable equipment, industrial security, medical treatment and the like, gradually becomes an important point of a novel display industry, and has great market potential. Organic Light Emitting Display (OLED) is a new generation of Display, and has many advantages of self-luminescence, fast response, wide viewing angle, color saturation, etc. compared with liquid crystal Display. However, the OLED device is sensitive to water and oxygen in the air and is easy to absorb water and oxidize, so that the service life of the OLED device is reduced or a pixel fails, and therefore, the OLED device is effectively packaged, the OLED device is sufficiently isolated from the water and oxygen, and the service life of the OLED device is prolonged. However, Micro OLEDs are more in process and more complex in process, and in the current stage, the key point is that in the research and development stage, the semi-finished product is not effectively protected, and the packaging film layer is easily damaged, thereby affecting the device structure.
Disclosure of Invention
The invention aims to provide an OLED device and a preparation method thereof, the OLED device and the preparation method thereof overcome the problem that an encapsulation film layer in the prior art is easy to damage, and the effective protection of a semi-finished product is realized.
In order to achieve the above object, the present invention provides a method for manufacturing an OLED device, including: providing a silicon wafer substrate, and preparing a CMOS (complementary metal oxide semiconductor) driving circuit on the silicon wafer substrate; preparing an AMOLED light emitting layer according to the pixel arrangement structure; preparing an encapsulation layer on the AMOLED light emitting layer; attaching a protective film to the outer side of the packaging layer to coat the whole packaging layer to obtain a semi-finished product; and tearing off the adhesive film after the semi-finished product is transported, and finishing the subsequent module process to obtain the OLED device.
Preferably, the protective film includes: release films, adhesive films, and base films; and, the attaching the protective film to the outside of the encapsulation layer includes: the release film is removed, and the adhesive film and the base film are attached to the outside of the encapsulation layer.
Preferably, the attaching the adhesive film and the base film to the outside of the encapsulation layer includes: the adhesive film and the base film are attached to the outside of the encapsulation layer in an upward or downward manner.
Preferably, the thickness of the peeling film is configured to be 10-50um, and the material of the peeling film is configured to be a silica gel release film; the thickness of the adhesive film is configured to be 20-100um, and the material of the adhesive film is configured to be polyurethane, styrene-acrylonitrile copolymer; the thickness of the base film is configured to be 10-50um, and the material of the base film is configured to be ethylene terephthalate.
Preferably, the size of the protective film is greater than or equal to the size of the silicon wafer substrate.
Preferably, the adhesion force of the protective film and the packaging layer is not more than 0.2N/25 mm.
In addition, the invention also provides an OLED device which is prepared by using the preparation method of the OLED device.
By the technical scheme, the OLED semi-finished product protected by the protective film is formed, the packaging layer and the OLED device on the lower layer can be protected from being damaged to the greatest extent in the subsequent hysteresis processing or transmission process, and the protective film can be kept until the next module process is required to be performed and can be torn off before the subsequent process.
Additional features and advantages of the invention will be set forth in the detailed description which follows.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a flow chart of a method of making an OLED device of the present invention;
FIG. 2 is a schematic diagram of a semi-finished product according to one aspect of the present invention; and
fig. 3 is a schematic structural diagram of a protective film according to the present invention.
Description of the reference numerals
1 silicon wafer substrate 2 encapsulation layer
3 protective film 4 Release film
5 adhesive film 6 base film
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
In the present invention, unless otherwise specified, the terms of orientation such as "upper, lower, left, right" used herein generally refer to the upper, lower, left, and right directions as shown in fig. 2. "inner and outer" refer to the inner and outer portions of a particular contour. "distal and proximal" refer to distal and proximal relative to a component.
Fig. 1 is a method for manufacturing an OLED device, as shown in fig. 1, the method for manufacturing the OLED device includes:
s101, providing a silicon wafer substrate, and preparing a CMOS (complementary metal oxide semiconductor) driving circuit on the silicon wafer substrate;
s102, preparing an AMOLED light emitting layer according to a pixel arrangement structure;
s103, preparing an encapsulation layer on the AMOLED light emitting layer;
s104, attaching a protective film to the outer side of the packaging layer to coat the whole packaging layer to obtain a semi-finished product, wherein the attached drawing after coating is shown in figure 2; and
and S105, tearing off the adhesive film after the semi-finished product is transported, and completing the subsequent module process to obtain the OLED device.
Preferably, as shown in fig. 3, the protective film may include: release films, adhesive films, and base films; and, the attaching the protective film to the outside of the encapsulation layer includes: the release film is removed, and the adhesive film and the base film are attached to the outside of the encapsulation layer. As shown in fig. 3.
Preferably, the attaching the adhesive film and the base film to the outside of the encapsulation layer includes: the adhesive film and the base film are attached to the outside of the encapsulation layer in an upward or downward manner.
Preferably, the thickness of the peeling film is configured to be 10-50um, and the material of the peeling film is configured to be a silica gel release film, and preferably, the thickness is selected to be 25 um; the thickness of the adhesive film is configured to be 20-100um, and the material thereof is configured to be polyurethane, styrene-acrylonitrile copolymer, preferably, the thickness is selected to be 30 um; the thickness of the base film is configured to be 10-50um, and the material thereof is configured to be ethylene terephthalate, preferably, the thickness is selected to be 25 um.
Preferably, the size of the protective film is greater than or equal to the size of the silicon wafer substrate. Design theory like this makes things convenient for manual tear film, adopts whole face to paste up, and the mode can adopt pad pasting technology up or down, and is special, the pad pasting technology up indicates: the substrate faces downwards, the protective film faces upwards and is attached to the substrate, and the downward film attaching process refers to the following steps: the substrate faces upwards, and the protective film faces downwards to be attached to the substrate, wherein, the film attaching process is selected but not limited to the upward film attaching process, and if the manual mode is adopted, the downward film attaching mode can be adopted.
Preferably, the adhesion force of the protective film and the packaging layer is not more than 0.2N/25 mm.
In addition, the invention provides an OLED device which is prepared by using the preparation method of the OLED device.
Compared with the prior art, the OLED device has the same distinguishing technical characteristics and technical effects as the preparation method of the OLED device, and the details are not repeated herein.
The preferred embodiments of the present invention have been described in detail with reference to the accompanying drawings, however, the present invention is not limited to the specific details of the above embodiments, and various simple modifications can be made to the technical solution of the present invention within the technical idea of the present invention, and these simple modifications are within the protective scope of the present invention.
It should be noted that the various technical features described in the above embodiments can be combined in any suitable manner without contradiction, and the invention is not described in any way for the possible combinations in order to avoid unnecessary repetition.
In addition, any combination of the various embodiments of the present invention is also possible, and the same should be considered as the disclosure of the present invention as long as it does not depart from the spirit of the present invention.

Claims (7)

1. A preparation method of an OLED device is characterized by comprising the following steps:
providing a silicon wafer substrate, and preparing a CMOS (complementary metal oxide semiconductor) driving circuit on the silicon wafer substrate;
preparing an AMOLED light emitting layer according to the pixel arrangement structure;
preparing an encapsulation layer on the AMOLED light emitting layer;
attaching a protective film to the outer side of the packaging layer to coat the whole packaging layer to obtain a semi-finished product;
and tearing off the adhesive film after the semi-finished product is transported, and finishing the subsequent module process to obtain the OLED device.
2. The method of manufacturing an OLED device according to claim 1, wherein the protective film includes: release films, adhesive films, and base films;
and, the attaching the protective film to the outside of the encapsulation layer includes:
the release film is removed, and the adhesive film and the base film are attached to the outside of the encapsulation layer.
3. The method of manufacturing an OLED device according to claim 2, wherein the attaching the adhesive film and the base film to an outer side of the encapsulation layer includes:
the adhesive film and the base film are attached to the outside of the encapsulation layer in an upward or downward manner.
4. The method for manufacturing the OLED device according to claim 2, wherein the thickness of the release film is configured to be 10-50um, and the material thereof is configured to be a silicone release film;
the thickness of the adhesive film is configured to be 20-100um, and the material of the adhesive film is configured to be polyurethane, styrene-acrylonitrile copolymer;
the thickness of the base film is configured to be 10-50um, and the material of the base film is configured to be ethylene terephthalate.
5. The method of claim 2, wherein the size of the protective film is greater than or equal to the size of the silicon wafer substrate.
6. The method of claim 1, wherein the protective film has an adhesion to the encapsulation layer of no more than 0.2N/25 mm.
7. An OLED device, characterized in that it is produced using the method of producing an OLED device according to any one of claims 1 to 6.
CN202011308502.2A 2020-11-20 2020-11-20 OLED device and preparation method thereof Pending CN112467050A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011308502.2A CN112467050A (en) 2020-11-20 2020-11-20 OLED device and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011308502.2A CN112467050A (en) 2020-11-20 2020-11-20 OLED device and preparation method thereof

Publications (1)

Publication Number Publication Date
CN112467050A true CN112467050A (en) 2021-03-09

Family

ID=74837444

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011308502.2A Pending CN112467050A (en) 2020-11-20 2020-11-20 OLED device and preparation method thereof

Country Status (1)

Country Link
CN (1) CN112467050A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115542613A (en) * 2022-11-29 2022-12-30 观洲微电子(上海)有限公司 Manufacturing process of TFT display module with AMOLED as backlight source

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170025494A1 (en) * 2015-07-22 2017-01-26 Grantwood Limited Structure of an organic device, method and apparatus for patterning the same
CN107403882A (en) * 2017-08-08 2017-11-28 京东方科技集团股份有限公司 A kind of preparation method of flexible display
US9829710B1 (en) * 2016-03-02 2017-11-28 Valve Corporation Display with stacked emission and control logic layers
CN109301083A (en) * 2018-09-17 2019-02-01 武汉华星光电半导体显示技术有限公司 Protective film, OLED encapsulating structure and the preparation method of OLED encapsulating structure
CN111029397A (en) * 2019-12-27 2020-04-17 安徽熙泰智能科技有限公司 Silicon-based OLED micro-display device and preparation method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170025494A1 (en) * 2015-07-22 2017-01-26 Grantwood Limited Structure of an organic device, method and apparatus for patterning the same
US9829710B1 (en) * 2016-03-02 2017-11-28 Valve Corporation Display with stacked emission and control logic layers
CN107403882A (en) * 2017-08-08 2017-11-28 京东方科技集团股份有限公司 A kind of preparation method of flexible display
CN109301083A (en) * 2018-09-17 2019-02-01 武汉华星光电半导体显示技术有限公司 Protective film, OLED encapsulating structure and the preparation method of OLED encapsulating structure
CN111029397A (en) * 2019-12-27 2020-04-17 安徽熙泰智能科技有限公司 Silicon-based OLED micro-display device and preparation method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115542613A (en) * 2022-11-29 2022-12-30 观洲微电子(上海)有限公司 Manufacturing process of TFT display module with AMOLED as backlight source

Similar Documents

Publication Publication Date Title
US8038820B2 (en) Method of stacking flexible substrate
US20200203608A1 (en) Stretchable electronic device and method of fabricating the same
WO2018089919A2 (en) Integrated packaging devices and methods with backside interconnections
US9620659B2 (en) Preparation method of glass film, photoelectric device and packaging method thereof, display device
WO2019051940A1 (en) Method for manufacturing a flexible oled panel
CN103378314A (en) Transfer film for attaching protection film to flat panel display and method for manufacturing the flat panel display using the same
CN106935547B (en) Manufacturing method of flexible display device and flexible display device
KR101894030B1 (en) Flexible hybrid substrate and display device having the same
CN101246895A (en) Glass dam structures for imaging devices chip scale package
Steinmann et al. Encapsulation requirements to enable stable organic ultra-thin and stretchable devices
CN112467050A (en) OLED device and preparation method thereof
CN105679799A (en) Large-size AMOLED display substrate and manufacturing method thereof
Someya et al. Ultraflexible organic electronics
CN111653593A (en) Display panel, manufacturing method thereof and display device
US10468600B2 (en) Method of fabricating an organic electroluminescent display device
Kim et al. Ultrathin flexible thin film transistors with CYTOP encapsulation by debonding process
EP3399555A1 (en) Flexible display apparatus and manufacturing method therefor
Tripathi et al. A conformable active matrix LED display
JP2020037691A (en) Adhesive sheet for display and display including the same
CN112802886A (en) Micro OLED display and production method thereof
US11450823B2 (en) Method of manufacturing flexible substrate
KR20200140718A (en) Laminated substrate, manufacturing method for electronic device, and manufacturing method for laminated substrate
US11700763B2 (en) Curved display and lighting device based on a Miura-Ori structure
CN216749954U (en) Silicon-based OLED micro-display
CN108807473A (en) A kind of display chip for virtual reality

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20210309